A high-temperature vacuum heat treatment furnace

Abstract

The application discloses a high-temperature vacuum heat treatment furnace, relates to the field of material heat treatment, and is characterized in that a water cooling ring is additionally arranged at the part of the vacuum tube beyond the warehouse door at both ends, heat of the outer tube wall of the vacuum tube is taken away through circulating cooling water, heat conduction of high temperature to the sealing ring is effectively insulated, the sealing ring is ensured to work at a safe temperature for a long time, the long-term pain points of aging and air leakage of the sealing ring of the traditional equipment during long-time high-temperature operation are solved, and the high vacuum degree in the vacuum tube is effectively ensured. The inside of the vacuum tube is divided into multiple independent heating zones, each zone is provided with an independent thermocouple for partition temperature control, the power output of the heating structure of each zone can be adjusted to accurately compensate for the axial heat loss. An automatic opening and closing warehouse door is combined with a top high-power fan to blow and clean the outer wall of the vacuum tube, the composite cooling scheme is adopted, no gas needs to be introduced into the vacuum tube during the cooling process, the cooling rate is adjustable, a large number of annular samples or other different shapes of samples suitable for suspension can be mounted at one time, and batch processing in the same furnace cycle is realized.

Description

Technical Field

[0001] This invention relates to the field of materials heat treatment technology, and more specifically, to a high-temperature vacuum heat treatment furnace. Background Technology

[0002] In the existing technology, when samples are heat-treated (annealed or quenched) in a high-temperature (600℃~1300℃) and high-vacuum environment, the following technical defects mainly exist: (1) The contradiction between material temperature resistance and structural reliability: Most existing horizontal heat treatment furnaces use quartz tubes or corundum tubes as vacuum / atmosphere furnace tubes. Flange tubes and sealing rings are installed at both ends of the furnace tube. The flange tubes have inlet and outlet ports. Protective gas can be introduced into the furnace tube or the vacuum pump can be controlled to draw a vacuum to achieve the required atmosphere protection environment or vacuum environment. In the existing technology, the flange tubes at both ends rely only on natural heat dissipation or simple air cooling. During long-term high-temperature operation, heat is conducted along the furnace tube axis to the sealing ring of the flange, which causes the rubber or fluororubber sealing ring to age, harden or even carbonize rapidly, and the air tightness drops sharply, making it impossible to maintain a high vacuum. More seriously, quartz tubes are prone to crystallization and cracking during frequent heating and cooling cycles. Although corundum tubes have high temperature resistance, they have poor thermal shock resistance. During rapid cooling or furnace vibration, stress cracking is very likely to occur at the flange connection. Once the furnace tube breaks, not only will the test fail, but the high-temperature atmosphere leakage may also burn the heating element, resulting in high maintenance costs. (2) Temperature control “inaccuracy” and “uniformity”: Existing heat treatment furnaces generally use single-point thermocouples on the outer wall of the furnace or near the heating wire for temperature control. However, there is a significant dynamic lag between the actual temperature of the sample location and the displayed temperature. During rapid heating or cooling, this lag can reach tens of degrees Celsius, resulting in inaccurate phase change point determination and poor process repeatability. At the same time, the inherent heat dissipation problem at both ends of the horizontal structure makes the axial temperature gradient inside the furnace tube obvious and the constant temperature zone limited. Even if multi-zone heating is used, due to the lack of direct temperature measurement feedback inside the cavity, the coupling compensation of each zone is difficult to match accurately, resulting in samples placed at different axial positions experiencing different thermal histories. The uniformity of the tissue of multiple samples processed in the same furnace cannot be guaranteed. (3) Uncontrollable cooling process: Traditional tube furnaces rely on high-pressure gas quenching or push-pull rod moving quenching for cooling. High-pressure gas blows the sample, and the sample near the gas nozzle cools quickly, while the sample far from the gas nozzle cools slowly, resulting in uneven cooling. Push-pull rod moving quenching has the problem of "transfer time black box". During the time from the end of heating to the start of quenching, the operator's control of the speed of the push-pull rod, reaction time and other conditions are uncontrollable, unknowable and difficult to repeat. (4) Lack of batch processing capacity: Most existing furnace tubes are single tube single boat structures, which can only process a few samples in one test. For R&D needs that require statistical verification or parallel comparison of multiple process conditions, the test cycle is long, the efficiency is low and the energy consumption is high. At the same time, when multiple samples are stacked in the same boat, the temperature conduction at the contact surface is blocked, which cannot guarantee uniform heating and the process data has large dispersion. Summary of the Invention

[0003] To address the technical problems existing in the prior art, the present invention provides a high-temperature vacuum heat treatment furnace that can achieve precise temperature control, controllable cooling rate, long-term maintenance of vacuum, and high repeatability of heat treatment for batch samples under high temperature and high vacuum conditions.

