Transport robot for flat panel and substrate processing apparatus having same

Abstract

The invention provides a transport robot for a flat panel and a substrate processing apparatus having the same. A transport robot for flat panels may include: a robot body; a robot arm which is disposed on the robot main body and which moves in the horizontal direction or rotates about the robot main body; a manipulator part which is disposed at an end of the robot arm part and has a finger part that supports a substrate; and a transfer device, which is provided on the manipulator part, and which moves the substrate placed on the finger-shaped part when the substrate is transferred to another device.

Description

Cross-reference to related applications

[0001] This application claims priority to Korean Patent Application No. 10-2024-0166494, filed on November 20, 2024, the entire contents of which are incorporated herein by reference. Technical Field

[0002] The present invention relates to a transport robot for flat panel and a substrate processing apparatus having the transport robot. Background Technology

[0003] Typically, manufacturing flat panel displays, such as liquid crystal display devices (LCDs), plasma display panels (PDPs), electroluminescent displays (ELDs), and vacuum fluorescent displays (VFDs), requires multiple processes on the glass substrate, including coating, deposition, etching, development, and cleaning. These processes are mostly performed in multiple processing units (or chambers) for each process. Each processing unit is equipped with a substrate transfer device, such as a conveyor belt unit, for transferring the substrate. In particular, substrate processing apparatuses that handle etching, cleaning, and other processes employ inline equipment with multiple processing units arranged consecutively. Such substrate processing apparatuses, by incorporating conveyor belt devices within each processing unit, can handle the corresponding unit process while transferring the substrate.

[0004] As mentioned above, traditional technologies can only use devices with the same interface type to form a production line in a linear fashion. For example, if transport is carried out between conveyor belt type devices, it is impossible to achieve diagonal transport or transport to different levels. Summary of the Invention

[0005] (a) Technical problems to be solved The purpose of this invention is to provide a transport robot for flat panel that can transport and move target objects like a conveyor belt on a robotic arm, and a substrate processing apparatus having the transport robot.

[0006] The object of the present invention is to provide a transport robot for flat panel and a substrate processing apparatus having the transport robot, which facilitates the transfer of target objects (interfaces) between non-linearly configured processing units.

[0007] The technical problem to be solved by the present invention is not limited thereto, and those skilled in the art can clearly understand other technical problems not mentioned through the following description.

[0008] (II) Technical Solution According to another aspect of the present invention, a transport robot for a flat panel is provided, comprising: a robot body; a robot arm disposed on the robot body and movable in a horizontal direction or rotating about the robot body; a manipulator disposed at the end of the robot arm and having finger-like portions for supporting a substrate; and a transfer device disposed at the manipulator for slidingly moving a substrate placed on the finger-like portions when transferring the substrate to another device, wherein the transfer device comprises: a transport roller disposed on the finger-like portions for supporting and transferring the substrate; and a lifting member for lifting the transport roller to a standby position below the finger-like portions and to a transport position above the finger-like portions, wherein the finger-like portions include: an opening at which the transport roller, lifted to the transport position by the lifting member, is located, and wherein the transfer device comprises: a fixing member for fixing the substrate supported by the finger-like portions when the transport roller is in the standby position.

[0009] (III) Beneficial Effects According to one embodiment of the present invention, a target object can be transported and moved on a robotic arm like a conveyor belt.

[0010] According to one embodiment of the present invention, the transfer of a target object can be easily performed between processing units that are configured non-linearly.

[0011] The effects of the present invention are not limited to those described above. For any effects not mentioned, those skilled in the art will clearly understand them through this specification and the accompanying drawings. Attached Figure Description

[0012] Figure 1 This is a perspective view of a transport robot for flat panel according to an embodiment of the present invention.

[0013] Figure 2 It is shown Figure 1 The diagram shows a plan view of the robotic arm.

[0014] Figure 3 It is a side cross-sectional view showing the object to be moved being placed there.

[0015] Figure 4 It is a side cross-sectional view showing the state in which the target object is supported and moved by the transfer device.

[0016] Figure 5 This is a plan view illustrating a second embodiment of the transfer device in a transport robot for flat panel.

[0017] Figure 6 yes Figure 5 The cross-sectional view of the transfer device shown.

[0018] Figure 7 It is along Figure 5 The cross-sectional view taken by line AA in the diagram.

