Pneumatic control system for off-line cleaning and pressure maintaining test of excimer laser discharge cavity

Abstract

A pneumatic control system for off-line cleaning and pressure maintaining testing of a discharge cavity of an excimer laser relates to the technical field of lasers and comprises a process gas circuit module, an exhaust module, a fluorine gas filtering module and a vacuum pump module which are connected with the discharge cavity through a gas circuit assembly provided with a plurality of controllable valves, and further comprises a pressure sensor and a control module. The control module is configured to execute an offline cleaning process and a pressure maintaining test process; the off-line cleaning process comprises the step of controlling a controllable valve and a vacuum pump module according to the air pressure information, so that the discharge cavity is sequentially subjected to at least one cycle operation of process gas introduction and vacuumizing; the pressure maintaining test process comprises the steps that after the offline cleaning process is completed, a controllable valve and a vacuum pump module are controlled according to the air pressure information, process gas is introduced into the discharge cavity to reach preset pressure, then the controllable valve is closed, the discharge cavity is kept in a sealed state, and the air pressure change of the discharge cavity in the sealed state is monitored through a pressure sensor; and integration of off-line cleaning and pressure maintaining testing of the discharge cavity is realized.

Description

Technical Field

[0001] This application relates to the field of laser technology, and more specifically, to a gas control system for offline cleaning and pressure holding testing of the discharge cavity of an excimer laser. Background Technology

[0002] Excimer lasers are currently the mainstream light source in the field of integrated circuit lithography. Their discharge chambers are filled with a mixed working gas containing halogen components such as fluorine, and the operating pressure is typically several atmospheres. During high-voltage, high-frequency discharge, the electrodes are continuously bombarded and sputtered by electrons and ions, leading to electrode material ablation, surface detachment, and the formation of micron-sized particulate contaminants. These particles adsorb onto the surface of gas molecules, reducing the activity of the laser gain medium and shortening the gas lifetime. If they enter the resonant cavity with the gas flow, they can also adhere to the surfaces of optical components such as mirrors and output mirrors, increasing scattering loss and even scratching the optical coating. Therefore, the discharge chamber requires periodic opening and maintenance, including electrode replacement and internal cleaning.

[0003] Because highly corrosive fluorine gas remains inside the discharge cavity, the cavity must be thoroughly cleaned before opening to reduce the fluorine concentration below a safe threshold. After maintenance, a pressure test must be performed to verify that its airtightness meets operational requirements. Traditional cleaning and pressure testing procedures present the following technical problems: First, traditional discharge cavity cleaning often employs online plasma cleaning, which involves introducing reactive gas into the operating discharge cavity to generate plasma, thereby removing contaminants from the cavity. However, this method must be performed on the entire laser unit and cannot be implemented independently when the discharge cavity is disassembled and offline. Furthermore, plasma cleaning involves complex gas feeding and parameter control, resulting in high equipment costs and making it unsuitable for workshop or field maintenance scenarios. Second, in existing maintenance procedures, operators typically first manually flush the discharge cavity using a separate purging device before moving the cavity to a dedicated leak detection station for a pressure test. The process involves multiple disassembly, relocation, and pipeline switching, which is cumbersome, time-consuming, and prone to failure to detect leaks in time due to delayed testing, resulting in repeated disassembly and reassembly of the discharge chamber, increasing manpower burden and equipment downtime. Summary of the Invention

[0004] The purpose of this application is to provide a gas control system for offline cleaning and pressure holding testing of the discharge cavity of an excimer laser. Through integrated gas path design and automated control, the system realizes the integration of offline cleaning and pressure holding testing of the discharge cavity, which significantly improves maintenance efficiency and operational safety.

[0005] The embodiments of this application are implemented as follows: A first aspect of this application provides a gas control system for offline cleaning and pressure holding testing of an excimer laser discharge cavity, comprising a process gas path module, an exhaust module, a fluorine gas filtration module, a vacuum pump module, a pressure sensor, and a control module. The process gas path module, the exhaust module, the fluorine gas filtration module, and the vacuum pump module are connected to the discharge cavity of the excimer laser via a gas path assembly. The gas path assembly is equipped with multiple controllable valves. The process gas path module supplies process gas to the discharge cavity, the exhaust module discharges gas from the discharge cavity, the fluorine gas filtration module filters fluorine gas from the gas discharged through the exhaust module, the vacuum pump module evacuates the discharge cavity, and the pressure sensor acquires pressure data from the discharge cavity. The system monitors the internal air pressure information. The control module is electrically connected to the controllable valve, the vacuum pump module, and the pressure sensor. The control module is configured to execute an offline cleaning process and a pressure holding test process. The offline cleaning process includes controlling the controllable valve and the vacuum pump module based on the air pressure information to sequentially perform at least one cycle of introducing process gas and evacuating the discharge chamber. The pressure holding test process includes controlling the controllable valve and the vacuum pump module based on the air pressure information to introduce process gas into the discharge chamber to a preset pressure, then closing the controllable valve to maintain the discharge chamber in a sealed state. The pressure sensor monitors the air pressure change in the discharge chamber under sealed conditions. This gas control system, through integrated gas path design and automated control, achieves integrated offline cleaning and pressure holding testing of the discharge chamber, significantly improving maintenance efficiency and operational safety.

[0006] As one possible implementation, the controllable valve includes a pneumatic diaphragm valve; the pneumatic control system further includes a power air circuit module, which is connected to the control terminal of the pneumatic diaphragm valve and is used to provide power gas to the pneumatic diaphragm valve.

[0007] As one possible implementation, the controllable valve includes a solenoid valve; the control module is used to drive the opening and closing of the solenoid valve via an electrical signal.

[0008] As one possible implementation, the gas path assembly is further provided with a pressure regulating valve, which is used to regulate the input pressure of the process gas.

[0009] As one possible implementation, the gas path assembly is further provided with a flow limiting element, which is disposed on the path from the process gas path module to the discharge chamber to stabilize the charging gas flow rate.

[0010] As one possible implementation, the gas path assembly is further provided with a one-way valve, which is used to prevent gas from flowing backward.

[0011] As one possible implementation, the gas circuit assembly is also provided with a safety valve, which is used to automatically open to release pressure when the gas pressure exceeds a set value.

[0012] In one possible implementation, the control module is configured to record the pressure change data of the pressure sensor within a preset time period, and determine whether there is a leak in the discharge chamber based on the pressure change data.

[0013] As one possible implementation, the discharge cavity is a first type of discharge cavity or a second type of discharge cavity; the first type of discharge cavity has an independent air inlet and an air outlet, and the second type of discharge cavity has a common air inlet and an air outlet; the gas path assembly has a first gas path connection method corresponding to the first type of discharge cavity and a second gas path connection method corresponding to the second type of discharge cavity.

[0014] As one possible implementation, the control module stores a first control logic corresponding to the first air path connection method and a second control logic corresponding to the second air path connection method; the first control logic and the second control logic have different opening and closing timing and / or pressure parameters for the controllable valve.

