Air intake structure and coating equipment

Abstract

This application relates to the field of coating technology and provides an air intake structure and coating equipment. The air intake structure is used to supply gas to the interior of a furnace tube. The air intake structure includes an air intake section, an air outlet section, and a gas delivery section. The air outlet section is used to inject gas into the interior of the furnace tube. The gas delivery section connects the air intake section and the air outlet section, forming a T-shape, and the air intake section and the air outlet section are located on the same side of the gas delivery section. The gas delivery section includes a preheating section disposed inside the furnace tube, which is used to preheat the gas flowing through the preheating section using the heat from the furnace tube.

Description

Technical Field

[0001] This application relates to the field of coating technology, and more specifically, to an air intake structure and coating equipment. Background Technology

[0002] Plasma-enhanced chemical vapor deposition (PECVD) is the main technology for thin film deposition in solar cells. However, existing coating equipment (including but not limited to PECVD equipment) produces solar cells with significantly different performance (such as conversion efficiency) when the film is deposited at different locations in the furnace tube (such as the furnace opening, furnace middle, and furnace tail). Utility Model Content

[0003] Therefore, it is necessary to provide an air intake structure and coating equipment to solve the technical problem that existing coating equipment results in large differences in the performance (such as conversion efficiency) of solar cells when coating is performed at different locations on the furnace tube.

[0004] The first aspect of this application provides an air inlet structure for supplying gas to the interior of a furnace tube. The air inlet structure includes:

[0005] Air intake section;

[0006] The gas outlet is used to inject gas into the interior of the furnace tube; and

[0007] The air supply section connects the air inlet section and the air outlet section. The air outlet section and the air supply section are connected in a T-shape, and the air inlet section and the air outlet section are located on the same side of the air supply section.

[0008] The gas conveying section includes a preheating section located inside the furnace tube. The preheating section is used to preheat the gas flowing through the preheating section using the heat from the furnace tube.

[0009] The gas inlet structure of this application embodiment includes a preheating section located inside the furnace tube. This allows the gas inside the furnace tube to be preheated by the heat inside the furnace tube before entering the main reaction zone. This ensures that the gas temperature entering the reaction zone is closer to the process temperature inside the furnace tube, thereby helping to reduce localized temperature drops and temperature gradients caused by cold gas directly entering the hot reaction zone. This improves the temperature uniformity of the gas at different locations within the furnace tube (near the gas inlet, inside the furnace tube, and at the tail end of the furnace tube). When the gas inlet structure is used in a coating equipment for the fabrication of solar cells, this structure promotes stable and consistent chemical reaction rates, thereby improving the uniformity and quality of thin film deposition and ultimately enhancing the performance consistency of solar cells deposited at different locations (e.g., reducing differences in conversion efficiency).

[0010] In some embodiments, the gas delivery section includes a first pipe section, a second pipe section, and a bend section. The first pipe section is connected to the gas inlet section; the second pipe section is connected to the gas outlet section; the bend section is connected between the first pipe section and the second pipe section; the preheating section includes at least a portion of the first pipe section and at least a portion of the bend section and the second pipe section.

[0011] In some embodiments, the first tube, the bend, and the second tube are connected in sequence to form a U-shaped structure.

[0012] In some embodiments, the middle portion of the air outlet is connected to the second pipe portion, and the air outlet has at least one air outlet facing the bend.

[0013] In some embodiments, the air inlet includes a connecting part and a mounting part. The connecting part is connected to one end of the first pipe and is used to connect to an external air source; the mounting part is connected to the connecting part and is used to install the air inlet structure to the furnace port flange of the furnace tube.

[0014] In some embodiments, the connection includes a first connecting section and a second connecting section. The first connecting section is connected to one end of the first pipe and is inclined toward the gas outlet; the second connecting section is connected to the end of the first connecting section away from the first pipe and is used to pass through the furnace flange and connect to an external gas source.

[0015] In some embodiments, the mounting portion includes a lug protruding from the second connecting section, the lug having a mounting hole for connecting a furnace flange.

[0016] A second aspect of this application provides a coating apparatus, the coating apparatus comprising:

[0017] Furnace tube, with furnace opening; and

[0018] According to the air intake structure of the first aspect of this application, it is installed on the furnace tube;

[0019] The gas inlet is located at the furnace opening and connected to the furnace tube, the preheating section of the gas delivery section is located inside the furnace tube, and the gas outlet is located near the furnace opening.

[0020] In some embodiments, the gas outlet is symmetrically arranged about the axis of the furnace tube.

