Wafer clamp
By designing clamping components and sealing structures in the wafer jig, and using winding and edge compaction components to taut the sealing cloth to cover the slide, the problem of the slide not being able to be sealed after the wafer jig is fixed is solved, preventing jig damage and ensuring normal operation.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- 魏勐
- Filing Date
- 2026-02-24
- Publication Date
- 2026-05-19
AI Technical Summary
Existing wafer fixtures cannot seal the slide after the wafer is fixed, which leads to fixture damage.
A wafer jig including a clamping assembly and a sealing structure is designed. The clamping assembly, connected by a sliding groove, rolls up the sealing cloth after the wafer is fixed and lays it flat above the sliding groove. The rolling assembly and the edge compaction assembly ensure that the sealing cloth is taut and prevents residue from entering.
It effectively prevents residue from entering the clamping assembly, avoids damage to the clamping assembly, and ensures the normal operation of the clamping assembly.
Smart Images
Figure CN122069989A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of wafer processing auxiliary equipment technology, specifically wafer fixtures. Background Technology
[0002] In the rapid development of the semiconductor industry, wafers, as the core carrier of integrated circuit manufacturing, have seen their size continuously expand, becoming a significant indicator of technological progress in the industry. From the early 2-inch and 4-inch wafers to the widely used 12-inch and even larger wafers today, each leap in size has been accompanied by innovations and challenges in manufacturing processes. Especially in the wafer processing stage, wafer fixtures, as key equipment for supporting and fixing wafers, directly affect production efficiency and finished product quality through their performance and adaptability.
[0003] However, existing wafer chucks typically use three-jaw chucks to center and clamp the edges of the wafer. To ensure the normal movement of the jaws, grooves are cut into the worktable. However, during etching or grinding processes, a large amount of debris or waste liquid is generated. These residues can enter the three-jaw chuck through the grooves, affecting its normal use. The grooves cannot be sealed after the wafer is secured, leading to damage to the three-jaw chuck. Summary of the Invention
[0004] The purpose of this invention is to solve the problem of damage to the three-jaw chuck caused by the inability of existing wafer jigs to seal the groove after the wafer is fixed.
[0005] To achieve the above objectives, the present invention provides the following technical solution: A wafer fixture, comprising: A clamping assembly for clamping and fixing a wafer; the clamping assembly includes: a fixing member and multiple sets of clamping members, the upper end surface of the fixing member is provided with multiple sets of first sliding grooves evenly distributed along the axis, each set of clamping members is disposed in the first sliding groove and is slidably connected to the fixing member through the first sliding groove; A sealing structure, connected to the fixing member, is used to seal the first slide groove; the sealing structure includes: multiple sets of sealing cloth, each set of sealing cloth is laid above the first slide groove, and one end of the sealing cloth is fixedly connected to the end of the clamping member near the axis of the fixing member.
[0006] Preferably, the sealing structure further includes: Multiple sets of winding assemblies are connected to the sealing cloth for winding the sealing cloth; The second motor, the output end of which is connected to the winding assembly, is used to drive the winding assembly to operate; Multiple sets of edge compaction components are arranged parallel to the clamping member and connected to the sealing cloth.
[0007] Preferably, each group of the take-up components includes: A take-up drum is provided at the end of the sealing cloth away from the clamping member, so that the sealing cloth can be wound around the take-up drum; The bevel gear set consists of two identical sets of bevel gears, which are symmetrically arranged at both ends of the take-up drum and coaxially arranged with the take-up drum.
[0008] Preferably, each set of the edge compaction components includes: Two sets of guide members are symmetrically arranged on both sides of the clamping member and are fixedly connected to the clamping member; Two sets of sleeves are disposed above the sealing cloth and located between the guide and the take-up drum; Two sets of movable plates, one end of each set of movable plates is in contact with the guide member, and the other end extends into the interior of the sleeve and is slidably connected to the sleeve; Two sets of second elastic elements are provided, each set of second elastic elements being disposed between the sleeve and the movable plate.
[0009] Preferably, it further includes: a protective cover; the protective cover is disposed at the upper center position of the fixing member; one end of the protective cover is provided with multiple sets of protrusions, the protrusions are fixedly connected to the fixing member; there is a gap between two adjacent sets of protrusions, so that the seal is arranged in the gap.
