Wireless test method, system, apparatus and program for MEMS sensor

Abstract

The wireless test method for the MEMS sensor comprises the following steps: pre-processing voltage data by a mobile terminal, and calculating the sensitivity of the currently tested sensor: pre-processing the sensor data: performing moving average filtering processing on the sensor data, determining a voltage reference value, and calculating the sensitivity of the currently tested sensor; in the process of testing the sensitivity of the sensor, when the sensor is subjected to external excitation, the output voltage of the sensor changes, the variable quantity of the voltage of the sensor relative to the reference value is calculated, and the ratio of the variable quantity to the reference value is calculated as the sensitivity of the sensor; presetting a maximum threshold value and a minimum threshold value of the sensitivity; if the sensitivity of the sensor is between the sensitivity minimum threshold value and the sensitivity maximum threshold value, the sensitivity of the sensor meets the requirement, and if the sensitivity of the sensor is not between the sensitivity minimum threshold value and the sensitivity maximum threshold value, the sensitivity of the sensor does not meet the requirement; and displaying the sensitivity data of the sensor meeting the threshold requirement.

Description

Technical Field

[0001] This invention relates to the field of sensor technology, and more specifically to wireless testing methods, systems, devices, and procedures for MEMS sensors. Background Technology

[0002] As the core component for sensing external physical or chemical quantities, the performance of sensors directly affects the accuracy of the entire detection system. Among numerous performance indicators, sensitivity is defined as the ratio of the change in the sensor's output to the corresponding change in its input. It is a decisive parameter for measuring the sensor's ability to respond to changes in the measured parameter, thus requiring the measurement of sensor sensitivity. Current sensor sensitivity testing equipment transmits data via cable connections. The complex cable connections limit testing scenarios, especially when physical operations such as vibration or tilting of the sensor are required, as the cables can introduce interference. Summary of the Invention

[0003] The purpose of this invention is to provide a wireless testing method for MEMS sensors, in which a mobile terminal uses the wireless testing method for MEMS sensors to perform wireless testing of the sensors.

[0004] On the one hand, a wireless testing method for MEMS sensors is provided, performed on a mobile terminal, including: The mobile terminal preprocesses the voltage data of the sensor received from the MEMS sensor testing equipment, and calculates the sensitivity of the sensor currently being tested based on the voltage data. Specifically, this includes: The mobile terminal performs a moving average filtering process on the voltage data of the sensor received from the MEMS sensor testing equipment. Determine the voltage reference value; The sensitivity of the sensor is calculated as follows: In the process of testing the sensitivity of a sensor, when the sensor is subjected to external excitation, the voltage of the sensor changes. First, the change in the current voltage of the sensor relative to the voltage reference value is calculated. Then, the ratio of the change to the voltage reference value is calculated, which is the sensor sensitivity. Preset the maximum and minimum thresholds for sensitivity; If the sensor sensitivity is between the minimum and maximum sensitivity thresholds, the sensor sensitivity meets the requirements. If the sensor sensitivity is not between the minimum and maximum sensitivity thresholds, the sensor sensitivity does not meet the requirements. The mobile terminal issues a warning message and records the sensor sensitivity that does not meet the requirements. The sensor sensitivity that meets the threshold requirements will be displayed.

