Residual glue treatment method and device

Abstract

The invention provides a residual glue processing method and device.The method comprises the steps that a to-be-cleaned component is provided, the surface of the component comprises a functional area, and residual glue exists on the periphery of the functional area; the carbonization step comprises the steps that the part is rotated at a first rotating speed, a carbonization agent is added into the functional area, and the carbonization agent flows to the residual glue under the action of centrifugal force and acts on the residual glue to carbonize the residual glue; the step of removing the carbonizing agent comprises the steps that adding of the carbonizing agent is stopped, the part is rotated at a second rotating speed, so that the residual carbonizing agent flows to the edge of the part under the action of centrifugal force, and the second rotating speed is larger than the first rotating speed; and the step of removing the carbonized residual adhesive comprises the step of removing the carbonized residual adhesive by adopting a physical method. According to the cleaning device, residual stubborn adhesives can be efficiently and thoroughly removed, and meanwhile it is guaranteed that the to-be-cleaned part is not damaged.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing, and more particularly to a method and apparatus for treating residual adhesive. Background Technology

[0002] In semiconductor manufacturing, the protective film of the photomask is a critical component ensuring the accuracy of pattern transfer. The protective film used on the photomask is fixed to the frame with a special adhesive. This adhesive has a highly cross-linked chemical structure designed to withstand extreme working environments, making it exceptionally stubborn. When replacing the protective film or maintaining the photomask, residual adhesive must be thoroughly removed, and any damage during the removal process can render the expensive photomask unusable. Similar issues exist in photomask cleaning in flat panel display manufacturing, adhesive removal from precision optical components, and the removal of organic contaminants in MEMS manufacturing.

[0003] Currently, the most commonly used methods for removing residual adhesives in the industry include: organic solvent removal, which uses solvents such as IPA and treats the residue for 2-3 hours at room temperature or under heating conditions, relying on the penetration and swelling effect of the solvent to soften the residual adhesive; strong oxidizing acid mixture treatment, which uses Piranha solution (a mixture of concentrated sulfuric acid and hydrogen peroxide) and treats the residue for 1-2 hours at room temperature to 80°C, relying on strong oxidizing properties to decompose the residual adhesive; and physical treatment, which uses tools such as adhesive sticks or balls and treats the residue for 3-5 hours at room temperature or under heating conditions, relying on adhesiveness to remove the residual adhesive.

[0004] However, organic solvent removal methods suffer from several drawbacks. Firstly, the large molecular weight and poor permeability of the solvents result in insufficient dissolving power, leading to long processing times and low production efficiency. Secondly, solvent penetration into the parts being cleaned can damage their functional layers, such as causing swelling and damage to the photomask's pattern interface. Thirdly, organic solvents can increase the risk of haze (fogging defects) during subsequent use of the photomask. Fourthly, strong oxidizing acid mixtures, due to their excessive oxidizing power and lack of selectivity, can simultaneously corrode residual adhesive and the functional layers of the parts being cleaned, causing damage such as changes in the linewidth of the photomask pattern or even photomask failure. These methods also require processing times of several hours, resulting in low production efficiency. Fifthly, physical treatment methods, due to insufficient adhesion of tools like adhesive sticks or balls, are prone to scratches or incomplete cleaning, potentially damaging the functional layers of the parts being cleaned (e.g., damaging the photomask pattern and causing photomask failure) and affecting the overall effectiveness of the cleaning process.

[0005] Therefore, how to efficiently and thoroughly remove stubborn adhesive residues while ensuring that the parts to be cleaned are not damaged has become one of the key research focuses. Summary of the Invention

[0006] The technical problem to be solved by the present invention is to provide a method and apparatus for removing residual adhesive, which can efficiently and thoroughly remove stubborn residual adhesive while ensuring that the parts to be cleaned are not damaged.