[0021] In some embodiments, the furnace tube has a furnace opening flange, and the coating equipment also includes an air inlet pipe, with the air inlet section connected to the air inlet pipe. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of a coating apparatus according to an embodiment of this application.

[0023] Figure 2 for Figure 1 Another structural diagram of the coating equipment.

[0024] Figures 3 to 11 They are respectively Figure 1 Schematic diagrams of the air intake structure of the coating equipment from different perspectives.

[0025] Explanation of key component symbols:

[0026] Coating equipment - 100; Furnace tube - 10; Furnace opening flange - 11; Furnace tail flange - 12; Air inlet structure - 20; Air inlet section - 21; Connecting section - 211; First connecting section - 211a; Second connecting section - 211b; Mounting section - 212; Mounting hole - 212h; Air outlet section - 22; First air outlet section - 221; Second air outlet section - 222; Air outlet hole - 22h; Air conveying section - 23; First pipe section - 231; Second pipe section - 232; Bending section - 233; Air inlet pipe - 30; Sheet - P; First direction - D1; Second direction - D2; Third direction - D3.

[0027] The following detailed description, in conjunction with the accompanying drawings, further illustrates this application. Detailed Implementation

[0028] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the embodiments of this application, and should not be construed as limiting this application.

[0029] Figure 1 This is a schematic diagram of the structure of a coating apparatus 100 according to an embodiment of this application. Figure 1 As shown, the coating equipment 100 includes a furnace tube 10 and an air inlet structure 20. The air inlet structure 20 is mounted on the furnace tube 10. The air inlet structure 20 is used to supply gas into the interior of the furnace tube 10.

[0030] The air intake structure 20 includes an air intake section 21, an air outlet section 22, and a gas delivery section 23. The gas delivery section 23 connects the air intake section 21 and the air outlet section 22. The air intake section 21 and the air outlet section 22 are located on the same side of the gas delivery section 23. The furnace tube 10 has a furnace opening. The air intake section 21 is located at the furnace opening and is connected to the furnace tube 10. The air outlet section 22 is located adjacent to the furnace opening and is used to inject gas into the interior of the furnace tube 10.

[0031] In some embodiments, the furnace tube 10 includes a body (not shown), a furnace opening flange 11, and a furnace tail flange 12. The body has an opposing furnace opening and a furnace tail. The furnace opening flange 11 is located at the furnace opening, and the furnace tail flange 12 is located at the furnace tail.

[0032] In some embodiments, the body is in the form of a cylindrical tube, and the interior of the body is used to accommodate the sheet P (such as a silicon wafer) to be coated, but it is not limited thereto.

[0033] Figure 2 for Figure 1 Another structural diagram of the coating equipment. (See diagram below.) Figure 2 As shown, a portion of the gas delivery section 23 extends into the interior of the furnace tube 10, such that the gas delivery section 23 includes a preheating section disposed inside the furnace tube 10. This preheating section is used to preheat the gas flowing through the preheating section using the heat from the furnace tube 10.

[0034] The air intake structure 20 of this application embodiment includes a preheating section located inside the furnace tube 10. This allows the gas inside the gas delivery section 23 to be preheated by the heat inside the furnace tube 10 before it enters the main reaction zone of the furnace tube 10 through the air intake structure 20. This makes the temperature of the gas entering the reaction zone closer to the process temperature inside the furnace tube 10, thereby helping to reduce the local temperature drop and temperature gradient caused by cold gas directly entering the hot reaction zone. This improves the temperature uniformity of the gas at different locations in the furnace tube 10 (the position near the air inlet, inside the furnace tube 10, and at the tail of the furnace tube 10).

[0035] When the air intake structure 20 is used in the coating equipment 100 to prepare solar cells, the setting of the air intake structure 20 is conducive to the stability and consistency of the chemical reaction rate, thereby improving the uniformity and quality of thin film deposition, and ultimately improving the performance consistency of solar cells deposited at different locations (such as reducing the difference in conversion efficiency).

[0036] In some embodiments, the coating equipment 100 may be, but is not limited to, a PECVD equipment, a low-pressure chemical vapor deposition equipment, or an atmospheric pressure chemical vapor deposition equipment.

[0037] In some embodiments, the coating apparatus 100 also includes an air inlet duct 30. The air inlet 21 is connected to the air inlet duct 30 and is connected to an external air source (not shown) through the air inlet duct 30.

[0038] In some embodiments, the external gas source may be, but is not limited to, a special gas source.

