High-precision three-dimensional adjusting system based on flexible adjusting assembly and debugging method

Abstract

The invention relates to the technical field of precision adjusting equipment, and particularly discloses a high-precision three-dimensional adjusting system based on a flexible adjusting assembly and a debugging method. The system comprises three groups of flexible adjusting assemblies, a bottom plate and three groups of wedge-shaped displacement tables, each flexible adjusting assembly comprises two sets of flexible rotating assemblies arranged at 90 degrees, a set of flexible displacement compensation assembly and a rigid supporting column, and the three sets of flexible adjusting assemblies are distributed at the corners of the bottom plate at 60 degrees. The traditional ball-V groove matching is replaced by the elastic deformation of the material, and the z-axis displacement input of the wedge-shaped displacement table is coupled, so that the high-precision adjustment of the translation of the bottom plate along the z-axis and the rotation of the bottom plate around the x-axis and the y-axis is realized. The device is free of friction clearance, high in rigidity, large in load, adaptive to the vacuum clean environment, high in adjusting precision and good in repeatability, and the defects in the prior art are effectively overcome.

Description

Technical Field

[0001] This invention relates to the field of precision adjustment equipment technology, specifically to a high-precision three-dimensional adjustment system and adjustment method based on flexible adjustment components. Background Technology

[0002] With the rapid development of fields such as synchrotron radiation optical element adjustment, semiconductor optical element detection, and high-precision multidimensional displacement stages, the market has placed higher demands on the performance of displacement stages, and there is an urgent need for a multi-degree-of-freedom displacement stage with large load-bearing capacity that can achieve high-precision two-dimensional angle and one-dimensional height adjustment.

[0003] Currently, products on the market that can achieve the above functions mainly fall into three categories, but all of them have significant technical defects and are difficult to fully adapt to actual application scenarios:

[0004] The first type is a stacked structure of multiple single-degree-of-freedom displacement stages. This structure allows for the flexible addition of the required rotational or translational degrees of freedom by connecting and stacking multiple single-degree-of-freedom displacement stages in series. However, it has a core drawback: the lower displacement stage needs to bear the weight of the upper displacement stage itself, which significantly reduces the effective load of the equipment; and the series-connected structural design makes the overall stiffness weak, which makes it prone to vibration or deformation during high-precision adjustment, resulting in poor stability and failing to meet the requirements of high load and high stability.

[0005] The second type is the Hexpod six-degree-of-freedom displacement stage. This type of displacement stage has mature technology and can achieve multi-degree-of-freedom linkage adjustment. However, its highly integrated structural design makes its internal components highly sealed and difficult to disassemble. In addition, the materials and assembly methods of some components cannot be adapted to the low outgassing rate requirements of ultra-high vacuum environments, which makes it impossible to use in scenarios that require vacuum environments, such as synchrotron radiation technology and semiconductor lithography.

[0006] The third type is a three-point supported three-degree-of-freedom displacement stage that adopts the Kinematic mount principle. Its core structure is as follows: Figure 2As shown, the system specifically includes a base 5 with V-grooves, an adjustment platform 8, three adjustable-length displacement rods (displacement rod one 701, displacement rod two 702, and displacement rod three 703), and ball heads 6 that mate with the V-grooves. The base 5 has three V-grooves evenly distributed at a 60° angle. Three ball heads 6 are fixed to the three corners of the bottom of the adjustment platform 8, corresponding to and fitting into the three V-grooves. The three displacement rods (displacement rod one 701, displacement rod two 702, and displacement rod three 703) have identical structures, all being telescopic, and their ends are connected to the base 5 and the adjustment platform 8 via hinges. The design logic of this structure is as follows: each set of "ball-V groove" can constrain two degrees of freedom, and the three sets of "ball-V groove" arranged at 60° can jointly constrain the six degrees of freedom of the adjustment platform 8 to achieve high stability support; during adjustment, by changing the length of displacement rod 1 701, displacement rod 2 702, and displacement rod 3 703, the adjustment platform 8 can be driven to move linearly along the z-axis and rotate around the x-axis and y-axis; and based on the kinematic coupling characteristics, when adjusting a single degree of freedom (such as rotating around the x-axis), it will not cause parasitic motion of the other degree of freedom (such as rotating around the y-axis or moving along the z-axis), resulting in high adjustment accuracy. However, this structure has inherent and unavoidable defects: the contact between the ball head 6 and the V-groove on the base 5 requires gravity or additional pre-tightening force to ensure a tight fit. During the adjustment process, the two will slide relative to each other, which will inevitably cause mechanical wear. After long-term use, the mating gap will increase, which will not only directly reduce the adjustment accuracy and repeatability, but also generate wear debris and pollute the environment. At the same time, the existence of sliding friction and gap makes this structure unable to meet the long-term high-precision and stable adjustment requirements in clean or vacuum environments, limiting its application in high-end precision manufacturing, large scientific facilities and other fields.

