A perovskite thin film preparation device
By integrating coating and drying, and utilizing dynamic hot air and return air plate technology, the problem of uneven solvent evaporation in perovskite film preparation was solved, improving the preparation efficiency and quality of the film and avoiding the coffee ring effect.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SHANGLUO UNIV
- Filing Date
- 2026-03-09
- Publication Date
- 2026-05-29
AI Technical Summary
In existing perovskite thin film preparation processes, slit coating and drying are carried out in separate steps, which leads to uneven solvent evaporation, resulting in a coffee ring effect in the film layer and disrupting the uniformity of the wet film.
The coating and drying process is integrated into a single design. The hot air housing is integrated into the upper part of the gantry, and the heating mechanism and fan blades combine to achieve dynamic hot air blowing, which accelerates the uniform evaporation of solvent. The return air plate is used to block the loss of hot air and achieve dynamic return air, ensuring uniform distribution of solvent.
It significantly improves the preparation efficiency and quality of perovskite thin films, reduces film thickness deviation, inhibits uneven casting and pore formation, improves film density and crystallinity, and avoids the coffee ring effect.
Smart Images
Figure CN122098901A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of perovskite solar energy preparation technology, and in particular to a perovskite thin film preparation apparatus. Background Technology
[0002] The perovskite vacuum film deposition machine is the core equipment for preparing perovskite thin films. Specifically designed for wet film processes, this equipment rapidly creates a low-vacuum environment, significantly lowering the solvent boiling point, accelerating solvent evaporation, and promoting rapid crystallization of the perovskite film to form a dense and uniform grain structure. Its core advantage lies in achieving an ultimate vacuum of 10 Pa within 5 seconds. Combined with a highly stable vacuum system and symmetrical gas path design, it effectively avoids interference from external impurities, ensuring process stability. The equipment supports various solvent systems and is particularly suitable for desorbing residual solvents in thick films, improving film quality. Furthermore, its simple and intuitive operating interface and modular design significantly reduce maintenance costs and extend service life, making it an ideal choice for laboratories and research institutions preparing perovskite thin-film solar cells.
[0003] In practical use, the traditional perovskite thin film preparation process usually involves slit coating and drying in separate steps. After the coating head completes the coating, the substrate needs to be transferred to an independent drying device. During this process, uneven solvent evaporation can easily lead to the appearance of a coffee ring effect in the film layer, which can damage the uniformity of the wet film. Therefore, a perovskite thin film preparation device is proposed. Summary of the Invention
[0004] The purpose of this invention is to address the shortcomings of the existing technology in the traditional perovskite thin film preparation, where the slit coating and drying processes are usually carried out in separate steps, and after the coating head completes the coating, the substrate needs to be transferred to an independent drying device. During this process, uneven solvent evaporation can easily lead to the coffee ring effect in the film layer, which destroys the uniformity of the wet film. Therefore, this invention proposes a perovskite thin film preparation device.
[0005] To achieve the above objectives, the present invention adopts the following technical solution: A perovskite thin film preparation apparatus includes a preparation shell, a coating mechanism, an adjustment mechanism, and a dynamic air return mechanism. A gantry frame is fixedly connected to the upper part of the coating mechanism. An adjustment mechanism is located at the front end of the gantry frame, and a coating head is fixedly connected to the upper part of the adjustment mechanism. First gears are symmetrically rotatably connected to both sides of the gantry frame. The first gears mesh with racks, and the racks are fixedly connected to the preparation shell. A first transmission wheel is fixedly connected to one side of the first gear. A transmission belt drives the first transmission wheel, and a second transmission wheel is driven by the transmission belt. A short arm is fixedly connected to the second transmission wheel and rotatably connected to the upper part of the gantry frame. A long arm is rotatably connected to the short arm and rotatably connected to the long arm. A second gear is rotatably connected to the long arm and rotatably connected to the second gear. A third gear meshes with the second gear and is fixedly connected to the third gear. A connecting shaft is fixedly connected to the third gear, and a hot air shell is fixedly connected to the connecting shaft. A heating mechanism is located inside the hot air shell, and a blowing shell is located inside the hot air shell. A third motor is located on the upper part of the blowing shell, and fan blades are located at the output end of the third motor.
[0006] The number of racks is two, respectively set on both sides of the conveyor belt. The second gear is a sector gear structure. The transmission belt, the second gear and their connecting structure can be fitted with protective sleeves. The structural connections between the parts are tight. The installation position of the heating mechanism is not fixed and can be set at any position of the air outlet at the bottom of the hot air housing. It is used to heat the blown air. The materials of the blower housing, the third motor and the fan blades are all suitable for high-temperature environments. An air inlet is opened at the top of the hot air housing to facilitate the heat dissipation of the third motor.
