Micropump and fluid control module

Abstract

The invention relates to the technical field of fluid control, in particular to a micro pump and a fluid control module, the micro pump comprises a shell, an actuator, an elastic supporting part and a limiting part, and the shell is provided with a fluid cavity; the actuator is accommodated in the fluid cavity; the actuator comprises a vibration plate and a piezoelectric plate which are arranged in a stacked mode, the elastic supporting part corresponds to the opening part and comprises a connecting part and an elastic beam, the limiting part protrudes from the inner wall of the fluid cavity and is arranged opposite to the elastic supporting part with a gap therebetween, and the limiting part covers part or all of the first elastic beam forming the elastic supporting part; thus, deformation of the elastic beams is limited within an elastic deformation range, and the situation that the first elastic beam is plastically deformed due to the fact that tensile stress exceeding a yield point caused by excessive displacement of the actuator under the action of inertia force acts on the first elastic beam, and the static position of the actuator changes relative to the design state is avoided. Therefore, the risks of faults, performance degradation and failure of the micro pump are caused.

Description

Technical Field

[0001] This invention relates to the field of fluid control technology, specifically to a micro pump and a fluid control module. Background Technology

[0002] In fluid control devices that rely on the periodic changes in chamber volume to draw in and expel gas, in order to obtain greater output performance, the actuating unit or its functional components surrounding the chamber are generally designed to vibrate, deform, or displace as much as possible during operation. In the prior art, the actuating unit or its functional components are typically supported on the walls of the chamber by a spring-like support structure. By adjusting the stiffness of this support structure, the actuating unit or its functional components can vibrate, deform, or displace in a substantially unconstrained state.

[0003] Piezoelectric-driven gas generators, with their advantages of compact structure, easy miniaturization, fast response speed, low power consumption, and long lifespan, are widely used in wearable medical devices such as wrist blood pressure monitors, intelligent robots such as electronic skin and flexible robots, and internal thermal management of 3C smart terminals such as mobile phones and tablets that integrate 3D packaging technology. However, when these gas generators are applied to end products, they usually need to meet stringent stability tests, including drop tests. Under impact loads, inertial forces act on the relatively large-mass actuator, causing excessive displacement of the actuator. As a result, tensile stress exceeding the yield point acts on the support structure of the actuator, causing plastic deformation of the support structure. This causes the static position of the actuator to change relative to the design state. Therefore, there is a risk that the gas generator will malfunction or degrade in performance when subjected to impact loads. Summary of the Invention

[0004] The technical problem to be solved by the present invention is: in order to overcome the shortcomings of the prior art, a micro pump and fluid control module are provided to solve the problem that the piezoelectric driven gas generator with elastic support structure has poor resistance to impact loads and is prone to failure, performance degradation or even failure.

[0005] The technical solution adopted by this invention to solve its technical problem is: a micro pump, comprising: The housing has a first wall and a second wall disposed opposite to each other and a side wall connected between the first wall and the second wall, and a fluid cavity is formed between the first wall, the side wall and the second wall; An actuator is housed in the fluid cavity and divides the fluid cavity into a first air chamber and a second air chamber; the actuator includes a stacked vibrating plate and a piezoelectric sheet, the piezoelectric sheet being used to drive the actuator to bend and vibrate; an opening is provided through the region on the first wall opposite to the outer periphery of the actuator. An elastic support portion, corresponding to the opening, includes a connecting portion and an elastic beam. The elastic beam has at least a first elastic beam located on the side of the opening away from the center of the actuator. The outer end of the first elastic beam is connected to a first wall, and the inner end of the first elastic beam is connected to the connecting portion. The actuator is fixedly connected to the connecting portion. The elastic support portion deforms with the bending vibration and / or displacement of the actuator. And a limiting part, which protrudes from the inner wall of the fluid cavity, is disposed opposite to the elastic support part with a gap, and covers part or all of the first elastic beam, for limiting the deformation of the elastic beam within the elastic deformation range.

[0006] Furthermore, a connecting boss is formed on one side surface of the vibrating plate opposite to the connecting part, and the connecting boss and the connecting part opposite to it are fixedly connected.