[0005] On the other hand, a wireless test system for MEMS sensors is provided, including: The communication module is used to establish a wireless data transmission channel between the mobile terminal and the MEMS sensor testing equipment. The parameter configuration module is used to remotely set test parameters for the MEMS sensor test equipment via a mobile terminal. The MEMS sensor test equipment tests the sensor according to the test parameters to obtain the sensor's voltage data. The parameter configuration module includes a channel selection unit, a gain adjustment unit, and a sampling rate setting unit. The channel selection unit is used to select one or more sensors for testing. The gain adjustment unit is used to adjust the amplification factor of the sensor signal. It can be selected as either voltage-adjusted gain mode or resistance-adjusted gain mode. A sampling rate setting unit is used to set the sampling frequency of the voltage data of the sensor; A data acquisition module is used for the mobile terminal to receive voltage data from the sensor from the MEMS sensor testing equipment; The sensor sensitivity calculation module is used by the mobile terminal to preprocess the voltage data of the sensor received from the MEMS sensor testing equipment, and to calculate the sensitivity of the sensor currently being tested based on the voltage data of the sensor. The data management module is used to allow the mobile terminal to send commands to the MEMS sensor testing equipment during sensor testing to pause or resume the acquisition and display of sensor voltage data, clear the currently displayed historical data curves and start plotting again, and export the test data or charts to a standard format for subsequent analysis. The logging module is used to generate test logs on the mobile terminal during the testing of the sensor. The visualization display module includes a multi-channel curve plotting unit and a single-channel curve plotting unit, which are used to visualize sensor data. The multi-channel graph unit can simultaneously plot real-time data curves from multiple sensors; wherein, the real-time data curve uses the sensor voltage data as the vertical axis and the time of reading the sensor data as the horizontal axis. The single-channel graph unit displays the real-time value of a single parameter of the sensor, that is, the real-time data of a certain parameter of the sensor obtained by testing, which is used to realize real-time monitoring of a single parameter of the sensor.

[0006] On the other hand, a wireless testing device for MEMS sensors is provided, including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to implement the wireless testing method for MEMS sensors.

[0007] On the other hand, a computer program product is provided, including a computer program that, when executed by a processor, implements the wireless testing method for MEMS sensors.

[0008] The advantages of this invention are as follows: (1) The mobile terminal and the MEMS sensor testing equipment are wirelessly connected via Bluetooth. The MEMS sensor testing equipment can be operated on the mobile terminal to complete the sensor testing process, freeing it from the constraints of cables and making sensor testing more flexible. The mobile terminal can be a smartphone or tablet computer, eliminating the need for dedicated equipment and reducing testing costs and barriers to entry.

[0009] (2) The method of calculating the sensitivity of the sensor can be implemented on the mobile terminal through software programming. After the mobile terminal and the MEMS sensor testing equipment establish communication, the mobile terminal can automatically complete the acquisition of the voltage data of the sensor, calculate the sensitivity of the sensor based on the acquired data, and display the sensitivity data of the sensor in real time. The operation is simple and convenient. Attached Figure Description

[0010] Figure 1 This is a flowchart of the wireless testing method for MEMS sensors in this embodiment.

[0011] Figure 2 This is the interface of the wireless testing system for MEMS sensors in this embodiment, which displays real-time graphs of multi-channel data and corresponding numerical values.

[0012] Figure 3 This is the interface of the wireless testing system for MEMS sensors in this embodiment, showing the testing interface and operation buttons for specific parameters. Detailed Implementation

[0013] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and are not intended to limit the scope of the invention.

[0014] In the description of this invention, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer" used to indicate orientation or positional relationships are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0015] Current sensor sensitivity testing equipment is often bulky and difficult to carry, making it unsuitable for rapid on-site testing. Furthermore, the data transmission of sensitivity testing equipment via cable connections is complex and restricts testing scenarios, especially when physical operations such as vibration or tilting of the sensor are required, as the cables can introduce interference.

[0016] To address the aforementioned technical problems, this embodiment provides a wireless testing method for MEMS sensors. This wireless testing method for MEMS sensors is executed on a mobile terminal, as described above. Figure 1 Specifically, it includes steps S1, S2, S3, S4, S5, S6 and S7.

[0017] The mobile terminal and the MEMS sensor testing equipment are respectively configured with corresponding wireless communication modules, such as Bluetooth modules. The mobile terminal can be a smartphone, tablet computer, etc., as long as it can run programs.

[0018] Step S1: Establish a wireless data transmission channel between the mobile terminal and the MEMS sensor testing equipment via Bluetooth. After the mobile terminal establishes a connection with the MEMS sensor testing equipment, the graphical interface of the mobile terminal will display the text message "Bluetooth connected".

