A thinning machine slow-motion air floating turntable

Abstract

The application discloses a kind of thinning machine slow-motion air float rotary table, belong to integrated circuit packaging technical field.It includes rotating shaft assembly, air float bearing body, upper thrust disc, lower thrust disc, mandrel and drive assembly.Rotating shaft assembly includes buffer connecting assembly and support shaft, support shaft is fixedly sleeved outside buffer connecting assembly, and upper thrust disc and lower thrust disc are respectively fixedly connected to the upper and lower ends of support shaft;Buffer connecting assembly upper end is fixedly connected with upper thrust disc, and lower end is fixedly connected with mandrel after being passed through lower thrust disc downwardly.A ring-shaped groove is formed between upper thrust disc, support shaft and lower thrust disc, air float bearing body is installed in ring-shaped groove and forms air film support between support shaft.Drive assembly is drivingly connected with mandrel, for driving mandrel rotation to drive lower thrust disc, rotating shaft assembly and upper thrust disc synchronous rotation.The application replaces traditional rigid center shaft by buffer connecting assembly, effectively compensates radial displacement, buffers vibration impact, reduces installation centering requirement, significantly improves wafer thinning processing flatness and stability.

Description

Technical Field

[0001] This application relates to the field of integrated circuit packaging, specifically a thinning machine slow-motion air-floating turntable. Background Technology

[0002] In the field of integrated circuit packaging, wafer thinning is a crucial step in advanced packaging processes. Wafer thinning machines use grinding to reduce wafers to a target thickness to meet the packaging requirements of power devices, memory chips, and third-generation semiconductors. During wafer thinning, the precision of the rotating platform supporting the wafer directly affects the uniformity of wafer thickness and the surface flatness after grinding.

[0003] In the prior art, air-bearing turntables are widely used in wafer thinning machines. They utilize compressed gas to form an air film between the bearing and the rotating body, achieving contactless support and thus obtaining high-precision, low-friction rotational motion. A typical air-bearing turntable structure is disclosed in Chinese patent application CN116352598A, which includes a rotating shaft assembly, a bearing housing, an upper plate, a lower plate, and a drive connection. The upper and lower plates are fixedly connected to the upper and lower ends of the rotating shaft assembly, respectively. The bearing housing is installed in an annular groove formed between the upper plate, the rotating shaft assembly, and the lower plate. An air film is formed between the bearing housing and the upper, lower, and rotating shaft assemblies through an air filling channel, achieving contactless support. The drive connection is fixed to the lower end of the lower plate and the rotating shaft assembly, and drives the entire rotating body to rotate synchronously via a pulley.

[0004] However, in the aforementioned prior art, the upper and lower plates and the rotating shaft assembly are all rigidly fixed connections, and the power from the drive end is rigidly transmitted to the upper plate through the lower plate and the rotating shaft assembly. This rigid connection method has the following problems: the rigid connection structure requires strict alignment of each component; otherwise, it will lead to stress concentration in the shaft system, affecting rotational accuracy. Vibrations and impacts from the drive end are directly transmitted to the upper plate through a rigid path, which can easily cause resonance, especially under high-speed or variable load conditions, affecting the wafer's load-bearing stability. Relying solely on air film isolation for mechanical contact cannot actively compensate for radial displacement caused by installation deviations, thermal deformation, or load fluctuations. Summary of the Invention