[0019] Figure 8 This is a plan view illustrating a third embodiment of the transfer device in a transport robot for flat panel.

[0020] Figure 9 This diagram illustrates the processing equipment used in a transport robot for flat panel displays.

[0021] Figure 10 This is a diagram showing another processing device used in a transport robot for flat panel displays.

[0022] Figure 11 This is a diagram showing another processing device used in a transport robot for flat panel displays.

[0023] Explanation of reference numerals in the attached figures 100: Robot for transporting flat panel displays; 110: Robotic arm; 130: Transfer device; 132: Transport roller; 138: Lifting components. Detailed Implementation

[0024] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. These exemplary embodiments are provided to make the present disclosure more thorough and to fully convey its scope to those skilled in the art. Various specific details of examples of particular components, apparatuses, and methods are presented to provide a complete understanding of embodiments of the present disclosure. However, it will be apparent to those skilled in the art that these specific details are not essential, and the exemplary embodiments may be implemented in many different forms, none of which should be construed as limiting the scope of the disclosure. In some exemplary embodiments, well-known processes, well-known apparatus structures, and well-known technologies will not be described in detail.

[0025] In this embodiment, a flat panel will be used as the target object for processing. However, the technical concept of the present invention can also be applied to substrate processing apparatuses that process other types of substrates where the target object is not a flat panel.

[0026] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0027] Figure 1 This is a perspective view of a robot for transporting flat panels according to an embodiment of the present invention. Figure 2 It is shown Figure 1 The diagram shown is a plan view of the robotic arm. Figure 3 It is a side cross-sectional view showing the object to be moved being placed there. Figure 4 It is a side cross-sectional view showing the state in which the target object is supported and moved by the transfer device.

[0028] Reference Figure 1 The transport robot 100 for flat panel can include a robot body 190, a robot arm 180, a robotic hand 110, and a transfer device 130.

[0029] The robot body 190 may include a base section 192 and a body section 194. The base section 192 can fix the transport robot 100 for flat panels in a specific location. Depending on the installation conditions or internal structure of the transport robot 100 for flat panels, the base section 192 may be equipped with a drive unit consisting of a drive motor and various drive force transmission mechanisms such as belts or gears, as well as a control unit capable of appropriately driving and controlling the drive unit. On the other hand, when the specific location where the base section 192 is fixed itself moves linearly on a linear drive component such as a track, the transport robot 100 for flat panels as a whole will also move linearly.

[0030] For example, when substrate transfer (interface) is required with devices of different layer heights, the base portion 192 is mounted on a vertical linear drive component for vertical movement (see reference). Figure 9 For example, when transferring a substrate to an adjacent device, the base portion 192 is mounted on a horizontal linear drive member and moves horizontally (see reference). Figure 10 ).

[0031] The body section 194 is mounted on the base section 192 and performs rotation and lifting operations. This body section 194 can receive driving force through a drive unit that may be located inside the base section 192 for operation. However, the transmission of driving force to the body section 194 is not limited to this.

[0032] The robot arm 180 is mounted on the body 194, enabling the robotic hand 110 (described later) to easily access and transfer target objects such as flat panel displays. To facilitate access to and transfer of target objects, the robot arm 180 is preferably composed of multiple robot arm components, rather than a single robot arm component. For example, embodiments of the present invention disclose a multi-joint robot arm 180 composed of at least two robot arm components, namely a first robot arm component 180a and a second robot arm component 180b. The first robot arm component 180a is mounted on the upper part of the body 194 and rotates on a horizontal plane with the body 194 as its center. The second robot arm component 180b is coupled to one end of the first robot arm component 180a and rotates on a horizontal plane with the coupled point as a reference. Ultimately, the multi-joint robotic arm 180, through its own rotational operation and the lifting action received from the body 194, ensures that the robotic hand 110 (described later) can easily access the target object (e.g., a flat panel display). Additionally, the other end of the second robotic arm component 180b is coupled to the robotic arm frame 112 of the robotic hand 110 (described later).

[0033] Reference Figures 1 to 4 A robotic arm 110 is disposed at one end of a multi-joint robot arm 180 and positions the target object by rotating on a horizontal plane. The robotic arm is used to remove the target object from a loading container such as a hopper or a processing chamber for performing a predetermined process, or conversely, to feed the target object into it, and can be configured to accommodate the target object. The robotic arm 110 can move freely to any position in three-dimensional space, thus facilitating easy access to the target object.