[0019] The mobile terminal and the MEMS sensor testing equipment are wirelessly connected via Bluetooth, allowing the testing process to be completed directly from the mobile terminal. This eliminates the constraints of cables, making sensor testing more flexible and suitable for various complex environments and mobile scenarios. The mobile terminal can be a smartphone or tablet, eliminating the need for dedicated equipment and reducing testing costs and barriers to entry.

[0020] Step S2: Before the MEMS sensor testing equipment starts testing the sensor, test parameters are set remotely for the MEMS sensor testing equipment via a mobile terminal. The MEMS sensor testing equipment then tests the sensor according to the test parameters to obtain the sensor's voltage data.

[0021] The step of remotely setting test parameters for the MEMS sensor testing equipment via a mobile terminal specifically involves: The channel selection parameter is set to determine which one or more sensors to test. In this embodiment, setting the channel selection parameter means setting the number of sensors to be tested. For example, setting the channel selection parameter to 1 means testing one sensor, and setting the channel selection parameter to 2 means testing two sensors simultaneously. By setting the channel selection parameter, it is possible to test multiple channels simultaneously.

[0022] To set the gain adjustment parameters, the acquired sensor signal needs to be amplified during the test. The amplification factor of the sensor signal can be adjusted by setting the gain adjustment parameters. Specifically, you can choose either voltage adjustment gain mode or resistance adjustment gain mode to set the gain adjustment parameters.

[0023] Voltage adjustment gain process: Step 1: Electrothermal conversion, using voltage to control temperature. The sensor has resistance; when voltage is applied to the sensor, current is generated. The current flowing through the resistor generates heat, and the sensor dissipates heat to the surrounding environment while heating. When the heating power equals the heat dissipation power, the temperature stabilizes. One voltage corresponds to one operating temperature.

[0024] The second step: thermal conversion, where temperature changes cause changes in material properties. For example, based on the thermal resistance effect, the resistance of a material changes with temperature.

[0025] Step 3: Signal acquisition, physical changes are converted into electrical signals.

[0026] The sensor is powered on and connected to the reading circuit (e.g., Wheatstone bridge, transimpedance amplifier). When the resistance of the sensor changes with temperature, the current or voltage in the circuit will change accordingly. This changing current or voltage is the final acquired signal, i.e., the gain controlled by voltage.

[0027] Resistor adjustment gain process: In a sensor testing system, signal gain is controlled by adjusting the resistance value. The working principle utilizes the negative feedback mechanism of an operational amplifier. The gain (i.e., amplification factor) of the amplifier is determined by the ratio of its surrounding resistances. Changing the resistance value can precisely change this ratio, thereby amplifying the weak signal from the sensor.

[0028] Most variable gain control circuits are built on operational amplifiers, which have extremely high open-loop gain.

[0029] One of the most typical applications is the in-phase amplifier, whose gain formula is: Formula (1) G is the gain (amplification factor) of the circuit. It is a feedback resistor, connected between the output and inverting input of the operational amplifier. It is the gain setting resistor, connected between the inverting input and ground (or reference point).

[0030] From formula (1), it can be seen that the gain G is related to the resistance. and The ratio is directly related. Therefore, by changing... or The gain of the entire circuit can be adjusted by changing the resistance value.

[0031] The sampling rate parameter is set to determine the frequency at which voltage data from the sensor is collected.

[0032] Step S3: The mobile terminal receives the voltage data of the sensor from the MEMS sensor testing device via the Bluetooth module.

[0033] Step S4: The mobile terminal preprocesses the voltage data of the sensor received from the MEMS sensor testing equipment, and calculates the sensitivity of the sensor currently being tested based on the voltage data. Specifically, this includes: Step S4.1: Perform moving average filtering on the voltage data of the sensor received from the MEMS sensor testing equipment. In order to eliminate high-frequency noise interference, perform moving average filtering on the raw data of the voltage output by the sensor collected within a sliding window according to the following formula (2).