[0005] To solve at least one of the above-mentioned technical problems, this application provides a slow-motion air-float turntable for a thinning machine, which adopts the following technical solution: A thinning machine with a slow-moving air-bearing turntable includes a rotating shaft assembly, an air-bearing body, an upper thrust plate, a lower thrust plate, a mandrel, and a drive assembly, wherein: The rotating shaft assembly includes a buffer connection assembly and a support shaft. The support shaft is fixedly sleeved on the outside of the buffer connection assembly. The upper end of the support shaft is fixedly connected to the upper thrust plate, and the lower end of the support shaft is fixedly connected to the lower thrust plate. The upper end of the buffer connection assembly is fixedly connected to the upper thrust plate, and the lower end of the buffer connection assembly extends downward through the lower thrust plate. The spindle is fixedly connected to the lower end of the buffer connection assembly; An annular groove is formed between the upper thrust plate, the support shaft, and the lower thrust plate. The upper thrust plate is used to support the workpiece to be thinned. The air bearing body is installed in an annular groove to provide support and limit the movement of the support shaft; An air bearing body is provided with an air filling channel for filling compressed gas, so that a first air film is formed between the upper end face of the air bearing body and the upper thrust plate, a second air film is formed between the lower end face of the air bearing body and the lower thrust plate, and a third air film is formed between the air bearing body and the support shaft. The drive assembly is connected to the spindle drive and is used to drive the spindle to rotate, so as to drive the lower thrust plate, the rotating shaft assembly and the upper thrust plate to rotate synchronously.

[0006] This application configures the rotating shaft assembly as including a buffer connection assembly and a support shaft sleeved on its outer side, with the buffer connection assembly connecting the upper thrust plate and the mandrel respectively. The buffer connection assembly can actively compensate for radial displacement between the mandrel and the upper thrust plate, effectively absorbing radial forces caused by installation deviations, thermal deformation, or load fluctuations, significantly reducing the accuracy requirements for installation alignment. At the same time, the vibration and impact loads transmitted by the buffer connection assembly, together with the three air films formed by the air bearing body, achieve full-frequency vibration isolation, ensuring that the upper thrust plate has higher rotational accuracy and stability during the grinding process.

[0007] In some embodiments, the buffer connection assembly includes a flexible coupling, an upper connecting plate, and a lower connecting plate, wherein: the upper connecting plate is bolted to the upper end of the flexible coupling and is used to fix the upper thrust plate; the lower connecting plate is bolted to the lower end of the flexible coupling and is used to fix the spindle.

[0008] By dividing the buffer connection assembly into three independent components—the flexible coupling, the upper connecting plate, and the lower connecting plate—a modular design is achieved, facilitating manufacturing, assembly, and maintenance. The upper and lower connecting plates are connected by bolts, avoiding stress concentration caused by direct connection between the flexible coupling and the upper thrust plate and spindle, thus improving the reliability and service life of the connection and providing a stable mounting foundation for the flexible coupling.

[0009] In some embodiments, the flexible coupling is a diaphragm coupling, a bellows coupling, or a reed coupling.

[0010] By limiting flexible couplings to diaphragm type, bellows type, or reed type couplings, a variety of flexibility implementation methods are provided, allowing the selection of the most suitable type based on specific working conditions (such as compensation amount, stiffness requirements, speed range, etc.). Among them, diaphragm type couplings can achieve backlash-free transmission, high transmission efficiency, high temperature resistance, and maintenance-free operation; bellows type couplings have high sensitivity and corrosion resistance; and reed type couplings can withstand greater load variations and effectively protect the supporting components.

[0011] In some embodiments, the thinning machine's slow-moving air-bearing turntable further includes a mounting bracket, on which the air-bearing bearing body is fixed.

[0012] By setting up mounting brackets and fixing the air bearing body on them, a stable mounting foundation is provided for the entire turntable, ensuring that the air bearing body is fixed in position during operation, thereby ensuring the stability of the air film gap; at the same time, the mounting brackets serve as the connection interface between the turntable and the thinning machine, facilitating the integration of the whole machine, and can be designed as a structure with a certain mass and rigidity to further absorb and isolate external vibrations.

[0013] In some embodiments, the thinning machine's slow-moving air-floating turntable further includes a bearing housing, which is mounted on a mounting bracket; the mandrel passes through the bearing housing via ball bearings, and the bearing housing is used to provide support and limit the movement of the mandrel.

[0014] By setting up bearing housings and using ball bearings to independently support the mandrel, a hybrid support structure of "upper air bearing + lower ball bearing" is formed. The upper rotating part is provided with high-precision support by the air bearing body, and the lower rotating part is provided with high-rigidity support by the ball bearing, which takes into account both high precision and high load-bearing capacity. Both the bearing housing and the air bearing body are fixed on the mounting bracket to ensure the coaxiality of the mandrel and the support shaft and improve the overall assembly accuracy.

