Mother-son ring reverse mold device

Abstract

The invention relates to the field of wafer processing, in particular to a primary and secondary ring reverse mold device which comprises a feeding mechanism, a feeding and discharging mechanism, a reverse mold mechanism and a primary and secondary ring recycling mechanism. The reverse mold mechanism comprises a rotating seat and a lifting reverse mold assembly, the rotating seat is provided with a feeding station, a reverse mold station, a rolling cutting station and a feeding and discharging station which are sequentially distributed on the circumference, and the lifting reverse mold assembly is arranged above the reverse mold station; the loading and unloading mechanism transports the empty primary and secondary rings to a loading and unloading station, and the rotating seat rotates; the feeding mechanism transports the primary and secondary rings with the wafers to a feeding station, and the rotating seat rotates; the child-mother ring recycling mechanism clamps upper-layer child-mother rings and splits and recycles the child-mother rings, and the rotating seat rotates; and the loading and unloading mechanism transports and unloads the primary and secondary rings subjected to mold reversing, so that the mold reversing process of the primary and secondary rings is realized.

Description

Technical Field

[0001] This invention relates to the field of wafer processing, and more specifically to a mother-daughter ring casting device. Background Technology

[0002] A wafer is the core foundation of the semiconductor industry, essentially a thin, extremely pure, and structurally precise single-crystal silicon wafer. The manufacturing process begins with silicon dioxide, the most common element in nature, which is reduced at high temperatures to extract polycrystalline silicon. This polycrystalline silicon is then melted into cylindrical single-crystal ingots using the Czochralski or zone melting methods—a step akin to "reorganizing" scattered silicon atoms into a perfect single crystal with a regular crystal structure. The wafer processing mainly includes deoxidation and purification, processing steps, and probing steps. The basic steps of the processing steps involve first cleaning the wafer appropriately, then performing oxidation and chemical vapor deposition on its surface, followed by repeated steps such as coating, exposure, development, etching, ion implantation, and metal sputtering, ultimately completing the fabrication of multiple layers of circuits and components on the wafer. During processing, the wafer needs to be transferred to a specific carrier for subsequent processing. For example, before IPC etching, the wafer needs to be transferred to a specific tray, and the entire tray carrying the wafer is placed in a plasma etching machine for etching.

[0003] Wafer casting is a key process in semiconductor manufacturing for wafer flipping, die transfer, or film layer renewal. Its core lies in the synergistic effect of precision mechanical control and thermoforming technology to completely transfer the wafer or die from the original substrate to a new substrate, while ensuring die integrity, positional accuracy, and film adhesion during processing. However, existing casting equipment is primarily designed for metal rings and is not suitable for the mother-daughter ring casting process. Summary of the Invention

[0004] The purpose of this invention is to provide a molding device for male and female rings, which aims to improve the problem that existing molding equipment is mainly designed for iron rings and cannot be adapted to the molding process of male and female rings.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A mother-daughter ring molding device includes a feeding mechanism, a loading and unloading mechanism, a molding mechanism, and a mother-daughter ring recycling mechanism; the molding mechanism includes a rotating base and a lifting molding assembly, the rotating base is provided with a loading station, a molding station, a rolling and cutting station, and a loading and unloading station arranged in sequence around the circumference, and the lifting molding assembly is disposed above the molding station; The material receiving mechanism includes a material receiving conveying component and a material receiving carrying component, with both ends of the material receiving conveying component extending above the material receiving carrying component and the loading station, respectively. The loading and unloading mechanism includes a loading and unloading transport component, an empty ring bearing component, a unloading transport component, and an unloading bearing component. The two ends of the loading and unloading transport component extend above the empty ring bearing component and the loading and unloading station, respectively. An unloading platform is provided below the loading and unloading transport component, and the unloading transport component is located between the unloading platform and the unloading bearing component. The mother-daughter ring recycling mechanism includes a recycling slide rail and a split recycling assembly; both ends of the recycling slide rail extend to the top of the rolling and cutting station and the split recycling assembly, and a rotary lifting assembly and a recycling lifting clamp are movably arranged on the recycling slide rail. The drive end of the rotary lifting assembly is set downward and is connected to the rolling assembly and the cutting assembly.

[0006] Furthermore, the material conveying assembly includes a first material receiving slide rail, a second material receiving slide rail, and a transfer platform; the transfer platform is provided with a transfer slide rail, a transfer seat is movably disposed on the transfer slide rail, and the transfer platform is provided with a first workstation and a second workstation arranged in sequence, the first workstation and the second workstation being arranged on the extension path of the transfer slide rail. The two ends of the first material receiving slide rail extend above the material receiving component and above the first work station, respectively, and a material receiving lifting clamp is movably mounted on the first material receiving slide rail; the two ends of the second material receiving slide rail extend above the second work station and the loading work station, respectively, and a loading lifting clamp is movably mounted on the second material receiving slide rail; the first material receiving slide rail and the second material receiving slide rail are distributed in an "L" shape.

[0007] Furthermore, the loading and unloading transport assembly includes a loading and unloading slide rail and a loading and unloading lifting clamp, wherein the loading and unloading lifting clamp is movably mounted on the loading and unloading slide rail; The two ends of the loading and unloading slide rails extend above the empty ring bearing assembly and the loading and unloading station, respectively. The loading and unloading slide rails correspond to the positions of the first material receiving slide rails and are parallel to each other. The empty ring bearing assembly is located on one side of the material receiving assembly.

[0008] Furthermore, a conveying mechanism is provided on one side of the rotating seat. The conveying mechanism includes a conveying slide rail, on which a lifting suction cup assembly is movably mounted. The conveying slide rail drives the lifting suction cup assembly to reciprocate linearly above the loading and unloading station. The suction end of the lifting suction cup assembly extends downward and adsorbs the partition. The shape of the spacer matches the shape of the mother and daughter rings, and a clearance channel is provided in the middle of the spacer, which corresponds to the position of the wafer on the mother and daughter rings.

