Air volume balancing method for clean room with flammable and explosive gas release risk

Abstract

The invention discloses an air volume balancing method for a clean room with flammable and explosive gas release risks, belongs to the technical field of industrial clean production plant design, and aims at solving one of the problems that a ventilation fresh air system of the clean room with the flammable and explosive gas release risks is large in investment or high in energy consumption, and air volume balance is not easy to control. The air volume balancing method comprises the steps that independent fireproof units are separated in a clean area; arranging an exhaust system of the independent fireproof unit main chamber; arranging a fresh air system; arranging a fresh air channel and a control system; and operating the system. According to the air volume balancing method for the clean room with the flammable and explosive gas release risk, diffusion of the flammable and explosive gas can be effectively controlled, the safety level of a clean workshop is improved, equipment investment is reduced, and system operation energy consumption is reduced.

Description

Technical Field

[0001] This invention belongs to the field of industrial cleanroom design technology, and relates to a method for balancing airflow in cleanrooms with the risk of releasing flammable and explosive gases. Background Technology

[0002] As automation levels increase in the electronics manufacturing industry, cleanrooms in electronics workshops typically require AGV charging rooms, such as those in flat panel display and semiconductor projects. However, AGV charging involves the risk of flammable and explosive gases being released from the charging batteries. If such a release occurs in the cleanroom, it can easily lead to serious accidents such as explosions, fires, asphyxiation, equipment damage, environmental pollution, and personal injury.

[0003] For clean areas involving the risk of flammable and explosive releases, the indoor air should be replaced quickly after the release of flammable and explosive gases (for example, the exhaust standard in the clean room should reach 12 times / hour), and the indoor pressure should be maintained to prevent the flammable and explosive gases from spreading outward or non-clean air from seeping in. However, such clean rooms occupy a large area, so the cost of setting up an emergency exhaust system in the clean room as a whole is high. In addition, the clean room is a positive pressure environment under normal conditions and when the mains power is out, but it needs to be automatically maintained at zero pressure in the event of an accident or when the mains power is out. It is also difficult to control the air volume balance and accurately match the actual needs. Summary of the Invention

[0004] Based on the above analysis, the present invention aims to provide a cleanroom ventilation system and ventilation method to solve one of the problems of large investment, high energy consumption, and difficulty in controlling air volume balance in industrial cleanroom accident handling ventilation systems.

[0005] The objective of this invention is mainly achieved through the following technical solutions.

[0006] This invention provides a method for airflow balancing in cleanrooms with a risk of flammable and explosive gas release, comprising the following steps: S100 separates independent fire-resistant units within the clean area; The S200 is equipped with an independent fire-resistant unit main room exhaust system; S300 is equipped with a fresh air system; The S400 is equipped with a fresh air duct and control system. S500 system operation: Under normal conditions and during power outages, the main compartment of the independent fire protection unit maintains a positive pressure difference of P1 for airflow balance; in the event of a gas release accident, the main compartment of the independent fire protection unit maintains a zero pressure difference for airflow balance.

[0007] Furthermore, S100 includes: The area within the cleanroom that may be at risk of releasing flammable or explosive gases is isolated from other areas of the cleanroom and formed as an independent fire protection unit; the independent fire protection unit includes an upper mezzanine and a main chamber of the independent fire protection unit.

[0008] Furthermore, the exhaust system described in S200 includes a process exhaust system and a non-process exhaust system.

[0009] Furthermore, the S200 also includes: S210 determines the values ​​of Lg1 and Lge1, where Lg1 is the exhaust volume of the process exhaust system for the main chamber of the independent fire protection unit under normal and emergency conditions, and Lge1 is the exhaust volume of the process exhaust system for the main chamber of the independent fire protection unit when the power outage system is operating with emergency power.

[0010] Furthermore, the S200 also includes: S220 sets the values ​​of Nv and Lv, where Nv is the exhaust volume of the main room of the independent fire protection unit with good ventilation and Lv is the exhaust volume of the main room of the independent fire protection unit with minimum ventilation in the event of an accident.

[0011] Furthermore, the S200 also includes: S230 is for arranging non-process exhaust gas ventilation systems in the main compartment of independent fire-resistant units; Furthermore, S230 specifically includes: S231 When Lg1=0 and Lge1=0, arrange the non-process exhaust gas system of the main room of the independent fire protection unit according to the values ​​of Nv and Lv.

[0012] Furthermore, S231 also includes: arranging a normal exhaust ventilation system and a standby exhaust ventilation system such that Lp1=Lbp=Nv and Lp1+Lbp≥Lv, where: Lp1 is the exhaust volume of the normal exhaust ventilation system and Lbp is the exhaust volume of the standby exhaust ventilation system.

[0013] Furthermore, the S300 also includes: S310 determines the value of the positive pressure air volume Lz in the main room of the independent fire protection unit based on the positive pressure difference P1 required under normal conditions in the clean room; S320 is configured with a clean air handling system; the clean air handling system is able to meet the following conditions: Lx1≥Lp1+Lz=Nv+Lz and Lxe1≥Lp1+Lz=Nv+Lz; where Lx1 is the fresh air volume allocated to the independent fire protection unit under normal conditions; Lxe1 is the fresh air volume allocated to the independent fire protection unit under power outage conditions; the clean air handling system also includes one or more standby clean air handling units.

[0014] Furthermore, the S400 includes: A first differential pressure sensor is installed in the main compartment of the independent fire protection unit.

[0015] Furthermore, S231 also includes: If a process exhaust gas system is installed, then S232 shall continue to be executed.

[0016] Furthermore, S230 also includes: S232 determines whether Lg1 < Nv is true. If true, then add a normal exhaust system, a power outage exhaust system, and a backup exhaust system, such that Lp1 = Nv - Lg1, Lp2 = min{(Lg1 - Lge1), (Nv - Lge1)}, and Lbp = max{(Lv - Nv), (Nv - Lge1)}, completing step S230; where Lp2 is the exhaust volume of the power outage exhaust system; if false, continue to execute S233. S233 Determine whether Lge1 < Nv is true. If true, add a power outage ventilation system and a backup ventilation system, so that Lp2 = min{(Lg1 - Lge1), (Nv - Lge1)} and Lbp = max{(Lv - Nv), (Nv - Lge1)} to complete step S230; if not true, continue to execute S234. S234 Determine whether Lge1 < Lv or Lg1 < Lv is true. If not, complete step S230; if true, continue to execute S235. S235 adds an auxiliary ventilation system, so that Lbp = max{(Lv-Nv), (Nv-Lge1)}, completing step S230.

[0017] Furthermore, the S300 also includes: S330 Fresh Air Filtering Unit Arrangement: When the makeup air volume of the standby clean fresh air handling unit cannot meet Lx1+Lbx1≥Lv and Lxe1+Lbx2≥Lv, a first and second fresh air filtering unit are added to increase the makeup air volume to the main room of the independent fireproof unit during emergency situations and power outages, ensuring Lx1+Lbx1+Lsx1≥Lv and Lxe1+Lbx2+Lsx1+Lsx2≥Lv; when the makeup air volume of the standby clean fresh air handling unit alone cannot meet Lx1+Lbx1+Lsx1≥Lv and Lxe1+Lbx2+Lsx1+Lsx2≥Lv. When e1+Lbx2≥Lv, a first fresh air filtration unit is added to increase the make-up air volume to the main room of the independent fireproof unit during a power outage, such that Lxe1+Lbx2+Lsx1≥Lv; where Lbx1 is the fresh air volume provided to the independent fireproof unit by the standby fresh air handling unit during an accident; Lbx2 is the fresh air volume provided to the independent fireproof unit by the standby fresh air handling unit during a power outage; Lsx1 is the fresh air volume supplemented by the first fresh air filtration unit; and Lsx2 is the fresh air volume supplemented by the second fresh air filtration unit.

[0018] Furthermore, S400 also includes: if Lg1+Lz<Lv, a makeup air branch, a second electrically adjustable air valve, and a second differential pressure sensor are set. The differential pressure sensor is set to a differential pressure value of 0Pa or -5Pa. The control system can control the opening of the second electrically adjustable air valve based on the feedback of the second differential pressure sensor so that the makeup air branch can provide makeup air to the main chamber of the independent fire protection unit.

