Device and method giving consideration to ionic reaction, characterization and deposition

Abstract

The invention relates to the technical field of ion control and characterization, in particular to a device and method considering ion reaction, characterization and deposition. The device comprises an ion source module, an ion transmission cavity, a quadrupole mass screening cavity, a controllable ion molecule reaction cavity, a mass spectrum characterization cavity, an ion acceleration cavity, a magnetic deflection cavity and an ion deceleration and deposition cavity. And a mass spectrum analyzer and a magnetic field deflector are integrated to realize mass spectrum characterization and high-throughput preparation of reaction products. The method can realize the integration of ionic reaction, characterization and deposition, and has a wide application prospect in the fields of organic synthesis mechanism research, high-efficiency preparation of macromolecules or macromolecules and the like.

Description

Technical Field

[0001] This invention relates to the field of ion manipulation and characterization technology, and in particular to an apparatus and method that combines ion reaction, characterization and deposition. Background Technology

[0002] The reactive synthesis, characterization, and preparation of organic compounds have always been a hot topic in materials science. However, precise reaction control, characterization, and high-throughput preparation methods are lacking for complex, weakly stable, and highly reactive systems. Precise reaction control can be achieved by screening ions by mass-to-charge ratio to regulate the reaction chamber; characterization can be performed using mass spectrometry for precise mass-to-charge ratio measurement; and high-purity sample preparation methods have always been a research focus. While commonly used methods such as chemical vapor deposition (CVD) and physical vapor deposition (PVD) are simple to operate and can produce large quantities, they are easily affected by gaseous components during preparation and are difficult to use for in-situ post-reaction preparation. Preparative mass spectrometry (pMS) is a technique that uses mass spectrometry as a separation method to precisely screen and prepare ions with specific mass-to-charge ratios (m / z) with high purity. In particular, the ion soft-landing technique developed in recent decades (Analyst, 2012, 137, 4393) can maintain the integrity of molecular structure and function during deposition, achieving highly selective, high-purity, and high-fidelity preparation of target molecules under high vacuum conditions. Therefore, the integrated design of reaction control, characterization and preparation is expected to play an important role in the study of synthetic mechanisms.

[0003] A search of patents and papers revealed the following relevant patents: The Dalian Institute of Chemical Physics, Chinese Academy of Sciences, disclosed an ion soft deposition device on March 3, 2023. This invention controls ion deposition energy through ion deceleration and uses an MCP fluorescent screen for ion visualization imaging, reducing beam spot size and improving deposition efficiency per unit area, thus assisting in the preparation of mass spectrometry for more efficient sample preparation. This invention mainly focuses on deposition control, without ion reaction, characterization, or high-throughput deposition schemes. The Dalian Institute of Chemical Physics, Chinese Academy of Sciences, also disclosed a preparation mass spectrometry and its usage method on May 21, 2024, mainly including a soft ionization source, an ion transport system, a quadrupole separation system, a high-resolution mass spectrometer, and a deposition system. This invention uses high-resolution mass spectrometry for ion characterization after preparation mass spectrometry separation, thereby allowing for feedback optimization of preparation mass spectrometry parameters and improving preparation efficiency. However, this invention lacks ion reaction control and the method has a low preparation throughput. Therefore, currently, there is a lack of precise reaction control, characterization, and high-throughput preparation methods for complex, weakly stable, and highly reactive systems. Summary of the Invention

[0004] In view of the problems existing in the prior art, the purpose of the present invention is to provide an apparatus and method that takes into account ion reaction, characterization and deposition, so as to conduct integrated research on ion reaction, characterization and deposition.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] The present invention provides an apparatus that combines ion reaction, characterization and deposition, comprising an ion source module, an ion transmission cavity, a quadrupole mass screening cavity, a controllable ion molecular reaction cavity, a mass spectrometry characterization cavity, an ion acceleration cavity, a magnetic deflection cavity, and an ion deceleration and deposition cavity arranged sequentially.