[0007] To address the technical problems of existing technologies, such as low effective load, poor stability, inability to adapt to vacuum / clean environments, and accuracy degradation over long-term use, this invention proposes a high-precision three-dimensional adjustment system and method based on flexible adjustment components. By replacing the traditional "ball-V groove" fit with an innovative structural design, it fundamentally solves the defects of existing products and meets the needs of high-end applications. Summary of the Invention

[0008] The purpose of this invention is to provide a high-precision three-dimensional adjustment system and debugging method based on flexible adjustment components to solve the above-mentioned defects.

[0009] To achieve the above objectives, the present invention provides the following technical solution:

[0010] This invention proposes a high-precision three-dimensional adjustment system based on flexible adjustment components, comprising: flexible adjustment components, a base plate, and wedge-shaped displacement stages; three sets of flexible adjustment components are provided, each rigidly connected to the base plate, and the three sets of flexible adjustment components are distributed at 60° angles at the three corners of the base plate; three sets of wedge-shaped displacement stages are provided, each rigidly connected to one of the three sets of flexible adjustment components, and the three sets of wedge-shaped displacement stages are used to provide linear displacement input along the z-axis; each set of flexible adjustment components includes two sets of flexible rotation components, one set of flexible displacement compensation components, and one rigid support column, the two sets of flexible rotation components are arranged at 90° angles, and the two sets of flexible rotation components and flexible displacement compensation components are rigidly connected and assembled on the rigid support column; through the displacement input of the three sets of wedge-shaped displacement stages and the elastic deformation coupling of the three sets of flexible adjustment components, the translation of the base plate along the z-axis, the rotation around the x-axis, and the rotation around the y-axis are realized.

[0011] Preferably, the flexible rotation assembly includes an upper bearing housing, a lower bearing housing, and two commercial flexible bearings; the two commercial flexible bearings are coaxially arranged and both are embedded in the holes of the upper and lower bearing housings and locked by set screws; both commercial flexible bearings are three-section structures, and the three sections are connected by springs; a gap is reserved between the upper and lower bearing housings to limit the rotation angle.

[0012] Preferably, the flexible displacement compensation component is an integral structure manufactured by wire EDM; the flexible displacement compensation component includes an upper connecting part, a blade hinge structure and a lower connecting part, the blade hinge structure consists of multiple parallel blades arranged side by side, and the upper connecting part is elastically connected to the lower connecting part through the blade hinge structure; the three sets of flexible adjustment components are assembled at 60° angles to the three corners of the base plate according to the orientation of the blade hinge structure.

[0013] Preferably, in the two sets of flexible rotating components of the flexible adjustment component, the rotation axis of one set of flexible rotating components is along the x-axis direction, and the rotation axis of the other set of flexible rotating components is along the y-axis direction; the translation direction of the flexible displacement compensation component is along the x-axis direction, and the rotation axis is along the z-axis direction.

[0014] Preferably, the base plate, each component of the flexible adjustment assembly, and the base of the wedge-shaped displacement stage are all made of vacuum-compatible materials, including titanium alloy, aluminum alloy, and stainless steel.

[0015] Preferably, a high-precision three-dimensional debugging method based on a flexible adjustment component specifically includes the following steps:

[0016] S1. Assemble the three sets of flexible adjustment components at a 60° angle to the blade hinge structure at the three corners of the base plate, ensuring that each set of flexible adjustment components is rigidly connected to the base plate.

[0017] S2. Rigidly connect the three sets of wedge-shaped displacement stages to the rigid support columns of the three sets of flexible adjustment components one by one, and fix the base of the three sets of wedge-shaped displacement stages.

[0018] S3. Control the three sets of wedge displacement stages to output linear displacement along the z-axis respectively. Through the elastic deformation of the three sets of flexible adjustment components, kinematic coupling and decomposition are performed to drive the base plate to realize translation along the z-axis, rotation around the x-axis, or rotation around the y-axis.

[0019] Preferably, in step S1, the horizontal constraint lines of the three sets of flexible adjustment components intersect in the same plane, and the constraint lines are the degree-of-freedom constraint direction lines of the flexible displacement compensation components.

[0020] Preferably, in step S3, when the single set of wedge displacement stages outputs displacement, the base plate rotates around the corresponding axis without generating parasitic motions of other degrees of freedom.

[0021] Preferably, in step S3, the displacement output accuracy of the wedge displacement stage determines the adjustment accuracy of the base plate, and the rotation angle range of the base plate is ±10mrad.

[0022] Preferably, the method is applicable to vacuum or clean environments, and all degrees of freedom of the flexible adjustment component are achieved through elastic deformation of the material during the adjustment process, without mechanical sliding or friction.

[0023] The beneficial effects of this invention are as follows:

[0024] (1) The present invention provides a high-precision three-dimensional adjustment system based on a flexible adjustment component. The flexible adjustment component replaces the traditional "ball-V groove" structure. The system achieves degree of freedom adjustment through material elastic deformation. It is frictionless and gapless, avoiding the wear problem of "ball-V groove" fit, improving adjustment accuracy and long-term stability, and meeting the long-term use requirements in clean and vacuum environments.

