Beam measurement wire scanning probe device and method

Abstract

The invention discloses a beam measurement wire scanning probe device and method, and relates to the technical field of beam measurement wire scanning, the beam measurement wire scanning probe device comprises a motor platform, a wire scanning motion support and a wire target frame body, the wire scanning motion support is arranged above the motor platform, and the wire target frame body is arranged above the motor platform through a fixing frame; the outer wall of the wire target frame body is provided with a sliding plate which is matched with the outer wall of the wire scanning motion support in a sliding mode, a double-rotor linear motor is arranged above the motor platform, the output end of the double-rotor linear motor is connected with the sliding plate, and corrugated pipes connected with the sliding plate are installed on the two sides of the wire target frame body. The device is provided with a wire scanning probe target moving cavity, the two sides of a beam channel are provided with double corrugated pipes and double wire scanning moving supports, the ultrahigh vacuum requirement in the cavity is met, meanwhile, the design requirements that the stroke of a wire target is larger than or equal to 100 mm and the vibration amplitude of the wire target is smaller than or equal to 20 micrometers can be met, and more diversified moving modes such as high-speed and low-speed regulation and control are achieved.

Description

Technical Field

[0001] This invention relates to the field of beamline scanning technology, specifically to a beamline scanning probe device and method. Background Technology

[0002] The Hard X-ray Free Electron Laser (HXEL) is one of the world's most efficient and advanced HXEL user facilities. For hard X-ray projects, the beam diagnostic system is a crucial component, required to measure various parameters of the electron beam to understand its operational status. Therefore, improving electron beam position measurement methods and more accurately determining the electron beam trajectory is a key focus in the development of accelerator-related technologies. Consequently, a wire scanning probe system was designed to better measure the electron beam's position distribution. Summary of the Invention

[0003] The purpose of this invention is to provide a bundle-measuring wire scanning probe device and method to solve the related problems mentioned in the background art.

[0004] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a beam measurement wire scanning probe device and method, comprising a motor platform, a wire scanning motion support, and a wire target frame. The wire scanning motion support is disposed above the motor platform, and the wire target frame is disposed above the motor platform by means of a fixed frame. A sliding plate adapted to slide against the outer wall of the wire target frame is installed on the outer wall of the wire scanning motion support. A dual-motor linear motor is disposed above the motor platform, and the output ends of the dual-motor linear motor are respectively connected to the sliding plate. Corrugated pipes connected to the sliding plate are installed on both sides of the wire target frame.

[0005] As a preferred embodiment of the wire scanning probe device and method of the present invention, the side wall of the motor platform is provided with a grating ruler for measurement.

[0006] As a preferred embodiment of the wire scanning probe device and method of the present invention, a CF35 observation window is provided above the wire target frame.

[0007] As a preferred embodiment of the beam-measuring wire scanning probe device and method of the present invention, CF35 loose-fitting shielding flanges are provided on both sides of the wire target frame, and the wire target frame is connected to an external accelerator through the CF35 loose-fitting shielding flanges.

[0008] As a preferred embodiment of the wire scanning probe device and method of the present invention, a wire scanning probe is installed above the motor platform.

[0009] As a preferred embodiment of the wire scanning probe device and method of the present invention, the measurement method steps are as follows: S1. Connect and fix the accelerator to the beam interface at the wire target frame through the CF35 loose shielding flange. S2. Mount the wire scanning probe above the wire target frame using the bracket; S3. By starting the double-acting linear motor, the sliding plates on both sides are driven at a specified speed at the wire scanning motion support; S4. The position data of the wire target is measured by using a grating ruler; S5. Finally, the wire scanning probe receives the beam loss signal generated by the wire target scanning the beam and feeds it back to the external host computer.