[0004] The specific plan is as follows: A high-temperature vacuum heat treatment furnace, comprising: Storage doors, including a left storage door and a right storage door that can be opened and closed; The furnace tube, located between the left and right doors, includes a vacuum tube inside the door, flanges fixedly installed at both ends of the vacuum tube and located outside the door, a sealing ring at the connection between the flange and the vacuum tube, a bracket installed inside the vacuum tube, and a water-cooling ring fitted at both ends of the vacuum tube and near the sealing ring. The flanges have an air inlet and an air outlet. The interior of the vacuum tube is divided into multiple heating zones along the axial direction. Each heating zone is heated and temperature-controlled independently. The water-cooling ring has a water inlet and a water outlet. The inlet and outlet of the water-cooling ring are connected to the water chiller; The vacuum device has an inlet and outlet flange connected to it to provide a vacuum environment inside the vacuum tube.

[0005] Furthermore, it also includes an air-cooling device, which includes multiple fans located on both sides of the vacuum tube. The fans are located outside the chamber door, and the air blown out by the fans acts on the outer wall of the vacuum tube.

[0006] Furthermore, the bracket includes a central tube, a positioning plate sleeved on the outer wall of the central tube, multiple sample holder rods evenly installed on the positioning plate along the circumferential direction, and multiple sample spacers sleeved on each sample holder rod. The sample holder rods are detachably installed on the positioning plate, and there is a gap between adjacent sample spacers on each sample holder rod to accommodate the sample.

[0007] Furthermore, the furnace tube also includes multiple thermocouples of varying lengths, which extend into the interior of the central tube, with each thermocouple extending into a different heating zone.

[0008] Furthermore, the furnace tube also includes an end cap fixedly mounted on the flange tube, and the thermocouple is fixedly mounted on the end cap.

[0009] Furthermore, the furnace tube also includes multiple independently controlled resistance wires located inside the vacuum tube, with each resistance wire heating a different heating zone.

[0010] Furthermore, the vacuum tube is made of silicon nitride.

[0011] Furthermore, the vacuum device includes a mechanical pump, a Roots pump connected to the mechanical pump, and a molecular pump connected to the Roots pump. The molecular pump is connected to the inlet and outlet of the flange pipe.

[0012] Furthermore, the end cap is hollow inside and has an inlet and an outlet for connection with the water chiller.

[0013] Furthermore, the sealing ring has a pressure ring inside that fits onto the outer wall of the vacuum tube, and O-rings are provided on both sides of the pressure ring.