[0007] Furthermore, the area between the actuator and the first wall is a first air chamber, and at least one through-hole is provided on the first wall in the area opposite to or near the central region of the actuator, and the first hole communicates with the first air chamber. The second wall has at least one second hole that communicates with the second air chamber.

[0008] Furthermore, a cover member is provided on the side of the first wall away from the fluid cavity. The cover member is provided with a guide channel communicating with the first hole to draw in external gas. A recess is formed in the area of ​​the cover member facing the first wall opposite to the elastic support portion.

[0009] Furthermore, the elastic beam also has a second elastic beam located on the side of the opening near the center of the actuator. The outer end of the second elastic beam is connected to the connecting portion, and the inner end of the second elastic beam is connected to the first wall.

[0010] Furthermore, the elastic support portion is located inside the opening, and the elastic support portion is integrally formed or fixedly connected to the first wall.

[0011] Furthermore, there are multiple elastic support portions and openings, with each elastic support portion corresponding to one of the openings and disposed at the corresponding opening.

[0012] Furthermore, there are three or four openings, all of which are evenly distributed around the circumference of the actuator.

[0013] Furthermore, a flexible filler is provided between the limiting part and the first elastic beam; One of the limiting part and the first elastic beam is fixedly connected to one side of the flexible filler, and the other is fixedly connected to, in contact with, or has a gap with the other side of the flexible filler.

[0014] Furthermore, the flexible filler is made of silicone rubber or foam.

[0015] Furthermore, the limiting part includes a suspension part and a protrusion part; The suspension portion protrudes from the inner wall of the housing into the fluid cavity; The protrusion is fixedly connected to one end of the suspension part, and the protrusion is disposed opposite to the elastic support part with a gap, and covers part or all of the first elastic beam.

[0016] The present invention also provides a fluid control module for the aforementioned micro pump.

[0017] Furthermore, a flow path reversing valve is provided on the second wall.

[0018] The beneficial effects of this invention are as follows: The micropump of this invention has a limiting part that protrudes from the inner wall of the fluid cavity and is positioned opposite the elastic support part with a gap. The limiting part covers part or all of the first elastic beam constituting the elastic support part, thus limiting the deformation of the elastic beam within the elastic deformation range. This avoids the risk of excessive vibration or / and tensile stress exceeding the yield point acting on the elastic beam due to the inertial force acting on the actuator under impact load, which would cause the elastic beam to undergo plastic deformation and the static position of the actuator to change relative to the design state, thereby causing the micropump to malfunction, degrade in performance, or fail.

[0019] Other features and advantages of this application will become clear from the following detailed description of exemplary embodiments with reference to the accompanying drawings. Attached Figure Description

[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0021] Figure 1 This is a schematic diagram of the micro pump in this invention; Figure 2 This is a three-dimensional schematic diagram of one side of the micro pump in this invention; Figure 3 This is a three-dimensional schematic diagram of the other side of the micropump in this invention; Figure 4 This is a schematic diagram showing the connection between the outer end of the first elastic beam and the side wall of the opening in this invention; Figure 5 This is a schematic diagram of the area where the outer end of the first elastic beam is connected to the side surfaces of the first wall adjacent to the side wall of the opening in this invention. Figure 6 This is a top view schematic diagram of the first wall having a first elastic beam in this invention; Figure 7 This is a top view schematic diagram of the first wall having a first elastic beam and a second elastic beam in this invention; Figure 8 This is a schematic diagram showing the limiting part protruding from the second wall; Figure 9 This is a schematic diagram showing the limiting part protruding from the first wall; Figure 10 This is a schematic diagram showing a flexible filler material between the limiting part and the elastic beam; Figure 11 This is a schematic diagram of a limiting part consisting of a suspension part and a protrusion. Figure 12 This is a schematic diagram of the fluid control module; Figure 13 This is a schematic diagram of a connector with a closed ring structure; Figure 14 This is a schematic diagram showing multiple discretely arranged connecting intervals.

