Controllable incident angle irradiation experimental device

Abstract

The application discloses an irradiation experimental device with controllable incident angle, and relates to the technical field of irradiation test equipment. The device comprises an irradiation box, lead plates, a base and a plurality of shielding tubes. A radiation source, a sample stage and a driving mechanism are arranged in the irradiation box. The driving mechanism is connected with the radiation source and the sample stage respectively and is used for driving the radiation source and / or the sample stage to move. Electrical test instruments are arranged in the base. The lead plates are arranged between the irradiation box and the base. The shielding tubes penetrate through the lead plates and connect the irradiation box and the base, and are used for penetrating through connecting lines. The application can accurately adjust the relative position and angle of the radiation source and the sample stage through the driving mechanism, and can realize flexible and controllable irradiation incident angle. The test instruments in the base are effectively protected from radiation damage through the lead plates and the shielding tubes.

Description

Technical Field

[0001] This invention belongs to the technical field of irradiation testing equipment and relates to a controllable incident angle irradiation experimental device. Background Technology

[0002] In the field of aerospace engineering, the cosmic radiation environment poses a severe challenge to the reliability and lifespan of electronic devices. The large number of high-energy particles in outer space, such as protons and heavy ions, can bombard electronic devices with single-event effects or cumulative dose effects, leading to logic errors, performance degradation, and even permanent damage. To ensure the long-term stability of spacecraft in orbit, systematic irradiation experiments must be conducted before devices are put into production to verify their radiation resistance. Research shows that differences in the energy, type, and incident angle of heavy ions can significantly affect the electrical characteristics of devices. This means that radiation resistance assessment needs to cover multi-dimensional experimental conditions. Therefore, real-time measurement of the electrical characteristics of devices during or after irradiation, and quantification of damage patterns, plays a crucial supporting role in radiation hardening design and lifespan assessment.

[0003] Current technologies attempt to achieve multi-angle irradiation experiments. For example, Chinese utility model patent CN221507770U discloses a multi-angle irradiation experimental device for products. This device uses a combination of three refractive plates fixedly installed on the inner wall of a box to irradiate items placed on the plates from multiple angles. However, this technology still has significant limitations in practical applications. The fixed installation of the refractive plates makes it impossible to dynamically adjust the refraction angle according to experimental needs. This limits the irradiation angle range to the initial design, making it difficult to meet the experimental requirements of irradiating complex-shaped samples or samples with specific incident directions. For irregularly shaped structures or test devices requiring precise control of particle incident angles, there may be irradiation blind zones. Furthermore, the sample receives static multi-directional irradiation at a fixed position, lacking a rotation or translation adjustment mechanism. This means that irradiation uniformity relies entirely on the passive design of the optical path, failing to actively compensate for differences in local irradiation intensity. The light path design based on the light source plus reflection and refraction also results in low light energy utilization, increasing energy consumption and making it difficult to ensure the consistency of the irradiation dose received by the device in all directions. More importantly, existing devices cannot measure the electrical characteristics of the device under test during irradiation. If gradient experiments with multiple dose conditions are required, the sample must be repeatedly removed and put back in, which not only increases the complexity of operation but may also introduce measurement errors. Especially for special devices such as ferroelectric memories, the study of their radiation resistance often requires simultaneous write and read operations during irradiation to monitor the functional degradation process in real time. Existing technology cannot meet such in-situ testing requirements. Summary of the Invention

[0004] The purpose of this invention is to solve the problem that existing irradiation test chambers cannot conveniently and accurately change the incident angle between the radiation and the device when irradiating the sample with protons, electrons or heavy ions, and to provide an irradiation test device with controllable incident angle.

[0005] To achieve the above objectives, the present invention employs the following technical solution: The present invention provides an irradiation experimental apparatus with controllable incident angle, comprising an irradiation chamber, a lead plate, a base, and several shielding tubes; The irradiation chamber is equipped with a radiation source, a stage, and a drive mechanism. The drive mechanism is connected to the radiation source and the stage respectively, and is used to drive the radiation source and / or the stage to move. An electrical testing instrument is installed inside the base; the lead plate is placed between the irradiation box and the base; the shielding tube passes through the lead plate and connects the irradiation box and the base, and is used to run connecting lines.