[0014] The beneficial effects of this invention are as follows: Improving material temperature resistance and structural reliability: The vacuum tube is made of silicon nitride, which has the advantages of high temperature resistance and good thermal shock resistance. Water cooling rings are installed at both ends of the vacuum tube beyond the chamber door. The heat of the outer tube wall is removed by circulating cooling water, effectively preventing the high temperature from being conducted to the sealing ring. This ensures that the sealing ring works below the safe temperature for a long time, solving the long-standing problem of sealing ring aging and leakage in traditional equipment during long-term high-temperature operation. This effectively ensures the high vacuum inside the vacuum tube and solves the problem of cracking caused by thermal stress in traditional vacuum tubes. Achieving precise temperature control and uniform temperature field: The vacuum tube adopts a multi-segment independent heating structure, with each segment equipped with an independent thermocouple for zoned temperature control. The power output of each heating segment can be adjusted to accurately compensate for axial heat loss. More importantly, the thermocouples inside the vacuum tube directly measure the actual temperature distribution of the sample area in real time, eliminating the dynamic lag between the measured temperature and the actual temperature of the sample in traditional equipment. This significantly increases the length of the isothermal zone, laying a solid foundation for the consistent processing of batch samples. Achieving controllability of the cooling process: Abandoning the traditional tube furnace cooling method that relies on high-pressure gas quenching or push-pull rod moving quenching, a composite cooling scheme is adopted, which combines automatic opening and closing of the chamber door with a high-power fan at the top to blow the outer wall of the vacuum tube. The cooling process does not require the introduction of any gas into the vacuum tube, completely avoiding problems such as high-speed airflow blowing on the sample causing sample disturbance and uneven cooling, as well as the "transfer time black box" problem of moving quenching. The cooling rate can be precisely controlled by the program to start and stop the fan and the opening and closing angle of the chamber door, realizing the controllability and repeatability of the cooling process. Enhanced batch processing capacity and process consistency: The vacuum tube has a built-in corundum sample holder, which can hang a large number of ring samples or other different shapes of samples suitable for suspension at one time, realizing batch processing in the same furnace. The rack design ensures that each sample is exposed to a uniform vacuum thermal field without any contact surface obstruction, effectively avoiding the temperature unevenness problem caused by traditional boat stacking, and providing a high-efficiency and high-consistency test platform for material production and application testing. Enhanced equipment safety and environmental purity: Equipped with a three-stage vacuum pump group consisting of a mechanical pump, a Roots pump, and a molecular pump, achieving an ultimate vacuum of 2.0 × 10⁻⁶. -4 Pa, the working vacuum level is stable at 5×10 -3 The Pa level meets the processing requirements for materials extremely sensitive to oxygen partial pressure. The entire machine adopts a fully static sealed structure with no moving parts penetrating the vacuum tube wall, fundamentally eliminating the risk of dynamic seal failure. The equipment uses only a pure vacuum environment and does not introduce any flammable or explosive gases, completely eliminating the risk of combustion and explosion caused by reducing atmospheres such as hydrogen, and significantly reducing the safety management cost of equipment operation. Attached Figure Description

[0015] Figure 1 This is a three-dimensional schematic diagram of the overall structure of the present invention.

[0016] Figure 2 This is a three-dimensional structural diagram of the invention from the first perspective after removing the water chiller and electrical control cabinet.

[0017] Figure 3 This is a three-dimensional structural diagram of the invention from a second perspective after removing the water chiller and electrical control cabinet.

[0018] Figure 4 This is a three-dimensional structural diagram of the furnace tube of the present invention.

[0019] Figure 5 This is a schematic diagram of the combined three-dimensional structure of the thermocouple and the bracket of the present invention.

[0020] Figure 6 This is a three-dimensional structural diagram of the hanger of the present invention.

[0021] Figure 7 This is a front view of the furnace tube of the present invention.

[0022] Figure 8 For the present invention Figure 7 Sectional view at point AA.

[0023] Figure 9 For the present invention Figure 8 Enlarged diagram of part B.

[0024] Figure 10 For the present invention Figure 8An enlarged schematic diagram of section C.

[0025] Figure 11 Photo 1 shows the actual item.

[0026] Figure 12 Photo 2 shows the actual item.

[0027] The reference numerals in the accompanying drawings of this invention are as follows: 100. Workbench; 210. Left compartment door; 220. Right compartment door; 230. Linear guide rail; 310. Vacuum tube; 320. Thermocouple; 330. Flange tube; 340. Sealing ring; 341. Pressure ring; 350. Water-cooled ring; 360. End cap; 371. Central tube; 372. Front positioning plate; 373. Rear positioning plate; 374. Sample holder rod; 375. Sample spacer; 376. Front inner spacer; 377. Rear inner spacer; 378. Front heat insulation plate; 379. Rear heat insulation plate; 370. Outer spacer; 400. Water chiller; 510. Mechanical pump; 520. Roots pump; 530. Molecular pump; 610. Fan; 700. Electrical control cabinet. Detailed Implementation

[0028] The technical solutions of the present invention will now be clearly and completely described with reference to the accompanying drawings in the embodiments of the present invention.

[0029] In response to the long-standing challenges in the materials manufacturing and materials application testing industry regarding the difficulty in simultaneously maintaining high vacuum, controlling temperature field uniformity, regulating the cooling process, and ensuring batch processing consistency during annealing or quenching in high-temperature (600℃~1300℃) and high-vacuum environments, this embodiment discloses a high-temperature vacuum heat treatment furnace.