[0007] The above technical solution further includes: The coating mechanism includes a second motor disposed inside the preparation housing. The output end of the second motor is provided with a second threaded rod, which is rotatably connected to the preparation housing. Anti-collision pads are provided at both ends of the second threaded rod. The second threaded rod is threadedly connected to a moving platform. A gantry frame is fixedly connected to the upper part of the moving platform, and a slider is fixedly connected to the bottom of the moving platform. The slider is slidably connected to a first slide rail.
[0008] The upper part of the moving platform is equipped with a conveyor belt, and the base is placed on the upper part of the conveyor belt. The gantry is driven and transported by the conveyor belt. After coating, it is sent to the next process. The lower part of the moving platform is slidably connected to a first slide rail, which is fixedly connected inside the preparation shell.
[0009] The adjustment mechanism includes a first motor disposed on the upper part of the gantry frame, and an adjustment component disposed on the output end of the first motor. The adjustment component includes a first threaded rod disposed on the output end of the first motor, and the first threaded rod is rotatably connected to the gantry frame.
[0010] The first threaded rod is threadedly connected to a mounting plate. A coating head is fixedly connected to the front end of the mounting plate. A connector is provided on the top of the coating head, which is connected to the precursor liquid addition mechanism. A limit slider is fixedly connected to the rear end of the mounting plate. A second slide rail is slidably connected to the limit slider. The second slide rail is fixedly connected to the gantry frame. There are two limit sliders and two slide rails.
[0011] The dynamic return air mechanism includes a fourth gear fixedly connected to the upper part of the connecting shaft, a fifth gear meshing with the fourth gear, a dynamic return air housing rotatably connected to the fifth gear, and the dynamic return air housing fixedly connected to the upper part of the gantry frame. There are two dynamic return air mechanisms, which are respectively arranged on both sides of the hot air housing.
[0012] The fifth gear is meshed with a fifth gear, and the fifth gear is fixedly connected to a bushing. The bushing is rotatably connected to the connecting shaft. The bushing is fixedly connected to a cam, and the cam is rotatably connected to the connecting shaft. The fourth gear, the fifth gear, and the fifth gear have the same module and number of teeth. The connecting shaft drives the fourth gear to rotate, and after meshing with the fifth gear, it drives the fifth gear to rotate in the opposite direction. The fifth gear, in turn, drives the fixedly connected bushing to rotate in the opposite direction, thereby making the connecting shaft and the bushing coaxial and reverse.
[0013] The cam is rotatably connected to the connecting plate, the connecting plate is fixedly connected to both sides of the hot air housing, a connecting rod is provided at the lower part of the cam, and the connecting rod is slidably connected to the connecting plate. When the opening of the hot air housing is facing downwards, the cam and the upper part of the connecting rod are vertically arranged, and the reciprocating rotation angle of the connecting shaft is °.
[0014] A spring is provided on the upper part of the connecting rod, and a return air plate is fixedly connected to the bottom of the connecting rod. The return air plate is slidably connected to the hot air housing.
[0015] The present invention has the following beneficial effects: 1. In this invention, the hot air structure inside the hot air housing is located at the rear end of the coating head and is integrated into the upper part of the gantry. Through the integrated coating and drying design, the preparation efficiency and quality of perovskite thin films are significantly improved. Furthermore, while the coating mechanism moves the coating head to coat, the first gears connected to both sides of the moving stage synchronously drive along the rack. During the transmission of the first gears, rotation occurs, which drives the third gear to reciprocate, thereby causing the blowing housing to oscillate back and forth. Combined with the heating mechanism and fan blades, dynamic hot air blowing is achieved to accelerate the uniform evaporation of the solvent. The oscillating airflow promotes the uniform distribution of crystal nuclei. The reciprocating rotation of the shaft drives the fourth gear to rotate, which in turn drives the bushing to rotate. The rotation of the bushing causes the return air plate to move. The return air plates, which are set on both sides of the hot air housing, can prevent the loss of hot air during the hot air blowing process. Moreover, as the swing angle increases, the extension length of the return air plate increases synchronously, realizing dynamic return air. The return air plates are set on both sides of the hot air housing. When the hot air housing swings forward, the return air plate at the front end begins to extend. When the hot air housing swings backward, the return air plate at the front end retracts while the return air plate at the rear end begins to extend, effectively ensuring that the return air plates realize return air throughout the swing process.