[0019] Furthermore, step S400 also includes: if Lg1+Lz≥Lv or Lge1+Lz≥Lv, setting up a pressure relief branch, a third electrically adjustable air valve and a third differential pressure sensor, the third differential pressure sensor is set to a differential pressure value of 0Pa or -5Pa, and the control system can control the opening of the third electrically adjustable air valve according to the feedback of the third differential pressure sensor so that the pressure relief branch can depressurize the main chamber of the independent fire protection unit.

[0020] Furthermore, step S500 also includes: under normal conditions, the regular exhaust system is normally open; when the regular exhaust system fails, the backup exhaust system is activated to replace the regular exhaust system; under power outage conditions, the regular exhaust system and the power outage exhaust system are normally open, and when the regular exhaust system or / and the power outage exhaust system fail, the backup exhaust system is activated to replace the regular exhaust system or / and the power outage exhaust system; under emergency conditions, the regular exhaust system and the backup exhaust system are activated simultaneously; under power outage conditions, the regular exhaust system, the power outage exhaust system, and the backup exhaust system are activated simultaneously.

[0021] Furthermore, step S500 also includes: if Lge1+Lz≥Lv, the third electrically operated regulating valve is opened during both the accident state and the power outage accident state; if Lg1+Lz≥Lv and Lge1+Lz<Lv, the third electrically operated regulating valve is opened during the accident state and closed during the power outage accident state, while the second electrically operated regulating valve is opened; if Lg1+Lz<Lv, the second electrically operated regulating valve is opened. Compared with the prior art, the present invention can achieve at least one of the following beneficial effects: 1. The airflow balancing method for cleanrooms with the risk of flammable and explosive gas release of the present invention can effectively prevent the released gas or explosion from affecting adjacent areas by independently separating areas where there is a risk of flammable and explosive gas release, reduce chain reactions, and improve the safety level of cleanrooms. The independent and flexible configuration of ventilation systems and fresh air systems for independent fire protection units optimizes the overall airflow balance, reduces equipment investment, and lowers system operating energy consumption. 2. The air volume balancing method for cleanrooms with the risk of flammable and explosive gas release of the present invention, by arranging an exhaust system separately in the main room of an independent fire protection unit, and arranging the exhaust capacity of the normal exhaust system and the standby exhaust system according to the values ​​of Nv and Lv, can increase the number of exhaust air changes in areas with the risk of flammable and explosive gas release, save equipment investment and operating energy consumption, and avoid the risk of flammable and explosive gas explosion.

[0022] 3. The airflow balancing method for cleanrooms with a risk of releasing flammable and explosive gases, as described in this invention, replaces the addition of a cleanroom fresh air unit (MAU) by adding a fresh air filtration unit (FAU) with the same airflow. Since the FAU only has G4+F7+fan, G4+F7+H10+fan, or G4+F7+H13+fan functional sections, it reduces at least the number of functional sections such as primary surface cooling coil, secondary surface cooling coil, preheating coil, reheating coil, and chemical filter compared to the MAU. This reduces the energy consumption of cold and heat sources, lowers fan pressure, and reduces fan power, significantly reducing equipment investment and subsequent operating energy consumption. At the same time, it also reduces the area occupied by the machine room and improves the overall energy efficiency of the system.

[0023] 4. The airflow balancing method for cleanrooms with flammable and explosive gas release risks of the present invention, by including the exhaust volume of the process exhaust system of the main chamber of the independent fireproof unit in step S200 with the exhaust volume of the number of air changes in normal well-ventilated conditions and the ventilation volume of the number of air changes in emergency conditions, and including the exhaust volume of the process exhaust system of the emergency power supply with the exhaust volume of the number of air changes in ...

[0024] 5. The air volume balancing method for cleanrooms with flammable and explosive gas release risks of the present invention, in step S230, compares the exhaust volume of the process exhaust system of the main chamber of the independent fireproof unit with the air exchange volume required to maintain good ventilation under normal conditions and power outage conditions, as well as the air exchange volume required for emergency ventilation under accident conditions and power outage conditions, to determine whether to add a normal exhaust system, a standby exhaust system, and a power outage exhaust system, so as to make the layout of the non-process waste gas exhaust system more economical and avoid insufficient exhaust or equipment redundancy; in addition, by setting the calculation formula selection principle for the power outage exhaust system and the standby exhaust system, the layout of the non-process waste gas exhaust system can simultaneously guarantee the exhaust and ventilation requirements of four working conditions, while reducing the investment and operating energy consumption of exhaust equipment.

[0025] 6. The air volume balancing method for cleanrooms with the risk of flammable and explosive gas release of the present invention, by determining the setting of the make-up air branch and the pressure relief branch in step S500, can flexibly set the corresponding control components to ensure that the fresh air volume and exhaust air volume of the main chamber of the independent fireproof unit are dynamically matched in the event of an accident or power outage, and to ensure that the main chamber of the independent fireproof unit always maintains a zero-pressure state, effectively preventing the leakage or backflow of flammable and explosive gases.

[0026] 7. The airflow balancing method for cleanrooms with a risk of flammable and explosive gas release, as described in this invention, enables precise adjustment of the dynamic balance of airflow under different operating conditions in step S400 by flexibly configuring the exhaust system and fresh air system according to the performance of the process exhaust system. This ensures that the independent fire protection unit meets ventilation safety requirements under various conditions. Through a multi-stage differential pressure sensing and electric damper linkage mechanism, the risk of overpressure or negative pressure is effectively avoided, improving the reliability of the system's response to accident states. Simultaneously, it reduces the cost of redundant equipment configuration, providing a safe and economical solution for high-risk clean environments.

[0027] In this invention, the above-described technical solutions can be combined with each other to achieve more preferred combinations. Other features and advantages of this invention will be set forth in the following description, and some advantages may become apparent from the description or be learned by practicing the invention. The objects and other advantages of this invention can be realized and obtained through the embodiments described and the accompanying drawings, which are particularly pointed out. Attached Figure Description

[0028] Figure 1 This is a schematic flowchart of an airflow balancing method for a cleanroom with a risk of releasing flammable and explosive gases, according to an embodiment of the present invention. Figure 2 This is a schematic diagram of the fresh air ventilation system layout in a cleanroom according to an embodiment of the present invention; Figure 3 This is one of the schematic diagrams of the independent fire protection unit air volume balancing system layout structure in Embodiment 1 of the present invention; Figure 4 This is the second schematic diagram of the independent fire protection unit air volume balancing system layout structure in Embodiment 1 of the present invention; Figure 5 This is a flowchart illustrating step S200 of Embodiment 2 of the present invention; Figure 6 This is a flowchart illustrating step S400 of Embodiment 2 of the present invention; Figure 7 This is one of the schematic diagrams of the independent fire protection unit air volume balancing system layout structure in operation case 1 of embodiment 2 of the present invention; Figure 8This is the second schematic diagram of the independent fire protection unit air volume balancing system layout structure in operation case 1 of embodiment 2 of the present invention; Figure 9 This is the third schematic diagram of the independent fire protection unit air volume balancing system layout structure in operation case 1 of embodiment 2 of the present invention; Figure 10 This is one of the schematic diagrams of the independent fire protection unit air volume balancing system layout structure in operation scenario 2 of embodiment 2 of the present invention; Figure 11 This is the second schematic diagram of the independent fire protection unit air volume balancing system layout structure in operation scenario 2 of embodiment 2 of the present invention; Figure 12 This is the third schematic diagram of the independent fire protection unit air volume balancing system layout structure in operation scenario 2 of embodiment 2 of the present invention; Figure 13 This is one of the schematic diagrams of the independent fire protection unit air volume balancing system layout structure in operation scenarios 3 and 6 of Embodiment 2 of the present invention; Figure 14 This is the second schematic diagram of the independent fire protection unit air volume balancing system layout structure in operation scenarios 3 and 6 of Embodiment 2 of the present invention; Figure 15 This is one of the schematic diagrams of the independent fire protection unit air volume balancing system layout structure in operation scenarios 4 and 7 of Embodiment 2 of the present invention; Figure 16 This is the second schematic diagram of the independent fire protection unit air volume balancing system layout structure in operation scenarios 4 and 7 of Embodiment 2 of the present invention; Figure 17 This is a schematic diagram of the independent fire protection unit air volume balancing system layout structure in operation scenarios 5 and 8 of Embodiment 2 of the present invention; Figure 18 This is a schematic diagram of the independent fire protection unit air volume balancing system layout structure in operation scenario 9 of embodiment 2 of the present invention.

