Fresh air ventilation method for industrial clean workshop

Abstract

The invention discloses a fresh air ventilation method for an industrial clean factory building, belongs to the technical field of industrial clean production factory building design, and aims to solve one of the problems that an industrial clean factory building accident handling ventilation fresh air system is large in investment, high in energy consumption and not easy to control air quantity balance. The fresh air ventilation method for the industrial clean workshop comprises the steps that independent rooms are separated, specifically, a risk area where flammable and explosive gas leakage possibly occurs in the clean workshop is separated from other areas to form the independent rooms; configuring a ventilation system; a fresh air channel and a control system are arranged. According to the fresh air ventilation method for the industrial clean workshop, diffusion of flammable and explosive gas can be effectively controlled, the safety level of the clean workshop is improved, equipment investment is reduced, and system operation energy consumption is reduced.

Description

Technical Field

[0001] This invention belongs to the field of industrial cleanroom design technology, and relates to a fresh air ventilation method for industrial cleanrooms. Background Technology

[0002] With the rapid development of electronic technology, the application of cleanrooms is becoming increasingly widespread. In cleanrooms, air conditioning units are centrally located throughout the entire building or on different floors, equipped with multiple MAU (Modular Air Unit) units and backup units. Each MAU unit integrates a pre-filter (G4), a medium-efficiency filter (F7 / F8), a high-efficiency filter (H13), a chemical filter, two-stage cooling coils, preheating and reheating hot water coils, a humidifier (spray chamber, wet membrane, or high-pressure micro-mist humidification, etc.), and fans. Outdoor air is centrally cooled, dehumidified, or heated and humidified before being delivered to the clean areas of each production process, ensuring the required relative humidity, fresh air volume, and positive pressure differential in the workshop. In addition, the cleanroom is also equipped with DCC (Direct Current Control) coils and FFU (Fan Filter Units) to achieve air circulation. The DCC handles the workshop's heat load, while the FFU balances indoor heat generation and ensures sufficient circulating air volume to meet cleanliness requirements.

[0003] Hydrogen is used as a reaction carrier gas in the epitaxial growth process of semiconductor products. Hydrogen-related pipeline systems may leak due to defects in welds, cracks, valves, joints, or due to human error or accidental impacts. A hydrogen leak in a cleanroom can easily cause serious accidents such as explosions, fires, asphyxiation, equipment damage, environmental pollution, and personal injury. Given the large area of ​​such cleanrooms, rapid ventilation is crucial after a leak (e.g., achieving an exhaust volume of 12 times per hour) and maintaining zero pressure to prevent the spread of flammable and explosive gases or the infiltration of unclean air. Therefore, during ventilation, it is essential to ensure a precise match between the clean air supply and exhaust volume.

[0004] Because the overall deployment of an emergency exhaust system in a cleanroom is costly, and the balance between fresh air and exhaust air is difficult to control, if a dedicated emergency ventilation system is configured, it requires a large investment in equipment and operating costs, and it is also difficult to control the air volume balance in a cleanroom where flammable or explosive gas leaks occur. Summary of the Invention

[0005] Based on the above analysis, the present invention aims to provide a cleanroom ventilation system and ventilation method to solve one of the problems of large investment, high energy consumption, and difficulty in controlling air volume balance in industrial cleanroom accident handling ventilation systems.

[0006] The objective of this invention is mainly achieved through the following technical solutions.

[0007] This invention provides a fresh air ventilation method for industrial cleanrooms, comprising the following steps:

[0008] S100 Separate Independent Room: This type of cleanroom isolates areas at risk of flammable or explosive gas leaks from other areas, creating separate independent rooms. The S200 is equipped with a ventilation system; The S300 is equipped with a fresh air system: The S400 is equipped with a fresh air duct and control system.

[0009] Further, step S200 includes: S210 provides an independent clean air conditioning return air system for the independent room, including an independent return air duct, return air louvers and dry coil.

[0010] Furthermore, step S200 also includes: The S220 is equipped with a process exhaust gas system, including: process exhaust gas systems Lg1 and Lge1 are set up according to the amount of process exhaust gas generated by the process equipment in the independent room; wherein, Lg1 is the process exhaust gas volume of the process exhaust gas system in the independent room under normal conditions, and Lge1 is the process exhaust gas volume of the process exhaust gas system in the independent room when the mains power is interrupted and the emergency power supply is used.

[0011] Furthermore, in step S220, a separate process exhaust system is set up for the independent room.

[0012] Further, step S300 includes: S310 is configured with a clean air handling system: the required positive pressure value in the clean area is set, and the fresh air capacity of the fresh air system is configured according to the exhaust volume of the process exhaust system and the air volume required to maintain positive pressure in the clean area.

[0013] Further, step S310 includes: S311 is equipped with a clean air handling unit, such that when the clean air handling unit is started, the fresh air volume Lx1 allocated to the independent room is at least equal to the fresh air volume L1 of the independent room under normal conditions. The L1 is equal to the sum of the process exhaust gas volume Lg1 under normal conditions and the positive pressure air volume Lz of the independent room.

[0014] Furthermore, step S310 also includes: S312 is equipped with an emergency power supply for the clean air handling unit. Some of the clean air handling units are equipped with an emergency power supply so that when the emergency power supply clean air handling unit is started, the fresh air volume Lxe1 allocated to the independent room is at least equal to the fresh air volume L2 of the independent room under the power outage condition. The L2 is equal to the sum of the process exhaust gas volume Lge1 under the power outage condition and the positive pressure air volume Lz in the independent room.

[0015] Furthermore, step S310 also includes: S313 is equipped with a backup clean air handling unit, which includes at least one backup air handling unit connected to an emergency source.

[0016] Further, step S400 includes: S410 A first fresh air flow control component is installed in the independent room. The first fresh air flow control component is used to adjust the value of Lx1 or Lxe1.

[0017] Furthermore, it also includes: S500 system operation. This includes shutting down the fan filter unit of the air conditioning recirculation system in the independent room during accident conditions and power outage conditions, and independently controlling the air volume balance in the independent room.

[0018] Furthermore, step S200 also includes: S230 Configure a normal ventilation system in the independent room: Based on the density of the flammable and explosive gas that may leak in the independent room and the air after mixing, arrange the exhaust louvers of the normal ventilation system in the room and / or the technical mezzanine above the independent room, and the exhaust volume of the normal ventilation system Lp1 = the normal exhaust volume of the technical mezzanine above the independent room Lp101 + the normal exhaust volume of the room Lp102.

[0019] Furthermore, step S200 also includes: S240 configures the emergency exhaust system based on the exhaust volume of the process waste gas exhaust system and the exhaust volume of the normal exhaust system.

[0020] Further, in step S310, the fresh air volume L1 of the independent room under normal conditions = the exhaust volume of the process waste gas under normal conditions Lg1 + the exhaust volume of the normal exhaust system Lp1 + the positive pressure air volume of the independent room Lz; the fresh air volume L2 of the independent room under power outage conditions = the exhaust volume of the process waste gas under power outage conditions Lge1 + the exhaust volume of the normal exhaust system Lp1 + the positive pressure air volume of the independent room Lz.