[0016] 2. In this invention, before using the equipment, the mounting plate can be moved up and down by activating the adjustment mechanism, thereby adjusting the coating height of the coating head. This ensures that the precursor liquid can effectively cover the substrate surface when facing substrates of different thicknesses, thus improving the performance of the device. Attached Figure Description
[0017] Figure 1 This is a schematic diagram of the structure of a perovskite thin film preparation apparatus proposed in this invention; Figure 2 This is a schematic diagram of the internal structure of the housing in this invention; Figure 3 This is a schematic diagram of the mobile station connection relationship in this invention; Figure 4 This is a schematic diagram of the transmission belt connection relationship in this invention; Figure 5 This is a schematic diagram of the connection relationship of the hot air housing in this invention; Figure 6 This is a schematic diagram of the internal structure of the blower housing in this invention; Figure 7 This is a schematic diagram of the internal structure of the hot air housing in this invention; Figure 8 This is a schematic diagram of the internal structure of the dynamic return air housing in this invention.
[0018] In the diagram: 1. Preparation shell; 2. Conveyor belt; 3. Coating head; 4. Gantry frame; 5. Mounting plate; 6. Hot air shell; 7. First motor; 8. First threaded rod; 9. Rack; 10. Moving table; 11. Second motor; 12. Second threaded rod; 13. First slide rail; 14. Base; 15. First gear; 16. First transmission wheel; 17. Second slide rail; 18. Limiting slider; 19. Transmission belt; 20. Second transmission wheel; 21. Short arm; 22. Long arm; 23. Second gear; 24. Third gear; 25. Heating mechanism; 26. Connecting shaft; 27. Blower shell; 28. Third motor; 29. Fan blade; 30. Return air plate; 31. Dynamic return air shell; 32. Connecting plate; 33. Fourth gear; 34. Sixth gear; 35. Fifth gear; 36. Bushing; 37. Cam; 38. Connecting rod; 39. Spring. Detailed Implementation
[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0020] Example 1 like Figures 1-8 As shown, a perovskite thin film preparation apparatus includes a preparation housing 1, a coating mechanism, and an adjustment mechanism. A gantry frame 4 is fixedly connected to the upper part of the coating mechanism. An adjustment mechanism is provided at the front end of the gantry frame 4. A coating head 3 is fixedly connected to the upper part of the adjustment mechanism. First gears 15 are symmetrically rotatably connected to both sides of the gantry frame 4. The first gears 15 are meshed with racks 9. The racks 9 are fixedly connected to the preparation housing 1. A first transmission wheel 16 is fixedly connected to one side of the first gear 15. The first transmission wheel 16 is driven by a transmission belt 19. The transmission belt 19 is driven by a second transmission wheel 20. The second transmission wheel 20 is fixedly connected to a short arm 2. 1. A short arm 21 is rotatably connected to the upper part of the gantry frame 4. A long arm 22 is rotatably connected to the short arm 21. A second gear 23 is rotatably connected to the long arm 22. The second gear 23 is rotatably connected to the gantry frame 4. A third gear 24 is meshed with the second gear 23. A connecting shaft 26 is fixedly connected to the third gear 24. A hot air housing 6 is rotatably connected to the connecting shaft 26. A heating mechanism 25 is provided on both sides of the hot air housing 6. A blower housing 27 is fixedly connected to the connecting shaft 26. A third motor 28 is provided on the upper part of the blower housing 27. A fan blade 29 is provided at the output end of the third motor 28.
[0021] Two racks 9 are respectively set on both sides of the conveyor belt 2. The second gear 23 is a sector gear structure. The transmission belt 19 and the second gear 23 and their connecting structure can be fitted with protective sleeves. The structural connections between the parts are tight. The heating mechanism 25 is not fixed in installation position and can be set at any position of the air outlet at the bottom of the hot air housing 6 to heat the blown air. The materials of the blower housing 27, the third motor 28 and the fan blades 29 are all suitable for high-temperature environments. An air inlet is opened at the top of the hot air housing 6 to facilitate the heat dissipation of the third motor 28.
[0022] The coating mechanism includes a second motor 11 disposed inside the preparation housing 1. The output end of the second motor 11 is provided with a second threaded rod 12, which is rotatably connected to the preparation housing 1. Anti-collision pads are provided at both ends of the second threaded rod 12. The second threaded rod 12 is threadedly connected to a moving stage 10. A gantry frame 4 is fixedly connected to the upper part of the moving stage 10. A slider is fixedly connected to the bottom of the moving stage 10 and is slidably connected to a first slide rail 13 through the slider. A conveyor belt 2 is provided on the upper part of the moving stage 10, and a substrate 14 is placed on the upper part of the conveyor belt 2. The gantry frame 4 is driven and transported through the conveyor belt 2. After coating, the substrate is sent to the next processing step. The lower part of the moving stage 10 is slidably connected to the first slide rail 13, which is fixedly connected inside the preparation housing 1.