[0007] The ion source module is used for the ionization of compounds;

[0008] The ion transmission chamber is equipped with a high-efficiency ion transmission module for transmitting ions generated by the ion source module to the quadrupole mass screening chamber. The quadrupole mass screening chamber is equipped with a quadrupole separation module for screening ions and introducing them into the controllable ion molecular reaction chamber. The controllable ion molecular reaction chamber is equipped with an electric field-controlled ion molecular reaction module for manipulating ion and molecular reactions and transmitting reaction products to the mass spectrometry characterization chamber. The mass spectrometry characterization chamber is equipped with a high-resolution mass analyzer module for accurately characterizing the mass-to-charge ratio of reactants, intermediates, and final products introduced into the controllable ion molecular reaction chamber. The ion acceleration chamber is equipped with an ion acceleration module for accelerating the introduced ions. The magnetic deflection chamber is equipped with a magnetic deflector for deflecting the introduced high-speed ions; ions with the same energy but different mass-to-charge ratios have different deflection radii, enabling spatial separation. The ion deceleration and deposition chamber is equipped with a multi-channel ion deceleration and deposition module for decelerating and depositing the spatially separated high-speed ions, thereby achieving non-destructive preparation.

[0009] The ion source module includes one or more of the following: an electrospray ionization source, an atmospheric pressure photoionization source, a dielectric barrier discharge ionization source, or a paper spray ionization source; or it includes one or more of the following: an electron bombardment ionization source, a single-photon ionization source, a multi-photon ionization source, and a chemical ionization source.

[0010] The high-efficiency ion transport module is one or more of the following: radio frequency ion funnel, radio frequency multipole, radio frequency irregular multipole, and electrostatic lens.

[0011] The quadrupole separation module is a cylindrical or hyperbolic quadrupole analyzer with adjustable resolution, and the resolution adjustment range is 0.5 to 50 amu.

[0012] The ion molecular reaction module is one of the following: segmented radio frequency multipole, traveling wave circular electrode group, and irregular radio frequency multipole; the working gas pressure can be tuned between 0.1 and 100 Pa.

[0013] The high-resolution mass analyzer module is one of the following: time-of-flight mass analyzer, orbital trap analyzer, and Fourier transform ion cyclotron resonance mass analyzer; the mass resolution is greater than 10,000.

[0014] The ion acceleration module includes several circular electrodes connected by equal-value resistors. By applying voltage to both ends of the circular electrodes, an accelerating electric field is formed inside to accelerate the ions; the acceleration energy is 1000-10000 eV.

[0015] The magnetic deflector is composed of a permanent magnet or an electromagnet alone, and an auxiliary tuned electrostatic field energy filter is added to improve spatial resolution; the magnetic field strength is usually 10,000 to 40,000 Gs.

[0016] The multi-channel ion deceleration and deposition module consists of a multi-stage electrostatic deceleration lens, a deposition substrate, a current measurement unit, and a fluorescent screen imaging unit.

[0017] Another aspect of the present invention provides a method of using the apparatus described above that combines ion reaction, characterization, and deposition, comprising the following steps:

[0018] a. A sample containing the target reactant molecules enters the ion source module, which ionizes the sample and transmits the resulting ions to the ion transmission chamber.

[0019] b. Ions entering the ion transmission chamber can be efficiently transported to the next stage quadrupole mass screening chamber under the action of the high-efficiency ion transmission module.

[0020] c. Set the quadrupole separation module to ion-full-pass operation mode; set the ion-molecular reaction module in the controllable ion-molecular reaction chamber to ion-non-reaction-full-pass mode; and allow ions to directly enter the high-resolution mass analyzer module in the mass spectrometry characterization chamber for mass spectrometry characterization to evaluate the ion generation distribution of reactants.

[0021] d. Based on the evaluation results of the high-resolution mass analyzer module, adjust the working voltage of the quadrupole separation module: select the mass-to-charge ratio range of the reactant ions to be reacted, and evaluate again through the high-resolution mass analyzer module to examine the purity of the ions screened by the quadrupole separation module.

[0022] e. After evaluation by the high-resolution mass analyzer module, the parameters of the quadrupole separation module are determined and fixed. At the same time, the working voltage, gas pressure, carrier gas and other parameters of the ion-molecule reaction module in the controllable ion-molecule reaction chamber are controlled. The reaction between ions and reaction carrier gas molecules takes place in the ion-molecule reaction module. The ions generated after the reaction are introduced into the high-resolution mass analyzer module in the mass spectrometry characterization chamber for mass spectrometry characterization. Based on the characterization results, the parameters of the ion-molecule reaction module in the controllable ion-molecule reaction chamber are adjusted and determined.

