Open-close type upper frame, process module and semiconductor processing equipment

Abstract

The invention provides an opening and closing type upper frame, a process module and semiconductor processing equipment, the opening and closing type upper frame is used for the process module of the semiconductor processing equipment for processing wafers, and the opening and closing type upper frame comprises a first base located on the left side; the second base is located on the right side; the first moving part is arranged at the upper part of the first base and is used for installing a first electric box and enabling the first electric box to move back and forth between a first initial position and a first moving position; and a second moving part disposed at the upper part of the second base, for mounting a second electric container and moving the second electric container back and forth between a second initial position, which is adjacent to the second initial position, and a second moving position, which is adjacent to the second initial position and moves back and forth between the second initial position and the second moving position. And the first moving position and the second moving position are separated from each other by a specified distance so as to form a channel for a conveying module for conveying the wafer to pass through the process module.

Description

Technical Field

[0001] This invention relates to an openable upper frame, a process module, and a semiconductor processing equipment. Specifically, it relates to an openable upper frame, a process module, and a semiconductor processing equipment that does not have a fixed channel but has an openable structure, so that a channel for transporting wafers through the process module can be temporarily formed by opening and closing operations, thereby reducing the overall size and effectively utilizing fixed idle space, or even reducing idle space. Background Technology

[0002] With the development of semiconductor technology, the types and steps of semiconductor processing technology are becoming increasingly diverse. Correspondingly, the structure of semiconductor processing equipment used to implement these semiconductor processing technologies is becoming more and more complex, and its size is also increasing.

[0003] Complex and bulky semiconductor processing equipment not only occupies a large amount of space but also increases the difficulty of construction and maintenance. Therefore, it is necessary to improve existing semiconductor processing equipment to make its structure more compact.

[0004] The inventors of this invention discovered that there was room for further improvement in the process module (PM) of semiconductor processing equipment, and therefore conducted research on this, thus completing this invention.

[0005] Figure 1 This is a schematic diagram of semiconductor processing equipment in the prior art.

[0006] like Figure 1 As shown, typically, three process modules 12 are arranged behind the Equipment Front End Module (EFEM) 11, forming a quadrilateral layout together with the Equipment Front End Module 11. At least one process module 12 is connected to a processing module (not shown) for performing processing steps.

[0007] The wafer to be processed enters the semiconductor processing equipment 1 through the front-end module 11 and passes through the process module 12 to reach the rear processing module. The processed wafer passes from the processing module through the front process module 12 to the front-end module 11 and exits the semiconductor processing equipment 1 through the front-end module 11. The wafer is transported using a handling robot (e.g., a robotic arm). To allow the handling robot to pass freely through the process module 12, a through channel 14 is formed in the process module 12. Considering the size of the handling robot and the safety distance required, the channel 14 needs to be large enough. Therefore, the channel 14 occupies a large space in the process module 12, resulting in an increase in the size of the process module 12.

[0008] Figure 2 This is a schematic diagram of a process module in the prior art.

[0009] like Figure 2 As shown, to form the channel 14, the process module 12 is generally composed of two parts: the lower part includes a lower frame 15 and storage space for various cables, pipes, etc., and the upper part includes an upper frame 16 and an electrical enclosure 17 mounted on the upper surface of the upper frame 16. The upper frame 16 typically consists of left and right columns and crossbeams mounted on the columns, thus raising the electrical enclosure 17 and forming the channel 14 together with the upper surface of the lower frame 15. Therefore, the electrical enclosure 17 presents many inconveniences in terms of installation, maintenance, and replacement. Furthermore, the increased height of the process module 12 requires a larger base area to reduce the risk of tilting and collapse, potentially further increasing the volume of the process module 12.

[0010] On the other hand, refer to again Figure 1 Since the process module 12 is roughly rectangular, there is a fixed idle space 18 between adjacent process modules 12 in the above quadrilateral layout, resulting in low space utilization.

[0011] Therefore, there is a need for a technical solution that can reduce the volume of the process module 12 while forming a passage 14 for the transport robot 13 to enter and exit and improve space utilization. Summary of the Invention

[0012] Technical issues

[0013] The purpose of this invention is to provide an openable upper frame having an openable structure to temporarily form a channel for a wafer transport module to pass through a process module through an opening and closing operation.

[0014] Another object of the present invention is to provide a process module including the openable upper frame of the present invention to temporarily form a channel through which a transport module for transporting wafers passes through the process module via an opening and closing operation.

[0015] Another object of the present invention is to provide a semiconductor processing apparatus comprising the process module of the present invention, wherein a channel for a transport module for transporting wafers passes through the process module is temporarily formed by an opening and closing operation.

[0016] Technical solution

[0017] This invention provides an openable upper frame for a process module of a semiconductor processing equipment for processing wafers, comprising: a first base located on the left side; a second base located on the right side; a first movable part disposed on the upper part of the first base for mounting a first electrical assembly and facilitating reciprocating movement of the first electrical assembly between a first initial position and a first movable position; and a second movable part disposed on the upper part of the second base for mounting a second electrical assembly and facilitating reciprocating movement of the second electrical assembly between a second initial position and a second movable position, wherein the first initial position and the second initial position are adjacent to each other, and the first movable position and the second movable position are spaced apart by a predetermined distance to form a channel for a transport module for transporting the wafer to pass through the process module.

[0018] According to one embodiment, the first moving position may be the position after shifting to the left from the first initial position, and the second moving position may be the position after shifting to the right from the second initial position.

[0019] According to one embodiment, the first moving part and the second moving part may be driven by a linear motor.

[0020] According to one embodiment, the first moving part may include: a first fixing part fixed to the upper part of the first base; and a first sliding part disposed on the upper part of the first fixing part in a manner that allows sliding in the left-right direction. The second moving part may include: a second fixing part fixed to the upper part of the second base; and a second sliding part disposed on the upper part of the second fixing part in a manner that allows sliding in the left-right direction.

[0021] According to one embodiment, a downwardly protruding first locking protrusion may be formed at the left end of the first sliding portion to lock onto the left end of the first fixing portion, and a downwardly protruding second locking protrusion may be formed at the right end of the second sliding portion to lock onto the right end of the second fixing portion.

[0022] According to one embodiment, the first fixing part may include a first guide groove that extends in the left-right direction and opens upward, the first sliding part may include a first slide rail that extends in the left-right direction and protrudes downward, the first slide rail can be inserted into the first guide groove, the second fixing part may include a second guide groove that extends in the left-right direction and opens upward, the second sliding part may include a second slide rail that extends in the left-right direction and protrudes downward, the second slide rail can be inserted into the second guide groove.

[0023] According to one embodiment, the first guide groove, the first slide rail, the second guide groove, and the second slide rail may each be arranged in a pair spaced apart in the front-to-back direction.

[0024] According to one embodiment, the first fixing portion may include an upwardly protruding first guide portion, and the first guide groove may be formed on the upper surface of the first guide portion; the second fixing portion may include an upwardly protruding second guide portion, and the second guide groove may be formed on the upper surface of the second guide portion.