[0023] In this embodiment, the hot air structure inside the hot air housing 6 is located at the rear end of the coating head 3 and is integrated on the upper part of the gantry 4. Through the integrated coating and drying design, the preparation efficiency and quality of the perovskite film are significantly improved. During the coating process of the substrate 14, the second threaded rod 12 can be rotated by starting the second motor 11. The rotation of the second threaded rod 12 drives the threaded moving table 10 to move. During the movement of the moving table 10, the first slide rail 13 at the bottom can ensure the stability of the moving table 10 during movement. The movement of the moving table 10 can drive the coating head 3 to move, so that the precursor liquid inside the coating head 3 can be uniformly coated on the surface of the substrate 14.
[0024] While the coating mechanism moves the coating head 3 to apply coating, the first gears 15, rotatably connected to both sides of the moving table 10, synchronously drive the gears along the meshing racks 9. During this transmission, the first gears 15 rotate, which in turn drives the fixedly connected first transmission wheel 16 to rotate. The rotation of the first transmission wheel 16 drives the transmission belt 19 to rotate, which in turn drives the second transmission wheel 20 to rotate. The rotation of the second transmission wheel 20 drives the fixedly connected short arm 21 to rotate, and the rotation of the short arm 21 drives the rotatably connected long arm 22 to rotate. Rotation of 22 drives the second gear 23, which is connected to the rotation, to rotate back and forth. The second gear 23 drives the third gear 24, which is connected to the rotation, to rotate back and forth. This, in turn, drives the blower housing 27 to swing back and forth. Combined with the heating mechanism 25 and the fan blades 29, dynamic hot air blowing is achieved to accelerate the uniform evaporation of solvent. The swinging airflow promotes the uniform distribution of crystal nuclei. Through the integrated coating and drying design, the preparation efficiency and quality of perovskite thin films are significantly improved, the film thickness deviation is reduced, and uneven casting and void formation are suppressed. Grain coarsening is reduced, the film density and crystallinity are improved, and the coffee ring effect caused by uneven solvent evaporation is avoided.
[0025] While the connecting shaft 26 reciprocates, it drives the fourth gear 33 to rotate. The rotation of the fourth gear 33 drives the meshing fifth gear 34 to rotate, which in turn drives the meshing fifth gear 35 to rotate. The rotation of the fifth gear 35 drives the fixedly connected bushing 36 to rotate, which in turn drives the fixedly connected cam 37 to rotate. The rotation of the cam 37 drives the connecting rod 38 to move downward, which in turn drives the fixedly connected return air plate 30 to move. The return air plates 30, which are set on both sides of the hot air housing 6, can block the loss of hot air during the hot air blowing process. Moreover, as the swing angle increases, the extension length of the return air plate 30 increases synchronously, realizing dynamic return air. The return air plates 30 are set on both sides of the hot air housing 6. When the hot air housing 6 swings forward, the return air plate 30 at the front end begins to extend. When the hot air housing 6 swings backward, the return air plate 30 at the front end retracts while the return air plate 30 at the rear end begins to extend, effectively ensuring that the return air plate 30 realizes return air throughout the swing process, thus improving the drying effect of the equipment.
[0026] Example 2 like Figures 1-8As shown, the adjustment mechanism includes a first motor 7 mounted on the upper part of the gantry frame 4. An adjustment component is provided at the output end of the first motor 7. The adjustment component includes a first threaded rod 8 at the output end of the first motor 7. The first threaded rod 8 is rotatably connected to the gantry frame 4. The first threaded rod 8 is threadedly connected to a mounting plate 5. A coating head 3 is fixedly connected to the front end of the mounting plate 5. A connector is provided at the top of the coating head 3, which is connected to the precursor liquid addition mechanism. A limit slider 18 is fixedly connected to the rear end of the mounting plate 5. A second slide rail 17 is slidably connected to the limit slider 18. The second slide rail 17 is fixedly connected to the gantry frame 4. There are two limit sliders 18 and two slide rails 17.
[0027] In this embodiment, before the device is used, the first motor 7 is started to drive the first threaded rod 8 to rotate. The rotation of the first threaded rod 8 can drive the threaded mounting plate 5 to move. During the movement of the mounting plate 5, the limiting slider 18 fixedly connected at the rear end slides synchronously along the slidingly connected second slide rail 17, which effectively ensures the stability of the mounting plate 5 during movement. The movement of the mounting plate 5 can drive the coating head 3 installed on the upper part to move up and down, thereby adjusting the coating height of the coating head 3. This ensures that the precursor liquid can effectively cover the surface of the substrate 14 with different thicknesses, thus improving the performance of the device.