[0023] f. After determining the parameters of the ion molecular reaction module, the ions generated by the reaction are introduced into the ion acceleration module in the ion acceleration cavity and accelerated to 1000-10000 eV; the accelerated high-energy ion beam is introduced into the magnetic deflection cavity, and the magnetic deflector in the magnetic deflection cavity deflects ions of different masses with different radii to achieve spatial separation.

[0024] g. Ions separated by the magnetic deflector enter the ion deceleration and deposition chamber. The ions are decelerated by the multi-stage electrostatic deceleration lens in the ion deceleration and deposition module, and finally deposited on the substrate without damage.

[0025] The advantages and beneficial effects of this invention are as follows: This invention ingeniously utilizes a soft ionization quadrupole analyzer to screen ions, controls the reaction synthesis through a reaction chamber, and integrates a mass spectrometer and a magnetic field deflector to achieve mass spectrometric characterization and high-throughput preparation of the reaction products. The device and method of this invention can achieve integrated operation of ion reaction, characterization, and deposition, or a specific part can be used independently. It can be applied to research fields such as organic synthesis mechanism studies and multi-channel preparation of macromolecules or polymers. Attached Figure Description

[0026] The accompanying drawings further illustrate the present invention, but the content of the drawings does not constitute any limitation on the present invention.

[0027] Figure 1 This is a schematic diagram of the structure of an apparatus for combining ion reaction, characterization, and deposition according to the present invention;

[0028] Figure 2 This is an embodiment of an apparatus of the present invention that combines ion reaction, characterization and deposition.

[0029] In the figure: 1 is the ion source module, 2 is the ion transmission chamber, 3 is the quadrupole mass screening chamber, 4 is the controllable ion molecular reaction chamber, 5 is the mass spectrometry characterization chamber, 6 is the ion acceleration chamber, 7 is the ion deceleration and deposition chamber, 8 is the multi-channel ion deceleration and deposition module, 9 is the magnetic deflection chamber, 10 is the magnetic deflector, 11 is the ion acceleration module, 12 is the high-resolution mass analyzer module, 13 is the ion molecular reaction module, 14 is the quadrupole separation module, 15 is the high-efficiency ion transmission module, 16 is the electrospray ion source, 17 is the rectangular multi-channel ion deceleration electrode group and deposition module, 18 is the ion acceleration ring electrode group, 19 is the high-resolution time-of-flight mass analyzer, 20 is the segmented quadrupole ion molecular reaction chamber, and 21 is the radio frequency ion funnel transmission module. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present invention or its application or use. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0031] In the description of this invention, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is generally based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this invention and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this invention. The directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0032] like Figure 1As shown, one embodiment of the present invention provides a device that integrates ion reaction, characterization, and deposition, comprising, in sequence, an ion source module 1, an ion transmission chamber 2, a quadrupole mass screening chamber 3, a controllable ion molecular reaction chamber 4, a mass spectrometry characterization chamber 5, an ion acceleration chamber 6, a magnetic deflection chamber 9, and an ion deceleration and deposition chamber 7; wherein the ion source module 1 is used for ionization of compounds; the ion transmission chamber 2 is equipped with a high-efficiency ion transmission module 15 for transmitting ions generated by the ion source module 1 to the quadrupole mass screening chamber 3; the quadrupole mass screening chamber 3 is equipped with a quadrupole separation module 14 for screening ions and introducing them into the controllable ion molecular reaction chamber 4; the controllable ion molecular reaction chamber 4 is equipped with an electric field-controlled ion molecular reaction module 13 for... The system controls ion and molecular reactions and transmits the reaction products to the mass spectrometry characterization chamber 5. The mass spectrometry characterization chamber 5 is equipped with a high-resolution mass analyzer module 12 for accurately characterizing the mass-to-charge ratio of reactants, intermediates, and final products introduced into the controllable ion and molecular reaction chamber 4. The ion acceleration chamber 6 is equipped with an ion acceleration module 11 for accelerating the introduced ions. The magnetic deflection chamber 9 is equipped with a magnetic deflector 10 for deflecting the introduced high-speed ions; ions with the same energy but different mass-to-charge ratios have different deflection radii, enabling spatial separation. The ion deceleration and deposition chamber 7 is equipped with a multi-channel ion deceleration and deposition module 8 for decelerating and depositing the spatially separated high-speed ions, thereby achieving non-destructive preparation.

[0033] Furthermore, the ion source module 1 can be one or more of the following atmospheric pressure ion sources: electrospray ionization source, atmospheric pressure photoionization source, dielectric barrier discharge ionization source, or paper spray ionization source; or it can be one or more of the following low pressure ionization sources: electron bombardment ionization source, single photon ionization source, multiphoton ionization source, or chemical ionization source.