[0025] According to one embodiment, the first guide portion and the second guide portion may be arranged in a pair, spaced apart in the left-right direction.

[0026] According to one embodiment, the first fixing part may further include a first clamping part for braking and / or fixing the first slide rail, and the second fixing part may further include a second clamping part for braking and / or fixing the second slide rail.

[0027] The present invention provides a process module comprising an openable upper frame of the present invention; a first electrical assembly box disposed on the upper part of a first movable part of the openable upper frame for reciprocating between a first initial position and a first movable position; and a second electrical assembly box disposed on the upper part of a second movable part of the openable upper frame for reciprocating between a second initial position and a second movable position.

[0028] According to one embodiment, when the first moving position is a position after shifting to the left from the first initial position and the second moving position is a position after shifting to the right from the second initial position, a first through-hole can be formed at the left front corner of the first electrical assembly box, and a second through-hole can be formed at the right front corner of the second electrical assembly box.

[0029] The present invention provides a semiconductor processing apparatus, comprising: a transport module for transporting wafers; and a plurality of process modules disposed around the transport module with their front surfaces facing the transport module, wherein at least one of the plurality of transport modules is a process module of the present invention.

[0030] Beneficial effects

[0031] The openable upper frame, process module, and semiconductor processing equipment of the present invention temporarily form a channel through which the transport module for transporting wafers passes through the process module by opening and closing operations. Therefore, the overall size can be reduced, and fixed idle space can be effectively utilized, or even the idle space can be reduced. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of semiconductor processing equipment in the prior art.

[0033] Figure 2 This is a schematic diagram of a process module in the prior art.

[0034] Figure 3 This is a front view of the process module according to one embodiment of the present invention.

[0035] Figure 4 This is a top view of the first and second initial positions according to one embodiment of the present invention.

[0036] Figure 5 (a), (b), and (c) in the figure show the first and second moving positions of the three embodiments of the present invention, respectively.

[0037] Figure 6 This is a schematic diagram illustrating the process of moving from the first initial position and the second initial position of the present invention to the first moving position and the second moving position of the first embodiment, respectively.

[0038] Figure 7 (a) and (b) in the text are based on Figure 3 Regions A and B in the diagram illustrate the first moving part and the second moving part according to the first embodiment of the present invention.

[0039] Figure 8 This is a schematic diagram illustrating the process of moving from the first initial position and the second initial position of the present invention to the first moving position and the second moving position of the second embodiment, respectively.

[0040] Figure 9 (a) and (b) in the text are based on Figure 3 Regions A and B in the diagram illustrate the first and second moving parts according to the second embodiment of the present invention.

[0041] Figure 10 This is a schematic diagram illustrating the process of moving from the first initial position and the second initial position of the present invention to the first moving position and the second moving position of the third embodiment, respectively.

[0042] Figure 11 (a) and (b) in the text are based on Figure 3 Regions A and B in the diagram illustrate the first and second moving parts according to the third embodiment of the present invention.

[0043] Figure 12 This is a top view of a first electrical assembly box and a second electrical assembly box according to one embodiment of the present invention.

[0044] Figure 13 This is a top view of the first and second electrical enclosures, which are embodiments of the present invention.

[0045] Figure 14 It includes what is shown Figure 13A top view of the semiconductor processing equipment with the first and second electrical packing boxes.

[0046] Figure 15 It is shown to Figure 14 A schematic diagram of a process module forming a channel in a semiconductor processing equipment.

[0047] Figure Labels

[0048] 1: Semiconductor processing equipment

[0049] 11: Equipment front-end module

[0050] 12: Process Module

[0051] 13: Transport Robot

[0052] 14: Channel

[0053] 15: Lower frame

[0054] 16: Upper Frame

[0055] 17: Electrical assembly box

[0056] 18: Unused space

[0057] 100: Openable upper frame

[0058] 110a: First base

[0059] 110b: Second base

[0060] 120a: First moving part

[0061] 120b: Second moving part

[0062] 121a: First fixing part

[0063] 121b: Second fixing part

[0064] 122a: First sliding part

[0065] 122b: Second sliding part

[0066] 123a: First slide rail

[0067] 123b: Second slide rail

[0068] 124a: First Guiding Section

[0069] 124b: Second Guiding Section

[0070] 125a: First clamping part

[0071] 125b: Second clamping part

[0072] 126a: First locking protrusion

[0073] 126b: Second locking protrusion

[0074] 127a: First rotating part

[0075] 127b: Second rotating part

[0076] 128a: First Platform Department

[0077] 128b: Second Platform Department

[0078] 200: Process Module

[0079] 210a: First electrical assembly box

[0080] 210b: Second electrical enclosure

[0081] 211a: First chamfer

[0082] 211b: Second chamfer

[0083] 212a: First gap

[0084] 212b: Second Gap

[0085] 220: Lower frame

[0086] 300: Semiconductor processing equipment

[0087] 310: Conveying Module

[0088] P10a: First initial position

[0089] P10b: Second initial position

[0090] P20a: First moving position

[0091] P20b: Second moving position Detailed Implementation

[0092] The following describes one or more embodiments of the present invention in detail with reference to the accompanying drawings. Obviously, these embodiments are only a part of the embodiments of the present invention, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.

[0093] The terminology used in the following embodiments is for illustrative or explanatory purposes only and is not intended to limit the scope of protection of the present invention. Furthermore, the singular expressions used in this invention, such as "a," "an," "the," "the," "the," and "this," are intended to include plural forms such as "one or more," unless the context clearly indicates otherwise. It should also be understood that, in embodiments of the present invention, the use of terms such as "one or more," "at least one," and "more than one" is intended to include cases of one, two, and at least three.

[0094] Furthermore, when the terms "in one embodiment," "in some embodiments," or "in one or more embodiments" are used in the description of this invention, it is intended that one or more embodiments of the invention may include specific technical features described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," and "in one or more embodiments" appearing in different parts of this specification do not necessarily refer to the same embodiment, but may refer to both the same embodiment and different embodiments, unless the specific technical features described in those embodiments cannot be used alone or in combination.

[0095] Furthermore, in this invention, when an element is described as "comprising," "containing," or "having" another element, it is intended to be an open-ended definition, meaning that the element may include other elements besides the other element. Conversely, when an element is described as "comprising only," "containing only," "having only," or "consisting of another element," it is intended to be a closed-ended definition, meaning that the element does not include other elements besides the other element. However, it should be noted that when the term "formed by another element" is used to describe the formation relationship between multiple elements, this term is not intended to be a closed-ended definition; it should be considered that the other element forms part of the first element, and the first element may include other elements besides the other element.

[0096] It should be understood that when sequential terms such as "first" and "second" are used in this document to describe various elements, these sequential terms are only used to distinguish one element from another, and should not be interpreted as indicating a primary or secondary relationship, or a sequential relationship. Without departing from the scope of this invention, a first element may be labeled as a second element, and a second element may be labeled as a first element.

[0097] In this invention, when describing the positional relationship between two or more elements, if terms such as "above", "below", or "between" are used, it indicates that one or more other elements may be set between the two or more elements, unless terms such as "exactly" or "adjacent" are used.

