A single crystal furnace on-line resistance measuring device and method

Abstract

The present application relates to the technical fields of single crystal furnace resistance measurement, in particular to a single crystal furnace on-line resistance measurement device and method, which comprises a probe, a heat insulation pipe, a piston, an extension rod, a step rotation assembly and an opening and closing assembly, the heat insulation pipe is fixedly connected with the bottom wall of the furnace cover, the bottom of the furnace cover is fixedly connected with a furnace body, the bottom wall of the furnace body is rotationally connected with a crucible, the heat insulation pipe is located above the eccentric position of the crucible, the extension rod passes through the bottom wall of the furnace cover and is rotationally connected therewith, the extension rod is coaxially connected with the piston at the extension end, the piston is slidingly connected with the inner wall of the heat insulation pipe, the top of the probe is hingedly connected with the bottom of the piston, the step rotation assembly is installed on the furnace cover, and the step rotation assembly is used to drive the extension rod to rotate, in order to realize real-time multi-point monitoring, the probe can be tilted and extended out of the heat insulation pipe and step-rotated through the step rotation assembly, the annular distribution measurement of multiple points in the silicon liquid is realized, the concentration deviation caused by fixed single-point detection is avoided, and the resistance measurement precision is improved.

Description

Technical Field

[0001] This invention relates to the field of single crystal furnace resistance measurement technology, specifically to an online resistance measurement device and method for single crystal furnaces. Background Technology

[0002] The resistivity of single-crystal materials is determined by the doping concentration of the silicon melt during growth. Therefore, resistivity can be measured using a measuring device, and the doping concentration can be calculated from the measurement data. Currently, resistance measurement mainly falls into two categories: offline detection requires sampling and measurement after the single crystal rod is pulled, which has a significant lag; traditional online detection installs the device on the side wall of the furnace cylinder and only measures the single crystal rod, which cannot achieve real-time feedback on concentration changes during the critical stages of dopant volatilization (silicon melt melting period, early crystal pulling stage).

[0003] Existing improvement schemes, aimed at enhancing measurement timeliness, involve placing the measurement probe below the furnace cover and using a lifting mechanism to move the probe up and down, allowing it to be directly inserted into the molten silicon for measurement. However, these schemes generally only support fixed-direction probe movement, making it difficult to flexibly adjust the measurement position, resulting in a single, fixed measurement point. Due to phenomena such as natural convection, temperature gradients, and non-uniform distribution of dopants within the molten silicon, fixed measurement points cannot reflect the true overall concentration distribution of the silicon, easily causing measurement deviations and affecting the accuracy of the measurement data. Summary of the Invention

[0004] The purpose of this invention is to provide an online resistance measurement device and method for a single crystal furnace, which can regularly move the position of the probe to achieve real-time multi-point monitoring and improve accuracy.

[0005] To achieve this objective, the present invention adopts the following technical solution: An online resistance measuring device for a single crystal furnace is provided, including a probe, a heat insulation tube, a piston, a telescopic rod, a stepping rotation assembly, and an opening and closing assembly. The heat insulation tube is fixedly connected to the bottom wall of the furnace cover, and a furnace body is fixedly connected to the bottom of the furnace cover. A crucible is rotatably connected to the bottom wall of the furnace body. The heat insulation tube is located eccentrically above the crucible. The telescopic rod passes through the bottom wall of the furnace cover and is rotatably connected to it. The telescopic end of the telescopic rod is coaxially connected to the piston. The piston is slidably connected to the inner wall of the heat insulation tube. The top of the probe is hinged to the bottom of the piston. The stepping rotation assembly is installed on the furnace cover and is used to drive the telescopic rod to rotate. The opening and closing assembly is installed on the heat insulation tube and is used to open and close the heat insulation tube.

[0006] Preferably, the stepping rotary assembly includes a turntable, a connecting rod, a swing arm, and a drive rod. One end of the drive rod is rotatably connected to the inner wall of the furnace cover, and the other end of the drive rod is rotatably connected to one end of the connecting rod. One end of the swing arm is rotatably connected to the inner wall of the furnace cover, and the other end of the swing arm is rotatably connected to the middle of the connecting rod. The bottom of the turntable is coaxially connected to the telescopic rod, and a groove is provided on the top of the turntable. The groove has a cross-shaped structure and a smooth inner wall transition. The groove is slidably connected to the other end of the connecting rod.

