A turnover apparatus

Abstract

The application discloses a turnover device, which is used for switching a substrate holder between a horizontal state and a vertical state, and effectively avoids the risk of substrate damage and potential safety hazards. The technical scheme comprises a base, a turnover platform, a conveying track, a first driving mechanism, a fixing mechanism and a magnetic attraction mechanism. The first driving mechanism is used for driving the turnover platform to switch between the horizontal state and the vertical state. The fixing mechanism and the magnetic attraction mechanism are connected to the turnover platform. The fixing mechanism is used for detachable connection with the substrate holder. When the turnover platform is in the horizontal state and horizontally loads the substrate holder, the fixing mechanism is connected with the substrate holder. When the turnover platform is in the vertical state, the turnover platform is used for vertically placing the substrate holder on the conveying track. Meanwhile, the fixing mechanism is separated from the substrate holder, and the magnetic attraction mechanism attracts the top of the substrate holder, so that the substrate holder is kept in an upright state. The application belongs to the technical field of magnetron sputtering coating.

Description

Technical Field

[0001] This invention belongs to the field of magnetron sputtering coating, and more specifically, relates to a flipping device. Background Technology

[0002] Magnetron sputtering coating technology uses the principle of cathode sputtering to deposit a film, that is, argon ions bombard the surface of the target material, and the sputtered atoms are deposited on the surface of the substrate to form a film.

[0003] In existing technologies, vertical vacuum coating is used. Before coating the substrate, the substrate holder is placed horizontally, and the operator loads the substrate onto the substrate holder. Then, the substrate holder is manually positioned upright and lifted into the feeding chamber. The substrate holder is then conveyed from the feeding chamber and passes through the coating chamber (which may be multiple) and the discharge chamber in sequence to complete the substrate coating. However, since the substrate is very heavy after being loaded onto the substrate holder, manually switching the substrate holder between vertical and horizontal positions to complete the loading of the substrate not only easily damages the substrate but also poses a high safety risk and is inefficient. Summary of the Invention

[0004] The main objective of this invention is to provide a flipping device that can switch the substrate holder between horizontal and vertical states without manual operation, and effectively avoids the risk of substrate damage and safety hazards.

[0005] According to a first aspect of the present invention, a flipping device is provided, comprising a base, a flipping platform, a conveying track, a first driving mechanism, a fixing mechanism, and a magnetic attraction mechanism, wherein the flipping platform is rotatably connected to the base, the conveying track is fixedly connected to the base, and the conveying track is located below the flipping platform;

[0006] The first drive mechanism connects the base and the flipping platform. The first drive mechanism is used to drive the flipping platform to switch between a horizontal state and a vertical state. The fixing mechanism and the magnetic attraction mechanism are connected to the flipping platform. The fixing mechanism is used to detachably connect with the substrate holder. When the flipping platform is in a horizontal state to load the substrate holder horizontally, the fixing mechanism is connected to the substrate holder. When the flipping platform is in a vertical state, the flipping platform is used to place the substrate holder vertically on the conveyor track. At the same time, the fixing mechanism is separated from the substrate holder, and the magnetic attraction mechanism attracts the top of the substrate holder to keep the substrate holder upright.

[0007] The aforementioned flipping device further includes X-axis, Y-axis, and Z-axis directions;

[0008] The magnetic attraction mechanism includes a connecting frame, a flipping frame, and a first cylinder; the connecting frame is located on one side of the flipping platform, the flipping frame is rotatably connected inside the connecting frame, one end of the first cylinder is hinged to the connecting frame, and the output end of the first cylinder is hinged to the flipping frame.

[0009] A first magnetic block is provided on the side of the flipping frame near the flipping platform. The length direction of the first magnetic block extends along the X-axis. The first magnetic block is used to attract the top of the substrate holder placed on the transport track so that it remains upright.

[0010] In the aforementioned flipping device, the flipping platform has a frame structure, and the substrate holder has a rectangular structure; the fixing mechanism includes multiple fixing components connected to the flipping platform, with each fixing component corresponding to a corner of the substrate holder.

[0011] The fixing assembly includes a second cylinder, an L-shaped plate, a third cylinder, and a fixing block. The second cylinder is connected to the corner of the outer side of the tilting platform via a connector.

[0012] The horizontal part of the L-shaped plate is connected to the telescopic end of the second cylinder; when the tilting platform is in a horizontal state, the second cylinder drives the L-shaped plate to move in the positive direction of the Z-axis; when the tilting platform is in a vertical state, the second cylinder drives the L-shaped plate to move in the positive direction of the Y-axis.

[0013] The third cylinder is connected to the vertical part of the L-shaped plate. The fixing block is connected to the telescopic end of the third cylinder. The fixing block has a mating surface for mating with the corner of the substrate holder. The third cylinder is used to drive the fixing block to move towards the substrate holder so that the mating surface mats with the corner of the substrate holder.

[0014] The aforementioned flipping device also includes a fixing plate, a clamping frame, a support rod, and a receiving rail.

[0015] There are multiple fixing plates, which are evenly distributed on both outer sides of the flipping platform along the X-axis.

[0016] The clamping frame is located above the flipping platform. Each fixed plate is equipped with a second drive mechanism. The clamping frame is connected to the second drive mechanism, which is used to drive the clamping frame to move closer to or further away from the flipping platform.