[0022] In the figure: 1. Shell, 11. First wall, 11a. Opening, 111. Fixed part, 112. Movable part, 112a. First hole; 12. Second wall, 12a. Second hole; 13. Side wall; 14. Fluid cavity, 14a. First air chamber, 14b. Second air chamber; 2. Actuator; 21. Vibrating plate; 21a. Connecting boss; 22. Piezoelectric element; 3. Elastic support part; 31. Elastic beam; 311. First elastic beam; 312. Second elastic beam; 32. Connecting part; 4. Limiting part; 41. Suspension part; 42. Protrusion; 5. Cover component; 51. Flow channel; 52. Recess; 6. Flexible filler; 7. Flow path reversing valve; 8. Connectors. Detailed Implementation

[0023] The invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the invention in a schematic manner. Therefore, they only show the components relevant to the invention. Orientations and references (e.g., up, down, left, right, etc.) are only used to aid in the description of the features in the drawings. Therefore, the following specific embodiments are not intended to be restrictive, and the scope of the claimed subject matter is defined solely by the appended claims and their equivalents.

[0024] Example 1, like Figure 1-3As shown, a miniature pump includes a housing 1, an actuator 2, and a limiting part 4; The housing 1 has a first wall 11 and a second wall 12 disposed opposite to each other and a side wall 13 connected between the first wall 11 and the second wall 12. The first wall 11, the side wall 13 and the second wall 12 together enclose an internal space, which is formed as a fluid cavity 14. The actuator 2 is housed in the fluid cavity 14 and divides the fluid cavity 14 into a first air chamber 14a and a second air chamber 14b. The actuator 2 includes a stacked vibrating plate 21 and a piezoelectric sheet 22. The piezoelectric sheet 22 may be a piezoelectric ceramic sheet. The piezoelectric sheet 22 is used to drive the actuator 2 to bend and vibrate. Specifically, the actuator 2 is driven to bend and vibrate in a predetermined direction. The predetermined direction refers to the stacking direction of the first wall 11 and the second wall 12 in space. Specifically, the vibrating plate 21 has a first main surface and a second main surface disposed opposite to each other in its thickness direction. The piezoelectric sheet 22 is engaged with at least one surface of the vibrating plate 21 in the thickness direction. That is, the piezoelectric sheet 22 can be engaged on the first main surface of the vibrating plate 21, or it can be engaged on the second main surface of the vibrating plate 21, or even at least two piezoelectric sheets 22 can be engaged on the first main surface and the second main surface of the vibrating plate 21 respectively. In this embodiment, the piezoelectric sheet 22 is engaged on the second main surface of the vibrating plate 21 facing the second wall 12. Under the excitation of an external periodic electrical signal, the piezoelectric sheet 22 causes the vibrating plate 21 to bend and vibrate, thereby causing the actuator 2 to bend and vibrate in a predetermined direction. In addition, it should be noted that the vibrating plate 21 can be, but is not limited to, a circular plate, a square plate, a polygonal plate, or an elliptical plate, etc. Similarly, the piezoelectric sheet 22 engaged on the vibrating plate 21 can be, but is not limited to, a circle, a square, a polygon, etc. In this embodiment, the vibrating plate 21 is in the shape of a circular plate and the piezoelectric sheet 22 is in the shape of a circle for illustration. However, it should be understood that this does not constitute a limitation on the scope of protection of the present invention. That is, the first wall 11 and the second wall 12 are located on both sides of the vibrating plate 21. In this embodiment, the first wall 11 is located on the side where the first main surface of the vibrating plate 21 is located, the second wall 12 is located on the side where the second main surface of the vibrating plate 21 is located, and the side wall 13 surrounds the outer periphery of the actuator 2 with a gap.

[0025] The housing 1 can be a stack of multiple flat plate-shaped components stacked in a specified direction. In this embodiment, the first wall 11, the second wall 12, and the side wall 13 are all formed as flat plate-shaped components. The first wall 11, the second wall 12, and the side wall 13 can be one layer or multiple layers. For example, the side wall 13 is configured as a multi-layer structure, which includes an electrode layer that provides a drive signal for the actuator 2. This is not limited here. These flat plate-shaped components are stacked along the thickness direction, defining a fluid cavity 14 inside. That is, the fluid cavity 14 is defined in the encapsulation structure formed by the first wall 11, the second wall 12, and the side wall 13. The piezoelectric actuator 2 is arranged in the fluid cavity 14 of the encapsulation structure. The actuator 2 is located in the fluid cavity 14 and is elastically supported by the housing 1, thereby separating the connected first air chamber 14a and second air chamber 14b. The first wall 11, the second wall 12, and the side wall 13 can be flat plate structures with the same or similar shapes. The side wall 13 of the flat plate structure is a hollow structure. For example, in this embodiment, the first wall 11, the second wall 12, and the side wall 13 are all square, but this is not a limitation.