[0009] Furthermore, the unloading platform is provided with an unloading slide rail, and a flipping component is movably mounted on the unloading slide rail; The unloading and transporting assembly includes an unloading robotic arm and a placement platform. The placement platform is located on one side of the unloading platform and at one end of the unloading slide rail. The height of the placement platform is lower than the height of the unloading platform. The unloading robotic arm is located on one side of the placement platform.

[0010] Furthermore, the incoming material carrier component, the empty ring carrier component, and the unloading carrier component are arranged in a row at intervals, and the arrangement direction of the incoming material carrier component, the empty ring carrier component, and the unloading carrier component is perpendicular to the extension direction of the loading and unloading slide rails. The unloading platform, the anti-slip platform, and the unloading robotic arm are arranged in a row at intervals, and the arrangement direction of the unloading platform, the anti-slip platform, and the unloading robotic arm is the same as the arrangement direction of the incoming material bearing assembly, the empty ring bearing assembly, and the unloading bearing assembly.

[0011] Furthermore, the splitting and recycling assembly includes a film-cutting unit, an inner ring recycling unit, an outer ring recycling unit, and a recycling clamping unit; The outer ring recycling unit, the film cutting unit, and the inner ring recycling unit are arranged in a row at intervals. The film cutting unit is located below one end of the recycling slide rail. The recycling clamping unit includes a clamping slide rail. The extension direction of the clamping slide rail is the same as the extension direction of the outer ring recycling unit, the film cutting unit, and the inner ring recycling unit, and both ends extend to the sides of the outer ring recycling unit and the inner ring recycling unit. A clamping lifting fixture is movably arranged on the clamping slide rail. The clamping lifting fixture switches the position of the molded mother and daughter rings sequentially between the film cutting unit, the inner ring recycling unit, and the outer ring recycling unit.

[0012] Furthermore, the outer ring recycling unit, the film cutting unit, and the inner ring recycling unit are arranged in the same direction as the extension direction of the loading and unloading slide rails, and the unloading bearing assembly is located in the arrangement direction of the outer ring recycling unit, the film cutting unit, and the inner ring recycling unit.

[0013] Furthermore, a visual inspection component is provided below the first material receiving slide rail, and a barcode scanning camera is provided on the first material receiving slide rail.

[0014] The visual inspection component located below performs visual inspection on the mother and daughter rings with wafers held by the incoming material lifting fixture to prevent defective products from entering the casting process. The scanning camera scans the mother and daughter rings with wafers and records each mother and daughter ring.

[0015] Furthermore, the rotating base includes a rotating drive base, the driving end of the rotating drive base is arranged facing upward and is connected to a rotating plate. The loading station, molding station, rolling and cutting station and loading / unloading station are arranged on the rotating plate and are respectively located at two mutually perpendicular diameter ends of the rotating plate. The loading station, molding station, rolling and cutting station, and loading / unloading station are all equipped with a bearing plate. The bearing plate supports the mother and daughter rings. The edge of the bearing plate is provided with a clearance notch, which corresponds to the position of the gripper of the recovery lifting fixture.

[0016] By adopting the above technical solution, the present invention has the following advantages compared with the prior art: The incoming material carrier assembly, the empty ring carrier assembly, and the unloading carrier assembly respectively carry the wafer-bearing mother-daughter ring, the empty mother-daughter ring, and the molded mother-daughter ring; the unloading and loading transport assembly transports the empty mother-daughter ring to the unloading and loading station, and the rotating seat rotates to transport the empty mother-daughter ring to the loading station; the incoming material transport assembly transports the wafer-bearing mother-daughter ring to the loading station, where the wafer-bearing mother-daughter ring and the empty mother-daughter ring are stacked, i.e., the wafer-bearing mother-daughter ring is the upper layer and the empty mother-daughter ring is the lower layer; the rotating seat rotates to transport the stacked mother-daughter ring to the molding station, and the lifting molding assembly descends to press down the diaphragm of the mother-daughter ring for molding; the rotating seat rotates to transport the molded mother-daughter ring to the roll forming and cutting station, and the rotating lifting assembly... The descending component drives the rolling component and the cutting component to move downwards. The rolling component rolls the film to ensure that the wafer is adsorbed on the film of the empty nucleus ring. The cutting component cuts the film of the upper nucleus ring without cutting it off, which facilitates the tearing of the upper film. The recovery lifting fixture picks up the cut upper nucleus ring and transports it to the splitting and recycling component for splitting and recycling. The rotating seat rotates and transports the molded nucleus ring to the loading and unloading station, that is, transports the lower nucleus ring to the loading and unloading station. The loading and unloading transport component transports the molded nucleus ring to the unloading platform. The unloading transport component transports the molded nucleus ring to the unloading carrier component, realizing the molding process of the nucleus ring. Attached Figure Description

[0017] Figure 1 This is a top view of the male and female ring molding device of the present invention; Figure 2 This is a first structural schematic diagram of the mother-daughter ring molding device of the present invention; Figure 3 This is a schematic diagram of the second structure of the mother-daughter ring molding device described in this invention; Figure 4 This is a schematic diagram of the molding mechanism of the mother-daughter ring molding device described in this invention; Figure 5 This is a schematic diagram of the partial structure of the mother-daughter ring recycling mechanism of the mother-daughter ring molding device of the present invention; Figure 6 This is a front view of the part of the structure of the mother-daughter ring recycling mechanism of the mother-daughter ring molding device of the present invention; Figure 7 This is a schematic diagram of the disassembly and recycling component structure of the mother-daughter ring molding device described in this invention; Figure 8 This is a schematic diagram of the material conveying component of the mother-daughter ring molding device of the present invention; Figure 9 This is a schematic diagram of the loading and unloading transport components of the mother-daughter ring molding device of the present invention; Figure 10 This is a schematic diagram of the stacking state of the mother and daughter rings at the loading station of the mother and daughter ring molding device of the present invention.