[0098] Hereinafter, one or more embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those skilled in the art can clearly and completely understand the present invention. When the description of well-known structures or features would unnecessarily obscure the main points of the present invention, the description of such well-known structures or features will be omitted.

[0099] This invention provides a hinged upper frame, a process module, and a semiconductor processing apparatus. The hinged upper frame is used in the process module of the semiconductor processing apparatus for processing wafers; the process module includes the hinged upper frame, and the semiconductor processing apparatus includes the process module.

[0100] The opening and closing upper frame of the present invention will be described below.

[0101] The openable upper frame of the present invention can have an openable structure, for example, it can be composed of a left half and a right half that are symmetrical to each other. The left half and the right half can be close together to close, or far apart to open, thereby temporarily forming a channel for the transport robot (not shown) to enter or exit when it needs to, that is, forming a channel for the transport module for transporting wafers to pass through the process module. The transport module may include robotic arms, robotic hands, end effectors, etc., commonly used in the art for transporting wafers.

[0102] Figure 3 This is a front view of the process module according to one embodiment of the present invention. Figure 4 This is a top view of the first and second initial positions according to one embodiment of the present invention. Figure 5 (a), (b), and (c) in the figure show the first and second moving positions of the three embodiments of the present invention, respectively.

[0103] like Figures 3 to 5As shown, the hinged upper frame 100 may include: a first base 110a located on the left side; a second base 110b located on the right side; a first movable part 120a disposed on the upper part of the first base 110a for mounting the first electrical housing 210a and facilitating the first electrical housing 210a to reciprocate between a first initial position P10a and a first movable position P20a; and a second movable part 120b disposed on the upper part of the second base 110b for mounting the second electrical housing 210b and facilitating the second electrical housing 210b to reciprocate between a second initial position P10b and a second movable position P20b.

[0104] Since the present invention does not require raising the electrical enclosure, the height of the first base 110a and the second base 110b does not need to be excessive, as long as they can support the first moving part 120a and the second moving part 120b. Therefore, compared with the prior art, the height can be significantly reduced, resulting in a more compact structure and higher stability, and making it easier to perform maintenance and other operations on the electrical enclosure. Furthermore, the first base 110a and the second base 110b can be formed with a suitably large cross-section to stably support the first moving part 120a and the second moving part 120b. Similarly, the first moving part 120a and the second moving part 120b can also have a suitably large cross-section to stably support the first electrical enclosure 210a and the second electrical enclosure 210b. The shape, size, etc., of the first base 110a, the second base 110b, the first moving part 120a, and the second moving part 120b can be appropriately selected according to actual conditions, and the present invention is not limited thereto.

[0105] Furthermore, the present invention divides the integrated electrical packing box in the prior art into a first electrical packing box 210a and a second electrical packing box 210b, and respectively arranges them in the first moving part 120a and the second moving part 120b. Therefore, the electrical packing box is flexible, which makes it easy to temporarily form the channel when the height of the electrical packing box is reduced and the fixed channel for transporting wafers through the process module in the prior art is eliminated.

[0106] The first initial position P10a and the second initial position P10b can be adjacent to each other, and the first moving position P20a and the second moving position P20b can be separated by a predetermined distance. Therefore, when the passage is not needed, the first moving part 120a and the second moving part 120b can be used to place the first electrical assembly box 210a and the second electrical assembly box 210b adjacent to each other, resulting in a more compact structure. When the passage is needed, the first moving part 120a and the second moving part 120b can be used to separate the first electrical assembly box 210a and the second electrical assembly box 210b by a predetermined distance, thereby forming a passage of a predetermined width without increasing the height.

[0107] In this invention, "adjacent" includes not only touching each other, but also having a specified gap between them. The gap can be set according to actual needs, but the width of the gap is not equal to the specified distance, but is smaller than the specified distance.

[0108] The specified distance represents the shortest horizontal distance between the first electrical container 210a and the second electrical container 210b when they are separated from each other and located at the first moving position P20a and the second moving position P20b, respectively. The specified distance (i.e., the width of the passage) only needs to be sufficient for the transport robot to pass through; for example, it can be greater than the width of the transport robot, specifically, it can be greater than or equal to the width of the transport robot plus a safety clearance. The width of the transport robot and the safety distance can be appropriately selected by those skilled in the art based on actual circumstances, and the present invention is not limited thereto.

[0109] On the other hand, the first moving position P20a and the second moving position P20b can be appropriately selected according to the actual situation. Correspondingly, the first moving part 120a and the second moving part 120b can have appropriate structures so that the first electrical box 210a and the second electrical box 210b can reciprocate between the first initial position P10a and the second initial position P10b and the first moving position P20a and the second moving position P20b, respectively.

[0110] Hereinafter, through the first to the third embodiments, the structures of three preferred first moving positions P20a and second moving positions P20b, and the corresponding first moving part 120a and second moving part 120b, will be described in detail.

[0111] <First Implementation Method>

[0112] Figure 6 This is a schematic diagram illustrating the process of moving from the first initial position and the second initial position of the present invention to the first moving position and the second moving position of the first embodiment, respectively.

[0113] like Figure 5 (a) and Figure 6 As shown, the first moving position P20a can be the position after shifting to the left from the first initial position P10a, and the second moving position P20b can be the position after shifting to the right from the second initial position P10b. That is, the first moving part 120a drives the first electrical assembly box 210a to shift to the left, while the second moving part 120b drives the second electrical assembly box 210b to shift to the right, thus forming the passage. This embodiment can be applied when there is sufficient space on both the left and right sides.

[0114] The first moving part 120a and the second moving part 120b can be driven by driving methods commonly used in the art. For example, they can be configured with separate motors and driven by belts, gears, racks, etc., or they can be set with piston cylinders and driven by pistons. However, these driving methods may occupy a large space. Therefore, the first moving part 120a and the second moving part 120b are preferably driven by linear motors (not shown) to reduce the space occupied and make the structure more compact.

[0115] Since the first moving part 120a and the second moving part 120b have symmetrical structures, the first moving part 120a will be described first, and then the second moving part 120b will be described in a similar manner.

[0116] Figure 7 (a) and (b) in the text are based on Figure 3 Regions A and B in the diagram illustrate the first moving part and the second moving part according to the first embodiment of the present invention.

[0117] like Figure 7 As shown in (a), the first moving part 120a may include: a first fixing part 121a, fixed to the upper part of the first base 110a; and a first sliding part 122a, which is disposed on the upper part of the first fixing part 121a in a manner that allows it to slide in the left-right direction.

[0118] The first fixing part 121a can be integrally formed with the first base 110a. For example, it can be manufactured as a single unit during manufacturing, or it can be fixed together after being manufactured separately. The fixing method of the first fixing part 121a can adopt the fixing method commonly used in the art, such as fastening with bolts, etc., and the present invention is not limited thereto.