[0010] The beneficial effects of the bundle-measuring wire scanning probe device and method of the present invention are as follows: 1. This invention uses a dual-motor linear motor to drive a sliding plate, which in turn drives a wire target to scan the beam at a specified speed. A grating ruler measures the position data of the wire target, and a corresponding beam loss probe receives the beam loss signal generated by the wire target scanning the beam. The position data and beam loss data are recorded by a related data acquisition system, thereby reconstructing the cross-sectional distribution of the beam cluster. The wire scanning probe target moving cavity uses a dual-bellows, dual-wire scanning motion support design on both sides of the beam channel. While ensuring the ultra-high vacuum requirements in the cavity, it can also meet the design requirements of wire target stroke ≥100mm and wire target vibration amplitude ≤20um, thus more accurately determining the trajectory of the electron beam.

[0011] 2. The present invention adopts a design at the motor platform, in which a set of coils and magnets are respectively set at both ends of the mover of the double-motor linear motor. This allows the mover to be subjected to bidirectional force during movement. Compared with the traditional single-motor design, the double-motor design can improve torque output, improve motion stability, and improve the motion accuracy and efficiency of the double-motor linear motor. It can realize more diverse motion modes, such as high-speed and low-speed control. Attached Figure Description

[0012] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a schematic diagram of the main structure of the present invention; Figure 3 This is a top view of the structure of the present invention; Figure 4 This is a schematic diagram of the right-side structure of the present invention.

[0013] In the figure: 1. Motor platform; 2. Wire scanning motion support; 3. Wire target frame; 4. CF35 observation window; 5. Sliding plate; 6. CF35 loose shielding flange; 7. Bellows; 8. Grating ruler. Detailed Implementation

[0014] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0015] Example 1, such as Figure 1-2 As shown, the present invention provides a technical solution: a wire scanning probe device and method, comprising a motor platform 1, a wire scanning motion support 2, and a wire target frame 3. The wire scanning motion support 2 is disposed above the motor platform 1. The wire target frame 3 is disposed above the motor platform 1 via a fixed frame, and a sliding plate 5 adapted to slide against the outer wall of the wire target frame 3 is installed on the outer wall of the wire target frame 3. A dual-actuator linear motor is disposed above the motor platform 1, and the output ends of the dual-actuator linear motor are respectively connected to the sliding plate 5. Corrugated pipes 7 connected to the sliding plate 5 are installed on both sides of the wire target frame 3. The side wall of the motor platform 1 is provided with... The grating ruler 8 is used for measurement. A CF35 observation window 4 is provided above the wire target frame 3. CF35 loose-fitting shielding flanges 6 are provided on both sides of the wire target frame 3. The wire target frame 3 is connected to an external accelerator through the CF35 loose-fitting shielding flanges 6. A wire scanning probe is installed above the motor platform 1. A sliding plate 5 is driven by a dual-motor linear motor. The sliding plate 5 drives the wire target to scan across the beam at a specified speed. The grating ruler 8 measures the position data of the wire target. The corresponding beam loss probe receives the beam loss signal generated by the wire target scanning across the beam. The position data and beam loss data are recorded by a relevant data acquisition system, and then the cross-sectional distribution of the bundle is reconstructed. The target moving cavity of the wire scanning probe uses a double bellows 7 and a double wire scanning motion support 2 on both sides of the beam channel. While ensuring the ultra-high vacuum requirements in the cavity, it can also meet the design requirements of wire target stroke ≥100mm and wire target vibration amplitude ≤20um. The motor platform 1 is designed with a set of coils and magnets set at both ends of the mover of the dual-motor linear motor, so that the mover can be subjected to bidirectional force during movement. Compared with the traditional single-motor design, the dual-motor design can improve torque output, improve motion stability, improve the motion accuracy and efficiency of the dual-motor linear motor, and realize more diverse motion modes, such as high-speed and low-speed control. In motor platform 1, the stator and actuator in the dual-mover structure compensate for each other, reducing positioning errors during movement and improving motion accuracy. It ensures a repeatability accuracy of less than or equal to 20µm. Due to the presence of two actuators, the maximum speed can be greater than or equal to 1m / s. Furthermore, the absence of an intermediate transmission mechanism reduces mechanical wear and inertial effects, increasing system stability and reliability. Movement is smoother, reducing swaying and vibration, ensuring amplitude is less than 20µm.