[0018] Explanation of reference numerals in the attached figures: 1. Incoming material mechanism; 11. Incoming material conveying assembly; 111. First incoming material slide rail; 112. Second incoming material slide rail; 113. Transfer platform; 1131. Transfer slide rail; 1132. First station; 1133. Second station; 1134. Transfer seat; 114. Incoming material lifting clamp; 1141. Incoming material slider; 1142. Incoming material cylinder; 1143. Incoming material seat; 1144. Incoming material gripper; 115. Loading lifting clamp; 1151. Loading rack; 1152. Loading cylinder; 1153. Loading suction cup; 116. Vision inspection assembly; 117. Barcode scanning camera; 12. Incoming material carrying assembly; 2. Loading and unloading mechanism; 21. Loading and unloading transport assembly; 211. Loading and unloading slide rail; 212. Loading and unloading lifting clamp; 22. Hollow ring bearing assembly; 23. Unloading transport assembly; 231. Unloading robotic arm; 232. Placement platform; 2321. Placement frame; 2322. Placement cylinder; 2323. Placement plate; 2324. Positioning block; 2325. Positioning ramp; 24. Unloading bearing assembly; 25. Unloading platform; 251. Unloading slide rail; 252. Tilting assembly; 2521. Tilting seat; 2522. Tilting cylinder; 2523. Tilting suction cup; 3. Molding mechanism; 31. Rotary seat; 311. Loading station; 312. Molding station; 313. Roll forming and cutting station; 314. Loading and unloading station; 315. Rotary drive base; 316. Rotary plate; 317. Bearing plate; 3171. Clearance notch; 32. Lifting molding assembly; 4. Mother-daughter ring recycling mechanism; 41. Recycling slide rail; 411. Recycling sliding seat; 42. Disassembly and recycling assembly; 421. Membrane cutting unit; 4211. Membrane cutting seat; 4212. Membrane cutting blade; 422. Inner ring recycling unit; 4221. Inner ring recycling rack; 4222. First placement position; 4223. Inner ring recycling channel; 4224. Inner ring pressing cylinder; 4225. Inner ring pressing annular plate; 423. Outer ring recycling unit; 4231. Outer ring recycling rack; 4232. Second placement position; 4233. Membrane recycling channel; 4234. Membrane recycling cylinder; 4235. Membrane recycling annular plate; 424. Recycling clamping unit; 4241, clamping slide rail; 425, clamping lifting fixture; 4251, clamping sliding seat; 4252, clamping lifting cylinder; 4253, clamping seat; 4254, clamping cylinder; 4255, clamping gripper; 43, rotary lifting assembly; 431, rotary mounting seat; 432, rotary cylinder; 433, rotary mounting plate; 434, rotary motor; 435, drive wheel; 436, driven wheel; 437, transmission belt; 44, recycling lifting fixture; 45, rolling assembly; 451, roller; 452, connecting handle; 46, cutting assembly; 461, cutting mounting plate; 462, cutter; 5. Handling mechanism; 51. Handling slide rail; 52. Lifting suction cup assembly; 521. Suction cup base; 522. Handling cylinder; 523. Handling plate; 524. Handling suction cup; 6. Partition; 61. Clearance passage; 7. Mother-daughter ring with wafer; 71. Film; 8. Empty mother-daughter ring; 9. Wafer; 10. Mother-daughter ring after casting. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0020] Additionally, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" are all based on the orientation or positional relationship shown in the accompanying drawings. They are merely for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element of the present invention must have a specific orientation. Therefore, they should not be construed as limitations on the present invention.

[0021] When an element is referred to as being "fixed to," "set on," or "contained on" another element, it can be directly on or indirectly on that other element. When an element is referred to as being "connected to," it can be directly connected to or indirectly connected to that other element.

[0022] Unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances. Example

[0023] Please refer to Figure 1-10 As shown, this embodiment provides a mother-daughter ring molding device, including a feeding mechanism 1, a loading and unloading mechanism 2, a molding mechanism 3, and a mother-daughter ring recycling mechanism 4; the molding mechanism 3 includes a rotating seat 31 and a lifting molding assembly 32. The rotating seat 31 is provided with a loading station 311, a molding station 312, a rolling and cutting station 313, and a loading and unloading station 314 arranged in sequence around the circumference. The lifting molding assembly 32 is arranged above the molding station 312.

[0024] The material receiving mechanism 1 includes a material receiving conveying component 11 and a material receiving carrying component 12. The two ends of the material receiving conveying component 11 extend above the material receiving carrying component 12 and the loading station 311, respectively.

[0025] The loading and unloading mechanism 2 includes a loading and unloading transport component 21, an empty ring bearing component 22, a unloading transport component 23, and an unloading bearing component 24. The two ends of the loading and unloading transport component 21 extend above the empty ring bearing component 22 and the loading and unloading station 314, respectively. An unloading platform 25 is provided below the loading and unloading transport component 21, and the unloading transport component 23 is located between the unloading platform 25 and the unloading bearing component 24.

[0026] The mother-daughter ring recycling mechanism 4 includes a recycling slide rail 41 and a split recycling component 42. Both ends of the recycling slide rail 41 extend above the rolling and cutting station 313 and the split recycling component 42. A rotary lifting component 43 and a recycling lifting clamp 44 are movably arranged on the recycling slide rail 41. The drive end of the rotary lifting component 43 is arranged downward and connected to the rolling component 45 and the cutting component 46.