[0119] The first sliding portion 122a is used to mount the first electrical housing 210a and to move the first electrical housing 210a back and forth between the first initial position P10a and the first moving position P20a. That is, the first sliding portion 122a supports the first electrical housing 210a from below and moves the first electrical housing 210a by its own movement. The first sliding portion 122a can be used to mount the first electrical housing 210a on its upper part by fastening methods commonly used in the art, such as using bolts. In addition, the first sliding portion 122a may have a smooth lower surface, for example, to slide smoothly on the first fixed portion 121a.

[0120] Preferably, the first fixing portion 121a may include a first guide groove (not shown) extending in the left-right direction and opening upward, and the first sliding portion 122a may include a first slide rail 123a extending in the left-right direction and protruding downward, the first slide rail 123a being inserted into the first guide groove. In this case, the inner contour of the first guide groove and the outer contour of the first slide rail 123a can match each other, thereby improving the stability of the first sliding portion 122a during sliding. Furthermore, the first guide groove may, for example, be formed on the center line extending in the left-right direction of the first fixing portion 121a, and the first guide rail may, for example, be formed on the center line extending in the left-right direction of the first sliding portion 122a. Thus, the first sliding portion 122a can be guided to slide stably and accurately in the left-right direction.

[0121] More preferably, the first guide groove and the first slide rail 123a can be arranged in a pair, spaced apart in the front-rear direction. For example, the pair of first guide grooves can be symmetrically formed on the front and rear sides with reference to the center line extending in the left-right direction of the first fixing part 121a, and the pair of first guide rails can be symmetrically formed on the front and rear sides with reference to the center line extending in the left-right direction of the first sliding part 122a. This improves the stability of the first sliding part 122a in the front-rear direction and ensures that the pair of first guide grooves and the pair of first guide rails are subjected to uniform force.

[0122] On the other hand, the first fixing portion 121a may include an upwardly protruding first guide portion 124a, and the first guide groove may be formed on the upper surface of the first guide portion 124a. That is, the first guide portion 124a is used to appropriately raise the first guide groove to reduce the friction area between the first fixing portion 121a and the first sliding portion 122a, thereby reducing wear.

[0123] Preferably, the length of the first guide portion 124a in the left-right direction can be less than the length of the first fixing portion 121a in the left-right direction, thereby further reducing the friction area between the first fixing portion 121a and the first sliding portion 122a.

[0124] However, the shorter the length of the first guide portion 124a in the left-right direction, the lower the stability of the first sliding portion 122a. Therefore, a pair of first guide portions 124a can be arranged spaced apart in the left-right direction. For example, one first guide portion 124a can be arranged on the left and right sides of the upper surface of the first sliding portion 122a, so that the pair of first guide portions 124a are spaced as far apart as possible, thereby improving the stability of the first sliding portion 122a.

[0125] Furthermore, the height to which the first guide portion 124a protrudes upward from the first fixing portion 121a can be greater than the height to which the first slide rail 123a protrudes downward from the first sliding portion 122a. In this case, the first guide groove is only formed on the upper surface of the first guide portion 124a, that is, the first guide rail will not contact any part of the first fixing portion 121a other than the first guide portion 124a, thereby further reducing the friction area between the first fixing portion 121a and the first sliding portion 122a.

[0126] On the other hand, as a braking method for the first sliding part 122a, the first fixing part 121a may further include a first clamping part 125a, which is used to brake and / or fix the first slide rail 123a.

[0127] For example, when the first electrical housing 210a moves from the first initial position P10a to the first moving position P20a or returns from the first moving position P20a to the first initial position P10a, the first clamping part 125a can clamp the first slide rail 123a along the thickness direction of the first slide rail 123a to apply friction to it, thereby stopping the first sliding part 122a at a predetermined position.

[0128] Furthermore, a downwardly protruding first locking protrusion 126a can be formed at the left end of the first sliding portion 122a to lock onto the left end of the first fixing portion 121a. This ensures that when the first electrical housing 210a returns from the first moving position P20a to the first initial position P10a, the first sliding portion 122a brakes in time, thereby preventing the first electrical housing 210a from colliding with and being damaged by the opposite second electrical housing 210b.

[0129] The first moving part 120a has been described above. The second moving part 120b will be described below.

[0130] like Figure 7 As shown in (b), the second moving part 120b may include: a second fixing part 121b, fixed to the upper part of the second base 110b; and a second sliding part 122b, disposed on the upper part of the second fixing part 121b in a manner that allows it to slide in the left and right direction.

[0131] The second fixing part 121b can be integrally formed with the second base 110b. For example, it can be manufactured as a single unit during manufacturing, or it can be fixed together after being manufactured separately. The fixing method of the second fixing part 121b can adopt the fixing method commonly used in the art, such as fastening with bolts, etc., and the present invention is not limited thereto.

[0132] The second sliding portion 122b is used to mount the second electrical housing 210b and to move the second electrical housing 210b back and forth between the second initial position P10b and the second moving position P20b. That is, the second sliding portion 122b supports the second electrical housing 210b from below and moves the second electrical housing 210b by its own movement. The second sliding portion 122b can be used to mount the second electrical housing 210b on its upper part by fastening methods commonly used in the art, such as using bolts. In addition, the second sliding portion 122b may have a smooth lower surface, for example, to slide smoothly on the second fixed portion 121b.

[0133] Preferably, the second fixing portion 121b may include a second guide groove (not shown) extending in the left-right direction and opening upwards, and the second sliding portion 122b may include a second slide rail 123b extending in the left-right direction and protruding downwards, the second slide rail 123b being inserted into the second guide groove. In this case, the inner contour of the second guide groove and the outer contour of the second slide rail 123b can match each other, thereby improving the stability of the second sliding portion 122b during sliding. Furthermore, the second guide groove may, for example, be formed on the center line extending in the left-right direction of the second fixing portion 121b, and the second guide rail may, for example, be formed on the center line extending in the left-right direction of the second sliding portion 122b. Thus, the second sliding portion 122b can be guided to slide stably and accurately in the left-right direction.

[0134] More preferably, the second guide groove and the second slide rail 123b can be arranged in a pair, spaced apart in the front-rear direction. For example, the pair of second guide grooves can be symmetrically formed on the front and rear sides with reference to the center line extending in the left-right direction of the second fixing part 121b, and the pair of second guide rails can be symmetrically formed on the front and rear sides with reference to the center line extending in the left-right direction of the second sliding part 122b. This improves the stability of the second sliding part 122b in the front-rear direction and ensures that the pair of second guide grooves and the pair of second guide rails are subjected to uniform force.

[0135] On the other hand, the second fixing portion 121b may include an upwardly protruding second guide portion 124b, and the second guide groove may be formed on the upper surface of the second guide portion 124b. That is, the second guide groove is appropriately raised by the second guide portion 124b to reduce the friction area between the second fixing portion 121b and the second sliding portion 122b, thereby reducing wear.

[0136] Preferably, the length of the second guide portion 124b in the left-right direction can be less than the length of the second fixing portion 121b in the left-right direction, thereby further reducing the friction area between the second fixing portion 121b and the second sliding portion 122b.