[0007] To address the aforementioned problems, the present invention provides a method for treating residual adhesive, comprising: providing a component to be cleaned, the surface of the component including a functional area, and residual adhesive surrounding the functional area; a carbonization step, comprising: rotating the component at a first rotational speed and adding a carbonizing agent to the functional area, the carbonizing agent flowing towards the residual adhesive under centrifugal force and acting on the residual adhesive to carbonize it; a carbonizing agent removal step, comprising: stopping the addition of carbonizing agent and rotating the component at a second rotational speed, so that the remaining carbonizing agent flows towards the edge of the component under centrifugal force, the second rotational speed being greater than the first rotational speed; and a carbonized residual adhesive removal step, comprising: removing the carbonized residual adhesive using a physical method.

[0008] In one embodiment, the carbonizing agent is one of concentrated sulfuric acid, concentrated nitric acid, and concentrated phosphoric acid.

[0009] In one embodiment, the carbonizing agent is a mixture of concentrated sulfuric acid and a catalyst.

[0010] In one embodiment, the concentration of the concentrated sulfuric acid is 95% to 98%.

[0011] In one embodiment, the carbonization step further includes: heating the carbonizing agent to 110-120 degrees Celsius, adding it to the functional area, and subjecting the carbonizing agent to the component for a set time, the set time being less than 10 minutes.

[0012] In one embodiment, the set time is 1 to 2 minutes.

[0013] In one embodiment, the carbonization step further includes spraying the carbonizing agent onto the functional area once or repeatedly along a set path at a set flow rate.

[0014] In one embodiment, the carbonizing agent is sprayed onto the functional area at a preset constant flow rate from a fixed position above the functional area.

[0015] In one embodiment, the carbonization step further includes: observing the color of the residual adhesive and determining whether carbonization is complete based on the color of the residual adhesive.

[0016] In one embodiment, the physical method includes one or more of the following: scraping off carbonized residue with a cotton swab, scraping off carbonized residue with nitrogen purging combined with a soft scraper, cleaning carbonized residue with an aqueous surfactant solution and ultrasonic cleaning, and removing carbonized residue with supercritical CO2 fluid.

[0017] In one embodiment, the step of removing the carbonized residue further includes cleaning the component with a cleaning solution.

[0018] In one embodiment, the carbonization step, the carbonizing agent removal step, and the carbonization residue removal step are performed sequentially in the same chamber.

[0019] To address the aforementioned problems, the present invention also provides an apparatus for performing the aforementioned residual adhesive treatment method, comprising: an acid-resistant corrosion-resistant chamber; a turntable placed within the chamber for carrying the component to be cleaned and capable of rotating the component at a first rotational speed or a second rotational speed; a spray arm for adding a carbonizing agent to the functional area of ​​the component; and a physical removal component for removing the carbonized residual adhesive.

[0020] In one embodiment, it further includes a temperature-regulating member for heating and cooling the component to a set temperature.

[0021] The present invention's method for treating adhesive residue first involves a carbonization step, which deconstructs and reorganizes the chemical structure of stubborn adhesive residue on the surface of the part to be cleaned under the action of a carbonizing agent. Its organic components are decomposed, and its morphology changes from dense and viscous to a loose and porous amorphous carbon structure. This transformation significantly reduces the van der Waals forces and mechanical interlocking between the adhesive residue and the part surface, thereby greatly weakening the adhesion strength of the adhesive residue. Subsequently, a physical removal method is used to gently peel the carbonized adhesive residue from the part surface, achieving efficient and thorough removal of the adhesive residue while avoiding damage to functional areas.

[0022] Meanwhile, the residual adhesive treatment method of the present invention, by applying a carbonizing agent to the functional area and relying on centrifugal force to orient it to cover the residual adhesive area, not only effectively avoids the residual adhesive being pushed into the functional area under the direct impact of the carbonizing agent, causing secondary pollution, but also the carbonizing agent can form a temporary inert protective film on the surface of the functional area, isolating chemical erosion and mechanical stress during the carbonization process, ensuring that the graphic integrity and performance of the functional area are not damaged, and further ensuring the safety and reliability of the component.