[0015] In some embodiments, the drive assembly includes a drive motor, a drive pulley, a driven pulley, and a belt, wherein: the drive motor is mounted on a mounting bracket, the drive pulley is fixedly connected to the drive end of the drive motor; the driven pulley is fixedly mounted on a spindle; and the belt is sleeved on the drive pulley and the driven pulley.

[0016] By employing a belt drive mechanism (drive motor, drive pulley, driven pulley, belt) to drive the spindle rotation, the belt drive provides a buffering and vibration-absorbing effect, which, together with the flexible characteristics of the buffer connection components, enhances the vibration isolation effect. Simultaneously, the belt drive can slip under overload conditions, providing overload protection, allowing the drive motor to be positioned away from the turntable to reduce heat and vibration impacts, and achieving speed reduction and torque increase by selecting the pulley diameter ratio to meet the grinding load requirements.

[0017] In some embodiments, an adsorption hole is provided on the bearing surface of the upper thrust plate, and an air extraction channel that is interconnected with each other and communicates with the adsorption hole is provided in the spindle and buffer connection assembly.

[0018] By incorporating adsorption holes on the upper thrust plate bearing surface and interconnected air extraction channels within the mandrel and buffer connection assembly, an integrated design of the vacuum adsorption channel is achieved. This eliminates the need for external air pipes to apply vacuum adsorption force to the wafer, ensuring stable fixation of the wafer during high-speed rotation. A rotary joint can be connected to the lower end of the mandrel to provide vacuum supply during rotation, resulting in a compact structure that avoids air pipe entanglement issues.

[0019] In some embodiments, a first bearing pad is disposed between the upper end face of the air bearing body and the upper thrust plate, the lower surface of the first bearing pad is airtightly fitted to the air bearing body, and a first air film is formed between the upper surface of the first bearing pad and the upper thrust plate; a second bearing pad is disposed between the lower end face of the air bearing body and the lower thrust plate, the upper surface of the second bearing pad is airtightly fitted to the air bearing body, and a second air film is formed between the lower surface of the second bearing pad and the lower thrust plate.

[0020] By installing a first bearing pad and a second bearing pad on the upper and lower end faces of the air bearing body, respectively, and ensuring that the bearing pads are airtightly fitted to the air bearing body, the air bearing body and the thrust plate surface are protected from damage by hard contact in the event of accidental contact. The airtight fit design ensures that compressed gas can only be ejected from a predetermined direction, which is conducive to the formation of a stable and uniform gas film. At the same time, the bearing pads are replaceable components, reducing maintenance costs.

[0021] In some embodiments, a radial bearing is provided on the inner wall of the air bearing body, the outer peripheral surface of the radial bearing is airtightly fitted with the inner wall of the air bearing body, and a third air film is formed between the inner surface of the radial bearing and the support shaft.

[0022] By installing radial bearings on the inner wall of the air bearing body, with the outer circumference of the radial bearings airtightly fitted to the inner wall of the air bearing body, a stable radial support surface is provided for the support shaft, ensuring the uniformity and stability of the third air film. The airtight fit prevents compressed gas leakage, ensuring air film pressure. As a replaceable component, the radial bearings only require replacement of the bearing gaskets after wear, reducing maintenance costs. Furthermore, by selecting radial bearings of different sizes, the air film gap can be precisely controlled to meet varying precision requirements. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of the thinning machine's slow-moving air-float turntable from a first-view perspective, according to an embodiment of this application. Figure 2 This is a schematic diagram of the thinning machine's slow-moving air-float turntable from a second perspective, according to an embodiment of this application. Figure 3 for Figure 2 AA section view; Figure 4 This is a schematic diagram of the structure of the thinning machine's slow-moving air-float turntable from a third perspective, according to an embodiment of this application. Figure 5 This is a half-sectional schematic diagram of the slow-moving air-float turntable of the thinning machine according to an embodiment of this application.