[0021] Furthermore, step S300 also includes: S320 determines whether the fresh air volume provided by the clean air handling system to the independent room after the standby clean fresh air handling unit is started, meets the emergency air exchange volume Lv required by the independent room. If it does not meet the requirements, a fresh air filter unit (FAU) is configured to supplement the fresh air volume in the independent room.

[0022] Furthermore, step S400 also includes: S420 determines whether it is necessary to install a makeup air branch and a pressure relief branch based on the exhaust volume of the process exhaust system, the exhaust volume of the normal exhaust system, and the positive pressure air volume of the independent room.

[0023] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects: 1. The fresh air ventilation method for industrial cleanrooms of the present invention effectively controls the diffusion of flammable and explosive gases by independently separating areas where there may be a risk of leakage of flammable and explosive gases, thereby improving the safety level of the cleanroom. It also enables independent configuration of ventilation and fresh air systems for individual rooms, optimizes the overall air volume balance, reduces equipment investment, and lowers system operating energy consumption.

[0024] 2. The cleanroom ventilation method of the present invention, through the step-by-step S230 setting of the normal and exhaust ventilation system, can effectively prevent the accumulation of flammable and explosive gases indoors and improve the safety of the working environment. Furthermore, by differentiating the exhaust points according to the density characteristics of potentially leaked flammable and explosive gases, it can achieve efficient removal of gases of different densities, ensuring that there are no dead zones in the ventilation of hazardous areas.

[0025] 3. In the cleanroom ventilation method of the present invention, in step S210, the exhaust capacity of the emergency exhaust system is configured according to the sum of the exhaust volume of the process exhaust system and the exhaust volume of the normal exhaust system, which makes full use of the exhaust volume of the existing process exhaust system, avoids the duplication of exhaust equipment, reduces equipment redundancy, and effectively reduces the investment and operating energy consumption of the system.

[0026] 4. The cleanroom ventilation method of the present invention replaces the newly added cleanroom fresh air unit (MAU) with a fresh air filter unit (FAU) of equal air volume. Since the FAU only has G4+F7+fan or G4+F7+H10+fan or G4+F7+H13+fan functional sections, it reduces at least the functional sections such as primary surface cooling coil, secondary surface cooling coil, preheating coil, reheating coil, and chemical filter compared to the MAU. This can reduce the energy consumption of cold and heat source operation, reduce fan air pressure, reduce fan power, reduce equipment investment and subsequent operating energy consumption, and at the same time reduce the area occupied by the machine room and improve the overall energy efficiency of the system.

[0027] 5. The cleanroom ventilation method of the present invention, through step S420, can conveniently and accurately determine the setting of the make-up air branch and the pressure relief branch. By setting the corresponding control components, it can ensure that the fresh air volume and exhaust air volume in the independent room are dynamically matched in the event of an accident or power outage, and ensure that the independent room always maintains a zero pressure state, effectively preventing the leakage or backflow of flammable and explosive gases.

[0028] In this invention, the above-described technical solutions can be combined with each other to achieve more preferred combinations. Other features and advantages of this invention will be set forth in the following description, and some advantages may become apparent from the description or be learned by practicing the invention. The objects and other advantages of this invention can be realized and obtained through the embodiments described and the accompanying drawings, which are particularly pointed out. Attached Figure Description

[0029] Figure 1 This is a schematic flowchart of the fresh air ventilation method for an industrial cleanroom according to Embodiment 1 of the present invention; Figure 2 This is a schematic diagram of the layout structure of the fresh air ventilation system in an industrial cleanroom according to Embodiment 1 of the present invention; Figure 3 This is a flowchart illustrating step S200 of an embodiment of the present invention; Figure 4 This is a flowchart illustrating step S300 of an embodiment of the present invention; Figure 5 This is a schematic diagram of the layout structure of the normal exhaust ventilation system in an independent room according to Embodiment 2 of the present invention; Figure 6 This is a flowchart illustrating step S400 of an embodiment of the present invention; Figure 7 This is one of the schematic diagrams of the fresh air ventilation system layout structure in operation scenario 1 of embodiment 3 of the present invention; Figure 8 This is the second schematic diagram of the fresh air ventilation system layout structure in the operation of Embodiment 3 of the present invention; Figure 9 This is a schematic diagram of the fresh air ventilation system layout structure in operation scenario 2 of embodiment 3 of the present invention; Figure 10 This is a schematic diagram of the fresh air ventilation system layout structure in operation scenario 3 of embodiment 3 of the present invention; Figure 11 This is one of the schematic diagrams of the fresh air ventilation system layout structure in operation scenario 4 of embodiment 3 of the present invention; Figure 12 This is the second schematic diagram of the fresh air ventilation system layout structure under the operation of Embodiment 3 of the present invention; Figure 13 This is a schematic diagram of the fresh air ventilation system layout structure under the operation condition 5 of Embodiment 3 of the present invention; Figure 14 This is one of the schematic diagrams of the fresh air ventilation system layout structure in operation scenario 6 of embodiment 3 of the present invention; Figure 15 This is the second schematic diagram of the fresh air ventilation system layout structure in operation scenario 6 of embodiment 3 of the present invention; Figure 16This is one of the schematic diagrams of the fresh air ventilation system layout structure in operation scenario 7 of embodiment 3 of the present invention; Figure 17 This is the second schematic diagram of the fresh air ventilation system layout structure in operation scenario 7 of embodiment 3 of the present invention; Figure 18 This is the third schematic diagram of the fresh air ventilation system layout structure in the operation of Embodiment 3 of the present invention.

[0030] Figure label: 1-Clean area; 11-Technical mezzanine above clean area; 12-Interior of clean area; 101-Independent room; 1011-Technical mezzanine above independent room; 1012-Interior of independent room; 201-Fan filter unit; 202-Return air duct; 203-Return air louvers; 203-Dry coil; 301 - Process exhaust gas ventilation system; 401 - Regular ventilation system; 4011 - Exhaust louvers; 4012 - Exhaust vent; 501 - First emergency exhaust fan; 502 - Second emergency exhaust fan; 601-Clean air handling unit; 6011-Emergency power supply clean air handling unit; 602-Standby clean air handling unit; 701 - First fresh air filtration unit; 702 - Second fresh air filtration unit; 801 - First differential pressure sensor; 802 - First electrically adjustable air valve; 803 - Second differential pressure sensor; 804 - Second electrically adjustable air valve; 805 - Third differential pressure sensor; 806 - Third electrically adjustable air valve; 807 - Alarm device 901 - Air supply branch; 902 - Pressure relief branch. Detailed Implementation

[0031] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which constitute a part of the present invention and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not intended to limit the scope of the present invention.