[0015] The beneficial effects of the embodiments of this application include: This gas control system comprises a process gas path module, an exhaust module, a fluorine gas filtration module, and a vacuum pump module, forming the core of the gas path execution. These modules respectively handle process gas supply, chamber exhaust, fluorine gas harmless filtration, and chamber vacuuming. A pressure sensor serves as the detection core, collecting chamber pressure data in real time to provide precise control for the control module. The control module acts as the central core, coordinating the control of each module and controllable valves to automate the cleaning and testing processes. Each functional module is connected to the discharge chamber via a gas path assembly with controllable valves. Based on pressure feedback from the pressure sensor, the control module precisely regulates the opening and closing of the controllable valves and the operation of the vacuum pump module. First, offline cyclic cleaning of process gas filling and vacuuming is performed to thoroughly remove residual fluorine and particulate contaminants from the chamber. After cleaning, a seamless pressure holding test is conducted. Air tightness is detected through pressurization sealing and real-time pressure monitoring, without relying on the laser unit or requiring repeated manual intervention. This pneumatic control system is an independent design, eliminating reliance on the entire laser unit and adapting to various maintenance scenarios such as workshops and on-site operations, thus improving operational flexibility. The integrated cleaning and pressure testing system can detect leaks early, avoiding repeated disassembly and reassembly, shortening maintenance time and reducing equipment downtime. Automated circulating cleaning ensures more thorough fluorine removal, and the fluorine filter module eliminates the risk of toxic gas exposure, enhancing operational safety. Real-time pressure feedback enables automated and precise pressure control and monitoring, improving the accuracy of airtightness testing and meeting the high airtightness requirements of lithography lasers. The integrated design replaces multiple independent devices, reducing procurement and floor space costs and simplifying on-site equipment layout. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 A schematic diagram of the gas control system for offline cleaning and pressure holding test of the excimer laser discharge cavity provided in the first embodiment of this application; Figure 2 One of the schematic diagrams of the gas control system for offline cleaning and pressure holding test of the excimer laser discharge cavity provided in the first embodiment of this application; Figure 3 A second schematic diagram of the gas control system for offline cleaning and pressure holding testing of the excimer laser discharge cavity provided in the first embodiment of this application; Figure 4 Third schematic diagram of the gas control system for offline cleaning and pressure holding test of excimer laser discharge cavity provided in the first embodiment of this application; Figure 5 The offline cleaning flowchart of the gas control system for offline cleaning and pressure holding test of the excimer laser discharge cavity provided in the first embodiment of this application; Figure 6 A flowchart of the pressure holding test process for the gas control system for offline cleaning and pressure holding test of the excimer laser discharge cavity provided in the first embodiment of this application; Figure 7 A schematic diagram of the gas control system for offline cleaning and pressure holding testing of the excimer laser discharge cavity provided in the second embodiment of this application; Figure 8 One of the schematic diagrams of the gas control system for offline cleaning and pressure holding test of the excimer laser discharge cavity provided in the second embodiment of this application; Figure 9 A second schematic diagram of the gas control system for offline cleaning and pressure holding testing of the excimer laser discharge cavity provided in the second embodiment of this application; Figure 10 The offline cleaning flowchart of the gas control system for offline cleaning and pressure holding test of the excimer laser discharge cavity provided in the second embodiment of this application; Figure 11 The flowchart of the pressure holding test for the gas control system for offline cleaning and pressure holding test of the excimer laser discharge cavity provided in the second embodiment of this application.

[0018] Icons: 100-Pneumatic control system; 10-Process gas path module; 20-Exhaust module; 30-Fluorine gas filter module; 40-Vacuum pump module; 50-Power gas path module; 60-Discharge chamber module; 200-Excimer laser; 210-Discharge chamber; 300-Mobile test equipment; 310-Display; 320-Roller; 330-Gas tubing; 400-Test platform; SV1, SV2, SV3, SV4, SV5, SV6, SV200-Manual valve; PR1, PR200-Pressure regulating valve; F1, F2, F3, F200-Particulate filter; PV1, PV2, PV3, PV4, PV5-Pneumatic diaphragm valve; LG1-Flow limiting gasket; CV1, CV2, CV3-Check valve; PT-Pressure sensor; S1-Safety valve. Detailed Implementation

[0019] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. The described embodiments are only some embodiments of this application, not all embodiments. Similar reference numerals and letters in the following drawings indicate similar items. Once an item is defined in one drawing, it does not need to be further defined in other drawings.

[0020] The terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and should not be construed as limiting this application. The terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0021] Unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to connections within two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0022] Please refer to the reference. Figures 1 to 11This application provides a gas control system 100 for offline cleaning and pressure holding testing of the discharge cavity 210 of an excimer laser 200, including a process gas path module 10, an exhaust module 20, a fluorine gas filter module 30, a vacuum pump module 40, a pressure sensor PT, and a control module. The process gas path module 10, the exhaust module 20, the fluorine gas filter module 30, and the vacuum pump module 40 are connected to the discharge cavity 210 of the excimer laser 200 through the gas path assembly. The gas path assembly is equipped with multiple controllable valves. The process gas path module 10 is used to supply process gas to the discharge cavity 210, the exhaust module 20 is used to exhaust gas from the discharge cavity 210, the fluorine gas filter module 30 is used to filter fluorine gas in the gas discharged through the exhaust module 20, the vacuum pump module 40 is used to evacuate the discharge cavity 210, and the pressure sensor PT is used to acquire gas pressure information in the discharge cavity 210.

[0023] The control module is electrically connected to the controllable valve, vacuum pump module 40, and pressure sensor PT. The control module is configured to execute an offline cleaning process and a pressure holding test process. The offline cleaning process includes controlling the controllable valve and vacuum pump module 40 based on gas pressure information to sequentially cycle the discharge chamber 210 through at least one process gas introduction and vacuuming operation. The pressure holding test process includes controlling the controllable valve and vacuum pump module 40 after the offline cleaning process is completed to introduce process gas into the discharge chamber 210 to a preset pressure, then closing the controllable valve to maintain a sealed state. The pressure sensor PT monitors the gas pressure change in the discharge chamber 210 under sealed conditions. This gas control system 100, through integrated gas path design and automated control, achieves integrated offline cleaning and pressure holding testing of the discharge chamber 210, significantly improving maintenance efficiency and operational safety.

[0024] It should be noted that the gas control system 100 includes a process gas path module 10, an exhaust module 20, a fluorine gas filtration module 30, and a vacuum pump module 40. The process gas path module 10 provides a dedicated process gas for cleaning and pressurizing the discharge chamber 210, preferably inert helium to avoid reaction with residual fluorine gas in the chamber. Helium also meets the high airtightness testing requirements of the discharge chamber 210. The exhaust module 20 serves as a dedicated passage for venting gas from the chamber, quickly expelling the process gas mixed with fluorine gas during cleaning and any residual waste gas in the chamber. The fluorine gas filtration module 30 is directly connected in series with the gas exhaust path of the exhaust module 20, specifically filtering the highly corrosive fluorine gas in the exhaust gas to achieve harmless removal of the fluorine gas and avoid environmental and personnel harm caused by direct discharge. The vacuum pump module 40 provides power for evacuating the discharge chamber 210, pumping the gas pressure inside the chamber to a preset low vacuum pressure (e.g., 50 Pa) to ensure the complete removal of the process gas mixed with fluorine gas, thereby improving the cleaning effect.

