An angle-adjustable microscale capacitance measuring instrument

Abstract

The application discloses an angle-adjustable micro-scale capacitive measuring instrument, and relates to the technical field of high-precision measuring instruments, which is used for detecting the relative position between two adjacent lenses in a telescope mirror array and comprises a target carrier, a sensor carrier, two fixing units and an angle adjusting unit. The target carrier is used for mounting a measured target object. The sensor carrier is arranged opposite to the target carrier and is provided with a sensing element for detecting the position of the measured target object. The two fixing units are respectively used for fixing the target carrier and the sensor carrier relative to the lenses. The angle adjusting unit is used for detecting the angle difference of the fixing units on the two lenses, adjusting the angle of the target carrier relative to the fixing unit when being fixed, and keeping the measured target object and the sensing element in parallel. The application can ensure that the sensing element and the measured target object are strictly parallel and opposite, completely eliminate the oblique detection deviation caused by the lens included angle, and greatly improve the precision of micro-scale capacitive measurement.

Description

Technical Field

[0001] This invention relates to the field of high-precision measuring instrument technology, specifically to an angle-adjustable microscale capacitive measuring instrument. Background Technology

[0002] In the field of astronomical observation, to improve the light throughput and angular resolution of telescopes, their reflector systems often employ an array structure of multiple sub-mirrors. This structure requires each sub-mirror to maintain a precise spatial position during assembly and operation to ensure the optical co-phase characteristics of the reflector. Therefore, high-precision displacement sensors need to be deployed between adjacent sub-mirrors to detect their relative positions (especially height differences) in real time, providing data for the position correction of the active optics system. Microscale capacitive measurement sensors have become the mainstream choice due to their high accuracy and fast response.

[0003] Adjacent mirrors in an astronomical telescope reflector array are not coplanar, but arranged at a predetermined angle. Ideally, adjacent mirrors are symmetrical about the same reference plane. However, in actual assembly, due to factors such as processing, technology, and environment, the actual angle between mirrors has random errors and no fixed standard. The core requirement of capacitive measurement is that the sensing element and the target object are strictly parallel and aligned. However, the angle between the mirrors will cause the two to be distributed at an angle with the mirrors. The sensor detects the oblique distance, which not only directly leads to the deviation in height difference detection, but also greatly increases the difficulty of the detection. Summary of the Invention

[0004] The purpose of this invention is to provide an angle-adjustable microscale capacitive measuring instrument to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an angle-adjustable microscale capacitive measuring instrument for detecting the relative position between two adjacent mirrors in a telescope reflector array, comprising:

[0006] The target carrier is used to mount the target object being tested.

[0007] A sensor carrier is arranged opposite to a target carrier and is equipped with a sensing element for detecting the position of the target object.

[0008] The fixing unit is provided in two sets; the two sets of fixing units are respectively used to fix the target carrier and the sensor carrier relative to the lens.

[0009] An angle adjustment unit is used to detect the angle difference between the fixed units on the two lenses and adjust the angle between the target carrier and the fixed unit when they are relatively fixed, so that the target object and the sensing element are kept parallel.

[0010] The angle adjustment unit includes a rod, a block, and an actuator; the rod can be inserted into the block, and there are two rods in a one-to-one correspondence; the two blocks are respectively installed on two fixed units; a fixed block is fixedly connected to each of the two rods; the two fixed blocks are hinged by a rotating shaft; one of the fixed blocks is a telescopic structure, and the other fixed block is fixedly connected to the rotating shaft; an angle sensor for measuring the rotation angle of the fixed blocks is installed on the rotating shaft; the actuator is configured to rotate the target carrier relative to the fixed unit by a specified angle, which is the same as the relative rotation angle of the two fixed blocks.

[0011] As a further embodiment of the present invention, the target carrier consists of a target plate and a support plate; the target plate and the support plate are hinged together; the support plate can be fixed relative to the lens by a fixing unit; the target object to be tested is mounted on the target plate.

[0012] As a further embodiment of the present invention, the execution unit includes an angle sensor two and a driving member; the driving member is mounted on the support plate and is used to drive the target plate to rotate relative to the support plate; the angle sensor two is mounted between the target plate and the support plate and is used to detect the angle of the target plate relative to the support plate.