[0006] Furthermore, the driving mechanism includes a first linear stepper motor, a second linear stepper motor, and an electric tilting stage; the first linear stepper motor is disposed at the top of the irradiation chamber, and the radiation source is fixed at the bottom of the first linear stepper motor; the first linear stepper motor drives the radiation source to move horizontally; the electric tilting stage is fixed above the lead plate, and the second linear stepper motor is fixed between the electric tilting stage and the platform, used to drive the platform to move up and down in the vertical direction, and the electric tilting stage is used to drive the platform to rotate.

[0007] Furthermore, a camera is also installed inside the irradiation chamber, and the camera is fixed to the side of the radiation source and rigidly connected to the radiation source.

[0008] Furthermore, the surface of the stage is provided with air holes, and a diaphragm pump is installed inside the base. The diaphragm pump is connected to the air holes of the stage through a shielding tube.

[0009] Furthermore, a mounting bracket is detachably installed on the stage for fixing the sample to be tested.

[0010] Furthermore, a test box is also provided inside the base; the card holder and the test box are connected by a shielding tube.

[0011] Furthermore, the test box and the electrical testing instrument are electrically connected through a shielding tube.

[0012] Furthermore, the test box is connected to the sample being tested via a shielding tube.

[0013] Furthermore, the shielding tube is a tubular structure made of lead-boron polyethylene composite material.

[0014] Furthermore, the base has an openable base door on its side.

[0015] Compared with the prior art, the present invention has the following beneficial effects: This invention discloses an irradiation experimental apparatus with controllable incident angle. A drive mechanism connects to both a radiation source and a stage, enabling the radiation source to move horizontally while simultaneously driving the stage to rise and fall vertically and tilt within a plane. This allows for multi-dimensional and precise adjustment of the incident angle between the radiation source and the sample. Compared to existing methods that use fixed refractive plates for multi-angle irradiation, this invention dynamically adjusts the incident angle according to different experimental requirements, eliminating irradiation dead zones. It can meet the irradiation experimental requirements of complex-shaped samples or specific incident angle directions, significantly improving the flexibility and adaptability of irradiation experiments.

[0016] Furthermore, this invention incorporates electrical testing instruments within the base, connected to the sample under test within the irradiation chamber via a shielding tube penetrating the lead plate. This enables real-time measurement of the sample's electrical characteristics during irradiation. Compared to existing technologies that require repeated sample removal for testing, this invention avoids testing errors caused by room-temperature annealing after sample removal, ensuring the authenticity and reliability of the test data. Simultaneously, for devices requiring simultaneous application of voltage or test signals during irradiation, such as ferroelectric memories, this invention provides an effective in-situ testing method, enabling the acquisition of more comprehensive device performance degradation data.

[0017] Furthermore, this invention provides dual radiation protection for the electrical testing instruments within the base by placing a lead plate between the irradiation chamber and the base, and using a shielding tube penetrating the lead plate to run the connecting lines. The lead plate effectively blocks most of the radiation rays from directly irradiating the instruments at the bottom, while the shielding tube, made of lead-boron polyethylene composite material, further shields against neutron or gamma-ray irradiation, protecting the connecting lines from radiation damage. This layered shielding design not only ensures the stable operation of the testing instruments during long-term irradiation experiments, significantly extending the equipment's lifespan, but also avoids signal interference caused by radiation affecting the connecting lines, ensuring the accuracy of the test results.

[0018] Furthermore, the in-situ testing capability of this invention eliminates the need for operators to transfer samples to other testing equipment after irradiation, saving the steps of repeatedly picking up and repositioning samples and significantly shortening the experimental cycle. Simultaneously, through precise control of the drive mechanism, operators can quickly set different irradiation angles and distances, facilitating multi-dimensional, multi-dose series irradiation experiments and significantly improving experimental efficiency and the continuity of data acquisition. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a structural diagram of the irradiation experimental device with controllable incident angle according to the present invention.