[0010] Preferably, it further includes: a cleaning component; the cleaning component is connected to multiple sets of edge compaction components and is used to drive the edge compaction components to rotate in order to clean the residue above the sealing cloth.
[0011] Preferably, the cleaning component includes: A sealing ring is fitted onto the outside of the protective cover; multiple sets of slides are provided on the outside of the sealing ring, and the slides are slidably connected to the end of the sleeve away from the moving plate; Multiple sets of magnetic blocks, each set of magnetic blocks is disposed in the slide rail and is tightly fitted with the sleeve; A toothed ring is coaxially arranged with the sealing ring and located above the sealing ring; Multiple sets of connectors, each set of connectors having its two ends fixedly connected to the toothed ring and the sealing ring, respectively; The second gear is coaxially arranged with the gear ring; Multiple sets of first gears are disposed between the gear ring and the second gear, and are respectively meshed with the second gear and the gear ring; A support frame is disposed above the second gear and is rotatably connected to the shafts of the second gear and multiple sets of the first gears respectively; A third motor is located below the second gear, and the output end of the third motor is fixedly connected to the shaft of the second gear.
[0012] Preferably, the clamping assembly further includes: Multiple sets of wedges, one end of each set of wedges being fixedly connected to the clamping member; A movable component, the upper end face of which is provided with a conical cover; the inner wall of the conical cover is in contact with the side of the plurality of wedges that are far apart from each other; A hollow tube, one end of which is fixedly connected to the lower end face of the movable component; A connecting plate, one end of which is rotatably connected to the other end of the hollow tube; An electric actuator, the output end of which is fixedly connected to the other end of the connecting plate.
[0013] Preferably, the upper end face of the fastener is further provided with multiple sets of second sliding grooves; each set of second sliding grooves is disposed between two adjacent sets of first sliding grooves.
[0014] Preferably, it further includes: a collection component; the collection component is connected to the fixing member and is used to collect the residue that slides down from the first chute.
[0015] Preferably, the collection component includes: A collection cover is fitted over the outside of the fixing member and is slidably connected to the fixing member; A workbench is located below the fixing component; A support member is sleeved on the outside of the fixing member and fixedly connected to the fixing member. One end of the support member is in contact with the lower end face of the collection cover, and the other end is rotatably connected to the worktable.
[0016] Preferably, it further includes: a rotating assembly; the rotating assembly is connected to the fixing member and is used to rotate the fixing member.
[0017] Preferably, the rotating assembly includes: A toothed belt is disposed inside the worktable; The first motor is located below the toothed belt; Two sets of belt gears are both located on the inner side of the toothed belt and are meshed with the toothed belt; the shaft of one set of belt gears is fixedly connected to the fixing member; the shaft of the other set of belt gears is fixedly connected to the output end of the first motor.
[0018] The beneficial effects proposed by this invention are as follows: After the wafer is fixed, the sealing structure is operated, and the sealing structure will roll up the sealing cloth, so that the sealing cloth is kept taut and laid flat above the first slide groove, blocking the exposed part of the first slide groove, thereby preventing residue from entering the clamping assembly through the first slide groove, ensuring the normal operation of the clamping assembly and avoiding damage to the clamping assembly. Attached Figure Description
[0019] Figure 1 This is a schematic diagram of the structure of the present invention; Figure 2 for Figure 1 A three-dimensional sectional view of the internal connection structure. Figure 3 for Figure 2 Enlarged 3D schematic diagram of the central connecting structure; Figure 4 for Figure 3 Enlarged 3D schematic diagram of the central connecting structure; Figure 5 for Figure 4 A three-dimensional schematic diagram of the internal connection structure; Figure 6 for Figure 4 Enlarged 3D schematic diagram of the central connecting structure; Figure 7 for Figure 6 A three-dimensional diagram of the central connecting structure viewed from below; Figure 8 for Figure 7 Enlarged 3D schematic diagram of the central connecting structure; Figure 9 for Figure 6 Enlarged 3D schematic diagram of the central connecting structure; Figure 10 for Figure 9 A three-dimensional diagram of the central connecting structure viewed from below; Figure 11 for Figure 1 Enlarged 3D schematic diagram of the central connecting structure; Figure 12 for Figure 4 A three-dimensional diagram of the central connecting structure viewed from below; Figure 13 for Figure 5 Enlarged 3D schematic diagram of the central connecting structure; Figure 14 for Figure 12 Enlarged 3D schematic diagram of the connecting structure in the middle section.