[0017] There are multiple support rods, which are set on the top surface of the flipping platform and are used to support the substrate holder.

[0018] The receiving track is connected to the base, and the receiving track and the conveying track are arranged at intervals along the Y-axis. The conveying direction of the receiving track is opposite to that of the conveying track. The receiving track is used to receive the substrate frame output from the external inlet and outlet chambers.

[0019] The flipping frame has a second magnetic block on one side of the first magnetic block. When the flipping platform is in a vertical state, the first magnetic block is located above the conveying track and the second magnetic block is located above the receiving track. The length direction of the second magnetic block extends along the length direction of the first magnetic block. The second magnetic block is used to attract the top of the substrate holder on the receiving track so that it remains upright.

[0020] The four fixing components are located at the four corners of the clamping frame.

[0021] In the aforementioned flipping device, the substrate holder includes a holder body, a locking mechanism, and a fixing frame. One side of the holder body has a receiving groove for receiving the substrate. The bottom surface of the receiving groove has a clearance through hole for avoiding the substrate's coating surface. The locking mechanism is connected to the holder body, and multiple locking mechanisms are provided on the outer periphery of the receiving groove. The fixing frame is placed inside the receiving groove, and the locking mechanism is used to press against the fixing frame so that the fixing frame locks the edge of the substrate to the bottom surface of the receiving groove.

[0022] The substrate holder has a magnetic guide rail at the top and a roller guide rail at the bottom;

[0023] The overturning device also includes a rotary cylinder and an unlocking mechanism;

[0024] There are multiple rotary cylinders, which are distributed on the two inner sides of the clamping frame along the Y-axis. The output end of the rotary cylinder is equipped with a swing arm, which is used to drive the swing arm to swing to clamp the frame body.

[0025] The unlocking mechanism corresponds to the locking mechanism. The unlocking mechanism is used to unlock the locking mechanism so that the substrate holder can be detached from the fixed frame.

[0026] In the aforementioned flipping device, the locking assembly includes a rotating shaft, a locking lug, a pressure post, and an elastic element. The rotating shaft is fixedly connected to the frame body, and the middle part of the locking lug is rotatably connected to the rotating shaft. One end of the locking lug is fixedly connected to the pressure post, and the opposite end is connected to the elastic element. The elastic element is used to apply force to the locking lug so that the pressure post presses against the fixed frame.

[0027] In the aforementioned flipping device, the unlocking mechanism includes a connecting plate and a fourth cylinder. The mounting plate is connected to the inner side of the clamping frame, and the fourth cylinder is connected to the connecting plate. The output end of the fourth cylinder is used to apply force to the other end of the locking ear to rotate the locking ear, thereby allowing the substrate to detach from the fixed frame.

[0028] The aforementioned flipping device also includes a plate, a swing frame, and a fifth cylinder;

[0029] The plate has an inverted L-shaped structure. The bottom surface of the horizontal part of the plate is connected to the output end of the second drive mechanism. The top surface of the horizontal part of the plate is provided with a first connecting block, which is connected to the outside of the clamping frame.

[0030] The vertical part of the L-shaped block is provided with a second connecting block, the swing frame is rotatably connected to the second connecting block, one end of the fifth cylinder is hinged to the second connecting block, and the output end of the fourth cylinder is hinged to the swing frame.

[0031] The swing frame is equipped with rollers, and the fifth cylinder is used to drive the swing frame to swing so that the rollers contact the roller guide rail of the substrate holder.

[0032] In the aforementioned flipping device, a fixing frame is also provided at the bottom of the clamping frame. Multiple electric push rods are provided on the side of the fixing frame facing the clamping frame. A universal ball is connected to the output end of the electric push rod. The electric push rod is used to drive the universal ball to move in the direction of the clamping frame so that the universal ball passes through the hollow part of the flipping platform and abuts against the substrate of the substrate holder.

[0033] In the aforementioned flipping device, the conveying track includes multiple conveying wheels and multiple first rotary motors. The multiple conveying wheels are arranged at intervals on the base along the X-axis direction, and each conveying wheel is connected to a first rotary motor. The first rotary motor is used to drive the conveying wheel to rotate.

[0034] The receiving track includes multiple receiving wheels and multiple second rotary motors. The multiple receiving wheels are arranged at intervals on the base along the X-axis direction, and each receiving wheel is connected to a second rotary motor, which is used to drive the receiving wheel to rotate.

[0035] The conveying wheel and the receiving wheel are spaced apart along the positive direction of the Y-axis, and both the conveying wheel and the receiving wheel have recesses on their circumferential surfaces for mating with the roller guide rail.

[0036] The clamping frame is also provided with multiple first pulleys, which are evenly distributed on both sides of the top surface of the clamping frame along the Y-axis. The first pulleys are used to contact the substrate holder; the fixing block is also provided with multiple second pulleys.