[0030] Please see Figures 1 to 3 The high-temperature vacuum heat treatment furnace in this embodiment includes a workbench 100, a chamber door, furnace tubes, a water chiller 400, a vacuum device, an air-cooling device, and an electrical control cabinet 700. The water chiller 400 and the electrical control cabinet 700 are located on the left and right sides of the workbench 100, respectively. The chamber door, furnace tubes, and air-cooling device are fixedly installed on the surface of the workbench 100, and the vacuum device is located at the rear of the workbench 100. It should be noted that, for ease of description of the positional relationship of each component, ... Figure 1 The four directions—front, back, left, and right—are marked in the text for easy understanding.

[0031] Please see Figure 2The storage compartment includes a left storage compartment 210 and a right storage compartment 220 that can be opened and closed. A linear guide rail 230 is installed on the table surface of the workbench 100. The left storage compartment 210 and the right storage compartment 220 are slidably installed on the linear guide rail 230. The left storage compartment 210 and the right storage compartment 220 are driven to move on the linear guide rail 230 by a servo motor to realize the automatic opening and closing of the storage compartment. The automatic opening and closing storage compartment structure is a common structure in the prior art, and its specific structure will not be described here.

[0032] Please see Figures 4 to 10 The furnace tube is located between the left compartment door 210 and the right compartment door 220. Its bottom is fixed to the workbench 100 by a support frame. It includes a vacuum tube 310, a resistance wire, a thermocouple 320, a flange tube 330, a sealing ring 340, a water cooling ring 350, a hanger, and an end cover 360.

[0033] The vacuum tube 310 is a straight pipe made of silicon nitride, a material known for its high temperature resistance, good thermal shock resistance, and moderate thermal conductivity, making it suitable for long-term high-temperature operation in high-vacuum environments. The vacuum tube 310 is internally divided into multiple heating zones along the axial direction. In this embodiment, the vacuum tube 310 is divided into three independent heating zones: a front, middle, and rear zone. Each heating zone is equipped with a heating element, and each heating element independently heats its corresponding zone. Preferably, in this embodiment, the heating element is an HRE high-temperature resistance wire, which has stable resistance, high thermal efficiency, and excellent resistance to high-temperature oxidation. Each heating zone is equipped with an independent temperature sensor for temperature measurement. After measuring the temperature of its corresponding heating zone, the sensor generates an electrical signal. This signal is processed and read by the controller to control the temperature of the resistance wire within that heating zone. This allows for segmented power adjustment to compensate for axial heat dissipation, eliminating the dynamic lag between the measured temperature and the actual sample temperature in traditional equipment. It significantly increases the length of the isothermal zone, ensuring that samples at different axial positions undergo the same thermal history, thereby guaranteeing the uniformity of the microstructure of multiple samples processed in the same batch. The type of temperature sensor can be selected according to actual needs; in this embodiment, an S-type armored thermocouple 320 is used. The length of each heating zone can be designed according to specific requirements.

[0034] There are two flange tubes 330, which are fixedly installed at both ends of the vacuum tube 310. The flange tube 330 has an air inlet and an air outlet. The interior of the flange tube 330 is connected to the interior of the vacuum tube 310. The vacuum tube 310 is evacuated through the air inlet and air outlet of the flange tube 330 to create a vacuum environment inside the vacuum tube 310.

[0035] Two sealing rings 340 are provided, located at the connection points between the two flanges 330 and the vacuum tube 310, respectively, to seal the connection points. The airtightness of the sealing rings 340 significantly affects the maintenance of the high vacuum environment inside the furnace tubes; therefore, the airtightness of the sealing rings 340 is crucial. Inside the sealing rings 340, a pressure ring 341 is provided, which fits onto the outer wall of the vacuum tube 310. O-rings are provided on both sides of the pressure ring 341 to provide sealing force.

[0036] Two water-cooling rings 350 are fitted at both ends of the vacuum tube 310 and close to the sealing ring 340. The water-cooling rings 350 are closer to the heating zone located at the center of the vacuum tube 310 than the sealing ring 340. The water-cooling rings 350 have inlets and outlets, which are connected to the water chiller 400 via water pipes. Circulating cooling water removes heat from the outer wall of the vacuum tube 310. The interior of the water-cooling rings 350 is hollow to allow for the circulation of cooling water. In existing technology, after prolonged high-temperature operation, heat is conducted axially from the heating zone at the center of the vacuum tube 310 to the sealing ring 340 at the end of the vacuum tube 310. This causes the sealing ring 340 and the O-ring to age, harden, and even carbonize more rapidly, leading to a decrease in the airtightness of the sealing ring 340 and affecting the maintenance of the high vacuum environment inside the vacuum tube 310. To address this, a water-cooling ring 350 is installed. When heat is conducted axially from the heating zone to the water-cooling ring 350, it is carried away by the circulating cooling water, effectively preventing high temperature from being conducted to the sealing ring 340. This solves the long-standing problem of aging and leakage of the sealing ring 340 and O-rings during long-term high-temperature operation of traditional equipment, thereby effectively ensuring the high vacuum inside the vacuum tube 310.

