Heating control method, device, temperature controller, semiconductor device and medium

Abstract

The application provides a heating control method and device, a temperature controller, a semiconductor device and a medium, and relates to the field of control. When there is a firmware upgrade requirement for a target temperature controller, a first temperature control program is started to control the working of a heating component, and then the firmware upgrade of the target temperature controller is performed. During the firmware upgrade of the target temperature controller, the heating component can perform heating work based on the first temperature control program, so that the temperature drop of a heating object is avoided. Before the first temperature control program is started, the current control parameters of the target temperature controller are determined. After the firmware upgrade of the target temperature controller is completed, the normal working control of the heating component is restored according to the pre-determined control parameters and a second temperature control program. Through the setting and starting of the first temperature control program, the temperature drop of the heating object is effectively avoided, so that the problem that the internal region of the semiconductor device and the like is polluted due to the temperature drop is prevented, the normal implementation of the CVD process is ensured, and the increase of the process implementation cost and the reduction of the efficiency are avoided.

Description

Technical Field

[0001] This application relates to the field of control, and in particular to a heating control method, apparatus, thermostat, semiconductor device and medium. Background Technology

[0002] For many semiconductor devices, such as CVD (Chemical Vapor Deposition) equipment, the process flow relies heavily on heating, a crucial step typically controlled by a temperature controller. Taking CVD equipment as an example, the CVD process, a common surface film deposition technology, requires initiating a gas-phase chemical reaction at a specific temperature to deposit high-performance thin films on substrates of various complex shapes. During the CVD process, reactant gases inevitably deposit chemical films inside the CVD equipment and within the substrate container, such as in areas like showerheads, Pedestals (cells), and pipelines. Therefore, temperature controllers are used to regulate the reaction temperature of the gas-phase chemical reaction during CVD to ensure accurate deposition of reactant gases in the target area (substrate surface) and avoid chemical film deposition in non-target areas. However, in practical applications, due to factors such as algorithm upgrades and the addition of new functions, temperature controllers may require firmware upgrades. During the firmware upgrade process, the temperature controller may malfunction, leading to a sudden drop in temperature inside the CVD equipment and near the substrate. This temperature drop can cause the deposited chemical film to peel off or generate microparticles, contaminating the chambers and pipelines inside the CVD equipment. This situation can severely affect the normal operation of the CVD process, and may necessitate cleaning of the showerhead, PED, or pipelines after the temperature drop, increasing process costs and impacting process efficiency. Therefore, how to prevent temperature drops in the heated object due to firmware upgrades or other reasons has become an urgent technical problem to be solved. Summary of the Invention

[0003] This application discloses a heating control method, device, temperature controller, semiconductor equipment, and medium, which are used to solve the technical problem that the heated object experiences temperature drop due to firmware upgrades or other reasons.

[0004] In a first aspect, this application provides a heating control method applied to a target temperature controller; comprising: When the target temperature controller receives a firmware upgrade command, the control parameters of the target temperature controller are determined; the control parameters include internal numerical instructions for implementing the heating strategy. The first temperature control program is activated to control the operation of the heating element; After the first temperature control program is started, the firmware to be upgraded in the target temperature controller is upgraded based on the firmware upgrade command; After the firmware upgrade is completed, the heating component is controlled based on the control parameters and the second temperature control program; the second temperature control program is the program in the firmware of the target temperature controller used for heating control.

[0005] When the target temperature controller receives a firmware upgrade command, it indicates that a firmware upgrade is required. To prevent temperature drops in the heated object due to the target temperature controller's inability to function during the firmware upgrade, the heating control method provided in this application is adopted. This involves temporarily taking over the operation control of the heating component by activating a backup first temperature control program, allowing the heating component to continue operating under the first temperature control program and thus preventing temperature drops. After the target temperature controller completes the firmware upgrade, it will resume normal operation control of the heating component based on the second temperature control program in the upgraded firmware, ensuring heating accuracy and control precision.

[0006] In one possible implementation, before performing a firmware upgrade on the firmware to be upgraded in the target thermostat based on the firmware upgrade command, the method further includes: Configure the target thermostat's preset status parameters to upgrade status; the upgrade status indicates that the target thermostat is undergoing a firmware upgrade. After the firmware upgrade is complete, it also includes: Restore the preset status parameters from the upgrade state to the default state; the default state is used to indicate that the target temperature controller has not undergone a firmware upgrade.