[0027] The incoming material carrier assembly 12, the empty ring carrier assembly 22, and the unloading carrier assembly 24 respectively carry the wafer-bearing mother-daughter ring 7, the empty mother-daughter ring 8, and the molded mother-daughter ring 10; the loading and unloading transport assembly 21 transports the empty mother-daughter ring 8 to the loading and unloading station 314, and the rotating seat 31 rotates to transport the empty mother-daughter ring 8 to the loading station 311; the incoming material transport assembly transports the wafer-bearing mother-daughter ring 7 to the loading station 311, and the wafer-bearing mother-daughter ring 7 and the empty mother-daughter ring 8 are stacked, that is, the wafer-bearing mother-daughter ring 7 is the upper layer mother-daughter ring, and the empty mother-daughter ring 8 is the lower layer mother-daughter ring; the rotating seat 31 rotates to transport the stacked mother-daughter rings to the molding station 312, and the lifting molding assembly 32 descends to press down the diaphragm 71 of the mother-daughter ring for molding; the rotating seat 31 rotates to transport the molded mother-daughter ring 10 to the rolling and cutting station 313, and the rotating lifting assembly 32 moves down to press down the diaphragm 71 of the mother-daughter ring for molding; the rotating seat 31 rotates to transport the molded mother-daughter ring 10 to the rolling and cutting station 313, and the rotating lifting assembly 32 moves down to press down the diaphragm 71 of the mother-daughter ring for molding. The descending component 43 drives the rolling component 45 and the cutting component 46 to descend. The rolling component 45 rolls the diaphragm 71 to ensure that the wafer 9 is adsorbed on the diaphragm 71 of the empty mother-daughter ring 8. The cutting component 46 cuts the diaphragm 71 of the upper mother-daughter ring without cutting it off, which facilitates the tearing of the upper diaphragm 71. The recovery lifting fixture 44 clamps the cut upper mother-daughter ring and transports it to the splitting and recycling component 42 for splitting and recycling the mother-daughter ring. The rotating seat 31 rotates to transport the molded mother-daughter ring 10 to the loading and unloading station 314, that is, to transport the lower mother-daughter ring to the loading and unloading station 314. The loading and unloading transport component 21 transports the molded mother-daughter ring 10 to the unloading platform 25. The unloading transport component 23 transports the molded mother-daughter ring 10 to the unloading support component 24 to realize the molding process of the mother-daughter ring.

[0028] Please refer to Figure 1-3 and Figure 8 As shown, the material conveying assembly 11 includes a first material receiving slide rail 111, a second material receiving slide rail 112, and a transfer platform 113; the transfer platform 113 is provided with a transfer slide rail 1131, a transfer seat 1134 is movably arranged on the transfer slide rail 1131, and a first workstation 1132 and a second workstation 1133 are arranged sequentially on the transfer platform 113. The first workstation 1132 and the second workstation 1133 are arranged on the extension path of the transfer slide rail 1131.

[0029] The two ends of the first material receiving slide rail 111 extend above the material receiving bearing assembly 12 and the first station 1132, respectively, and a material receiving lifting clamp 114 is movably arranged on the first material receiving slide rail 111; the two ends of the second material receiving slide rail 112 extend above the second station 1133 and the loading station 311, respectively, and a loading lifting clamp 115 is movably arranged on the second material receiving slide rail 112; the first material receiving slide rail 111 and the second material receiving slide rail 112 are distributed in an "L" shape.

[0030] The mutually perpendicular first and second incoming material guide rails 111 and 112 minimize the space occupied by the incoming material transfer assembly 11, thereby reducing the overall size of the molding device. The incoming material lifting fixture 114 clamps the wafer-bearing ring 7 and places it on the transfer seat 1134 located at the first station 1132. The transfer seat 1134 moves to the second station 1133 via the transfer guide rail 1131. The loading lifting fixture 115 clamps the wafer-bearing ring 7 at the second station 1133 and transports it to the loading station 311, realizing the loading of the wafer-bearing ring 7.

[0031] Specifically, the material receiving lifting fixture 114 includes a material receiving slider 1141, a material receiving cylinder 1142 fixed on the material receiving slider 1141, a material receiving seat 1143 connected to the drive end of the material receiving cylinder 1142, and a material receiving gripper 1144 fixed on the material receiving seat 1143. The material receiving slider 1141 drives the material receiving gripper 1144 to move, and the material receiving cylinder 1142 drives the material receiving gripper 1144 to move vertically, thereby realizing the clamping, transportation, and placement of the wafer-bearing ring 7. The loading lifting fixture 115 includes a loading frame 1151, which is sleeved on and movably connected to the second material receiving slide rail 112. A loading cylinder 1152 is provided at the bottom of the loading frame 1151, with the drive end of the loading cylinder 1152 facing downwards and equipped with a loading suction cup 1153. The feeding rack 1151 drives the feeding suction cup 1153 to move, and the feeding cylinder 1152 drives the feeding suction cup 1153 to rise and fall in the vertical direction to pick up and feed the male and female rings.

[0032] A vision inspection component 116 is installed below the first incoming material slide rail 111, and a barcode scanning camera 117 is installed on the first incoming material slide rail 111. The vision inspection component 116, located below, performs visual inspection on the wafer-bearing ring 7 held by the incoming material lifting fixture 114 to prevent defective products from entering the casting process. The barcode scanning camera scans the wafer-bearing ring 7 and records each ring.