[0137] However, the shorter the length of the second guide portion 124b in the left-right direction, the lower the stability of the second sliding portion 122b. Therefore, a pair of second guide portions 124b can be arranged spaced apart in the left-right direction. For example, one second guide portion 124b can be arranged on the left and right sides of the upper surface of the second sliding portion 122b, so that the pair of second guide portions 124b are spaced as far apart as possible, thereby improving the stability of the second sliding portion 122b.

[0138] Furthermore, the upward protrusion of the second guide portion 124b from the second fixing portion 121b can be greater than the downward protrusion of the second slide rail 123b from the second sliding portion 122b. In this case, the second guide groove is formed only on the upper surface of the second guide portion 124b; that is, the second guide rail will not contact any part of the second fixing portion 121b other than the second guide portion 124b. This further reduces the frictional area between the second fixing portion 121b and the second sliding portion 122b.

[0139] On the other hand, as a braking method for the second sliding part 122b, the second fixing part 121b may further include a second clamping part 125b, which is used to brake and / or fix the second slide rail 123b.

[0140] For example, when the second electrical housing 210b moves from the second initial position P10b to the second moving position P20b or returns from the second moving position P20b to the second initial position P10b, the second clamping part 125b can clamp the second slide rail 123b along the thickness direction of the second slide rail 123b to apply friction to it, thereby stopping the second sliding part 122b at a predetermined position.

[0141] Furthermore, a downwardly protruding second locking protrusion 126b can be formed at the right end of the second sliding portion 122b to lock onto the right end of the second fixing portion 121b. This ensures that when the second electrical housing 210b returns from the second moving position P20b to the second initial position P10b, the second sliding portion 122b brakes in time, thereby preventing the second electrical housing 210b from colliding with and being damaged by the opposite first electrical housing 210a.

[0142] <Second Implementation Method>

[0143] Figure 8 This is a schematic diagram illustrating the process of moving from the first initial position and the second initial position of the present invention to the first moving position and the second moving position of the second embodiment, respectively.

[0144] Reference Figure 5 (b) and Figure 8 The first moving position P20a can be the position after rotating from the first initial position P10a by moving the right side to the left rearward, and the second moving position P20b can be the position after rotating from the second initial position P10b by moving the left side to the right rearward. That is, the first moving part 120a drives the first electrical assembly box 210a to rotate by moving the right side to the left rearward, and at the same time, the second moving part 120b drives the second electrical assembly box 210b to rotate by moving the left side to the right rearward, thus forming the passage. This embodiment can be applied when there is sufficient rear space.

[0145] Furthermore, a gap may exist between the first initial position P10a and the second initial position P10b to prevent the right front corner of the first electrical box 210a from colliding with the left front corner of the second electrical box 210b and being damaged when the first electrical box 210a and the second electrical box 210b reciprocate between the first initial position P10a and the second initial position P10b and the first moving position P20a and the second moving position P20b, respectively.

[0146] In addition, the first moving part 120a and the second moving part 120b can be driven by driving methods commonly used in the art. For example, they can be configured with separate motors and driven by belts, gears, racks, etc., or they can be provided with piston cylinders and driven by pistons. However, these driving methods may occupy a large space. Therefore, the first moving part 120a and the second moving part 120b are preferably driven by a rotary motor (not shown) to reduce the space occupied and make the structure more compact.

[0147] Since the first moving part 120a and the second moving part 120b have symmetrical structures, the first moving part 120a will be described first, and then the second moving part 120b will be described in a similar manner.

[0148] Figure 9 (a) and (b) in the text are based on Figure 3 Regions A and B in the diagram illustrate the first and second moving parts according to the second embodiment of the present invention.

[0149] like Figure 9 As shown in (a), the first moving part 120a may include: a first fixing part 121a, fixed to the upper part of the first base 110a; and a first rotating part 127a, rotatably disposed on the upper part of the first fixing part 121a.

[0150] The first fixing part 121a can be integrally formed with the first base 110a. For example, it can be manufactured as a single unit during manufacturing, or it can be fixed together after being manufactured separately. The fixing method of the first fixing part 121a can adopt the fixing method commonly used in the art, such as fastening with bolts, etc., and the present invention is not limited thereto.

[0151] The first rotating part 127a is used to mount the first electrical assembly box 210a and to move the first electrical assembly box 210a back and forth between the first initial position P10a and the first moving position P20a. That is, the first rotating part 127a supports the first electrical assembly box 210a from below and drives the first electrical assembly box 210a to rotate through its own rotation. The first rotating part 127a can mount the first electrical assembly box 210a on its upper part by a fastening method commonly used in the art, such as fastening it with bolts.

[0152] Furthermore, the first rotating part 127a may be formed in a columnar shape to facilitate rotation. Further, a first platform part 128a may be formed on the upper part of the first rotating part 127a. The first platform part 128a may have, for example, a flange shape, to increase the support area for the first electrical enclosure 210a, thereby improving the stability of the first electrical enclosure 210a.

[0153] The first moving part 120a has been described above. The second moving part 120b will be described below.

[0154] like Figure 9 As shown in (b), the second moving part 120b may include: a second fixing part 121b, fixed to the upper part of the second base 110b; and a second rotating part 127b, rotatably disposed on the upper part of the second fixing part 121b.

[0155] The second fixing part 121b can be integrally formed with the second base 110b. For example, it can be manufactured as a single unit during manufacturing, or it can be fixed together after being manufactured separately. The fixing method of the second fixing part 121b can adopt the fixing method commonly used in the art, such as fastening with bolts, etc., and the present invention is not limited thereto.

[0156] The second rotating part 127b is used to mount the second electrical housing 210b and to move the second electrical housing 210b back and forth between the second initial position P10b and the second moving position P20b. That is, the second rotating part 127b supports the second electrical housing 210b from below and drives the second electrical housing 210b to rotate through its own rotation. The second rotating part 127b can be used to mount the second electrical housing 210b on its upper part by a fastening method commonly used in the art, such as fastening with bolts.

[0157] Furthermore, the second rotating part 127b can be formed in a columnar shape to facilitate rotation. Further, a second platform part 128b can be formed on the upper part of the second rotating part 127b. The second platform part 128b can have, for example, a flange shape, to increase the support area for the second electrical enclosure 210b, thereby improving the stability of the second electrical enclosure 210b.

[0158] On the other hand, the rotation angle of the first rotating part 127a and the second rotating part 127b can be from 0 to 90 degrees. As the rotation angle increases, the width of the channel will become larger and larger. When the rotation angle is 90 degrees, the width of the channel will reach its maximum. Those skilled in the art can set the first moving position P20a and the second moving position P20b according to the actual situation, and drive the first rotating part 127a and the second rotating part 127b to rotate according to the angle between the first moving position P20a and the first initial position P10a and the angle between the second moving position P20b and the second initial position P10b.

[0159] <Third Implementation Method>

[0160] Figure 10 This is a schematic diagram illustrating the process of moving from the first initial position and the second initial position of the present invention to the first moving position and the second moving position of the third embodiment, respectively.