[0023] Furthermore, after the residual adhesive is carbonized, this invention increases the component rotation speed from a first speed to a higher second speed. This significantly enhanced centrifugal force field causes the carbonizing agent distributed on the functional area and the surface of the residual adhesive to rapidly migrate towards the component edge and detach, thus effectively removing it. This step precisely controls the magnitude of the centrifugal force by varying the rotation speed, driving the liquid to move in a specific direction. This ensures that the carbonizing agent, along with any trace amounts of dissolved substances that may be generated during the reaction, is efficiently discharged from the functional area, fundamentally avoiding potential contamination of the functional area by residual carbonizing agent or secondary flow. The increased rotation speed not only optimizes the removal efficiency of the carbonizing agent but also further ensures that subsequent physical cleaning steps are performed at a cleaner interface, enhancing the reliability of the entire process and the final cleanliness.

[0024] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit the invention. Techniques, methods, and apparatus known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and apparatus should be considered part of the specification. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the steps of a residual adhesive treatment method provided in an embodiment of the present invention; Figure 2 This is a top view of the component to be cleaned in the residual adhesive treatment method provided in this embodiment of the invention; Figure 3 This is a schematic diagram illustrating the carbonization step in the residual adhesive treatment method provided in this embodiment of the invention. Detailed Implementation

[0027] The technical solutions in the embodiments of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0028] Figure 1 This is a schematic diagram illustrating the steps of a residual adhesive treatment method according to an embodiment of the present invention. Please refer to [link / reference]. Figure 1 The method for treating residual adhesive includes: Step S10: Provide a component to be cleaned, the surface of the component includes a functional area, and the periphery of the functional area has residual adhesive.

[0029] Step S11, carbonization step, includes: rotating the component at a first rotation speed, adding a carbonizing agent to the functional area, the carbonizing agent flowing to the residual adhesive under centrifugal force, and acting on the residual adhesive to carbonize the residual adhesive.

[0030] Step S12, the carbonizing agent removal step, includes: stopping the addition of carbonizing agent and rotating the component at a second rotation speed so that the residual carbonizing agent flows to the edge of the component under the action of centrifugal force, wherein the second rotation speed is greater than the first rotation speed.

[0031] Step S13, the step of removing carbonized residue, includes: removing carbonized residue using physical methods.

[0032] This invention's residual adhesive treatment method employs a two-step process: first, carbonization and conversion, followed by gentle removal. By combining the component's rotation speed with the spraying location of the carbonizing agent, it can efficiently and thoroughly remove stubborn residual adhesives while ensuring the component remains undamaged. The following is a detailed description of each step.

[0033] Please see Figure 1 , Figure 2 And step S10, wherein, Figure 2 This is a top view of the component 200 to be cleaned in the residual adhesive treatment method provided in the embodiment of the present invention. A component 200 to be cleaned is provided, the surface of the component 200 includes a functional area 210, and the periphery of the functional area 210 has residual adhesive 220.

[0034] The component to be cleaned 200 is the component from which residual adhesive 220 needs to be removed, such as photomasks, precision optical components, and various devices involved in MEMS manufacturing processes, such as semiconductor manufacturing and flat panel display processes.

[0035] The functional area 210 on the surface of the component 200 typically contains precise photolithographic patterns and micro / nano-scale functional films (such as optical coatings, circuit patterns, or sensitive sensor structures). These structures are usually extremely delicate and fragile, and are highly sensitive to chemical corrosion, physical scratches, and thermal stress. It is essential to ensure that they maintain complete pattern fidelity, film uniformity, and interface characteristics throughout the entire process of removing residual adhesive 220. Any minor damage may lead to functional failure of component 200, reduced yield, or even complete scrapping. Therefore, targeted protection must be implemented throughout the entire processing flow.

[0036] The residual adhesive 220 is a stubborn adhesive residue located on the periphery of the functional area 210, such as in the adhesive area of ​​the protective film frame of the photomask, the edge of the component 200, or a non-functional blank area. Its highly cross-linked chemical properties directly affect the flatness and sealing of the new protective film, and may release particles, generate stress, or induce corrosion during subsequent manufacturing or use due to aging, thus posing a potential risk to the integrity of the functional area 210. Therefore, it must be completely removed without affecting the functional area 210. In some embodiments, the residual adhesive 220 is located on the periphery of the functional area 210 and has a distance between it and the edge of the functional area 210. In another embodiment, the residual adhesive 220 is located at the edge of the functional area 210.