[0025] (2) The present invention provides a high-precision three-dimensional adjustment system based on flexible adjustment components. It adopts a structure in which three sets of flexible adjustment components are combined with a wedge displacement stage. The rigid connection design gives the system the advantages of high rigidity and large load, and solves the problems of small effective load and poor stability of single-degree-of-freedom displacement stage stacking.

[0026] (3) The present invention provides a high-precision three-dimensional adjustment system based on flexible adjustment components. All system components are made of vacuum-compatible materials, and the wedge displacement stage can be placed in an atmospheric environment. The linear motion is fed into the vacuum clean cavity through the vacuum bellows, which is suitable for ultra-high vacuum environment and makes up for the defects of Hexpod six-degree-of-freedom displacement stage.

[0027] (4) A high-precision three-dimensional adjustment system based on a flexible adjustment component of the present invention. The flexible adjustment component 1 adopts a modular design, has a simple structure, high reliability, is easy to maintain, and has high motion linearity and determinism. The minimum adjustment step depends on the motion characteristics of the wedge displacement stage, which can achieve ultra-high precision adjustment.

[0028] (5) The present invention provides a high-precision three-dimensional adjustment method based on a flexible adjustment component. There is no parasitic motion during the adjustment process. The angle travel of the rotation around the y-axis (Roll) can reach ±10mrad, and the parasitic displacement of the rotation around the x-axis (Yaw) is only 0.25% of the Roll travel. The adjustment accuracy and stability are significantly better than existing products. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the structure of the present invention;

[0030] Figure 2 This is a schematic diagram of the principle of three-point support-multidimensional adjustment based on kinematic fixation in existing technology;

[0031] Figure 3 This is a schematic diagram of the flexible adjustment component of the present invention;

[0032] Figure 4 This is a schematic diagram of the flexible rotation component of the present invention;

[0033] Figure 5 This is a schematic diagram of the structure of the commercial flexible bearing of the present invention;

[0034] Figure 6 This is a schematic diagram of the flexible displacement compensation component of the present invention;

[0035] Figure 7 This is a schematic diagram showing the relative positions of the flexible adjustment components in the three-dimensional adjustment platform of the present invention;

[0036] Figure 8 This is a prototype drawing of the present invention;

[0037] Figure 9 The figure shows the test results of the angle adjustment stroke and parasitic rotation angle of the present invention;

[0038] Figure 10 This is a test result diagram of the minimum step size for angle adjustment according to the present invention;

[0039] Figure 11 This is a dimensional relationship diagram of the high-precision three-dimensional adjustment system of the present invention.

[0040] In the diagram, 1. Flexible adjustment component; 101. Flexible rotation component; 101-1. Upper bearing housing; 101-2. Lower bearing housing; 101-3. Commercial flexible bearing; 101-31. Front section; 101-32. Middle section; 101-33. Rear section; 101-34. Spring; 102. Flexible displacement compensation component; 102-1. Upper connecting part; 102-2. Blade hinge structure; 102-3. Lower connecting part; 103. Rigid support column; 104. Constraint line; 105. Displacement compensation direction line; 2. Base plate; 3. Wedge-shaped displacement platform; 5. Base; 6. Ball head; 7. Displacement rod; 701. Displacement rod one; 702. Displacement rod two; 703. Displacement rod three; 8. Adjustment platform. Detailed Implementation

[0041] The present invention will be further described below with reference to the embodiments. It should be noted that these are merely examples and descriptions of the inventive concept. Those skilled in the art can make various modifications or additions to the specific embodiments described or use similar methods to replace them, as long as they do not deviate from the inventive concept or exceed the scope defined in the claims, they should all be considered to fall within the protection scope of the present invention.

[0042] Example 1:

[0043] Combined with appendix Figure 1 , Figures 3-10 The high-precision three-dimensional adjustment system based on a flexible adjustment component of the present invention will be described as follows:

[0044] like Figure 1 As shown, this invention proposes a high-precision three-dimensional adjustment system based on a flexible adjustment component, comprising: a flexible adjustment component 1, a base plate 2, and a wedge-shaped displacement stage 3. The base plate 2, all components of the flexible adjustment component 1, and the base of the wedge-shaped displacement stage 3 are made of vacuum-compatible materials such as titanium alloy, aluminum alloy, or stainless steel, resulting in a low outgassing rate. The wedge-shaped displacement stage 3 can be placed in an atmospheric environment, and its linear motion is fed into a vacuum clean chamber through a vacuum bellows. The base plate 2 and the flexible adjustment component 1 are partially placed in the vacuum clean environment, meeting the requirements for use in vacuum and clean environments.

[0045] like Figure 1 As shown, three sets of flexible adjustment components 1 are provided, all of which are rigidly connected to the base plate 2. The three sets of flexible adjustment components 1 are distributed at a 60° angle at the three corners of the base plate 2 with reference to the orientation of the blade hinge structure 102-2. Three sets of wedge-shaped displacement stages 3 are provided, each of which is rigidly connected to one of the three sets of flexible adjustment components 1. The bases of the three sets of wedge-shaped displacement stages 3 are fixedly set to provide linear displacement input along the z-axis.