[0034] Preferably, the ion source module 1 uses a combination of two ionization sources: an electrospray ionization source and an atmospheric pressure photoionization source, which can achieve a wide range of ionization from strongly polar to non-polar compounds.

[0035] Furthermore, the high-efficiency ion transport module 15 is one or more of the following ion focusing structures: radio frequency ion funnel, radio frequency multipole, radio frequency irregular multipole, electrostatic lens, etc.

[0036] Preferably, the radio frequency ion funnel scheme is selected when the gas pressure is above 100 Pa, the radio frequency multipole or irregular rod scheme is selected when the gas pressure is between 0.1 and 100 Pa, and the electrostatic lens focusing scheme is selected when the gas pressure is below 0.1 Pa.

[0037] Furthermore, the quadrupole separation module 14 is a cylindrical or hyperbolic quadrupole analyzer with adjustable resolution, and the resolution adjustment range is 0.5 to 50 amu.

[0038] Preferably, the quadrupole separation module 14 is a cylindrical quadrupole analyzer with adjustable resolution, which can achieve higher machining accuracy.

[0039] Furthermore, the ion-molecule reaction module 13 is one of the segmented radio frequency multipole, traveling wave ring electrode group, and irregular radio frequency multipole plasma-molecule reaction structures; the working gas pressure can be tuned between 0.1 and 100 Pa.

[0040] Preferably, the ion molecular reaction module 13 is a segmented radio frequency multipole, which has a better focusing effect and can control the axial ion kinetic energy.

[0041] Furthermore, the high-resolution mass analyzer module 12 is one of the high-resolution mass analyzers such as time-of-flight mass analyzer, orbital trap analyzer, and Fourier transform ion cyclotron resonance mass analyzer; typically, the mass resolution is greater than 10,000.

[0042] Preferably, the high-resolution quality analyzer module 12 is a high-resolution time-of-flight quality analyzer, which has a simpler structure and a wider quality range.

[0043] Furthermore, the ion acceleration module 11 is composed of several circular electrodes connected by equal-value resistors. By applying voltage to the two ends of the circular electrodes, the internal accelerating electric field accelerates the ions; typically, the acceleration energy is 1000 to 10000 eV.

[0044] Preferably, the ion acceleration module 11 is composed of several circular electrodes, and the acceleration energy is selected from 2000 to 3000 eV, which can not only meet the spatial resolution of magnetic deflection, but also facilitate the deceleration of ions at the back end.

[0045] Furthermore, the magnetic deflector 10 can be composed of a permanent magnet or an electromagnet alone, or an auxiliary tuned electrostatic field energy filter can be added to improve spatial resolution; the magnetic field strength is usually 10,000 to 40,000 Gs.

[0046] Preferably, the magnetic deflector 10 is made of a permanent magnet and an electrostatic field energy filter is added to remove ion beams with large energy deviations and improve spatial resolution; the magnetic field strength is selected to be around 20000 Gs.

[0047] Furthermore, the multi-channel ion deceleration and deposition module 8 is composed of a combination of modules such as multi-stage electrostatic deceleration lenses, deposition substrate, current measurement, and fluorescent screen imaging.

[0048] Based on the above embodiments, another embodiment of the present invention provides a method for using the apparatus as described in the above embodiments, which combines ion reaction, characterization, and deposition, comprising the following steps:

[0049] a. A sample containing target reactant molecules enters ion source module 1. Ion source module 1 ionizes the sample and transmits the ion generated after ionization to ion transmission chamber 2.

[0050] b. Ions entering the ion transmission chamber 2 can be efficiently transported to the next stage quadrupole mass screening chamber 3 under the action of the high-efficiency ion transmission module 15.

[0051] c. Set the quadrupole separation module 14 to ion-full-pass mode; set the ion-molecule reaction module 13 in the controllable ion-molecule reaction chamber 4 to ion-non-reaction-full-pass mode; and allow the ions to directly enter the high-resolution mass analyzer module 12 in the mass spectrometry characterization chamber 5 for mass spectrometry characterization to evaluate the ion generation distribution of the reactants.