[0032] To facilitate understanding of the technical solutions of this invention, the terms, English abbreviations, and parameter symbols in this specification are explained as follows: Normal status: Normal production status; Power outage status: Production status relying on emergency power supply during a power outage; Accident status: The state of a flammable or explosive gas leak; Power outage status: A state in which a flammable or explosive gas leak occurs during a power outage. MAU: Clean air handling unit (one or more units combined). MAU(E): MAU units (one or more units combined) equipped with emergency power supply section. MAU standby unit: Standby clean air handling unit (1 or more units). FAU: Fresh air filtration unit; FFU: Fan Filter Unit; DCC: Dry coil; Clean area: includes the clean area interior and upper technical mezzanine of the clean workshop; Upper technical mezzanine: A mezzanine above the clean area, separated by a suspended ceiling; Cleanroom interior: The area between the cleanroom ceiling and the floor: Independent room: A separate room where there is a possibility of leakage of flammable or explosive gases; Technical mezzanine above a separate room: a technical mezzanine within a separate room; Interior of a private room: The area between the ceiling and the floor within a private room; L1: Fresh air volume of an independent room under normal conditions; L2: Fresh air volume of an independent room under power outage conditions; L3: Fresh air volume of an independent room under emergency conditions; L4: Fresh air volume of an independent room under emergency conditions under power outage conditions; L1n: Fresh air volume of an independent room under normal conditions; L2n: Fresh air volume of an independent room under power outage conditions; L3n: Fresh air volume of an independent room under emergency conditions; L4n: Fresh air volume of an independent room under emergency conditions under power outage conditions; Lx1: Fresh air volume allocated to independent rooms by the cleanroom fresh air handling unit under normal conditions; Lxe1: Fresh air volume allocated to independent rooms by the cleanroom fresh air handling unit under power outage conditions; Lbx1: Fresh air volume supplied to independent rooms by the standby cleanroom fresh air handling unit under emergency conditions; Lbx2: Fresh air volume supplied to independent rooms by the standby cleanroom fresh air handling unit under emergency conditions under power outage conditions. Air volume; Lp: Total exhaust air volume of the independent room; Lg1: Process exhaust air volume of the independent room under normal conditions; Lge1: Process exhaust air volume of the independent room under power outage conditions; Lz: Positive pressure air volume of the independent room; Lp1: Exhaust air volume of the independent room's normal exhaust system; Lp101: Normal exhaust air volume of the technical mezzanine above the independent room; Lp102: Normal exhaust air volume of the independent room; Lsp1: Exhaust air volume of the first emergency exhaust fan; Lsp2: Exhaust air volume of the second emergency exhaust fan; Lsx1: Fresh air volume supplied by FAU1; Lsx2: Fresh air volume supplied by FAU2; Ld1: Fresh air volume of the pressure relief branch under emergency conditions; Ld2: Fresh air volume of the pressure relief branch under power outage emergency conditions; Lv: Required emergency air exchange rate exhaust air volume of the independent room.

[0033] Example 1 This invention discloses a fresh air ventilation method for industrial cleanrooms, such as... Figure 1 As shown, it includes the following steps: S100 Separated Independent Room 101: This separates the area within the cleanroom from other areas and forms an independent room 101; The S200 is equipped with a ventilation system; The S300 is equipped with a fresh air system: The S400 is equipped with a fresh air duct and control system.

[0034] The fresh air ventilation method for industrial cleanrooms in this embodiment effectively controls the spread of flammable and explosive gases by independently separating areas where there may be a risk of leakage of flammable and explosive gases, thereby improving the overall safety level of the cleanroom. It also allows for independent configuration of ventilation and fresh air systems for independent rooms 101, optimizing the overall air volume balance, reducing equipment investment, and lowering system operating energy consumption.

[0035] Specifically, such as Figure 2 As shown, the independent room 101 is enclosed by metal wall panels to ensure airtightness and structural strength, preventing leaked gas from seeping into adjacent areas. The independent room 101 includes an interior 1012 and an upper technical mezzanine 1011. Process equipment and process waste gas branch exhaust ducts that may leak flammable and explosive gases are centrally located in the interior 1012. The upper technical mezzanine 1011 is used to house the main process waste gas duct, fresh air and ventilation ducts, and electrical facilities. The fan filter unit 201 (FFU) of the independent room 101 is located on the ceiling between the upper technical mezzanine 1011 and the interior 1012.

[0036] Among them, such as Figure 3 As shown, step S200 includes: S210 has an independent clean air return system in the independent room 101, including an independent return air duct 202, return air louvers 203 and dry coil 204 (DCC).

[0037] In normal and power outage conditions, the air in independent room 1012 is returned to the upper technical mezzanine 1012 of the independent room through return air louvers 203, return air duct 202, and dry coil 204 (DCC). After filtration by fan filter unit 201 (FFU), it is then delivered into independent room 1012. This independent circulation system achieves purification and temperature / humidity control, thus preventing cross-contamination between independent room 101 and other areas of clean area 1, ensuring that leaked flammable and explosive gases remain under control. When the concentration of leaked flammable and explosive gases reaches the alarm threshold, the control system shuts down the fan filter unit 201 (FFU) in independent room 101, creating a direct-flow airflow pattern within independent room 101, effectively preventing the retention of leaked gas in the clean room.

[0038] Furthermore, such as Figure 3 As shown, step S200 further includes: S220 is configured with a process exhaust gas system 301; including: setting the process exhaust gas volume Lg1 in the independent room 101 under normal conditions and the process exhaust gas volume Lge1 in the power outage condition, based on the amount of process exhaust gas generated by the process equipment in the independent room 101. The process exhaust gas volume Lge1 in the power outage condition is the exhaust volume of the process exhaust gas system in the independent room 101 when operating with emergency power. The process exhaust gas system 301 can directly exhaust harmful gases in the independent room 101 to the exhaust gas treatment device, ensuring that process exhaust gas does not enter the clean area. The emergency power supply ensures that a minimum safe process exhaust gas volume Lge1 can still be maintained during a power outage, preventing the risk of gas accumulation due to power outage.

[0039] Optionally, the same process exhaust system 301 can be used to exhaust the exhaust gas in all process exhaust pipes in the cleanroom, or a separate process exhaust system 301 can be set up in an independent room 101.

[0040] Furthermore, such as Figure 4 As shown, step S300 includes: S310 is configured with a clean air handling system: The required positive pressure value for the cleanroom 12 is set, and the fresh air capacity of the clean air handling unit is configured based on the exhaust volume of the process exhaust system 301 and the required air volume for the positive pressure in the cleanroom 12. The layout of the clean air handling system is as follows: Figure 2 As shown.

[0041] S310 further includes the following sub-steps: S311 is configured with a clean air handling unit 601, such that the fresh air volume Lx1 allocated to the independent room under normal conditions is at least equal to the fresh air volume L1 of the independent room under normal conditions, wherein L1 is equal to the sum of the process exhaust gas volume Lg1 and the positive pressure air volume Lz of the independent room under normal conditions.

[0042] S312 is equipped with an emergency power supply clean air handling unit 6011. Some of the clean air handling units 601 are equipped with an emergency power supply, so that the fresh air volume Lxe1 of the emergency power supply clean air handling unit allocated to the independent room under normal conditions is at least equal to the fresh air volume L2 of the independent room under power outage conditions. The L2 is equal to the sum of the process exhaust gas volume Lge1 under power outage conditions and the positive pressure air volume Lz of the independent room.