[0034] Formula (2) in, This represents the raw data of the voltage collected from the sensor; Where N is the size of the sliding window, for example, N=10; in, This represents the sensor voltage obtained after performing a moving average filtering process on the raw voltage data of the sensor.

[0035] Step S4.2: Determine the voltage reference value of the sensor.

[0036] The method for determining the voltage reference value of the sensor includes: Method 1: The voltage reference value of the sensor can be calibrated by automatic zero-point calibration. For a sensor under test, when the sensor is in a static state without excitation, the voltage value read by the MEMS sensor testing equipment is used as the voltage reference value. .or, Method 2: Input a known voltage reference value via a mobile terminal. .

[0037] Step S4.3, calculate the sensor sensitivity, specifically: The sensitivity is calculated using the differential ratio method. During the test of the sensor's sensitivity, when the sensor is subjected to external excitation (such as acceleration or pressure change), the sensor voltage changes. First, the change in the sensor's current voltage relative to the voltage reference value is calculated. Then, the ratio of the change to the voltage reference value is the sensor sensitivity, as shown in formula (3).

[0038] Formula (3) in, The voltage of the sensor in its current state; in, The voltage reference value of the sensor; in, It is the change in the sensor's output voltage; Where K is a unit conversion factor, for example, converting the ratio value to mV / g or % . in, It is the calculated sensitivity value of the sensor.

[0039] Step S4.4: Preset the maximum and minimum sensitivity thresholds.

[0040] In this implementation, the maximum and minimum thresholds for the sensor's sensitivity can be set via a mobile terminal.

[0041] The sensor sensitivity is calculated based on the voltage data obtained from the test. It is then determined whether the sensor sensitivity is between the minimum and maximum sensitivity thresholds. If the sensor sensitivity is between the minimum and maximum sensitivity thresholds, the sensor sensitivity meets the requirements, and "qualified" is displayed on the mobile terminal accordingly.

[0042] If the sensor sensitivity is not between the minimum and maximum sensitivity thresholds, the sensor sensitivity does not meet the requirements. In this case, "unqualified" will be displayed on the mobile terminal, and a warning message will be issued. The warning message can be an audio reminder, a text reminder, etc. At the same time, the mobile terminal records the sensor sensitivity value that does not meet the requirements.

[0043] Step S4.5: Display the sensor sensitivity values ​​that meet the threshold requirements.

[0044] By comparing the calculated sensor sensitivity value with the maximum and minimum thresholds of the sensor sensitivity, a sensor sensitivity value that meets the requirements of the maximum and minimum thresholds is determined, and the mobile terminal displays the sensor sensitivity value.

[0045] In this embodiment, the above-mentioned method for calculating the sensitivity of the sensor can be implemented on a mobile terminal through software programming. After the mobile terminal and the MEMS sensor testing equipment establish communication, the mobile terminal can automatically complete the acquisition of the voltage data of the sensor, calculate the sensitivity of the sensor based on the acquired data, and display the sensor sensitivity data in real time. The operation is simple and convenient.

[0046] The mobile terminal preprocesses the voltage data of the sensor received from the MEMS sensor testing equipment, calculates the sensitivity of the sensor currently being tested based on the voltage data, and then includes the following steps: Step S5, visualize the sensor data, specifically including: The multi-channel display method allows for the simultaneous plotting of real-time data curves from multiple sensors based on their voltage data. The real-time data curves are plotted with the sensor voltage data on the vertical axis and the time of reading the sensor voltage data on the horizontal axis.

[0047] Single-channel display mode is used to display real-time data of a single parameter from a single sensor, enabling real-time monitoring of that single parameter. For example, multiple samples can be taken from a single parameter of a sensor, and the multiple sample data can be graphically displayed using single-channel display mode.

[0048] As attached Figure 2 As shown in the attached figure, the curve plotted on the left side uses the sensor's voltage data as the ordinate and the time of voltage reading as the abscissa to plot the sensor's voltage curve. On the right side of the figure, MEMS1...MEMS8 correspond to eight sensors. Selecting one sensor plots its voltage curve on the left side of the graphical interface; selecting multiple sensors plots their voltage curves on the right side of the interface.