[0025] Based on this, the pneumatic control system 100 also includes a pressure sensor PT and a control module. The pressure sensor PT is the core of the detection and is directly connected to the discharge chamber 210, for example, at least partially set inside the discharge chamber 210, to collect the gas pressure data in the chamber in real time, providing a basis for precise regulation for the control module. The control module is the central core and establishes bidirectional communication with the controllable valve, the vacuum pump module 40, and the pressure sensor PT through electrical signals. On the one hand, it receives the gas pressure data from the pressure sensor PT, and on the other hand, it sends opening, closing, and operation commands to the controllable valve and the vacuum pump module 40 according to a preset program to achieve fully automated control. The aforementioned process gas path module 10, exhaust module 20, fluorine gas filtration module 30, and vacuum pump module 40 all form a closed-loop gas path with the discharge chamber 210 through an integrated gas path assembly. Multiple controllable valves on the gas path assembly act as "switches" for each gas path, enabling the switching of gas path access between different modules and the discharge chamber 210. Based on the real-time gas pressure feedback from the pressure sensor PT, the control module precisely controls the opening and closing sequence of each controllable valve and the operation or shutdown of the vacuum pump module 40, achieving coordinated linkage among the modules and ensuring that the cleaning and pressure holding test processes are executed in an orderly manner according to the preset process.

[0026] like Figure 3 and Figure 8 As shown, for the discharge cavity 210 of the excimer laser 200 that does not meet the power-on conditions, a cleaning process can be performed using the pneumatic control system 100 before disassembly to prevent the volatilization of toxic gases during cavity opening, such as... Figure 4 and Figure 9 As shown, the gas control system 100 can also perform offline cleaning of the discharge chamber 210, which has been disassembled and moved to the test platform 400. The entire process does not require connection to the laser unit. The control module completes the "process gas filling - vacuuming" cycle operation according to the gas pressure information collected by the pressure sensor PT and a preset program: First, the controllable valve corresponding to the process gas circuit module 10 is opened to introduce process gas into the discharge chamber 210 until the pressure sensor PT detects that the gas pressure in the chamber has reached the preset filling pressure (e.g., 0.3 MPa) and then the corresponding valve is closed; then, the controllable valves corresponding to the vacuum pump module 40 and the exhaust module 20 are opened to evacuate the discharge chamber 210 until the pressure sensor PT detects that the gas pressure in the chamber has reached the preset vacuum pressure (e.g., 50 Pa) and then the relevant valves are closed, completing a single cleaning cycle; this cycle can be repeated multiple times (e.g., 10 times) according to the fluorine removal requirements to ensure that the residual fluorine in the chamber is completely reduced to below the safe threshold.

[0027] The pressure holding test process can be seamlessly connected after the offline cleaning process is completed, without the need to disassemble, transport the discharge chamber 210, or switch pipelines: First, the control module controls the controllable valves corresponding to the process gas circuit module 10 to open, introducing process gas into the discharge chamber 210. The pressure sensor PT provides real-time feedback on the gas pressure data inside the chamber. When the gas pressure reaches the preset pressure holding pressure (e.g., 0.5 MPa), the control module immediately closes all controllable valves, making the discharge chamber 210 completely sealed. After that, the pressure sensor PT continuously collects the gas pressure change data inside the chamber under the sealed state and transmits it to the control module in real time, completing the core process of airtightness monitoring and providing data basis for subsequent leakage judgment.

[0028] The pneumatic control system 100 provided in this application is an independent design. It can be connected to the disassembled discharge chamber 210 through the pneumatic circuit components to independently complete the cleaning and pressure holding test of the disassembled discharge chamber 210 without operating on the laser unit. This solves the limitation of traditional plasma cleaning which can only be done online, and adapts to actual maintenance needs in workshops, on-site, etc., greatly improving the flexibility of maintenance operations. At the same time, the control module enables seamless connection to the pressure holding test after the cleaning process is completed, eliminating the need for multiple disassembly and reassembly of the discharge chamber 210 and switching of pipelines. This solves the cumbersome problem of traditional step-by-step operations, and can detect leaks in advance before the discharge chamber 210 is reinstalled on the original equipment, avoiding repeated disassembly and reassembly, greatly shortening maintenance time and reducing equipment downtime.

[0029] The pneumatic control system 100 provided in this application can completely reduce the residual fluorine gas in the discharge chamber 210 to below the safety threshold through multiple automated cycles of process gas filling and vacuuming, which is more thorough than traditional manual rinsing. At the same time, the fluorine gas filtration module 30 performs harmless treatment on the discharged gas to prevent the leakage of corrosive fluorine gas and eliminate the harm to operators caused by the volatilization of toxic gases during chamber maintenance from the source. In addition, based on the real-time pressure feedback of the pressure sensor PT, automated pressurization, sealing and monitoring are realized. Compared with manual pressure holding test, it can accurately control the preset pressure and capture changes in chamber pressure in real time, avoid errors of manual operation, improve the accuracy of airtightness test, and ensure that the discharge chamber 210 meets the high airtightness requirements of lasers used for photolithography. Moreover, the functional modules of cleaning, exhaust, fluorine gas filtration, vacuuming and testing are integrated into the same pneumatic control system 100, replacing the traditional independent purging and leak detection equipment, reducing equipment purchase and floor space costs, and simplifying the equipment layout at the maintenance site.

[0030] As one possible implementation method, such as Figure 1 , Figure 2 and Figure 7 As shown, in some embodiments, the controllable valve includes a pneumatic diaphragm valve; the pneumatic control system 100 also includes a power pneumatic circuit module 50, which is connected to the control terminal of the pneumatic diaphragm valve and is used to provide power gas to the pneumatic diaphragm valve.

[0031] It should be noted that in some embodiments, the controllable valve can be a pneumatic diaphragm valve. Since the pneumatic diaphragm valve adopts a diaphragm sealing structure and has no valve stem packing sealing gap, the possibility of gas leakage can be eliminated from the structure. In addition, the part of the valve body that contacts the gas path is made of a material resistant to fluorine corrosion, which can directly contact the fluorine-containing gas discharged from the cavity. It is suitable for the highly corrosive working environment of the discharge cavity 210, avoiding problems such as gas path failure and fluorine leakage caused by valve corrosion by fluorine, and greatly improving the operational stability and service life of the system in corrosive environments.

[0032] The pneumatic control system 100 also includes a power pneumatic circuit module 50, which serves as a dedicated drive module for the pneumatic diaphragm valves. Inert nitrogen is preferred as the power gas to prevent leakage of the power gas and reaction with process gas and fluorine gas, thus avoiding secondary chemical reactions and cavity contamination during the cleaning process and ensuring the cleanliness of the discharge chamber 210 after maintenance. The power pneumatic circuit module 50 is connected to the control terminals of all pneumatic diaphragm valves through dedicated pipelines, providing continuous and stable pneumatic pressure power for the opening and closing of the pneumatic diaphragm valves. This ensures that the valves operate in place, avoids incomplete gas path switching due to insufficient drive, ensures accurate gas path opening and closing during the "process gas filling - vacuuming" cycle in the cleaning cycle, and ensures complete sealing of the cavity during pressure holding tests.