[0033] Please refer to Figure 1-3 and Figure 9As shown, the loading and unloading transport assembly 21 includes a loading and unloading slide rail 211 and a loading and unloading lifting clamp 212, which is movably mounted on the loading and unloading slide rail 211. The two ends of the loading and unloading slide rail 211 extend above the empty ring support assembly 22 and the loading and unloading station 314, respectively. The loading and unloading slide rail 211 corresponds to the position of the first incoming material slide rail 111 and is parallel to each other. The empty ring support assembly 22 is located on one side of the incoming material support assembly 12. The parallelism between the loading and unloading slide rail 211 and the first incoming material slide rail 111 ensures that each transport slide rail of the molding device is located on the periphery of the molding mechanism 3, and is in a mutually perpendicular and parallel state. This improves the overall space utilization of the device while meeting the transport requirements of the wafer-bearing mother-daughter ring 7 and the empty mother-daughter ring 8, minimizing the footprint of the molding device. In this embodiment, the structure of the loading and unloading lifting clamp 212 is the same as that of the incoming material lifting clamp 114.

[0034] Please refer to Figure 1-4 As shown, a conveying mechanism 5 is provided on one side of the rotating base 31. The conveying mechanism 5 includes a conveying slide rail 51, on which a lifting suction cup assembly 52 is movably mounted. The conveying slide rail 51 drives the lifting suction cup assembly 52 to perform reciprocating linear motion above the loading / unloading station 314. The suction end of the lifting suction cup assembly 52 extends downward and adsorbs the spacer 6. The shape of the spacer 6 matches the shape of the mother and daughter rings. A clearance channel 61 is opened in the middle of the spacer 6, and the clearance channel 61 corresponds to the position of the wafer 9 on the mother and daughter rings. The lifting suction cup assembly 52 adsorbs and transports the partition 6. Before the empty female ring 8 is loaded, the lifting suction cup assembly 52 transports the partition 6 away from the loading and unloading station 314. After the loading and unloading lifting clamp 212 clamps the empty female ring 8 onto the loading and unloading station 314, the lifting suction cup assembly 52 transports the partition 6 above the loading and unloading station 314 and places the partition 6 above the empty female ring 8. The partition 6 moves synchronously with the empty female ring 8 to the loading station 311.

[0035] The loading lifting fixture 115 transports the mother-daughter ring with wafer 9 to the loading station 311, where it is stacked with the spacer 6 and the empty mother-daughter ring 8. Please refer to [reference needed]. Figure 10As shown, at this time, the wafer-bearing ring 7, spacer 6, and empty ring 8 are stacked sequentially from top to bottom and moved to the molding station 312 for molding under the drive of the rotating seat 31. They then move to the rolling and cutting station 313 for rolling and cutting the diaphragm 71 of the upper ring. The clearance channel 61 of the spacer 6 clearances the wafer 9, ensuring that the wafer 9 can accurately move onto the diaphragm 71 of the lower ring. The spacer 6 also blocks the edges of the upper and lower rings, preventing damage to the diaphragm 71 of the lower ring during the cutting process of the upper ring, thus improving molding efficiency. Furthermore, it reduces the adhesion area of ​​the diaphragm 71 between the upper and lower rings, facilitating separation of the upper and lower rings at the rolling and cutting station 313.

[0036] After separation, the lower layer of mother and daughter rings and spacer 6 move to the loading / unloading station 314 under the drive of the rotary seat 31. The lifting suction cup assembly 52 adsorbs the upper layer spacer 6 and drives it away from the loading / unloading station 314, thus separating the molded mother and daughter rings 10. The loading / unloading lifting fixture 212 clamps the bottom layer of molded mother and daughter rings 10 and transports it to the unloading platform 25 for unloading.

[0037] Please refer to Figure 4 As shown, specifically, the lifting suction cup assembly 52 includes a suction cup base 521, which is movably mounted on the transport slide rail 51. A transport cylinder 522 is fixed on the suction cup base 521, with its drive end facing upwards and driving a transport plate 523 extending outwards. The free end of the transport plate 523 extends above the loading / unloading station 314 and is fixed with a transport suction cup 524. The transport suction cup 524 adsorbs and transports the partitions 6 in the loading / unloading station 314, facilitating the clamping and unloading of the molded male and female rings 10.

[0038] The unloading platform 25 is equipped with an unloading slide rail 251, and a flipping component 252 is movably mounted on the unloading slide rail 251. The unloading transport component 23 includes an unloading robotic arm 231 and a placement platform 232. The placement platform 232 is located on one side of the unloading platform 25 and at one end of the unloading slide rail 251. The height of the placement platform 232 is lower than the height of the unloading platform 25. The unloading robotic arm 231 is located on one side of the placement platform 232. The molded female and male rings 10 are clamped by the unloading lifting fixture 212 from the unloading station 314 onto the rotating component. The rotating component moves to above the placement platform 232 via the unloading slide rail 251, flips the molded female and male rings 10 180°, and places them on the placement platform 232. The unloading robotic arm 231 clamps the flipped female and male rings, marks them, and transports them to the unloading carrier component 24.

[0039] Please refer to Figure 9As shown, specifically, the flipping assembly 252 includes a flipping seat 2521, which is movably mounted on the unloading slide rail 251. A flipping cylinder 2522 is mounted on the flipping seat 2521, and the drive end of the flipping cylinder 2522 is connected to a flipping suction cup 2523. During the unloading process, the suction surface of the flipping suction cup 2523 faces upwards, adsorbing the molded male and female rings 10 held by the loading / unloading lifting fixture 212. The flipping seat 2521 drives the flipping suction cup 2523 to move towards the placement platform 232. Until the flipping suction cup 2523 completely protrudes from the unloading platform 25, the flipping cylinder 2522 drives the flipping suction cup 2523 to flip 180° and releases the adsorption force on the male and female rings, allowing the molded male and female rings 10 to fall onto the placement platform 232 for the unloading robotic arm 231 to unload the rings. Furthermore, the placement stage 232 includes a placement frame 2321, the height of which is lower than the height of the unloading stage 25. A placement cylinder 2322 is fixed on the placement frame 2321, with its drive end facing upwards and driving a placement plate 2323. The placement cylinder 2322 drives the placement plate 2323 upwards to support the mother and daughter rings, preventing them from falling and damaging the wafer 9. The placement plate 2323 has four circumferentially distributed positioning blocks 2324, each with a positioning ramp 2325 on its top surface. The positioning blocks 2324 are located around the mother and daughter rings and contact their tops. The positioning blocks 2324 position the mother and daughter rings, ensuring their accurate placement and facilitating accurate unloading by the unloading robot arm 231.