[0049] The mobile terminal provides a graphical and touch-screen interface with good data visualization, which can intuitively display the real-time status of the sensor and is easy to operate.

[0050] Appendix Figure 2 In the middle, on the right side of the attached diagram, MEMS1...MEMS8, the voltage data of each sensor can be displayed after it.

[0051] The wireless testing method for MEMS sensors, after visualizing the sensor data, further includes step S6: generating a test log on a mobile terminal during the sensor testing process.

[0052] For example, after the mobile terminal and the MEMS sensor testing equipment successfully connect via Bluetooth, the system automatically records a test log, such as "log: Bluetooth connection successful".

[0053] The wireless testing method for MEMS sensors, during the testing process, generates a test log on a mobile terminal, and then includes the following steps: Step S7, data management, specifically includes: During the testing process of the MEMS sensor by the MEMS sensor testing equipment, the mobile terminal can send commands to the MEMS sensor testing equipment to pause or resume the acquisition and display of voltage data from the sensor, realizing real-time control of the voltage data acquisition process. The mobile terminal sends control commands to the MEMS sensor testing equipment wirelessly, making operation simple.

[0054] After completing the testing and plotting of the voltage data of a sensor, before starting subsequent tests, the mobile terminal can send a command to the MEMS sensor testing equipment to clear the currently displayed historical data curve. After completing the subsequent tests, the curve is re-plotted based on the obtained sensor voltage data.

[0055] The mobile terminal can send commands to the MEMS sensor testing equipment to export test data or charts for subsequent analysis. In this embodiment, the test data or charts can be exported in Excel format, which is achieved through software programming.

[0056] Reference Figure 3 The left side of the figure shows the curve plotted based on sensor data.

[0057] Appendix Figure 3 The right side of the screen displays the various operation buttons, such as the pause button, which is used to pause the test process.

[0058] The Clear Curve button is used to clear previously drawn curves.

[0059] The "Export to Excel" button is used to export the collected data as an Excel file.

[0060] Another embodiment provides a wireless test system for MEMS sensors, comprising: The communication module is used to establish a wireless data transmission channel between the mobile terminal and the MEMS sensor testing equipment. The parameter configuration module is used to remotely set test parameters for the MEMS sensor test equipment via a mobile terminal. The MEMS sensor test equipment tests the sensor according to the test parameters to obtain the sensor's voltage data. The parameter configuration module includes a channel selection unit, a gain adjustment unit, and a sampling rate setting unit. The channel selection unit is used to select one or more sensors for testing. The gain adjustment unit is used to adjust the amplification factor of the sensor signal. It can be selected as either voltage-adjusted gain mode or resistance-adjusted gain mode. A sampling rate setting unit is used to set the sampling frequency of the voltage data of the sensor; A data acquisition module is used for the mobile terminal to receive voltage data from the sensor from the MEMS sensor testing equipment; The sensor sensitivity calculation module is used by the mobile terminal to preprocess the voltage data of the sensor received from the MEMS sensor testing equipment, and to calculate the sensitivity of the sensor currently being tested based on the voltage data of the sensor. The data management module is used to allow the mobile terminal to send commands to the MEMS sensor testing equipment during sensor testing to pause or resume the acquisition and display of sensor voltage data, clear the currently displayed historical data curves and start plotting again, and export the test data or charts to a standard format for subsequent analysis. The logging module is used to generate test logs on the mobile terminal during the sensor testing process. The visualization display module includes a multi-channel curve plotting unit and a single-channel curve plotting unit, which are used to visualize sensor data. The multi-channel graph unit and multi-channel display mode allow for the simultaneous plotting of real-time data curves from multiple sensors based on the collected voltage data. The real-time data curves use the sensor voltage data as the vertical axis and the time of reading the sensor voltage data as the horizontal axis. The single-channel graph unit, with its single-channel display mode, is used to display real-time data of a single parameter from a single sensor, enabling real-time monitoring of that single parameter.

