Vacuum tank cold plate turnover mechanism

Abstract

The invention provides a vacuum tank cold plate turnover mechanism. The vacuum tank cold plate turnover mechanism comprises a mounting platform; plate cooling; the cold plate rotating shaft seat is arranged at one end of the cold plate; the number of the cantilevers is two, and the cantilevers are arranged on the two sides of the cold plate respectively; the cantilever fixing seat and the propelling device are arranged on the mounting platform and are opposite to the cantilever fixing seat; one end of the cantilever is rotationally connected with the cantilever fixing seat, and the other end is rotationally connected with the side edge of the cold plate; and the driving end of the propelling device is rotationally connected with the cold plate rotating shaft seat and is used for driving one end of the cold plate to move, so that the cold plate is overturned under the constraint of the cantilever. The problems that in a test based on a conventional vacuum test environment at present, an existing turnover mechanism adopts complex connecting rod or gear transmission, is huge in structure and large in occupied space and is difficult to adapt to the requirements for high cleanliness and reliability in the vacuum environment, large vibration or position deviation is possibly generated in the turnover process, the positioning precision and stability of a cold plate are affected, and the working efficiency is high are solved. The technical problem to be improved is solved.

Description

Technical Field

[0001] This invention relates to the field of mechanical structure technology, and in particular to a vacuum tank cold plate flipping mechanism. Background Technology

[0002] In vacuum environment testing, it is often necessary to flip components such as cold plates to meet specific process requirements. For example, in spacecraft thermal vacuum testing, semiconductor equipment, or vacuum coating systems, flipping cold plates is used to adjust workpiece positions or simulate different working conditions. Existing flipping mechanisms typically employ complex linkages or gear drives, resulting in bulky structures, large space requirements, and difficulty in meeting the high cleanliness and reliability requirements of vacuum environments. Furthermore, traditional mechanisms may generate significant vibrations or positional deviations during flipping, affecting the positioning accuracy and stability of the cold plate. Therefore, there is an urgent need for a compact, stable, and suitable cold plate flipping mechanism for use inside vacuum chambers. Summary of the Invention

[0003] This invention application provides a vacuum tank cold plate flipping mechanism to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, this invention provides the following technical solution: a vacuum tank cold plate flipping mechanism, characterized in that it includes an installation platform; a cold plate; a cold plate pivot seat disposed at one end of the cold plate; two cantilever arms disposed on both sides of the cold plate; a cantilever arm fixing seat disposed on the installation platform; and a propulsion device disposed on the installation platform and disposed opposite to the cantilever arm fixing seat; wherein, one end of the cantilever arm is rotatably connected to the cantilever arm fixing seat, and the other end of the cantilever arm is rotatably connected to the side of the cold plate; the driving end of the propulsion device is rotatably connected to the cold plate pivot seat, for driving one end of the cold plate to move, so that the cold plate flips under the constraint of the cantilever arms.

[0005] Preferably, it also includes a sliding device, which includes a first sliding device and a second sliding device arranged parallel to both sides of the mounting platform; the first sliding device and the second sliding device are respectively rotatably connected to both sides of the cold plate, and are used to guide the side movement of the cold plate when it is flipped.

[0006] Preferably, both the first sliding device and the second sliding device include: a linear bearing slide rail, which is arranged parallel to the side of the mounting platform; and a linear bearing, which is slidably arranged on the linear bearing slide rail, and the linear bearing is rotatably connected to the side of the cold plate.

[0007] Preferably, the propulsion device includes: a bearing housing disposed on the mounting platform; a drive device; a lead screw connected to the drive device; a lead screw nut threadedly connected to the lead screw; and a lead screw nut fixing seat fixedly sleeved on the lead screw nut, and the lead screw nut fixing seat is rotatably connected to the cold plate rotating shaft seat; wherein, the end of the lead screw away from the drive device passes through the lead screw nut and is rotatably supported in the bearing housing.

[0008] Preferably, the driving device is an electric driving device or a manual driving device.