[0007] To facilitate real-time determination of the target temperature controller's operating status, this application identifies different operating states of the target temperature controller by configuring preset status parameters. When the target temperature controller is about to undergo a firmware upgrade, it is marked as being in an upgrade state; after the firmware upgrade is completed and the target temperature controller regains control of the heating element, it is marked as being in the default state. This achieves accurate characterization of the target temperature controller's operating status, enabling real-time determination of its operating status based on preset status parameters, and allowing for precise control of the entire heating process based on the real-time operating status.

[0008] In one possible implementation, the control parameters include the output control quantity from the target temperature controller to the heating element based on the second temperature control program; the first temperature control program is an open-loop control program; starting the first temperature control program to control the operation of the heating element includes: When the object being heated reaches a steady state, the open-loop control quantity of the open-loop control program is determined based on the output control quantity of the second temperature control program at the steady state; the heating component is used to heat the object being heated. The heating element is controlled by an open-loop control program to continuously heat according to the open-loop control quantity.

[0009] It is understandable that the backup first temperature control program can be an open-loop control program. When the target temperature controller performs normal operation control of the heating element based on the second temperature control program, the open-loop control quantity of the open-loop control program is predetermined. After the open-loop control program is started, the target temperature controller directly controls the heating element to execute the corresponding open-loop control quantity according to the predetermined fixed instruction of the open-loop control quantity to maintain heating, thereby avoiding the temperature drop of the heating element, with low resource consumption and high control efficiency.

[0010] In one possible implementation, the open-loop control quantity is the operating voltage and / or operating current of the heating element.

[0011] It is easy to understand that the operation of the heating element can be controlled by adjusting the operating voltage and / or operating current. The heating power of the heating element can be directly controlled by setting the operating voltage and / or operating current. The control logic is simple and easy to implement.

[0012] In one possible implementation, it also includes: Detect the temperature change of the heated object within a preset time period; When the temperature change is less than the preset value, the process jumps to the step of determining the open-loop control quantity of the open-loop control program based on the output control quantity of the second temperature control program in the steady state of control. If the temperature change is greater than or equal to the preset value, the process will jump back to the step of detecting the temperature change of the heated object within the preset time period.

[0013] It is understandable that the target temperature controller uses the temperature of the object being heated as the controlled variable. Therefore, it can determine whether the object being heated has reached a steady state by measuring the temperature change of the object within a preset time period. Based on the dynamic temperature change, it can achieve an objective quantitative judgment on whether the control is in a steady state, which can effectively avoid misjudgment. The accuracy and reliability of the entire judgment method are high, and it can be adapted to different application scenarios, making it highly versatile.

[0014] In one possible implementation, the first temperature control program is a program for heating control in the firmware of a backup temperature controller; activating the first temperature control program to control the heating component includes: Receive the target firmware corresponding to the firmware upgrade command; Based on the target firmware, upgrade the firmware to be upgraded in the backup temperature controller; The backup thermostat is restarted so that the backup thermostat, which has completed the firmware upgrade, controls the heating element to work based on the control parameters and the first temperature control program.

[0015] It is easy to understand that the first temperature control program can also be implemented using a backup temperature controller. When the target temperature controller needs a firmware upgrade, the backup temperature controller will take over the operation control of the heating element. At the same time, in order to ensure control accuracy, the target temperature controller will also control the backup temperature controller to perform a firmware upgrade first, so that the backup temperature controller can take over the operation control of the heating element based on the upgraded firmware and the latest program, thus minimizing the impact of the target temperature controller's firmware upgrade on the operation of the heating element.

[0016] In one possible implementation, after the firmware upgrade of the target temperature controller is completed, the following is also included: Send a synchronization command to the backup temperature controller; Receive the firmware of the backup temperature controller sent by the backup temperature controller; Check whether the firmware of the backup temperature controller is consistent with the firmware of the target temperature controller; If the firmware of the backup thermostat is inconsistent with that of the target thermostat, then the firmware of the backup thermostat will be updated based on the firmware of the target thermostat.

[0017] Understandably, in order to ensure a seamless switching between the target temperature controller and the backup temperature controller, after the firmware upgrade of the target temperature controller is completed, it will send a synchronization command to synchronize the firmware with the backup temperature controller, ensuring the consistency of the firmware in the target temperature controller and the backup temperature controller, thereby ensuring a seamless switching between the target temperature controller and the backup temperature controller and ensuring the consistency of the control logic before and after the switch.