[0043] S313 is configured with a backup clean air handling unit 602, which includes at least one backup clean air handling unit connected to an emergency source, so that when the backup clean air handling unit 602 is started, it can provide the independent room 101 with a backup unit fresh air volume Lbx1, and when it is started in the event of a power outage, it can provide the independent room 101 with a power outage backup unit fresh air volume Lbx2.

[0044] This embodiment achieves multiple safeguards for the clean air handling system through step S300, ensuring that the fresh air volume allocated to the independent room 101 by the clean air handling system can meet the process exhaust volume, normal exhaust volume, and fresh air volume required to maintain positive pressure in the independent room 1012 under normal conditions and power outage conditions. At the same time, the standby clean air handling unit 602 is put into operation when the clean air handling unit 601 or the emergency power clean air handling unit 6011 fails, maintaining the required fresh air volume and positive pressure requirements of the independent room 101 and preventing the backflow of harmful gases or the imbalance of the indoor environment.

[0045] Further, step S400 includes: S410 provides a first fresh air flow control component in the independent room 101, the first fresh air flow control component being used to adjust the value of Lx1 or Lxe1.

[0046] Specifically, such as Figure 2 As shown, the first fresh air flow control component includes a first differential pressure sensor 801 and a first electrically adjustable damper 802. The first differential pressure sensor 801 is located in the interior of the independent room 1012 and is set to a positive differential pressure value. The first electrically adjustable damper 802 is arranged on the fresh air main duct of the independent room 101. The control system can control the opening of the first electrically adjustable damper 802 according to the feedback of the first differential pressure sensor 801, thereby adjusting the value of Lx1 or Lxe1 in normal state and power outage state respectively, satisfying Lx1=L1=Lg1+Lz in normal state and Lxe1=L2=Lge1+Lz in power outage state, ensuring that the interior of the independent room 1012 maintains the set positive pressure value.

[0047] The fresh air ventilation method for the industrial cleanroom in this embodiment achieves precise control of the positive pressure value of the independent room 1012 through the coordinated control of the first differential pressure sensor 801 and the first electric regulating valve 802 in normal and power outage states.

[0048] Understandably, the clean air handling system is responsible for providing fresh air to the entire clean area 1. The first fresh air flow control system can also be installed in areas other than the independent room 101 in the clean area, which will not be described in detail here.

[0049] Example 2 This embodiment provides a fresh air ventilation method for an industrial cleanroom, the steps of which are basically the same as those provided in Embodiment 1, the difference being: like Figure 3 As shown, step S200 further includes: S230 Configures a normal exhaust ventilation system in the independent room 101: Based on the density of the flammable and explosive gas that may leak in the independent room 101 after mixing with air, the normal exhaust ventilation louvers 4011 of the normal exhaust ventilation system are arranged in the interior 1012 of the independent room and / or the technical mezzanine 1011 above the independent room, and the exhaust volume Lp1 of the normal exhaust ventilation system = the normal exhaust volume Lp101 of the technical mezzanine above the independent room + the normal exhaust volume Lp102 of the interior of the independent room.

[0050] Specifically, such as Figure 5 As shown, when the density of the potentially leaked flammable and explosive gas is greater than the density of air, the normal exhaust louver is installed in the interior of the independent room 1012, with its lower edge less than 300mm from the floor. For example, the return air louver 203 of the independent room 101 can also be used as the normal exhaust louver, and the normal exhaust vent 4012 is arranged above the return air duct 202. When the density of the potentially leaked flammable and explosive gas is less than the density of air, the normal exhaust louver 4011 is installed in the technical mezzanine 1011 above the independent room, with its upper edge less than 100mm from the floor slab. When the density of the potentially leaked flammable and explosive gas exists in both cases (greater than and less than the density of air), normal exhaust louvers 4011 are installed in both the interior of the independent room 1012 and the technical mezzanine 1011 above the independent room. For example, based on the volume of the exhaust space, the air exchange rate of the configured normal exhaust system is not less than 1 time per hour. The ventilation system is equipped with a 24-hour emergency power supply. The system's fans and motors are all designed to be explosion-proof. The emergency power supply ensures uninterrupted operation 24 hours a day, guaranteeing the timely discharge of hazardous gases.

[0051] Understandably, the exhaust volume of the normal ventilation system is set as Lp1, where Lp1 = normal exhaust volume of the technical mezzanine above the independent room Lp101 + normal exhaust volume of the independent room Lp102; when the normal exhaust louvers are only installed in the independent room 1012, Lp101 = 0, and when the normal exhaust louvers are only installed in the technical mezzanine above the independent room 1011, Lp102 = 0.

[0052] The cleanroom ventilation method in this embodiment, through the step-by-step S230 setting of the regular exhaust ventilation system, can effectively prevent the accumulation of flammable and explosive gases indoors and improve the safety of the working environment. Furthermore, by differentiating the exhaust points according to the density characteristics of potentially leaked flammable and explosive gases, it can achieve efficient removal of gases of different densities, ensuring that there are no dead zones in the ventilation of hazardous areas.

[0053] Furthermore, such as Figure 3As shown, step S200 further includes: S240 configures the emergency exhaust system based on the exhaust volume of the process waste gas exhaust system and the exhaust volume of the normal exhaust system; including: S241 determines whether the sum of the process exhaust volume Lge1 and the normal exhaust volume Lp102 of the independent room under the power outage condition meets the emergency air exchange rate and exhaust volume Lv required by the independent room 1012; if yes, no emergency exhaust system needs to be added, and step S300 is executed; if no, a first emergency exhaust fan 501 is added, and the exhaust louvers of the first emergency exhaust fan 501 are arranged in the independent room 1012. S242 determines whether the sum of the process exhaust gas volume Lg1 and the normal exhaust volume Lp102 of the independent room meets the required emergency air exchange rate Lv for the independent room 1012. If yes, the exhaust volume Lsp1 of the first emergency exhaust fan satisfies Lge1+Lp102+Lsp1≥Lv, and the process continues to execute step S300. If not, the exhaust volume of the first emergency exhaust fan satisfies Lg1+Lp102+Lsp1≥Lv, and a second emergency exhaust fan 502 is added, so that the exhaust volume Lsp2 of the second emergency exhaust fan satisfies Lge1+Lp102+Lsp1+Lsp2≥Lv, and the process continues to execute step S300. The emergency air exchange rate Lv is calculated based on the volume of the independent room 1012 and is the exhaust volume required to meet the 12 air exchange rate per hour.

[0054] In this embodiment, the exhaust louvers of the emergency ventilation system are installed in the independent room 1012. In the event of an emergency or a power outage, the emergency ventilation system automatically activates to increase the air exchange rate and exhaust capacity of the independent room 1012. Under both emergency and power outage conditions, it ensures that the air exchange rate in the independent room 1012 is not less than the emergency air exchange rate Lv, thereby effectively diluting and removing leaked gas and preventing its concentration from reaching the lower explosive limit. For example, according to relevant regulations, the exhaust air exchange rate in the independent room 1012 should be no less than 12 times / hour under both emergency and power outage conditions.