[0040] The incoming material carrier assembly 12, the empty ring carrier assembly 22, and the unloading carrier assembly 24 are arranged in a row at intervals, and their arrangement direction is perpendicular to the extension direction of the loading and unloading slide rail 211. The unloading platform 25, the anti-loading platform, and the unloading robotic arm 231 are arranged in a row at intervals, and their arrangement direction is the same as that of the incoming material carrier assembly 12, the empty ring carrier assembly 22, and the unloading carrier assembly 24. Specifically, the arrangement directions of the unloading platform 25, the anti-unloading platform, and the unloading robotic arm 231, as well as the arrangement directions of the incoming material carrier assembly 12, the empty ring carrier assembly 22, and the unloading carrier assembly 24, are all parallel to the extension direction of the second incoming material slide rail 112. This ensures that the movement paths of the wafer-carrying ring 7, the empty ring 8, and the rings after molding are all horizontally and vertically aligned, avoiding complex paths and reducing the overall complexity of the molding device. By distributing the components parallel or perpendicularly to each other, the space utilization rate of the molding device is maximized.

[0041] Please refer to Figure 1-3 and Figure 7As shown, the splitting and recycling assembly 42 includes a film-cutting unit 421, an inner ring recycling unit 422, an outer ring recycling unit 423, and a recycling clamping unit 424. The outer ring recycling unit 423, the film-cutting unit 421, and the inner ring recycling unit 422 are arranged in a row at intervals, with the film-cutting unit 421 located below one end of the recycling slide rail 41. The recycling clamping unit 424 includes a clamping slide rail 4241, whose extension direction is the same as that of the outer ring recycling unit 423, the film-cutting unit 421, and the inner ring recycling unit 422, and whose two ends extend to the sides of the outer ring recycling unit 423 and the inner ring recycling unit 422. A clamping lifting fixture 425 is movably mounted on the clamping slide rail 4241, and the clamping lifting fixture 425 switches the position of the molded mother and daughter rings 10 sequentially between the film-cutting unit 421, the inner ring recycling unit 422, and the outer ring recycling unit 423. The recovery lifting clamp 44 clamps the molded mother and daughter rings 10 and transports them to the film cutting unit 421. The film cutting unit 421 cuts the uncut membrane 71 of the mother and daughter rings, separating the center of the membrane 71 from the mother and daughter rings. The clamping lifting clamp 425 clamps the cut mother and daughter rings and transports them to the inner ring recovery unit 422. The inner ring recovery unit 422 drives the inner ring and outer ring to separate and recover the inner ring. The clamping lifting clamp 425 clamps the outer ring and transports it to the outer ring recovery unit 423. The outer ring recovery unit 423 separates the outer ring from the edge of the membrane 71, thereby recovering the outer ring.

[0042] The outer ring recycling unit 423, the film cutting unit 421, and the inner ring recycling unit 422 are arranged in the same direction as the extension direction of the loading and unloading slide rail 211. The unloading support assembly 24 is located in the same direction as the outer ring recycling unit 423, the film cutting unit 421, and the inner ring recycling unit 422. The outer ring recycling unit 423, the film cutting unit 421, the inner ring recycling unit 422, and the unloading support assembly 24 form a row that forms three parallel distribution lines with the first incoming slide rail 111, the incoming support assembly 12, the loading and unloading slide rail 211, and the empty ring support assembly 22, maximizing the overall space utilization of the molding device.

[0043] Please refer to Figure 7As shown, specifically, the clamping and lifting fixture 425 includes a clamping sliding seat 4251, which is movably mounted on the clamping slide rail 4241. A clamping and lifting cylinder 4252 is fixed on the clamping sliding seat 4251. The driving end of the clamping and lifting cylinder 4252 faces upwards and is connected to a clamping seat 4253. A clamping cylinder 4254 is fixed inside the clamping seat 4253. The driving end of the clamping cylinder 4254 faces the side of the film cutting unit 421, the inner ring recovery unit 422, and the outer ring recovery unit 423, and is connected to a clamping jaw 4255. The clamping sliding seat 4251 adjusts the position of the clamping jaw 4255. The clamping and lifting cylinder 4252 drives the clamping jaw 4255 to perform upward position transfer and downward placement of the female and male rings after clamping. The clamping cylinder 4254 drives the clamping jaw 4255 to clamp the female and male rings.