[0052] d. Based on the evaluation results of the high-resolution mass analyzer module 12, adjust the working voltage of the quadrupole separation module 14: select the mass-to-charge ratio range of the reactant ions to be reacted, and evaluate again through the high-resolution mass analyzer module 12 to examine the purity of the ions screened by the quadrupole separation module 14.

[0053] e. After evaluation by the high-resolution mass analyzer module 12, the parameters of the quadrupole separation module 14 are determined and fixed. At the same time, the working voltage, gas pressure, carrier gas and other parameters of the ion-molecule reaction module 13 in the controllable ion-molecule reaction chamber 4 are controlled. The reaction between ions and reaction carrier gas molecules takes place in the ion-molecule reaction module 13. The ions generated after the reaction are introduced into the high-resolution mass analyzer module 12 in the mass spectrometry characterization chamber 5 for mass spectrometry characterization. Based on the characterization results, the parameters of the ion-molecule reaction module 13 in the controllable ion-molecule reaction chamber 4 are adjusted and determined.

[0054] f. After determining the parameters of the ion molecular reaction module 13, the reaction-generated ions are introduced into the ion acceleration module 11 in the ion acceleration cavity 6 and accelerated to 1000~10000eV; the accelerated high-energy ion beam is introduced into the magnetic deflection cavity 9, and the magnetic deflector 10 in the magnetic deflection cavity 9 deflects ions of different masses with different radii to achieve spatial separation.

[0055] g. Ions separated by the magnetic deflector 10 enter the ion deceleration and deposition chamber 7. The ions are decelerated by the multi-stage electrostatic deceleration lens in the ion deceleration and deposition module 8, and finally deposited on the substrate without damage.

[0056] Furthermore, this method can integrate ion reaction, characterization, and deposition, or it can be used for a single part. This method can be applied to research fields such as organic synthesis mechanism studies and multi-channel preparation of macromolecules or polymers.

[0057] Example 1

[0058] See Figure 2 As shown, in this embodiment, the ion source module 1 is an electrospray ion source 16, the multi-channel ion deceleration and deposition module 8 is a rectangular multi-channel ion deceleration electrode group and deposition module 17, the ion acceleration module 11 is an ion acceleration ring electrode group 18, the high-resolution mass analyzer module 12 is a high-resolution time-of-flight mass analyzer 19, the ion molecular reaction module 13 is a segmented quadrupole ion molecular reaction chamber 20, and the high-efficiency ion transmission module 15 is a radio frequency ion funnel transmission module 21. In specific operation: A sample carrying target reactant molecules enters the electrospray ionization source 16, which ionizes the sample and transmits the resulting ions to the ion transmission chamber 2. Ions entering the ion transmission chamber 2 are efficiently transmitted to the next-stage quadrupole mass screening chamber 3 via the radio frequency ion funnel transmission module 21. The quadrupole separation module 14 is set to ion-full-pass operation. The segmented quadrupole ion-molecular reaction chamber 20 within the controllable ion-molecular reaction chamber 4 is set to ion-non-reaction-full-pass operation. Ions directly enter the high-resolution time-of-flight mass analyzer 19 within the mass spectrometry characterization chamber 5 for mass spectrometry characterization, evaluating the reactant ion generation distribution. Based on the evaluation results of the high-resolution time-of-flight mass analyzer 19, the operating voltage of the quadrupole separation module 14 is adjusted: the desired reactant ion mass-to-charge ratio range is selected, and the high-resolution time-of-flight mass analyzer 19 is used again to evaluate the purity of the ions screened by the quadrupole separation module 14. After evaluation by the high-resolution time-of-flight mass analyzer 19, the quadrupole separation module 14's operating voltage is determined and fixed. The parameters of the pole separation module 14 are simultaneously controlled, including the operating voltage, gas pressure, and carrier gas parameters of the segmented quadrupole ion molecular reaction chamber 20 within the controllable ion molecular reaction chamber 4. The reaction between ions and carrier gas molecules occurs within the segmented quadrupole ion molecular reaction chamber 20, and the resulting ions are simultaneously introduced into the high-resolution time-of-flight mass analyzer 19 within the mass spectrometry characterization chamber 5 for mass spectrometry characterization. Based on the characterization results, the parameters of the segmented quadrupole ion molecular reaction chamber 20 within the controllable ion molecular reaction chamber 4 are adjusted and determined; the segmented quadrupole ion molecular reaction chamber 20 is then characterized. After setting the parameters of the polar ion molecular reaction chamber 20, the reaction-generated ions are introduced into the ion acceleration chamber 6 and accelerated to 1000-10000 eV by the ion acceleration ring electrode group 18. The accelerated high-energy ion beam is introduced into the magnetic deflection chamber 9, and the magnetic deflector 10 in the magnetic deflection chamber 9 deflects ions of different masses with different radii to achieve spatial separation. The ions spatially separated by the magnetic deflector 10 enter the ion deceleration and deposition chamber 7, and are finally deposited on the substrate without damage by the rectangular multi-channel ion deceleration electrode group and the deposition module 17.