[0033] The power air circuit module 50 is electrically connected to the control module. The control module regulates the air pressure output of the power air circuit module 50 to achieve automated control of the opening and closing of all pneumatic diaphragm valves. This works in synergy with the control module's control of the vacuum pump module 40 and pressure sensor PT, and is fully integrated into the overall automated control process of the pneumatic control system 100, ensuring precise timing matching between air circuit switching and cleaning and testing processes.

[0034] As one possible implementation, in other embodiments, the controllable valve includes a solenoid valve; the control module is used to drive the opening and closing of the solenoid valve via an electrical signal.

[0035] It should be noted that in some other embodiments, the controllable valve can be a solenoid valve. The solenoid valve is a fast-opening and fast-closing valve driven by an electrical signal, which is highly compatible with the electrical control attributes of the control module. It does not require an additional power pneumatic circuit module 50 to provide drive, which greatly simplifies the overall structure of the pneumatic control system 100, reduces the procurement and installation costs of pneumatic circuit accessories, and reduces the size and weight of the equipment, making it easier to integrate the pneumatic control system 100 into a mobile device. The solenoid valve has a high-precision sealing structure and a small gap between the gas circuit opening and closing, which can effectively block the leakage of fluorine-containing gas, ensure the vacuum degree of the cavity during vacuuming, and the sealing performance of the cavity during pressure holding tests, avoiding problems such as incomplete cleaning and test data errors caused by gas circuit leakage.

[0036] All solenoid valve terminals are directly electrically connected to the control module. The control module directly drives the solenoid valves to open and close by outputting high and low level electrical signals, without the need for intermediate conversion. The solenoid valves have a fast response speed, enabling rapid switching of the gas path. They can accurately match the cleaning and testing process sequence preset by the control module, ensuring rapid connection of each step from "filling process gas - vacuuming - sealing".

[0037] As one possible implementation method, such as Figure 1 , Figure 2 and Figure 7 As shown, the gas path assembly is also equipped with a pressure regulating valve, which is used to regulate the input pressure of the process gas.

[0038] It should be noted that the gas path assembly is also equipped with a pressure regulating valve. For example, the pressure regulating valve can be connected in series in the gas path path from the process gas path module 10 to the discharge chamber 210, located between the process gas path module 10 and the corresponding pneumatic diaphragm valve. The core function of the pressure regulating valve is to reduce and stabilize the pressure of the process gas output from the process gas path module 10: on the one hand, it reduces the original pressure of the process gas source to a process pressure range suitable for cleaning and maintaining the pressure of the discharge chamber 210, thereby improving the accuracy of the control module's regulation; on the other hand, it buffers the pressure fluctuations of the process gas source, ensuring that the pressure of the process gas input to the discharge chamber 210 remains stable, without instantaneous high or low pressure, and preventing high-pressure airflow from impacting and eroding vulnerable components such as electrodes and chamber walls inside the discharge chamber 210.

[0039] The pressure regulating valve is either manually adjustable or electrically controlled, allowing for flexible adjustment of the process gas input pressure without replacing the process gas circuit module 10. This enables precise matching of different pressure requirements for cleaning circulation inflation and pressure holding test inflation, improving the adaptability of the gas control system 100 to different process stages. In actual use, the pressure can be pre-adjusted to the corresponding pressure threshold (e.g., 0.3 MPa for cleaning inflation and 0.5 MPa for pressure holding test) according to the different process requirements of cleaning and pressure holding tests. This, combined with the real-time pressure feedback from the pressure sensor PT, forms a dual pressure control system: the pressure regulating valve pre-stabilizes the process gas input pressure, the pressure sensor PT monitors the actual gas pressure inside the chamber in real time, and the control module precisely controls the closure of the pneumatic diaphragm valve based on the pressure feedback, ensuring that the gas pressure inside the chamber accurately reaches the preset value.

[0040] As one possible implementation method, such as Figure 1 , Figure 2 and Figure 7 As shown, the gas path assembly is also provided with a flow limiting element, which is located on the path from the process gas path module 10 to the discharge chamber 210 to stabilize the charging gas flow rate.

[0041] It should be noted that the gas path assembly is also equipped with a flow limiting element (such as a flow limiting gasket LG1). The flow limiting element can be connected in series on the gas path from the process gas path module 10 to the discharge chamber 210, after the pressure regulating valve and the corresponding pneumatic diaphragm valve. The core function of the flow limiting element is to accurately control the flow cross-sectional area of ​​the process gas, thereby stabilizing the flow rate of the process gas into the discharge chamber 210 within a preset optimal range: preventing the process gas from forming turbulence in the chamber due to excessive flow rate, and avoiding excessively long charging time due to excessively slow flow rate; at the same time, the charging amount can be controlled by stabilizing the flow rate, preventing the chamber from being overcharged.

[0042] The flow-limiting element and the pressure regulating valve form a dual precise control of pressure and flow rate: the pressure regulating valve stabilizes the input pressure of the process gas, ensuring that the process gas is charged into the cavity at a constant pressure; the flow-limiting element further limits the charging flow rate on the basis of constant pressure, allowing the process gas to be charged into the discharge cavity 210 in a constant pressure and constant flow manner, ensuring that the process gas diffuses evenly in the cavity and mixes thoroughly with the residual fluorine gas, improving the fluorine removal efficiency of the subsequent vacuum cycle, making the cleaning more thorough, and at the same time ensuring that the pressure data collected by the pressure sensor PT rises steadily without pressure fluctuations caused by sudden changes in flow rate, providing a reliable basis for the control module to determine the charging end point and close the pneumatic diaphragm valve, thus improving the accuracy of regulation.

[0043] As one possible implementation method, such as Figure 1 , Figure 2 and Figure 7 As shown, the gas circuit assembly is also equipped with a one-way valve, which is used to prevent gas from flowing backward.

[0044] It should be noted that the gas path assembly is also equipped with one-way valves. These one-way valves can be set at key nodes of the gas path assembly according to the gas path function: for example, on the path from the process gas path module 10 to the discharge chamber 210, to prevent the fluorine-containing gas in the discharge chamber 210 from flowing back to the process gas path module 10, avoiding corrosion of the precision components inside the module by fluorine gas, extending the module's service life, and reducing equipment maintenance and replacement costs; or at the inlet of the vacuum pump module 40, to prevent gas from flowing back into the vacuum pump module 40 and the discharge chamber 210 during the vacuuming process, ensuring that the vacuum is drawn to a preset low vacuum pressure during the cleaning cycle, ensuring stable sealing pressure of the chamber during the pressure holding test, and avoiding incomplete cleaning and test data errors caused by gas pressure disturbance; or at the outlet of the exhaust module 20, to prevent external air from entering the exhaust module 20 and the discharge chamber 210 in reverse. All of the above one-way valves only allow gas to pass through in the process flow direction and completely block the reverse flow, ensuring the smooth implementation of process gas supply, vacuuming, exhaust and other links.

[0045] The passive one-way switching of the check valve and the active on / off control of the pneumatic diaphragm valve form a dual air path protection: the pneumatic diaphragm valve realizes the active on / off switching of the air path under the command of the control module, which is the core control means; the check valve realizes the passive reverse blocking of the air path in the case of the opening and closing gap of the pneumatic diaphragm valve or sudden failure, to prevent the gas from flowing backward, to ensure that the air path flow direction always meets the process requirements, and to ensure the safe operation of all 100 modules of the pneumatic control system.