[0029] Figure label: 101 - Independent fireproof unit; 1011 - Upper mezzanine of independent fireproof unit; 1012 - Main room of independent fireproof unit; 102 - Other areas of cleanroom; 111 - Fireproof board; 112 - Metal wall panel; 201 - Process exhaust gas system; 202 - Normal exhaust system; 203 - Power outage exhaust system; 204 - Backup exhaust system; 301 - Clean air handling system; 3011 - Standby clean air handling unit; 302 - First fresh air filtration unit; 303 - Second fresh air filtration unit; 401-Main fresh air supply line; 402-First differential pressure sensor; 403-First electrically adjustable damper; 404-Make-up air branch line; 405-Second differential pressure sensor; 406-Second electrically adjustable damper; 407-Pressure relief branch line; 408-Third differential pressure sensor; 409-Third electrically adjustable damper; 410-Alarm device; 501-Fan filter unit; 502-Return air duct; 503-Return air louvers; 504-Dry coil. Detailed Implementation

[0030] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which constitute a part of the present invention and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not intended to limit the scope of the present invention.

[0031] To facilitate understanding of the technical solutions of this invention, the terms, English abbreviations, and parameter symbols in this specification are explained as follows: Four operating conditions: normal state, power outage state, emergency state, and power outage emergency state; Normal status: Normal production status; Power outage status: Production status relying on emergency power supply during a power outage; Accident status: The state of an event when flammable and explosive gases are released; Power outage status: A state in which flammable and explosive gases are released during a power outage. Independent fire-resistant unit: A separately separated room where flammable and explosive gases may be released; Upper mezzanine of independent fire-resistant unit: The upper mezzanine within an independent fire-resistant unit; Independent fire-resistant unit main room: The area between the ceiling and the floor within an independent fire-resistant unit; Other areas of the cleanroom: Clean areas within the cleanroom excluding independent fire-resistant units; L1: Fresh air volume of the independent fire-resistant unit under normal conditions; L2: Fresh air volume of the independent fire-resistant unit under power outage conditions; L3: Fresh air volume of the independent fire-resistant unit under emergency conditions; L4: Fresh air volume of the independent fire-resistant unit under emergency conditions under power outage conditions; Lx1: Fresh air volume of the fresh air handling unit allocated to the independent fire-resistant unit under normal conditions; Lxe1: Fresh air volume of the fresh air handling unit allocated to the independent fire-resistant unit under power outage conditions; Lbx1: Fresh air volume provided by the standby fresh air handling unit to the independent fire-resistant unit under emergency conditions; Lbx2: Fresh air volume provided by the standby fresh air handling unit to the independent fire-resistant unit under emergency conditions under power outage conditions; Lg1: Process exhaust gas volume of the main chamber of the independent fire-resistant unit under both normal and emergency conditions; Lge1: Process exhaust volume of the main chamber of the independent fire protection unit under power outage and power outage accident conditions; Lz: Positive pressure air volume of the main chamber of the independent fire protection unit; Lp1: Exhaust volume of the normal exhaust system; Lp2: Exhaust volume of the exhaust system under power outage; Lbp: Exhaust volume of the standby exhaust system; Lsx1: Fresh air volume supplied by the first fresh air filter unit; Lsx2: Fresh air volume supplied by the second fresh air filter unit; Ld1: Fresh air volume of the pressure relief branch under accident conditions; Ld2: Fresh air volume of the pressure relief branch under power outage accident conditions; Nv: Exhaust volume of the main chamber of the independent fire protection unit with good ventilation and air exchange rate; Lv: Exhaust volume of the main chamber of the independent fire protection unit with minimum air exchange rate under accident conditions.

[0032] Example 1 This invention discloses an airflow balancing method for cleanrooms with a risk of releasing flammable and explosive gases, such as... Figure 1 and Figure 2 As shown, it includes the following steps: S100 separates an independent fireproof unit 101 within the clean area; The S200 is equipped with an independent fire-resistant unit, the main room 1012, and its exhaust system is as follows: S300 is equipped with a fresh air system; The S400 is equipped with a fresh air duct and control system. During S500 system operation, in normal conditions and during power outages, the main compartment 1012 of the independent fire protection unit maintains a positive pressure differential P1 airflow balance; in the event of a gas release accident, the main compartment 1012 of the independent fire protection unit maintains a zero pressure differential airflow balance.

[0033] This embodiment of the airflow balancing method for cleanrooms with the risk of flammable and explosive gas release effectively controls the diffusion of flammable and explosive gases by independently separating areas where the risk of flammable and explosive gas release may occur, preventing the release or explosion from affecting adjacent areas, reducing chain reactions, and improving the overall safety level of the cleanroom. The independent configuration and airflow control of the ventilation system and fresh air system for the independent fire protection unit 101 optimizes the overall airflow balance, reduces equipment investment, and lowers system operating energy consumption.

[0034] Specifically, the airflow balancing method for cleanrooms with a risk of releasing flammable and explosive gases in this embodiment includes the following steps in step S100: S110 isolates the process equipment that may release flammable and explosive gases from other areas 102 of the cleanroom. like Figure 2 As shown, the independent fire-resistant unit 101 includes a main fire-resistant unit chamber 1012 and an upper mezzanine 1011. Process equipment and process waste gas branch exhaust ducts that may release flammable or explosive gases are centrally located in the main fire-resistant unit chamber 1012. The upper mezzanine 1011 is used to house the main process waste gas duct, fresh air and ventilation ducts, and electrical facilities. The fan and filter unit 201 of the independent fire-resistant unit 101 is located on the ceiling between the upper mezzanine 1011 and the main fire-resistant unit chamber 1012. The independent fire-resistant unit 101 is isolated from other areas 102 of the cleanroom by fireproof panels 111. A metal wall panel 112 is installed on the wall of the fireproof board 111 near the interior (inner) of the main compartment 1012 of the independent fireproof unit. At the same time, a metal wall panel 112 is also installed on the wall of the fireproof board 111 near the main compartment 102 of the independent fireproof unit. This forms a combination partition wall of a fireproof board 111 in the middle and a metal wall panel 112 on each side around the main compartment 1012 of the independent fireproof unit. This ensures fire resistance, cleanliness, airtightness and structural strength, and prevents released gases from seeping into adjacent areas.

[0035] S120 has an independent clean air conditioning return air system installed in the independent fire protection unit 101.

[0036] like Figure 2 As shown, the independent clean air conditioning return air system includes an independent return air duct 502, return air louvers 503, and dry coil 504. The return air duct 502 is located between the main compartment 1012 of the independent fire-resistant unit and the metal wall panel 112, and the return air louvers 503 are located between the main compartment 1012 of the independent fire-resistant unit and the return air duct 502.

[0037] In normal and power outage conditions, the air in the main chamber 1012 of the independent fire-resistant unit is returned to the upper mezzanine 1011 of the independent fire-resistant unit through the return air louvers 503, return air duct 502, and dry coil 504. After being filtered by the fan filter unit 501, it is then sent back into the main chamber 1012. Purification and temperature / humidity control are achieved through independent circulation, thus avoiding cross-contamination between the independent fire-resistant unit 101 and other areas 102 of the cleanroom, ensuring that released flammable and explosive gases remain under control. When the concentration of released flammable and explosive gases reaches the alarm value, the control system shuts down the fan filter unit 501 of the independent fire-resistant unit 101, creating a direct-flow airflow pattern within the independent fire-resistant unit 101, effectively preventing the stagnation of released gases within the cleanroom.

[0038] Furthermore, in the airflow balancing method for cleanrooms with a risk of releasing flammable and explosive gases in this embodiment, the exhaust system in S200 includes a process exhaust gas exhaust system 201 and a non-process exhaust gas exhaust system.

[0039] Specifically, step S200 includes: S210 determines the values ​​of Lg1 and Lge1, where Lg1 is the exhaust volume of the process exhaust system 201 to the main chamber 1012 of the independent fire protection unit under normal and emergency conditions, and Lge1 is the exhaust volume of the process exhaust system 201 to the main chamber 1012 of the independent fire protection unit when the mains power is cut off and the mains power is cut off during an emergency.

[0040] Normally, when process equipment generates process waste gas during production, a process waste gas exhaust system 201 needs to be installed to directly discharge the process waste gas to the waste gas treatment device, ensuring that the process waste gas does not enter the clean area. When some cleanroom process production steps do not have a process waste gas exhaust system 201, then Lg1=0 and Lge1=0.