[0055] This embodiment configures the exhaust capacity of the emergency exhaust system based on the sum of the exhaust volume of the process exhaust system and the exhaust volume of the normal exhaust system. This makes full use of the existing exhaust volume of the process exhaust system, avoids the duplication of exhaust equipment, reduces equipment redundancy, and effectively reduces system investment and operating energy consumption.

[0056] In this embodiment, in step S310, since a normal exhaust ventilation system was arranged in step S200, the fresh air volume L1 of the independent room under normal conditions = the process exhaust gas volume Lg1 under normal conditions + the exhaust volume Lp1 of the normal exhaust ventilation system + the positive pressure air volume Lz of the independent room; the fresh air volume L2 of the independent room under power outage conditions = the process exhaust gas volume Lge1 under power outage conditions + the exhaust volume Lp1 of the normal exhaust ventilation system + the positive pressure air volume Lz of the independent room. Therefore, when configuring the clean air handling system, the fresh air volume Lx1 allocated to the independent room under normal conditions by the clean air handling unit and the fresh air volume Lxe1 allocated to the independent room under normal conditions by the emergency power clean air handling unit also need to take into account the exhaust volume Lp1 of the normal exhaust ventilation system.

[0057] Furthermore, such as Figure 4 As shown, step S300 further includes: S320 determines whether the fresh air volume provided by the clean air handling system to the independent room 1012 after the standby clean fresh air handling unit 602 is sufficient to meet the emergency air exchange rate and exhaust air volume Lv required by the independent room 1012. If not, a fresh air filter unit (FAU) is configured to supplement the fresh air volume of the independent room 1012.

[0058] Considering that in the event of a flammable or explosive gas leak, the emergency exhaust system increases the exhaust volume of the independent room 1012, but in order to prevent the gas in the independent room 1012 from spreading outward, the independent room 1012 needs to maintain a zero-pressure state. In some cases, the standby clean air handling unit 602 needs to be activated simultaneously to increase the corresponding fresh air volume to maintain the zero-pressure state of the independent room 1012. In the event of an emergency, the fresh air volume Lbx1 provided by the standby clean air handling unit to the independent room satisfies Lx1+Lbx1-Lp101=Lv. In the event of a power outage, the fresh air volume Lbx2 provided by the standby clean air handling unit to the independent room satisfies Lxe1+Lbx2-Lp101=Lv.

[0059] However, if the backup clean air handling unit is started but still cannot meet the emergency air exchange rate and exhaust volume Lv required for 1012 rooms, a fresh air filtration unit (FAU) needs to be configured to supplement the fresh air volume and ensure that the exhaust volume and fresh air volume are balanced.

[0060] In step S320 of this embodiment, a new clean air handling unit (MAU) is added instead of a fresh air filter unit (FAU) with the same air volume. Since the FAU only has the functional sections G4+F7+fan, G4+F7+H10+fan, or G4+F7+H13+fan, it reduces at least the functional sections such as primary cooling coil, secondary cooling coil, preheating coil, reheating coil, and chemical filter compared to the MAU. This can reduce the energy consumption of cold and heat sources, reduce fan pressure, reduce fan power, reduce equipment investment and subsequent operating energy consumption, and at the same time reduce the area occupied by the machine room and improve the overall energy efficiency of the system.

[0061] For example, such as Figure 4 As shown, when Lx1+Lbx1-Lp101≥Lv and Lxe1+Lbx2-Lp101≥Lv, no fresh air filtration unit (FAU) is required; when Lx1+Lbx1-Lp101≥Lv and Lxe1+Lbx2-Lp101<Lv, then a first fresh air filtration unit 701 needs to be configured so that the fresh air volume Lsx1 supplemented by FAU1 satisfies Lxe1+Lbx2+Lsx1-Lp101=Lv, in order to supplement the air supply during shutdown. In the event of a power outage, the fresh air volume is insufficient. When Lx1+Lbx1-Lp101<Lv, a first fresh air filter unit 701 and a second fresh air filter unit 702 need to be added simultaneously to ensure that the fresh air volume Lsx1 supplemented by the first fresh air filter unit 701 and the fresh air volume Lsx2 supplemented by the second fresh air filter unit 702 satisfy Lx1+Lbx1+Lsx1-Lp101=Lv and Lxe1+Lbx2+Lsx1+Lsx2-Lp101=Lv.

[0062] Furthermore, such as Figure 6 As shown, step S400 further includes: S420 determines whether it is necessary to install a makeup air branch and a pressure relief branch based on the exhaust volume of the process exhaust system, the exhaust volume of the normal exhaust system, and the positive pressure air volume of the independent room.

[0063] Specifically, step S420 includes: S421 When Lg1+Lp102+Lz<Lv or Lge1+Lp102+Lz<Lv, a makeup air branch 901 is installed in the independent room 101, and a second fresh air flow control component is arranged there. The makeup air branch 901 is used to supplement the insufficient fresh air volume when a flammable or explosive gas leak occurs in the independent room 1012. The second fresh air flow control component is used to adjust the fresh air flow of the makeup air branch 901. The second fresh air flow control component includes a second differential pressure sensor 803 and a second electrically adjustable air valve 804. The second differential pressure sensor 803 is set to a zero differential pressure value.

[0064] Under normal conditions, the fresh air volume in an independent room is L1n = L1 - Lp101 = Lg1 + Lp102 + Lz. Under power outage conditions, the fresh air volume in an independent room is L2n = L2 - Lp101 = Lge1 + Lp102 + Lz. Therefore, when Lg1 + Lp102 + Lz < Lv or Lge1 + Lp102 + Lz < Lv, it indicates that the fresh air volume provided by the fresh air system to the independent room under emergency conditions or when the system is out of service cannot meet the emergency air exchange rate and exhaust volume of the independent room. Therefore, it is necessary to start the standby clean fresh air handling unit 602 and set up a makeup air branch 901 to make up the air. At the same time, a second fresh air flow control component is arranged to control the fresh air volume of the makeup air branch 901.

[0065] By setting up a make-up air branch 901 and arranging a second fresh air flow control component, the control system can control the opening of the second electric regulating valve 804 through the second differential pressure sensor 803, thereby adjusting the make-up air volume of the make-up air branch 901. This ensures that the fresh air volume and exhaust air volume of the independent room 1012 are dynamically matched in case of an accident or power outage, ensuring that the independent room 1012 always maintains a zero-pressure state, effectively preventing the leakage or backflow of harmful gases.

[0066] Furthermore, such as Figure 6 As shown, step S420 further includes: S422 When Lg1+Lp102≥Lv or Lg1+Lp102+Lz≥Lv or Lge1+Lp102+Lz≥Lv, a pressure relief branch 902 is installed in the independent room 101, and a third fresh air flow control component is arranged there. The pressure relief branch 902 is used to discharge excess fresh air when a flammable or explosive gas leak occurs in the independent room 1012. The third fresh air flow control component is used to adjust the fresh air flow of the pressure relief branch 902. The third fresh air flow control component includes a third differential pressure sensor 805 and a third electrically adjustable damper 806. The third differential pressure sensor 805 is set to a zero differential pressure value.