[0044] The film cutting unit 421 includes a film cutting seat 4211, which supports the mother and daughter rings. A film cutting cutter 4212 is movably disposed below the film cutting seat 4211. The film cutting cutter 4212 reciprocates linearly below the film cutting seat 4211 to completely cut the uncut film sheet 71 of the upper mother and daughter rings after molding. The inner ring recycling unit 422 includes an inner ring recycling rack 4221. A first placement position 4222 is provided on the inner ring recycling rack 4221. The cut mother and daughter rings are placed on the first placement position 4222. An inner ring recycling channel 4223 is opened on the first placement position 4222. An inner ring pressing cylinder 4224 is fixed on the inner ring recovery frame 4221. The driving end of the inner ring pressing cylinder 4224 faces downward and is equipped with an inner ring pressing annular plate 4225. The diameters of the inner ring pressing annular plate 4225 and the inner ring recovery channel 4223 are both matched with the diameter of the inner ring. The inner ring pressing cylinder 4224 drives the inner ring pressing annular plate 4225 downward, pressing down on the inner ring of the mother and daughter rings on the first placement position 4222, driving the inner ring and outer ring of the mother and daughter rings to separate. The inner ring passes through the inner ring recovery channel 4223, realizing the recovery of the inner ring. The outer ring recovery unit 423 includes an outer ring recovery frame 4231. The outer ring recovery frame 4231 is provided with a second placement position 4232. After the inner ring and outer ring are separated, the mother and daughter rings are clamped and transported to the second placement position 4232 by a lifting clamp 425. The second placement position 4232 is provided with a diaphragm recovery channel 4233. A membrane recovery cylinder 4234 is positioned above the second placement position 4232, with its drive end facing downwards and a membrane recovery annular plate 4235 attached thereto. The membrane recovery cylinder 4234 drives the annular plate 4235 downwards to press down on the annular membrane 71 adhered to the bottom surface of the outer ring, separating it from the outer ring. During the membrane cutting process, only the central area of ​​the membrane 71 is cut off; the edge area of ​​the membrane 71 adheres to the bottom surface of the outer ring. The membrane recovery annular plate 4235 presses down on the edge area of ​​the membrane 71 to separate it from the outer ring, facilitating its recovery.

[0045] Please refer to Figure 5 and Figure 6 As shown, specifically, a recovery sliding seat 411 is movably mounted on the recovery slide rail 41; the rotary lifting assembly 43 includes a rotary mounting base 431, and both the rotary mounting base 431 and the recovery lifting clamp 44 are fixed to the bottom of the recovery sliding seat 411. A rotary cylinder 432 is fixed on the rotary mounting base 431, with the drive end of the rotary cylinder 432 facing downwards and driving a rotary mounting plate 433. A rotary motor 434 is fixed on the rotary mounting plate 433, with the drive end of the rotary motor 434 passing through the rotary mounting plate 433 and driving a drive wheel 435. A driven wheel 436 is mounted on the other end of the bottom surface of the rotary mounting plate 433 via a rotating shaft. A transmission belt 437 is wound around the circumference of the driven wheel 436 and the drive wheel 435. The rotary motor 434 drives the drive wheel 435 to rotate, and the drive wheel 435 drives the driven wheel 436 to rotate synchronously via the transmission belt 437. The rolling assembly 45 includes a roller 451 and a connecting handle 452 connected to the center of the top of the roller 451; the cutting assembly 46 includes a cutting mounting plate 461 and a cutter 462 fixed on the cutting mounting plate 461. The cutting mounting plate 461 is horizontally fixed to the bottom surface of the driven wheel 436, and the top end of the connecting handle 452 is connected to the center of the driven wheel 436 and is vertically arranged. The free end of the cutting mounting plate 461 extends outward and protrudes from the end of the roller 451, and the cutter 462 is vertically connected to the free end of the cutting mounting plate 461, with the bottom end of the cutter 462 on the same horizontal plane as the bottom of the roller 451. The driven wheel 436 drives the roller 451 to rotate and roll the diaphragm 71 to ensure that the wafer 9 is fully molded. At the same time, the driven wheel 436 drives the cutter 462 to cut the edge of the diaphragm 71 without cutting it off around the roller 451, which facilitates the separation of the upper and lower diaphragms 71.

[0046] Please refer to Figure 4As shown, the rotating base 31 includes a rotating drive base 315, with the drive end of the rotating drive base 315 facing upwards and connected to a rotating plate 316. A loading station 311, a molding station 312, a rolling and cutting station 313, and a loading / unloading station 314 are located on the rotating plate 316, at two mutually perpendicular diameter ends of the rotating plate 316. Each of the loading station 311, molding station 312, rolling and cutting station 313, and loading / unloading station 314 is equipped with a support plate 317. The support plate 317 supports the male and female rings. A clearance notch 3171 is provided on the edge of the support plate 317, corresponding to the gripper position of the recovery lifting fixture 44. The loading station 311, the molding station 312, the rolling and cutting station 313, and the loading / unloading station 314 are arranged on the rotating plate 316, respectively located at the two mutually perpendicular diameter ends of the rotating plate 316. This ensures that the distance between two adjacent stations is equal, guaranteeing that each movement of the rotating plate 316 can accurately drive the male and female rings into the next station, thus improving the stability of the molding process. The bearing plate 317 supports the male and female rings, improving their stability during rotation and ensuring the accuracy of their placement, thus ensuring the stable operation of the molding process. The clearance notch 3171 provides clearance for the grippers of the recovery lifting fixture 44, facilitating the recovery lifting fixture 44 to clamp and unload the male and female rings for recovery.

[0047] The above description is merely a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A molding device for male and female rings, characterized in that, It includes a material receiving mechanism, a loading and unloading mechanism, a molding mechanism, and a mother-daughter ring recycling mechanism; the molding mechanism includes a rotating base and a lifting molding assembly, the rotating base is provided with a loading station, a molding station, a rolling and cutting station and a loading and unloading station arranged in sequence around the circumference, and the lifting molding assembly is located above the molding station; The material receiving mechanism includes a material receiving conveying component and a material receiving carrying component, with both ends of the material receiving conveying component extending above the material receiving carrying component and the loading station, respectively. The loading and unloading mechanism includes a loading and unloading transport component, an empty ring bearing component, a unloading transport component, and an unloading bearing component. The two ends of the loading and unloading transport component extend above the empty ring bearing component and the loading and unloading station, respectively. An unloading platform is provided below the loading and unloading transport component, and the unloading transport component is located between the unloading platform and the unloading bearing component. The mother-daughter ring recycling mechanism includes a recycling slide rail and a split recycling assembly; both ends of the recycling slide rail extend to the top of the rolling and cutting station and the split recycling assembly, and a rotary lifting assembly and a recycling lifting clamp are movably arranged on the recycling slide rail. The drive end of the rotary lifting assembly is set downward and is connected to the rolling assembly and the cutting assembly.