[0046] Among them, the wedge-shaped displacement stage 3 is a commercially available product that can be purchased. Products from various displacement stage manufacturers can be used as long as the stage size, minimum step length in the vertical direction (z direction), and stroke meet the requirements. In this embodiment, it is only used as a schematic diagram to illustrate the principle of the flexible adjustment component 1 and is not described in detail.

[0047] like Figure 3 As shown, each set of flexible adjustment components 1 includes two sets of flexible rotation components 101, one set of flexible displacement compensation components 102, and one rigid support column 103. The two sets of flexible rotation components 101 are arranged at a 90° angle. After being rigidly connected to the flexible displacement compensation components 102, the two sets of flexible rotation components 101 are assembled on the rigid support column 103. Through the displacement input of the three sets of wedge displacement stages 3 and the elastic deformation coupling of the three sets of flexible adjustment components 1, the translation of the base plate 2 along the z-axis, the rotation around the x-axis, and the rotation around the y-axis are realized.

[0048] like Figure 4 , Figure 5 As shown, each flexible rotating assembly 101 includes an upper bearing housing 101-1, a lower bearing housing 101-2, and two commercial flexible bearings 101-3. Both commercial flexible bearings 101-3 are three-section structures. The three-section structure (double end) of the commercial flexible bearing 101-3 includes a front section 101-31, a middle section 101-32, and a rear section 101-33, which are connected by springs 101-34. The middle section 101-32 can rotate relative to the front section 101-31 and the rear section 101-33 about the axis indicated by the red dotted line (e.g., ...). Figure 5 (As shown).

[0049] Two commercial flexible bearings 101-3 are coaxially arranged and embedded in the holes of the upper bearing housing 101-1 and the lower bearing housing 101-2, and locked by set screws 101-4. Specifically, the front section 101-31 and the rear section 101-33 are fixed at both ends to the lower bearing housing 101-2 of the flexible rotating assembly 101 by set screws 101-4, and the middle section 101-32 is fixed to the upper bearing housing 101-1 of the flexible rotating assembly 101 by set screws 101-4. A gap is reserved between the upper bearing housing 101-1 and the lower bearing housing 101-2. This gap is used to limit the rotation angle of the upper bearing housing 101-1 relative to the lower bearing housing 101-2, so as to avoid damage to the commercial flexible bearings 101-3 due to excessive rotation angle.

[0050] like Figure 3As shown, in the two sets of flexible rotating components 101, one set of flexible rotating components 101 has its rotation axis along the x-axis direction, used to release the rotational degree of freedom around the x-axis; the other set of flexible rotating components 101 has its rotation axis along the y-axis direction, used to release the rotational degree of freedom around the y-axis. The two sets of identical flexible rotating components 101 are twisted 90° and assembled together, that is, the lower bearing seat 101-2 of the upper flexible rotating component 101 is fixedly connected to the upper bearing seat 101-1 of the lower flexible rotating component 101 by bolts.

[0051] like Figure 6 As shown, the flexible displacement compensation component 102 is an integral structure manufactured using wire EDM. The flexible displacement compensation component 102 includes an upper connecting part 102-1, a blade hinge structure 102-2, and a lower connecting part 102-3. The blade hinge structure 102-2 consists of multiple parallel blades arranged side-by-side. The upper connecting part 102-1 is elastically connected to the lower connecting part 102-3 through the blade hinge structure 102-2. The translational direction of the flexible displacement compensation component 102 is along the x-axis, used to release the translational degree of freedom along the x-axis; its rotational axis is along the z-axis, used to release the rotational degree of freedom around the z-axis, and can compensate for parasitic displacements required for sinusoidal-angular motion during multidimensional adjustment.

[0052] like Figure 7 As shown, the horizontal constraint lines of the three sets of flexible adjustment components 1 ( Figure 7 The red dotted line 104 intersects with the line in the same plane, and this constraint line is the direction line for the degree of freedom constraint of the flexible displacement compensation component 102; the displacement compensation direction of each flexible displacement compensation component 102 is in line with... Figure 7 The three thin dashed lines 105 in the figure coincide. Since the constraint lines 104 of the three sets of flexible adjustment components 1 intersect in the same plane, the degrees of freedom of the base plate 2 to move along the x-axis, move along the y-axis, and rotate around the z-axis are constrained; at the same time, since the flexible adjustment components 1 themselves are not extensible, the degrees of freedom of the base plate 2 to move along the z-axis and rotate around the x-axis and around the y-axis are also constrained when the wedge displacement stage 3 is not adjusted, so as to achieve high rigidity and high stability support for the base plate 2.