[0007] Preferably, the stepper rotary assembly also includes a motor, the bottom of which is fixedly connected to the top of the furnace cover, the output shaft of which passes through the furnace cover and is coaxially connected to a drive rod located at one end of the turntable.

[0008] Preferably, a bracket is fixedly connected to the bottom wall of the furnace cover, one end of which is rotatably connected to the swing arm, and the bracket is located on one side of the turntable near the drive rod.

[0009] Preferably, the opening and closing assembly includes a sealing cylinder and a flip plate. The sealing cylinder is located at the bottom of the heat insulation tube and is rotatably connected to its inner wall. The flip plate is fixedly connected to two rotating shafts on both sides. The rotating shafts are inserted into the inner wall of the sealing cylinder and are rotatably connected to it. The outer periphery of the flip plate is in contact with the bottom of the inner wall of the sealing cylinder, and the top of the flip plate is in contact with the probe.

[0010] Preferably, the opening and closing assembly further includes a counterweight and a guide block. The counterweight is fixedly connected to the inner wall of one end of the flip plate, and a locking block is fixedly connected to the bottom of the other end of the flip plate. The locking block is in contact with the inner wall of the sealing cylinder. The top of the guide block has a sloping structure and abuts against the probe. The guide block is fixedly connected to the end of the inner wall of the sealing cylinder near the counterweight.

[0011] Preferably, the top of the sealing cylinder has multiple slots, which are distributed circumferentially around the outer periphery of the sealing cylinder. The bottom of the piston is fixedly connected with multiple tenons, which are inserted into the slots.

[0012] Preferably, it also includes a hydraulic rod and a fixing ring. The hydraulic rod is fixedly connected to the top of the furnace cover. The telescopic end of the hydraulic rod passes through the furnace cover and is slidably connected to it. One end of the fixing ring is fixedly connected to the hydraulic rod, and the other end of the fixing ring is rotatably connected to the periphery of the piston. The side wall of the heat insulation tube is provided with a long groove for the fixing ring to pass through.

[0013] Preferably, the telescopic rod includes a sleeve and a sliding rod. The top of the sleeve passes through the bottom wall of the furnace cover and is rotatably connected to it. The sleeve is coaxially connected to the bottom of the turntable. The sliding rod passes through the bottom wall of the sleeve and is slidably connected to it. A drive pin is fixedly connected to the top of the sliding rod. The bottom of the sliding rod is coaxially connected to the piston. A drive groove is provided on the inner wall of the sleeve for limiting the drive pin.

[0014] This invention also provides a measurement method for an online resistance measuring device for a single crystal furnace, comprising the following steps: Step 1: A hydraulic rod installed on the top of the furnace cover pushes a piston and a probe down along the heat insulation tube. The bottom of the probe is squeezed by a guide block and rotates and tilts around the hinge point. Step 2: The probe continues to descend and pushes one end of a flip plate. The flip plate rotates and opens the heat insulation tube, allowing the probe to extend downwards out of the heat insulation tube and probe into the molten silicon. Step 3: A stepping rotation component is installed to drive the probe to rotate intermittently in the same direction while it is working, so that the bottom of the probe passes through different positions in the molten silicon and stops there for resistance measurement. Step 4: The hydraulic rod reverses and drives the probe to rise into the heat insulation tube. The probe rotates back to a vertical position and the flip plate rotates and resets.

[0015] The beneficial effects of this invention are: 1. This invention allows the probe to tilt and extend out of the heat insulation tube and rotate stepwise, realizing multi-point annular distribution measurement inside the silicon liquid. This avoids concentration deviation caused by fixed single-point detection, truly reflects the overall doping distribution of the silicon liquid, and significantly improves the accuracy of resistivity measurement and data reliability.

[0016] 2. When not measuring, the probe of the present invention is stored in the heat insulation tube and the bottom is automatically sealed by the flip plate, which effectively isolates high temperature radiation and dopant volatilization corrosion. At the same time, the overall structure is compact and stable, taking into account both measurement flexibility and component protection, and improving the operational stability and service life of the device. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments of the present invention will be briefly described below. Obviously, the drawings described below are merely some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without any creative effort.