[0037] Please see Figure 1 , Figure 3 And step S11, wherein, Figure 3This is a schematic diagram of the carbonization step in the residual adhesive treatment method provided in the embodiment of the present invention. The carbonization step includes: rotating the component 200 at a first rotation speed V1, adding a carbonizing agent to the functional area 210, and the carbonizing agent flowing to the residual adhesive 220 under the action of centrifugal force and acting on the residual adhesive 220 to carbonize the residual adhesive 220.

[0038] In this step, by applying a carbonizing agent to the functional area 210 and controlling the component 200 to rotate at a first speed V1, centrifugal force is used to achieve the directional flow of the carbonizing agent from the functional area 210 to the peripheral residual adhesive 220 area. Through precise speed control, the carbonizing agent forms a temporary protective liquid film on the surface of the functional area 210. Subsequently, driven by a moderate centrifugal force, the carbonizing agent spreads smoothly in a controlled laminar flow and covers the residual adhesive 220 area, thereby effectively avoiding the risk of residual adhesive 220 particles being impacted and pushed into the functional area 210 due to direct dripping or turbulence.

[0039] Upon contact with the residual adhesive 220, the carbonizing agent triggers the chemical deconstruction and recombination of the organic components of the residual adhesive 220. Under appropriate chemical action, the highly cross-linked polymer chains in the residual adhesive 220 undergo bond breaking and aromatization reactions, transforming its physical form from a dense, viscous solid to a loose, porous, amorphous carbon structure. This transformation significantly reduces the van der Waals forces and mechanical interlocking between the residual adhesive 220 and the surface of the component 200, greatly weakening its adhesion and creating favorable conditions for subsequent physical removal. The liquid film formed by the carbonizing agent in the functional region 210 also provides a certain degree of isolation and protection, further ensuring that the precision patterns or functional films of the functional region 210 are not damaged during the carbonization process.

[0040] This step, through a clever combination of chemical transformation and physical transport, achieves the pretreatment of residual adhesive 220, laying the foundation for efficient and thorough removal in the future, while ensuring the integrity of functional area 210.

[0041] In some embodiments, the carbonizing agent is a strong acid reagent, which, due to its unique chemical properties, can effectively induce chemical transformation of the residual gum 220. In this embodiment, the carbonizing agent is concentrated sulfuric acid, which, through its strong dehydrating properties, causes the residual gum 220 to lose moisture and recombine into a loose, porous amorphous carbon structure.

[0042] In some embodiments, the carbonizing agent is a mixture of concentrated sulfuric acid and a catalyst. The catalyst accelerates the carbonization process, thereby significantly shortening the residence and action time of the carbonizing agent on the surface of functional region 210 while ensuring sufficient carbonization. This ensures that the residual adhesive 220 is efficiently converted into easily removable loose carbonaceous material, while minimizing the potential chemical erosion and physical damage to the precision patterns or functional films of functional region 210 by strong acid, achieving a balance between cleaning efficiency and component 200 safety. In one embodiment, the catalyst may be hydrogen peroxide.

[0043] In some embodiments, the concentration of the concentrated sulfuric acid is 95% to 98%. Concentrated sulfuric acid in this concentration range has extremely strong dehydrating properties to ensure sufficient dehydration and carbonization capabilities. It can effectively capture hydrogen and oxygen atoms from the organic matter in residual adhesive 220 at a hydrogen-oxygen atom ratio of 2:1 to water molecules, causing it to lose moisture and carbonize, transforming it into a loose and porous amorphous carbon structure, thereby significantly reducing its adhesion.