[0026] Specifically: An opening 11a is provided on the first wall 11 in the region opposite to the outer periphery of the actuator 2.

[0027] The elastic support portion 3 is correspondingly provided to the opening 11a. The elastic support portion 3 includes a connecting portion 32 and an elastic beam 31. The elastic beam 31 has a first elastic beam 311, which is located on the side of the opening 11a away from the center of the actuator 2. The outer end of the first elastic beam 311 is connected to the first wall 11, and the inner end of the first elastic beam 311 is connected to the connecting portion 32. That is, the connecting portion 32 is connected to the side wall 13 or the surrounding area of ​​the opening 11a through the first elastic beam 311. Specifically, the outer end of the first elastic beam 311 is connected to the side wall 13 of the opening 11a, such as... Figure 4 As shown; or the outer end of the first elastic beam 311 is connected to the area adjacent to the side wall 13 of the opening 11a on both sides of the first wall 11, such as Figure 5 As shown; it should be understood that the side of the first elastic beam 311 away from the center of the actuator 2 is the outer end of the first elastic beam 311, and the side of the first elastic beam 311 closer to the center of the actuator 2 is the inner end of the first elastic beam 311, as shown. Figure 6 As shown; the elastic beam 31 may also have a second elastic beam 312, which is opposite to the first elastic beam 311 about the connecting portion 32. That is, the second elastic beam 312 is located on the side of the opening 11a near the center of the actuator 2. The outer end of the second elastic beam 312 is connected to the connecting portion 32, and the inner end of the second elastic beam 312 is connected to the first wall 11, as shown. Figure 7As shown; it should be understood that the side of the second elastic beam 312 away from the center of the actuator 2 is the outer end of the second elastic beam 312, and the side of the second elastic beam 312 closer to the center of the actuator 2 is the inner end of the second elastic beam 312, thereby providing a more stable elastic support for the actuator 2. The structural forms of the first elastic beam 311 and the second elastic beam 312 can be straight, S-shaped, symmetrical double straight, symmetrical double S-shaped, etc., and the specific structural forms of the first elastic beam 311 and the second elastic beam 312 are not limited here. In addition, the structural forms of the first elastic beam 311 and the second elastic beam 312 can be the same or different.

[0028] The actuator 2 is fixedly connected to the connecting part 32, and the elastic support part 3 deforms with the bending vibration and / or displacement of the actuator 2; ideally, at least one connecting boss 21a is formed on the side surface of the vibrating plate 21 facing the connecting part 32, and the connecting boss 21a and the connecting part 32 opposite to it are fixedly connected, thereby elastically supporting the actuator 2 against the first wall 11, such as Figures 1-3 As shown; shape and position change refers to the change in shape and position of a structure under the action of external forces, and the change in shape and position is usually accompanied by the deformation of itself or related structures.

[0029] The elastic support portion 3 and the corresponding first wall 11 can be integrally formed or fixedly connected. To simplify the processing technology while ensuring the overall stability of the structure, it is ideal for the elastic support portion 3 and the first wall 11 to be integrally formed. The elastic support portion 3 is located inside the opening 11a, and the connecting portion 32 is connected to the side wall 13 of the opening 11a through an elastic beam 31. Figures 1-3 As shown. For example, the first wall 11 can be processed by punching or laser cutting to form the opening 11a and the elastic support 3 on the first wall 11, but it is not limited thereto.