[0018] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0019] Figure 2 This is a three-dimensional structural breakdown diagram of the present invention.

[0020] Figure 3 This is a schematic diagram of the furnace cover structure of the present invention.

[0021] Figure 4 This is a top view of the furnace body structure of the present invention.

[0022] Figure 5 This is a cross-sectional view of the furnace body structure of the present invention.

[0023] Figure 6 This is a cross-sectional view of the heat insulation pipe structure of the present invention. Figure 1 .

[0024] Figure 7 yes Figure 5 Enlarged view of the structure at point A in the middle.

[0025] Figure 8 yes Figure 6 Enlarged view of the structure at point A in the middle.

[0026] Figure 9 This is a cross-sectional view of the heat insulation pipe structure of the present invention. Figure 2 .

[0027] Figure 10 This is a cross-sectional view of the sealing cylinder structure of the present invention.

[0028] Figure 11 This is a structural breakdown diagram of the opening and closing component of the present invention.

[0029] In the picture: 1. Probe; 10. Insulation tube; 100. Long groove; 11. Piston; 110. Locking tenon; 12. Furnace lid; 13. Furnace body; 14. Crucible; 15. Hydraulic rod; 16. Retaining ring; 2. Telescopic rod; 20. Sleeve; 200. Transmission groove; 21. Slide rod; 210. Transmission pin; 3. Stepping rotary assembly; 30. Turntable; 300. Slide rail; 31. Connecting rod; 32. Swing arm; 33. Drive rod; 34. Motor; 35. Bracket; 4. Opening and closing assembly; 40. Sealing cylinder; 400. Slot; 41. Flip plate; 410. Rotating shaft; 411. Locking block; 42. Counterweight block; 43. Guide block. Detailed Implementation

[0030] The technical solution of the present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0031] The accompanying drawings are for illustrative purposes only and are schematic diagrams, not actual images. They should not be construed as limiting the scope of this patent. To better illustrate the embodiments of the present invention, some parts in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product. It is understandable to those skilled in the art that some well-known structures and their descriptions may be omitted in the drawings.

[0032] In the accompanying drawings of the embodiments of the present invention, the same or similar reference numerals correspond to the same or similar components. In the description of the present invention, it should be understood that if terms such as "upper," "lower," "left," "right," "inner," and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting the present patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0033] In the description of this invention, unless otherwise explicitly specified and limited, the term "connection" or similar designation indicating a connection between components should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral part; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can refer to the internal communication between two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0034] like Figures 1 to 11 As shown: An online resistance measuring device for a single crystal furnace includes a probe 1, a heat insulation tube 10, a piston 11, a telescopic rod 2, a stepping rotation assembly 3, and an opening and closing assembly 4. The heat insulation tube 10 is fixedly connected to the bottom wall of a furnace cover 12. A furnace body 13 is fixedly connected to the bottom of the furnace cover 12. A crucible 14 is rotatably connected to the bottom wall of the furnace body 13. The heat insulation tube 10 is located eccentrically above the crucible 14. The telescopic rod 2 passes through the bottom wall of the furnace cover 12 and is rotatably connected to it. The telescopic end of the telescopic rod 2 is coaxially connected to the piston 11. The piston 11 is slidably connected to the inner wall of the heat insulation tube 10. The top of the probe 1 is hinged to the bottom of the piston 11. The stepping rotation assembly 3 is installed on the furnace cover 12 and is used to drive the telescopic rod 2 to rotate. The opening and closing assembly 4 is installed on the heat insulation tube 10 and is used to open and close the heat insulation tube 10.

[0035] When measuring the resistance of molten silicon, probe 1 is initially positioned vertically to save material and space. It is located inside the heat insulation tube 10, and the opening / closing assembly 4 is closed, protecting probe 1 through the heat insulation tube 10. Subsequently, piston 11 slides downwards along the heat insulation tube 10, simultaneously driving probe 1 downwards via a hinge. During this process, the bottom of probe 1 abuts against the opening / closing assembly 4, causing it to tilt to one side around the hinge point. As piston 11 continues to move, the bottom of probe 1 penetrates into the molten silicon. Then, the stepping rotation assembly 3 operates, causing piston 11 and probe 1 to rotate intermittently. At this time, the bottom of probe 1 makes a circular motion within the molten silicon, exhibiting a stepping characteristic. This not only facilitates the movement of probe 1's position but also adapts to measurement needs, allowing the bottom of probe 1 to remain at different positions within the molten silicon to measure resistance, thus improving the accuracy of the measurement data.