[0018] In one possible implementation, the target temperature controller includes a backup storage module, and the first temperature control program is a temperature control program stored in the backup storage module; activating the first temperature control program to control the heating element to operate includes: Move the second temperature control program of the target temperature controller to the backup storage module; Run the temperature control program stored in the backup storage module to control the operation of the heating element based on the control parameters and the first temperature control program in the backup storage module.

[0019] It is easy to understand that the process of the first temperature control program taking over the operation control during the firmware upgrade can also be realized by pre-setting a backup storage module in the target temperature controller. By moving the second temperature control program of the target temperature controller to the backup storage module, when the temperature control program stored in the backup storage module is used as the first temperature control program, the same program can be used to continue to realize the operation control of the heating element, thereby minimizing the impact of the firmware upgrade of the target temperature controller on the operation of the heating element.

[0020] In one possible implementation, it also includes: Receive the target firmware corresponding to the firmware upgrade command; The target firmware is stored in the spare program area; the spare program area is used to store the spare firmware of the target temperature controller. The firmware upgrade is performed on the target temperature controller based on the firmware upgrade command, including: The target firmware is moved from the spare program area to the running program area; the running program area is configured to store the program that the target temperature controller is currently executing. The target firmware in the program area is launched to complete the firmware upgrade of the target thermostat.

[0021] It is understandable that after receiving the firmware upgrade command, the target firmware is received and stored in the backup program area. When the target temperature controller is upgraded, the firmware to be upgraded in the target temperature controller's running program area is directly overwritten by firmware transfer, thereby realizing firmware upgrade and improving the security, flexibility and anti-interference ability of firmware upgrade.

[0022] Secondly, this application provides a heating control device applied to a target temperature controller; comprising: The parameter determination unit is used to determine the control parameters of the target temperature controller when the target temperature controller receives a firmware upgrade command; the control parameters include internal numerical instructions for implementing the heating strategy. A backup program start-up unit is used to start the first temperature control program to control the operation of the heating component. The firmware upgrade unit is used to upgrade the firmware to be upgraded in the target temperature controller based on the firmware upgrade command after the first temperature control program is started. The recovery control unit is used to control the heating component based on control parameters and a second temperature control program after the firmware upgrade is completed; the second temperature control program is the program in the firmware of the target temperature controller used for heating control.

[0023] It is easy to understand that each unit in the above-mentioned heating control device can be implemented by software or by hardware, and both can achieve the technical effect of preventing the heated object from losing temperature.

[0024] Thirdly, this application provides a temperature controller, including a processor and a memory; wherein the memory is used to store a computer program, which is loaded and executed by the processor to implement the steps of the heating control method as described above.

[0025] It is understandable that, because the processor of the thermostat loads and executes the aforementioned heating control method, the thermostat can control the heating element to heat continuously through the cooperation of the first temperature control program and the second temperature control program, effectively ensuring that the heated object does not lose temperature.

[0026] Fourthly, this application provides a semiconductor device, including the aforementioned temperature controller.

[0027] The temperature controller provided in this application is installed in the semiconductor equipment, which can effectively ensure that the heated object does not drop in temperature. In particular, when the semiconductor equipment is a CVD equipment, the temperature controller provided in this application can effectively reduce or even avoid the peeling of the deposited chemical film or the generation of micro-particles, prevent the internal chambers and pipelines of the semiconductor equipment from being contaminated, ensure the normal implementation of the CVD process, and avoid the increase in process implementation costs and the reduction in efficiency.

[0028] Fifthly, this application provides a computer-readable storage medium storing a computer program that, when executed by a processor, implements the steps of the heating control method as described above.

[0029] Sixthly, this application provides a computer program product, including a computer program / instructions, which, when executed by a processor, implement the steps of the aforementioned heating control method.