[0037] The hanger is installed inside the vacuum tube 310. This hanger is suitable for annular specimens or other specimens that are easy to suspend. The hanger includes a central tube 371, positioning plates, a specimen holder rod 374, and a specimen spacer 375. The length of the central tube 371 is along the axial direction of the vacuum tube 310, and the central tube 371 is located at the axis of the vacuum tube 310. A threaded hole is provided at the center of the rear end face of the central tube 371. There are at least two positioning plates: a front positioning plate 372 located at the front end of the central tube 371 and a rear positioning plate 373 located at the rear end of the central tube 371. More positioning plates can be installed between the front positioning plate 372 and the rear positioning plate 373 as needed. The external dimensions of the positioning plates are smaller than the inner diameter of the vacuum tube 310. Therefore, when the hanger is placed inside the vacuum tube 310, the positioning plates are suspended inside the vacuum tube 310 and do not contact the inner wall of the vacuum tube 310, so no heat transfer occurs between them. The sample holder rods 374 are multiple, with four in this embodiment, evenly distributed along the circumference. The sample holder rods 374 are installed between the front positioning plate 372 and the rear positioning plate 373. Threaded holes are provided at both ends of the sample holder rods 374. Through holes are provided on the positioning plates corresponding to the positions of the sample holder rods 374. Bolts pass through the through holes of the positioning plates and are locked into the threaded holes of the sample holder rods 374, thereby fixing the sample holder rods 374 to the positioning plates. Multiple sample spacers 375 are fitted onto each sample holder rod 374. There is a gap between adjacent sample spacers 375 on each sample holder rod 374 to accommodate the sample. The sample is suspended on the sample holder rod 374, with adjacent samples separated by the sample spacers 375.

[0038] The bracket also includes an inner spacer, a heat insulation plate, and an outer spacer 370. The inner spacer is fitted onto the outer wall of the central tube 371. There are two inner spacers: a front inner spacer 376 located in front of the front positioning plate 372 and a rear inner spacer 377 located behind the rear positioning plate 373. The heat insulation plate is installed on the outer wall of the central tube 371 and includes a front heat insulation plate 378 located in front of the front inner spacer 376 and a rear heat insulation plate 379 located behind the rear inner spacer 377. The heat insulation plate is circular, and its outer diameter is equal to the inner diameter of the vacuum tube 310. When the heat insulation plate is installed inside the vacuum tube 310, it abuts against the inner wall of the vacuum tube 310, thereby supporting the bracket. The outer partition 370 is fitted onto the outer wall of the central tube 371 and located in front of the front heat insulation plate 378. The outer partition 370 has a through hole in the radial direction, and the central tube 371 has a threaded hole in the radial direction. The bolt passes through the through hole of the outer partition 370 and locks into the threaded hole of the central tube 371, thereby fixing the outer partition 370 onto the central tube 371.

[0039] The assembly principle of the bracket is as follows: First, suspend each sample on the sample holder rod 374. For each suspended sample, a sample spacer 375 is fitted over it, ensuring no gaps between the spacer 375 and the sample. This process continues until the sample holder rod 374 is fully loaded with samples. Then, the two ends of the fully loaded sample holder rod 374 are bolted together with the front positioning plate 372 and the rear positioning plate 373, forming a single unit. This unit is then fitted onto the central tube 371. Next, the inner spacer is fitted onto the central tube 371, with the front inner spacer 376 tightly against the front side of the front positioning plate 372 and the rear inner spacer 377 tightly against the rear side of the rear positioning plate 373. The heat insulation sleeve sandwiches the unit formed by the sample holder rod 374 and the positioning plate in between. Next, the heat insulation plate is fitted onto the central tube 371, so that the front heat insulation plate 378 is tightly against the front side of the front heat insulation sleeve, and the rear heat insulation plate 379 is tightly against the rear side of the rear heat insulation sleeve. Then, the outer spacer 370 is fitted onto the central tube 371, so that the outer spacer 370 is tightly against the front side of the front heat insulation plate 378, and then the outer spacer 370 is locked onto the central tube 371 with bolts, thus limiting the front of the front heat insulation plate 378. Finally, the bolts are locked into the threaded hole at the rear end of the central tube 371, thus limiting the rear of the rear heat insulation plate 379. At this point, all the components of the bracket are fixedly connected together, making the bracket a whole, so that the bracket can be placed into the vacuum tube 310. When the bracket is placed into the vacuum tube 310, the heat insulation plate will abut against the inner wall of the vacuum tube 310, thereby supporting the bracket.