[0037] One of the above-described technical solutions of the present invention has at least one of the following advantages or beneficial effects:

[0038] In this invention, the worker first places the substrate holder on a horizontal flipping platform and fixes it with a fixing mechanism. Then, the first driving mechanism drives the flipping platform to flip, so that the flipping platform switches from a horizontal state to a vertical state, thereby placing the substrate holder vertically on the conveying track. Then, the conveying track, in conjunction with a magnetic suction mechanism, can transport the substrate holder vertically into the feeding chamber of the external device. In this way, work efficiency is improved and the risk of substrate damage and safety hazards are effectively avoided. Attached Figure Description

[0039] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0040] Figure 1 This is a perspective view of the flipping device according to the first embodiment of the present invention;

[0041] Figure 2 This is a perspective view of the magnetic attraction mechanism of the flipping device according to the first embodiment of the present invention;

[0042] Figure 3 yes Figure 1 Enlarged diagram of A in the middle;

[0043] Figure 4 yes Figure 1 Enlarged diagram of B in the middle;

[0044] Figure 5 yes Figure 1 Enlarged diagram of C in the middle;

[0045] Figure 6 This is one of the perspective views of the clamping frame of the flipping device according to the first embodiment of the present invention;

[0046] Figure 7 This is a second perspective view of the clamping frame of the flipping device according to the first embodiment of the present invention;

[0047] Figure 8 This is one of the perspective views of the substrate holder of the flipping device according to the first embodiment of the present invention;

[0048] Figure 9 This is a second perspective view of the substrate holder of the flipping device according to the first embodiment of the present invention;

[0049] Figure 10 yes Figure 9 Enlarged diagram of D in the middle;

[0050] The figure labels for each figure are as follows:

[0051] 1. Base; 11. Conveying rail; 111. Conveying wheel; 112. First rotary motor; 12. Receiving rail; 121. Receiving wheel; 122. Second rotary motor; 13. First drive mechanism; 2. Tilting platform; 21. Fixing plate; 22. Second drive mechanism; 23. Support rod; 24. Plate body; 241. First connecting block; 242. Second connecting block; 3. Magnetic attraction mechanism; 31. Connecting frame; 32. Tilting frame; 33. First cylinder; 34. First magnetic block; 35. Second magnetic block; 4. Fixing mechanism; 41. Fixing assembly; 411. Second cylinder; 412. L-shaped plate; 413. Third cylinder; 41 4. Fixing block; 415. Fitting surface; 416. Connecting piece; 417. Second pulley; 5. Clamping frame; 51. Fixing bracket; 52. Electric push rod; 53. Universal ball; 54. Rotary cylinder; 55. Unlocking mechanism; 551. Connecting plate; 552. Fourth cylinder; 56. First pulley; 6. Substrate frame; 61. Frame body; 611. Receiving groove; 612. Clearance through hole; 62. Locking mechanism; 621. Rotating shaft; 622. Locking ear; 623. Pressure column; 624. Elastic element; 63. Fixing frame; 64. Magnetic guide rail; 65. Roller guide rail; 7. Swing frame; 71. Roller; 8. Fifth cylinder; 9. Recess. Detailed Implementation

[0052] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0053] The following disclosure provides many different implementations or examples for different ways of implementing the present invention.

[0054] Reference Figures 1 to 10 As shown, a flipping device includes a base 1, a flipping platform 2, a conveying track 11, a first driving mechanism 13, a fixing mechanism 4, and a magnetic attraction mechanism 3. The flipping platform 2 is rotatably connected to the base 1, and the conveying track 11 is fixedly connected to the base 1 and is located below the flipping platform 2.

[0055] The first drive mechanism 13 connects the base 1 and the flipping platform 2. The first drive mechanism 13 is used to drive the flipping platform 2 to switch between a horizontal state and a vertical state. The fixing mechanism 4 and the magnetic attraction mechanism 3 are connected to the flipping platform 2. The fixing mechanism 4 is used to detachably connect with the substrate holder 6. When the flipping platform 2 is in a horizontal state to horizontally load the substrate holder 6, the fixing mechanism 4 is connected to the substrate holder 6. When the flipping platform 2 is in a vertical state, the flipping platform 2 is used to vertically place the substrate holder 6 on the conveying track 11. At the same time, the fixing mechanism 4 is separated from the substrate holder 6, and the magnetic attraction mechanism 3 attracts the top of the substrate holder 6 so that the substrate holder 6 remains upright.

[0056] It should be noted here that the conveyor track 11 is connected to the conveyor guide rail inside the feed chamber of the external device.

[0057] In this design, the flipping platform 2 is initially horizontal. The worker first places the substrate holder 6 containing the substrate horizontally on the flipping platform 2, and then fixes the substrate holder 6 using the fixing mechanism 4. Next, the first drive mechanism 13 is activated to drive the flipping platform 2 to flip, changing the flipping platform 2 from a horizontal to a vertical state. When the flipping platform 2 becomes vertical, the substrate holder 6 is placed on the conveyor rail 11. Then, the fixing mechanism 4 separates from the substrate holder 6. At the same time, the magnetic attraction mechanism 3 attracts the top of the substrate holder 6 to keep the substrate holder 6 upright. Then, the substrate holder 6 is conveyed through the conveyor rail 11 to the conveyor guide rail in the external feeding chamber. After the loading is completed, the first drive mechanism 13 drives the flipping platform 2 to reset. In this way, the substrate holder 6 is flipped and placed vertically on the conveyor rail 11, which improves work efficiency and reduces the risk of substrate damage.