[0034] For example, preferably, the robotic arm 110 includes a plurality of hollow finger-like portions 120 spaced apart at predetermined intervals and a robotic arm frame 112 connecting one side of the plurality of hollow finger-like portions 120. In this case, the length, number, and spacing between each finger-like portion 120 can be determined in accordance with the area of ​​the target object G to be transferred. Furthermore, the hollow finger-like portions 120 can be made of a lightweight, high-strength synthetic resin material such as fiber-reinforced plastics (FRP) that possesses the strength required to support the target object G, and exhibits durability, alkali resistance, corrosion resistance, processability, and non-magnetic, non-conductive properties. Additionally, the robotic arm frame 112 is connected to the robotic arm 180 and can be driven in accordance with the signals.

[0035] On the other hand, the finger-shaped portion 120 may also be provided with protrusions or other structures, which, when the target object G is loaded, are used to detect the placement position of the target object G or to prevent the target object G from sliding so as to stably place the target object. Alternatively, a device for fixing the substrate by vacuum adsorption may also be provided.

[0036] An opening 126 may be provided on the finger-shaped part 120, and the transport roller 132, which is raised and lowered to the transport position by the lifting component 138, is located at the opening.

[0037] A transfer device 130 is provided on the robotic arm 110. The transfer device 130 may include a transfer section 130-1 and a fixing section 130-2. The transfer section 130-1 is a device for sliding the transfer target G placed on the finger-like section 120 when transferring the transfer target G to other devices. The fixing section 130-2 fixes the base plate placed on the finger-like section when the robot arm moves to prevent the base plate from moving arbitrarily.

[0038] For example, the transfer unit 130-1 may include a transport roller 132 and a lifting component 138. The transfer unit 130-1 may be provided in each finger portion 120. The transport roller 132 may be provided in the finger portion 120 to support and transfer the target object G. The transport roller 132 may be rotated by a roller drive unit 134. The roller drive unit 134 may be provided in the robot arm unit 110. The driving force of the roller drive unit 134 may be transmitted to the transport roller 132 through various power transmission mechanisms 135 such as shafts, gears, and belts.

[0039] The lifting component 138 is a device for raising and lowering the transport roller 132 to a standby position below the finger portion 120 and to a transport position above the finger portion 120. When the transport roller 132 is in the standby position, the transfer target G supported by the finger portion 120 is fixed by the vacuum adsorption portion 128.

[0040] The fixing part 130-2 may include a plurality of vacuum adsorption parts 128, which are disposed in each of the finger-shaped parts 120 constituting the robot arm 110. The vacuum adsorption parts 128 are used to receive vacuum pressure through vacuum lines (not shown) and fix the transfer target object mounted on the upper part of the robot arm 110 to the finger-shaped parts 120 by vacuum adsorption. When the transport roller 132 is in the standby position, the transfer target object G supported by the finger-shaped parts 120 can be fixed by the fixing part 130-2.

[0041] Watch Figure 1 and Figure 2Vacuum adsorption units 128 can be provided at certain intervals on the finger-shaped portions 120. Vacuum adsorption units 128 can include vacuum holes 129a and suction pads 129b. It can be confirmed that the vacuum holes 129a are surrounded by suction pads 129b. At this time, the suction pads 129b are configured to surround the vacuum holes 129a formed on each finger-shaped portion 120. This is to prevent scratching that may occur when the transfer target object mounted on each finger-shaped portion 120 comes into contact with the finger-shaped portion 120. Furthermore, to prevent such scratching, the suction pads 129b can be formed of materials such as polyurethane or rubber.

[0042] Thus, during the transfer of the display panel, when the target object G is placed on the upper part of the robot arm 110, the sensor (not shown) built into the robot arm 110 can detect whether the target object G is placed. If it is determined that the target object G is placed, the vacuum pump equipped on the production line will operate and provide vacuum pressure to the target object G on the vacuum hole 129a and the suction pad 129b through the vacuum adsorption pipeline, so that the target object is in close contact with the suction pad 129b and is thus transferred in a fixed state.