[0053] The present invention discloses a high-precision three-dimensional adjustment system based on a flexible adjustment component, the assembly steps of which are as follows:

[0054] (1) Assembly of flexible adjustment component 1: according to Figure 4 As shown, two commercial flexible bearings 101-3 are coaxially arranged and jointly embedded in the holes of the upper bearing housing 101-1 and the lower bearing housing 101-2, and locked with set screws to ensure that the upper bearing housing 101-1 can rotate flexibly relative to the lower bearing housing 101-2, and the rotation angle is limited by the gap between the upper and lower bearing housings; according to Figure 3As shown, the two sets of flexible rotating components 101 are arranged at a 90° angle and rigidly connected to the flexible displacement compensation component 102. They are then assembled onto the rigid support column 103 to complete the assembly of a single set of flexible adjustment components 1.

[0055] (2) Overall system assembly: according to Figure 7 As shown, the three sets of flexible adjustment components 1 are fixed to the three corners of the base plate 2 at a 60° angle with reference to the orientation of the blade hinge structure 102-2, ensuring that the horizontal constraint lines 104 of the three sets of flexible adjustment components 1 intersect on the same plane; the three sets of wedge-shaped displacement stages 3 are rigidly connected to the rigid support columns 103 of the three sets of flexible adjustment components 1 respectively, and the bases of the three sets of wedge-shaped displacement stages 3 are fixed on the optical platform, completing the assembly of the entire system (as shown). Figure 8 (Prototype shown).

[0056] Example 2:

[0057] This invention provides a high-precision three-dimensional adjustment method based on a flexible adjustment component, which is implemented based on a high-precision three-dimensional adjustment system based on a flexible adjustment component disclosed in Embodiment 1. Specifically, the high-precision three-dimensional adjustment method based on a flexible adjustment component is applied to the high-precision three-dimensional adjustment system based on a flexible adjustment component disclosed in Embodiment 1, and the specific adjustment method includes the following steps:

[0058] S1. Assemble the three sets of flexible adjustment components 1 at a 60° angle to the blade hinge structure 102-2 at the three corners of the base plate 2, ensuring that each set of flexible adjustment components 1 is rigidly connected to the base plate 2. At this time, the horizontal constraint lines 104 of the three sets of flexible adjustment components 1 intersect on the same plane.

[0059] S2. The three sets of wedge displacement stages 3 are rigidly connected to the rigid support columns 103 of the three sets of flexible adjustment components 1 respectively, and the bases of the three sets of wedge displacement stages 3 are fixed so that the wedge displacement stages 3 can only output linear displacement along the z-axis direction.

[0060] S3. The control device controls the three sets of wedge displacement stages 3 to output linear displacement along the z-axis respectively. The displacement of the three sets of wedge displacement stages 3 is kinematically coupled and decomposed by the elastic deformation of the three sets of flexible adjustment components 1, driving the base plate 2 to realize translation along the z-axis, rotation around the x-axis or rotation around the y-axis.

[0061] like Figure 11 As shown, the Z-axis positions of the three sets of wedge-shaped displacement stages 3 are set as Z1, Z2, and Z3, respectively. Based on the previous... Figure 2 As can be seen from the explanation of the schematic diagram, for the angular displacement about x... Using the average value of positions Z2 and Z3 as a benchmark, the displacement difference is mainly generated between the average positions of Z1 and Z2 and Z3. accomplish: , Similarly, for angular displacement about the y-axis... It is mainly through the displacement difference generated between Z2 and Z3. accomplish: , .

[0062] In step S3, when the single-set wedge displacement stage 3 outputs displacement, the base plate 2 rotates around the corresponding axis without generating parasitic motion in other degrees of freedom. The displacement output accuracy of the wedge displacement stage 3 determines the adjustment accuracy of the base plate 2. Testing shows that the rotation angle range of the base plate 2 can reach ±10 mrad, and the parasitic displacement is only 0.25% of the adjustment stroke (e.g., ...). Figure 9 (As shown); the specific minimum adjustment step depends on the accuracy of the wedge displacement stage 3, and is adopted. Figure 8 A commercially available wedge displacement stage with a minimum vertical displacement of 50 nm / step can achieve a minimum adjustment step size of 200 nrad / step (e.g., Figure 10 (As shown).

[0063] This invention discloses a high-precision three-dimensional adjustment system and debugging method based on a flexible adjustment component. Based on the principle of kinematic mount, its core innovation lies in replacing the flexible adjustment component 1 with... Figure 2 The existing "ball-V-groove" mating structure, while retaining the advantages of three-point support and no parasitic motion, achieves frictionless and gapless high-precision adjustment through material elastic deformation. It is also suitable for special environments such as vacuum and cleanroom environments. The specific working principle is as follows:

[0064] (a) The principle of degree-of-freedom configuration of a single flexible adjustment component.