[0058] In this embodiment, the flipping device further includes X-axis direction, Y-axis direction and Z-axis direction;

[0059] The magnetic attraction mechanism 3 includes a connecting frame 31, a flipping frame 32, and a first cylinder 33; the connecting frame 31 is located on one side of the flipping platform 2, the flipping frame 32 is rotatably connected to the connecting frame 31, one end of the first cylinder 33 is hinged to the connecting frame 31, and the output end of the first cylinder 33 is hinged to the flipping frame 32.

[0060] The flipping frame 32 is provided with a first magnetic block 34 on the side near the flipping platform 2. The length direction of the first magnetic block 34 extends along the X-axis. The first magnetic block 34 is used to attract the top of the substrate holder 6 placed on the conveying track 11 so as to keep it upright.

[0061] Specifically, during the flipping process of the flipping platform 2, the substrate holder 6 and the connecting frame 31 will be flipped. The substrate holder 6 will be affected by gravity and centrifugal force. In this way, the flipping frame 32 can be driven by the first cylinder 33 to flip, so as to adjust the position of the first magnetic block 34 and thus ensure that the substrate holder 6 remains upright.

[0062] The first drive mechanism 13 can be a cylinder. One end of the cylinder is hinged to the base 1, and the power output end of the cylinder is hinged to the tilting platform 2, thereby realizing the tilting of the tilting platform 2.

[0063] The flipping platform 2 has a frame structure, and the substrate holder 6 has a rectangular structure; the fixing mechanism 4 includes multiple fixing components 41 connected to the flipping platform 2, and the fixing components 41 correspond one-to-one with the corners of the substrate holder 6;

[0064] The fixing component 41 includes a second cylinder 411, an L-shaped plate 412, a third cylinder 413, and a fixing block 414. The second cylinder 411 is connected to the corner of the outer side of the flipping platform 2 by a connector 416.

[0065] The horizontal part of the L-shaped plate 412 is connected to the telescopic end of the second cylinder 411; when the flipping platform 2 is in a horizontal state, the second cylinder 411 drives the L-shaped plate 412 to move in the positive direction of the Z-axis; when the flipping platform 2 is in a vertical state, the second cylinder 411 drives the L-shaped plate 412 to move in the positive direction of the Y-axis.

[0066] The third cylinder 413 is connected to the vertical part of the L-shaped plate 412. The fixing block 414 is connected to the telescopic end of the third cylinder 413. The fixing block 414 has a mating surface 415 for mating with the corner of the substrate holder 6. The third cylinder 413 is used to drive the fixing block 414 to move towards the substrate holder 6 so that the mating surface 415 mats with the corner of the substrate holder 6.

[0067] Specifically, when fixing the substrate holder 6, the flipping platform 2 is in a horizontal state. The second cylinder 411 first drives the L-shaped plate 412 to move in the positive direction of the Z-axis. Then, the third cylinder 413 drives the fixing block 414 to move towards the substrate holder 6, so that the contact surface 415 of the fixing block 414 is pressed against the corner of the substrate holder 6. In this way, each corner of the substrate holder 6 will be pressed against a fixing block 414, thereby clamping and fixing the substrate holder 6. After the flipping platform 2 is flipped to a vertical state, the third cylinder 413 first drives the contact surface 415 of the fixing block 414 to separate from the corner of the substrate holder 6. Then, the second cylinder 411 drives the L-shaped plate 412 to move and reset in the positive direction of the Y-axis. Then, the substrate holder 6 can be transported by the conveying track 11.

[0068] In this embodiment, the flipping device also includes a fixing plate 21, a clamping frame 5, a support rod 23, and a receiving rail 12;

[0069] There are multiple fixing plates 21, which are evenly distributed on the two outer sides of the flipping platform 2 along the X-axis direction.

[0070] The clamping frame 5 is located above the flipping platform 2. Each fixed plate 21 is provided with a second drive mechanism 22. The clamping frame 5 is connected to the second drive mechanism 22. The second drive mechanism 22 is used to drive the clamping frame 5 to move closer to or further away from the flipping platform 2.

[0071] There are multiple support rods 23, which are set on the top surface of the flipping platform 2. The support rods 23 are used to support the substrate holder 6.

[0072] The receiving track 12 is connected to the base 1, and the receiving track 12 and the conveying track 11 are arranged at intervals along the Y-axis. The conveying direction of the receiving track 12 is opposite to that of the conveying track 11. The receiving track 12 is used to receive the substrate frame 6 output from the external inlet and outlet chamber.

[0073] The flipping frame 32 is provided with a second magnetic block 35 on one side of the first magnetic block 34. When the flipping platform 2 is in a vertical state, the first magnetic block 34 is located above the conveying track 11, and the second magnetic block 35 is located above the receiving track 12. The length direction of the second magnetic block 35 extends along the length direction of the first magnetic block 34. The second magnetic block 35 is used to attract the top of the substrate holder 6 on the receiving track 12 so as to keep it in an upright state.

[0074] Four fixing components 41 are respectively located at the four corners of the clamping frame 5.