[0161] Reference Figure 5 (c) and Figure 10 The first moving position P20a can be a position obtained by translating to the left and rotating the right side of the first initial position P10a to the left rearward. The second moving position P20b can be a position obtained by translating to the right and rotating the left side of the second initial position P10b to the right rearward. That is, the first moving part 120a drives the first electrical assembly box 210a to translate to the left and rotate the right side of the first electrical assembly box 210a to the left rearward, while the second moving part 120b drives the second electrical assembly box 210b to translate to the right and rotate the left side of the second electrical assembly box 210b to the right rearward, thus forming the passage. This embodiment can be applied to situations where there is space on the left and right sides and at the rear, but it is not sufficient.

[0162] The first moving part 120a and the second moving part 120b can be driven by driving methods commonly used in the art. For example, they can be configured with separate motors and driven by belts, gears, racks, etc., or they can be set with piston cylinders and driven by pistons. However, these driving methods may occupy a large space. Therefore, the first moving part 120a and the second moving part 120b are preferably driven by a combination of a linear motor (not shown) and a rotary motor (not shown) to reduce the space occupied and make the structure more compact.

[0163] Figure 11 (a) and (b) in the text are based on Figure 3 Regions A and B in the diagram illustrate the first and second moving parts according to the third embodiment of the present invention.

[0164] like Figure 11 As shown in (a), the first moving part 120a may include: a first fixing part 121a, fixed to the upper part of the first base 110a; a first sliding part 122a, disposed on the upper part of the first fixing part 121a in a manner that allows it to slide in the left-right direction; and a first rotating part 127a, rotatably disposed on the upper part of the first sliding part 122a.

[0165] like Figure 11 As shown in (b), the second moving part 120b may include: a second fixing part 121b, fixed to the upper part of the second base 110b; a second sliding part 122b, disposed on the upper part of the second fixing part 121b in a manner that allows it to slide in the left-right direction; and a second rotating part 127b, rotatably disposed on the upper part of the second sliding part 122b.

[0166] The structures of the first fixing part 121a, the first sliding part 122a, the second fixing part 121b, and the second sliding part 122b are the same as those in the first embodiment. The structures of the first rotating part 127a and the second rotating part 127b are the same as those in the second embodiment. Furthermore, the translation and rotation of the first electrical housing 210a can be achieved by a combination of the translation of the first sliding part 122a and the rotation of the first rotating part 127a, and the translation and rotation of the second electrical housing 210b can be achieved by a combination of the translation of the second sliding part 122b and the rotation of the second rotating part 127b. For details, please refer to the first and second embodiments, and therefore, they will not be described again here.

[0167] As can be seen, the third embodiment is an embodiment combining the first embodiment and the second embodiment. The first moving part 120a and the second moving part 120b can both translate and rotate. Therefore, either translation or rotation can be selectively performed, thereby further being used when at least one of the left and right side spaces and the rear space is sufficient.

[0168] The structures of the three preferred first moving positions P20a and second moving positions P20b, and the corresponding first moving part 120a and second moving part 120b, have been described in detail above through the first to third embodiments.

[0169] The process module 200 and semiconductor processing equipment 300 of the present invention will be described below. Specifically, the process module 200 and semiconductor processing equipment 300 corresponding to the three preferred first moving positions P20a and second moving positions P20b described above will be described in detail.

[0170] Refer again Figure 3 The process module 200 may include the openable upper frame 100 of the present invention. Further, the process module 200 may include: a first electrical housing 210a, disposed on the upper part of the first moving part 120a, for reciprocating between a first initial position P10a and a first moving position P20a; and a second electrical housing 210b, disposed on the upper part of the second moving part 120b, for reciprocating between a second initial position P10b and a second moving position P20b.

[0171] The first electrical box 210a and the second electrical box 210b preferably have different shapes depending on the first moving position P20a and the second moving position P20b.

[0172] Figure 12 This is a top view of a first electrical assembly box and a second electrical assembly box according to one embodiment of the present invention.

[0173] like Figure 12 As shown, when the first moving position P20a is the position after rotating from the first initial position P10a by moving from the right side to the left rear, and the second moving position P20b is the position after rotating from the second initial position P10b by moving from the left side to the right rear, a first chamfer 211a can be formed at the right front corner of the first electrical assembly box 210a, and a second chamfer 211b can be formed at the left front corner of the second electrical assembly box 210b. This prevents the right front corner of the first electrical assembly box 210a from colliding with the left front corner of the second electrical assembly box 210b and causing damage when the first electrical assembly box 210a and the second electrical assembly box 210b reciprocate between the first initial position P10a and the second initial position P10b, respectively. In this case, no gap needs to be provided between the first initial position P10a and the second initial position P10b. Furthermore, the size and angle of the first chamfer 211a and the second chamfer 211b can be set according to the actual situation such as the position of the first rotating part 127a and the second rotating part 127b, the size of the first electrical assembly box 210a and the second electrical assembly box 210b, and the rotation angle, and the present invention is not limited thereto.

[0174] Figure 13 This is a top view of the first and second electrical enclosures, which are embodiments of the present invention.

[0175] like Figure 13 Specifically, when the first moving position P20a is the position after shifting left from the first initial position P10a and the second moving position P20b is the position after shifting right from the second initial position P10b, a first through-hole 212a can be formed at the left front corner of the first electrical assembly box 210a, and a second through-hole 212b can be formed at the right front corner of the second electrical assembly box 210b. Therefore, when a semiconductor processing equipment is composed of multiple process modules 200 including the first electrical assembly box 210a and the second electrical assembly box 210b, both the idle space can be reduced and the utilization rate of the idle space can be improved.

[0176] The shape and size of the first notch 212a and the second notch 212b can be set according to the actual situation such as the size of the first electrical box 210a and the second electrical box 210b and the translation distance, and the present invention is not limited thereto.

[0177] Figure 14 It includes what is shown Figure 13 A top view of the semiconductor processing equipment with the first and second electrical packing boxes. Figure 15 It is shown to Figure 14 A schematic diagram of a process module forming a channel in a semiconductor processing equipment.

[0178] like Figure 14 and Figure 15 As shown, the semiconductor processing equipment 300 of the present invention may include: a transport module 310 for transporting wafers; and a plurality of (e.g., three) process modules arranged around the transport module 310 with their front surfaces facing the transport module 310, wherein at least one of the plurality of transport modules 310 is a process module 200 as described above.

[0179] Additionally, the semiconductor processing equipment 300 may be as shown in Figure 1 The present invention is not limited to the semiconductor processing equipment 1 in the prior art, which further includes a front-end module (not shown) or a processing module (not shown).

[0180] In one specific embodiment, the semiconductor processing equipment 300 of the present invention may include three process modules, all of which are process modules 200 of the present invention. In this case, the three process modules 200 may be arranged such that they are located on the three sides of a square with their front surfaces facing the center of the square, thereby surrounding the transport module 310.

[0181] In one specific implementation, each of the three process modules 200 may include a first electrical assembly box 210a with a first through-hole 212a formed at the left front corner and a second electrical assembly box 210b with a second through-hole 212b formed at the right front corner. In this case, adjacent process modules 200 do not need to be arranged with their front surface corners adjacent to each other as in the prior art; instead, they can be arranged with the first through-hole 212a and the second through-hole 212b overlapping, thereby reducing the amount of unused space.