[0065] Each flexible adjustment component 1 serves as a core functional unit, and its degrees of freedom configuration is consistent with... Figure 2 The single "ball-V groove" fit is completely equivalent. Through the rigid connection of two sets of flexible rotation components 101 and one set of flexible displacement compensation components 102, the design goal of "constraining two degrees of freedom and releasing four degrees of freedom" is achieved, as detailed below:

[0066] Release of rotational degrees of freedom of flexible rotating components: such as Figure 4As shown, the flexible rotation assembly 101 consists of an upper bearing housing 101-1, a lower bearing housing 101-2, and two commercial flexible bearings 101-3. The commercial flexible bearings 101-3 have a three-segment spring connection structure, with the middle segment capable of high-precision elastic deformation relative to the front and rear segments. In the flexible rotation assembly 101, the two commercial flexible bearings 101-3 are coaxially arranged and embedded together in the holes of the upper bearing housing 101-1 and the lower bearing housing 101-2, and locked with set screws 101-4. The two sets of flexible rotation assemblies 101 are arranged at a 90° angle. The rotation axis of one set of flexible rotation assemblies 101 is along the x-axis direction. The elastic deformation of its commercial flexible bearings 101-3 allows the upper bearing housing 101-1 to rotate relative to the lower bearing housing 101-2 around the x-axis, releasing the rotational degree of freedom around the x-axis. The rotation axis of the other set of flexible rotation assemblies 101 is along the y-axis direction, similarly releasing the rotational degree of freedom around the y-axis. Meanwhile, the clearance (e.g., 0.5-2mm) reserved between the upper bearing housing 101-1 and the lower bearing housing 101-2 can strictly limit the rotation angle (e.g., the maximum rotation angle does not exceed ±15mrad), avoiding damage to the commercial flexible bearing 101-3 due to excessive deformation.

[0067] Degrees of freedom released by flexible displacement compensation components: such as Figure 6 As shown, the flexible displacement compensation component 102 is an integrated wire EDM structure. The upper connecting part 102-1 is elastically connected to the lower connecting part 102-3 through multiple parallel blade hinge structures 102-2. The elastic deformation of the blade hinge structure 102-2 can realize two degrees of freedom: one is high-precision translation along the x-axis (maximum translation amount 5-10mm), used to compensate for parasitic displacements generated by sinusoidal-angle motion during three-dimensional adjustment; the other is rotation around the z-axis (such as maximum rotation angle ±5mrad), adapting to attitude coordination during the overall adjustment process.

[0068] Freedom constraint logic: Combining the freedom release effects of two sets of flexible rotation components 101 and one set of flexible displacement compensation components 102, a single set of flexible adjustment components 1 only constrains the translational degree of freedom along the z-axis and the translational degree of freedom along the y-axis, releasing a total of three rotational degrees of freedom around the x-axis, y-axis, and z-axis, and one translational degree of freedom along the x-axis. Figure 2 The degree of freedom configuration of each individual "ball-V groove" is completely consistent, laying the foundation for the subsequent three-dimensional adjustment achieved by the coordinated operation of the three sets of components. Each flexible adjustment component 1 has an elastic deformation stroke with a maximum rotation angle of ±60 mrad around the x-axis, a maximum rotation angle of ±60 mrad around the y-axis, and a maximum translation distance of 1 mm along the x-axis. To ensure a safety margin for long-term structural use and to match actual operating conditions, the actual tested and used angle adjustment stroke of this system when the three sets of flexible adjustment components 1 are working together is ±10 mrad, with the remaining stroke used as a safety redundancy.

[0069] (II) Layout and constraint principle of the three sets of flexible adjustment components

[0070] like Figure 7 As shown, the three sets of flexible adjustment components 1 are evenly distributed at 60° angles at the three corners of the base plate 2, with reference to the orientation of the blade hinge structure 102-2. This layout is consistent with... Figure 2 The three sets of "sphere-V-groove" have the same 60° arrangement logic, achieving high-rigidity and stable support for the base plate 2 through collaborative constraints:

[0071] Horizontal freedom constraints: Horizontal constraint lines of the three sets of flexible adjustment components 1 ( Figure 7 The red dotted lines 104 intersect on the same plane, and each constraint line corresponds to the direction of the degree of freedom constraint of the flexible displacement compensation component 102. The three form a constraint system with a 60° included angle. This constraint system can completely restrict the translational degree of freedom of the base plate 2 along the x-axis and y-axis, as well as the rotational degree of freedom about the z-axis, avoiding invalid displacement in the horizontal direction.

[0072] Vertical and rotational freedom constraints: Since the flexible adjustment component 1 itself is a rigid connection structure with no extensibility, when the wedge-shaped displacement stage 3 is not outputting displacement, the rigid support columns 103 of the three sets of flexible adjustment components 1 can jointly constrain the translational degree of freedom of the base plate 2 along the z-axis, and the rotational degrees of freedom around the x and y axes. In summary, the three sets of flexible adjustment components 1, arranged at a 60° angle, can constrain all six degrees of freedom of the base plate 2, achieving [the desired effect]. Figure 2 The three sets of "ball-V groove" joints provide the same high stability support, but completely avoid the contact wear problem of the "ball-V groove" joint.

[0073] (III) Input and motion coupling principle of wedge displacement stage.