[0067] Since the normal indoor fresh air volume of an independent room is L1n=L1-Lp101=Lg1+Lp102+Lz, and the indoor fresh air volume of an independent room during a power outage is L2n=L2-Lp101=Lge1+Lp102+Lz, when Lg1+Lp102≥Lv or Lg1+Lp102+Lz≥Lv, it indicates that the fresh air system provides an excessive amount of fresh air to the independent room during an emergency. When Lge1+Lp102+Lz≥Lv, it indicates that the fresh air system provides an excessive amount of fresh air to the independent room during a power outage. When any of the above three situations exist, a pressure relief branch 902 needs to be set up to relieve pressure to other areas, and a third fresh air flow control component needs to be set up to adjust the fresh air flow of the pressure relief branch 902.

[0068] By setting up a pressure relief branch 902 and arranging a third fresh air flow control component, pressure can be released to other areas in time before excessive fresh air enters the fresh air duct of the independent room 101. The control system can control the opening of the third electric regulating valve 806 through the third differential pressure sensor 805, thereby adjusting the pressure relief air volume of the pressure relief branch 902. This ensures that the fresh air volume and exhaust air volume of the independent room 1012 are dynamically matched in case of an accident or power outage, ensuring that the independent room 1012 always maintains a zero-pressure state and effectively preventing the leakage or backflow of harmful gases.

[0069] It should be noted that this embodiment also includes an alarm device 807. When the indoor pressure difference deviates from the set value or the gas concentration exceeds the standard, the alarm device 807 issues an alarm, and the control system starts the emergency exhaust system and shuts down the make-up air branch 901 to ensure that the risk is controllable. The alarm device 807 is linked to the emergency exhaust system, the standby clean fresh air handling unit 602, the fresh air filter unit 601, the second fresh air flow control component, and the third fresh air flow control component.

[0070] Example 3 The fresh air ventilation method in this embodiment is basically the same as the fresh air ventilation method for industrial cleanrooms provided in Embodiments 1 and 2. The difference is that this embodiment also includes step S500, system operation. Specifically, in the event of an accident or a power outage, the fan filter unit 201 of independent room 101 is shut down, and the airflow balance in independent room 1012 is controlled independently, so that the fresh air volume L3n in the independent room during the accident and the fresh air volume L4n in the independent room during the power outage are equal to the total exhaust volume Lp in the independent room during the accident and power outage respectively.

[0071] Specifically, when a normal exhaust ventilation system 401 is installed in an independent room, for cleanrooms where there is a risk of leakage of flammable and explosive gases, the operation status of the fresh air ventilation system in the independent room 101 is divided into four working conditions: normal state, power outage state, accident state, and power outage accident state.

[0072] Under normal conditions, the fresh air volume of independent room 101 is supplied by the clean air handling unit 601 according to the fresh air volume demand of independent room 101. The first electrically adjustable damper 802 in independent room 101 is opened, and the first differential pressure sensor 801 is set to a positive differential pressure value according to the cleanliness level requirements of the independent room. The control system controls the opening degree of the first electrically adjustable damper 802 based on the feedback from the first differential pressure sensor 801, thereby controlling the value of the fresh air volume L1n in independent room under normal conditions; L1n=Lx1-Lp101=Lg1+Lp102+Lz.

[0073] During a power outage, the fresh air volume of independent room 101 is supplied by the emergency clean air handling unit 6011 according to the fresh air volume demand of independent room 101. The first electrically adjustable damper 802 in independent room 101 is opened, and the first differential pressure sensor 801 is set to a positive differential pressure value according to the cleanliness level requirements of the independent room. The control system controls the opening degree of the first electrically adjustable damper 802 based on the feedback from the first differential pressure sensor 801, thereby controlling the value of the fresh air volume L2n in the independent room during a power outage; L2n=Lxe1-Lp101=Lge1+Lp102+Lz.

[0074] In case of an accident or power outage, the independent room 1012 must maintain a zero-pressure environment, and the fresh air volume and exhaust air volume in the independent room 1012 must be balanced. Since different cleanrooms have different design requirements for process exhaust gas systems, the following seven examples illustrating the air volume balancing method in the system operation steps are given based on the values ​​of the independent room's process exhaust gas volume Lg1 and the emergency process exhaust gas volume Lge1, considering various operating scenarios.

[0075] Operational Status 1: Independent room 1012 indoor exhaust system 301 without process waste gas, i.e., Lg1=0: like Figure 7 As shown, according to the configuration methods of Embodiments 1 and 2, the ventilation system is equipped with a first emergency exhaust fan 501, which is activated in case of an emergency. The total exhaust volume of the independent room is Lp = Lp102 + Lsp1 = Lv. Simultaneously, the standby clean fresh air handling unit 602, the second electrically adjustable damper 804, and the second differential pressure sensor 803 are activated. The control system controls the opening of the second electrically adjustable damper 804 based on feedback from the second differential pressure sensor 803, so that the make-up air branch 901 provides make-up air to the independent room 101, making the fresh air volume of the independent room in the emergency state L3n = Lx1 + Lbx1 - Lp101 = Lv. If the fresh air volume is still less than Lv, then... Figure 8 As shown, the first fresh air filter unit 701 is added and started to make up the air, so that L3n=Lx1+Lbx1+Lsx1-Lp101=Lv.

[0076] Operating condition 2: Under normal conditions, the exhaust volume of process waste gas in the independent room Lg1 + the normal exhaust volume of the independent room Lp102 ≥ Lv, and under power outage conditions, the exhaust volume of process waste gas in the independent room Lge1 + the normal exhaust volume of the independent room Lp102 ≥ Lv, that is, Lg1 + Lp102 ≥ Lv and Lge1 + Lp102 ≥ Lv. like Figure 9As shown, according to the configuration methods of Embodiments 1 and 2, the pressure relief branch 902 and the third fresh air control component are arranged. After an emergency alarm, the third electric regulating valve 806 and the third differential pressure sensor 805 are linked, and excess air volume is discharged to other areas of clean area 1 except for independent room 101 through the pressure relief branch 902. The control system controls the opening of the third electric regulating valve 806 according to the third differential pressure sensor 805, so that the air volume in independent room 1012 is maintained in balance, that is: In the event of an accident, the total exhaust volume of the independent room is Lp = Lg1 + Lp102 ≥ Lv, and the fresh air volume of the independent room in the event of an accident is L3n = Lx1 - Lp101 - Ld1 = Lp ≥ Lv; where Ld1 is the fresh air volume of the pressure relief branch in the event of an accident.

[0077] During a power outage, the total exhaust volume of an independent room is Lp = Lge1 + Lp102 ≥ Lv, and the fresh air volume of an independent room during a power outage is L4n = Lxe1 - Lp101 - Ld2 = Lp ≥ Lv; where Ld2 is the fresh air volume of the pressure relief branch during a power outage.