[0040] The rack is made of corundum, which boasts high hardness, excellent wear resistance, high temperature resistance, and high chemical stability. The rack can simultaneously hold a large number of ring-shaped specimens and other suspended specimens of various shapes, enabling batch processing in the same furnace. The rack design ensures that each sample is exposed to a uniform vacuum thermal field without any contact surface obstruction, effectively avoiding the temperature unevenness problems caused by traditional boat-type stacking. This provides a highly efficient and consistent testing platform for material production and application testing.

[0041] Two end caps 360 are fixedly installed at the ports of the two flange pipes 330, respectively, to seal the ports of the flange pipes 330. A sealing ring is provided between the end cap 360 and the flange pipe 330 to enhance the sealing performance between the end cap 360 and the flange pipe 330. The end cap 360 has an inlet and an outlet for water cooling to the water chiller 400 via water pipes, and the cooling water circulation dissipates heat from the outer wall of the vacuum tube 310, further enhancing heat dissipation.

[0042] Thermocouple 320 is mounted and fixed on end cap 360 at the front end, and extends into the interior of central tube 371. This embodiment includes three thermocouples 320 of different lengths. The first thermocouple 320 extends into the front heating zone to detect the temperature of the front heating zone; the second thermocouple 320 extends into the middle heating zone to detect the temperature of the middle heating zone; and the third thermocouple 320 extends into the rear heating zone to detect the temperature of the rear heating zone.

[0043] Please see Figure 3 The vacuum device provides a vacuum environment inside the vacuum tube 310. It includes a mechanical pump 510, a Roots pump 520 connected to the mechanical pump 510, and a molecular pump 530 connected to the Roots pump 520. The molecular pump 530 is connected to the inlet and outlet of the flange tube 330. By equipping a three-stage vacuum pump group consisting of the mechanical pump 510, the Roots pump 520, and the molecular pump 530, an ultimate vacuum of 2.0 × 10⁻⁶ can be achieved. -4 Pa, the working vacuum level is stable at 5×10 -3 The Pa level meets the processing requirements for materials extremely sensitive to oxygen partial pressure. The entire unit adopts a fully static sealed structure, with no moving parts penetrating the 310 vacuum tube wall, fundamentally eliminating the risk of dynamic seal failure. The equipment uses only a pure vacuum environment, without introducing any flammable or explosive gases, completely eliminating the risk of combustion and explosion caused by reducing atmospheres such as hydrogen, and significantly reducing the safety management costs of equipment operation.

[0044] The air-cooling device includes multiple high-power fans 610 located on both sides of the vacuum tube 310. The fans 610 are situated outside the chamber door, and the airflow from them acts on the outer wall of the vacuum tube 310. When the sample enters the rapid cooling phase, the chamber door automatically opens, and the fans 610 forcefully purge and cool the outer wall of the vacuum tube 310. This structure abandons the traditional tube furnace cooling method that relies on high-pressure gas quenching or push-pull rod moving quenching. It adopts a composite cooling scheme combining automatic opening and closing of the chamber door with the top high-power fans 610 purging the outer wall of the vacuum tube 310. The cooling process does not require the introduction of any gas into the vacuum tube 310, completely avoiding problems such as sample disturbance and uneven cooling caused by high-speed airflow blowing on the sample, as well as the "transfer time black box" problem in moving quenching. The cooling rate can be precisely controlled by the program to start and stop the fans 610 and the opening and closing angle of the chamber door, achieving controllability and repeatability of the cooling process.