[0074] like Figure 1 , 8 As shown, the three sets of wedge-shaped displacement stages 3 are rigidly connected to the rigid support columns 103 of the three sets of flexible adjustment components 1. Their core function is to provide linear displacement input along the z-axis. This displacement is converted into the three-dimensional target motion of the base plate 2 after being coupled and decomposed by the elastic deformation of the three sets of flexible adjustment components 1. The specific coupling logic is as follows:

[0075] Realization of translational motion along the z-axis: When the three sets of wedge-shaped displacement stages 3 output displacements of the same magnitude and direction along the z-axis, the three displacements are transmitted to the base plate 2 through the elastic deformation of the flexible adjustment components 1. Since the three sets of flexible adjustment components 1 are evenly distributed at 60°, the displacement force is symmetrically applied to the three corners of the base plate 2, and the horizontal degree of freedom is constrained, the base plate 2 will only perform pure translational motion along the z-axis without any rotational interference.

[0076] The implementation of rotational motion around the x-axis: When only the wedge-shaped displacement stage 3 on one side of the x-axis is controlled to output displacement along the z-axis, while the other two sets of wedge-shaped displacement stages 3 remain stationary, this displacement will drive the flexible adjustment component 1 on the corresponding side to undergo elastic deformation. This releases the rotational degrees of freedom of the two sets of flexible rotation components 101, causing the base plate 2 to rotate around the x-axis. Due to the coordinated configuration of the degrees of freedom of the three sets of flexible adjustment components 1, no parasitic motion such as rotation around the y-axis or translation along the z-axis will occur during this rotation. Testing shows that the parasitic displacement is only 0.25% of the adjustment stroke (e.g., ...). Figure 9 (As shown).

[0077] The rotation motion around the y-axis is achieved in the same way as the rotation around the x-axis. Only the wedge displacement stage 3 on the corresponding y-axis side is controlled to output displacement along the z-axis, while the other two groups remain stationary. Through the elastic deformation coupling of the flexible adjustment component 1, the base plate 2 is driven to rotate around the y-axis. The rotation angle range can reach ±10mrad (as shown in Figure 9), and there is no parasitic motion.

[0078] High-precision adjustment is guaranteed because all target movements of the base plate 2 are achieved through the elastic deformation of the commercial flexible bearing 101-3 and the blade hinge structure 102-2 in the flexible adjustment component 1. There is no mechanical sliding or friction, and no gaps or wear issues. The linearity and repeatability of the movement depend solely on the output accuracy of the wedge displacement stage 3. The flexible component 1 itself does not introduce additional errors, and in conjunction with the high-precision wedge displacement stage 3, ultra-high precision minimum step size adjustment (such as...) can be achieved. Figure 10 (As shown).

[0079] The present invention discloses a high-precision three-dimensional adjustment system based on a flexible adjustment component. The flexible adjustment component replaces the traditional "ball-V groove" structure and achieves degree of freedom adjustment through material elastic deformation. It is frictionless and gapless, avoiding the wear problem of the "ball-V groove" fit, improving adjustment accuracy and long-term stability, and can meet the long-term use requirements of clean and vacuum environments.

[0080] The present invention discloses a high-precision three-dimensional adjustment system based on flexible adjustment components. The system adopts a structure in which three sets of flexible adjustment components cooperate with a wedge-shaped displacement stage. The rigid connection design enables the system to have the advantages of high rigidity and large load, and solves the problems of small effective load and poor stability of single-degree-of-freedom displacement stage stacking.

[0081] The present invention discloses a high-precision three-dimensional adjustment system based on flexible adjustment components. All system components are made of vacuum-compatible materials, and the wedge-shaped displacement stage can be placed in an atmospheric environment. Linear motion is fed into a vacuum clean cavity through a vacuum bellows, which is suitable for ultra-high vacuum environments and makes up for the shortcomings of the Hexpod six-degree-of-freedom displacement stage.

[0082] The present invention discloses a high-precision three-dimensional adjustment system based on a flexible adjustment component. The flexible adjustment component 1 adopts a modular design, has a simple structure, high reliability, is easy to maintain, and has high motion linearity and determinism. The minimum adjustment step size depends on the motion characteristics of the wedge displacement stage, which can achieve ultra-high precision adjustment.

[0083] The present invention provides a high-precision three-dimensional adjustment method based on a flexible adjustment component. During the adjustment process, there is no parasitic motion. The angular travel of rotation around the y-axis (Roll) can reach ±10mrad, and the parasitic displacement of rotation around the x-axis (Yaw) is only 0.25% of the Roll travel. The adjustment accuracy and stability are significantly better than existing products.

[0084] The above is an exemplary description of the invention. Obviously, the specific implementation of the invention is not limited to the above-described manner. Any non-substantial improvement made using the inventive concept and technical solution of the invention, or the direct application of the inventive concept and technical solution to other situations without modification, is within the protection scope of the invention.