[0009] Preferably, the manual drive device is a handwheel.

[0010] Preferably, the cantilever has an L-shaped structure, with its two ends connected to the cantilever fixing seat and the side of the cold plate, respectively.

[0011] As can be seen from the above technical solutions, the embodiments of the present invention have the following advantages: 1. Simple and compact structure: The cold plate can be flipped by the cooperation of the cantilever, the propulsion device and the cold plate rotating shaft seat. The overall structure occupies little space, is easy to operate, easy to adjust and easy to maintain, and is easy to arrange in the vacuum tank without bringing additional test costs.

[0012] 2. Smooth and reliable flipping: The cold plate is driven by a propulsion device at one end, combined with the rotation support of the cantilever arms on both sides, so that the cold plate is subjected to uniform force and has a stable movement trajectory during the flipping process, avoiding impact or jamming.

[0013] 3. Good guidance and support: The optional sliding device (linear bearing and slide rail) provides auxiliary support on both sides of the cold plate, further enhancing the rigidity during flipping and ensuring that the cold plate moves along the predetermined trajectory.

[0014] 4. Flexible driving method: The propulsion device can be driven by electricity or manually to meet the needs of different working conditions. Manual drive (such as handwheel) is convenient for debugging and emergency operation, while electric drive is easy to realize automatic control.

[0015] 5. Adaptable to vacuum environment: The design of each component is simple, with no complicated transmission parts, and it is easy to use vacuum-compatible materials and lubrication methods, reducing the sources of venting and ensuring the cleanliness of the vacuum tank.

[0016] 6. High positioning accuracy: The lead screw transmission mechanism can achieve precise displacement control, thereby accurately controlling the flipping angle of the cold plate and meeting the high-precision process requirements.

[0017] This invention addresses the technical problems that currently existing flipping mechanisms used in conventional vacuum testing environments employ complex linkages or gear transmissions, resulting in bulky structures, large space requirements, and difficulty in meeting the high cleanliness and reliability requirements of vacuum environments. It also solves the technical problems that may arise during the flipping process, such as significant vibrations or positional deviations, affecting the positioning accuracy and stability of the cold plate, which require further improvement. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of the present invention.

[0019] Figure label: 1. Cold plate; 2. Cantilever; 3. Linear bearing; 4. Linear bearing slide rail; 5. Handwheel; 6. Bearing housing; 7. Screw nut; 8. Screw; 9. Cold plate swivel seat; 10. Screw nut fixing seat; 11. Cantilever fixing seat; 12. Mounting platform. Detailed Implementation

[0020] This invention provides a vacuum tank cold plate flipping mechanism, which solves the technical problems that existing flipping mechanisms used in conventional vacuum test environments employ complex linkages or gear transmissions, resulting in large structures, large space occupation, and difficulty in meeting the high cleanliness and reliability requirements of vacuum environments. Furthermore, the flipping process may generate significant vibrations or positional deviations, affecting the positioning accuracy and stability of the cold plate, and these issues require further improvement.

[0021] To make the inventive objectives, features, and advantages of the embodiments of this invention more apparent and understandable, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are only some embodiments of the embodiments of this invention, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of the embodiments of this invention.

[0022] Please see Figure 1 A vacuum tank cold plate flipping mechanism is characterized by comprising an installation platform 12; a cold plate 1; a cold plate pivot seat 9 disposed at one end of the cold plate 1; two cantilever arms 2 disposed on both sides of the cold plate 1; a cantilever fixing seat 11 disposed on the installation platform 12; and a propulsion device disposed on the installation platform 12 and opposite to the cantilever fixing seat 11; wherein, one end of the cantilever arm 2 is rotatably connected to the cantilever fixing seat 11, and the other end of the cantilever arm 2 is rotatably connected to the side of the cold plate 1; the driving end of the propulsion device is rotatably connected to the cold plate pivot seat 9, and is used to drive one end of the cold plate 1 to move, so that the cold plate 1 is flipped under the constraint of the cantilever arm 2.