[0045] The overall working principle of this embodiment is as follows: The chamber door is opened, and the batch of samples to be processed is connected to the rack and then placed inside the vacuum tube 310. The chamber door is closed, and the vacuum device is activated to evacuate the inside of the vacuum tube 310 to the working vacuum level. Subsequently, each heating zone is independently heated by turning on the resistance wire. Thermocouples 320 in each heating zone provide real-time feedback on the internal temperature, ensuring that the actual temperature of the sample closely matches the set process temperature. After the temperature inside the vacuum tube 310 reaches the set process temperature, it is held at that temperature. After the holding period, the chamber door is automatically opened, and the fan 610 is activated for rapid cooling. The entire thermal cycle (vacuuming—heating—holding—cooling) is automatically completed by the computer terminal control system and software, which can record and trace key process data such as the actual temperature curve of the sample, the vacuum degree change curve, and the heating and cooling rates in real time.

[0046] It should be noted that the above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A high-temperature vacuum heat treatment furnace, characterized in that, include: The storage doors include a left storage door (210) and a right storage door (220) that can be opened and closed. The furnace tube is located between the left compartment door (210) and the right compartment door (220). It includes a vacuum tube (310) located inside the compartment door, flange tubes (330) fixedly installed at both ends of the vacuum tube (310) and located outside the compartment door, a sealing ring (340) located at the connection between the flange tube (330) and the vacuum tube (310), a bracket installed inside the vacuum tube (310), and a water-cooling ring (350) sleeved at both ends of the vacuum tube (310) and close to the sealing ring (340). The flange tube (330) has an air inlet and an air outlet. The vacuum tube (310) is divided into multiple heating zones along the axial direction. Each heating zone is heated and temperature controlled independently. The water-cooling ring (350) has a water inlet and a water outlet. The inlet and outlet of the water-cooled ring (350) are connected to the water-cooled machine (400); The vacuum device has an inlet and outlet of the flange tube (330) connected to the vacuum device to provide a vacuum environment inside the vacuum tube (310).

2. The high-temperature vacuum heat treatment furnace according to claim 1, characterized in that, It also includes an air-cooling device, which includes multiple fans (610) located on both sides of the vacuum tube (310). The fans (610) are located outside the chamber door, and the air blown out by the fans (610) acts on the outer wall of the vacuum tube (310).

3. The high-temperature vacuum heat treatment furnace according to claim 1 or 2, characterized in that, The bracket includes a central tube (371), a positioning plate sleeved on the outer wall of the central tube (371), multiple sample holder rods (374) evenly installed on the positioning plate along the circumferential direction, and multiple sample spacers (375) sleeved on each sample holder rod (374). The sample holder rods (374) are detachably installed on the positioning plate, and there is a gap between adjacent sample spacers (375) on each sample holder rod (374) to accommodate the sample.

4. The high-temperature vacuum heat treatment furnace according to claim 3, characterized in that, The furnace tube also includes multiple thermocouples (320) of varying lengths, which extend into the interior of the central tube (371), and each thermocouple (320) extends into a different heating zone.

5. The high-temperature vacuum heat treatment furnace according to claim 4, characterized in that, The furnace tube also includes an end cap (360) fixedly installed on the flange tube (330), and a thermocouple (320) fixedly installed on the end cap (360).

6. The high-temperature vacuum heat treatment furnace according to claim 1, characterized in that, The furnace tube also includes multiple independently controlled resistance wires located inside the vacuum tube (310), each resistance wire heating a different heating zone.

7. The high-temperature vacuum heat treatment furnace according to claim 1, characterized in that, The vacuum tube (310) is made of silicon nitride.

8. The high-temperature vacuum heat treatment furnace according to claim 1, characterized in that, The vacuum device includes a mechanical pump (510), a Roots pump (520) connected to the mechanical pump (510), and a molecular pump (530) connected to the Roots pump (520). The molecular pump (530) is connected to the inlet and outlet of the flange pipe (330).

9. The high-temperature vacuum heat treatment furnace according to claim 4, characterized in that, The end cap (360) is hollow inside and has an inlet and an outlet for connecting to the water chiller (400).

10. The high-temperature vacuum heat treatment furnace according to claim 1, characterized in that, The sealing ring (340) has a pressure ring (341) inside that is fitted onto the outer wall of the vacuum tube (310), and O-rings are provided on both sides of the pressure ring (341).

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