[0020] In the diagram: 1. Workbench, 2. Support component, 3. Collection cover, 4. Fixing component, 401. First slide groove, 402. Second slide groove, 5. Wedge block, 6. Moving component, 601. Conical cover, 7. First elastic component, 8. Hollow tube, 9. Connecting plate, 10. Electric push rod, 11. Clamping component, 12. Belt gear, 13. Toothed belt, 14. First motor, 15. Rewind drum, 16. Sealing cloth, 17. Guide component, 18. Bevel gear set, 19. Second motor, 20. Moving plate, 21. Sleeve, 22. Second elastic component, 23. Magnetic block, 24. Sealing ring, 25. Connecting component, 26. Gear ring, 27. First gear, 28. Second gear, 29. Support frame, 30. Third motor, 31. Protective cover, 3101. Protrusion. Detailed Implementation
[0021] The present invention will be further described below with reference to the accompanying drawings: This embodiment: Please see Figure 1-14 In this embodiment: a wafer clamp includes: a clamping assembly and a sealing structure.
[0022] In this embodiment, the clamping assembly is used to clamp and fix the wafer; the clamping assembly includes: a fixing member 4 and multiple sets of clamping members 11. The upper end surface of the fixing member 4 is provided with multiple sets of first sliding grooves 401 evenly distributed along the axis. Each set of clamping members 11 is disposed in the first sliding groove 401 and is slidably connected to the fixing member 4 through the first sliding groove 401.
[0023] In this embodiment, by operating the clamping assembly, the clamping member 11 moves towards the center along the first sliding groove 401 on the fixing member 4 to clamp and fix the wafer located in the center position; the fixing member 4 is a disk with a movable thickness; the number of clamping members 11 is greater than or equal to 3 sets, and the shape of the clamping member 11 is not limited, as long as it can clamp the wafer.
[0024] The sealing structure is connected to the fixing member 4 and is used to seal the first slide groove 401. The sealing structure includes multiple sets of sealing cloth 16, each set of sealing cloth 16 is laid on the top of the first slide groove 401, and one end of the sealing cloth 16 is fixedly connected to the end of the clamping member 11 near the axis of the fixing member 4.
[0025] In this embodiment, the number of sealing cloths 16 is the same as the number of clamping components 11. The sealing cloths 16 are made of corrosion-resistant and waterproof materials, which can be PVC or other materials, as long as they can achieve corrosion resistance and waterproofing. After the wafer is fixed, the sealing structure is operated, and the sealing structure will roll up the sealing cloths 16, keeping the sealing cloths 16 taut and laying them flat above the first slide groove 401, blocking the exposed part of the first slide groove 401, thereby preventing residue from entering the clamping assembly through the first slide groove 401, ensuring the normal operation of the clamping assembly and avoiding damage to the clamping assembly.
[0026] like Figure 5 and Figure 6 As shown, the sealing structure also includes: multiple sets of winding assemblies, a second motor 19, and multiple sets of edge compaction assemblies.
[0027] Multiple sets of winding components are connected to the sealing cloth 16 for winding up the sealing cloth 16.
[0028] In this embodiment, the winding assembly is operated to wind up and unwind the sealing cloth 16.
[0029] The output of the second motor 19 is connected to the winding assembly and is used to drive the winding assembly to operate.
[0030] In this embodiment, the rotation of the second motor 19 provides power to the winding assembly to achieve the winding and unwinding of the sealing cloth 16; the second motor 19 is a common small motor on the market, and its model can be F260 or other models of motors, as long as they meet the working conditions.
[0031] Multiple sets of edge compaction components are arranged parallel to the clamping member 11 and connected to the sealing cloth 16.
[0032] In this embodiment, the edge compaction component can compact the taut sealing cloth 16 by operating the edge compaction component; its position is on both sides of the first slide groove 401 and parallel to the direction of movement of the clamping member 11.
[0033] like Figure 7 and Figure 8 As shown, each winding assembly includes a winding drum 15 and a bevel gear set 18.
[0034] Specifically, the take-up drum 15 is located at the end of the sealing cloth 16 away from the clamping member 11, so that the sealing cloth 16 can be wound around the take-up drum 15.