[0078] Under normal operating conditions, the exhaust volume of process waste gas in the independent room Lg1 + the normal exhaust volume of the independent room Lp102 ≥ Lv. However, under power outage conditions, the exhaust volume of process waste gas in the independent room Lge1 + the normal exhaust volume of the independent room Lp102 < Lv, and the exhaust volume of process waste gas in the independent room Lge1 + the normal exhaust volume of the independent room Lp102 + the positive pressure volume of the independent room Lz ≥ Lv; that is, Lg1 + Lp102 ≥ Lv and Lge1 + Lp102 < Lv and Lge1 + Lp102 + Lz ≥ Lv. like Figure 10 As shown, based on the configuration methods of Embodiments 1 and 2, a first emergency exhaust fan 501 is added, a pressure relief branch 902 and a third fresh air control component are arranged. After an emergency alarm, the third electrically adjustable damper 806 and the third differential pressure sensor 805 are linked, and excess air volume is discharged to other areas through the pressure relief branch 902. The control system controls the opening of the third electrically adjustable damper 806 according to the third differential pressure sensor 805, so that the air volume in the independent room 1012 is maintained in balance, that is: In the event of an accident, the total exhaust volume of an independent room is Lp = Lg1 + Lp102 ≥ Lv, and the fresh air volume of an independent room in the event of an accident is L3n = L1 - Lp101 - Ld1 = Lp ≥ Lv. In the event of a power outage, the first emergency exhaust fan 501 is started to increase the exhaust volume. The total exhaust volume of the independent room is Lp=Lge1+Lp102+Lsp1=Lv. The fresh air volume of the independent room in the event of a power outage is L4n=Lxe1-Lp101-Ld2=Lp=Lv.

[0079] Operating condition 4: Under normal conditions, the exhaust volume of process waste gas in the independent room Lg1 + the normal exhaust volume of the independent room Lp102 ≥ Lv, and under power outage conditions, the exhaust volume of process waste gas in the independent room Lge1 + the normal exhaust volume of the independent room Lp102 + the positive pressure volume of the independent room Lz < Lv; that is, Lg1 + Lp102 ≥ Lv and Lge1 + Lp102 + Lz < Lv. like Figure 11 As shown, based on the configuration methods of Embodiments 1 and 2, a first emergency exhaust fan 501 is added, a pressure relief branch 902 and a third fresh air control component are arranged, and a makeup air branch 901 and a second fresh air control component are also arranged. That is: In the event of an accident, after the alarm is triggered, the third electric regulating damper 806 and the third differential pressure sensor 805 work together to discharge excess air to other areas through the pressure relief branch 902. The control system controls the opening of the third electric regulating damper 806 based on the third differential pressure sensor 805, so that the air volume in the independent room 1012 remains balanced. The total exhaust air volume in the independent room is Lp = Lg1 + Lp102 ≥ Lv, and the fresh air volume in the independent room during an accident is L3n = Lx1 - Lp101 - Ld1 = Lp ≥ Lv. In the event of a power outage, after the alarm is triggered, the first emergency exhaust fan 501 starts, and the standby clean fresh air handling unit 602 starts to provide supplementary air. The control system, based on feedback from the second differential pressure sensor 803, controls the opening of the second electrically adjustable damper 804 to maintain a balanced airflow in the independent room 1012. The third electrically adjustable damper 806 remains closed. The total exhaust airflow in the independent room is Lp = Lge1 + Lp102 + Lsp1 = Lv. The fresh airflow in the independent room during a power outage is L4n = Lxe1 + Lbx2 - Lp101 = Lp = Lv. If the fresh airflow is still less than Lv, then... Figure 12 As shown, if the first fresh air filter unit 701 is added and started to make up the air, then L4n=Lxe1+Lbx2+Lsx1-Lp101=Lp=Lv.

[0080] Operating condition 5: Under normal conditions, the exhaust volume of process waste gas in the independent room Lg1 + the normal exhaust volume of the independent room Lp102 < Lv, and under normal conditions, the exhaust volume of process waste gas in the independent room Lg1 + the normal exhaust volume of the independent room Lp102 + the positive pressure volume of the independent room Lz ≥ Lv. Under power outage conditions, the exhaust volume of process waste gas in the independent room Lge1 + the normal exhaust volume of the independent room Lp102 + the positive pressure volume of the independent room Lz ≥ Lv; that is, Lg1 + Lp102 < Lv and Lg1 + Lp102 + Lz ≥ Lv and Lge1 + Lp102 + Lz ≥ Lv. like Figure 13As shown, based on the configuration methods of Embodiments 1 and 2, a first emergency exhaust fan 501 and a second emergency exhaust fan 502 are added, and a pressure relief branch 902 and a third fresh air control component are arranged. After an emergency alarm, the third electric regulating valve 806 and the third differential pressure sensor 805 are linked, and excess air volume is discharged to other areas through the pressure relief branch 902. The control system controls the opening of the third electric regulating valve 806 based on the feedback from the third differential pressure sensor 805, so that the air volume in the independent room 1012 is maintained in balance, that is: In the event of an accident, after the accident alarm is triggered, the first emergency exhaust fan 501 will start. The total exhaust volume of the independent room is Lp=Lg1+Lp102+Lsp1=Lv, and the fresh air volume of the independent room in the event of an accident is L3n=Lx1-Lp101-Ld1=Lp=Lv. In the event of a power outage, after the alarm device 807 issues an alarm, the first emergency exhaust fan 501 and the second emergency exhaust fan 502 start simultaneously. Then, the total exhaust volume of the independent room is Lp=Lge1+Lp102+Lsp1+Lsp2=Lv, and the fresh air volume of the independent room in the event of a power outage is L4n=Lxe1-Lp101-Ld2=Lp=Lv.

[0081] Operating condition 6: Under normal conditions, the exhaust volume of process waste gas in the independent room Lg1 + the normal exhaust volume of the independent room Lp102 < Lv, and under normal conditions, the exhaust volume of process waste gas in the independent room Lg1 + the normal exhaust volume of the independent room Lp102 + the positive pressure volume of the independent room Lz ≥ Lv. Under power outage conditions, the exhaust volume of process waste gas in the independent room Lge1 + the normal exhaust volume of the independent room Lp102 + the positive pressure volume of the independent room Lz < Lv, that is, Lg1 + Lp102 < Lv and Lg1 + Lp102 + Lz ≥ Lv and Lge1 + Lp102 + Lz < Lv. like Figure 14 As shown, based on the configuration methods of Embodiments 1 and 2, a first emergency exhaust fan 501 and a second emergency exhaust fan 502 are added, a pressure relief branch 902 and a third fresh air control component are arranged, and a makeup air branch 901 and a second fresh air control component are also arranged. That is: In the event of an accident, after the accident alarm is triggered, the first emergency exhaust fan 501 is activated, and the third electric regulating valve 806 and the third differential pressure sensor 805 are linked. The control system controls the opening of the third electric regulating valve 806 according to the third differential pressure sensor 805, so that the air volume in the independent room 1012 is kept balanced. The total exhaust air volume in the independent room is Lp=Lg1+Lp102+Lsp1=Lv, and the fresh air volume in the independent room in the event of an accident is L3n=Lx1-Lp101-Ld1=Lp=Lv.