[0028] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A perovskite thin film preparation apparatus, comprising a preparation shell (1), a coating mechanism, an adjustment mechanism, and a dynamic air return mechanism, characterized in that, A gantry frame (4) is fixedly connected to the upper part of the coating mechanism. An adjustment mechanism is provided at the front end of the gantry frame (4). A coating head (3) is fixedly connected to the upper part of the adjustment mechanism. A first gear (15) is symmetrically rotatably connected to both sides of the gantry frame (4). A rack (9) is meshed with the first gear (15). The rack (9) is fixedly connected to the preparation shell (1). A first transmission wheel (16) is fixedly connected to one side of the first gear (15). A transmission belt (19) is driven by the first transmission wheel (16). A second transmission wheel (20) is driven by the transmission belt (19). A short arm (21) is fixedly connected to the second transmission wheel (20). The short arm (21) is rotatably connected to the... On the upper part of the gantry frame (4), the short arm (21) is rotatably connected to the long arm (22), the long arm (22) is rotatably connected to the second gear (23), the second gear (23) is rotatably connected to the gantry frame (4), the second gear (23) is meshed with the third gear (24), the third gear (24) is fixedly connected to the connecting shaft (26), the connecting shaft (26) is fixedly connected to the hot air housing (6), the hot air housing (6) is provided with a heating mechanism (25), the hot air housing (6) is provided with a blower housing (27), the blower housing (27) is provided with a third motor (28) on the upper part of the blower housing (27), and the output end of the third motor (28) is provided with a fan blade (29).
2. The perovskite thin film preparation apparatus according to claim 1, characterized in that, The coating mechanism includes a second motor (11) disposed inside the preparation housing (1), and a second threaded rod (12) is provided at the output end of the second motor (11). The second threaded rod (12) is rotatably connected to the preparation housing (1), and a moving stage (10) is threadedly connected to the second threaded rod (12). A gantry frame (4) is fixedly connected to the upper part of the moving stage (10).
3. The perovskite thin film preparation apparatus according to claim 2, characterized in that, The upper part of the mobile platform (10) is provided with a conveyor belt (2), and a base (14) is placed on the upper part of the conveyor belt (2). The lower part of the mobile platform (10) is slidably connected with a first slide rail (13), and the first slide rail (13) is fixedly connected inside the preparation shell (1).
4. The perovskite thin film preparation apparatus according to claim 1, characterized in that, The adjustment mechanism includes a first motor (7) disposed on the upper part of the gantry (4), and an adjustment component is provided at the output end of the first motor (7). The adjustment component includes the first motor (7) disposed on the upper part of the gantry (4), and an adjustment component is provided at the output end of the first motor (7).
5. The perovskite thin film preparation apparatus according to claim 4, characterized in that, The adjustment assembly includes a first threaded rod (8), which is threadedly connected to a mounting plate (5). A coating head (3) is fixedly connected to the front end of the mounting plate (5), and a limit slider (18) is fixedly connected to the rear end of the mounting plate (5). A second slide rail (17) is slidably connected to the limit slider (18), and the second slide rail (17) is fixedly connected to the gantry frame (4).
6. The perovskite thin film preparation apparatus according to claim 1, characterized in that, The dynamic return air mechanism includes a fourth gear (33) fixedly connected to the upper part of the connecting shaft (26), the fourth gear (33) meshing with a fifth gear (34), the fifth gear (34) rotatably connected to a dynamic return air housing (31), and the dynamic return air housing (31) fixedly connected to the upper part of the gantry (4).
7. The perovskite thin film preparation apparatus according to claim 6, characterized in that, The fifth gear (34) is meshed with the sixth gear (35), the sixth gear (35) is fixedly connected to the bushing (36), the bushing (36) is rotatably connected to the connecting shaft (26), the bushing (36) is fixedly connected to the cam (37), and the cam (37) is rotatably connected to the connecting shaft (26).
8. The perovskite thin film preparation apparatus according to claim 7, characterized in that, The cam (37) is rotatably connected to the connecting plate (32), the connecting plate (32) is fixedly connected to both sides of the hot air housing (6), and a connecting rod (38) is provided at the lower part of the cam (37), the connecting rod (38) is slidably connected to the connecting plate (32).
9. The perovskite thin film preparation apparatus according to claim 8, characterized in that, A spring (39) is provided on the upper part of the connecting rod (38), and a return air plate (30) is fixedly connected to the bottom of the connecting rod (38). The return air plate (30) is slidably connected to the hot air housing (6).