[0030] It is understood that the heating control method provided in this application can be implemented by storing it in a computer-readable storage medium, which can also achieve the technical effect of preventing the heated object from cooling down. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 A schematic flowchart of a heating control method provided in an embodiment of this application; Figure 2 A schematic flowchart of another heating control method provided in an embodiment of this application; Figure 3 A schematic diagram illustrating the specific process of firmware upgrade for a target temperature controller provided in this application embodiment; Figure 4 A schematic diagram of another firmware upgrade process for a target temperature controller provided in this application embodiment; Figure 5 A schematic diagram illustrating the firmware upgrade process of another target temperature controller provided in this application embodiment; Figure 6 This is a schematic diagram of the structure of a heating control device provided in an embodiment of this application; Figure 7 This is a schematic diagram of the structure of a CVD device provided in an embodiment of this application. Detailed Implementation

[0033] This application provides a heating control method applicable to various heating scenarios to achieve continuous heating of the object being heated, ensuring no temperature drop and guaranteeing heating effectiveness. The entire heating control method can be integrated into various types of temperature-controlled controllers (hereinafter referred to as "temperature controllers"), such as SCR controllers (Silicon Controlled Rectifier Power Regulators), PID (Proportional-Integral-Derivative) controllers, and other types of temperature controllers. This allows the controller to control the operation of the heating element based on the heating control method, thereby achieving continuous heating of the object being heated. For example, this heating control method can be applied to CVD equipment to facilitate the CVD process. The substrate to be formed into a film is fixed in the reaction chamber of the CVD equipment, the target temperature controller is connected to the control terminal of the heating element, and the heating element is placed in the reaction chamber. The target temperature controller receives temperature feedback signals from the reaction chamber and uses closed-loop control to operate the heating components, ensuring the temperature in the reaction chamber reaches the set temperature. At this set temperature, the gaseous reactants in the reaction chamber undergo a gaseous chemical reaction, generating a thin film that is deposited on the substrate surface, thus achieving surface film formation on the substrate. By employing the heating control method provided in this application, the target temperature controller ensures that the temperature in the reaction chamber does not drop, thereby preventing the peeling of the deposited chemical film or the generation of microparticles caused by temperature drops. This also prevents contamination of the reaction chamber and the pipelines transporting the gaseous reactants within the CVD equipment, ensuring the normal operation of the CVD process.

[0034] See Figure 1 As shown, Figure 1 This is a schematic flowchart of a heating control method provided in an embodiment of this application; the heating control method includes: S11: When the target temperature controller receives a firmware upgrade command, the control parameters of the target temperature controller are determined; the control parameters include internal numerical instructions for implementing the heating strategy. S12: Start the first temperature control program to control the heating element to work; S13: After the first temperature control program starts, the firmware to be upgraded in the target temperature controller is upgraded based on the firmware upgrade command. S14: After the firmware upgrade is completed, the heating component is controlled to work based on the control parameters and the second temperature control program; the second temperature control program is the program in the firmware of the target temperature controller used for heating control.

[0035] It is easy to understand that during the heating process, the temperature controller may need to undergo firmware upgrades due to reasons such as algorithm upgrades or the addition of new functions. Firmware upgrades require the temperature controller to pause or terminate normal heating control and enter a dedicated upgrade mode. This results in the temperature controller being unable to properly control the heating element, affecting the heating control operation. To solve this technical problem, this application provides a heating control method for the temperature controller. During normal heating, the target temperature controller controls the heating element according to the second temperature control program in its own firmware. When the target temperature controller receives a firmware upgrade command and needs to perform a firmware upgrade, it will start another temperature control program (i.e., the aforementioned first temperature control program) to temporarily take over the heating control process of the second temperature control program, controlling the heating element through the first temperature control program. After the first temperature control program starts and takes over the heating control, the target temperature controller then performs a firmware upgrade based on the received firmware upgrade command. During the firmware upgrade process of the target temperature controller, the first temperature control program automatically controls the operation of the heating element to maintain the temperature of the heated object. After the firmware upgrade is completed, the target temperature controller can resume normal operation and re-run the second temperature control program to quickly restore the temperature control state before the firmware upgrade, thereby quickly restoring normal operation control of the heating element and ensuring the temperature stability of the heated object to the greatest extent. The heating control method provided in this application is implemented by the target temperature controller, which can be any type of temperature controller in any application scenario. For example, the target temperature controller can be a temperature controller in a CVD device.