[0021] The components include: 1. First linear stepper motor; 2. Radiation source; 3. Camera; 4. Irradiation chamber; 5. Card holder; 6. Stage; 7. First shielding tube; 8. Second shielding tube; 9. Second linear stepper motor; 10. Electric tilting stage; 11. Lead plate; 12. Third shielding tube; 13. Power supply; 14. Test box; 15. Base; 16. Diaphragm pump; 17. Electrical testing instrument; 18.1. First base door; 18.2. Second base door; 19. Fourth shielding tube. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0023] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0024] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0025] In the description of the embodiments of the present invention, it should be noted that if terms such as "upper," "lower," "horizontal," or "inner" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of the invention is in use, they are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, terms such as "first" and "second" are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0026] Furthermore, the use of the term "horizontal" does not imply that the component must be absolutely horizontal, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0027] In the description of the embodiments of the present invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the present invention according to the specific circumstances.

[0028] The present invention will now be described in further detail with reference to the accompanying drawings: See Figure 1 The present invention discloses a controllable incident angle irradiation experimental device, which includes: an irradiation box 4, a lead plate 11, a base 15, a first shielding tube 7, a second shielding tube 8, a third shielding tube 12 and a fourth shielding tube 19. The irradiation chamber 4 houses a first linear stepper motor 1, a radiation source 2, a camera 3, a mounting base 5, a stage 6, a linear stepper motor 9, and an electric tilting stage 10. The entire irradiation chamber is established with the intersection of its bottom diagonals as the origin, forming a reference system. The X-axis is the horizontal direction of the horizontal plane, the Y-axis is the direction perpendicular to the X-axis, and the Z-axis is set perpendicular to both the X and Y axes. The center points of all components within the irradiation chamber lie on the Z-axis. The bottom of the base 15 houses a power supply 13, a test box 14, a diaphragm pump 16, and a testing instrument 17. A lead plate 11 is mounted on the top of the base 15. A first shielding tube 7, a second shielding tube 8, and a third shielding tube 12 connect the instruments inside the irradiation chamber 4 and the base 15 through openings in the lead plate 11. The lead plate 11 is a lead plate with a thickness of not less than 5 cm, fixedly installed at the bottom opening of the irradiation chamber 4, spatially separating the irradiation chamber 4 from the base 15. Multiple through holes are provided on the lead plate 11 according to the number and position of the shielding tubes for installing the first shielding tube 7, the second shielding tube 8, and the third shielding tube 12. The lead plate 11 can effectively absorb and block most of the radiation rays from inside the irradiation chamber 4, protecting the instruments and equipment inside the base 15 from radiation damage. The first shielding tube 7, the second shielding tube 8, the third shielding tube 12, and the fourth shielding tube 19 are all made of lead-boron polyethylene composite material. This material combines the high-density shielding properties of lead with the thermal neutron absorption capacity of boron, effectively shielding neutron irradiation and gamma-ray irradiation. The shielding tubes have a hollow tubular structure with smooth inner walls to facilitate the threading of wires. Sealed joints are provided at both ends to achieve a sealed connection with the inner walls of the irradiation chamber 4 and the base 15, preventing radiation leakage. The diameter and length of each shielding tube can be adjusted according to the equipment it connects to.

[0029] The first linear stepper motor 1 is installed at the center of the top of the irradiation box 4, parallel to the Y-axis, and is used to control the movement of the radiation source 2 and the camera 3 along the direction parallel to the Y-axis. The radiation source 2 is fixed at the bottom of the first linear stepper motor 1 and is used to apply different types of radiation to the sample under test. The camera 3 is fixed inside the square radiation shielding device and is rigidly connected to the radiation source 2 in the direction parallel to the Y-axis. It is used to photograph the ultra-thin silicon nitride-based pixel grid attached to the surface of the device under test and to calculate the incident angle by obtaining the displacement of the pixel grid.

[0030] The holder 5 is fixed in the center of the stage and is used to fix the packaged test sample. It is customized according to the test sample. The holder 5 is connected to the test box 14 inside the base 15 through the first shielding tube 7. The stage 6 is a flat plate structure with multiple evenly distributed micro-pores in the central area of ​​its upper surface. These pores are connected to the second shielding tube 8 through air passages inside the stage 6. A retainer 5 is detachably installed in the center of the stage 6. The retainer 5 is customized according to the specific packaging form of the sample to be tested and can be used to firmly fix the packaged sample by means of spring clamping, thread fixing, or vacuum adsorption. For unpackaged bare wafers or samples that do not require a retainer, they can be placed directly on the surface of the stage 6. The diaphragm pump 16 draws air out of the stage 6, creating negative pressure in the surface pores, and the sample is fixed by vacuum adsorption. This method is suitable for samples of different sizes and shapes and has the characteristics of high versatility.