[0013] As a further embodiment of the present invention, the driving component is configured as a cylinder, and the two ends of the cylinder are respectively connected to the target plate and the support plate.

[0014] As a further embodiment of the present invention, the fixing unit includes a base and a rooting block; the rooting block is fixed to the lens by adhesive; a contact block is provided on the side of the base, and the contact block abuts against the side of the lens; the base is connected to the rooting block by a fastening component, and the fastening component is configured to make the base abut against the surface of the lens and fix it relative to the rooting block.

[0015] As a further aspect of the present invention, a height adjustment mechanism is provided between the fixing unit and the support plate; the height adjustment mechanism is configured to keep the support plate relatively fixed to the fixing unit at multiple different heights.

[0016] As a further embodiment of the present invention, the height adjustment mechanism includes an adjustment plate; the adjustment plate is disposed between the base and the support plate; the base has at least three stepped grooves; the bottom of the adjustment plate is fixedly connected with a ball bearing of the same number as the stepped grooves, and the ball bearings slide in cooperation with the corresponding stepped grooves.

[0017] As a further embodiment of the present invention, the two adjacent steps of the stepped groove are connected by an inclined plane.

[0018] As a further embodiment of the present invention, the fastening assembly includes a screw, a nut, a first elastic element, a locking block, a locking groove, a locking member, and a second elastic element; the screw is fixedly connected to the anchor block via the locking block, and the screw is threadedly connected to the nut; the first elastic element is installed between the nut and the adjusting plate, and the nut can apply elastic pressure to the adjusting plate through the first elastic element; the locking groove is formed on the support plate, and the locking member is fixedly installed on the top of the nut and can cooperate with the locking groove; the second elastic element is installed in the locking groove; the locking member can apply elastic pressure to the support plate through the second elastic element.

[0019] As a further embodiment of the present invention, at least three contact points are provided between the adjusting plate and the support plate, and the contact points are fixed to the adjusting plate or the support plate.

[0020] Compared with the prior art, the beneficial effects of the present invention are:

[0021] This invention, through the setting of an angle adjustment unit, can accurately detect the actual angle difference between adjacent lenses of a telescope's reflector array, and adaptively adjust the angle of the target object accordingly. This ensures that the sensing element and the target object are always strictly parallel and aligned, completely eliminating oblique detection deviations caused by lens angles, significantly improving the accuracy of microscale capacitive measurements, and providing accurate and reliable data support for the position correction of the telescope's active optical system. Furthermore, through the setting of a height adjustment mechanism, the target carrier or sensor carrier can be pre-adjusted to a suitable position matching the actual height of the mirror surface during installation, ensuring that the initial distance between the sensing element and the target object falls within the sensor's high-precision working range. This significantly improves the adaptability to different mirror configurations and the fault tolerance of on-site assembly. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0023] Figure 2 for Figure 1 Enlarged view of a portion of point A in the middle;

[0024] Figure 3 This is a schematic diagram showing the connection relationship between the target carrier and the fixing unit of the present invention;

[0025] Figure 4 This is a schematic diagram of the angle adjustment unit of the present invention.

[0026] Figure 5 This is an exploded view of the target carrier and angle adjustment unit of the present invention.

[0027] Figure 6 This is a cross-sectional view of the installation position of the fastening components and height adjustment mechanism of the present invention;

[0028] Figure 7 for Figure 6 Enlarged view of a section at point B in the middle;

[0029] Figure 8 for Figure 6 Enlarged view of a section at point C;

[0030] Figure 9 This is a schematic diagram showing the connection relationship between the sensor carrier and the fixing unit of the present invention;

[0031] Figure 10 This is a schematic diagram of the working state of the measuring instrument of the present invention;

[0032] Figure 11 for Figure 10 AA cross-section diagram (initial state of the rooting block installed on the target carrier on the lens);

[0033] Figure 12 for Figure 10 AA cross-sectional view (working state of the target carrier after the angle adjustment unit is working).