[0061] In another embodiment, a wireless testing apparatus for MEMS sensors is provided, including a memory and a processor, the memory storing a computer program, the processor executing the computer program to implement the wireless testing method for MEMS sensors.

[0062] In another embodiment, a computer program product is provided, including a computer program that, when executed by a processor, implements the wireless testing method for MEMS sensors.

[0063] Working principle: 1. The mobile terminal and the MEMS sensor testing equipment are wirelessly connected via Bluetooth, allowing the MEMS sensor testing equipment to be operated directly from the mobile terminal to complete the sensor testing process. This eliminates the constraints of cables and makes sensor testing more flexible. The mobile terminal can be a smartphone or tablet, eliminating the need for dedicated equipment and reducing testing costs and barriers to entry.

[0064] 2. A method for calculating sensor sensitivity can be implemented on a mobile terminal through software programming. After the mobile terminal and the MEMS sensor testing equipment establish communication, the mobile terminal can automatically complete the acquisition of the sensor's voltage data, calculate the sensor's sensitivity based on the acquired data, and display the sensor's sensitivity data in real time. The operation is simple and convenient.

[0065] 3. Configure software on the mobile terminal to provide a graphical interface that displays the collected sensor data graphically, providing an intuitive view of the sensor's real-time status.

[0066] 4. The mobile terminal integrates parameter configuration, data acquisition, real-time display, sensor sensitivity calculation, and data export functions, forming a complete testing solution.

[0067] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present invention, and these improvements and substitutions should also be considered within the scope of protection of the present invention.

Claims

1. A wireless testing method for MEMS sensors, executed on a mobile terminal, characterized in that it includes: The mobile terminal preprocesses the voltage data of the sensor received from the MEMS sensor testing equipment, and calculates the sensitivity of the sensor currently being tested based on the voltage data. Specifically, this includes: The mobile terminal performs a moving average filtering process on the voltage data of the sensor received from the MEMS sensor testing equipment. Determine the voltage reference value for the sensor; The sensitivity of the sensor is calculated as follows: In the process of testing the sensitivity of a sensor, when the sensor is subjected to external excitation, the voltage of the sensor changes. First, the change in the current voltage of the sensor relative to the voltage reference value is calculated. Then, the ratio of the change to the voltage reference value is calculated, which is the sensor sensitivity. Preset the maximum and minimum thresholds for sensitivity; If the sensor sensitivity is between the minimum and maximum sensitivity thresholds, the sensor sensitivity meets the requirements. If the sensor sensitivity is not between the minimum and maximum sensitivity thresholds, the sensor sensitivity does not meet the requirements. The mobile terminal issues a warning message and records the sensor sensitivity value that does not meet the requirements. The sensor sensitivity that meets the threshold requirements will be displayed.

2. The wireless testing method for MEMS sensors according to claim 1, characterized in that determining the voltage reference value specifically includes: calibrating the voltage reference value through automatic zeroing, that is, when the sensor to be tested is in a static state without excitation, reading the voltage value of the sensor as the voltage reference value, or inputting a known voltage reference value through a mobile terminal.

3. The wireless testing method for MEMS sensors according to claim 1, characterized in that, before the mobile terminal preprocesses the voltage data of the sensor received from the MEMS sensor testing equipment and calculates the sensitivity of the sensor currently being tested based on the voltage data, the method includes the following steps: Establish a wireless data transmission channel between the mobile terminal and the MEMS sensor testing equipment; Test parameters are set remotely for the MEMS sensor testing equipment via a mobile terminal, and the MEMS sensor testing equipment tests the sensor according to the test parameters to obtain the sensor's voltage data. The mobile terminal receives the voltage data of the sensor from the MEMS sensor testing equipment.

4. The wireless testing method for MEMS sensors according to claim 3, characterized in that, the step of remotely setting test parameters for the MEMS sensor testing equipment via a mobile terminal specifically comprises: Set the channel selection parameters to determine which one or more sensors to select for testing; Set the gain adjustment parameter to adjust the amplification factor of the sensor signal. You can choose either voltage adjustment gain mode or resistance adjustment gain mode. The sampling rate parameter is set to determine the frequency at which the voltage data from the sensor is collected.