[0030] It should be noted that the opening 11a here can be one or multiple; one opening 11a can correspond to one continuous elastic support 3, or one opening 11a can correspond to multiple discrete elastic support 3. On the one hand, considering that the actuator 2 is driven to bend and vibrate along a specified direction, in order to ensure the stability of the shape changes of the first air chamber 14a and the second air chamber 14b formed by the actuator 2 during the operation of the micro pump, the actuator 2 is elastically supported on the elastic support 3 of the first wall 11. Ideally, a uniformly distributed elastic support force should be provided in the circumferential region opposite to the outer peripheral side of the actuator 2, thereby ensuring that the actuator 2 moves in a more regular direction. The shape undergoes bending vibration; on the other hand, the opening 11a is located in the circumferential region of the first wall 11 opposite to the outer periphery of the actuator 2. If the circumferential coverage area of ​​a single opening 11a is too large, it will greatly weaken the structural strength of the first wall 11. Therefore, in order to ensure the integrity and stability of the structure, it is ideal to have multiple elastic support parts 3 and openings 11a, with each elastic support part 3 corresponding to one opening 11a. The multiple openings 11a and the corresponding elastic support parts 3 are evenly distributed in the circumferential region of the first wall 11 opposite to the outer periphery of the actuator 2, thereby providing a uniformly distributed elastic support force for the actuator 2. It is easy to understand that although increasing the number of openings 11a and corresponding elastic support parts 3 is beneficial to improving the precision of adjusting the support stiffness of the elastic support parts 3 during the design process, too many openings 11a and elastic support parts 3 will also make the structure complex and damage the overall strength and stiffness of the first wall 11. Ideally, there are three openings 11a, which are evenly distributed on the first wall 11 in the circumferential region opposite to the outer periphery of the actuator 2. Each of the three openings 11a is provided with an independent elastic support 3. Figures 2-3 As shown; or, there are four openings 11a, which are evenly distributed on the first wall 11 in the circumferential region opposite to the outer periphery of the actuator 2. Each of the four openings 11a is provided with an independent elastic support 3, such as Figures 6-7 As shown, this is not the only limitation.

[0031] Therefore, during the bending vibration and / or displacement of the actuator 2, the actuator 2 is fixedly connected to the connecting part 32, and the connecting part 32 will also undergo shape and position changes, thereby causing the elastic beam 31 to undergo shape and position changes. It is easy to understand that in order to avoid interference, the opening 11a must provide sufficient clearance space for the shape and position changes of the elastic support part 3.

[0032] The limiting part 4 protrudes from the inner wall of the fluid cavity 14, is disposed opposite to the elastic support part 3 with a gap, and covers part or all of the first elastic beam 311, for limiting the deformation of the elastic beam 31 within the range of elastic deformation; it is easy to understand that when the actuator 2 undergoes shape and position changes due to bending vibration and / or displacement, it will directly cause the elastic support part 3 connected to it to deform, especially causing the deformation of the elastic beam 31, which mainly plays the role of elastic support; when the micro pump is working normally, the deformation of the elastic support part 3 is relatively small, and the elastic beam 31 is within the range of elastic deformation, but when the micro pump is subjected to When subjected to abnormal impact loads and large inertial forces, such as during a drop test of a micropump product or when an end product equipped with the micropump of this application is accidentally dropped from a height, the inertial force under the impact load will cause a large displacement change in the relatively large actuator 2. The connected elastic support 3 will also undergo a large displacement, resulting in large deformation of the elastic beam 31. When this deformation exceeds the yield limit of the elastic beam 31, the actuator 2 will deviate from its original design position, potentially causing the micropump to malfunction, experience performance degradation, or even fail. The limiting part 4 is positioned opposite the elastic support 3 with a gap, covering part or all of the first elastic beam 311. This not only does not affect the normal operation of the micropump but also limits the deformation of the first elastic beam 311 and, consequently, the elastic support 3, within the range of elastic deformation. This ensures that after the abnormal load disappears, the actuator 2 can return to its original design position, avoiding the risk of malfunction, performance degradation, or even failure. It should be noted that when the elastic beam 31 also has a second elastic beam 312, the limiting part 4 and the elastic support part 3 are arranged opposite each other with a gap, which can further cover part or all of the second elastic beam 312. However, since the second elastic beam 312 is located on the side of the opening 11a near the center of the actuator 2, and is located in the area opposite to the working space of the micro pump in this embodiment (see below), and this working space itself is relatively small, it is not convenient to set the limiting part 4. In addition, forcibly setting the limiting part 4 in this small space can easily cause motion interference between the limiting part 4 and the actuator 2 or the first wall 11, which will generate noise and may also cause product damage or failure. Furthermore, the setting of the limiting part 4 will also occupy part of the working space, resulting in a decrease in the output performance of the micro pump. Therefore, regardless of whether the elastic beam 31 also has a second elastic beam 312, in this embodiment, preferably, the limiting part 4 and the elastic support part 3 are arranged opposite each other with a gap, and cover part or all of the first elastic beam 311.