[0034] The attached figures are labeled as follows:

[0035] 10-Lens, 20-Target carrier, 21-Target plate, 22-Support plate, 23-Target object under test, 24-Hinge, 30-Sensor carrier, 31-Sensing element, 40-Fixing unit, 41-Base, 411-Contact block, 42-Rooting block, 43-Fastening assembly, 431-Screw, 432-Nut, 433-First elastic element, 434-Clip block, 435-Locking groove, 436-Locking component, 437-Second elastic element, 50-Angle adjustment unit, 51-Insertion rod, 52-Insertion block, 53-Fixing block, 54-Rotating shaft, 55-Angle sensor one, 56-Angle sensor two, 57-Cylinder, 61-Adjusting plate, 62-Step groove, 63-Ball, 7-Contact point. Detailed Implementation

[0036] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0037] Please see Figures 1-11This invention provides a technical solution: an angle-adjustable microscale capacitive measuring instrument for detecting the relative position between two adjacent mirrors 10 in a telescope reflector array, comprising a target carrier 20, a sensor carrier 30, a fixing unit 40, and an angle adjustment unit 50; the target carrier 20 is used to mount the target object 23; the sensor carrier 30 is arranged opposite to the target carrier 20 and is provided with a sensing element 31 for detecting the position of the target object 23; the fixing unit 40 is provided in two sets; the two sets of fixing units 40 are respectively used to fix the target carrier 20 and the sensor carrier 30 relative to the mirrors 10; the angle adjustment unit 50 is used to detect the angle difference between the fixing units 40 on the two mirrors 10, and adjust the angle between the target carrier 20 and the fixing unit 40 when they are fixed relative to each other according to the angle difference, so that the target object 23 and the fixed unit 40 are relatively fixed. The sensing element 31 remains in a parallel state; the angle adjustment unit 50 includes a rod 51, a block 52, and an actuator; the rod 51 can be inserted into the block 52, and there are two rods that correspond one-to-one; the two blocks 52 are respectively installed on the two fixed units 40; a fixing block 53 is fixedly connected to each of the two rods 51; the two fixing blocks 53 are hinged by a pivot 54; one of the fixing blocks 53 is a telescopic structure, and the other fixing block 53 is fixed to the pivot 54. The telescopic fixing block 53 can compensate for the angle and displacement deviations generated when the two fixed units 40 are fixed to the lens 10; an angle sensor 55 for measuring the rotation angle of the fixing block 53 is installed on the pivot 54; the actuator is configured to rotate the target carrier 20 relative to the fixed unit 40 by a specified angle, which is the same as the relative rotation angle of the two fixing blocks 53.

[0038] refer to Figures 1-4 , Figure 10 and Figure 11In this embodiment, the target object 23 can be a metal plate, and the sensing element 31 is a capacitive sensor. First, two fixing units 40 are fixed to two adjacent mirrors 10 of the telescope reflector array. Under the action of the fixing units 40, the target carrier 20 and the sensor carrier 30 are synchronously installed on the mirrors 10. The sensor carrier 30 is fixed relative to the fixing units 40, and the target carrier 20 can rotate relative to the fixing units 40 before the angle is adjusted. The angle adjustment unit 50 detects the angle difference between the fixing units 40 on the two mirrors 10 and synchronously adjusts the angle of the target carrier 20. This keeps the target object 23 parallel to the sensing element 31, eliminating the angle caused by the mirrors 10. The oblique detection deviation ensures the accuracy of the relative position measurement of the two lenses 10. The working principle of the angle adjustment unit 50 is as follows: After the fixing unit 40 is fixed to the lens 10, the included angle of the two lenses 10 is transmitted to the plugged rod 51 and plug block 52 through the fixing unit 40, thereby driving the two hinged fixing blocks 53 to rotate relative to each other around the rotating shaft 54. The angle sensor 55 on the rotating shaft 54 ​​collects the rotation angle and transmits it to the execution unit. The execution unit drives the target carrier 20 to rotate relative to the fixing unit 40 by the same angle as the fixing block 53, so that the target object 23 is rotated to a state parallel and facing the sensing element 31, ensuring that the target object 23 and the sensing element 31 are in a parallel and facing state during subsequent detection.

[0039] Specifically, such as Figure 3 and Figure 5 As shown, the target carrier 20 consists of a target plate 21 and a support plate 22. The target plate 21 and the support plate 22 are hinged together by a hinge 24, allowing the target plate 21 to rotate with the hinge 24, thereby adjusting the posture of the target object 23 on it. The support plate 22 can be fixed relative to the lens 10 through the fixing unit 40, providing a stable mounting and support foundation for the target plate 21. The target object 23 is mounted on the target plate 21. Under the drive of the actuator, the target plate 21 can rotate around the hinge 24 to a state parallel and directly opposite the sensing element 31, ensuring that the detection posture of the target object 23 and the sensing element 31 is consistent, providing accurate conditions for measuring the relative position of the two lenses 10.