[0036] like Figures 1 to 8 As shown: To enable the probe 1 to achieve a stepping effect and thus meet measurement requirements, the stepping rotary assembly 3 includes a turntable 30, a connecting rod 31, a swing arm 32, and a drive rod 33. One end of the drive rod 33 is rotatably connected to the inner wall of the furnace cover 12, and the other end of the drive rod 33 is rotatably connected to one end of the connecting rod 31. One end of the swing arm 32 is rotatably connected to the inner wall of the furnace cover 12, and the other end of the swing arm 32 is rotatably connected to the middle of the connecting rod 31. The bottom of the turntable 30 is coaxially connected to the telescopic rod 2, and the top of the turntable 30 is provided with a sliding groove 300. The sliding groove 300 has a cross-shaped structure and a smooth inner wall transition. The sliding groove 300 is slidably connected to the other end of the connecting rod 31.

[0037] The rotation of the drive rod 33 pushes one end of the connecting rod 31 to move, while the other end of the connecting rod 31 slides within the groove 300. Simultaneously, the swing arm 32 follows the movement of the connecting rod 31, reciprocating and oscillating, thus limiting the movement of the middle section of the connecting rod 31. This causes the connecting rod 31 to first move in an L-shape along two adjacent straight grooves of the cross-shaped groove 300 when the drive rod 33 rotates half a turn. Then, the connecting rod 31 contacts the inner wall of the groove 300, pushing the turntable 30 to rotate a quarter turn. Thus, for every turn of the drive rod 33, the turntable 30 drives the piston 11 and probe 1 to rotate a quarter turn via the telescopic rod 2, repeating this cycle to achieve stepwise rotation of the probe 1.

[0038] like Figures 4 to 8 As shown: The stepper rotary assembly 3 also includes a motor 34, the bottom of which is fixedly connected to the top of the furnace cover 12. The output shaft of the motor 34 passes through the furnace cover 12 and is coaxially connected to the drive rod 33, which is located at one end of the turntable 30.

[0039] A bracket 35 is fixedly connected to the bottom wall of the furnace cover 12. One end of the bracket 35 is rotatably connected to the swing arm 32. The bracket 35 is located on one side of the turntable 30, near the end of the drive rod 33.

[0040] The motor 34 is powered on, driving the drive rod 33 to rotate, providing driving force for the rotation of the turntable 30. The bracket 35 is used to support the swing arm 32. At the same time, the three points between the drive rod 33, the center of the turntable 30, and the position of the bracket 35 form an acute angle, preventing the swing arm 32 and the connecting rod 31 from rotating excessively, thereby making the turntable 30 rotate stably in the same direction.

[0041] like Figures 9 to 11 As shown: The opening and closing assembly 4 includes a sealing cylinder 40 and a flip plate 41. The sealing cylinder 40 is located at the bottom of the heat insulation tube 10 and is rotatably connected to its inner wall. The flip plate 41 has a rotating shaft 410 fixedly connected to both sides. The rotating shaft 410 is inserted into the inner wall of the sealing cylinder 40 and is rotatably connected to it. The outer periphery of the flip plate 41 is in contact with the bottom of the inner wall of the sealing cylinder 40, and the top of the flip plate 41 is in contact with the probe 1.

[0042] The opening and closing assembly 4 also includes a counterweight 42 and a guide block 43. The counterweight 42 is fixedly connected to the inner wall of one end of the flip plate 41. A locking block 411 is fixedly connected to the bottom of the other end of the flip plate 41. The locking block 411 is in contact with the inner wall of the sealing cylinder 40. The top of the guide block 43 is a sloping structure and abuts against the probe 1. The guide block 43 is fixedly connected to the end of the inner wall of the sealing cylinder 40 near the counterweight 42.