[0035] In this embodiment, the winding and unwinding of the sealing cloth 16 is achieved by rotating the winding drum 15. The bevel gear set 18 consists of two identical sets of bevel gears, which are symmetrically arranged at both ends of the take-up drum 15 and are coaxial with the take-up drum 15.
[0036] In this embodiment, two adjacent sets of bevel gears 18 will mesh with each other to achieve transmission between them, so that multiple sets of take-up drums 15 rotate simultaneously, thereby enabling multiple sets of take-up drums 15 to simultaneously take up or release the sealing cloth 16.
[0037] like Figure 7 and Figure 8 As shown, each set of edge compaction components includes: two sets of guide members 17, two sets of sleeves 21, two sets of movable plates 20, and two sets of second elastic members 22.
[0038] Two sets of guide members 17 are symmetrically arranged on both sides of the clamping member 11 and are fixedly connected to the clamping member 11.
[0039] In this embodiment, the guide member 17 is a combination of a cuboid and a right trapezoid, that is, one long side of the cuboid is connected to the right-angled side of the right trapezoid, and the other long side of the cuboid is connected to the clamping member 11. Two sets of sleeves 21 are positioned above the sealing cloth 16 and between the guide 17 and the take-up drum 15; one end of each set of movable plates 20 is in contact with the guide 17, and the other end extends into the interior of the sleeve 21 and is slidably connected to the sleeve 21.
[0040] In this embodiment, the movable plate 20 can slide along the inner wall of the sleeve 21; when the guide 17 moves towards the middle, the movable plate 20 will move towards the inside of the sleeve 21; the end of the movable plate 20 that contacts the guide 17 is semi-circular; so that when the movable plate 20 rotates, it will gradually shrink under the restriction of the inclined side of the guide 17.
[0041] Each set of second elastic elements 22 is disposed between the sleeve 21 and the movable plate 20.
[0042] In this embodiment, the second elastic element 22 is a spring; the second elastic element 22 is currently in a slightly compressed state; when the moving plate 20 moves toward the inside of the sleeve 21, the second elastic element 22 will be compressed again.
[0043] When sealing of the first chute 401 is required, the wafer has already been fixed, and the clamping member 11 is located near the center of the fixing member 4. At this time, the sealing cloth 16 is in a relaxed state. The external power supply of the second motor 19 is connected, and the second motor 19 is started, so that the output end of the second motor 19 drives the bevel gear set 18 to rotate. Through the meshing of two adjacent sets of bevel gear sets 18, multiple sets of winding drums 15 can rotate simultaneously to achieve simultaneous winding of the sealing cloth 16. When the sealing cloth 16 is in a taut state, the second motor 19 has a self-protection function and can automatically cut Stop; allowing the taut sealing cloth 16 to be laid flat above the first slide groove 401, sealing the first slide groove 401; simultaneously, during the clamping process, the clamping member 11 will drive the guide member 17 to move synchronously; the guide member 17 will push the moving plate 20 to move, causing the moving plate 20 to compress the second elastic member 22 again; during this process, the moving plate 20 and the sleeve 21 are always in contact with the sealing cloth 16, pressing the two sides of the sealing cloth 16 firmly; making the seal more thorough, preventing residue from entering the clamping assembly through the first slide groove 401, ensuring the normal operation of the clamping assembly, and avoiding damage to the clamping assembly.
[0044] like Figure 11 As shown, the wafer fixture also includes: a protective cover 31; the protective cover 31 is located at the center above the fixing member 4; one end of the protective cover 31 is provided with multiple sets of bumps 3101, and the bumps 3101 are fixedly connected to the fixing member 4; there is a gap between two adjacent sets of bumps 3101, so that the sealing cloth 16 is placed in the gap.
[0045] In this embodiment, the protective cover 31 is cylindrical; the gap provides space for the movement of the sealing cloth 16 and the rotation of the connector 25; the height of the protrusion 3101 is slightly greater than the sum of the thicknesses of the sealing cloth 16 and the connector 25.
[0046] The wafer fixture also includes a cleaning assembly; the cleaning assembly is connected to multiple sets of edge compaction assemblies for driving the edge compaction assemblies to rotate in order to clean the residue above the sealing cloth 16.
[0047] like Figure 9 and Figure 10 As shown, the cleaning assembly includes: a sealing ring 24, multiple sets of magnetic blocks 23, a gear ring 26, multiple sets of connectors 25, a second gear 28, multiple sets of first gears 27, a support frame 29, and a third motor 30.