[0041] Furthermore, step S200 also includes: S220 sets the values ​​of Nv and Lv, where Nv is the exhaust volume of the main room of the independent fire protection unit with good ventilation and Lv is the exhaust volume of the main room of the independent fire protection unit with minimum ventilation in the event of an accident. In normal and power outage conditions, to ensure the rapid dilution and discharge of released flammable and explosive gases outdoors and to prevent local accumulation, the main room 1012 of the independent fire protection unit should be well-ventilated. For example, the ventilation rate of the main room of the independent fire protection unit for charging is set to no less than 8 times / hour, and the ventilation rate of the main room of the independent fire protection unit for non-charging is set to no less than 6 times / hour. Then, the exhaust volume Nv of the main room of the independent fire protection unit is equal to the volume V of the main room 1012 of the independent fire protection unit multiplied by the ventilation rate of the main room of the independent fire protection unit, that is: Nv=8×V or Nv=6×V.

[0042] In the event of an accident or power outage, in order to expel the released flammable and explosive gases from the cleanroom as quickly as possible, the air exchange rate of the main chamber 1012 of the independent fire protection unit should be increased based on the air exchange rate of a well-ventilated room. For example, if the exhaust air volume and air exchange rate of the main chamber 1012 of the independent fire protection unit in the event of an accident are set to be no less than 12 times / h, then the exhaust air volume of the main chamber of the independent fire protection unit with the minimum air exchange rate during an accident is Lv = 12 × V.

[0043] Furthermore, step S200 also includes: S230 specifies the installation of a non-process waste gas exhaust system for the main compartment 1012 of the independent fireproof unit.

[0044] Specifically, S230 includes: S231 When Lg1=0 and Lge1=0, arrange the non-process exhaust gas system of the main room 1012 of the independent fire protection unit according to the values ​​of Nv and Lv.

[0045] When Lg1=0 and Lge1=0, it is the case that the main chamber 1012 of the independent fire protection unit has no process exhaust system 201. In this embodiment, S230 uses this case as an example to illustrate the air volume balancing method of the clean room.

[0046] Furthermore, S231 also includes: adding a normal exhaust ventilation system 202 and a standby exhaust ventilation system 204 to the main room 1012 of the independent fire protection unit, such that Lp1=Lbp=Nv and Lp1+Lbp=2Nv≥Lv. Substituting into Lbp=max{(Lv-Nv), (Nv-Lge1)} for verification, since Lge1=0, Lbp=Nv. Where: Lp1 is the exhaust volume of the normal exhaust ventilation system, and Lbp is the exhaust volume of the standby exhaust ventilation system.

[0047] Both the normal exhaust system 202 and the backup exhaust system 204 are equipped with emergency power supplies. When the normal exhaust system 202 fails, the backup exhaust system 204 will be activated.

[0048] This embodiment of the airflow balancing method for cleanrooms with a risk of flammable and explosive gas release utilizes a separate non-process waste gas exhaust system arranged in the main chamber 1012 of the independent fire-resistant unit. The exhaust capacity of the normal exhaust system 202 and the standby exhaust system 204 are arranged according to the values ​​of Nv and Lv. This method can independently increase the exhaust air exchange rate in areas with a risk of flammable and explosive gas release, saving equipment investment and operating energy consumption, and avoiding the risk of flammable and explosive gas explosions. The standby exhaust system 204 not only replaces the normal exhaust system 202 in normal conditions when it fails, ensuring that the main chamber 1012 of the independent fire-resistant unit still meets the required exhaust volume for good ventilation, but also can be activated as needed in case of an accident or power outage, ensuring that the main chamber 1012 of the independent fire-resistant unit meets the minimum required exhaust volume for an accident.

[0049] Furthermore, the airflow balancing method for cleanrooms with a risk of releasing flammable and explosive gases in this embodiment also includes: S300 is equipped with a fresh air system; Specifically, step S300 includes the following steps: S310 determines the value of the positive pressure air volume Lz in the main room of the independent fire protection unit based on the positive pressure difference P1 required under normal conditions in the clean room; S320 arranges a clean air handling system 301; ensuring that the clean air handling system 301 can satisfy Lx1≥Lp1+Lz=Nv+Lz and Lxe1≥Lp1+Lz=Nv+Lz; where Lx1 is the fresh air volume allocated to the independent fireproof unit under normal conditions; Lxe1 is the fresh air volume allocated to the independent fireproof unit when the fresh air handling unit is without mains power; The clean air handling system 301 includes one or more clean air handling units equipped with emergency power supplies, which are used to provide fresh air to the clean room in the event of a power outage. Lxe1 is the fresh air volume allocated to the independent fire protection unit when the part of the fresh air handling unit equipped with emergency power supplies is started. The clean air handling system 301 also includes one or more backup clean air handling units 3011, which are used to provide air supply when the main clean air handling unit fails or an accident occurs. The backup clean air handling units 3011 are equipped with emergency power supplies.

[0050] S330 Fresh Air Filtering Unit Arrangement: When the make-up air volume after starting the standby clean fresh air handling unit is still insufficient to meet Lx1+Lbx1≥Lv and Lxe1+Lbx2≥Lv under emergency conditions and power outage conditions, a first fresh air filtering unit 302 is added to increase the make-up air volume to the main room 1012 of the independent fire-resistant unit under emergency conditions and power outage conditions, so that Lx1+Lbx1+Lsx1≥Lv and Lxe1+Lbx2+Lsx1≥Lv; where Lbx1 is the fresh air volume provided to the independent fire-resistant unit by the standby fresh air handling unit under emergency conditions; Lbx2 is the fresh air volume provided to the independent fire-resistant unit by the standby fresh air handling unit under power outage conditions; and Lsx1 is the fresh air volume supplemented by the first fresh air filtering unit 302. The arrangement of the clean fresh air handling system 301 in this embodiment is as follows: Figure 3 and Figure 4 As shown.

[0051] This embodiment, through step S300, enables the fresh air system to provide multiple protections for the main room 1012 of the independent fire-resistant unit. It ensures that, under normal conditions and during power outages, the fresh air volume allocated to the independent fire-resistant unit 101 by the clean air handling system 301 is sufficient to maintain positive pressure in the main room 1012. In emergency situations and power outages, the backup clean air handling unit 3011 is simultaneously activated, providing the necessary fresh air volume to maintain zero pressure in the main room 1012, preventing backflow of harmful gases or indoor environmental imbalance. Furthermore, when the make-up air volume of the backup fresh air handling unit is insufficient to meet the fresh air demand, replacing the newly added clean air handling unit (MAU) with a fresh air filter unit (FAU) of equal air volume significantly reduces equipment investment and subsequent operating energy consumption, while also reducing the space occupied by the equipment room and improving the overall energy efficiency of the system.

[0052] Furthermore, the airflow balancing method for cleanrooms with a risk of releasing flammable and explosive gases in this embodiment also includes: The S400 is equipped with a fresh air duct and control system.

[0053] Specifically, step S400 includes: S410 installs a first differential pressure sensor 402 in the main compartment 1012 of the independent fire protection unit. The first differential pressure sensor 402 is set with a differential pressure value of P1. In normal conditions and during power outages, the control system controls the opening of the first air valve 403 based on the monitoring data of the first differential pressure sensor 402 to adjust the fresh air flow rate of the main fresh air duct 401 in the independent fire protection unit 101, and controls the values ​​of Lx1 and Lxe1, thereby ensuring that the main compartment 1012 of the independent fire protection unit maintains a positive differential pressure value of P1.

[0054] Specifically, step S400 also includes: S420 is equipped with a makeup air branch 404 and a second differential pressure sensor 405. The second differential pressure sensor 405 is located in the main compartment 1012 of the independent fire protection unit and is set to zero pressure.

[0055] like Figure 3 and Figure 4 As shown, the make-up air branch 404 is arranged within the independent fire-resistant unit 101. In case of an accident or power outage, the control system controls the opening of the second air valve 406 based on the monitoring data from the second differential pressure sensor 405, thereby adjusting the airflow of the make-up air branch 404 and consequently adjusting the values ​​of Lx1+Lbx1 and Lxe1+Lbx2 to ensure that the main chamber 1012 of the independent fire-resistant unit maintains zero pressure. Optionally, the second differential pressure sensor 405 can also be set to a slight negative pressure; for example, the value of the second differential pressure sensor 405 is set to -5Pa.

[0056] Furthermore, the airflow balancing method for cleanrooms with a risk of releasing flammable and explosive gases in this embodiment also includes: Step S500 System operation includes: in normal state and power outage state, the main compartment 1012 of the independent fire protection unit maintains the air volume balance with a positive pressure difference value P1; in accident state and power outage accident state, the main compartment 1012 of the independent fire protection unit maintains the air volume balance with a zero pressure difference value.