[0043] The transport robot 100 for flat panels can include a moving mode and a sliding mode. The moving mode is the stage where the robot body 190 and robot arm 180 operate when transporting the target object, while the sliding mode is the stage where the transfer unit 130-1 operates. In the moving mode, the target object remains fixed by the vacuum suction unit 128, and the transport roller 132 waits in a standby position. In the sliding mode, the target object, supported by the transport roller 132 which has been raised and lowered to the transport position, slides and moves by the rotation of the transport roller 132, thereby being transferred to other equipment. In the sliding mode, the vacuum pressure supplied to the vacuum suction unit 128 is cut off.

[0044] Figure 5 This is a plan view illustrating a second embodiment of the transfer device in a transport robot for flat panel. Figure 6 yes Figure 5 The cross-sectional view of the transfer device shown is as follows. Figure 7 It is along Figure 5 The cross-sectional view taken by line AA in the diagram.

[0045] Figures 5 to 7 The transfer device 140a shown may include a transfer section 140-1 and a fixing section 140-2. The transfer section 140-1 may include a conveyor belt 142 and a belt drive section 144, and the fixing section 140-2 may include a vacuum suction plate 127 having vacuum holes for vacuum fixing a substrate.

[0046] The conveyor belt 142 can be configured to cover the finger portion 120a along its length. The target object can be supported by the conveyor belt 142 covering the finger portion 120a. The conveyor belt 142 is used to move the target object in one direction while supporting it. The conveyor belt 142 is configured as a belt with a predetermined width and a closed curve cross-section. The belt drive unit 144 may include a plurality of rollers 145 that contact and rotate with the conveyor belt 142 and a motor 147 for rotating the rollers 145. For example, the motor 147 may be installed within the robot frame 112 of the robot unit 110. The power of the motor 147 can be transmitted to the rollers 145 installed in each finger portion through various power transmission mechanisms 146 such as shafts and gears. The motor 147 may be a servo motor or other power source, and its type is not particularly limited.

[0047] The conveyor belt 142 rotates via rollers 145, with its upper part moving in one direction (X1) and its lower part moving in the opposite direction (X2) as it moves. Thus, when a target object G is loaded onto the upper part of the conveyor belt 142, it can be moved in one direction.

[0048] Two conveyor belts 142 can be arranged side-by-side in a finger-shaped section 120a, and a vacuum adsorption plate 127 can be provided between the two conveyor belts 142. Vacuum adsorption sections 128 are arranged on the vacuum adsorption plate 127 at predetermined intervals. The vacuum adsorption sections 128 and... Figure 1 , 2 The vacuum adsorption unit 128 shown has the same structure and function, so detailed description is omitted. The vacuum adsorption unit 128 is separated from the bottom surface of the target object being transferred. Although the vacuum adsorption unit 128 does not directly contact the bottom surface of the target object being transferred, the target object G can be fixed by forming a vacuum pressure in the space between the vacuum adsorption plate 127 and the target object G being transferred.

[0049] In the moving mode of the transport robot 100 for flat panels, the target object G can be fixed by the vacuum suction of the vacuum adsorption unit 128. In the sliding mode of the transport robot 100 for flat panels, the target object G can slide along the conveyor belt 142 and be transferred to other equipment. In the sliding mode, the vacuum pressure supplied to the vacuum adsorption unit 128 is cut off.

[0050] Figure 8 This is a plan view illustrating a third embodiment of the transfer device in a transport robot for flat panel.

[0051] Figure 8 The transfer device 150 shown may include a transfer part 150-1 and a fixing part 150-2.

[0052] The transfer unit 150-1 can suspend the target object G to a predetermined height on the finger-shaped part 120b, support the target object G in a non-contact state, and move the suspended target object forward or backward. The fixing part 150-2 can prevent the target object suspended by air buoyancy from moving freely.

[0053] For example, the transfer unit 150-1 may include a suspension hole 152 and a clamp drive unit 158, and the fixing unit 150-2 may include a clamp 157. The clamp 157 may hold one side of the substrate or fix one side of the substrate by vacuum pressure adsorption.

[0054] A levitation hole 152 can be disposed on the finger-shaped portion 120b. The levitation hole 152 can provide buoyancy for suspending and transferring the target object. For example, the levitation hole 152 may include: a first hole 152a, connected to an air supply device (not shown), which receives air and then sprays air onto the bottom surface of the target object; and a second hole 152b, which receives vacuum pressure through a vacuum line (not shown) and provides suction force (vacuum pressure) to the bottom surface of the target object. The clamp drive unit 158 ​​can move the clamp 157 in the horizontal direction to move the target object forward or backward. The clamp drive unit 158 ​​may include a guide rail 159 disposed along the length direction of the finger-shaped portion 120b. When the target object is suspended on the finger-shaped portion, it is transferred to other devices via the transfer unit 150-1.