[0048] Specifically, the sealing ring 24 is sleeved on the outside of the protective cover 31; multiple sets of slides are provided on the outside of the sealing ring 24, and the slides are slidably connected to the end of the sleeve 21 away from the moving plate 20.
[0049] In this embodiment, the sealing ring 24 is used to seal the gap and press the sealing cloth 16 on one side when the sealing cloth 16 is in a taut state; the sealing ring 24 is made of magnetic material and can be attached to the fixing member 4 to press the sealing cloth 16.
[0050] Each set of magnetic blocks 23 is placed in the slide and fits tightly against the sleeve 21.
[0051] In this embodiment, the end of the sleeve 21 located in the slide is made of iron, which can attract the magnetic block 23. When it is attracted, the bottom end of the sleeve 21 contacts the sealing cloth 16; and when it is necessary to move the sealing cloth 16, the sleeve 21 can be lifted.
[0052] The toothed ring 26 is coaxially arranged with the sealing ring 24 and is located above the sealing ring 24.
[0053] In this embodiment, the inner side of the toothed ring 26 is provided with multiple meshing teeth. The toothed ring 26 is located above the take-up drum 15 and will not obstruct the rotation of the take-up drum 15.
[0054] Both ends of each connector 25 are fixedly connected to the toothed ring 26 and the sealing ring 24, respectively.
[0055] In this embodiment, since the height of the protrusion 3101 is slightly greater than the sum of the thicknesses of the sealing cloth 16 and the connector 25, the connector 25 will not come into contact with the sealing cloth 16 when it rotates.
[0056] The second gear 28 is coaxially arranged with the gear ring 26; multiple sets of first gears 27 are arranged between the gear ring 26 and the second gear 28, and are respectively meshed with the second gear 28 and the gear ring 26.
[0057] In this embodiment, the tooth ratio of the second gear 28 to the first gear 27 is 5:1, meaning that the second gear 28 rotates once and drives the first gear 27 to rotate five times; while the tooth ratio of the first gear 27 to the gear ring 26 is 1:10, meaning that the first gear 27 rotates ten times and drives the gear ring 26 to rotate once; thus, the rotation speed of the gear ring 26 is very slow.
[0058] The support frame 29 is positioned above the second gear 28 and is rotatably connected to the shafts of the second gear 28 and multiple sets of first gears 27.
[0059] In this embodiment, the support frame 29 can be in the shape of a tripod (depending on the number of first gears 27) or a disc, as long as it can support the rotation of the first gear 27 and the second gear 28.
[0060] The third motor 30 is located below the second gear 28, and the output end of the third motor 30 is fixedly connected to the shaft of the second gear 28.
[0061] In this embodiment, the second gear 28 can be driven to rotate by operating the third motor 30; the third motor 30 is a common motor on the market, and its model can be RS-395 or other models of motors, as long as they can meet the working conditions.
[0062] When cleaning is required, the external power supply of the third motor 30 is connected and the third motor 30 is started. The output end of the third motor 30 drives the second gear 28 to rotate. The rotation of the second gear 28 simultaneously drives multiple sets of first gears 27 to rotate synchronously. The first gears 27 cause the gear ring 26 to rotate slowly. The gear ring 26 drives the sealing ring 24 to rotate slowly through the connector 25. The sealing ring 24 simultaneously drives multiple sets of edge compaction components to rotate. The edge compaction components are used to sweep the residue above the sealing cloth 16 into the second chute 402 to achieve the cleaning of the residue.
[0063] like Figure 12 and Figure 13 As shown, the clamping assembly also includes: multiple sets of wedges 5, a moving part 6, a hollow tube 8, a connecting plate 9, and an electric push rod 10.
[0064] In this case, one end of each set of wedges 5 is fixedly connected to the clamping member 11.
[0065] In this embodiment, the wedge 5 is shaped as an inclined cuboid, and the distance from the top of the wedge 5 to the center of the fixing member 4 is greater than the distance from the bottom of the wedge 5 to the center of the fixing member 4.
[0066] The upper end face of the movable part 6 is provided with a conical cover 601; the inner wall of the conical cover 601 is in contact with the side of the multiple sets of wedges 5 that are far apart from each other.
[0067] In this embodiment, the inclination angle of the inclined surface of the inner wall of the conical cover 601 is the same as the inclination angle of the wedge block 5.