[0024] Figures 1 to 5 Includes: Rotating shaft assembly 1: buffer connection assembly 11, support shaft 12, flexible coupling 111, upper connecting plate 112, lower connecting plate 113; Air bearing body 2; Upper stop plate 3; Lower stop plate 4; Mandrel 5; Drive assembly 6: drive motor 61, drive pulley 62, driven pulley 63, belt 64; Mounting bracket 7; Bearing housing 8; First bearing pad 9; Second bearing pad 10; Radial bearing 110. Detailed Implementation

[0025] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0026] As described in the background section, in existing air-bearing turntables, the upper and lower plates and the rotating shaft assembly are all rigidly fixed connections, and the power from the drive end is rigidly transmitted to the upper plate through the lower plate and the rotating shaft assembly. This rigid connection method has the following problems: The rigid connection structure requires strict alignment of each component; otherwise, it will lead to stress concentration in the shaft system, affecting rotational accuracy. Vibrations and impacts from the drive end are directly transmitted to the upper plate through a rigid path, which can easily cause resonance, especially under high-speed or variable load conditions, affecting the stability of wafer bearing capacity. Mechanical contact is isolated solely by an air film, but it cannot actively compensate for radial displacement caused by installation deviations, thermal deformation, or load fluctuations.

[0027] To this end, this application provides a slow-motion air-floating turntable for a wafer thinning machine. This turntable is specifically designed for use in wafer thinning machines to support and drive the wafer to rotate, and works with a grinding head to achieve high-precision grinding and thinning of the wafer.

[0028] like Figures 1 to 5 As shown, the thinning machine's slow-motion air-float turntable of this application includes a rotating shaft assembly 1, an air-float bearing body 2, an upper thrust plate 3, a lower thrust plate 4, a spindle 5, and a drive assembly 6, wherein: The rotating shaft assembly 1 includes a buffer connection assembly 11 and a support shaft 12. The support shaft 12 is fixedly sleeved on the outside of the buffer connection assembly 11. The upper end of the support shaft 12 is fixedly connected to the upper thrust plate 3, and the lower end of the support shaft 12 is fixedly connected to the lower thrust plate 4. The upper end of the buffer connection assembly 11 is fixedly connected to the upper thrust plate 3, and the lower end of the buffer connection assembly 11 extends downward through the lower thrust plate 4.

[0029] The spindle 5 is fixedly connected to the lower end of the buffer connection assembly 11.

[0030] An annular groove is formed between the upper thrust plate 3, the support shaft 12 and the lower thrust plate 4. The upper thrust plate 3 is used to support the workpiece to be thinned.

[0031] The air bearing body 2 is installed in the annular groove to provide support and limit the support shaft 12.

[0032] An air-bearing bearing body 2 is provided with an air-filling channel for filling compressed gas, so that a first air film is formed between the upper end face of the air-bearing bearing body 2 and the upper thrust plate 3, a second air film is formed between the lower end face of the air-bearing bearing body 2 and the lower thrust plate 4, and a third air film is formed between the air-bearing bearing body 2 and the support shaft 12. The drive assembly 6 is connected to the spindle 5 for driving the spindle 5 to rotate, thereby driving the lower thrust plate 4, the rotating shaft assembly 1 and the upper thrust plate 3 to rotate synchronously.

[0033] The working process of the thinning machine's slow-motion air flotation turntable in this application is as follows: An air pump is connected to the air inlet of the air inlet of the air inlet via an air inlet pipe. The air pump pumps compressed air into the air inlet, and the compressed air is ejected through the air outlet of the air inlet, ultimately forming a first air film between the upper end face of the float bearing body 2 and the upper thrust plate 3. A second air film is formed between the lower end face of the float bearing body 2 and the lower thrust plate 4, and a third air film is formed between the inner wall of the float bearing body 2 and the support shaft 12.

[0034] The target object to be processed, such as a wafer to be ground and thinned, is placed on the upper thrust plate 3. Optionally, the upper thrust plate 3 is provided with vacuum adsorption holes for adsorbing the target object in order to fix the target object.

[0035] Start drive assembly 6, drive spindle 5 to rotate, thereby driving lower thrust plate 4, rotating shaft assembly 1 and upper thrust plate 3 to rotate synchronously.