[0040] Specifically, such as Figure 3 , Figure 5 , Figure 11 and Figure 12 As shown, the actuator includes an angle sensor 56 and a drive unit 57; the drive unit 57 is mounted on the support plate 22 and is used to drive the target plate 21 to rotate relative to the support plate 22; the angle sensor 56 is mounted between the target plate 21 and the support plate 22 and is used to detect the angle of the target plate 21 relative to the support plate 22; Reference Figure 11After the fixing unit 40 is installed on the lens 10, in the initial state, the target object 23 on the target plate 21 and the sensing element 31 are not parallel, and the angle between the target object 23 and the sensing element 31 is the angle between the two lenses 10. Subsequently, the driving component 57 drives the target plate 21 to rotate relative to the support plate 22, and the angle sensor 56 installed between the two detects the relative angle in real time until the rotation angle of the target plate 21 is consistent with the angle recorded by the angle sensor 55. At this time, the driving component 57 stops working, and the target plate 21 rotates to the position where the target plate 21 is at ... Figure 12 As shown, this allows for precise adjustment of the parallel orientation of the target object 23 and the sensing element 31.

[0041] Specifically, such as Figure 3 As shown, the driving component 57 is configured as a cylinder, with both ends of the cylinder connected to the target plate 21 and the support plate 22, respectively.

[0042] Specifically, such as Figure 6 and Figure 7 As shown, the fixing unit 40 includes a base 41 and a rooting block 42; the rooting block 42 is fixed to the lens 10 by adhesive; a contact block 411 is provided on the side of the base 41, and the contact block 411 abuts against the side of the lens 10; the base 41 is connected to the rooting block 42 by a fastening component 43, which is configured to make the base 41 press against the surface of the lens 10 and fix it relative to the rooting block 42; the fixing unit 40 is based on the rooting block 42 glued to the lens 10, and the contact block 411 on the side of the base 41 abuts against the side of the lens for positioning, and then the fastening component 43 locks and fixes the base 41 and the rooting block 42, so that the fixing unit 40 and the lens 10 form a stable rigid connection to transmit the lens posture to the angle adjustment unit 50; by using adhesive to fix the rooting block 42 to the lens 10, mechanical attachment points are avoided on the vulnerable optical surface, effectively protecting the optical performance and structural integrity of the lens 10.

[0043] Specifically, such as Figure 6 As shown, a height adjustment mechanism is provided between the fixing unit 40 and the support plate 22. The height adjustment mechanism is configured to keep the support plate 22 relatively fixed to the fixing unit 40 at multiple different heights. In actual assembly, the height difference between adjacent lenses 10 fluctuates far beyond the sensor's own nanometer-level measurement stroke. Specifically, optical cophase requires the sensor to have extremely high resolution and extremely small range, which cannot directly cover geometric height differences of several millimeters. However, in this embodiment, through the height adjustment mechanism, the target carrier 20 or sensor carrier 30 can be pre-adjusted to a suitable position that matches the actual height of the mirror during installation, so that the initial distance between the sensing element 31 and the measured target object 23 falls within the high-precision working range of the sensor.

[0044] Specifically, such as Figure 6 and Figure 8As shown, the height adjustment mechanism includes an adjustment plate 61; the adjustment plate 61 is disposed between the base 41 and the support plate 22; the base 41 has at least three stepped grooves 62; the bottom of the adjustment plate 61 is fixedly connected with the same number of ball bearings 63 as the stepped grooves 62, and the ball bearings 63 slide in cooperation with the corresponding stepped grooves 62; the stepped structure of the stepped grooves provides the adjustment plate 61 with multiple fixed height levels, each step corresponding to a stable installation height, ensuring the accuracy of height adjustment levels. With at least three stepped grooves 62 and ball bearings 63, the adjustment plate 61 and the base 41 can be stably contacted through three-point support; by pushing the adjustment plate 61, the ball bearings 63 slide between different steps of the stepped grooves 62, which can change the height of the adjustment plate 61 relative to the base 41, thereby driving the support plate 22 and the target carrier 20 to achieve precise height adjustment, adapting to the height requirements under different testing conditions.