[0039] In some embodiments, the air inlet 21 includes a connecting portion 211 and a mounting portion 212. The connecting portion 211 is connected to one end of the first pipe portion 231 and is used to connect to an external air source. The mounting portion 212 is connected to the end of the connecting portion 211 away from the first pipe portion 231 and is used to mount the air inlet structure 20 to the furnace port flange 11 of the furnace tube 10.

[0040] In some embodiments, the connecting portion 211 includes a first connecting section 211a and a second connecting section 211b. The first connecting section 211a is connected to one end of the first pipe portion 231 and is inclined toward the side where the gas outlet portion 22 is located. The second connecting section 211b is connected to the end of the first connecting section 211a away from the first pipe portion 231, and the second connecting section 211b passes through the furnace flange 11 and is connected to an external gas source.

[0041] Therefore, the first connecting section 211a is inclined toward the side where the gas outlet 22 is located, which is beneficial to the compactness of the air inlet structure 20, so as to avoid other components in the coating equipment 100 and avoid interference between components; and it is also beneficial to provide a smooth transition for gas to enter the first pipe section 231, reducing flow resistance or dead zone. The second connecting section 211b provides an interface section that passes through the furnace flange 11 and connects to the external gas source.

[0042] In some embodiments, the angle between the first connecting section 211a and the first pipe section 231 is an obtuse angle to optimize airflow or to accommodate the flange structure of the furnace tube 10.

[0043] In some embodiments, the mounting portion 212 includes a lug protruding from the second connecting section 211b. The lug has a mounting hole 212h for connecting the furnace flange 11.

[0044] In some embodiments, the lug extends along the second direction D2 toward the side where the vent 22 is located.

[0045] In some embodiments, the lug with mounting hole 212h is bolted (or other fastener) to the furnace flange 11.

[0046] In some embodiments, there is only one lug to simplify the installation process.

[0047] In some embodiments, there are multiple lugs, such as two, three or more, and the multiple lugs are evenly distributed on the second connecting section 211b to ensure the stable installation of the air intake structure 20 at the furnace opening position.

[0048] Figures 3 to 11 They are respectively Figure 1 Schematic diagrams of the air intake structure of the coating equipment from different perspectives. Please refer to the attached diagrams. Figures 1 to 11 .

[0049] It should be noted that, for ease of description, the length direction of the furnace tube 10 is defined as the first direction D1, the left and right direction is defined as the second direction D2, and the up and down direction is defined as the third direction D3, and the first direction D1, the second direction D2 and the third direction D3 are perpendicular to each other.

[0050] In some embodiments, the air outlet 22 and the air delivery section 23 are connected in a T-shape.

[0051] In some embodiments, the gas delivery section 23 includes a first pipe section 231, a second pipe section 232, and a bend section 233. The first pipe section 231 is connected to the air inlet section 21. The second pipe section 232 is connected to the air outlet section 22. The bend section 233 connects between the first pipe section 231 and the second pipe section 232. The preheating section includes at least a portion of the first pipe section 231 and at least a portion of the bend section 233 and the second pipe section 232.

[0052] Therefore, by setting the first pipe section 231, the bend section 233 and the second pipe section 232 in the gas conveying section 23, the path of the gas inside the furnace tube 10 is extended, so that the gas in the gas inlet structure 20 has more time to be preheated.

[0053] In some embodiments, the length of the preheating section and its specific starting position inside the furnace tube 10 are set according to the temperature distribution and gas flow rate of the furnace tube 10 in order to achieve the best preheating effect.

[0054] In some embodiments, the coating equipment 100 is used for the preparation of solar cells. The furnace tube 10 includes multiple temperature zones sequentially from the furnace opening to the furnace tail, and the bending portion 233 is located in the middle region of the length of the furnace tube 10. For example, the furnace tube 10 includes eight temperature zones sequentially from the furnace opening to the furnace tail, named sequentially as the first temperature zone, the second temperature zone, ..., the eighth temperature zone along the direction from the furnace opening to the furnace tail. The bending portion 233 may be located in the third temperature zone, and the second tube portion 232 bends back from the third temperature zone to the furnace opening, so that the gas outlet 22 sprays out special gas.

[0055] In some embodiments, the first tube 231, the bend 233, and the second tube 232 are connected in sequence to form a U-shaped structure. Thus, after entering the inlet structure 20, the gas first travels a distance into the furnace tube 10 through the first tube 231, then turns at the bend 233, and travels a distance towards the furnace opening through the second tube 232 before being ejected from the outlet 22. This round-trip process increases the residence time of the gas inside the furnace tube 10, thereby improving the preheating effect of the gas.