[0036] This application configures the rotating shaft assembly 1 to include a buffer connection assembly 11 and a support shaft 12 sleeved on its outer side, and connects the buffer connection assembly 11 to the upper thrust plate 3 and the spindle 5 respectively. The buffer connection assembly 11 can actively compensate for the radial displacement between the spindle 5 and the upper thrust plate 3, effectively absorb the radial force caused by installation deviation, thermal deformation or load fluctuation, and significantly reduce the installation alignment accuracy requirements.

[0037] In addition, the vibration and impact loads transmitted by the buffer connection assembly 11, together with the three air films formed by the air bearing body 2, achieve full-frequency vibration isolation, ensuring that the upper thrust plate 3 has higher rotational accuracy and stability during the grinding process.

[0038] like Figure 5 As shown, in some embodiments, the buffer connection assembly 11 includes a flexible coupling 111, an upper connecting plate 112, and a lower connecting plate 113, wherein: the upper connecting plate 112 is bolted to the upper end of the flexible coupling 111 and is used to fix the upper thrust plate 3; the lower connecting plate 113 is bolted to the lower end of the flexible coupling 111 and is used to fix the mandrel 5.

[0039] By dividing the buffer connection assembly 11 into three independent components—a flexible coupling 111, an upper connecting plate 112, and a lower connecting plate 113—a modular design for the buffer connection assembly 11 is achieved, facilitating manufacturing, assembly, and maintenance. The upper connecting plate 112 and the lower connecting plate 113 are connected by bolts, avoiding stress concentration caused by direct connection between the flexible coupling 111 and the upper thrust plate 3 and the spindle 5. This improves the reliability and service life of the connection, while also providing a stable mounting foundation for the flexible coupling 111.

[0040] The flexible coupling 111 can utilize various existing couplings with flexible buffering capabilities, such as diaphragm couplings, bellows couplings, or reed couplings. Among them, diaphragm couplings can achieve backlash-free transmission, high transmission efficiency, high temperature resistance, and maintenance-free operation; bellows couplings have high sensitivity and corrosion resistance; and reed couplings can withstand greater load variations, effectively protecting the associated machine components.

[0041] In practice, the appropriate type and specific model of flexible coupling can be selected according to the specific working conditions (such as the amount of compensation, stiffness requirements, speed range, etc.). For example, when using a flexible diaphragm coupling, the number, thickness, and material of the diaphragms can be selected according to the required compensation amount and stiffness.

[0042] like Figures 1 to 5 As shown, in some embodiments, the thinning machine's slow-moving air-float turntable also includes a mounting bracket 7, and the air-float bearing body 2 is fixed on the mounting bracket 7.

[0043] By setting up the mounting bracket 7 and fixing the air bearing body 2 on it, a stable installation foundation is provided for the entire turntable, ensuring that the air bearing body 2 is fixed in position during operation, thereby ensuring the stability of the air film gap; at the same time, the mounting bracket 7 serves as the connection interface between the turntable and the thinning machine, facilitating the integration of the whole machine, and can be designed as a structure with a certain mass and rigidity to further absorb and isolate external vibrations.

[0044] In some embodiments, the thinning machine's slow-moving air-floating turntable further includes a bearing housing 8, which is disposed on the mounting bracket 7. The mandrel 5 passes through the bearing housing 8 via ball bearings, and the bearing housing 8 is used to provide support and limit the movement of the mandrel 5.

[0045] By setting up bearing housing 8 and using ball bearings to independently support the mandrel 5, a hybrid support structure of "upper air bearing + lower ball bearing" is formed. The upper rotating part is provided with high-precision support by the air bearing body 2, and the lower rotating part is provided with high-rigidity support by the ball bearing, thus balancing high precision and high load-bearing capacity. Both bearing housing 8 and air bearing body 2 are fixed on mounting bracket 7, which ensures the coaxiality of mandrel 5 and support shaft 12 and improves the overall assembly accuracy.