[0057] Specifically, such as Figure 3 and Figure 4 As shown, under normal conditions, the cleanroom fresh air handling system 301 and the normal exhaust air system 202 are normally open. The control system controls the opening degree of the first air valve 403 according to the first differential pressure sensor 402, so that L1=Lx1=Lp1+Lz; where L1 is the fresh air volume of the independent fireproof unit under normal conditions; when the normal exhaust air system 202 fails, the backup exhaust air system 204 is started to maintain good ventilation in the cleanroom.

[0058] In the event of a power outage, the emergency power supply clean air handling unit and the normal exhaust system 202 remain open. The control system controls the opening of the first air valve 403 based on the first differential pressure sensor 402, so that L2 = Lxe1 = Lp1 + Lz; where L2 is the fresh air volume of the independent fireproof unit in the event of a power outage. If the normal exhaust system 202 fails, the backup exhaust system 204 is activated to maintain good ventilation in the clean room.

[0059] In the event of an accident, alarm device 410 will trigger an alarm, cutting off the power supply to the fan filter unit (FFU) within the independent fire protection unit 101, causing the cleanroom air conditioning system within the independent fire protection unit 101 to switch to DC system operation; the cleanroom fresh air handling system 301, the normal exhaust system 202, and the first air valve 403 will continue to operate normally; alarm device 410 will interlock and activate the backup exhaust system 204, the backup cleanroom fresh air handling unit, and the first fresh air filter unit 302 (if applicable). The control system will control the opening of the second air valve 406 to provide supplementary air based on the second differential pressure sensor 405, ensuring that L3 = Lx1 + Lbx1 = Lp1 + Lbp ≥ Lv, or L3 = Lx1 + Lbx1 + Lsx1 = Lp1 + Lbp ≥ Lv, where L3 is the fresh air volume of the independent fire protection unit in the event of an accident, thereby ensuring the air volume balance of the main room 1012 of the independent fire protection unit, maintaining it at 0 Pa or -5 Pa.

[0060] In the event of a power outage, the emergency power supply clean air handling unit, the normal exhaust system 202, and the first air valve 403 maintain normal operation. The alarm device 410 interlocks and activates the backup exhaust system 204, the backup clean air handling unit 3011, and the first fresh air filter unit 302. The control system controls the opening of the second air valve 406 according to the second differential pressure sensor 405 to provide supplementary air, so that L4=Lxe1+Lbx2=Lp1+Lbp≥Lv, or L4=Lxe1+Lbx2+Lsx1=Lp1+Lbp≥Lv, where L4 is the fresh air volume of the independent fire protection unit in the event of a power outage, thereby ensuring the air volume balance of the main room 1012 of the independent fire protection unit and maintaining it at 0Pa or -5Pa.

[0061] The airflow balancing method for cleanrooms with a risk of flammable and explosive gas release in this embodiment, through the system arrangement of steps S300 and S400, ensures that in step S500, the control system can maintain a positive pressure difference P1 in the main chamber 1012 of the independent fire protection unit under normal conditions and power outage conditions. At the same time, in the event of an accident or power outage, when the air exchange rate of the main chamber 1012 of the independent fire protection unit increases, the system dynamically adjusts the operation of the fresh air system and the make-up air volume to the main chamber 1012 of the independent fire protection unit, thereby ensuring that the main chamber 1012 of the independent fire protection unit is maintained at the safety requirement of 0Pa or -5Pa.

[0062] Example 2 This embodiment provides an airflow balancing method for a cleanroom with a risk of flammable and explosive gas release. The steps are basically the same as those in Embodiment 1, with the difference being: S200 also includes a process exhaust gas system 201, and the exhaust volume of the process exhaust gas system 201 is included in the exhaust volume of the main room 1012 of the independent fire protection unit.

[0063] The air volume balancing method for cleanrooms with the risk of releasing flammable and explosive gases in this embodiment fully utilizes the existing exhaust equipment resources of the process exhaust system by including the exhaust volume of the process exhaust system 201 into the exhaust volume of the main chamber 1012 of the independent fireproof unit in step S200. This avoids the duplication of exhaust equipment, reduces equipment redundancy, and effectively reduces the investment and operating energy consumption of the system.

[0064] Specifically, such as Figure 5 As shown, step S200 of this embodiment includes: S210 arranges the process exhaust gas system 201 and determines the values ​​of Lg1 and Lge1, where Lg1 is the exhaust volume of the process exhaust gas system 201 to the main chamber 1012 of the independent fire protection unit under normal and emergency conditions, and Lge1 is the exhaust volume of the process exhaust gas system 201 to the main chamber 1012 of the independent fire protection unit when the power outage condition and the power outage accident condition are operating using emergency power.

[0065] Furthermore, such as Figure 5 As shown, step S230 further includes: S230 arranges the non-process exhaust gas system of the main room 1012 of the independent fire protection unit according to the values ​​of Lg1, Lge1, Nv and Lv.

[0066] Specifically, step S230 includes the following sub-steps: S231 determines whether a process exhaust gas system 201 is installed. If no process exhaust gas system 201 is installed, a normal exhaust system 202 and a standby exhaust system 204 are added, so that Lp1=Lbp=Nv, and step S230 is completed; where Lp1 is the exhaust volume of the normal exhaust system 202, and Lbp is the exhaust volume of the standby exhaust system 204; if a process exhaust gas system 201 is installed, then S232 is executed. S232 determines whether Lg1 < Nv is true. If true, then add a normal exhaust system 202, a power outage exhaust system 203, and a backup exhaust system 204, such that Lp1 = Nv - Lg1, Lp2 = min{(Lg1 - Lge1), (Nv - Lge1)}, and Lbp = max{(Lv - Nv), (Nv - Lge1)}, completing step S230; where Lp2 is the exhaust volume of the power outage exhaust system 203. If false, then continue to execute S233. S233 determines whether Lge1 < Nv is true. If true, then add a power outage ventilation system 203 and a backup ventilation system 204, so that Lp2 = min{(Lg1-Lge1), (Nv-Lge1)} and Lbp = max{(Lv-Nv), (Nv-Lge1)}, and complete step S230; if not true, then continue to execute S234. S234 Determine whether Lge1 < Lv or Lg1 < Lv is true. If not, complete step S230; if true, continue to execute S235. S235 adds an auxiliary ventilation system 204, so that Lbp = max{(Lv-Nv), (Nv-Lge1)}, completing step S230.

[0067] To ensure adequate ventilation and conserve energy during operation under four conditions—normal operation, power outage, emergency operation, and power outage emergency operation—the air volume calculation and selection principles for the newly added power outage exhaust system 203 and backup exhaust system 204 are as follows: The exhaust volume of the power outage exhaust system 203 is Lp2 = min{process system exhaust volume - emergency process system exhaust volume, exhaust volume with good ventilation rate - emergency process exhaust volume}, i.e., Lp2 = min{(Lg1 - Lge1), (Nv - Lge1)}; the exhaust volume of the backup exhaust system 204 is max{exhaust volume with emergency operation rate - exhaust volume with good ventilation rate, exhaust volume with good ventilation rate - emergency process system exhaust volume}, i.e., Lbp = max{(Lv - Nv), (Nv - Lge1)}. Furthermore, each case involving the installation of the power outage exhaust system 203 and backup exhaust system 204 is verified individually.

[0068] In step S230 of this embodiment, by comparing the exhaust volume of the process exhaust system in the main chamber 1012 of the independent fire-resistant unit with the required exhaust volume for good ventilation and the exhaust volume for emergency ventilation, it is determined whether to add a normal exhaust system 202, a backup exhaust system 204, and a power outage exhaust system 203. This makes the layout of the non-process exhaust system more economical and avoids insufficient exhaust or equipment redundancy. In addition, by setting the calculation formula selection principle for the power outage exhaust system 203 and the backup exhaust system 204, the layout of the non-process exhaust system can simultaneously guarantee the exhaust ventilation requirements of four operating conditions while reducing the investment and operating energy consumption of exhaust equipment. Furthermore, in the event of a power outage, if the power outage exhaust system 203 fails, the backup exhaust system 204 can replace the power outage exhaust system 203, ensuring that the main chamber 1012 of the independent fire-resistant unit can still meet the exhaust volume for good ventilation.