[0075] An inlet and outlet are provided on the same side of the inlet and outlet chamber of the peripheral device. The conveying track 11 and the receiving track 12 are respectively connected to the conveying track and the output track in the inlet and outlet chamber of the peripheral device. The conveying track is responsible for conveying the substrate holder 6 so that the substrate holder 6 enters the coating chamber for coating, while the output track outputs the substrate holder 6 after coating.

[0076] The second drive mechanism 22 can be an electric cylinder or an electric push rod 52.

[0077] Specifically, the frame body 61 is first placed on the clamping frame 5. Since part of the frame body 61 is located above the hollow part of the clamping frame 5, it is first supported by the support rod 23. Then, the substrate frame 6 is fixed by the fixing mechanism 4. Next, the second drive mechanism 22 drives the clamping frame 5 to move away from the flipping platform 2. Then, the first drive mechanism 13 drives the flipping platform 2 to flip. After the substrate frame 6 is placed vertically on the conveying track 11, the flipping platform 2 is also in a vertical state. The third cylinder 413 drives the fixing block 414 to separate from the corner of the substrate frame 6. The second cylinder 411 drives the L-shaped plate 412 to move in the positive direction of the Y-axis to avoid interference with the conveying. After the substrate frame 6 is conveyed to the inlet / outlet cavity of the external device by the conveying track 11, the second drive mechanism 22 drives the clamping frame 5 to move closer to the flipping platform 2 to wait for the inlet / outlet cavity of the external device to transmit the substrate frame 6.

[0078] The substrate holder 6, which is fed from the external feed chamber, is received by the receiving rail 12 and attracted to the top of the substrate holder 6 on the receiving rail 12 by the second magnetic block 35, thus keeping the substrate holder 6 upright on the receiving rail 12. Then, the second cylinder 411 drives the L-shaped plate 412 to move in the negative direction of the Y-axis. Then, the third cylinder 413 drives the fixing block 414 to move closer to the corner of the substrate holder 6, so that the mating surface 415 of the fixing block 414 is in close contact with the corner of the substrate holder 6. Then, the first drive mechanism 13 drives the flipping platform 2 to switch from the vertical state to the horizontal state. Then, the second drive mechanism 22 drives the clamping frame 5 to move away from the flipping platform 2. Then, the third cylinder 413 drives the fixing block 414 to reset, and the second cylinder 411 drives the L-shaped plate 412 to reset, so as to remove the substrate.

[0079] Preferably, the substrate holder 6 includes a holder body 61, a locking mechanism 62, and a fixing frame 63. One side of the holder body 61 has a receiving groove 611 for receiving a substrate. The bottom surface of the receiving groove 611 has a clearance through hole 612 for avoiding the substrate's coating surface. The locking mechanism 62 is connected to the holder body 61, and multiple locking mechanisms 62 are provided on the outer periphery of the receiving groove 611. The fixing frame 63 is placed in the receiving groove 611, and the locking mechanism 62 is used to abut against the fixing frame 63 so that the fixing frame 63 locks the edge of the substrate to the bottom surface of the receiving groove 611.

[0080] The substrate holder 6 has a magnetic guide rail 64 at the top and a roller 71 guide rail 65 at the bottom.

[0081] The overturning device also includes a rotary cylinder 54 and an unlocking mechanism 55;

[0082] There are multiple rotary cylinders 54, which are distributed on the two inner sides of the clamping frame 5 along the Y-axis. The output end of the rotary cylinder 54 is provided with a swing arm. The rotary cylinder 54 is used to drive the swing arm to swing to clamp the frame body 61.

[0083] The unlocking mechanism 55 corresponds one-to-one with the locking mechanism 62. The unlocking mechanism 55 is used to unlock the locking mechanism 62 so that the substrate holder 6 can be detached from the fixed frame 63.

[0084] The locking assembly includes a rotating shaft 621, a locking lug 622, a pressure post 623, and an elastic element 624. The rotating shaft 621 is fixedly connected to the frame body 61. The middle part of the locking lug 622 is rotatably connected to the rotating shaft 621. One end of the locking lug 622 is fixedly connected to the pressure post 623, and the opposite end is connected to the elastic element 624. The elastic element 624 is used to apply force to the locking lug 622 so that the pressure post 623 presses against the fixed frame 63.

[0085] The unlocking mechanism 55 includes a connecting plate 551 and a fourth cylinder 552. The mounting plate is connected to the inner side of the clamping frame 5, and the fourth cylinder 552 is connected to the connecting plate 551. The output end of the fourth cylinder 552 is used to apply force to the other end of the locking ear 622 to make the locking ear 622 rotate, thereby allowing the substrate to be released from the fixed frame 63.

[0086] The flipping device also includes a plate 24, a swing frame 7, and a fifth cylinder 8;

[0087] The plate 24 has an inverted L-shaped structure. The bottom surface of the horizontal part of the plate 24 is connected to the output end of the second drive mechanism 22. The top surface of the horizontal part of the plate 24 is provided with a first connecting block 241, which is connected to the outside of the clamping frame 5.

[0088] The vertical part of the L-shaped block is provided with a second connecting block 242. The swing frame 7 is rotatably connected to the second connecting block 242. One end of the fifth cylinder 8 is hinged to the second connecting block 242, and the output end of the fourth cylinder 552 is hinged to the swing frame 7.