Claims

1. A high-precision three-dimensional adjustment system based on a flexible adjustment component, characterized in that, include: Flexible adjustment component (1), base plate (2) and wedge displacement stage (3); The flexible adjustment component (1) is provided in three sets and is rigidly connected to the base plate (2). The three sets of flexible adjustment components (1) are distributed at a 60° angle at the three corners of the base plate (2). The wedge displacement stage (3) is provided in three sets and is rigidly connected to the three sets of flexible adjustment components (1) respectively. The three sets of wedge displacement stages (3) are used to provide linear displacement input along the z-axis. Each set of flexible adjustment components (1) includes two sets of flexible rotation components (101), one set of flexible displacement compensation components (102) and one rigid support column (103). The two sets of flexible rotation components (101) are arranged at a 90° angle. The two sets of flexible rotation components (101) are rigidly connected to the flexible displacement compensation components (102) and then assembled on the rigid support column (103). By coupling the displacement input of three sets of wedge displacement stages (3) with the elastic deformation of three sets of flexible adjustment components (1), the base plate (2) can be translated along the z-axis, rotated around the x-axis and rotated around the y-axis.

2. The high-precision three-dimensional adjustment system based on a flexible adjustment component according to claim 1, characterized in that, The flexible rotation assembly (101) includes an upper bearing housing (101-1), a lower bearing housing (101-2), and two commercial flexible bearings (101-3). The two commercial flexible bearings (101-3) are coaxially arranged and are both embedded in the holes of the upper bearing housing (101-1) and the lower bearing housing (101-2) and locked by set screws. Both commercial flexible bearings (101-3) are three-section structures, and the three sections are connected by springs. A gap is reserved between the upper bearing housing (101-1) and the lower bearing housing (101-2) to limit the rotation angle.

3. The high-precision three-dimensional adjustment system based on a flexible adjustment component according to claim 1, characterized in that, The flexible displacement compensation component (102) is an integral structure and is manufactured by slow wire EDM. The flexible displacement compensation component (102) includes an upper connecting part (102-1), a blade hinge structure (102-2) and a lower connecting part (102-3). The blade hinge structure (102-2) consists of multiple parallel blades arranged side by side. The upper connecting part (102-1) is elastically connected to the lower connecting part (102-3) through the blade hinge structure (102-2). Three sets of flexible adjustment components (1) are assembled at a 60° angle to the blade hinge structure (102-2) at the three corners of the base plate (2).

4. The high-precision three-dimensional adjustment system based on a flexible adjustment component according to claim 1, characterized in that, Of the two sets of flexible rotating components (101) of the flexible adjustment component (1), the rotation axis of one set of flexible rotating components (101) is along the x-axis direction, and the rotation axis of the other set of flexible rotating components (101) is along the y-axis direction; the translation direction of the flexible displacement compensation component (102) is along the x-axis direction, and the rotation axis is along the z-axis direction.

5. The high-precision three-dimensional adjustment system based on a flexible adjustment component according to claim 1, characterized in that, The base plate (2), the various components of the flexible adjustment assembly (1) and the base of the wedge displacement stage (3) are all made of vacuum-compatible materials, including titanium alloy, aluminum alloy and stainless steel.

6. A high-precision three-dimensional debugging method based on a flexible adjustment component, characterized in that, The high-precision three-dimensional adjustment system based on a flexible adjustment component, as described in any one of claims 1-5, specifically includes the following steps: S1. Assemble the three sets of flexible adjustment components (1) at a 60° angle to the three corners of the base plate (2) according to the blade hinge structure (102-2), ensuring that each set of flexible adjustment components (1) is rigidly connected to the base plate (2); S2. The three sets of wedge displacement stages (3) are rigidly connected to the rigid support columns (103) of the three sets of flexible adjustment components (1) respectively, and the bases of the three sets of wedge displacement stages (3) are fixed. S3. Control the three sets of wedge displacement stages (3) to output linear displacement along the z-axis respectively. Through the elastic deformation of the three sets of flexible adjustment components (1), kinematic coupling and decomposition are performed to drive the base plate (2) to realize translation along the z-axis, rotation around the x-axis or rotation around the y-axis.

7. A high-precision three-dimensional debugging method based on a flexible adjustment component according to claim 6, characterized in that, In step S1, the horizontal constraint lines of the three sets of flexible adjustment components (1) intersect in the same plane, and the constraint lines are the degree-of-freedom constraint direction lines of the flexible displacement compensation component (102).

8. A high-precision three-dimensional debugging method based on a flexible adjustment component according to claim 6, characterized in that, In step S3, when the single-set wedge displacement stage (3) outputs displacement, the base plate (2) rotates around the corresponding axis without generating parasitic motion of other degrees of freedom.

9. A high-precision three-dimensional debugging method based on a flexible adjustment component according to claim 6, characterized in that, In step S3, the displacement output accuracy of the wedge displacement stage (3) determines the adjustment accuracy of the base plate (2), and the rotation angle range of the base plate (2) is ±10mrad.

10. A high-precision three-dimensional debugging method based on a flexible adjustment component according to claim 6, characterized in that, The method is applicable to vacuum or clean environments. During the adjustment process, all degrees of freedom of the flexible adjustment component (1) are achieved through the elastic deformation of the material, without mechanical sliding or friction.

Images