[0031] The second linear stepper motor 9 is fixed directly below the stage 6 and directly above the planar electric tilting stage. It is used to change the height of the stage 6 in the Z-axis direction, i.e., the straight-line distance between the sample under test and the radiation source 2. The planar electric tilting stage 10 is fixed directly above the lead plate 11 and is used to change the tilt angle of the stage 6 in the ZoY plane. The lead plate 11 is used to minimize radiation damage to the instruments in the base 15, and a shielding tube connecting the irradiation chamber 4 and the base 15 is installed by opening holes at specific locations. The power supply 13 is connected to the test box 14 through the fourth shielding tube 19 and is used to provide a constant voltage to the device under test. The test box 14, housed within the base 15, integrates a signal conditioning circuit, a multiplexer, and an interface conversion module. The test box 14 is electrically connected to the sample under test on the holder 5 via a first shielding tube 7, and is used to apply voltage or a test signal to the sample during irradiation. The input terminal of the test box 14 is connected to a power supply 13 via a fourth shielding tube 19. The power supply 13 provides a stable DC voltage, which can be adjusted according to the requirements of the device under test. The diaphragm pump 16 is used to reduce the internal air pressure of the stage 6 and fix the sample under test.

[0032] The testing instrument 17, housed within the base 15, can be a semiconductor parameter analyzer, oscilloscope, impedance analyzer, or a dedicated testing system. The testing instrument 17 is connected to the test box 14 via a third shielding tube 12, or directly to the sample under test via the third shielding tube 12 as needed for the experiment. When the testing instrument 17 is connected to the test box 14, the test box 14 selects the corresponding test channel according to the instructions of the testing instrument 17, enabling the measurement of the electrical characteristics of different pins of the sample under test. When direct measurement of minute or high-frequency signals is required, the testing instrument 17 can be directly connected to the sample under test via the third shielding tube 12 to reduce signal loss and interference from intermediate links. For test scenarios where direct connection is not required, the third shielding tube 12 can be sealed with radiation shielding putty to prevent radiation leakage. The electrical testing instrument 17 can test the electrical characteristics of the sample under test by connecting to the test box 14. The base door includes a first base door 18.1 and a second base door 18.2, respectively located on the front and side of the base 15, and can be opened outwards using a hinged connection. The base door is equipped with a radiation sealing strip around its perimeter, ensuring the airtightness of the base 15 when closed. By opening the base door, operators can easily replace the testing instrument 17, adjust the connection method of the test box 14, or change the testing conditions, improving the maintainability of the equipment and the flexibility of the experiment.

[0033] The working principle of this invention is as follows: At the start of the experiment, the operator selects whether to use the card holder 5 based on the packaging form of the sample to be tested. If the card holder 5 is used, the packaged sample to be tested is installed on the card holder 5 and the card holder 5 is placed in the center of the stage 6; if the sample to be tested does not require the use of the card holder 5, the sample is placed directly on the surface of the stage 6 and the diaphragm pump 16 is started to extract the air inside the stage 6 through the first shielding tube 8, so that the pores on its surface generate negative pressure, thereby firmly adsorbing and fixing the sample.

[0034] Before conducting the irradiation experiment, the operator sets the motion parameters of the first linear stepper motor 1, the second linear stepper motor 9, and the electric tilting stage 10 according to the required radiation incident angle. The first linear stepper motor 1 drives the radiation source 2 to move horizontally along the Y-axis, adjusting the horizontal position of the radiation source 2 relative to the sample being tested; the electric tilting stage 10 drives the stage 6 to tilt in the ZoY plane, changing the tilt angle of the sample surface; the second linear stepper motor 9 drives the stage 6 to move up and down along the Z-axis, adjusting the linear distance between the sample and the radiation source 2. Through the coordinated movement of these three motors, the incident angle between the rays emitted by the radiation source 2 and the sample surface can be precisely controlled.