[0023] Preferably, it also includes a sliding device, which includes a first sliding device and a second sliding device arranged parallel to both sides of the mounting platform 12; the first sliding device and the second sliding device are respectively rotatably connected to both sides of the cold plate 1, and are used to guide the side movement of the cold plate 1 when it is flipped.

[0024] Preferably, both the first sliding device and the second sliding device include: a linear bearing slide rail 4, which is arranged parallel to the side of the mounting platform 12; and a linear bearing 3, which is slidably arranged on the linear bearing slide rail 4, and the linear bearing 3 is rotatably connected to the side of the cold plate 1.

[0025] Preferably, the propulsion device includes: a bearing seat 6 disposed on the mounting platform 12; a drive device; a lead screw 8 connected to the drive device; a lead screw nut 7 threadedly connected to the lead screw 8; and a lead screw nut fixing seat 10 fixedly sleeved on the lead screw nut 7, and the lead screw nut fixing seat 10 being rotatably connected to the cold plate rotating shaft seat 9; wherein, the end of the lead screw 8 away from the drive device passes through the lead screw nut 7 and is rotatably supported in the bearing seat 6.

[0026] Preferably, the driving device is an electric driving device or a manual driving device.

[0027] Preferably, the manual drive device is a handwheel 5.

[0028] Preferably, the cantilever 2 has an L-shaped structure, with its two ends connected to the cantilever fixing seat 11 and the side of the cold plate 1, respectively.

[0029] The above-described embodiments are only used to illustrate the technical solutions of the present invention application, and are not intended to limit it. Although the present invention application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention application.

Claims

1. A vacuum tank cold plate flipping mechanism, characterized in that, include Installation platform; Cold plate; A cold plate pivot seat is disposed at one end of the cold plate; Two cantilever arms are provided on both sides of the cold plate. A cantilever mounting bracket is provided on the mounting platform; as well as A propulsion device is mounted on the mounting platform and is positioned opposite to the cantilever fixing seat; One end of the cantilever is rotatably connected to the cantilever fixing seat, and the other end of the cantilever is rotatably connected to the side of the cold plate; the driving end of the propulsion device is rotatably connected to the cold plate rotating shaft seat, and is used to drive one end of the cold plate to move so that the cold plate can be flipped under the constraint of the cantilever.

2. The vacuum tank cold plate flipping mechanism according to claim 1, characterized in that, It also includes a sliding device, which includes a first sliding device and a second sliding device arranged parallel to both sides of the mounting platform; the first sliding device and the second sliding device are respectively rotatably connected to both sides of the cold plate, and are used to guide the side movement of the cold plate when it is flipped.

3. The vacuum tank cold plate flipping mechanism according to claim 2, characterized in that, Both the first sliding device and the second sliding device include: Linear bearing slide rails are arranged parallel to the side of the mounting platform; and A linear bearing is slidably mounted on the linear bearing slide rail, and the linear bearing is rotatably connected to the side of the cold plate.

4. The vacuum tank cold plate flipping mechanism according to claim 1, characterized in that, The propulsion device includes: The bearing housing is mounted on the mounting platform; Drive unit; The lead screw is connected to the drive device; A lead screw nut, threadedly connected to the lead screw; and A lead screw nut fixing seat is fixedly sleeved on the lead screw nut, and the lead screw nut fixing seat is rotatably connected to the cold plate rotating shaft seat; The end of the lead screw away from the drive device passes through the lead screw nut and is rotatably supported in the bearing seat.

5. The vacuum tank cold plate flipping mechanism according to claim 4, characterized in that, The drive device is either an electric drive device or a manual drive device.

6. The vacuum tank cold plate flipping mechanism according to claim 5, characterized in that, The manual drive device is a handwheel.

7. The vacuum tank cold plate flipping mechanism according to claim 1, characterized in that, The cantilever has an L-shaped structure, with its two ends connected to the cantilever fixing seat and the side of the cold plate, respectively.

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