[0082] In the event of a power outage, after the alarm is triggered, the first emergency exhaust fan 501 and the second emergency exhaust fan 502 start simultaneously, and the standby clean fresh air handling unit 602 starts to provide supplementary air. The control system controls the opening of the second electric regulating damper 804 based on feedback from the second differential pressure sensor 803, so that the air volume in the independent room 1012 remains balanced, and the third electric regulating damper 806 remains closed. The total exhaust air volume in the independent room is Lp = Lge1 + Lp102 + Lsp1 + Lsp2 = Lv, and the fresh air volume in the independent room during a power outage is L4n = Lxe1 + Lbx2 - Lp101 = Lp = Lv. If the fresh air volume is still less than Lv, then... Figure 15 As shown, the first fresh air filtration unit 701 is added and started, so that L4n=Lxe1+Lbx2+Lsx1-Lp101=Lp=Lv.

[0083] Operating condition 7: Under normal conditions, the combined volume of process exhaust gas in the independent room (Lg1 + Lp102) < Lv, and the combined volume of process exhaust gas in the independent room (Lg1 + Lp102 + Lz) < Lv; that is, Lg1 + Lp102 < Lv and Lg1 + Lp102 + Lz < Lv. like Figure 16 As shown, according to the configuration methods of Embodiments 1 and 2, a first emergency exhaust fan 501 and a second emergency exhaust fan are added, a makeup air branch 901 and a second fresh air control component are arranged, and the control system controls the opening of the second electric regulating valve 804 based on the feedback from the second differential pressure sensor 803, so that the air volume in the independent room 1012 is maintained in balance, that is: In the event of an accident, after the accident alarm is triggered, the first emergency exhaust fan 501 is activated, and the standby clean fresh air handling unit 602 is activated to make up the air. The total exhaust air volume of the independent room is Lp=Lg1+Lp102+Lsp1=Lv, and the fresh air volume of the independent room in the event of an accident is L3n=Lx1+Lbx1-Lp101=Lp=Lv.

[0084] In the event of a power outage, after the alarm is triggered, the first emergency exhaust fan 501 and the second emergency exhaust fan 502 are simultaneously activated. The total exhaust volume of the independent room is Lp = Lg1 + Lp102 + Lsp1 + Lsp2 = Lv. The fresh air volume of the independent room during a power outage is L4n = Lxe1 + Lbx2 - Lp101 = Lp = Lv. If the fresh air volume is still less than Lv, then... Figure 17 As shown, the first fresh air filtration unit 701 is added and started, L4n = Lxe1 + Lbx2 + Lsx1 - Lp101 = Lp = Lv.

[0085] like Figure 18As shown, if the fresh air volume of an independent room in an accident state is L3n = Lx1 + Lbx1 - Lp101 < Lv, then according to the configuration methods of Embodiments 1 and 2, a second fresh air filter unit 702 will be added. In an accident state, the first fresh air filter unit 701 is started simultaneously, and the fresh air volume of the independent room in an accident state is L3n = Lx1 + Lbx1 + Lsx1 - Lp101 = Lv; in the event of a power outage, the second fresh air filter unit 702 also needs to be started simultaneously, and the fresh air volume of the independent room in the event of a power outage is L4n = Lxe1 + Lbx2 + Lsx1 + Lsx2 - Lp101 = Lv.

[0086] The fresh air ventilation method for industrial cleanrooms in this embodiment can precisely adjust and control the fresh air volume and exhaust air volume of independent room 1012 under various operating conditions. It ensures that while the exhaust air volume of independent room 1012 meets the required emergency air exchange rate Lv, it remains stable at zero pressure difference. This not only enables the rapid discharge of flammable and explosive gases but also prevents the spread of pollutants, maintains the cleanliness of independent room 101, effectively guarantees the safety and emergency handling efficiency of the cleanroom, and greatly saves operating energy consumption.

[0087] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention.

Claims

1. A fresh air ventilation method for an industrial cleanroom, characterized in that, Includes the following steps: S100 Separate independent room (101): Separate the area in the cleanroom where there may be a risk of flammable and explosive gas leakage from other areas to form an independent room (101). The S200 is equipped with a ventilation system; The S300 is equipped with a fresh air system: The S400 is equipped with a fresh air duct and control system.

2. The fresh air ventilation method for industrial cleanrooms according to claim 1, characterized in that, Step S200 includes: S210 provides an independent clean air conditioning return air system in the independent room (101), including an independent return air duct (202), return air louvers (203) and dry coil (204).

3. The fresh air ventilation method for industrial cleanrooms according to claim 2, characterized in that, Step S200 also includes: S220 is configured with a process exhaust gas system (301); including: according to the amount of process exhaust gas generated by the process equipment in the independent room (101), the process exhaust gas system is set with Lg1 and Lge1 in the independent room, wherein Lg1 is the exhaust volume of the process exhaust gas system in the independent room (101) under normal conditions, and Lge1 is the exhaust volume of the process exhaust gas system in the independent room (101) when the mains power is cut off and the system is operating with emergency power.

4. The fresh air ventilation method for industrial cleanrooms according to claim 3, characterized in that, In step S220, a separate process exhaust system is set up for the independent room (101).

5. The fresh air ventilation method for an industrial cleanroom according to claim 4, characterized in that, Step S300 includes: S310 Configure a clean air handling system: Set the required positive pressure value in the clean area (12), and configure the fresh air capacity of the fresh air system according to the exhaust volume of the process exhaust system (301) and the air volume required to maintain the positive pressure in the clean area (12).

6. The fresh air ventilation method for an industrial cleanroom according to claim 5, characterized in that, Step S310 includes: S311 is configured with a clean air handling unit (601) so that when the clean air handling unit is started, the fresh air volume Lx1 allocated to the independent room is at least equal to the fresh air volume L1 of the independent room under normal conditions. The L1 is equal to the sum of the process exhaust gas volume Lg1 under normal conditions and the positive pressure air volume Lz of the independent room.

7. The fresh air ventilation method for an industrial cleanroom according to claim 6, characterized in that, Step S310 also includes: S312 is configured with an emergency power supply clean air handling unit (6011). Part of the clean air handling unit (601) is configured with an emergency power supply so that when the emergency power supply clean air handling unit is started, the fresh air volume Lxe1 allocated to the independent room is at least equal to the fresh air volume L2 of the independent room under the power outage state. The L2 is equal to the sum of the process exhaust gas volume Lge1 under the power outage state and the positive pressure air volume Lz of the independent room.

8. The fresh air ventilation method for an industrial cleanroom according to claim 7, characterized in that, Step S310 also includes: S313 is configured with a backup clean air handling unit (602), which includes at least one backup clean air handling unit connected to an emergency source.

9. The fresh air ventilation method for an industrial cleanroom according to claim 8, characterized in that, Step S400 includes: S410 provides a first fresh air flow control component in the independent room (101), the first fresh air flow control component being used to adjust the value of Lx1 or Lxe1.

10. The fresh air ventilation method for an industrial cleanroom according to claim 9, characterized in that, It also includes: S500 system operation: in the event of an accident or power outage, the fan filter unit (201) of the independent room (101) is shut down, and the air volume balance of the independent room (1012) is controlled separately.

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