[0068] One end of the hollow tube 8 is fixedly connected to the lower end face of the moving part 6; one end of the connecting plate 9 is rotatably connected to the other end of the hollow tube 8; the output end of the electric push rod 10 is fixedly connected to the other end of the connecting plate 9.
[0069] In this embodiment, the connecting plate 9 is shaped like a "Z"; the hollow tube 8 has a hollow interior, allowing the rotating shaft of the third motor 30 to pass through the hollow tube 8 and connect with the second gear 28; the electric push rod 10 is a common power component on the market, and its model can be DYTZW type or other models, as long as it can meet the working conditions.
[0070] When clamping is required, the external power supply of the electric push rod 10 is turned on, and the electric push rod 10 is started. The output end of the electric push rod 10 will push the connecting plate 9 to move vertically upward. The connecting plate 9 drives the moving part 6 to move through the hollow tube 8. The moving part 6 uses the inclined inner wall of the conical cover 601 to make multiple sets of wedges 5 move towards the middle at the same time. The wedges 5 drive the clamping parts 11 to move. Multiple sets of clamping parts 11 work together to fix the wafer.
[0071] like Figure 4 and 14 As shown, the upper end face of the fastener 4 is also provided with multiple sets of second slide grooves 402; each set of second slide grooves 402 is disposed between two adjacent sets of first slide grooves 401.
[0072] In this embodiment, the second slide 402 is inclined, and the lowest end is the position of the second slide 402 near the edge of the fixing member 4; this allows the residue entering the second slide 402 to slide downwards.
[0073] The wafer fixture also includes a collection component; the collection component is connected to the fixing member 4 and is used to collect the residue that slides down from the first chute 401.
[0074] like Figure 1 and Figure 2 As shown, the collection components include: a collection cover 3, a workbench 1, and a support 2.
[0075] Specifically, the collection cover 3 is fitted on the outside of the fixing member 4 and is slidably connected to the fixing member 4.
[0076] In this embodiment, the collection cover 3 can collect the slipped residue and can be disassembled and removed.
[0077] The workbench 1 is located below the fixing member 4; the support member 2 is sleeved on the outside of the fixing member 4 and is fixedly connected to the fixing member 4. One end of the support member 2 is in contact with the lower end face of the collection cover 3, and the other end is rotatably connected to the workbench 1.
[0078] In this embodiment, the support member 2 can be cylindrical, frustum, or stepped, as long as it can achieve a connection.
[0079] The wafer fixture also includes a rotating assembly; the rotating assembly is connected to the fixing member 4 and is used to rotate the fixing member 4.
[0080] like Figure 2 As shown, the rotating assembly includes: a toothed belt 13, a first motor 14, and two sets of belt gears 12.
[0081] The toothed belt 13 is located inside the worktable 1.
[0082] In this embodiment, the toothed belt 13 is made of rubber material and can be shaped. Engaging teeth are also provided on the inner side of the toothed belt 13.
[0083] The first motor 14 is located below the toothed belt 13.
[0084] In this embodiment, the first motor 14 is a common motor on the market. Its model can be RF500 or other models, as long as it can meet the working conditions.
[0085] Both sets of belt gears 12 are located inside the toothed belt 13 and are meshed with the toothed belt 13; the shaft of one set of belt gears 12 is fixedly connected to the support member 2; the shaft of the other set of belt gears 12 is fixedly connected to the output end of the first motor 14.
[0086] In this embodiment, when one set of belt gears 12 rotates, it will drive another set of belt gears 12 to rotate through the toothed belt 13.
[0087] When rotation is required, the external power supply of the first motor 14 is turned on, and the first motor 14 is started. The output end of the first motor 14 drives a set of belt gears 12 to rotate. This set of belt gears 12 drives another set of belt gears 12 to rotate through the toothed belt 13. The other set of belt gears 12 simultaneously drives the support member 2 to rotate; thereby driving the wafer to rotate through the entire clamping assembly.
[0088] Working principle: When using this wafer jig, the wafer is placed above the protective cover 31. Then, the external power supply of the electric push rod 10 is turned on, and the electric push rod 10 is started. The output end of the electric push rod 10 will push the connecting plate 9 to move vertically upward. The connecting plate 9 drives the moving part 6 to move through the hollow tube 8. The moving part 6 uses the inclined inner wall of the conical cover 601 to make multiple sets of wedges 5 move towards the center at the same time. The wedges 5 drive the clamping parts 11 to move. The multiple sets of clamping parts 11 work together to fix the wafer.