[0033] In the micropump of this embodiment, the actuator 2 is elastically supported on the first wall 11. The space of the first air chamber 14a between the actuator 2 and the first wall 11 forms a working chamber. At least one through-hole 112a is provided on the first wall 11 in a region opposite to or near the central region of the actuator 2, and the first hole 112a communicates with the first air chamber 14a. During operation, the actuator 2 is driven to bend and vibrate in a predetermined direction, thereby causing a periodic change in the volume of the working chamber. Specifically, when the volume of the working chamber increases, external gas is drawn into the working chamber through the first hole 112a. When the volume of the working chamber decreases, the actuator 2 comes closer to the first hole 112a, increasing the resistance to the reverse flow of gas from the first hole 112a, and the compressed gas mainly flows out from the outer periphery of the working chamber. In order to enable the micropump to draw in gas from the side where the first wall 11 is located and discharge gas from the side where the second wall 12 is located, the micropump usually also includes at least one second hole 12a disposed on the second wall 12 and communicating with the second air chamber 14b; a cover member 5 is also provided on the side of the first wall 11 away from the fluid chamber 14. The cover member 5 is provided with a guide channel 51 communicating with the first hole 112a to draw in external gas. The external gas system is drawn in through the guide channel 51 and then enters the working chamber through the first hole 112a. In addition, a recess 52 is formed in the area of ​​the cover member 5 facing the first wall 11 opposite to the elastic support 3. On the one hand, it seals the opening 11a and blocks the compressed gas from flowing out of the opening 11a. On the other hand, it provides clearance space for the shape and position changes of the elastic support 3. Furthermore, to further increase the output performance of the micropump, it is ideal that the first wall 11 has a movable part 112 located in the center and a fixed part 111 arranged circumferentially around the movable part 112. The movable part 112 is arranged opposite to the actuator 2. A first hole 112a is provided on the movable part 112, and an opening 11a is provided on the fixed part 111. The movable part 112 and the fixed part 111 are integrally formed or fixedly connected. To increase the integrity and stability of the structure, it is ideal that the movable part 112 and the fixed part 111 are integrally formed, which is beneficial to simplify the manufacturing process. That is, the fixed part 111 is substantially fixed, while the movable part 112 can bend and vibrate. When the actuator 2 bends and vibrates, the pressure change in the working chamber causes the movable part 112 to bend and vibrate, thereby substantially increasing the volume change of the working chamber during the operation of the micropump, and thus increasing the output performance of the micropump. Figure 1 As shown.

[0034] It should be noted that the actuator 2 is elastically supported on the first wall 11, and the space of the first air chamber 14a between the actuator 2 and the first wall 11 forms the working chamber. Since the amplitude of the piezoelectric actuator 2 during operation is usually a few micrometers to tens of micrometers, which is relatively small, the height of the working chamber is also small in order to obtain a larger compression ratio. That is to say, the actuator 2 is relatively close to the first wall 11. Therefore, when the micropump is subjected to an impact load from the first wall 11 toward the second wall 12, the large shape and position changes that the actuator 2 may undergo under the action of inertial force are limited by the first wall 11. This prevents the deformation of the elastic beam 31 from exceeding its yield limit. After the inertial force disappears, the actuator 2 can return to its designed position. However, when the micropump is subjected to an impact load from the second wall 12 toward the first wall 11, the distance between the second wall 12 and the actuator 2 is relatively large, providing sufficient space for the actuator 2 to undergo large shape and position changes. Consequently, there is a risk that under the action of inertial force, the elastic beam 31 may undergo plastic deformation exceeding its yield limit, causing the actuator 2 to become displaced, resulting in micropump malfunction, performance degradation, or failure. In view of this, the limiting part 4 is mainly used to limit the deformation of the elastic beam 311 within the elastic deformation range when the micropump is subjected to an abnormal impact load from the second wall 12 toward the first wall 11.