[0046] As one possible implementation method, such as Figure 1 , Figure 2 and Figure 7 As shown, the gas circuit assembly is also equipped with a safety valve S1, which is used to automatically open and release pressure when the gas pressure exceeds the set value.

[0047] It should be noted that the gas circuit assembly is also equipped with a safety valve S1. The safety valve S1 can be connected in parallel at the gas circuit interface of the discharge chamber 210. It is a dedicated safety protection element for the gas pressure inside the chamber. The core functions of the safety valve S1 are automatic pressure relief in case of overpressure and automatic closure in case of constant pressure: a safety pressure threshold is preset according to the pressure resistance limit of the discharge chamber 210. When the gas pressure inside the chamber exceeds the safety pressure threshold due to reasons such as control module failure or pneumatic diaphragm valve jamming, the safety valve S1 automatically opens to quickly discharge the high-pressure gas inside the chamber, thereby relieving pressure and avoiding safety accidents such as rupture of the discharge chamber 210, explosion of gas circuit components, and large-scale leakage of fluorine gas caused by high pressure. When the gas pressure inside the chamber drops below the safety pressure threshold, the safety valve S1 automatically closes to restore the gas circuit seal of the chamber and avoid a sudden drop in chamber gas pressure caused by excessive pressure relief.

[0048] The passive overpressure relief of safety valve S1 and the active air pressure regulation of the control module form a dual pressure safety protection: the control module actively regulates the opening and closing of the pneumatic diaphragm valve based on the feedback of the pressure sensor PT to ensure that the air pressure in the cavity is within the preset process range, which is active protection; when the air pressure in the cavity exceeds the safety limit, safety valve S1 automatically relieves pressure without the need for control module instructions, which is passive fallback protection, and comprehensively protects the pressure safety of the discharge cavity 210 and the air circuit system.

[0049] As one possible implementation, the control module is configured to record the pressure change data of the pressure sensor PT within a preset time period, and determine whether there is a leak in the discharge chamber 210 based on the pressure change data.

[0050] It should be noted that the control module has a preset pressure monitoring duration (e.g., 5 minutes). After the discharge chamber 210 is sealed, it automatically receives and stores all pressure change data collected by the pressure sensor PT within this preset duration, forming a complete pressure change curve. The data can be stored for a long time and retrieved at any time. The size and rate of leakage can be accurately determined by the rate and trend of pressure drop, providing quantitative data support for subsequent maintenance of the discharge chamber 210 and avoiding blind repairs. The control module has a preset leak judgment threshold, which includes quantitative indicators such as the pressure drop rate threshold and the total pressure drop value threshold within the preset duration. The control module automatically compares the recorded actual pressure change data with the leak judgment threshold. If the actual data does not exceed the leak judgment threshold, the airtightness of the discharge chamber 210 is deemed qualified; if it exceeds the leak judgment threshold, the discharge chamber 210 is deemed to have a leak.

[0051] After the control module closes all controllable valves and the discharge chamber 210 enters a sealed state, the pressure data recording and leakage judgment are automatically started. The entire process requires no manual intervention. After the judgment is completed, the judgment result can be automatically output, completely replacing the traditional manual observation and experience judgment. This avoids problems such as human error and missed judgment, and improves the accuracy of test results. At the same time, no manual monitoring is required throughout the process, which greatly improves the efficiency of pressure holding test. The pressure holding test process is upgraded from "pressurization-sealing-monitoring" to a fully automated closed loop of "pressurization-sealing-monitoring-recording-judgment", which is highly compatible with the automated process of offline cleaning.

[0052] As one possible implementation, the discharge cavity 210 is a first type discharge cavity 210 or a second type discharge cavity 210; the first type discharge cavity 210 has an independent air inlet and an air outlet, and the second type discharge cavity 210 has a common air inlet and an air outlet; the gas path assembly has a first gas path connection method corresponding to the first type discharge cavity 210 and a second gas path connection method corresponding to the second type discharge cavity 210.

[0053] It should be noted that the discharge cavity 210 is either a first type discharge cavity 210 or a second type discharge cavity 210; wherein, for example Figure 1 As shown, the first type of discharge chamber 210 has independent air inlets and outlets, with no air passage connection between the two interfaces, enabling unidirectional charging of process gas and unidirectional discharge of waste gas; as Figure 7 As shown, the second type of discharge chamber 210 is provided with only one gas path interface, which is shared by both the air intake and exhaust. The process gas filling and the waste gas discharge must be completed through the same interface.

[0054] The gas path assembly has a first gas path connection method and a second gas path connection method; wherein, such as Figure 1 , Figure 3 and Figure 4As shown, the first gas path connection method is adapted to the first type of discharge cavity 210. The process gas path interface of the gas path assembly is connected to the independent air inlet of the discharge cavity 210, and the gas path interfaces of the exhaust module 20, the fluorine filter module 30, and the vacuum pump module 40 are connected to the independent air outlet of the discharge cavity 210, forming a unidirectional closed-loop gas path of "process gas in - waste gas out", where the process gas filling and waste gas discharge do not interfere with each other; for example Figures 7 to 9 As shown, the second gas path connection method is adapted to the second type of discharge chamber 210. The gas path interfaces of the process gas path module 10, exhaust module 20, fluorine filter module 30 and vacuum pump module 40 of the gas path assembly are combined through a three-way connector and then connected to the common inlet and outlet of the discharge chamber 210 to form a "single-interface charging and discharging integrated" gas path structure. The alternation of process gas charging and waste gas discharge is realized by the timing switching of the controllable valve.

[0055] The two air circuit connection methods can be switched through common air circuit accessories such as quick connectors and tee connectors. There is no need to disassemble the core module of the air control system 100 or replace the air circuit components. The switching operation is simple and quick. It can be quickly adapted to the actual structure of the discharge chamber 210 during on-site maintenance, thereby improving the applicability of the system and meeting the high efficiency requirements of on-site operations.

[0056] As one possible implementation, the control module stores a first control logic corresponding to the first air path connection method and a second control logic corresponding to the second air path connection method; the first control logic and the second control logic are different for the opening and closing timing and / or pressure parameters of the controllable valve.

[0057] It should be noted that the control module stores a first control logic and a second control logic; the first control logic is adapted to the connection method between the first type of discharge chamber and the first gas path. Since the discharge chamber 210 is an independent inlet and outlet, the opening and closing sequence of the controllable valves is unidirectional linkage: during gas filling, only the controllable valves corresponding to the process gas path are opened; during gas exhaust and vacuuming, only the controllable valves corresponding to the exhaust and vacuum pump modules 40 are opened, and there is no time overlap between the opening and closing of the valves; the pressure parameters are adapted to the unidirectional flow field, and the pressure thresholds for gas filling and vacuuming are set according to the conventional process.

[0058] The second control logic adapts to the connection method between the second type of discharge chamber and the second gas path. Since the discharge chamber 210 shares a common inlet and outlet, the opening and closing sequence of the controllable valves is time-sharing: during inflation, only the controllable valves corresponding to the process gas path are opened, and the rest of the valves are closed; after inflation is completed, the process gas path valves are closed first, and then the exhaust and vacuum pump module 40 valves are opened with a delay to avoid gas path crossflow. There is a strict time interval between the opening and closing of each valve; the pressure parameters can be adjusted appropriately according to the characteristics of the single-interface flow field, such as the vacuuming time and the pressure holding stabilization time, to ensure the cleaning and testing effect.