[0046] like Figures 1 to 3 As shown, in some embodiments, the drive assembly 6 includes a drive motor 61, a drive pulley 62, a driven pulley 63, and a belt 64, wherein: the drive motor 61 is mounted on the mounting bracket 7, and the drive pulley 62 is fixedly connected to the drive end of the drive motor 61. The driven pulley 63 is fixedly mounted on the spindle 5; the belt 64 is sleeved on the drive pulley 62 and the driven pulley 63.

[0047] The spindle 5 is driven to rotate by a belt drive mechanism (drive motor 61, drive pulley 62, driven pulley 63, belt 64). The belt drive has a buffering and vibration absorption function, which, together with the flexible characteristics of the buffer connection component 11, enhances the vibration isolation effect. At the same time, the belt drive can slip under overload, providing overload protection, allowing the drive motor 61 to be placed away from the turntable to reduce the impact of heat and vibration, and achieving speed reduction and torque increase by selecting the pulley diameter ratio to meet the grinding load requirements.

[0048] like Figures 1 to 3 As shown, in some embodiments, the upper thrust plate 3 has an adsorption hole on its bearing surface, and the spindle 5 and the buffer connection assembly 11 have an air extraction channel that is interconnected with each other and communicates with the adsorption hole.

[0049] By setting adsorption holes on the bearing surface of the upper thrust plate 3 and setting interconnected air extraction channels in the spindle 5 and buffer connection assembly 11, an integrated design of vacuum adsorption channels is realized. Vacuum adsorption force can be applied to the wafer without external air pipes, ensuring that the wafer is stably fixed during high-speed rotation.

[0050] Optionally, a rotary joint is provided at the lower end of the mandrel 5 for connecting to an external vacuum device, so as to achieve vacuum supply in the rotating state, which is compact and avoids the problem of air tube entanglement.

[0051] like Figure 3 As shown, in some embodiments, a first bearing pad 9 is disposed between the upper end face of the air bearing body 2 and the upper thrust plate 3. The lower surface of the first bearing pad 9 is airtightly fitted to the air bearing body 2, and a first air film is formed between the upper surface of the first bearing pad 9 and the upper thrust plate 3. A second bearing pad 10 is disposed between the lower end face of the air bearing body 2 and the lower thrust plate 4. The upper surface of the second bearing pad 10 is airtightly fitted to the air bearing body 2, and a second air film is formed between the lower surface of the second bearing pad 10 and the lower thrust plate 4.

[0052] By providing a first bearing pad 9 and a second bearing pad 10 on the upper and lower end faces of the air bearing body 2, respectively, and ensuring that the bearing pads are airtightly fitted to the air bearing body 2, the air bearing body 2 and the surface of the thrust plate are protected from damage by hard contact in the event of accidental contact. The airtight fit design ensures that the compressed gas can only be ejected from a predetermined direction, which is conducive to the formation of a stable and uniform gas film. At the same time, the bearing pads are replaceable components, reducing maintenance costs.

[0053] like Figure 3 As shown, in some embodiments, a radial bearing 110 is provided on the inner wall of the air bearing body 2, the outer peripheral surface of the radial bearing 110 is airtightly fitted with the inner wall of the air bearing body 2, and a third air film is formed between the inner surface of the radial bearing 110 and the support shaft 12.

[0054] By installing a radial bearing 110 on the inner wall of the air bearing body 2, and ensuring that the outer circumferential surface of the radial bearing 110 is airtightly fitted to the inner wall of the air bearing body 2, a stable radial support surface is provided for the support shaft 12, ensuring the uniformity and stability of the third air film. The airtight fit prevents compressed gas leakage and guarantees the air film pressure. As a replaceable component, the radial bearing 110 only requires replacement of the bearing pad after wear, reducing maintenance costs. Furthermore, by selecting radial bearings 110 of different sizes, the air film gap can be precisely controlled to meet different precision requirements.

[0055] The foregoing has provided a sufficiently detailed and specific description of this application. Those skilled in the art should understand that the descriptions in the embodiments are merely exemplary, and all changes made without departing from the true spirit and scope of this application should fall within the protection scope of this application. The scope of protection claimed in this application is defined by the claims, not by the above descriptions in the embodiments.