[0069] Furthermore, considering Lge1 < Lg1, S330 of this embodiment is as follows: When the make-up air volume after starting the standby clean fresh air handling unit in the accident state or power outage accident state still cannot meet Lx1 + Lbx1 ≥ Lv and Lxe1 + Lbx2 ≥ Lv, then a first fresh air filter unit and a second fresh air filter unit are added to increase the make-up air volume to the main room of the independent fireproof unit in the accident state or power outage accident state, so that Lx1 + Lbx1 + Lsx1 ≥ Lv and Lxe1 + Lbx2 + Lsx1 + Lsx2 ≥ Lv; when the standby clean fresh air handling unit... When the make-up air volume of the air handling unit is insufficient to satisfy Lxe1 + Lbx2 ≥ Lv, a first fresh air filtration unit is added to increase the make-up air volume to the main room of the independent fireproof unit during a power outage, ensuring Lxe1 + Lbx2 + Lsx1 ≥ Lv. Here, Lbx1 is the fresh air volume provided to the independent fireproof unit by the standby fresh air handling unit during an outage; Lbx2 is the fresh air volume provided to the independent fireproof unit by the standby fresh air handling unit during a power outage; Lsx1 is the fresh air volume supplemented by the first fresh air filtration unit; and Lsx2 is the fresh air volume supplemented by the second fresh air filtration unit. Furthermore, since a process exhaust gas system 201 is arranged in step S200 of this embodiment, such as... Figure 6 As shown, step S420 of this embodiment further includes: S421 If Lg1+Lz<Lv, in both accident and power outage accident states, a makeup air branch, a second electrically adjustable damper, and a second differential pressure sensor are set. The second differential pressure sensor 405 is set to a differential pressure value of 0Pa or -5Pa. The control system can control the opening of the second electrically adjustable damper based on the feedback from the second differential pressure sensor to allow the makeup air branch to provide makeup air to the main room of the independent fireproof unit. In both accident and power outage accident states, the clean air handling unit is kept running normally, and the standby clean air handling unit is also started, so that Lx1+Lbx1≥Lv and Lxe1+Lbx2≥Lv. If Lxe1+Lbx2<Lv, then a first fresh air filter unit FAU1 is added, so that Lxe1+Lbx2+Lsx1≥Lv. If Lx1+Lbx1<Lv, then add a first fresh air filtration unit FAU1 and a second fresh air filtration unit FAU2 to make Lx1+Lbx1+Lsx1≥Lv and Lxe1+Lbx2+Lsx1+Lsx2≥Lv.

[0070] If Lg1+Lz≥Lv and Lge1+Lz<Lv, in an emergency situation, a pressure relief branch, a third electrically adjustable damper, and a third differential pressure sensor are installed. The third differential pressure sensor 408 is set to a differential pressure value of 0Pa or -5Pa. The control system can control the opening of the third electrically adjustable damper based on the feedback from the third differential pressure sensor to depressurize the main chamber of the independent fire-resistant unit via the pressure relief branch, while simultaneously closing the second electrically adjustable damper. In a shutdown emergency situation, a make-up air branch, a second electrically adjustable damper, and a second differential pressure sensor are installed. The second differential pressure sensor 405 is set to a differential pressure value of 0Pa or -5Pa. The control system can control the opening of the second electrically adjustable damper based on the feedback from the second differential pressure sensor to make up air to the main chamber of the independent fire-resistant unit via the make-up air branch. In the event of a power outage, the clean air handling unit remains operational, and the standby clean air handling unit is also activated to ensure that Lxe1 + Lbx2 ≥ Lv. If this is still not met, a first fresh air filter unit FAU1 is added to ensure that Lxe1 + Lbx2 + Lsx1 ≥ Lv.

[0071] If Lge1+Lz≥Lv, a pressure relief branch, a third electrically adjustable damper, and a third differential pressure sensor are installed. The third differential pressure sensor 408 is set to a differential pressure value of 0Pa or -5Pa. The control system can control the opening of the third electrically adjustable damper based on the feedback from the third differential pressure sensor to depressurize the main chamber of the independent fire-resistant unit via the pressure relief branch. Simultaneously, there is no need to add a fresh air filtration unit.

[0072] like Figure 17 , 18As shown, the pressure relief branch 407 is arranged on the main fresh air duct of the independent fire protection unit and located outside the independent fire protection unit 101. The third differential pressure transmitter 408 is arranged in the main room 1012 of the independent fire protection unit. In case of an accident or power outage, the control system opens the third air valve 409, causing the pressure relief branch 407 to control the opening degree of the third air valve 409 according to the monitoring data of the third differential pressure transmitter 408, thereby adjusting the air volume Ld1 or Ld2 of the pressure relief branch 407, and thus adjusting the fresh air volume of the main room 1012 of the independent fire protection unit to ensure that the main room 1012 of the independent fire protection unit maintains zero differential pressure. Optionally, the third differential pressure transmitter 408 can also be set to a slightly negative differential pressure. For example, the differential pressure value of the third differential pressure transmitter 408 is set to -5Pa.

[0073] Furthermore, in step S500, since different cleanrooms have different design requirements for process exhaust gas systems, the process exhaust gas system is activated under normal and emergency conditions, and the emergency power supply process exhaust gas system is activated under power outage and power outage emergency conditions. Based on the values ​​of the process exhaust gas volume Lg1 and emergency process exhaust gas volume Lge1 of the main chamber 1012 of the independent fire protection unit, the following nine operating scenarios are considered to illustrate the air volume balancing method in the system operation steps.

[0074] Scenario 1, if Lg1 < Nv: like Figure 7 , Figure 8 and Figure 9 As shown, according to steps S200 and S400, a normal exhaust ventilation system 202, a standby exhaust ventilation system 204, and a power outage exhaust ventilation system 203 are arranged, along with a makeup air branch 404 and a second differential pressure sensor 405. The power outage exhaust ventilation system 203 is activated only during a power outage.

[0075] Normal state: The normal exhaust system 202 is turned on, so Lg1+Lp1=Nv, Lp1=Nv-Lg1; When the normal exhaust system 202 fails, the backup exhaust system 204 is turned on, and Lbp replaces Lp1. Since Lg1≥Lge1, Lg1+Lbp=Lg1+max{(Lv-Nv), (Nv-Lge1)}≥Nv.

[0076] In the event of a power outage: the normal exhaust system 202 and the power outage exhaust system 203 are activated. Since Lg1 < Nv, Lge1 + Lp1 + Lp2 = Lge1 + Nv - Lg1 + Lp2 = Lge1 + Nv - Lg1 + min{(Lg1 - Lge1), (Nv - Lge1)} = Lge1 + Nv - Lg1 + Lg1 - Lge1 = Nv. When both the normal exhaust system 202 and the power outage exhaust system 203 fail, the backup exhaust system 204 is activated. Lge1 + Lbp = Lge1 + max{(Lv - Nv), (Nv - Lge1)} ≥ Nv.

[0077] Accident status: The normal exhaust system 202 and the standby exhaust system 204 are activated, and Lg1+Lp1+Lbp=Nv+max{(Lv-Nv)(Nv-Lge1)}≥Lv.

[0078] Power outage accident status: Start the normal exhaust system 202, the power outage exhaust system 203 and the standby exhaust system 204, Lge1+Lp1+Lp2+Lbp=Nv+max{(Lv-Nv),(Nv-Lge1)}≥Lv.

[0079] In normal and power outage states, the control system controls the opening of the first air valve 403 based on the first differential pressure sensor 402, thereby controlling the fresh air volume provided by the fresh air system to the independent fire protection unit 101, i.e., L1=Lg1+Lp1+Lz=Nv+Lz; L2=Lge1+Lp1+Lp2+Lz=Lge1+(Nv-Lg1)+(Lg1-Lge1)+Lz=Nv+Lz.