[0045] Specifically, such as Figure 8 As shown, adjacent steps of the stepped groove 62 are connected by an inclined plane; the inclined plane between adjacent steps provides a smooth sliding transition path for the ball bearing 63. When the adjustment plate 61 is pushed to switch heights, the ball bearing 63 can smoothly roll into the next step along the inclined plane, avoiding jamming or impact and ensuring the smoothness of the adjustment operation; when the ball bearing 63 rolls into the corresponding step, the horizontal surface of the step, together with the inclined plane, can act as a stop, which can stably lock the adjustment plate 61 at the target height position, prevent displacement after adjustment, and maintain the stability of the installation height of the target carrier 20.

[0046] Specifically, such as Figure 6 and Figure 7As shown, the fastening assembly 43 includes a screw 431, a nut 432, a first elastic element 433, a locking block 434, a locking groove 435, a locking member 436, and a second elastic element 437. The screw 431 is fixedly connected to the anchor block 42 via the locking block 434, and the screw 431 is threadedly connected to the nut 432. The first elastic element 433 is installed between the nut 432 and the adjusting plate 61, and the nut 432 can apply elastic pressure to the adjusting plate 61 through the first elastic element 433. The locking groove 435 is formed on the support plate 22, and the locking member 436 is fixedly installed on the top of the nut 432 and can cooperate with the locking groove 435. The second elastic element 437 is installed in the locking groove 435. The locking member 436 can apply elastic pressure to the support plate 22 through the second elastic element 437. 31 is rigidly fixed by the locking block 434 and the anchoring block 42, and forms a threaded engagement with the nut 432, providing a stable force transmission foundation for the fastening unit and ensuring that the force transmission direction is precise and controllable; the first elastic element 433 is installed between the nut 432 and the adjusting plate 61. When the nut 432 is tightened, the nut moves axially along the screw 431, and the first elastic element 433 applies elastic preload to the adjusting plate 61, so that the adjusting plate 61, the base 41 and the anchoring block 42 form an elastic fit, which not only ensures the tightness of the connection, but also buffers vibration and small displacement, and avoids stress concentration caused by rigid connection; the locking member 436 rotates and moves synchronously with the nut 432, and applies elastic pressure to the support plate 22 through the second elastic element 437, so that the support plate 22 is pressed against the top of the adjusting plate 61.

[0047] Specifically, such as Figure 6 and Figure 8 As shown, at least three contacts 7 are provided between the adjusting plate 61 and the support plate 22, and the contacts 7 are fixed to the adjusting plate 61 or the support plate 22; the at least three contacts 7 form a stable three-point support structure, providing rigid support between the adjusting plate 61 and the support plate 22.

[0048] This invention, through the setting of the angle adjustment unit 50, can accurately detect the actual angle difference between adjacent lenses 10 of the telescope reflector array, and adaptively adjust the angle of the target object 23 accordingly, ensuring that the sensing element 31 and the target object 23 are always strictly parallel and aligned, completely eliminating the oblique detection deviation caused by the angle of the lenses 10, greatly improving the accuracy of microscale capacitive measurement, and providing accurate and reliable data support for the position correction of the telescope's active optical system; through the setting of the height adjustment mechanism, the target carrier 20 or sensor carrier 30 can be pre-adjusted to a suitable position that matches the actual height of the mirror during installation, so that the initial distance between the sensing element 31 and the target object 23 falls within the high-precision working range of the sensor, greatly improving the adaptability to different spliced ​​mirror configurations and the fault tolerance of on-site assembly.