[0055] Figure 9 This diagram illustrates the processing equipment used in a transport robot for flat panel displays.

[0056] like Figure 9 As shown, the processing device 1 may include a first processing unit (chamber) 10 and a second processing unit (chamber) 20 configured at different heights. A transport robot 100 for flat panels can transport the target object (flat panel) G between processing units at different levels. The transport robot 100 for flat panels can be raised and lowered via a vertical linear drive component 200. A method for transferring the target object G from the first processing unit 10 to the transfer device 90 of the second processing unit 20 may include sliding the target object G by moving the transfer device 130 disposed on the robotic arm 110. Alternatively, it may include moving the target object G to the transfer device 90 located within the second processing unit by operating the robotic arm 180, with the robotic arm 110 entering the second processing unit 20.

[0057] Figure 10 This is a diagram showing another processing device used in a transport robot for flat panel displays.

[0058] like Figure 10As shown, the processing device 2 may include a first processing unit (chamber) 30 and a second processing unit (chamber) 40 configured in different locations. A transport robot 100 for flat panels can transport the target object (flat panel) G between adjacent processing units 30 and 40. The transport robot 100 for flat panels can move horizontally via a horizontal linear drive component 300. As previously described, the transport robot 100 for flat panels can transfer the target object G to processing units 30 and 40 via the operation of the robot arm 180 or the sliding movement of the transfer device 130.

[0059] Figure 11 This is a diagram showing another processing device used in a transport robot for flat panel displays.

[0060] like Figure 11 As shown, the processing device 3 can radially configure processing units 51, 52, 53, 54, 55, and 56 based on the transport robot 100 for the flat panel. In this case, processing units 51, 52, 53, 54, 55, and 56 can be units that perform different processes. For example, processing units 51, 52, 53, 54, 55, and 56 may include processing units that perform cleaning processes, baking processes, developing processes, and exposure processes.

[0061] As described above, when the transport robot 100 for flat panels of the present invention is applied in a device, the processing unit can be freely configured, and the target object can be transferred to multiple processing units.

[0062] The above detailed description is intended to illustrate the present invention. The foregoing description describes preferred embodiments of the invention, which is applicable to various other combinations, modifications, and environments. That is, changes or modifications can be made within the scope of the inventive concept disclosed in this specification, the scope of the recorded disclosure, and / or the scope of technology or knowledge in the art. The described embodiments are intended to illustrate the best state for implementing the technical idea of ​​the invention, and various modifications are possible in the specific application fields and uses of the invention. Therefore, the above detailed description of the invention is not intended to limit the invention to the disclosed embodiments. Furthermore, the claims should be interpreted as encompassing other embodiments.

Claims

1. A transport robot for flat panel panels, comprising: Robot body; A robot arm, which is mounted on the robot body and moves horizontally or rotates about the robot body. A robotic arm is disposed at the end of the robot arm and has finger-like portions that support a base plate; and A transfer device, disposed on the robotic arm, is used to move the substrate placed on the finger-like portion when transferring the substrate to other devices. The transfer device includes: The transfer section is used for sliding and moving the substrate; and A fixing part is provided to fix the base plate when the robot arm moves, so as to prevent the base plate placed on the finger-like part from moving arbitrarily.

2. The transport robot for flat panel according to claim 1, wherein, The transfer unit includes: Transport rollers, disposed on the fingers, for supporting and transferring the substrate; and A lifting component is used to lift the transport roller to a standby position below the finger portion and to lift the transport roller to a transport position above the finger portion.

3. The transport robot for flat panel according to claim 2, wherein, The finger-like portion includes: The opening is located at which the transport roller, which is raised and lowered to the transport position by the lifting component, is situated.

4. The transport robot for flat panel according to claim 2, wherein, The fixing part fixes the substrate supported by the finger part when the transport roller is in the standby position.

5. The transport robot for flat panel according to claim 4, wherein, The fixing part includes adsorption holes on the bottom surface of the vacuum adsorption substrate.