[0043] The top of the sealing cylinder 40 has multiple slots 400, which are distributed in a circular pattern around the periphery of the sealing cylinder 40. The bottom of the piston 11 is fixedly connected to multiple tenons 110, which are inserted into the slots 400.

[0044] When probe 1 is retracted into the insulation tube 10, the flip plate 41 is in a horizontal position and fits against the inner wall of the sealing cylinder 40, closing the bottom opening of the insulation tube 10. As probe 1 moves downward, its bottom is pressed against the guide block 43 and tilted towards the locking block 411, facilitating the opening of the flip plate 41. As probe 1 continues to descend, it pushes the flip plate 41 to rotate and open, and the bottom of probe 1 extends out from the gap between the flip plate 41 and the sealing cylinder 40 for measurement. Probe 1 and the flip plate 41 remain in a tilted position, pressing against each other. At this time, piston 11 descends to the bottom of the insulation tube 10, and latch 110 is inserted into the slot 400. When probe 1 rotates, the contact between latch 110 and the inner wall of the slot 400 causes the sealing cylinder 40 to rotate synchronously with piston 11, preventing the flip plate 41 from obstructing the rotation of probe 1. After probe 1 resets, the flip plate 41 rotates in the opposite direction under the gravity of the counterweight 42 until the locking block 411 fits against the inner wall of the sealing cylinder 40, restoring the horizontal position.

[0045] like Figures 1 to 10 As shown: It also includes a hydraulic rod 15 and a fixing ring 16. The hydraulic rod 15 is fixedly connected to the top of the furnace cover 12. The telescopic end of the hydraulic rod 15 passes through the furnace cover 12 and is slidably connected to it. One end of the fixing ring 16 is fixedly connected to the hydraulic rod 15, and the other end of the fixing ring 16 is rotatably connected to the periphery of the piston 11. The side wall of the heat insulation tube 10 is provided with a long groove 100 for the fixing ring 16 to pass through.

[0046] The telescopic rod 2 includes a sleeve 20 and a sliding rod 21. The top of the sleeve 20 passes through the bottom wall of the furnace cover 12 and is rotatably connected to it. The sleeve 20 is coaxially connected to the bottom of the turntable 30. The sliding rod 21 passes through the bottom wall of the sleeve 20 and is slidably connected to it. A transmission pin 210 is fixedly connected to the top of the sliding rod 21. The bottom of the sliding rod 21 is coaxially connected to the piston 11. A transmission groove 200 is provided on the inner wall of the sleeve 20 for limiting the transmission pin 210.

[0047] The hydraulic rod 15 is activated, and its telescopic end drives the fixed ring 16 to move vertically. The fixed ring 16 passes through the heat insulation tube 10 and drives the piston 11 to slide up and down, thereby raising and lowering the probe 1. When the probe 1 rotates, the piston 11 and the fixed ring 16 rotate relative to each other. As the piston 11 descends, the slide rod 21 slides down along the sleeve 20 to extend. When the turntable 30 rotates, it drives the sleeve 20 to rotate. Through the contact between the transmission groove 200 and the transmission pin 210, the slide rod 21 and the piston 11 are driven to rotate, thereby driving the probe 1 to rotate while raising and lowering it.

[0048] This embodiment also provides a measurement method for an online resistance measuring device for a single crystal furnace, including the following steps: Step 1: The piston 11 and probe 1 are pushed down along the heat insulation tube 10 by the hydraulic rod 15 set on the top of the furnace cover 12. The bottom of the probe 1 is squeezed by the guide block 43 and rotates and tilts around the hinge point. Step 2: The probe 1 continues to descend and pushes one end of the flip plate 41. The flip plate 41 rotates and opens the heat insulation tube 10. The probe 1 extends downward out of the heat insulation tube 10 and probes into the silicon liquid. Step 3: The stepping rotation component 3 is set to drive the probe 1 to rotate intermittently in the same direction while the probe 1 is working, so that the bottom of the probe 1 passes through different positions in the silicon liquid and stops to perform resistance measurement. Step 4: The hydraulic rod 15 reverses and drives the probe 1 to rise into the heat insulation tube 10. The probe 1 rotates back to the vertical position and the flip plate 41 rotates and resets.