[0035] The limiting part 4 protrudes from the inner wall of the fluid cavity 14, or it may protrude from the side wall 13 surrounding the fluid cavity 14, such as... Figure 1 As shown, it can also protrude from the first wall 11 or the second wall 12 that encloses the fluid cavity 14, such as... Figures 8-9 As shown, no limitations are specified here.

[0036] Furthermore, the orthographic projection of the limiting part 4 on the first wall 11 can be offset from the orthographic projection of the piezoelectric actuator 2 on the first wall 11, which is beneficial for the thinning design of the micro pump.

[0037] Example 2

[0038] The difference between Example 2 and Example 1 is as follows: Figure 10 As shown, a flexible filler 6 is provided between the limiting part 4 and the first elastic beam 311; One of the limiting part 4 and the first elastic beam 311 is fixedly connected to one side of the flexible filler 6, and the other is fixedly connected to, in contact with, or has a gap with the other side of the flexible filler 6. The principle of the filler is to not hinder the normal elastic deformation of the elastic support part 3 during the normal operation of the micropump, and to buffer abnormal impacts. Specifically, when the micropump is subjected to abnormal impact loads, such as falling from a height, its momentum changes drastically in a very short time. The instantaneous inertial force acts on the actuator 2, thereby causing the elastic beam 31 to deform. The flexible filler 6 prolongs the time of this action process through its own deformation or energy dissipation mechanism, thereby significantly reducing the magnitude of the impact load borne by the actuator 2. The flexible filler 6 is made of silicone rubber or foam, for example, low-modulus silicone rubber, porous foam / sponge pad, etc.

[0039] Example 3

[0040] The difference between Example 3 and Example 1 or 2 is that: Figure 11 As shown, the limiting part 4 includes a suspension part 41 and a protrusion 42; The suspension part 41 protrudes from the inner wall of the housing 1 into the fluid cavity 14; The protrusion 42 is fixedly connected to one end of the suspension part 41. The protrusion 42 is disposed opposite to the elastic support part 3 with a gap, and covers part or all of the first elastic beam 311.

[0041] Specifically, the end of the suspension part 41 away from the protrusion 42 is connected to a fixed part on the inner wall that does not change shape or position during the operation of the micro pump. This fixed part can be located on the side wall 13, the second wall 12, or the first wall 11. The other end of the suspension part 41 is adjacent to the elastic support part 3, and the protrusion 42 is fixedly disposed at the end of the suspension part 41 adjacent to the elastic support part 3. The protrusion 42 and the elastic support part 3 are disposed opposite each other with a gap and cover part or all of the first elastic beam 311 to limit the deformation of the elastic support part 3 within the range of elastic deformation.

[0042] Example 4

[0043] like Figure 12 As shown, a fluid control module includes a micro pump as described in any of embodiments 1-3 above. Further, the fluid control module also includes a flow path reversing valve 7, which is disposed on the second wall 12, on the side of the second wall 12 opposite to the fluid chamber 14. The second wall 12 and the flow path reversing valve 7 are connected by a connector 8. Ideally, this connector 8 is an elastic connector 8, which is beneficial for further buffering abnormal impact loads. Figure 13 As shown, the connector 8 can be a closed ring structure, thereby avoiding the gas passage between the second hole 12a on the second wall 12 and the flow path reversing valve 7; of course, as Figure 14 As shown, the connector 8 can also be a plurality of connecting intervals discretely arranged around the outer periphery of the first wall 11, with sealant applied between the plurality of connecting intervals to prevent gas leakage.

[0044] The above description, based on the preferred embodiments of the present invention, provides inspiration. Those skilled in the art can make various changes and modifications without departing from the inventive concept. The technical scope of this invention is not limited to the contents of the specification but must be determined according to the claims.