[0044] In some embodiments, the carbonization step further includes: heating the carbonizing agent to 110-120 degrees Celsius, adding it to the functional area 210, and subjecting the carbonizing agent to the component 200 for a set time, the set time being less than 10 minutes. In the carbonization step, by heating the carbonizing agent to 110-120 degrees Celsius and precisely controlling and maintaining a set time of less than 10 minutes, active regulation of the reaction rate is achieved. This time parameter is a safety window set based on the tolerance threshold of approximately 10 minutes of strong acid treatment in normal photomask manufacturing without affecting the photomask. By strictly limiting the actual operating time within this threshold, it is possible to ensure that the carbonization reaction proceeds fully while effectively avoiding damage to the functional area 210 due to excessively long reaction time or excessively high temperature, thereby achieving a precise balance between thoroughly carbonizing the residual adhesive 220 and ensuring the integrity of the photomask's functional area 210. In some embodiments, the carbonizing agent is first heated to a set temperature, such as 110-120 degrees Celsius, and then the heated carbonizing agent is added to the functional area of ​​the component through the nozzle of the spray arm.

[0045] In some embodiments, the set time is 1 to 2 minutes. This shorter time window can greatly limit the cumulative effect of strong acid and high temperature environment on the sensitive pattern or film layer of functional area 210, thereby minimizing the risk of possible chemical erosion and thermal impact while ensuring that the residual adhesive 220 is fully carbonized, and more effectively protecting functional area 210 from damage.

[0046] In some embodiments, the carbonizing agent may also be selected from concentrated nitric acid or concentrated phosphoric acid. Concentrated nitric acid mainly exhibits strong oxidizing properties under heating conditions, and can undergo redox reactions with residual gum 220 and promote the breaking of chemical bonds in residual gum 220, thereby achieving carbonization; concentrated phosphoric acid has significantly enhanced corrosiveness and dehydrating properties after heating, and can promote the dehydration and carbonization of organic matter.

[0047] In some embodiments, by synergistically regulating key parameters such as the concentration of the carbonizing agent, the reaction time, and the temperature of the component 200, the carbonization reaction rate can be precisely controlled so that the residual adhesive 220 is fully carbonized. This ensures the removal effect while effectively avoiding potential erosion or damage to the precision pattern and functional film layer of the functional area 210 by strong acid due to excessive reaction or excessive time, ultimately achieving a balance between removal and protection.

[0048] In some embodiments, the carbonization step further includes: spraying the carbonizing agent onto the functional area 210 at a fixed position above the functional area 210 at a preset constant flow rate, to ensure that the carbonizing agent uniformly covers the functional area 210 in a stable and controllable manner, thereby forming a continuous and uniformly thick protective liquid film, providing an ideal basis for the subsequent directional and stable spreading of the carbonizing agent to the residual adhesive 220 area under centrifugal force. This precise spray control effectively avoids poor local coverage or droplet splashing caused by flow fluctuations or uneven landing points, not only optimizing the utilization rate of the carbonizing agent, but also minimizing the potential impact and uneven chemical contact risk to the precise functional area 210, ensuring the repeatability of the carbonization process and the consistency of the processing results.

[0049] In some embodiments, the carbonization step further includes spraying the carbonizing agent onto the functional area 210 at a set flow rate, either once or repeatedly, along a set path. This method of spraying the carbonizing agent, by programmatically controlling the coverage path, flow rate, and number of sprays, can quickly form a uniform, continuous, and controllable thickness protective liquid film on the surface of the functional area 210. This not only ensures that the carbonizing agent can stably and consistently spread to the peripheral residual adhesive area 220 under centrifugal force, but also avoids uneven liquid film, local accumulation, or splashing that may be caused by manual addition or direct pouring. Thus, it reduces the risk of uneven carbonizing agent distribution causing differential chemical or physical effects on the functional area 210 at the source, and improves the reliability and repeatability of the process.