[0049] In practical use, the online resistance measuring device for a single crystal furnace in this invention initially houses the probe 1 vertically inside the heat insulation tube 10, with the opening and closing assembly 4 closed to protect the probe 1. The hydraulic rod 15 drives the fixing ring 16 to move the piston 11 down along the heat insulation tube 10. Through the hinge structure, the bottom of the probe 1 contacts the opening and closing assembly 4 and extends obliquely out of the heat insulation tube 10, probing into the molten silicon. The stepping rotation assembly 3 drives the drive rod 33 to rotate via the motor 34, which in turn drives the connecting rod 31, the swing arm 32, and the cross slide 300 to rotate the turntable 30 in a quarter-turn increment at certain angular intervals. Then, through the sleeve 20, the slide rod 21, the transmission groove 200, and the transmission pin 210, the piston 11 and the probe 1 rotate synchronously and intermittently, allowing the bottom of the probe 1 to stop and measure at multiple points along a circular trajectory in the molten silicon. Simultaneously, the flip plate 41 at the bottom of the sealing cylinder 40 is pushed open when the probe 1 descends. After the probe 1 resets, it automatically closes and resets under the action of the counterweight 42. The piston 11 and the sealing cylinder 40 rotate synchronously through the latch 110 and the slot 400, avoiding interference of the flip plate 41 with the rotation of the probe 1. This device can realize multi-point measurement of probe 1 lifting, tilting, and stepping rotation, and can adapt to the non-uniform distribution characteristics of silicon liquid, obtain more representative measurement data, and significantly improve the accuracy and real-time performance of resistivity measurement.

[0050] It should be stated that the above-described specific embodiments are merely preferred embodiments of the present invention and the technical principles employed. Those skilled in the art should understand that various modifications, equivalent substitutions, and variations can be made to the present invention. However, such variations, as long as they do not depart from the spirit of the present invention, should be within the scope of protection of the present invention. Furthermore, some terminology used in this specification and claims is not limiting, but merely for the purpose of clearly describing the positional relationships and functions of the components.

Claims

1. An online resistance measuring device for a single crystal furnace, comprising a probe (1), characterized in that, It also includes a heat insulation tube (10), a piston (11), a telescopic rod (2), a stepping rotation assembly (3), and an opening and closing assembly (4). The heat insulation tube (10) is fixedly connected to the bottom wall of the furnace cover (12). The furnace body (13) is fixedly connected to the bottom of the furnace cover (12). The crucible (14) is rotatably connected to the bottom wall of the furnace body (13). The heat insulation tube (10) is located eccentrically above the crucible (14). The telescopic rod (2) passes through the bottom wall of the furnace cover (12) and is rotatably connected to it. The telescopic end of the telescopic rod (2) is coaxially connected to the piston (11). The piston (11) is slidably connected to the inner wall of the heat insulation tube (10). The top of the probe (1) is hinged to the bottom of the piston (11). The stepping rotation assembly (3) is installed on the furnace cover (12). The stepping rotation assembly (3) is used to drive the telescopic rod (2) to rotate. The opening and closing assembly (4) is installed on the heat insulation tube (10). The opening and closing assembly (4) is used to open and close the heat insulation tube (10).

2. The online resistance measuring device for a single crystal furnace according to claim 1, characterized in that, The stepping rotary assembly (3) includes a turntable (30), a connecting rod (31), a swing arm (32), and a drive rod (33). One end of the drive rod (33) is rotatably connected to the inner wall of the furnace cover (12), and the other end of the drive rod (33) is rotatably connected to one end of the connecting rod (31). One end of the swing arm (32) is rotatably connected to the inner wall of the furnace cover (12), and the other end of the swing arm (32) is rotatably connected to the middle of the connecting rod (31). The bottom of the turntable (30) is coaxially connected to the telescopic rod (2). A sliding groove (300) is provided on the top of the turntable (30). The sliding groove (300) has a cross-shaped structure and a smooth inner wall transition. The sliding groove (300) is slidably connected to the other end of the connecting rod (31).

3. The online resistance measuring device for a single crystal furnace according to claim 2, characterized in that, The stepping rotary assembly (3) also includes a motor (34), the bottom of which is fixedly connected to the top of the furnace cover (12). The output shaft of the motor (34) passes through the furnace cover (12) and is coaxially connected to the drive rod (33), which is located at one end of the turntable (30).