[0036] In one implementation, to ensure that the target temperature controller can quickly resume control of the heating element after the firmware upgrade is completed, the method further includes saving the determined control parameters before step S12. After the firmware upgrade is completed, the target temperature controller executes step S14, allowing it to directly initialize control based on the determined and saved control parameters. This enables it to start directly from the historical temperature control state before the firmware upgrade, allowing the heating element to quickly recover to the heating power before the upgrade without restarting the heating control from the initial state. This avoids large temperature fluctuations or long-term deviations from the process temperature window caused by resetting control parameters, significantly shortening the control recovery time and reducing power surges in the heating element. This application does not specifically limit the specific timing and method of determining the control parameters. It is sufficient to determine the control parameters at a certain point before the first temperature control program starts. For example, the control parameters at the latest moment before the first temperature control program starts can be determined. There are also multiple options for determining the control parameters. For example, the configuration variables and / or status variables of the currently running second temperature control program can be directly read.

[0037] It should be noted that this application does not specifically limit the specific types and implementation methods of control parameters. Control parameters refer to a series of core variables that need to be set and adjusted to enable the heated object to reach and maintain a set temperature. They are internal numerical instructions in the heating strategy set to meet the heating goal of achieving and maintaining the set temperature, and contain the key values ​​calculated by all parameter control logic. Control parameters include configuration parameters and output control quantities. Configuration parameters refer to static parameters that are pre-set in the temperature controller and remain basically unchanged during operation. State parameters specifically include: set parameters such as set temperature, process control parameters such as PID control parameters, and control strategies such as control algorithm type and control cycle. Generally, state parameters remain fixed during the same heating process. The output control quantity refers to the command value output by the temperature controller after logical calculation and sent to the heating element. It directly affects the heating power of the heating element. For example, when the heating power of the heating element is controlled by a frequency converter, the output control quantity can be specifically represented as the frequency command output to the frequency converter; when the heating power of the heating element is adjusted by controlling the on / off time of a relay, the output control quantity can be specifically represented as the duty cycle command of the switching signal output to the relay. During the heating process, the output control quantity generally changes with the real-time temperature of the heated object. The real-time temperature of the heated object refers to the instantaneous temperature value of the heated object actually measured by a temperature detection element (such as a temperature sensor) at the current moment. Temperature drop of the heated object refers to an unexpected and significant decrease in the real-time temperature of the heated object. When the real-time temperature of the heated object is lower than the set temperature, the output control quantity needs to control the heating power of the heating element to increase; when the real-time temperature of the heated object is higher than the set temperature, the output control quantity needs to control the heating power of the heating element to decrease. This application does not impose any special limitations on the determination and storage methods of control parameters. Considering that the target temperature controller generally needs to be restarted to run the new firmware during firmware upgrade, for example, a non-volatile memory can be specially set in the target temperature controller to store the control parameters determined before the firmware upgrade, so as to ensure that the control parameters are not lost due to the firmware upgrade operation.

[0038] After executing step S12, the heating element is controlled by the activated first temperature control program, without the need for continuous control by the target temperature controller's firmware. Therefore, during the target temperature controller's firmware upgrade process, the automatically running first temperature control program effectively and continuously controls the heating element, ensuring the heated object does not lose temperature. This application does not specifically limit the type or implementation method of the first temperature control program. The first temperature control program only needs to maintain the heated object's temperature during the target temperature controller's firmware upgrade process; it can be implemented using a coarse open-loop control method, and the heating control accuracy requirement can be lower than that of the second temperature control program. This application does not specifically limit the specific activation method of the first temperature control program; it can be implemented by setting specific codes in the target temperature controller. This application does not specifically limit the specific types and implementation methods of the target temperature controller, heating element, and heated object. The heating element refers to a device that directly converts electrical energy, chemical energy, or other forms of energy into heat energy, and can be implemented using various heating elements such as electric heating tubes or resistance wires. This application does not specifically limit the specific implementation method and source of the firmware upgrade command. The entire heating control method is implemented by the target temperature controller. Continuous heating control of the object is achieved by switching between the backup first temperature control program configured in the target temperature controller and the second temperature control program inherent in the target temperature controller firmware. This heating control method can be implemented by configuring corresponding code control in the target temperature controller, specifically through the MCU (Microcontroller Unit) in the target temperature controller.