5. The wireless testing method for MEMS sensors according to claim 1, characterized in that, after the mobile terminal preprocesses the voltage data of the sensor received from the MEMS sensor testing equipment and calculates the sensitivity of the sensor currently being tested based on the voltage data, the method further includes the following steps: Visualizing sensor data includes: The multi-channel display method allows for the simultaneous plotting of real-time data curves from multiple sensors based on their voltage data. The real-time data curves are plotted with the sensor voltage data on the vertical axis and the time of reading the sensor voltage data on the horizontal axis. The single-channel display mode is used to display real-time data of a single parameter of a single sensor, enabling real-time monitoring of that single parameter.

6. The wireless testing method for MEMS sensors according to claim 5, characterized in that, after visualizing the sensor data, it further includes: generating a test log on a mobile terminal during the testing of the sensor.

7. The wireless testing method for MEMS sensors according to claim 6, characterized in that, during the testing of the sensor, a test log is generated on the mobile terminal, and the method further includes the step of: Data management specifically includes: during the testing of sensors by the MEMS sensor testing equipment, the mobile terminal can send commands to the MEMS sensor testing equipment to pause or resume the acquisition and display of sensor voltage data; the mobile terminal can send commands to the MEMS sensor testing equipment to clear the currently displayed historical data curves and start plotting again; and the mobile terminal can send commands to the MEMS sensor testing equipment to export test data or charts into a standard format for subsequent analysis.

8. A wireless testing system for MEMS sensors, characterized in that... ,include: The communication module is used to establish a wireless data transmission channel between the mobile terminal and the MEMS sensor testing equipment. The parameter configuration module is used to remotely set test parameters for the MEMS sensor test equipment via a mobile terminal. The MEMS sensor test equipment tests the sensor according to the test parameters to obtain the sensor's voltage data. The parameter configuration module includes a channel selection unit, a gain adjustment unit, and a sampling rate setting unit. The channel selection unit is used to select one or more sensors for testing. The gain adjustment unit is used to adjust the amplification factor of the sensor signal. It can be selected as either voltage-adjusted gain mode or resistance-adjusted gain mode. A sampling rate setting unit is used to set the sampling frequency of the voltage data of the sensor; A data acquisition module is used for the mobile terminal to receive voltage data from the sensor from the MEMS sensor testing equipment; The sensor sensitivity calculation module is used by the mobile terminal to preprocess the voltage data of the sensor received from the MEMS sensor testing equipment, and to calculate the sensitivity of the sensor currently being tested based on the voltage data of the sensor. The data management module is used to allow the mobile terminal to send commands to the MEMS sensor testing equipment during sensor testing to pause or resume the acquisition and display of sensor voltage data, clear the currently displayed historical data curves and start plotting again, and export the test data or charts to a standard format for subsequent analysis. The logging module is used to generate test logs on the mobile terminal during the testing of the sensor. The visualization module includes a multi-channel graph unit and a single-channel graph unit for visualizing sensor data. The multi-channel graph unit can simultaneously plot real-time data curves from multiple sensors; wherein, the real-time data curve uses the sensor voltage data as the vertical axis and the time of reading the sensor data as the horizontal axis. The single-channel graph unit displays the real-time value of a single parameter of the sensor, that is, the real-time data of a certain parameter of the sensor obtained by testing, which is used to realize real-time monitoring of a single parameter of the sensor.

9. A wireless testing device for MEMS sensors, comprising a memory and a processor, wherein the memory stores a computer program, characterized in that... When the processor executes the computer program, it implements the wireless testing method for MEMS sensors according to any one of claims 1 to 7.

10. A computer program product, comprising a computer program, characterized in that... When executed by a processor, the computer program implements the wireless testing method for MEMS sensors as described in any one of claims 1 to 7.

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