[0089] When sealing of the first chute 401 is required, the wafer has already been fixed, and the clamping member 11 is located near the center of the fixing member 4. At this time, the sealing cloth 16 is in a relaxed state. The external power supply of the second motor 19 is connected, and the second motor 19 is started, so that the output end of the second motor 19 drives the bevel gear set 18 to rotate. Through the meshing of two adjacent sets of bevel gear sets 18, multiple sets of winding drums 15 can rotate simultaneously to achieve simultaneous winding of the sealing cloth 16. When the sealing cloth 16 is in a taut state, the second motor 19 has a self-protection function and can automatically cut Stop; allowing the taut sealing cloth 16 to be laid flat above the first slide groove 401, sealing the first slide groove 401; simultaneously, during the clamping process, the clamping member 11 will drive the guide member 17 to move synchronously; the guide member 17 will push the moving plate 20 to move, causing the moving plate 20 to compress the second elastic member 22 again; during this process, the moving plate 20 and the sleeve 21 are always in contact with the sealing cloth 16, pressing the two sides of the sealing cloth 16 firmly; making the seal more thorough, preventing residue from entering the clamping assembly through the first slide groove 401, ensuring the normal operation of the clamping assembly, and avoiding damage to the clamping assembly.
[0090] When cleaning is required, the external power supply of the third motor 30 is connected and the third motor 30 is started. The output end of the third motor 30 drives the second gear 28 to rotate. The rotation of the second gear 28 simultaneously drives multiple sets of first gears 27 to rotate synchronously. The first gears 27 cause the gear ring 26 to rotate slowly. The gear ring 26 drives the sealing ring 24 to rotate slowly through the connector 25. The sealing ring 24 simultaneously drives multiple sets of edge compaction components to rotate. The edge compaction components are used to sweep the residue above the sealing cloth 16 into the second chute 402 to achieve the cleaning of the residue.
[0091] When rotation is required, the external power supply of the first motor 14 is turned on, and the first motor 14 is started. The output end of the first motor 14 drives a set of belt gears 12 to rotate. This set of belt gears 12 drives another set of belt gears 12 to rotate through the toothed belt 13. The other set of belt gears 12 simultaneously drives the support member 2 to rotate. Thus, the entire clamping assembly drives the wafer to rotate, completing the use of the clamp.
[0092] Although the present invention has been illustrated and described with reference to preferred embodiments, those skilled in the art will understand that various changes in form and detail are possible within the scope of the claims.
Claims
1. A wafer clamp, characterized in that, include: A clamping assembly is used to clamp and fix a wafer; the clamping assembly includes: a fixing member (4) and multiple sets of clamping members (11), the upper end surface of the fixing member (4) is provided with multiple sets of first sliding grooves (401) evenly distributed along the axis, each set of clamping members (11) is disposed in the first sliding groove (401) and is slidably connected to the fixing member (4) through the first sliding groove (401); A sealing structure is connected to the fixing member (4) for sealing the first slide groove (401); the sealing structure includes: multiple sets of sealing cloth (16), each set of sealing cloth (16) is laid on the top of the first slide groove (401), and one end of the sealing cloth (16) is fixedly connected to one end of the clamping member (11) near the axis of the fixing member (4).
2. The wafer fixture according to claim 1, characterized in that: The sealing structure further includes: Multiple sets of winding assemblies are connected to the sealing cloth (16) for winding the sealing cloth (16); The output end of the second motor (19) is connected to the winding assembly and is used to drive the winding assembly to operate; Multiple sets of edge compaction components are arranged parallel to the clamp (11) and connected to the sealing cloth (16).
3. The wafer fixture according to claim 2, characterized in that: Each set of the winding components includes: A take-up drum (15) is disposed at one end of the sealing cloth (16) away from the clamp (11), so that the sealing cloth (16) can be wound around the take-up drum (15); The bevel gear set (18) consists of two identical sets of bevel gears, which are symmetrically arranged at both ends of the take-up drum (15) and coaxially arranged with the take-up drum (15).