[0050] In some embodiments, the carbonization step further includes: observing the color of the residual adhesive 220 and determining whether carbonization is complete based on the color of the residual adhesive 220. This step involves observing the color change of the residual adhesive 220 in real time and using it as a key visual basis for determining whether the carbonization process is complete. Under the action of the carbonizing agent, the residual adhesive 220 undergoes chemical decomposition and recombination due to the organic components, gradually changing from an initial transparent or light-colored state to dark brown or even black. This color change visually indicates that the residual adhesive 220 has transformed from a dense polymer form into a loose and porous amorphous carbon structure, and its adhesion has been significantly reduced. Operators can use this color signal to terminate the carbonization reaction in a timely manner, thereby ensuring that the residual adhesive 220 is fully converted while avoiding unnecessary chemical or thermal effects on the functional area 210 due to excessive reaction time, achieving a balance between process control and component 200 safety.

[0051] As an example, the carbonization step specifically includes: placing the component 200 to be cleaned on the turntable 300 to ensure that the area of ​​residual adhesive 220 is fully exposed; rotating the turntable 300 at a first rotation speed V1, thereby driving the component 200 to rotate at the first rotation speed V1; spraying carbonizing agent onto the functional area 210 along a set path or at a fixed position using a spraying arm 310 while rotating or after rotating, the carbonizing agent flows directionally to the residual adhesive 220 under the action of centrifugal force, and carbonizes the residual adhesive 220; stopping the carbonization step after a set time, or after the color of the residual adhesive 220 reaches the expected color.

[0052] Please see Figure 1 And step S12, the carbonizing agent removal step, includes: stopping the addition of carbonizing agent, and rotating the component 200 at a second rotation speed V2 so that the residual carbonizing agent flows to the edge of the component 200 under the action of centrifugal force, wherein the second rotation speed V2 is greater than the first rotation speed V1.

[0053] Specifically, the carbonizing agent removal step is initiated upon confirmation of carbonization completion via a color change (e.g., residue 220 changing from transparent or light-colored to dark brown or black) or by reaching a set time. The operation includes: first, stopping any further addition of carbonizing agent to interrupt the reaction input; then, increasing the rotational speed of component 200 from a first rotational speed V1 to a higher second rotational speed V2. During this acceleration, the significantly enhanced centrifugal force exerts a stronger radial driving force on the residual carbonizing agent distributed on the functional area 210 and the surface of the carbonized residue 220, causing it to rapidly and directionally migrate towards the outer edge of component 200 and ultimately be ejected from the surface of component 200.

[0054] This step achieves simultaneous reaction termination and byproduct removal through precise rotation speed control. Higher rotation speeds ensure efficient stripping of the carbonizing agent and any trace amounts of reaction products it may contain, thus eliminating the possibility of these residues stagnating or seeping back into functional area 210. This avoids secondary contamination, uneven corrosion, or interference with subsequent physical cleaning steps caused by chemical residues. This not only protects the cleanliness and integrity of functional area 210 but also improves the reliability and repeatability of the entire cleaning process.

[0055] Please see Figure 1 And step S13, the step of removing carbonized residual adhesive 220, includes: removing carbonized residual adhesive 220 by physical methods.

[0056] After the carbonization step, the chemical structure of the residual adhesive 220 has changed from a dense polymer to a loose, porous, and significantly less adhesive amorphous carbon form. Therefore, a gentle physical method can be used to effectively peel off and remove the carbonized and structurally fragile residual adhesive 220 from the surface of the component 200, thereby completing the final and thorough cleaning of the residual adhesive 220 and avoiding chemical corrosion and mechanical scratches.

[0057] In some embodiments, the physical method includes one or more of the following: scraping off the carbonized residual adhesive 220 with a cotton swab, scraping off the carbonized residual adhesive 220 with nitrogen purging combined with a soft scraper, cleaning the carbonized residual adhesive 220 with an aqueous surfactant solution and ultrasonic cleaning, and removing the carbonized residual adhesive 220 with supercritical CO2 fluid.

[0058] As an example, scraping off the carbonized residue 220 with a cotton swab utilizes the adhesiveness of the carbonized residue 220 itself. Since the adhesiveness of the carbonized residue 220 on the surface of the component 200 is much less than its own toughness, it can ensure that the entire strip of adhesive is peeled off extremely quickly, completely removing the residue 220.