[0049] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0050] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An angle-adjustable microscale capacitive measuring instrument for detecting the relative position between two adjacent mirrors (10) in a telescope reflector array, characterized in that: include: Target carrier (20) is used to mount the target object (23) under test. The sensor carrier (30) is arranged opposite to the target carrier (20), and is provided with a sensing element (31) for detecting the position of the target object (23). The fixing unit (40) is provided in two sets; the two sets of fixing units (40) are respectively used to fix the target carrier (20) and the sensor carrier (30) relative to the lens (10); Angle adjustment unit (50) is used to detect the angle difference between the fixed unit (40) on the two lenses (10) and adjust the angle between the target carrier (20) and the fixed unit (40) when they are fixed relative to each other, so that the target object (23) and the sensing element (31) remain parallel. The angle adjustment unit (50) includes a rod (51), a block (52), and an actuator; the rod (51) can be inserted into the block (52), and there are two corresponding rods; the two blocks (52) are respectively installed on two fixed units (40); a fixed block (53) is fixedly connected to each of the two rods (51); the two fixed blocks (53) are hinged by a rotating shaft (54); one of the fixed blocks (53) is a telescopic structure, and the other fixed block (53) is fixedly connected to the rotating shaft (54); an angle sensor (55) for measuring the rotation angle of the fixed block (53) is installed on the rotating shaft (54); the actuator is configured to rotate the target carrier (20) relative to the fixed unit (40) by a specified angle, which is the same as the relative rotation angle of the two fixed blocks (53).

2. The angle-adjustable microscale capacitive measuring instrument according to claim 1, characterized in that: The target carrier (20) consists of a target plate (21) and a support plate (22); the target plate (21) and the support plate (22) are hinged together by a hinge (24); the support plate (22) can be fixed relative to the lens (10) by a fixing unit (40); the target object (23) to be tested is mounted on the target plate (21).

3. The angle-adjustable microscale capacitive measuring instrument according to claim 2, characterized in that: The actuator includes an angle sensor (56) and a drive (57); the drive (57) is mounted on the support plate (22) and is used to drive the target plate (21) to rotate relative to the support plate (22); the angle sensor (56) is mounted between the target plate (21) and the support plate (22) and is used to detect the angle of the target plate (21) relative to the support plate (22).

4. The angle-adjustable microscale capacitive measuring instrument according to claim 3, characterized in that: The driving component (57) is configured as a cylinder, and the two ends of the cylinder are respectively connected to the target plate (21) and the support plate (22).

5. The angle-adjustable microscale capacitive measuring instrument according to claim 2, characterized in that: The fixing unit (40) includes a base (41) and a rooting block (42); the rooting block (42) is fixed to the lens (10) by adhesive; a contact block (411) is provided on the side of the base (41), and the contact block (411) abuts against the side of the lens (10); the base (41) is connected to the rooting block (42) by a fastening component (43), and the fastening component (43) is configured to make the base (41) abut against the surface of the lens (10) and fix it relative to the rooting block (42).

6. The angle-adjustable microscale capacitance measuring instrument according to claim 5, characterized in that: A height adjustment mechanism is provided between the fixing unit (40) and the support plate (22); the height adjustment mechanism is configured to keep the support plate (22) relatively fixed to the fixing unit (40) at multiple different heights.

7. The angle-adjustable microscale capacitive measuring instrument according to claim 6, characterized in that: The height adjustment mechanism includes an adjustment plate (61); the adjustment plate (61) is disposed between the base (41) and the support plate (22); the base (41) has at least three stepped grooves (62); the bottom of the adjustment plate (61) is fixedly connected with the same number of ball bearings (63) as the stepped grooves (62), and the ball bearings (63) slide in cooperation with the corresponding stepped grooves (62).

8. The angle-adjustable microscale capacitive measuring instrument according to claim 7, characterized in that: The stepped groove (62) has two adjacent steps connected by an inclined plane.

9. The angle-adjustable microscale capacitive measuring instrument according to claim 7, characterized in that: The fastening assembly (43) includes a screw (431), a nut (432), a first elastic element (433), a locking block (434), a locking groove (435), a locking element (436), and a second elastic element (437); the screw (431) is fixedly connected to the anchor block (42) via the locking block (434), and the screw (431) is threadedly connected to the nut (432); the first elastic element (433) is installed between the nut (432) and the adjusting plate (61), and the... The nut (432) can apply elastic pressure to the adjusting plate (61) through the first elastic element (433); the locking groove (435) is opened on the support plate (22), and the locking member (436) is fixedly installed on the top of the nut (432) and can cooperate with the locking groove (435); the second elastic element (437) is installed in the locking groove (435); the locking member (436) can apply elastic pressure to the support plate (22) through the second elastic element (437).

10. An angle-adjustable microscale capacitive measuring instrument according to claim 7, characterized in that: At least three contacts (7) are provided between the adjusting plate (61) and the support plate (22), and the contacts (7) are fixed to the adjusting plate (61) or the support plate (22).

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