[0089] The swing frame 7 is equipped with rollers 71, and the fifth cylinder 8 is used to drive the swing frame 7 to swing so that the rollers 71 contact the roller guide rail 65 of the substrate frame 6.

[0090] Specifically, the substrate holder 6 of this application is used to load the substrate. The operator first places the substrate into the receiving groove 611, and then places the fixing frame 63 into the receiving groove 611. The fixing frame 63 contacts the edge of the substrate. Then, the locking mechanism 62 abuts against the fixing frame 63. The multiple locking mechanisms 62 lock the edge of the substrate to the bottom surface of the receiving groove 611. Based on this, the substrate holder 6 can stably fix the substrate. After the substrate is loaded, the substrate holder 6 carries the substrate to the coating equipment to complete the coating process.

[0091] In one implementation of this application, the receiving groove 611 and the clearance through hole 612 are both rectangular, and the fixing frame 63 is also rectangular. Therefore, the substrate fixed by the substrate holder 6 is also rectangular.

[0092] After the substrate is mounted on the substrate holder 6, the locking assembly remains pressed against the fixing frame 63, ensuring the stability of the substrate fixation. Specifically, the two opposite ends of the locking lug 622 are the first end and the second end, respectively. The pressure post 623 is fixedly connected to the first end, and the elastic element 624 is connected to the second end. In practical applications, when loading the substrate and fixing frame 63, the fourth cylinder 552 applies force to the second end to compress the elastic element 624, thereby causing the locking lug 622 to rotate around the shaft 621. The first end rotates and swings away from the bottom surface of the receiving groove 611 to prevent the locking ear 622 from blocking the assembly of the substrate and the fixing frame 63. After the two are assembled, the tooling equipment releases the second end. At this time, the elastic element 624 recovers its elasticity, the locking ear 622 is reset, and the pressure column 623 presses against the first frame body. Similarly, after the substrate is coated, in the subsequent process, the fourth cylinder 552 applies force to the second end to prevent the locking ear 622 from blocking the substrate from being removed from the substrate holder 6.

[0093] When the substrate holder 6 is transported inside the coating equipment, the magnetic guide rail 64 is magnetically engaged with the magnetic rail, and the roller guide rail 65 is in contact with the guide rail.

[0094] Generally, by setting up a rotary cylinder 54 and an unlocking mechanism 55, workers can easily install the substrate into or remove it from the fixed frame 63. The elastic element 624 is a torsion spring, which is at least partially sleeved on the rotating shaft 621, and the torsion arm of the torsion spring is connected to the second end.

[0095] Before mounting the substrate, the flipping platform 2 is in a horizontal state. The swing arm is driven by the rotary cylinder 54 to clamp the main body of the fixing frame 51. At the same time, the second cylinder 411 drives the L-shaped plate 412 to move in the positive direction of the Z axis to approach the substrate frame 6. Then, the fixing block 414 is driven by the third cylinder 413 to move towards the corner of the substrate frame 6, so that the contact surface 415 of the fixing block 414 is in close contact with the corner of the substrate frame 6. At the same time, the fifth cylinder 8 drives the swing frame 7 to swing, so that the circumferential surface of the roller 71 contacts the roller guide rail 65 of the substrate frame 6. The substrate frame 6 is fixed in this way.

[0096] The two opposite ends of the locking ear 622 are the first end and the second end, respectively. Then the output end of the fourth cylinder 552 extends and applies force to the second end of the locking ear 622 to compress the elastic element 624 and rotate the locking ear 622. In this way, the substrate can be placed on the substrate holder 6 by the external robotic arm and then assembled with the substrate holder 6.

[0097] After the substrate installation is completed, the fourth cylinder 552 resets and the rotary cylinder 54 drives the swing arm to reset. The fixing block 414 is close to the corner of the substrate holder 6. Then, the second drive mechanism 22 drives the clamping frame 5 to move away from the flipping platform 2, that is, lifts the clamping frame 5. Then, the flipping platform 2 flips and places the substrate holder 6 vertically on the conveying track 11. The fixing block 414 of the fixing component 41 separates from the corner of the substrate holder 6, and the roller 71 separates from the roller guide rail 65. Then, the substrate holder 6 is conveyed through the conveying track 11.

[0098] After the substrate holder 6 is sent out on the conveying track 11, it moves a distance towards the clamping frame 5 and closer to the flipping platform 2 by the second drive mechanism 22 to wait for the substrate holder 6 to be output from the feed chamber of the external device. After the substrate holder 6 is received by the receiving track 12, the fixing block 414 of the fixing component 41 fits with the four corners of the substrate holder 6, the roller 71 abuts against the roller guide rail 65, and then the flipping platform 2 flips from the vertical state to the horizontal state. Then the rotary cylinder 54 drives the swing arm to swing to fix the substrate holder 6. Then the unlocking mechanism 55 unlocks the locking mechanism 62. That is, the extension end of the fourth cylinder 552 applies force to the second end of the locking ear 622, thereby loosening the fixation of the substrate. After that, the substrate can be taken out from the substrate holder 6 by the robot arm of the external device.

[0099] Preferably, the bottom of the clamping frame 5 is also provided with a fixing frame 51. The fixing frame 51 is provided with multiple electric push rods 52 on the side facing the clamping frame 5. The output end of the electric push rod 52 is connected to a universal ball 53. The electric push rod 52 is used to drive the universal ball 53 to move towards the clamping frame 5 so that the universal ball 53 passes through the hollow part of the flipping platform 2 and abuts against the substrate of the substrate holder 6.