Claims

1. A miniature pump, characterized in that: include: The housing (1) has a first wall (11) and a second wall (12) disposed opposite to each other and a side wall (13) connecting the first wall (11) and the second wall (12), and a fluid cavity (14) is formed between the first wall (11), the side wall (13) and the second wall (12). An actuator (2) is housed in the fluid cavity (14) and divides the fluid cavity (14) into a first air chamber (14a) and a second air chamber (14b); the actuator (2) includes a stacked vibrating plate (21) and a piezoelectric sheet (22), the piezoelectric sheet (22) being used to drive the actuator (2) to bend and vibrate; an opening (11a) is provided in the area of ​​the first wall (11) opposite to the outer periphery of the actuator (2). The elastic support part (3) is provided corresponding to the opening (11a) and includes a connecting part (32) and an elastic beam (31). The elastic beam (31) has at least a first elastic beam (311). The first elastic beam (311) is located on the side of the opening (11a) away from the center of the actuator (2). The outer end of the first elastic beam (311) is connected to the first wall (11), and the inner end of the first elastic beam (311) is connected to the connecting part (32). The actuator (2) is fixedly connected to the connecting part (32). The elastic support part (3) deforms with the bending vibration and / or displacement of the actuator (2). And a limiting part (4), which protrudes from the inner wall of the fluid cavity (14), is disposed opposite to the elastic support part (3) with a gap, and covers part or all of the first elastic beam (311), for limiting the deformation of the elastic beam (31) within the elastic deformation range.

2. The micro pump according to claim 1, characterized in that: The vibrating plate (21) has a connecting boss (21a) protruding from the side surface of the area opposite to the connecting part (32) and the connecting part (32) is fixedly connected to it.

3. The micro pump according to claim 1, characterized in that: The area between the actuator (2) and the first wall (11) is the first air chamber (14a). At least one through first hole (112a) is provided on the first wall (11) in the area opposite to or near the central area of ​​the actuator (2). The first hole (112a) communicates with the first air chamber (14a). The second wall (12) has at least one second hole (12a) communicating with the second air chamber (14b).

4. The micro pump according to claim 3, characterized in that: A cover member (5) is provided on the side of the first wall (11) away from the fluid cavity (14). The cover member (5) is provided with a guide channel (51) that communicates with the first hole (112a) to draw in external gas. A recess (52) is formed on the side of the cover member (5) facing the first wall (11) opposite to the elastic support (3).

5. The micro pump according to any one of claims 1, characterized in that: The elastic beam also has a second elastic beam (312), which is located on the side of the opening (11a) near the center of the actuator (2). The outer end of the second elastic beam (312) is connected to the connecting part (32), and the inner end of the second elastic beam (312) is connected to the first wall (11).

6. The micro pump according to any one of claims 1-5, characterized in that: The elastic support part (3) is located inside the opening (11a), and the elastic support part (3) is integrally formed or fixedly connected to the first wall (11).

7. The micro pump according to any one of claims 6, characterized in that: There are multiple elastic support portions (3) and opening portions (11a), and each elastic support portion (3) corresponds to an opening portion (11a) and is disposed at the corresponding opening portion (11a).

8. The micropump according to claim 7, characterized in that: There are three or four openings (11a), and all openings (11a) are evenly distributed around the circumference of the actuator (2).

9. The micro pump according to any one of claims 1-5, characterized in that: A flexible filler (6) is provided between the limiting part (4) and the first elastic beam (311). One of the limiting part (4) and the first elastic beam (311) is fixedly connected to one side of the flexible filler (6), and the other is fixedly connected to, in contact with or with a gap to the other side of the flexible filler (6).

10. The micropump according to claim 9, characterized in that: The flexible filler (6) is made of silicone rubber or foam.

11. The micro pump according to claim 9, characterized in that: The limiting part (4) includes a suspension part (41) and a protrusion part (42). The suspension part (41) protrudes from the inner wall of the housing (1) into the fluid cavity (14); The protrusion (42) is fixedly connected to one end of the suspension part (41). The protrusion (42) and the elastic support part (3) are arranged opposite each other with a gap, and cover part or all of the first elastic beam (311).

12. A fluid control module, characterized in that: Including the micropump as described in any one of claims 1-11.

13. The fluid control module according to claim 12, characterized in that: A flow path reversing valve (7) is provided on the second wall (12).

Images