[0080] In both accident and power outage scenarios, the accident alarm device 410 activates the standby clean air handling unit 3011, the make-up air branch 404, and the second differential pressure sensor 405. The control system, based on the second differential pressure sensor 405, controls the opening of the second air valve 406 to maintain airflow balance in the main chamber 1012 of the independent fire-resistant unit. like Figure 7 In an accident state, L3 = Lx1 + Lbx1 = Lg1 + Lp1 + Lbp ≥ Lv; in a power outage accident state, L4 = Lxe1 + Lbx2 = Lge1 + Lp1 + Lp2 + Lbp ≥ Lv; Figure 8 As shown, if Lxe1 + Lbx2 < Lv, then in the event of a mains power outage, the first fresh air filter unit 302 set in step S300 will be started simultaneously, making L4 = Lxe1 + Lbx2 + Lsx1 = Lge1 + Lp1 + Lp2 + Lbp ≥ Lv. Figure 9 As shown, if Lx1+Lbx1<Lv, then in the event of an accident, the first fresh air filter unit 302 will be started simultaneously, so that L3=Lx1+Lbx1+Lsx1=Lg1+Lp1+Lbp≥Lv. In the event of a power outage, the second fresh air filter unit 303 set in step S300 will be started simultaneously, so that L4=Lxe1+Lbx2+Lsx1+Lsx2=Lge1+Lp1+Lp2+Lbp≥Lv.

[0081] Case 2, if Lg1 ≥ Nv and Lg1 + Lz < Lv and Lge1 < Nv: like Figure 10 , Figure 11 and Figure 12As shown, according to steps S200 and S400, it is not necessary to set up a normal exhaust system 202, but to arrange a standby exhaust system 204 and a power outage exhaust system 203, and to arrange a make-up air branch 404 and a second differential pressure sensor 405. The power outage exhaust system 203 is only activated when there is a power outage.

[0082] Normal state: Lg1≥Nv, which meets the requirements for ventilation rate and exhaust volume.

[0083] In the event of a power outage: the power outage ventilation system 203 is activated. Since Lg1≥Nv, Lge1+Lp2=Lge1+min{(Lg1-Lge1), (Nv-Lge1)}=Lge1+Nv-Lge1=Nv; when the power outage ventilation system 203 fails, the backup ventilation system 204 is activated, Lbp replaces Lp2, and Lge1+Lbp=Lge1+max{(Lv-Nv), (Nv-Lge1)}≥Nv.

[0084] Accident status: The backup exhaust system 204 is activated. Since Lg1≥Nv, Lg1+Lbp=Lg1+max{(Lv-Nv)(Nv-Lge1)}≥Lv.

[0085] Power outage accident status: Start the power outage ventilation system 203 and the backup ventilation system 204; Lge1+Lp2+Lbp=Nv+max{(Lv-Nv)(Nv-Lge1)}≥Lv.

[0086] Under normal conditions, the control system controls the opening of the first air valve 403 based on the first differential pressure sensor 402, thereby controlling the fresh air volume of the fresh air system to the independent fireproof unit, i.e., L1=Lx1=Lg1+Lz≥Nv+Lz; under the power outage condition, L2=Lx1=Lge1+Lp2+Lz=Nv+Lz.

[0087] In both accident and shutdown states, the accident alarm device 410 activates the standby clean air handling unit 3011, the make-up air branch 404, and the second differential pressure sensor 405. The control system controls the opening of the second air valve 406 based on the second differential pressure sensor 405 to maintain airflow balance in the main room 1012 of the independent fire-resistant unit. If a fresh air filtration unit is installed, it must also be activated accordingly. In the event of an accident, L3 = Lx1 + Lbx1 = Lg1 + Lbp ≥ Lv. If the air volume of the fresh air system cannot meet Lx1 + Lbx1 ≥ Lv, then according to step S330, since a first fresh air filter unit 302 has been added to the fresh air system, the first fresh air filter unit 302 needs to be started to make L3 = Lx1 + Lbx1 + Lsx1 = Lg1 + Lbp ≥ Lv.

[0088] like Figure 10As shown, in the event of a power outage, L4 = Lxe1 + Lbx2 = Lge1 + Lp2 + Lbp ≥ Lv; in the event of a power outage, as... Figure 11 As shown, if the air volume of the fresh air system cannot satisfy Lxe1+Lbx2≥Lv, then L4=Lxe1+Lbx2+Lsx1=Lge1+Lp2+Lbp≥Lv; Figure 12 As shown, if the air volume of the fresh air system cannot meet the requirement of Lx1+Lbx1≥Lv, then the second fresh air filter unit 303 is set in step S300. Then the second fresh air filter unit 303 needs to be started to make L4=Lxe1+Lbx2+Lsx1+Lsx2=Lge1+Lp2+Lbp≥Lv.

[0089] Case 3: If Lv > Lg1 ≥ Nv and Lg1 + Lz ≥ Lv and Lge1 < Nv: like Figure 13 and Figure 14 As shown, according to steps S200 and S400, a normal exhaust system 202 is not required. Instead, a backup exhaust system 204 and a power outage exhaust system 203 are installed, along with a make-up air branch 404, a second differential pressure sensor 405, a pressure relief branch 407, and a third differential pressure sensor 409. The power outage exhaust system 203 only activates during a power outage.

[0090] The configuration and calculation formulas for the ventilation system under normal conditions, power outage conditions, accident conditions, and power outage accident conditions are verified and operated in the same way as in case 2.

[0091] In normal and power outage states, the control system controls the opening of the first air valve 403 based on the first differential pressure sensor 402, thereby controlling the fresh air volume of the fresh air system to the independent fireproof unit, so that L1=Lg1+Lz≥Nv+Lz; L2=Lge1+Lp2+Lz=Nv+Lz.

[0092] In the event of an accident, the accident alarm device 410 is activated in conjunction with the pressure relief branch 407 and the third differential pressure sensor. The control system controls the opening of the third air valve 409 based on the third differential pressure sensor, so that the clean fresh air handling system 301 first releases pressure to areas outside the independent fire protection unit 101, so as to maintain the air volume balance of the main room 1012 of the independent fire protection unit, i.e., L3=Lx1-Ld1=Lg1+Lbp≥Lv.

[0093] In the event of a power outage, such as Figure 13As shown, the emergency alarm device 410 activates the standby clean air handling unit 3011, the make-up air branch 404, and the second differential pressure sensor 405. The control system controls the opening of the second air valve 406 based on the second differential pressure sensor 405 to control the make-up air volume, so that the air volume in the main room 1012 of the independent fireproof unit remains balanced, i.e., L4 = Lxe1 + Lbx2 = Lge1 + Lp2 + Lbp ≥ Lv; Figure 14 As shown, if Lxe1+Lbx2<Lv, then in step S300, a first fresh air filter unit 302 is provided, and the first fresh air filter unit 302 is started simultaneously, so that L4=Lxe1+Lbx2+Lsx1=Lge1+Lp2+Lbp≥Lv.

[0094] Case 4: If Lv > Lg1 ≥ Nv and Lg1 + Lz ≥ Lv and Lge1 ≥ Nv and Lge1 + Lz < Lv: The configuration and calculation formula of the ventilation system under normal and emergency conditions are verified and are the same as those in operation condition 2.

[0095] Power outage status: Lge1≥Nv, which meets the requirements for ventilation and air exchange rate and exhaust volume.

[0096] In the event of a power outage, the backup ventilation system 204 is activated. Since Lge1≥Nv, Lge1+Lbp=Lge1+max{(Lv-Nv)(Nv-Lge1)}≥Lv.

[0097] like Figure 15 and Figure 16 As shown, according to steps S200 and S400, it is not necessary to set up a normal exhaust system 202 and a power outage exhaust system 203. Only a backup exhaust system 204 needs to be set up, along with a make-up air branch 404, a second differential pressure sensor 405, a pressure relief branch 407, and a third differential pressure sensor 409.

[0098] In normal and power outage states, the control system controls the opening of the first air valve 403 based on the first differential pressure sensor 402, thereby controlling the fresh air volume of the fresh air system to the independent fireproof unit, i.e., L1=Lg1+Lz≥Nv+Lz; L2=Lge1+Lz≥Nv+Lz.

[0099] In the event of an accident, the accident alarm device 410 is activated in conjunction with the pressure relief branch 407 and the third differential pressure sensor. The control system controls the opening of the third air valve 409 based on the third differential pressure sensor, so that the clean fresh air handling system 301 first releases pressure to areas outside the independent fire protection unit 101, so as to maintain the air volume balance of the main room 1012 of the independent fire protection unit, i.e., L3=Lx1-Ld1=Lg1+Lbp≥Lv.

[0100] In the event of a power outage, such as Figure 15As shown, the emergency alarm device 410 activates the standby clean air handling unit 3011, the make-up air branch 404, and the second differential pressure sensor 405. The control system controls the opening of the second air valve 406 based on the second differential pressure sensor 405 to control the make-up air volume, so that the air volume in the main room 1012 of the independent fireproof unit remains balanced, i.e., L4 = Lxe1 + Lbx2 = Lge1 + Lbp ≥ Lv; Figure 16 As shown, if Lxe1+Lbx2<Lv, then in step S300, a first fresh air filter unit 302 is provided, and the first fresh air filter unit 302 is started at the same time, so that L4=Lxe1+Lbx2+Lsx1=Lge1+Lbp≥Lv.