[0035] During the irradiation process, camera 3 moves synchronously with radiation source 2 to capture images of the markers pasted on the surface of the sample in real time. The displacement of the markers is obtained through image analysis, thereby calculating and verifying the actual radiation incident angle and ensuring the accuracy of the experimental conditions.

[0036] Meanwhile, the electrical testing instrument 17 is connected to the test box 14 via the third shielding tube 12, or directly to the sample under test via the third shielding tube 12. The test box 14 is connected to the sample under test via the second shielding tube 7, and is used to apply voltage or test signals to the sample under test during irradiation. The electrical testing instrument 17 acquires the electrical response data of the sample under test in real time, realizing the in-situ measurement of the electrical characteristics of the sample under test during irradiation.

[0037] A lead plate 11 is placed between the irradiation chamber 4 and the base 15 to shield the instruments and equipment inside the base 15 from radiation damage. Each of the first shielding tubes 7, the second shielding tube 8, and the third shielding tube 12 passes through the lead plate 11 and connects the irradiation chamber 4 and the base 15, providing a channel for connecting lines. They are made of lead-boron polyethylene composite material, which effectively shields against neutron or gamma-ray irradiation, ensuring that the transmitted signals are not interfered with and extending the service life of the equipment.

[0038] When it is necessary to replace the test instrument 17 or adjust the connection method, the operator can open the base door and enter the base 15 to perform the operation, meeting the ever-changing experimental needs.

[0039] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. An irradiation experimental apparatus with controllable incident angle, characterized in that, It includes an irradiation chamber (4), a lead plate (11), a base (15), and several shielding tubes; The irradiation chamber (4) is equipped with a radiation source (2), a stage (6) and a driving mechanism. The driving mechanism is connected to the radiation source (2) and the stage (6) respectively, and is used to drive the radiation source (2) and / or the stage (6) to move. An electrical testing instrument (17) is installed inside the base (15); the lead plate (11) is placed between the irradiation box (4) and the base (15), and the shielding tube passes through the lead plate (11) and connects the irradiation box (4) and the base (15) for the purpose of running connecting lines.

2. The irradiation experimental apparatus with controllable incident angle according to claim 1, characterized in that, The driving mechanism includes a first linear stepper motor (1), a second linear stepper motor (9), and an electric tilting stage (10); the first linear stepper motor (1) is located at the top inside the irradiation box (4), and the radiation source (2) is fixed at the bottom of the first linear stepper motor (1); The first linear stepper motor (1) drives the radiation source (2) to move horizontally; the electric tilting stage (10) is fixed above the lead plate (11); the second linear stepper motor (9) is fixed between the electric tilting stage (10) and the platform (6) to drive the platform (6) to rise and fall in the vertical direction; the electric tilting stage (10) is used to drive the platform (6) to rotate.

3. The irradiation experimental apparatus with controllable incident angle according to claim 1, characterized in that, A camera (3) is also installed inside the irradiation box (4). The camera (3) is fixed to the side of the radiation source (2) and rigidly connected to the radiation source (2).

4. The irradiation experimental apparatus with controllable incident angle according to claim 1, characterized in that, The surface of the stage (6) is provided with air holes, and the base (15) is provided with a diaphragm pump (16). The diaphragm pump (16) is connected to the air holes of the stage (6) through a shielding tube.

5. The irradiation experimental apparatus with controllable incident angle according to claim 1, characterized in that, The stage (6) is detachably mounted with a holder (5) for fixing the sample to be tested.

6. The irradiation experimental apparatus with controllable incident angle according to claim 1, characterized in that, The base (15) is also equipped with a test box (14); the card holder (5) and the test box (14) are connected by a shielding tube.

7. The irradiation experimental apparatus with controllable incident angle according to claim 6, characterized in that, The test box (14) and the electrical test instrument (17) are electrically connected through a shielding tube.

8. The irradiation experimental apparatus with controllable incident angle according to claim 6, characterized in that, The test box (14) is connected to the sample to be tested through a shielding tube.

9. The irradiation experimental apparatus with controllable incident angle according to claim 1, characterized in that, The shielding tube is a tubular structure made of lead-boron polyethylene composite material.

10. The irradiation experimental apparatus with controllable incident angle according to claim 1, characterized in that, The base (15) has an openable base door on its side.

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