[0100] Generally, before the first drive mechanism 13 drives the flipping platform 2 to flip, the electric push rod 52 will drive the universal ball 53 to abut against the bottom surface of the substrate holder 6. During the flipping process, the universal ball 53 will also continue to abut against the substrate. In this way, during the flipping process of the substrate holder 6, the universal ball 53 provides support for the substrate, disperses stress and reduces damage to the substrate.

[0101] Implicitly, a photoelectric sensor can be mounted on the electric actuator 52 to detect the substrate.

[0102] Preferably, the conveying track 11 includes a plurality of conveying wheels 111 and a plurality of first rotary motors 112. The plurality of conveying wheels 111 are arranged at intervals on the base 1 along the X-axis direction. Each conveying wheel 111 is connected to a first rotary motor 112, and the first rotary motor 112 is used to drive the conveying wheel 111 to rotate.

[0103] The receiving track 12 includes multiple receiving wheels 121 and multiple second rotary motors 122. The multiple receiving wheels 121 are arranged at intervals along the X-axis on the base 1. Each receiving wheel 121 is connected to a second rotary motor 122, which is used to drive the receiving wheel 121 to rotate.

[0104] The conveying wheel 111 and the receiving wheel 121 are spaced apart along the positive direction of the Y-axis, and both the conveying wheel 111 and the receiving wheel 121 have a recess 9 on their circumferential surface for cooperating with the roller guide rail 65.

[0105] The clamping frame 5 is also provided with a plurality of first pulleys 56, which are evenly distributed on both sides of the top surface of the clamping frame 5 along the Y-axis direction. The first pulleys 56 are used to contact the substrate holder 6. The fixing block 414 is also provided with a plurality of second pulleys 417.

[0106] Furthermore, the first rotary motor 112 drives the conveyor wheel 111 to rotate, and the second rotary motor 122 drives the receiving wheel 121 to rotate. The recesses 9 of the conveyor wheel 111 and the receiving wheel 121 are used to limit the substrate holder 6. When the substrate holder 6 is placed, the pulley can be used to position the substrate holder 6. When the fixing block 414 is near the corner of the substrate holder 6, it can be used to correct the position of the substrate holder 6 by cooperating with the second pulley 417.

Claims

1. A flipping device, characterized in that, It includes a base, a tilting platform, a conveying track, a first driving mechanism, a fixing mechanism, and a magnetic attraction mechanism. The tilting platform is rotatably connected to the base, and the conveying track is fixedly connected to the base and located below the tilting platform. The first driving mechanism connects the base and the flipping platform. The first driving mechanism is used to drive the flipping platform to switch between a horizontal state and a vertical state. The fixing mechanism and the magnetic attraction mechanism are connected to the flipping platform. The fixing mechanism is used to detachably connect to the substrate holder. When the flipping platform is in the horizontal state to horizontally load the substrate holder, the fixing mechanism is connected to the substrate holder. When the flipping platform is in the vertical state, the flipping platform is used to vertically place the substrate holder on the conveying track. At the same time, the fixing mechanism is separated from the substrate holder, and the magnetic attraction mechanism attracts the top of the substrate holder to keep the substrate holder upright.

2. The flipping device according to claim 1, characterized in that, The flipping device also includes X-axis, Y-axis and Z-axis directions; The magnetic attraction mechanism includes a connecting frame, a flipping frame, and a first cylinder; the connecting frame is disposed on one side of the flipping platform, the flipping frame is rotatably connected inside the connecting frame, one end of the first cylinder is hinged to the connecting frame, and the output end of the first cylinder is hinged to the flipping frame. The flipping frame is provided with a first magnetic block on the side near the flipping platform. The length direction of the first magnetic block extends along the X-axis. The first magnetic block is used to attract the top of the substrate holder placed on the transport track so as to keep it in an upright state.

3. The flipping device according to claim 2, characterized in that, The flipping platform has a frame structure, and the substrate holder has a rectangular structure; the fixing mechanism includes multiple fixing components connected to the flipping platform, and each fixing component corresponds to a corner of the substrate holder. The fixing assembly includes a second cylinder, an L-shaped plate, a third cylinder, and a fixing block. The second cylinder is connected to the corner of the outside of the flipping platform via a connector. The horizontal portion of the L-shaped plate is connected to the telescopic end of the second cylinder; when the flipping platform is in a horizontal state, the second cylinder drives the L-shaped plate to move along the positive direction of the Z-axis; when the flipping platform is in a vertical state, the second cylinder drives the L-shaped plate to move along the positive direction of the Y-axis. The third cylinder is connected to the vertical part of the L-shaped plate, and the fixing block is connected to the telescopic end of the third cylinder. The fixing block has a mating surface for mating with the corner of the substrate frame. The third cylinder is used to drive the fixing block to move towards the substrate frame so that the mating surface mats with the corner of the substrate frame.