[0059] In some embodiments, the carbonization step, the carbonizing agent removal step, and the removal of residual adhesive 220 after carbonization can all be performed sequentially in the same chamber. This effectively avoids the component 200 being exposed to the external environment during transfer between different chambers, thereby significantly reducing the risk of contamination or damage to the precision functional area 210 caused by external factors such as airborne particles and fluctuations in ambient temperature and humidity. Simultaneously, integrated processing reduces the mechanical collisions or static electricity buildup that may result from frequent handling of the component 200. This not only improves the continuity and efficiency of the process but also helps maintain the consistency and cleanliness of the interface reaction, ultimately ensuring the safety and reliability of the component 200.

[0060] In some embodiments, after the step of removing the carbonized residue 220, the method further includes cleaning the component 200 with a cleaning solution to thoroughly remove the residue 220 and any remaining carbonizing agent. The cleaning solution may be deionized water (DIW), while ensuring the conductivity of the cleaning solution to prevent electrostatic damage to the functional area 210.

[0061] This invention's residual adhesive treatment method solves the problems of low efficiency and long processing time in traditional methods for removing highly cross-linked Pellicle residual adhesive 220, reducing the processing time from hours to minutes; it eliminates the risk of corrosion of the functional film on the surface of component 200 by direct treatment with strong oxidizing acids, removing only residual adhesive 220 without damaging the functional area 210; it overcomes the problem of local residue at the junction of the Pellicle frame and the area, achieving uniform cleaning of the entire surface of component 200 (including edge areas); and it provides a standardized solution with a wide process window and good pattern repeatability, which is safe and environmentally friendly.

[0062] Based on the same inventive concept, the present invention also provides an apparatus for performing the aforementioned residual adhesive treatment method, which can be found in [reference needed]. Figure 3 The device includes: an acid-resistant corrosion-resistant chamber (not shown in the figures); a turntable 300, placed in the chamber, for carrying the component 200 to be cleaned and capable of rotating the component 200 at a first rotational speed V1 or a second rotational speed V2; a spray arm 310 for adding carbonizing agent to the functional area 210 of the component 200; and a physical cleaning component (not shown in the figures) for removing carbonized residue 220.

[0063] The acid-resistant chamber constitutes the core sealed environment of the processing, and it has acid-resistant properties.

[0064] The turntable 300 is placed in this chamber to support the part 200 to be cleaned and can be precisely switched between a first speed V1 (for spreading the carbonizing agent) and a higher second speed V2 (for removing the carbonizing agent) according to process requirements.

[0065] The spraying arm 310 is positioned above the functional area 210 and can precisely spray carbonizing agent onto the functional area 210 of the component 200 according to a set path and flow rate.

[0066] The physical removal components are used to gently and mechanically remove residual adhesive 220 from the surface of component 200 after carbonization. These physical removal components include, but are not limited to, cotton swabs, nitrogen purging devices and soft scrapers, surfactant aqueous solution spraying devices and ultrasonic devices, and supercritical CO2 fluid spraying devices. The surfactant aqueous solution spraying device and the supercritical CO2 fluid spraying device can be reused from the spraying arm 310.

[0067] Furthermore, in one embodiment, the device further includes a temperature-regulating component (not shown in the figures) for varying the temperature of the component 200 to a set temperature (e.g., -20 to 80 degrees Celsius). The temperature-regulating component may be disposed inside the turntable 300 or on the side wall of the chamber.

[0068] The device provided by this invention coordinates the actions of each component through an integrated control unit, ensuring that the residual adhesive removal process is efficient and controllable, and protecting functional areas from damage to the greatest extent.

[0069] It should be noted that references to "an embodiment," "an embodiment," "an exemplary embodiment," "some embodiments," etc., in the specification indicate that the described embodiments may include specific features, structures, or characteristics, but each embodiment may not necessarily include that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure, or characteristic is described in connection with an embodiment, whether explicitly described or not, implementing such a feature, structure, or characteristic in conjunction with other embodiments is within the knowledge of those skilled in the art.