4. The online resistance measuring device for a single crystal furnace according to claim 3, characterized in that, A bracket (35) is fixedly connected to the bottom wall of the furnace cover (12). One end of the bracket (35) is rotatably connected to the swing arm (32). The bracket (35) is located on one side of the turntable (30) near the end of the drive rod (33).

5. The online resistance measuring device for a single crystal furnace according to claim 1, characterized in that, The opening and closing assembly (4) includes a sealing cylinder (40) and a flip plate (41). The sealing cylinder (40) is located at the bottom of the heat insulation tube (10) and is rotatably connected to its inner wall. The flip plate (41) is fixedly connected to a rotating shaft (410) on both sides. The rotating shaft (410) is inserted into the inner wall of the sealing cylinder (40) and rotatably connected to it. The outer periphery of the flip plate (41) is in contact with the bottom of the inner wall of the sealing cylinder (40), and the top of the flip plate (41) is in contact with the probe (1).

6. The online resistance measuring device for a single crystal furnace according to claim 5, characterized in that, The opening and closing assembly (4) also includes a counterweight (42) and a guide block (43). The counterweight (42) is fixedly connected to the inner wall of one end of the flip plate (41). A locking block (411) is fixedly connected to the bottom of the other end of the flip plate (41). The locking block (411) is in contact with the inner wall of the sealing cylinder (40). The top of the guide block (43) is a sloping structure and it abuts against the probe (1). The guide block (43) is fixedly connected to the end of the inner wall of the sealing cylinder (40) near the counterweight (42).

7. The online resistance measuring device for a single crystal furnace according to claim 6, characterized in that, The top of the sealing cylinder (40) is provided with multiple slots (400), which are distributed in a circle around the outer periphery of the sealing cylinder (40). The bottom of the piston (11) is fixedly connected with multiple tenons (110), which are inserted into the slots (400).

8. The online resistance measuring device for a single crystal furnace according to claim 1, characterized in that, It also includes a hydraulic rod (15) and a fixing ring (16). The hydraulic rod (15) is fixedly connected to the top of the furnace cover (12). The telescopic end of the hydraulic rod (15) passes through the furnace cover (12) and is slidably connected to it. One end of the fixing ring (16) is fixedly connected to the hydraulic rod (15), and the other end of the fixing ring (16) is rotatably connected to the periphery of the piston (11). The side wall of the heat insulation tube (10) is provided with a long groove (100) for the fixing ring (16) to pass through.

9. The online resistance measuring device for a single crystal furnace according to claim 2, characterized in that, The telescopic rod (2) includes a sleeve (20) and a slide rod (21). The top of the sleeve (20) passes through the bottom wall of the furnace cover (12) and is rotatably connected to it. The sleeve (20) is coaxially connected to the bottom of the turntable (30). The slide rod (21) passes through the bottom wall of the sleeve (20) and is slidably connected to it. A transmission pin (210) is fixedly connected to the top of the slide rod (21). The bottom of the slide rod (21) is coaxially connected to the piston (11). A transmission groove (200) is provided on the inner wall of the sleeve (20) for limiting the transmission pin (210).

10. A method applied to an online resistance measuring device for a single crystal furnace according to any one of claims 1 to 9, characterized in that, Includes the following steps; Step 1: The piston (11) and probe (1) are pushed down along the heat insulation tube (10) by the hydraulic rod (15) set on the top of the furnace cover (12). The bottom of the probe (1) is squeezed by the guide block (43) and rotates and tilts around the hinge point. Step 2: The probe (1) continues to descend and pushes one end of the flip plate (41). The flip plate (41) rotates to open the heat insulation tube (10). The probe (1) extends downward out of the heat insulation tube (10) and probes into the molten silicon. Step 3: Using the set stepping rotation component (3), while the probe (1) is working, it is driven to rotate intermittently in the same direction, so that the bottom of the probe (1) passes through different positions in the silicon liquid and stops, and resistance measurement is performed; Step 4: The hydraulic rod (15) reverses and drives the probe (1) to rise into the heat insulation tube (10). The probe (1) rotates back to the vertical position and the flip plate (41) rotates to reset.

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