2. The molding device for male and female rings according to claim 1, characterized in that: The material conveying assembly includes a first material receiving slide rail, a second material receiving slide rail, and a transfer platform; the transfer platform is provided with a transfer slide rail, and a transfer seat is movably disposed on the transfer slide rail; the transfer platform is provided with a first workstation and a second workstation arranged in sequence, and the first workstation and the second workstation are arranged on the extension path of the transfer slide rail. The first material receiving slide rail extends to the top of the material receiving component and the top of the first work station at both ends, and a material receiving lifting clamp is movably mounted on the first material receiving slide rail; the second material receiving slide rail extends to the top of the second work station and the loading work station at both ends, and a loading lifting clamp is movably mounted on the second material receiving slide rail; the first material receiving slide rail and the second material receiving slide rail are arranged in an "L" shape.

3. The molding device for male and female rings according to claim 2, characterized in that: The loading and unloading transport assembly includes a loading and unloading slide rail and a loading and unloading lifting clamp, wherein the loading and unloading lifting clamp is movably mounted on the loading and unloading slide rail; The two ends of the loading and unloading slide rails extend above the empty ring bearing assembly and the loading and unloading station, respectively. The loading and unloading slide rails correspond to the positions of the first material receiving slide rails and are parallel to each other. The empty ring bearing assembly is located on one side of the material receiving assembly.

4. The molding device for male and female rings according to claim 3, characterized in that: A conveying mechanism is provided on one side of the rotating seat. The conveying mechanism includes a conveying slide rail. A lifting suction cup assembly is movably mounted on the conveying slide rail. The conveying slide rail drives the lifting suction cup assembly to reciprocate linearly above the loading and unloading station. The suction end of the lifting suction cup assembly extends downward and adsorbs the partition. The shape of the spacer matches the shape of the mother and daughter rings, and a clearance channel is provided in the middle of the spacer, which corresponds to the position of the wafer on the mother and daughter rings.

5. The molding device for male and female rings according to claim 3, characterized in that: The unloading platform is equipped with an unloading slide rail, and a flipping component is movably mounted on the unloading slide rail; The unloading and transporting assembly includes an unloading robotic arm and a placement platform. The placement platform is located on one side of the unloading platform and at one end of the unloading slide rail. The height of the placement platform is lower than the height of the unloading platform. The unloading robotic arm is located on one side of the placement platform.

6. The molding device for male and female rings according to claim 5, characterized in that: The incoming material carrier assembly, the empty ring carrier assembly, and the unloading carrier assembly are arranged in a row at intervals, and the arrangement direction of the incoming material carrier assembly, the empty ring carrier assembly, and the unloading carrier assembly is perpendicular to the extension direction of the loading and unloading slide rails. The unloading platform, the anti-slip platform, and the unloading robotic arm are arranged in a row at intervals, and the arrangement direction of the unloading platform, the anti-slip platform, and the unloading robotic arm is the same as the arrangement direction of the incoming material bearing assembly, the empty ring bearing assembly, and the unloading bearing assembly.

7. The molding device for male and female rings according to claim 6, characterized in that: The splitting and recycling assembly includes a film cutting unit, an inner ring recycling unit, an outer ring recycling unit, and a recycling clamping unit; The outer ring recycling unit, the film cutting unit, and the inner ring recycling unit are arranged in a row at intervals. The film cutting unit is located below one end of the recycling slide rail. The recycling clamping unit includes a clamping slide rail. The extension direction of the clamping slide rail is the same as the extension direction of the outer ring recycling unit, the film cutting unit, and the inner ring recycling unit, and both ends extend to the sides of the outer ring recycling unit and the inner ring recycling unit. A clamping lifting fixture is movably arranged on the clamping slide rail. The clamping lifting fixture switches the position of the molded mother and daughter rings sequentially between the film cutting unit, the inner ring recycling unit, and the outer ring recycling unit.

8. The molding device for male and female rings according to claim 7, characterized in that: The outer ring recycling unit, the film cutting unit, and the inner ring recycling unit are arranged in the same direction as the extension direction of the loading and unloading slide rails, and the unloading bearing assembly is located in the arrangement direction of the outer ring recycling unit, the film cutting unit, and the inner ring recycling unit.

9. The molding device for male and female rings according to claim 2, characterized in that: A vision inspection component is provided below the first material receiving slide rail, and a barcode scanning camera is provided on the first material receiving slide rail; The visual inspection component located below performs visual inspection on the mother and daughter rings with wafers held by the incoming material lifting fixture to prevent defective products from entering the casting process. The scanning camera scans the mother and daughter rings with wafers and records each mother and daughter ring.

10. The molding device for male and female rings according to claim 1, characterized in that: The rotating base includes a rotating drive base, the driving end of which is arranged facing upward and is connected to a rotating plate. The loading station, molding station, rolling and cutting station and loading / unloading station are arranged on the rotating plate and are respectively located at two mutually perpendicular diameter ends of the rotating plate. The loading station, molding station, rolling and cutting station, and loading / unloading station are all equipped with a bearing plate. The bearing plate supports the mother and daughter rings. The edge of the bearing plate is provided with a clearance notch, which corresponds to the position of the gripper of the recovery lifting fixture.

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