[0182] Additionally, when shown Figure 14 The first electrical packing box 210a and the second electrical packing box 210b in the middle are as follows Figure 15When the passage is formed by separating the two sides as shown, even if safety gaps are left on the left and right sides to prevent the unused space from being completely compressed, the utilization rate of the unused space can be close to 100%.

[0183] In summary, the openable upper frame 100, process module 200, and semiconductor processing equipment 300 of the present invention temporarily form a channel through which the transport module 310 for transporting wafers passes through the process module 200 by opening and closing operations. Therefore, the overall size can be reduced, and fixed idle space can be effectively utilized, and even the idle space can be reduced.

[0184] The present invention has been described in detail above with some embodiments, but the present invention is not limited thereto, and may also be implemented individually or in combination as shown in the embodiments and variations shown in the following items.

[0185] 1. A hinged upper frame for a process module of a semiconductor processing equipment for processing wafers, characterized in that it comprises:

[0186] The first base is located on the left side;

[0187] The second base is located on the right side;

[0188] A first movable part, disposed on the upper part of the first base, is used to mount the first electrical assembly box and to reciprocate the first electrical assembly box between a first initial position and a first movable position; and

[0189] The second movable part, disposed on the upper part of the second base, is used to install the second electrical assembly box and to move the second electrical assembly box back and forth between the second initial position and the second movable position.

[0190] Wherein, the first initial position is adjacent to the second initial position, and the first moving position is separated from the second moving position by a predetermined distance to form a channel for the transport module for transporting the wafer to pass through the process module.

[0191] 2. The retractable upper frame as described in item 1, characterized in that,

[0192] The first moving position is the position after shifting to the left from the first initial position.

[0193] The second moving position is the position after shifting to the right from the second initial position.

[0194] 3. The retractable upper frame as described in item 2, characterized in that,

[0195] The first moving part and the second moving part are driven by linear motors.

[0196] 4. The retractable upper frame as described in item 2, characterized in that,

[0197] The first moving part includes:

[0198] A first fixing part is fixed to the upper part of the first base; and

[0199] The first sliding part is disposed on the upper part of the first fixed part in a manner that allows it to slide in the left-right direction.

[0200] The second moving part includes:

[0201] The second fixing part is fixed to the upper part of the second base; and

[0202] The second sliding part is disposed on the upper part of the second fixed part in a manner that allows it to slide in the left-right direction.

[0203] 5. The retractable upper frame as described in item 4, characterized in that,

[0204] A first locking protrusion protruding downwards is formed at the left end of the first sliding part to lock into the left end of the first fixing part.

[0205] A downwardly protruding second locking protrusion is formed at the right end of the second sliding part to lock into the right end of the second fixing part.

[0206] 6. The retractable upper frame as described in item 4, characterized in that,

[0207] The first fixing part includes a first guide groove extending in the left-right direction and opening upward, and the first sliding part includes a first slide rail extending in the left-right direction and protruding downward, the first slide rail being inserted into the first guide groove.

[0208] The second fixing part includes a second guide groove that extends in the left-right direction and opens upward, and the second sliding part includes a second slide rail that extends in the left-right direction and protrudes downward, and the second slide rail is inserted into the second guide groove.

[0209] 7. The retractable upper frame as described in item 6, characterized in that,

[0210] The first guide groove, the first slide rail, the second guide groove, and the second slide rail are each arranged in a pair, spaced apart in the front-to-back direction.

[0211] 8. The retractable upper frame as described in item 6, characterized in that,

[0212] The first fixing part includes an upwardly protruding first guide part, and the first guide groove is formed on the upper surface of the first guide part.

[0213] The second fixing part includes an upwardly protruding second guide part, and the second guide groove is formed on the upper surface of the second guide part.

[0214] 9. The retractable upper frame as described in item 8, characterized in that,

[0215] The first guide portion and the second guide portion are each arranged in a pair, spaced apart in the left-right direction.

[0216] 10. The retractable upper frame as described in item 6, characterized in that,

[0217] The first fixing part further includes a first clamping part, which is used to brake and / or fix the first slide rail.

[0218] The second fixing part further includes a second clamping part, which is used to brake and / or fix the second slide rail.

[0219] 11. The retractable upper frame as described in item 1, characterized in that,

[0220] The first moving position is the position after rotating from the first initial position by moving the right side to the left and rear.

[0221] The second moving position is the position after rotating from the second initial position by moving the left side to the right rearward.

[0222] 12. The retractable upper frame as described in item 11, characterized in that,

[0223] There is a gap between the first initial position and the second initial position.

[0224] 13. The retractable upper frame as described in item 11, characterized in that,

[0225] The first moving part and the second moving part are driven by a rotary motor.

[0226] 14. The retractable upper frame as described in item 11, characterized in that,

[0227] The first moving part includes:

[0228] A first fixing part is fixed to the upper part of the first base; and

[0229] The first rotating part is rotatably disposed on the upper part of the first fixed part.

[0230] The second moving part includes:

[0231] The second fixing part is fixed to the upper part of the second base; and

[0232] The second rotating part is rotatably disposed on the upper part of the second fixed part.

[0233] 15. The retractable upper frame as described in item 14, characterized in that,

[0234] The rotation angle of the first rotating part and the second rotating part is 0 to 90 degrees.

[0235] 16. The retractable upper frame as described in item 1, characterized in that,

[0236] The first moving position is the position after shifting to the left from the first initial position and rotating by moving the right side to the left and rear.

[0237] The second moving position is the position after translating to the right from the second initial position and rotating by moving the left side to the right rearward.

[0238] 17. The retractable upper frame as described in item 16, characterized in that,

[0239] The first moving part and the second moving part are driven by a combination of a linear motor and a rotary motor.

[0240] 18. The retractable upper frame as described in item 16, characterized in that,

[0241] The first moving part includes:

[0242] The first fixing part is fixed to the upper part of the first base;

[0243] A first sliding portion is disposed on the upper part of the first fixed portion in a manner that allows it to slide in a left-right direction; and

[0244] The first rotating part is rotatably disposed on the upper part of the first sliding part.

[0245] The second moving part includes:

[0246] The second fixing part is fixed to the upper part of the second base;

[0247] The second sliding part is disposed on the upper part of the second fixed part in a manner that allows it to slide in the left-right direction; and

[0248] The second rotating part is rotatably disposed on the upper part of the second sliding part.

[0249] 19. The retractable upper frame as described in item 18, characterized in that,

[0250] A first locking protrusion protruding downwards is formed at the left end of the first sliding part to lock into the left end of the first fixing part.

[0251] A downwardly protruding second locking protrusion is formed at the right end of the second sliding part to lock into the right end of the second fixing part.

[0252] 20. The retractable upper frame as described in item 18, characterized in that,

[0253] The first fixing part includes a first guide groove extending in the left-right direction and opening upward, and the first sliding part includes a first slide rail extending in the left-right direction and protruding downward, the first slide rail being inserted into the first guide groove.