6. The transport robot for flat panel according to claim 1, wherein, The transfer unit includes: A conveyor belt, disposed on the finger-like portion, for supporting and transporting the substrate; and A belt drive unit for moving the conveyor belt.

7. The transport robot for flat panel according to claim 6, wherein, The fixing part also includes a vacuum adsorption plate, which is disposed between the two conveyor belts and has vacuum holes for vacuum fixing the substrate.

8. The transport robot for flat panel according to claim 7, wherein, The conveyor belts are spaced apart at predetermined intervals. The vacuum adsorption plate is located between the two conveyor belts.

9. The transport robot for flat panel according to claim 1, wherein, The transfer unit includes: A levitation hole, located above the finger-shaped portion, is connected to an air supply device and receives air to provide buoyancy for suspending the substrate. The fixing part includes: A clamp that holds one side of a substrate.

10. The transport robot for flat panel according to claim 9, wherein, The transfer unit further includes a clamp driving unit for moving the clamp in the horizontal direction.

11. The transport robot for flat panel according to claim 2, further comprising: A lifting unit is used to move the robot body in the vertical direction.

12. The transport robot for flat panel according to claim 2, further comprising: A horizontal moving part, which is used to move the robot body in the horizontal direction.

13. A substrate processing apparatus, comprising: A first processing unit, the first processing unit being used to process a substrate; A second processing unit, the second processing unit being used to process a substrate; and A transport robot transports the substrate between the first processing unit and the second processing unit. The transport robot includes: Robot body; A robot arm, which is mounted on the robot body and moves horizontally or rotates about the robot body. A robotic arm, the robotic arm being disposed at the end of the robot arm and having finger-like portions supporting a base plate; and A transfer unit, disposed on the robotic arm, is used to move the substrate placed on the finger-like portion when transferring the substrate to other devices. A fixing part is provided on the robotic arm and is used to fix the base plate placed on the finger part when the robotic arm moves.

14. The substrate processing apparatus according to claim 13, wherein, The transfer unit includes: Transport rollers, disposed on the fingers, for supporting and transferring the substrate; and A lifting component is used to lift the transport roller to a standby position below the finger portion and to lift the transport roller to a transport position above the finger portion.

15. The substrate processing apparatus according to claim 14, wherein, The finger-like portion includes: The opening is located at which the transport roller, which is raised and lowered to the transport position by the lifting component, is positioned. The fixing part fixes the substrate supported by the finger part by vacuum adsorption when the transport roller is in the standby position.

16. The substrate processing apparatus according to claim 13, wherein, The transfer unit includes: A conveyor belt, disposed on the finger-like portion, for supporting and transporting the substrate; and Belt drive unit, the belt drive unit being used to move the conveyor belt The fixing part includes: A vacuum adsorption plate is disposed between the two conveyor belts and has vacuum holes for vacuum fixing of the substrate.

17. The substrate processing apparatus according to claim 13, wherein, The transfer unit includes: A levitation hole, located above the finger-shaped portion, is connected to an air supply device and receives air to provide buoyancy for suspending the substrate. The fixing part includes: The clamp holds one side of the substrate. The transfer unit further includes: A clamp drive unit for moving the clamp in the horizontal direction.

18. The substrate processing apparatus according to claim 13, wherein, The first processing unit and the second processing unit are stacked vertically, or non-linearly arranged around the transport robot. The transport robot moves vertically or horizontally to transport the substrate between the first processing unit and the second processing unit.

19. A transport robot for flat panel, comprising: Robot body; A robot arm, which is mounted on the robot body and moves horizontally or rotates about the robot body. A robotic arm is disposed at the end of the robot arm and has finger-like portions that support a base plate; and A transfer device, disposed on the robotic arm, is used to slide and move the substrate placed on the finger-like portion when transferring the substrate to other devices. The transfer device includes: A transport roller, disposed on the fingers, for supporting and transferring the substrate; and A lifting component is provided for raising and lowering the transport roller to a standby position below the finger portion and to a transport position above the finger portion. The finger-like portion includes: The opening is located at which the transport roller, which is raised and lowered to the transport position by the lifting component, is positioned. The transfer device further includes: A fixing component that fixes the substrate supported by the finger portion when the transport roller is in the standby position.

20. The transport robot for flat panel according to claim 19, wherein, The fixing component includes adsorption holes on the bottom surface of the vacuum adsorption substrate.

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