[0059] This invention ingeniously utilizes a soft ionization quadrupole analyzer to screen ions, controls the reaction synthesis through a reaction chamber, and integrates a mass spectrometer and a magnetic field deflector to achieve mass spectrometric characterization and high-throughput preparation of the reaction products. The device and method of this invention can achieve integrated ion reaction, characterization, and deposition, or a specific part can be used independently. It can be applied to research fields such as organic synthesis mechanism studies and multi-channel preparation of macromolecules or polymers.

[0060] The technical principles of the present invention have been described above with reference to specific embodiments. These descriptions are merely for explaining the principles of the invention and should not be construed as limiting the scope of protection of the invention in any way. Based on this explanation, those skilled in the art can readily conceive of other specific embodiments of the invention without inventive effort, and these equivalent variations or substitutions are all included within the scope defined by the claims of this application.

Claims

1. An apparatus that combines ion reaction, characterization, and deposition, characterized in that, It includes, in sequence, an ion source module (1), an ion transmission cavity (2), a quadrupole mass screening cavity (3), a controllable ion molecular reaction cavity (4), a mass spectrometry characterization cavity (5), an ion acceleration cavity (6), a magnetic deflection cavity (9), and an ion deceleration and deposition cavity (7); The ion source module (1) is used for the ionization of compounds; The ion transmission cavity (2) is equipped with a high-efficiency ion transmission module (15) for transmitting ions generated by the ion source module (1) to the quadrupole mass screening cavity (3); the quadrupole mass screening cavity (3) is equipped with a quadrupole separation module (14) for screening ions and introducing them into the controllable ion molecular reaction cavity (4); the controllable ion molecular reaction cavity (4) is equipped with an electric field-controlled ion molecular reaction module (13) for manipulating ion and molecular reactions and transmitting reaction products to the mass spectrometry characterization cavity (5); the mass spectrometry characterization cavity (5) is equipped with a high-resolution mass analyzer module (12) for analyzing the ions generated by the ion source module (1) to the quadrupole mass screening cavity (3) to the quadrupole mass screening cavity (3) to the quadrupole mass screening cavity (4) to the quadrupole mass screening cavity (3) to the quadrupole mass screening cavity (4) to the quadrupole mass screening cavity (5 ...4) to the quadrupole mass screening cavity (5) to the quadrupole mass screening cavity (4) to the quadrupole mass screening cavity (4) to the quadrupole mass screening cavity (5) to the quadrupole mass screening cavity (4) to the quadrupole mass screening cavity (4) to the quadrupole mass screening cavity (4) to the quadrupole mass screening cavity (5) to the quadrupole mass screening cavity (4) to the quadrupole mass screening cavity (5) to the quadrupole mass screening cavity (4) to the quadrup The ions of reactants, intermediate products and final products introduced into the controlled ion molecular reaction chamber (4) are characterized by precise mass-to-charge ratio; the ion acceleration chamber (6) is equipped with an ion acceleration module (11) for accelerating the introduced ions; the magnetic deflection chamber (9) is equipped with a magnetic deflector (10) for deflecting the introduced high-speed ions. Ions with the same energy but different mass-to-charge ratios have different deflection radii, which can be separated in space; the ion deceleration and deposition chamber (7) is equipped with a multi-channel ion deceleration and deposition module (8) for decelerating and depositing the high-speed ions separated in space, thereby achieving non-destructive preparation.

2. The apparatus for combining ion reaction, characterization, and deposition according to claim 1, characterized in that: The ion source module (1) can be one or more of the following atmospheric pressure ion sources: electrospray ionization source, atmospheric pressure photoionization source, dielectric barrier discharge ionization source or paper spray ionization source; or it can be one or more of the following low pressure ionization sources: electron bombardment ionization source, single photon ionization source, multi-photon ionization source, chemical ionization source.