[0059] Both control logics are pre-written and stored in the control module's program, forming independent program modules. They can be switched with a single click via the control module's operation panel or remote commands. After switching, the control module will automatically adjust the opening and closing sequence and pressure parameters of the controllable valves according to the corresponding logic, eliminating the need for manual rewriting of programs and parameter debugging, thus meeting the need for quick on-site maintenance.

[0060] like Figure 3 , Figure 4 , Figure 8 and Figure 9 As shown, the pneumatic control system 100 can be integrated into the portable testing equipment 300 to facilitate cleaning processes and pressure holding tests on the discharge chambers 210 of different excimer lasers 200 by moving them via rollers 320. The portable testing equipment 300 may also include a display 310 to select the control logic and display pressure data of the discharge chamber 210.

[0061] First Embodiment This embodiment provides a gas control system 100 for the discharge cavity 210 of a G company excimer laser 200. The G company's discharge cavity 210 is a first-type discharge cavity, meaning that the G company's discharge cavity 210 has independent gas inlet and outlet, and its gas path connection method is as follows. Figure 1 As shown, the offline cleaning process is as follows: Figure 5 As shown, the pressure holding test procedure is as follows: Figure 6 As shown.

[0062] like Figure 1As shown, a manual valve SV200, a pressure regulating valve PR200, and a particulate filter F200 are sequentially installed on the gas path between the outlet of the nitrogen source and the input of the solenoid valve island. The output of the solenoid valve island is connected to the control end of each pneumatic diaphragm valve through a pneumatic control pipeline. A manual valve SV1, a pressure regulating valve PR1, a particulate filter F1, a pneumatic diaphragm valve PV1, a one-way valve CV1, a manual valve SV2, and a manual valve SV3 are sequentially installed on the gas path between the outlet of the helium source and the inlet of the discharge chamber 210. The pneumatic diaphragm valve PV1... A branch air passage is provided in parallel at both ends of 1, on which a pneumatic diaphragm valve PV2 and a flow-limiting gasket LG1 are installed in sequence. A manual valve SV4, a manual valve SV5, a particulate filter F2, a pneumatic diaphragm valve PV4, a manual valve SV6, a particulate filter F3, and a pneumatic diaphragm valve PV5 are installed in sequence on the air passage between the outlet of the discharge chamber 210 and the external exhaust port. A branch air passage is provided in parallel between the manual valve SV2 and the one-way valve CV1, and the other end of this branch air passage is connected between the pneumatic diaphragm valve PV4 and the manual valve SV6. It is equipped with a pneumatic diaphragm valve PV3 and a one-way valve CV2. A branch air path is connected in parallel at the two ends of the pneumatic diaphragm valve PV3 and the one-way valve CV2 that are far apart from each other, and a safety valve S1 is installed on it. A branch air path is connected in parallel at the two ends of the pneumatic diaphragm valve PV5 and the external exhaust port that are far apart from each other, and a one-way valve CV3 is installed on it. The aforementioned manual valves SV200, PR200, and particulate filter F200 all belong to the power air path module 50. Manual valve SV1, pressure regulating valve PR1, particulate filter F1, and pneumatic diaphragm valve... PV1, pneumatic diaphragm valve PV2, flow limiting gasket LG1, check valve CV1, manual valve SV2, manual valve SV5, particulate filter F2, pneumatic diaphragm valve PV4, pneumatic diaphragm valve PV3, check valve CV2, and safety valve S1 all belong to process gas circuit module 10. Manual valves SV3 and SV4 both belong to discharge chamber module 60. Manual valve SV6 belongs to exhaust module 20. Particulate filter F3 belongs to fluorine gas filtration module 30. Pneumatic diaphragm valve PV5 and check valve CV3 both belong to vacuum pump module 40.

[0063] It is worth noting that, in this embodiment, since the discharge chamber 210 has independent air inlet and air outlet, manual valves SV2 and SV5 are respectively connected to the air inlet and air outlet of the discharge chamber 210 through air pipes 330. In addition, since the one-way valve CV2 is located between the pneumatic diaphragm valve PV3 and the manual valve SV6, when gas is discharged from the pneumatic diaphragm valve PV4, due to the one-way shut-off characteristic of the one-way valve CV2, the gas will not enter the pneumatic diaphragm valve PV3, thus ensuring the uniqueness of the exhaust path.

[0064] The control module is electrically connected to the solenoid valve island, the vacuum pump module 40, and the pressure sensor PT, which is at least partially located in the discharge chamber 210, and is configured to automatically execute offline cleaning and pressure holding test processes.

[0065] like Figure 5 As shown, the offline cleaning process is as follows: S501: Connect to the plant's gas supply and open manual valves SV1, SV2, SV3, SV4, SV5, SV6, and SV200. S502: Adjust pressure regulating valves PR1 and PR200 to the first specified pressure, such as 0.5MPa; S503: The control module opens the pneumatic diaphragm valve PV1; S504: The control module obtains the real-time air pressure of the discharge chamber 210 through the pressure sensor PT; S505: Determine whether the real-time gas pressure in the discharge chamber 210 has reached the second specified pressure, such as 0.25MPa. If yes, proceed to S506; otherwise, proceed to S503. S506: The control module closes the pneumatic diaphragm valve PV1 and opens the pneumatic diaphragm valve PV2; S507: The control module obtains the real-time air pressure of the discharge chamber 210 through the pressure sensor PT; S508: Determine whether the real-time gas pressure in the discharge chamber 210 has reached the third specified pressure, such as 0.3MPa. If yes, proceed to S509; otherwise, proceed to S506. S509: The control module closes the pneumatic diaphragm valve PV2 and waits for a specified time, such as 5 minutes. S510: The control module opens the pneumatic diaphragm valve PV4; S511: The control module obtains the real-time air pressure of the discharge chamber 210 through the pressure sensor PT; S512: Determine whether the real-time gas pressure in the discharge chamber 210 has reached atmospheric pressure. If yes, proceed to S513; otherwise, proceed to S510. S513: The control module turns on the vacuum pump module 40 and the pneumatic diaphragm valve PV5 to evacuate the discharge chamber 210. S514: The control module obtains the real-time air pressure of the discharge chamber 210 through the pressure sensor PT; S515: Determine whether the real-time gas pressure in the discharge chamber 210 has reached the fourth specified pressure, such as 50Pa. If yes, proceed to S516; otherwise, proceed to S513. S516: The control module closes pneumatic diaphragm valve PV4 and pneumatic diaphragm valve PV5, completing one offline cleaning process; S517: Repeat S503–S516 at least once, such as 10 times, to complete the offline cleaning cycle.