[0070] It should be noted that the terms "comprising" and "having," and their variations, used in this invention document are intended to cover non-exclusive inclusion. The terms "first," "second," etc., are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence, unless explicitly indicated by the context. It should be understood that such data used interchangeably where appropriate. Furthermore, embodiments and features within embodiments of this invention can be combined with each other unless otherwise specified. In addition, descriptions of well-known components and technologies have been omitted in the above description to avoid unnecessarily obscuring the concepts of this invention. In the various embodiments described above, each embodiment focuses on its differences from other embodiments; similar or identical parts between embodiments can be referred to interchangeably.

[0071] The above description is only a preferred embodiment of the present invention. It should be noted that those skilled in the art can make several improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A method for treating residual adhesive, characterized in that, include: A component to be cleaned is provided, the surface of the component includes a functional area, and the periphery of the functional area has residual adhesive. The carbonization step includes: rotating the component at a first rotation speed and adding a carbonizing agent to the functional area. The carbonizing agent flows to the residual adhesive under centrifugal force and acts on the residual adhesive to carbonize it. The step of removing the carbonizing agent includes: stopping the addition of the carbonizing agent and rotating the component at a second rotation speed so that the residual carbonizing agent flows to the edge of the component under the action of centrifugal force, wherein the second rotation speed is greater than the first rotation speed; The steps for removing carbonized residue include: using physical methods to remove carbonized residue.

2. The method for treating residual adhesive according to claim 1, characterized in that, The carbonizing agent is one of concentrated sulfuric acid, concentrated nitric acid, and concentrated phosphoric acid.

3. The method for treating residual adhesive according to claim 1, characterized in that, The carbonizing agent is a mixture of concentrated sulfuric acid and a catalyst.

4. The method for treating residual adhesive according to claim 2 or 3, characterized in that, The concentration of the concentrated sulfuric acid is 95% to 98%.

5. The method for treating residual adhesive according to claim 1, characterized in that, The carbonization step further includes: heating the carbonizing agent to 110-120 degrees Celsius, adding it to the functional area, and subjecting the carbonizing agent to the component for a set time, the set time being less than 10 minutes.

6. The method for treating residual adhesive according to claim 5, characterized in that, The set time is 1 to 2 minutes.

7. The method for treating residual adhesive according to claim 1, characterized in that, The carbonization step further includes spraying the carbonizing agent onto the functional area at a set flow rate, either once or repeatedly, along a set path.

8. The method for treating residual adhesive according to claim 1, characterized in that, The carbonizing agent is sprayed onto the functional area at a fixed position above the functional area at a preset constant flow rate.

9. The method for treating residual adhesive according to claim 1, characterized in that, The carbonization step further includes: observing the color of the residual adhesive and determining whether carbonization is complete based on the color of the residual adhesive.

10. The method for treating residual adhesive according to claim 1, characterized in that, The physical methods include one or more of the following: scraping off carbonized residue with a cotton swab, scraping off carbonized residue with nitrogen purging combined with a soft scraper, cleaning carbonized residue with an aqueous surfactant solution and ultrasonic cleaning, and removing carbonized residue with supercritical CO2 fluid.

11. The method for treating residual adhesive according to claim 1, characterized in that, The step of removing carbonized residue also includes cleaning the component with a cleaning solution.

12. The method for treating residual adhesive according to claim 1, characterized in that, The carbonization step, the carbonizing agent removal step, and the carbonization residue removal step are carried out sequentially in the same chamber.

13. An apparatus for performing the residual adhesive treatment method according to any one of claims 1 to 12, characterized in that, include: Acid-resistant corrosion-resistant chamber; A turntable, placed within the cavity, is used to support the component to be cleaned and is capable of rotating the component at a first speed or a second speed. A spray arm for applying a carbonizing agent to the functional area of ​​the component; Physical cleaning components are used to remove residual adhesive after carbonization.

14. The apparatus according to claim 13, characterized in that, Also includes: A temperature-regulating component is used to heat and cool the component to a set temperature.

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