[0101] Scenario 5: If Lv > Lg1 ≥ Nv and Lg1 + Lz ≥ Lv and Lge1 ≥ Nv and Lge1 + Lz ≥ Lv: The configuration and calculation formulas for the ventilation system under normal conditions, power outage conditions, accident conditions, and power outage accident conditions are verified and operated in the same way as in case 4.

[0102] like Figure 17 As shown, according to steps S200 and S400, it is not necessary to set up a normal exhaust system 202 and a power outage exhaust system 203. Only a backup exhaust system 204, a pressure relief branch 407 and a third differential pressure sensor 409 need to be installed.

[0103] In normal and power outage states, the control system controls the opening of the first air valve 403 based on the first differential pressure sensor 402, thereby controlling the fresh air volume of the fresh air system to the independent fireproof unit, i.e., L1=Lg1+Lz≥Nv+Lz; L2=Lge1+Lz≥Nv+Lz.

[0104] In the event of an accident or a power outage, the accident alarm device 410 is activated in conjunction with the pressure relief branch 407 and the third differential pressure sensor. The control system controls the opening of the third air valve 409 based on the third differential pressure sensor, causing the clean air handling system 301 to first release pressure to areas outside the independent fire protection unit 101, so as to maintain the air volume balance in the main room 1012 of the independent fire protection unit, i.e., L3=Lx1-Ld1=Lg1+Lbp≥Lv or L4=Lxe1-Ld2=Lge1+Lbp≥Lv.

[0105] Case 6, if Lg1 ≥ Lv and Lge1 < Nv: like Figure 13 and Figure 14 As shown, based on steps S200 and S400, the air volume balancing method in S500 is basically the same as that in operation condition 3. The difference is that in the accident state, since Lg1≥Lv, it is not necessary to start the backup exhaust system 204.

[0106] Scenario 7: If Lg1 ≥ Lv and Lge1 ≥ Nv and Lge1 + Lz < Lv: like Figure 15 and Figure 16 As shown, based on steps S200 and S400, the air volume balancing method in S500 is basically the same as that in operation condition 4. The difference is that in the accident state, since Lg1≥Lv, it is not necessary to start the backup exhaust system 204.

[0107] Execution condition 8, if Lg1≥Lv and Lv>Lge1≥Nv and Lge1+Lz≥Lv: like Figure 17 As shown, based on steps S200 and S400, the air volume balancing method in S500 is basically the same as that in operation condition 5. The difference is that in the accident state, since Lg1≥Lv, it is not necessary to start the backup exhaust system 204.

[0108] Execution condition 9, if Lg1≥Lv and Lge1≥Lv: Since the exhaust gas volume of the process exhaust system 201 for the main chamber of the independent fire-resistant unit and the exhaust gas volume of the process exhaust system using emergency power supply for the main chamber of the independent fire-resistant unit already meet the exhaust volume for the number of air changes in an emergency, it is not necessary to install a normal exhaust system 202, a power outage exhaust system 203, or a backup exhaust system 204. Figure 18 As shown, according to steps S200 and S400, there is no need to install a non-process waste gas exhaust system. Only a pressure relief branch 407 and a third differential pressure sensor need to be added so that in the accident state, L3=Lx1-Ld1=Lg1≥Lv; and in the power outage accident state, L4=Lxe1-Ld2=Lge1≥Lv.

[0109] In step S500 of this embodiment, after flexibly configuring the exhaust system and fresh air system according to the performance of the process exhaust system, precise adjustment of the dynamic balance of air volume under different operating conditions can be achieved, ensuring that the independent fire protection unit can meet the ventilation safety requirements under various conditions. Through the multi-level differential pressure sensing and electric air valve linkage mechanism, the risks of overpressure or negative pressure are effectively avoided, the reliability of the system's response to accident states is improved, and the cost of redundant equipment configuration is reduced, providing a solution that combines safety and economy for high-risk clean environments.

[0110] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention.

Claims

1. A method for balancing airflow in a cleanroom with a risk of releasing flammable and explosive gases, characterized in that, Includes the following steps: S100 separates independent fireproof units (101) within the clean area. S200 is equipped with an exhaust system for the main room (1012) of an independent fire-resistant unit; S300 equipped with a fresh air system; The S400 is equipped with a fresh air duct and control system. S500 system operation: In normal conditions and during power outages, the main compartment (1012) of the independent fire protection unit maintains a positive pressure difference of P1 for airflow balance; in the event of a gas release accident, the main compartment (1012) of the independent fire protection unit maintains a zero pressure difference for airflow balance.

2. The airflow balancing method for a cleanroom with a risk of releasing flammable and explosive gases according to claim 1, characterized in that, S100 includes: The area within the clean area that may be at risk of releasing flammable and explosive gases is isolated from other areas of the clean area (102) and forms an independent fire protection unit (101); the independent fire protection unit (101) includes an upper mezzanine (1011) and a main room (1012) of the independent fire protection unit.

3. The airflow balancing method for cleanrooms with a risk of releasing flammable and explosive gases according to claim 2, characterized in that, The exhaust system described in S200 includes a process exhaust system (201) and a non-process exhaust system.

4. The airflow balancing method for cleanrooms with a risk of flammable and explosive gas release according to claim 3, characterized in that, The S200 also includes: S210 determines the values ​​of Lg1 and Lge1, where Lg1 is the exhaust volume of the process exhaust system (201) to the main chamber (1012) of the independent fire protection unit under normal conditions, and Lge1 is the exhaust volume of the process exhaust system (201) to the main chamber (1012) of the independent fire protection unit when the mains power is cut off and the process exhaust system (201) is operating with emergency power.

5. The airflow balancing method for a cleanroom with a risk of releasing flammable and explosive gases according to claim 4, characterized in that, The S200 also includes: S220 sets the values ​​of Nv and Lv, where Nv is the exhaust volume of the main room of the independent fire protection unit with good ventilation and Lv is the exhaust volume of the main room of the independent fire protection unit with minimum ventilation in the event of an accident.

6. The airflow balancing method for a cleanroom with a risk of releasing flammable and explosive gases according to claim 5, characterized in that, The S200 also includes: S230 is for arranging a non-process exhaust system for the main room (1012) of the independent fire protection unit.

7. The airflow balancing method for a cleanroom with a risk of releasing flammable and explosive gases according to claim 6, characterized in that, S230 specifically includes: S231 When Lg1=0 and Lge1=0, arrange the non-process exhaust system of the main room (1012) of the independent fire protection unit according to the values ​​of Nv and Lv.

8. The airflow balancing method for a cleanroom with a risk of releasing flammable and explosive gases according to claim 7, characterized in that, S231 also includes: arranging a normal exhaust ventilation system (202) and a standby exhaust ventilation system (204) such that Lp1=Lbp=Nv and Lp1+Lbp>Lv, where: Lp1 is the exhaust volume of the normal exhaust ventilation system and Lbp is the exhaust volume of the standby exhaust ventilation system.

9. The airflow balancing method for a cleanroom with a risk of releasing flammable and explosive gases according to claim 8, characterized in that, The S300 also includes: S310 determines the value of the positive pressure air volume Lz in the main room of the independent fire protection unit based on the positive pressure difference P1 required under normal conditions in the clean room; S320 Arranges a clean air handling system (301); ensuring that the clean air handling system (301) can satisfy Lx1≥Lp1+Lz=Nv+Lz and Lxe1≥Lp1+Lz=Nv+Lz; where Lx1 is the fresh air volume allocated to the independent fire protection unit under normal conditions; Lxe1 is the fresh air volume allocated to the independent fire protection unit under power outage conditions. S310 arranges a clean air handling system (301) so that the clean air handling system (301) provides fresh air to the main room (1012) of the independent fire protection unit in normal state and power outage state, so that the main room (1012) of the independent fire protection unit can maintain a positive pressure difference value P1.

10. The airflow balancing method for a cleanroom with a risk of flammable and explosive gas release according to any one of claims 1 to 9, characterized in that, The S400 includes: A first differential pressure sensor (402) is arranged in the main compartment (1012) of the independent fire protection unit. The first differential pressure sensor (402) is set to a positive differential pressure value P1.

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