4. The flipping device according to claim 3, characterized in that, The flipping device also includes a fixing plate, a clamping frame, a support rod, and a receiving rail; There are multiple fixing plates, and the multiple fixing plates are evenly distributed on both outer sides of the flipping platform along the X-axis direction; The clamping frame is located above the flipping platform. Each of the fixed plates is provided with a second driving mechanism. The clamping frame is connected to the second driving mechanism. The second driving mechanism is used to drive the clamping frame to move closer to or further away from the flipping platform. The support rods are multiple in number and are disposed on the top surface of the flipping platform. The support rods are used to support the substrate holder. The receiving track is connected to the base, and the receiving track and the conveying track are arranged at intervals along the Y-axis direction. The conveying direction of the receiving track is opposite to that of the conveying track. The receiving track is used to receive the substrate frame output from the external inlet / outlet chamber. The flipping frame is provided with a second magnetic block on one side of the first magnetic block. When the flipping platform is in a vertical state, the first magnetic block is located above the conveying track, and the second magnetic block is located above the receiving track. The length direction of the second magnetic block extends along the length direction of the first magnetic block. The second magnetic block is used to attract the top of the substrate holder on the receiving track so as to keep it in an upright state. The four fixing components are respectively located at the four corners of the clamping frame.

5. The flipping device according to claim 2, characterized in that, The substrate holder includes a holder body, a locking mechanism, and a fixing frame. One side of the holder body has a receiving groove for receiving a substrate. The bottom surface of the receiving groove has a clearance through hole for avoiding the coating surface of the substrate. The locking mechanism is connected to the holder body, and multiple locking mechanisms are provided on the outer periphery of the receiving groove. The fixing frame is placed in the receiving groove, and the locking mechanism is used to abut against the fixing frame so that the fixing frame locks the edge of the substrate to the bottom surface of the receiving groove. The top of the substrate holder is provided with a magnetic guide rail, and the bottom of the substrate holder is provided with a roller guide rail; The flipping device also includes a rotary cylinder and an unlocking mechanism; The rotary cylinders are multiple, and the multiple rotary cylinders are respectively arranged on the two inner sides of the clamping frame along the Y-axis direction. The output end of the rotary cylinder is provided with a swing arm, and the rotary cylinder is used to drive the swing arm to swing to clamp the frame body. The unlocking mechanism corresponds one-to-one with the locking mechanism. The unlocking mechanism is used to unlock the locking mechanism so that the substrate holder can be detached from the fixed frame.

6. The flipping device according to claim 5, characterized in that, The locking assembly includes a rotating shaft, a locking lug, a pressure post, and an elastic element. The rotating shaft is fixedly connected to the frame body. The middle part of the locking lug is rotatably connected to the rotating shaft. One end of the locking lug is fixedly connected to the pressure post, and the opposite end is connected to the elastic element. The elastic element is used to apply force to the locking lug so that the pressure post presses against the fixed frame.

7. The flipping device according to claim 6, characterized in that, The unlocking mechanism includes a connecting plate and a fourth cylinder. The mounting plate is connected to the inner side of the clamping frame, and the fourth cylinder is connected to the connecting plate. The output end of the fourth cylinder is used to apply force to the other end of the locking lug to rotate the locking lug, thereby allowing the substrate to detach from the fixed frame.

8. The flipping device according to claim 5, characterized in that, The flipping device also includes a plate, a swing frame, and a fifth cylinder; The plate has an inverted L-shaped structure. The bottom surface of the horizontal part of the plate is connected to the output end of the second drive mechanism. The top surface of the horizontal part of the plate is provided with a first connecting block, which is connected to the outside of the clamping frame. The vertical part of the L-shaped block is provided with a second connecting block, the swing frame is rotatably connected to the second connecting block, one end of the fifth cylinder is hinged to the second connecting block, and the output end of the fourth cylinder is hinged to the swing frame. The swing frame is equipped with rollers, and the fifth cylinder is used to drive the swing frame to swing so that the rollers contact the roller guide rail of the substrate frame.

9. The flipping device according to claim 4, characterized in that, The bottom of the clamping frame is also provided with a fixing frame, and the fixing frame is provided with multiple electric push rods on one side facing the clamping frame. The output end of the electric push rod is connected to a universal ball. The electric push rod is used to drive the universal ball to move towards the clamping frame so that the universal ball passes through the hollow part of the flipping platform and abuts against the substrate of the substrate holder.

10. The flipping device according to claim 4, characterized in that, The conveying track includes multiple conveying wheels and multiple first rotary motors. The multiple conveying wheels are arranged at intervals on the base along the X-axis direction. Each of the conveying wheels is connected to a first rotary motor, and the first rotary motor is used to drive the conveying wheel to rotate. The receiving track includes multiple receiving wheels and multiple second rotary motors. The multiple receiving wheels are arranged at intervals on the base along the X-axis direction. Each receiving wheel is connected to a second rotary motor, which is used to drive the receiving wheel to rotate. The conveying wheel and the receiving wheel are spaced apart along the positive direction of the Y-axis, and both the conveying wheel and the receiving wheel have recesses on their circumferential surfaces for cooperating with the roller guide rail. The clamping frame is also provided with a plurality of first pulleys, which are evenly distributed on both sides of the top surface of the clamping frame along the Y-axis direction. The first pulleys are used to contact the substrate holder. The fixing block is also provided with a plurality of second pulleys.

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