[0016] Example 2, as Figure 1-4 As shown, the present invention provides a technical solution: a bundle measuring wire scanning probe device and method, including measurement method steps: S1. Connect and fix the accelerator to the beam interface at the target frame 3 via the CF35 loose shielding flange 6. S2. Mount the wire scanning probe above the wire target holder 3 using the bracket; S3. By starting the double-acting linear motor, the sliding plates 5 on both sides are driven at the wire scanning motion support 2 at a specified speed. S4. The position data of the wire target is measured by using the grating ruler 8; S5. Finally, the wire scanning probe receives the beam loss signal generated by the wire target scanning the beam and feeds it back to the external host computer. The dual-side suspension structure and dual-motor linear motors enable acceleration and rapid beam scanning. The target frame is unstable and does not shake. The dual-base design and motion support rails further enhance the stability of the system during movement.

[0017] The ultimate vacuum of the cavity of the wire scanning probe system with this new design can reach 1.0×10-7 Pa, the movement speed can reach 1 m / s, the acceleration can reach 2G, the positioning accuracy is ≤20 μm, and the wire target amplitude is ≤20 μm.

[0018] Working principle: First, connect the external power supply. The operator connects and fixes the accelerator to the beam interface of the wire target frame 3 through the CF35 loose shielding flange 6. The wire scanning probe is installed above the wire target frame 3 through the bracket. At this time, the dual-movement linear motor can be driven to drive the sliding plates 5 on both sides at the wire scanning motion bracket 2 at a specified speed. The position data of the wire target is measured by the grating ruler 8 and the data is fed back to the external host computer.

[0019] Finally, it should be noted that the above content is only used to illustrate the technical solution of the present invention, and is not intended to limit the scope of protection of the present invention. Simple modifications or equivalent substitutions made by those skilled in the art to the technical solution of the present invention do not depart from the essence and scope of the technical solution of the present invention.

Claims

1. A wire scanning probe device, comprising a motor platform (1), a wire scanning motion support (2), and a wire target frame (3), characterized in that: A wire scanning motion support (2) is provided above the motor platform (1). A wire target frame (3) is provided above the motor platform (1) via a fixed frame. A sliding plate (5) that is adapted to slide on the outer wall of the wire target frame (3) is installed on the outer wall of the wire scanning motion support (2). A double-acting linear motor is provided above the motor platform (1). The output ends of the double-acting linear motor are respectively connected to the sliding plate (5). Corrugated pipes (7) that are connected to the sliding plate (5) are installed on both sides of the wire target frame (3).

2. The bundle measuring wire scanning probe device according to claim 1, characterized in that: The motor platform (1) is provided with a grating ruler (8) for measurement on its side wall.

3. The bundle measuring wire scanning probe device according to claim 1, characterized in that: A wire scanning probe is installed on the motor platform (1).

4. The bundle measuring wire scanning probe device according to claim 1, characterized in that: The wire target frame (3) is provided with CF35 loose shielding flanges (6) on both sides, and the wire target frame (3) is connected to the external accelerator through the CF35 loose shielding flanges (6).

5. The bundle measuring wire scanning probe device according to claim 1, characterized in that: The wire target frame (3) is provided with a CF35 observation window (4) on its upper part.

6. The method of a bundle measuring wire scanning probe device according to claim 1, characterized in that: Measurement method steps: S1. Connect and fix the accelerator to the beam interface at the wire target frame (3) through the CF35 loose shielding flange (6); S2. Install the wire scanning probe above the wire target frame (3) using a bracket; S3. By starting the double-acting linear motor, the sliding plates (5) on both sides are driven at a specified speed at the wire scanning motion support (2); S4. The position data of the wire target is measured by using a grating ruler (8); S5. Finally, the wire scanning probe receives the beam loss signal generated by the wire target scanning the beam and feeds it back to the external host computer.

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