[0254] The second fixing part includes a second guide groove that extends in the left-right direction and opens upward, and the second sliding part includes a second slide rail that extends in the left-right direction and protrudes downward, and the second slide rail is inserted into the second guide groove.

[0255] 21. The retractable upper frame as described in item 20, characterized in that,

[0256] The first guide groove, the first slide rail, the second guide groove, and the second slide rail are each arranged in a pair, spaced apart in the front-to-back direction.

[0257] 22. The retractable upper frame as described in item 20, characterized in that,

[0258] The first fixing part includes an upwardly protruding first guide part, and the first guide groove is formed on the upper surface of the first guide part.

[0259] The second fixing part includes an upwardly protruding second guide part, and the second guide groove is formed on the upper surface of the second guide part.

[0260] 23. The retractable upper frame as described in item 22, characterized in that,

[0261] The first guide portion and the second guide portion are each arranged in a pair, spaced apart in the left-right direction.

[0262] 24. The retractable upper frame as described in item 20, characterized in that,

[0263] The first fixing part further includes a first clamping part, which is used to brake and / or fix the first slide rail.

[0264] The second fixing part further includes a second clamping part, which is used to brake and / or fix the second slide rail.

[0265] 25. The retractable upper frame as described in item 18, characterized in that,

[0266] The rotation angle of the first rotating part and the second rotating part is 0 to 90 degrees.

[0267] 26. A process module, characterized in that it comprises:

[0268] The retractable superframe as described in any of items 1 to 25;

[0269] A first electrical assembly box, disposed on the upper part of the first movable part, reciprocates between a first initial position and a first movable position; and

[0270] The second electrical housing is disposed on the upper part of the second moving part to reciprocate between the second initial position and the second moving position.

[0271] 27. The process module as described in item 26, characterized in that,

[0272] When the first moving position is the position after shifting to the left from the first initial position and the second moving position is the position after shifting to the right from the second initial position...

[0273] A first, vertically penetrating notch is formed at the front left corner of the first electrical assembly box.

[0274] A second, vertically penetrating notch is formed at the front right corner of the second electrical assembly box.

[0275] 28. The process module as described in item 26, characterized in that,

[0276] When the first moving position is the position after rotating from the first initial position by moving the right side to the left rear, and the second moving position is the position after rotating from the second initial position by moving the left side to the right rear.

[0277] A first chamfer is formed at the front right corner of the first electrical assembly box.

[0278] A second chamfer is formed at the left front corner of the second electrical assembly box.

[0279] 29. A semiconductor processing apparatus, characterized in that it comprises:

[0280] A transport module for transporting wafers; and

[0281] Multiple process modules are arranged around the conveying module with their front surfaces facing the conveying module.

[0282] At least one of the plurality of conveying modules is a process module as described in any one of items 26 to 28.

[0283] The embodiments of the present invention have been described above, but this is only for the purpose of helping to fully understand the present invention. The present invention is not limited thereto, and those skilled in the art can make various modifications and variations based on these descriptions. Therefore, the technical concept of the present invention is not limited to the above-described embodiments, and the appended claims and their equivalents or variations are all within the scope of the present invention.

Claims

1. A hinged upper frame for a process module of a semiconductor processing equipment for processing wafers, characterized in that, include: The first base is located on the left side; The second base is located on the right side; A first movable part is disposed on the upper part of the first base for mounting the first electrical assembly box and moving the first electrical assembly box back and forth between a first initial position and a first movable position. as well as The second movable part, disposed on the upper part of the second base, is used to install the second electrical assembly box and to move the second electrical assembly box back and forth between the second initial position and the second movable position. Wherein, the first initial position is adjacent to the second initial position, and the first moving position is separated from the second moving position by a predetermined distance to form a channel for the transport module for transporting the wafer to pass through the process module.

2. The hinged upper frame according to claim 1, characterized in that, The first moving position is the position after shifting to the left from the first initial position. The second moving position is the position after shifting to the right from the second initial position.

3. The hinged upper frame according to claim 2, characterized in that, The first moving part and the second moving part are driven by linear motors.

4. The hinged upper frame according to claim 2, characterized in that, The first moving part includes: A first fixing part is fixed to the upper part of the first base; and The first sliding part is disposed on the upper part of the first fixed part in a manner that allows it to slide in the left-right direction. The second moving part includes: The second fixing part is fixed to the upper part of the second base; and The second sliding part is disposed on the upper part of the second fixed part in a manner that allows it to slide in the left-right direction.

5. The hinged upper frame according to claim 4, characterized in that, A first locking protrusion protruding downwards is formed at the left end of the first sliding part to lock into the left end of the first fixing part. A downwardly protruding second locking protrusion is formed at the right end of the second sliding part to lock into the right end of the second fixing part.

6. The hinged upper frame according to claim 4, characterized in that, The first fixing part includes a first guide groove extending in the left-right direction and opening upward, and the first sliding part includes a first slide rail extending in the left-right direction and protruding downward, the first slide rail being inserted into the first guide groove. The second fixing part includes a second guide groove that extends in the left-right direction and opens upward, and the second sliding part includes a second slide rail that extends in the left-right direction and protrudes downward, and the second slide rail is inserted into the second guide groove.

7. The hinged upper frame according to claim 6, characterized in that, The first guide groove, the first slide rail, the second guide groove, and the second slide rail are each arranged in a pair, spaced apart in the front-to-back direction.

8. The hinged upper frame according to claim 6, characterized in that, The first fixing part includes an upwardly protruding first guide part, and the first guide groove is formed on the upper surface of the first guide part. The second fixing part includes an upwardly protruding second guide part, and the second guide groove is formed on the upper surface of the second guide part.

9. The hinged upper frame according to claim 8, characterized in that, The first guide portion and the second guide portion are each arranged in a pair, spaced apart in the left-right direction.

10. The hinged upper frame according to claim 6, characterized in that, The first fixing part further includes a first clamping part, which is used to brake and / or fix the first slide rail. The second fixing part further includes a second clamping part, which is used to brake and / or fix the second slide rail.

11. A process module, characterized in that, include: The retractable upper frame as described in any one of claims 1 to 10; The first electrical assembly box is disposed on the upper part of the first movable part of the opening and closing upper frame, so as to reciprocate between the first initial position and the first movable position; as well as The second electrical enclosure is disposed on the upper part of the second movable part of the opening and closing upper frame to reciprocate between the second initial position and the second movable position.

12. The process module according to claim 11, characterized in that, When the first moving position is the position after shifting to the left from the first initial position and the second moving position is the position after shifting to the right from the second initial position... A first, vertically penetrating notch is formed at the front left corner of the first electrical assembly box. A second, vertically penetrating notch is formed at the front right corner of the second electrical assembly box.

13. A semiconductor processing apparatus, characterized in that, include: The delivery module is used to transport wafers; as well as Multiple process modules are arranged around the conveying module with their front surfaces facing the conveying module. Wherein, at least one of the plurality of conveying modules is a process module as described in any one of claims 11 to 12.

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