3. The apparatus for combining ion reaction, characterization, and deposition according to claim 1, characterized in that: The high-efficiency ion transport module (15) is one or more of the following: radio frequency ion funnel, radio frequency multipole, radio frequency irregular multipole, and electrostatic lens.

4. The apparatus for combining ion reaction, characterization, and deposition according to claim 1, characterized in that: The quadrupole separation module (14) is a cylindrical or hyperbolic quadrupole analyzer with adjustable resolution, and the resolution adjustment range is 0.5 to 50 amu.

5. The apparatus for combining ion reaction, characterization, and deposition according to claim 1, characterized in that: The ion molecular reaction module (13) is one of the segmented radio frequency multipole, traveling wave ring electrode group and irregular radio frequency multipole; the working gas pressure can be tuned between 0.1 and 100 Pa.

6. The apparatus for combining ion reaction, characterization, and deposition according to claim 1, characterized in that: The high-resolution mass analyzer module (12) is one of the time-of-flight mass analyzer, orbital trap analyzer, and Fourier transform ion cyclotron resonance mass analyzer; the mass resolution is greater than 10000.

7. The apparatus for combining ion reaction, characterization, and deposition according to claim 1, characterized in that: The ion acceleration module (11) includes several circular electrodes connected by equal resistance. By applying voltage to the two ends of the circular electrodes, the internal accelerating electric field accelerates the ions; the acceleration energy is 1000~10000eV.

8. The apparatus for combining ion reaction, characterization, and deposition according to claim 1, characterized in that: The magnetic deflector (10) is composed of a permanent magnet or an electromagnet alone, and an auxiliary tuned electrostatic field energy filter is added to improve spatial resolution; the magnetic field strength is 10000~40000Gs.

9. The apparatus according to claim 1, which combines ion reaction, characterization, and deposition, is characterized in that: The multi-channel ion deceleration and deposition module (8) is composed of a multi-stage electrostatic deceleration lens, a deposition substrate, a current measurement and fluorescent screen imaging combination.

10. A method of using the apparatus as described in any one of claims 1-9, which combines ion reaction, characterization, and deposition, characterized in that: The method of use includes the following steps: a. A sample containing target reactant molecules enters the ion source module (1), which ionizes the sample and transmits the ions generated after ionization to the ion transmission chamber (2). b. Ions entering the ion transport chamber (2) are efficiently transported to the next stage quadrupole mass screening chamber (3) under the action of the high-efficiency ion transport module (15); c. Set the working mode of the quadrupole separation module (14) to ion full-pass; set the ion molecular reaction module (13) in the controllable ion molecular reaction chamber (4) to ion non-reaction full-pass; and let the ions directly enter the high-resolution mass analyzer module (12) in the mass spectrometry characterization chamber (5) for mass spectrometry characterization to evaluate the ion generation distribution of the reactants. d. Based on the evaluation results of the high-resolution mass analyzer module (12), adjust the working voltage of the quadrupole separation module (14): select the mass-to-charge ratio range of the reactant ions to be reacted, and evaluate again through the high-resolution mass analyzer module (12) to examine the purity of the ions screened by the quadrupole separation module (14). e. After evaluation by the high-resolution mass analyzer module (12), the parameters of the quadrupole separation module (14) are determined and fixed. At the same time, the working voltage, gas pressure and carrier gas parameters of the ion molecular reaction module (13) in the controllable ion molecular reaction chamber (4) are controlled. The reaction between ions and reaction carrier gas molecules is carried out in the ion molecular reaction module (13). At the same time, the ions generated after the reaction are introduced into the high-resolution mass analyzer module (12) in the mass spectrometry characterization chamber (5) for mass spectrometry characterization. Based on the characterization results, the parameters of the ion molecular reaction module (13) in the controllable ion molecular reaction chamber (4) are adjusted and determined. f. After determining the parameters of the ion molecular reaction module (13), the reaction-generated ions are introduced into the ion acceleration module (11) in the ion acceleration cavity (6) and accelerated to 1000~10000eV; the accelerated high-energy ion beam is introduced into the magnetic deflection cavity (9), and the magnetic deflector (10) in the magnetic deflection cavity (9) deflects ions of different masses with different radii to achieve spatial separation. g. Ions separated by the magnetic deflector (10) enter the ion deceleration and deposition chamber (7), and are decelerated by the multi-stage electrostatic deceleration lens in the ion deceleration and deposition module (8), and finally deposited on the substrate without damage.

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