[0066] like Figure 6 As shown, the pressure holding test procedure is as follows: S601: Connect to the plant's gas supply and open manual valves SV1, SV2, SV3, SV4, SV5, SV6, and SV200. S602: Adjust pressure regulating valves PR1 and PR200 to the first specified pressure, such as 0.5MPa; S603: The control module opens the pneumatic diaphragm valve PV1; S604: The control module obtains the real-time air pressure of the discharge chamber 210 through the pressure sensor PT; S605: Determine whether the real-time gas pressure in the discharge chamber 210 has reached the second specified pressure, such as 0.25MPa. If yes, proceed to S606; otherwise, proceed to S603. S606: The control module closes the pneumatic diaphragm valve PV1 and opens the pneumatic diaphragm valve PV2; S607: The control module obtains the real-time air pressure of the discharge chamber 210 through the pressure sensor PT; S608: Determine whether the real-time gas pressure in the discharge chamber 210 has reached the third specified pressure, such as 0.3MPa. If yes, proceed to S609; otherwise, proceed to S606. S609: The control module closes the pneumatic diaphragm valve PV2 and performs a positive pressure holding test; S610: Determine if the pressure drop meets the requirements. If yes, proceed to S613; otherwise, proceed to S611. S611: Perform leak detection tests, locate leaks, and repair leaks; S612: Determine whether the leak has been dealt with. If yes, proceed to S606; otherwise, proceed to S611. S613: The control module opens the pneumatic diaphragm valve PV4; S614: The control module obtains the real-time air pressure of the discharge chamber 210 through the pressure sensor PT; S615: Determine whether the real-time gas pressure in the discharge chamber 210 has reached atmospheric pressure. If yes, proceed to S616; otherwise, proceed to S613. S616: The control module turns on the vacuum pump module 40 and the pneumatic diaphragm valve PV5 to evacuate the discharge chamber 210. S617: The control module obtains the real-time air pressure of the discharge chamber 210 through the pressure sensor PT; S618: Determine whether the real-time gas pressure in the discharge chamber 210 has reached the fourth specified pressure, such as 50Pa. If yes, proceed to S619; otherwise, proceed to S616. S619: The control module closes pneumatic diaphragm valve PV4 and pneumatic diaphragm valve PV5, and performs a vacuum pressure holding test; S620: Determine if the leakage rate meets the requirements. If yes, complete the pressure holding test procedure. If no, proceed to S621. S621: Perform leak detection tests, locate leaks, and repair leaks; S612: Determine whether the leak has been dealt with. If yes, proceed to S616; otherwise, proceed to S621.

[0067] Second Embodiment This embodiment provides a gas control system 100 for the discharge cavity 210 of a C company excimer laser 200. The C company's discharge cavity 210 is a second-type discharge cavity, meaning that the C company's discharge cavity 210 has a common gas inlet and outlet, and its gas path connection method is as follows: Figure 7 As shown, the offline cleaning process is as follows: Figure 10 As shown, the pressure holding test procedure is as follows: Figure 11 As shown.

[0068] like Figure 7 As shown, the gas path between the outlet of the nitrogen source and the input of the solenoid valve island is sequentially equipped with a manual valve SV200, a pressure regulating valve PR200, and a particulate filter F200. The output of the solenoid valve island is connected to the control terminals of each pneumatic diaphragm valve via pneumatic control pipelines. The gas path between the outlet of the helium source and the inlet / outlet of the discharge chamber 210 is sequentially equipped with a manual valve SV1, a pressure regulating valve PR1, a particulate filter F1, a pneumatic diaphragm valve PV1, a check valve CV1, a manual valve SV2, and a manual valve SV3. A branch gas path is connected in parallel at both ends of the pneumatic diaphragm valve PV1, on which a pneumatic diaphragm valve PV2 and a flow limiting gasket LG1 are sequentially installed. The gas path between the inlet / outlet of the discharge chamber 210 and the external exhaust port is sequentially equipped with a manual valve SV3, a manual valve SV2, a pneumatic diaphragm valve PV3, a check valve CV2, a manual valve SV6, a particulate filter F3, and a pneumatic diaphragm valve PV5. A branch gas path is set in parallel at the two ends of the pneumatic diaphragm valve PV3 and the one-way valve CV2 that are far apart from each other, and a safety valve S1 is installed on it. A branch gas path is set in parallel at the two ends of the pneumatic diaphragm valve PV5 and the external exhaust port that are far apart from each other, and a one-way valve CV3 is installed on it. The aforementioned manual valves SV200, PR200, and particulate filter F200 all belong to process gas path module 10. Manual valve SV1, pressure regulating valve PR1, particulate filter F1, pneumatic diaphragm valve PV1, pneumatic diaphragm valve PV2, flow limiting gasket LG1, one-way valve CV1, manual valve SV2, pneumatic diaphragm valve PV3, one-way valve CV2, and safety valve S1 all belong to process gas path module 10. Manual valve SV3 belongs to discharge chamber module 60. Manual valve SV6 belongs to exhaust module 20. Particulate filter F3 belongs to fluorine gas filtration module 30. Pneumatic diaphragm valve PV5 and one-way valve CV3 both belong to vacuum pump module 40.

[0069] It is worth noting that, in this embodiment, since the discharge chamber 210 has a common inlet and outlet, only the manual valve SV2 is connected to the inlet and outlet of the discharge chamber 210 through the air pipe 330. The manual valve SV5, the particulate filter F2, and the pneumatic diaphragm valve PV4 do not participate in the connection with the discharge chamber 210. In addition, since the one-way valve CV1 is located between the manual valve SV2 and the pneumatic diaphragm valve PV1 (or the pneumatic diaphragm valve PV2), when gas is discharged from the manual valve SV2, due to the one-way shut-off characteristic of the one-way valve CV1, the gas will not enter the pneumatic diaphragm valve PV1 (or the pneumatic diaphragm valve PV2), thus ensuring the uniqueness of the exhaust path.

[0070] The control module is electrically connected to the solenoid valve island, the vacuum pump module 40, and the pressure sensor PT, which is at least partially located in the discharge chamber 210, and is configured to automatically execute offline cleaning and pressure holding test processes.

[0071] like Figure 10 As shown, the offline cleaning process is as follows: S1001: Connect to the plant's gas supply and open manual valves SV1, SV2, SV3, SV4, SV5, SV6, and SV200. S1002: Adjust pressure regulating valves PR1 and PR200 to the first specified pressure, such as 0.5MPa; S1003: The control module opens the pneumatic diaphragm valve PV1; S1004: The control module obtains the real-time air pressure of the discharge chamber 210 through the pressure sensor PT; S1005: Determine whether the real-time gas pressure in the discharge chamber 210 has reached the second specified pressure, such as 0.25MPa. If yes, proceed to S1006; otherwise, proceed to S1003. S1006: The control module closes the pneumatic diaphragm valve PV1 and opens the pneumatic diaphragm valve PV2; S1007: The control module obtains the real-time air pressure of the discharge chamber 210 through the pressure sensor PT; S1008: Determine whether the real-time gas pressure in the discharge chamber 210 has reached the third specified pressure, such as 0.3MPa. If yes, proceed to S1009; otherwise, proceed to S1006. S1009: The control module closes the pneumatic diaphragm valve PV2 and waits for a specified time, such as 5 minutes. S1010: The control module opens the pneumatic diaphragm valve PV3; S1011: The control module obtains the real-time air pressure of the discharge chamber 210 through the pressure sensor PT; S1012: Determine whether the real-time gas pressure in the discharge chamber 210 has reached atmospheric pressure. If yes, proceed to S1013; otherwise, proceed to S1010. S1013: The control module turns on the vacuum pump module 40 and the pneumatic diaphragm valve PV5 to evacuate the discharge chamber 210. S1014: The control module obtains the real-time air pressure of the discharge chamber 210 through the pressure sensor PT; S1015: Determine whether the real-time gas pressure in the discharge chamber 210 has reached the fourth specified pressure, such as 50Pa. If yes, proceed to S1016; otherwise, proceed to S1013. S1016: The control module closes pneumatic diaphragm valve PV3 and pneumatic diaphragm valve PV5; S1017: Repeat S1003–S1016 ten times to complete the offline cleaning cycle.