Claims

1. A slow-motion air-float turntable for a thinning machine, characterized in that, It includes a rotating shaft assembly, an air bearing body, an upper thrust plate, a lower thrust plate, a spindle, and a drive assembly, wherein: The rotating shaft assembly includes a buffer connecting assembly and a support shaft. The support shaft is fixedly sleeved on the outside of the buffer connecting assembly. The upper end of the support shaft is fixedly connected to the upper thrust plate, and the lower end of the support shaft is fixedly connected to the lower thrust plate. The upper end of the buffer connecting assembly is fixedly connected to the upper thrust plate, and the lower end of the buffer connecting assembly extends downward through the lower thrust plate. The mandrel is fixedly connected to the lower end of the buffer connection assembly; An annular groove is formed between the upper thrust plate, the support shaft and the lower thrust plate, and the upper thrust plate is used to support the workpiece to be thinned; The air bearing body is installed in the annular groove to provide support and limit the position of the support shaft; The air bearing body is provided with an air filling channel for filling compressed gas, so that a first air film is formed between the upper end face of the air bearing body and the upper thrust plate, a second air film is formed between the lower end face of the air bearing body and the lower thrust plate, and a third air film is formed between the air bearing body and the support shaft. The drive assembly is connected to the spindle and is used to drive the spindle to rotate, thereby causing the lower thrust plate, the rotating shaft assembly and the upper thrust plate to rotate synchronously.

2. The thinning machine slow-motion air-float turntable as described in claim 1, characterized in that, The buffer connection assembly includes a flexible coupling, an upper connecting plate, and a lower connecting plate, wherein: The upper connecting plate is fixedly connected to the upper end of the flexible coupling by bolts, and the upper connecting plate is used to fix the upper thrust plate. The lower connecting plate is bolted to the lower end of the flexible coupling, and the lower connecting plate is used to fix the mandrel.

3. The thinning machine slow-motion air-float turntable as described in claim 2, characterized in that, The flexible coupling is a diaphragm coupling, a bellows coupling, or a reed coupling.

4. The thinning machine slow-motion air-float turntable as described in claim 1, characterized in that, The thinning machine's slow-moving air-float turntable also includes a mounting bracket, and the air-float bearing body is fixed on the mounting bracket.

5. The thinning machine slow-motion air-float turntable as described in claim 4, characterized in that, The thinning machine's slow-moving air-float turntable also includes a bearing housing, which is mounted on the mounting bracket. The mandrel is mounted in the bearing housing via a ball bearing, and the bearing housing is used to support and limit the movement of the mandrel.

6. The thinning machine slow-motion air-float turntable as described in claim 4, characterized in that, The drive assembly includes a drive motor, a driving pulley, a driven pulley, and a belt, wherein: The drive motor is mounted on the mounting bracket, and the drive pulley is fixedly connected to the drive end of the drive motor; The driven pulley is fixedly mounted on the spindle; The belt is fitted onto the driving pulley and the driven pulley.

7. The thinning machine slow-motion air-float turntable as described in claim 1, characterized in that, The upper thrust plate has an adsorption hole on its bearing surface, and the spindle and the buffer connection assembly have an air extraction channel that is interconnected with each other and communicates with the adsorption hole.

8. The thinning machine slow-motion air-float turntable as described in claim 1, characterized in that: A first bearing pad is provided between the upper end face of the air bearing body and the upper thrust plate. The lower surface of the first bearing pad is airtightly fitted with the air bearing body, and the upper surface of the first bearing pad is formed between the upper thrust plate and the first air film. A second bearing pad is provided between the lower end face of the air bearing body and the lower thrust plate. The upper surface of the second bearing pad is in airtight contact with the air bearing body, and a second air film is formed between the lower surface of the second bearing pad and the lower thrust plate.

9. The thinning machine slow-motion air-float turntable as described in claim 1, characterized in that: A radial bearing is provided on the inner wall of the air bearing body. The outer circumferential surface of the radial bearing is airtightly fitted to the inner wall of the air bearing body. The third air film is formed between the inner surface of the radial bearing and the support shaft.

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