[0056] In some embodiments, the first pipe section 231 is a straight pipe, the bend section 233 is a straight pipe, and the second pipe section 232 is a straight pipe. The first pipe section 231 and the second pipe section 232 are generally parallel. The bend section 233 is perpendicular to both the first pipe section 231 and the second pipe section 232. After the air inlet structure 20 is installed to the furnace tube 10, both the first pipe section 231 and the second pipe section 232 extend along the first direction D1, and the bend section 233 extends along the second direction D2.

[0057] In some embodiments, the first tube 231 may be a serpentine tube or a spiral tube to obtain a longer preheating path, increase the contact area with the thermal environment inside the furnace tube 10 and the residence time of the gas, and improve the preheating efficiency.

[0058] In some embodiments, the second tube 232 may be in the form of a serpentine tube or a spiral to obtain a longer preheating path, increase the contact area with the thermal environment inside the furnace tube 10 and the residence time of the gas, and improve the preheating efficiency.

[0059] In some embodiments, the bend 233 is curved to optimize gas flow.

[0060] In some embodiments, the cross-section of any one of the first tube portion 231 along the cross-section perpendicular to the first direction D1, the second tube portion 232 along the cross-section perpendicular to the first direction D1, and the bend portion 233 along the cross-section perpendicular to the second direction D2 can be, but is not limited to, circular, square, or irregular.

[0061] In some embodiments, the length and cross-sectional dimensions of the first tube 231, the second tube 232, and the bend 233 can be set according to the size of the furnace tube 10 and the preheating requirements.

[0062] In some implementations, the length of the first tube 231 and the length of the second tube 232 can be, but are not limited to, 1205 mm.

[0063] In some embodiments, the outlet 22 and the second pipe 232 are connected in a T-shape. The middle portion of the outlet 22 is connected to the second pipe 232. Thus, the gas in the second pipe 232 can be split to both sides at the T-shaped outlet 22.

[0064] In some embodiments, the vent 22 has at least one vent hole 22h facing the side of the bend 233. Thus, the vent hole 22h faces the bend 233, or in other words, the interior of the furnace tube 10. This venting method helps to avoid the preheated gas directly impacting the substrate area near the furnace opening at high speed. Instead, it mixes with the surrounding gas or forms a more diffuse airflow, so that the preheated gas has a tendency to flow back into the interior of the furnace tube 10 after being ejected, which helps to achieve uniform mixing and distribution of gas in the area near the furnace opening.

[0065] In some embodiments, the vent 22 includes a first vent 221 and a second vent 222. The first vent 221 and the second vent 222 extend along a second direction D2 and are respectively connected to the second pipe portion 232. The first vent 221 is closer to the first pipe portion 231 than the second vent 222. Both the first vent 221 and the second vent 222 have a plurality of vent holes 22h facing the side where the bend 233 is located.

[0066] In some embodiments, the first exhaust portion 221 and the second exhaust portion 222 are symmetrically arranged about the second tube portion 232. After the air inlet structure 20 is installed into the furnace tube 10, the exhaust portion 22 is symmetrically arranged about the axis of the furnace tube 10. This facilitates the more uniform introduction of preheated gas into the interior of the furnace tube 10, thereby forming a more uniform gas concentration and temperature field in the radial (lateral) direction of the furnace tube 10, further improving the uniformity of thin film deposition on large-area substrates.

[0067] In some embodiments, the multiple vents 22h are arranged linearly or in a ring to improve the uniformity of gas distribution.

[0068] In some embodiments, each air outlet 22h is a round hole, an elongated hole, a flared opening, etc., to control the airflow pattern.

[0069] In some embodiments, the coating equipment 100 is a PECVD equipment, and the air inlet structure 20 includes the following steps before and after installation to the furnace tube 10.

[0070] (1) Confirm that there is no boat inside furnace tube 10, and close the furnace door;

[0071] (2) Open the slow pumping valve and wait for the vacuum signal to light up before opening the main pumping valve. After pumping to the base pressure (e.g., 5 mtorr), check for leaks. If the leak rate is ≤60 mtorr / min, proceed to the next step.

[0072] (3) Close the special gas manual valve and evacuate the gas pipeline and furnace tube for 10 minutes. This is mainly to prevent the presence of residual special gas in the gas pipeline, which could pose a safety hazard during disassembly.

[0073] (4) After purging the special gas pipeline with nitrogen for 5 minutes, evacuate the pipeline again for 5 minutes.

[0074] (5) Break the vacuum in furnace tube 10 and open the furnace door;

[0075] (6) Install the intake structure 20;

[0076] (7) After installation, continue to close the furnace door and evacuate to the background pressure.