[0072] like Figure 11 As shown, the pressure holding test procedure is as follows: S1101: Connect to the plant's gas supply and open manual valves SV1, SV2, SV3, SV4, SV5, SV6, and SV200. S1102: Adjust pressure regulating valves PR1 and PR200 to the first specified pressure, such as 0.5MPa; S1103: The control module opens the pneumatic diaphragm valve PV1; S1104: The control module obtains the real-time air pressure of the discharge chamber 210 through the pressure sensor PT; S1105: Determine whether the real-time gas pressure in the discharge chamber 210 has reached the second specified pressure, such as 0.25MPa. If yes, proceed to S1106; otherwise, proceed to S1103. S1106: The control module closes the pneumatic diaphragm valve PV1 and opens the pneumatic diaphragm valve PV2; S1107: The control module obtains the real-time air pressure of the discharge chamber 210 through the pressure sensor PT; S1108: Determine whether the real-time gas pressure in the discharge chamber 210 has reached the third specified pressure, such as 0.3MPa. If yes, proceed to S1109; otherwise, proceed to S1106. S1109: The control module closes the pneumatic diaphragm valve PV2 and performs a positive pressure holding test; S1110: Determine if the pressure drop meets the requirements. If yes, proceed to S1113; otherwise, proceed to S1111. S1111: Perform leak detection tests, locate leaks, and repair leaks; S1112: Determine whether the leak has been dealt with. If yes, proceed to S1106; otherwise, proceed to S1111. S1113: The control module opens the pneumatic diaphragm valve PV3; S1114: The control module obtains the real-time air pressure of the discharge chamber 210 through the pressure sensor PT; S1115: Determine whether the real-time gas pressure in the discharge chamber 210 has reached atmospheric pressure. If yes, proceed to S1116; otherwise, proceed to S1113. S1116: The control module turns on the vacuum pump module 40 and the pneumatic diaphragm valve PV5 to evacuate the discharge chamber 210. S1117: The control module obtains the real-time air pressure of the discharge chamber 210 through the pressure sensor PT; S1118: Determine whether the real-time gas pressure in the discharge chamber 210 has reached the fourth specified pressure, such as 50Pa. If yes, proceed to S1119; otherwise, proceed to S1116. S1119: The control module closes the pneumatic diaphragm valve PV3 and PV5, and performs a vacuum pressure test; S1120: Determine if the leakage rate meets the requirements. If yes, complete the pressure holding test process. If no, proceed to S1121. S1121: Perform leak detection tests, locate leaks, and repair leaks; S1112: Determine whether the leak has been dealt with. If yes, proceed to S1116; otherwise, proceed to S1121.

[0073] The above description is merely an optional embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

[0074] It should also be noted that the various specific technical features described in the above embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, this application will not describe the various possible combinations separately.

Claims

1. A gas control system for offline cleaning and pressure holding testing of an excimer laser discharge cavity, characterized in that, The system includes a process gas path module, an exhaust module, a fluorine gas filtration module, a vacuum pump module, a pressure sensor, and a control module. The process gas path module, the exhaust module, the fluorine gas filtration module, and the vacuum pump module are connected to the discharge cavity of the excimer laser via a gas path assembly. The gas path assembly is equipped with multiple controllable valves. The process gas path module is used to supply process gas to the discharge cavity, the exhaust module is used to exhaust gas from the discharge cavity, the fluorine gas filtration module is used to filter fluorine gas from the gas discharged through the exhaust module, the vacuum pump module is used to evacuate the discharge cavity, and the pressure sensor is used to acquire gas pressure information within the discharge cavity. The control module is electrically connected to the controllable valve, the vacuum pump module, and the pressure sensor. The control module is configured to execute an offline cleaning process and a pressure holding test process. The offline cleaning process includes controlling the controllable valve and the vacuum pump module according to the gas pressure information to sequentially perform at least one cycle of introducing process gas and evacuating the discharge chamber. The pressure holding test process includes controlling the controllable valve and the vacuum pump module according to the gas pressure information to introduce process gas into the discharge chamber to a preset pressure and then closing the controllable valve to keep the discharge chamber sealed. The pressure sensor monitors the gas pressure change of the discharge chamber in the sealed state.

2. The gas control system for offline cleaning and pressure holding testing of the excimer laser discharge cavity according to claim 1, characterized in that, The controllable valve includes a pneumatic diaphragm valve; the pneumatic control system also includes a power air circuit module, which is connected to the control terminal of the pneumatic diaphragm valve and is used to provide power gas to the pneumatic diaphragm valve.

3. The gas control system for offline cleaning and pressure holding testing of the excimer laser discharge cavity according to claim 1, characterized in that, The controllable valve includes a solenoid valve; the control module is used to drive the solenoid valve to open and close via an electrical signal.

4. The gas control system for offline cleaning and pressure holding testing of the excimer laser discharge cavity according to claim 2, characterized in that, The gas path assembly is also equipped with a pressure regulating valve, which is used to regulate the input pressure of the process gas.

5. The gas control system for offline cleaning and pressure holding testing of the excimer laser discharge cavity according to claim 2, characterized in that, The gas path assembly is also provided with a flow limiting element, which is located on the path from the process gas path module to the discharge cavity to stabilize the charging gas flow rate.

6. The gas control system for offline cleaning and pressure holding testing of the excimer laser discharge cavity according to claim 2, characterized in that, The gas path assembly is also equipped with a one-way valve, which is used to prevent gas from flowing backward.

7. The gas control system for offline cleaning and pressure holding testing of the excimer laser discharge cavity according to claim 2, characterized in that, The gas circuit assembly is also equipped with a safety valve, which is used to automatically open and release pressure when the gas pressure exceeds a set value.

8. The gas control system for offline cleaning and pressure holding testing of the excimer laser discharge cavity according to claim 1, characterized in that, The control module is configured to record the pressure change data of the pressure sensor within a preset time period, and determine whether there is a leak in the discharge chamber based on the pressure change data.

9. The gas control system for offline cleaning and pressure holding testing of the excimer laser discharge cavity according to any one of claims 1 to 8, characterized in that, The discharge chamber is either a first type of discharge chamber or a second type of discharge chamber; the first type of discharge chamber has an independent air inlet and an air outlet, and the second type of discharge chamber has a shared air inlet and an air outlet; the gas path assembly has a first gas path connection method corresponding to the first type of discharge chamber and a second gas path connection method corresponding to the second type of discharge chamber.

10. The gas control system for offline cleaning and pressure holding testing of the excimer laser discharge cavity according to claim 9, characterized in that, The control module stores a first control logic corresponding to the first air path connection method and a second control logic corresponding to the second air path connection method; the first control logic and the second control logic have different opening and closing timing and / or pressure parameters for the controllable valve.

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