4. The wafer fixture according to claim 2, characterized in that: Each set of the edge compaction components includes: Two sets of guide members (17) are symmetrically arranged on both sides of the clamping member (11) and are fixedly connected to the clamping member (11); Two sets of sleeves (21) are disposed above the sealing cloth (16) and between the guide (17) and the winding drum (15); Two sets of movable plates (20), one end of each set of movable plates (20) is attached to the guide (17), and the other end extends into the interior of the sleeve (21) and is slidably connected to the sleeve (21); Two sets of second elastic elements (22) are provided between the sleeve (21) and the movable plate (20).
5. The wafer fixture according to claim 4, characterized in that: Also includes: Protective cover (31); the protective cover (31) is located at the center above the fixing member (4); one end of the protective cover (31) is provided with multiple sets of protrusions (3101), the protrusions (3101) are fixedly connected to the fixing member (4); there is a gap between two adjacent sets of protrusions (3101), so that the sealing cloth (16) is placed in the gap.
6. The wafer fixture according to claim 5, characterized in that: Also includes: Clean up components; The cleaning component is connected to multiple sets of edge compaction components to drive the edge compaction components to rotate in order to clean the residue above the sealing cloth (16).
7. The wafer fixture according to claim 6, characterized in that: The cleaning component includes: A sealing ring (24) is sleeved on the outside of the protective cover (31); multiple sets of slides are provided on the outside of the sealing ring (24), and the slides are slidably connected to the end of the sleeve (21) away from the moving plate (20); Multiple sets of magnetic blocks (23) are provided, each set of magnetic blocks (23) is provided in the slide and is in close contact with the sleeve (21); The toothed ring (26) is coaxially arranged with the sealing ring (24) and located above the sealing ring (24); Multiple sets of connectors (25), each set of connectors (25) having its two ends fixedly connected to the toothed ring (26) and the sealing ring (24) respectively; The second gear (28) is coaxially arranged with the gear ring (26); Multiple sets of first gears (27) are disposed between the gear ring (26) and the second gear (28), and are respectively meshed with the second gear (28) and the gear ring (26); A support frame (29) is disposed above the second gear (28) and is rotatably connected to the shaft of the second gear (28) and multiple sets of the first gears (27); The third motor (30) is located below the second gear (28), and the output end of the third motor (30) is fixedly connected to the shaft of the second gear (28).
8. The wafer fixture according to claim 1, characterized in that: The clamping assembly further includes: Multiple sets of wedges (5), one end of each set of wedges (5) is fixedly connected to the clamping member (11); The movable part (6) has a conical cover (601) on its upper end surface; the inner wall of the conical cover (601) is in contact with the side of the multiple sets of wedges (5) that are far apart from each other; Hollow tube (8), one end of which is fixedly connected to the lower end face of the movable part (6); A connecting plate (9), one end of which is rotatably connected to the other end of the hollow tube (8); An electric push rod (10) is fixedly connected at its output end to the other end of the connecting plate (9).
9. The wafer fixture according to claim 8, characterized in that: The upper end face of the fastener (4) is also provided with multiple sets of second slide grooves (402); each set of second slide grooves (402) is provided between two adjacent sets of first slide grooves (401).
10. The wafer fixture according to claim 9, characterized in that: Also includes: Collection component; the collection component is connected to the fixing member (4) for collecting residue that slides down from the first chute (401).
11. The wafer fixture according to claim 10, characterized in that: The collection component includes: The collection cover (3) is fitted on the outside of the fixing member (4) and is slidably connected to the fixing member (4); The workbench (1) is located below the fixing member (4); The support member (2) is sleeved on the outside of the fixing member (4) and fixedly connected to the fixing member (4). One end of the support member (2) is in contact with the lower end face of the collection cover (3), and the other end is rotatably connected to the workbench (1).
12. The wafer fixture according to claim 11, characterized in that: Also includes: Rotating assembly; the rotating assembly is connected to the fixing member (4) and is used to rotate the fixing member (4).
13. The wafer fixture according to claim 12, characterized in that: The rotating assembly includes: A toothed belt (13) is disposed inside the worktable (1); The first motor (14) is located below the toothed belt (13); Two sets of belt gears (12) are both located on the inner side of the toothed belt (13) and mesh with the toothed belt (13); the shaft of one set of belt gears (12) is fixedly connected to the support member (4); the shaft of the other set of belt gears (12) is fixedly connected to the output end of the first motor (14).