[0077] (8) After stabilization, leak detection is carried out. After the leak rate is confirmed to be correct, nitrogen is used to purge the gas pipeline. For example, after 1 hour, the furnace tube is saturated (purge parameters, for example, 2slm nitrogen, 1400 pressure, 500 degrees temperature).

[0078] (9) After confirming that the saturation is correct, conduct small-sample verification.

[0079] Table 1

[0080]

[0081] In Table 1, Eff (%) is the photoelectric conversion efficiency, expressed as a percentage (%). Voc (V) is the open-circuit voltage, expressed as volts (V). Isc (A) is the short-circuit current, expressed as amperes (A). FF (%) is the fill factor, expressed as a percentage (%). Rsh (Ω) is the shunt resistance, expressed as ohms (Ω). Rs (Ω·cm²) is the series resistance, expressed as ohms·cm², indicating that the resistance is related to the cell area. Irev2 (A) is the reverse current at -2V, expressed as amperes (A), reflecting the leakage current of the solar cell under reverse voltage.

[0082] It should be noted that the original conventional air inlet pipe was located at the furnace opening of the furnace tube. The special gas was directly introduced into the furnace tube through the original conventional air inlet pipe at the furnace opening, without entering the furnace tube for preheating treatment.

[0083] As shown in Table 1 above, after multiple rounds of verification, the performance difference of solar cells obtained by coating at different locations (such as the furnace opening, furnace middle, and furnace tail) using the conventional air inlet pipe coating equipment is 0.2% to 0.3%. However, the performance difference of solar cells obtained by coating at different locations (such as the furnace opening, furnace middle, and furnace tail) using the air inlet structure 20 of this application embodiment is approximately 0.05% to 0.07%. Therefore, the efficiency difference of solar cells obtained by the air inlet structure 20 is reduced, and the average efficiency of the entire tube is increased by approximately 0.04% to 0.21%. This air inlet structure effectively solves the problem of excessive efficiency differences at different locations within the furnace tube.

[0084] The above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to the above preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions to the technical solutions of this application should not depart from the spirit and scope of the technical solutions of this application.

Claims

1. An air inlet structure for supplying air to the inside of a furnace tube, characterized by, The air intake structure includes: Air intake section; The gas outlet is used to inject gas into the interior of the furnace tube; and An air supply section connects the air inlet section and the air outlet section. The air outlet section and the air supply section are connected in a T-shape, and the air inlet section and the air outlet section are located on the same side of the air supply section. The gas conveying section includes a preheating section disposed inside the furnace tube, which is used to preheat the gas flowing through the preheating section using the heat of the furnace tube.

2. The air intake structure of claim 1, wherein The gas delivery unit includes: The first pipe section is connected to the air intake section; The second pipe section is connected to the air outlet section; and A bend is provided between the first tube section and the second tube section; The preheating section includes at least a portion of the first pipe section, the bent portion, and at least a portion of the second pipe section.

3. The intake structure according to claim 2, characterized in that, The first tube, the bent section, and the second tube are connected in sequence to form a U-shaped structure.

4. The air intake structure of claim 2, wherein The middle part of the air outlet is connected to the second pipe, and the air outlet has at least one air outlet facing the side of the bend.

5. The air intake structure of claim 2, wherein The air intake section includes: A connecting portion, connected to one end of the first pipe section, and used for connection to an external air source; and The mounting part is connected to the connecting part and is used to install the air intake structure to the furnace port flange of the furnace tube.

6. The air intake structure of claim 5, wherein The connecting part includes: A first connecting section is connected to one end of the first pipe and is inclined toward the air outlet; and The second connecting section is connected to the end of the first connecting section away from the first pipe section, and is used to pass through the furnace flange and connect to the external gas source.

7. The intake structure according to claim 6, characterized in that, The mounting portion includes a lug protruding from the second connecting section, the lug having a mounting hole for connecting the furnace flange.

8. A coating apparatus, characterized by, include: Furnace tube, with furnace opening; as well as The air intake structure according to any one of claims 1 to 7 is installed on the furnace tube; The air inlet is located at the furnace opening and connected to the furnace tube, the preheating section of the air delivery section is located inside the furnace tube, and the air outlet is located adjacent to the furnace opening.

9. The coating apparatus of claim 8, wherein, The gas outlet is symmetrically arranged about the axis of the furnace tube.

10. The coating apparatus of claim 8, wherein, The coating equipment also includes an air inlet pipe, and the air inlet is connected to the air inlet pipe.

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