[0039] It is understandable that during this heating control process, due to firmware upgrades of the target temperature controller, the second temperature control program may change before and after the firmware upgrade. Before the firmware upgrade, i.e., when determining the control parameters, the target temperature controller uses the original firmware's program for heating control as the second temperature control program. After the firmware upgrade is completed, when the target temperature controller resumes operation control of the heating element, the target temperature controller uses the upgraded firmware's program for heating control as the second temperature control program. The firmware to be upgraded in step S13 refers to the original firmware in the target temperature controller before the firmware upgrade. This application does not specifically limit the specific type and implementation method of the second temperature control program. For example, both the second temperature control program before and after the firmware upgrade will use the temperature feedback signal of the heated object to perform closed-loop control of the heating element's operation. Firmware refers to the software program embedded inside the hardware device (the temperature controller in this application) that directly controls and manages the operation of the hardware device.

[0040] This application provides a heating control method applied in a target temperature controller. When the target temperature controller requires a firmware upgrade, a backup first temperature control program is first activated to take over the operation control of the heating element, allowing the heating element to continue working under the action of the first temperature control program, thereby preventing temperature drop in the heated object. Then, the firmware upgrade operation of the target temperature controller is performed. After the target temperature controller completes the firmware upgrade, it will restore normal operation control of the heating element based on the second temperature control program in the upgraded firmware, ensuring heating accuracy and control precision. Maintaining the temperature of the heated object during the firmware upgrade ensures that the heated object will not experience temperature drop before, during, or after the firmware upgrade, minimizing temperature fluctuations, maintaining continuous thermal conditions, improving heating stability and reliability, and preventing frequent start-stop of the heating element, thus extending its lifespan.

[0041] the following Figures 2-5 The illustrated embodiment is based on Figure 1 The above is a further description of the heating control method provided in this application based on the illustrated embodiments. Figure 1 The content already described in the illustrated embodiments will not be repeated.

[0042] See Figure 2 As shown, Figure 2 A flowchart illustrating another heating control method provided in this application embodiment; in one possible implementation, before performing a firmware upgrade on the firmware to be upgraded in the target thermostat based on a firmware upgrade command, the heating control method further includes: S15: Configure the preset status parameters of the target thermostat to upgrade status; the upgrade status indicates that the target thermostat is undergoing a firmware upgrade. After the firmware upgrade is complete, it also includes: S16: Restore the preset status parameters from the upgrade state to the default state; the default state is used to indicate that the target temperature controller has not undergone firmware upgrade.

[0043] In one implementation, to facilitate the determination and recording of the target temperature controller's status, a preset status parameter can be configured in the target temperature controller to specifically mark whether or not the target temperature controller is undergoing a firmware upgrade. The preset status parameter has two states: upgrade state and default state. The upgrade state indicates that the target temperature controller is undergoing a firmware upgrade; the default state indicates that the target temperature controller is not undergoing a firmware upgrade, and the target temperature controller can perform normal control of the heating element to achieve normal temperature control. In actual operation, after the first temperature control program starts, before performing a firmware upgrade based on the firmware upgrade command, the target temperature controller configures the preset status parameter to the upgrade state, and then begins the firmware upgrade based on the firmware upgrade command. After the firmware upgrade is complete, the preset status parameter can be switched from the upgrade state to the default state, thereby accurately marking the target temperature controller during the firmware upgrade stage.

[0044] It should be noted that restoring the preset state parameters from the upgraded state to the default state can be done after the firmware upgrade is completed and before the heating element is controlled to operate based on the control parameters and the second temperature control program, or it can be done after the heating element is controlled to operate based on the control parameters and the second temperature control program. This application does not impose any particular limitation on the specific timing of the state switch. This application also does not impose any particular limitation on the specific implementation method of the preset state parameters; various methods can be used to configure the upgrade state and the default state parameter states. For example, the configuration of the upgrade state and the default state parameter states can be achieved by distinguishing between 0 and 1.

[0045] In this embodiment, by configuring the preset status parameter flag, the upgrade status of the target temperature controller can be effectively recorded and restored. At the same time, it can provide a time basis for determining control parameters, ensuring that the control parameters are determined and saved in the default state before the firmware upgrade, so as to achieve accurate characterization of the working status of the target temperature controller. This allows operators to determine the working status of the target temperature controller in real time through the preset status parameter and clarify the implementation of the heating control process.

[0046] In one possible implementation, the control parameters include the output control quantity from the target temperature controller to the heating element based on the second temperature control program; the first temperature control program is an open-loop control program; starting the first temperature control program to control the operation of the heating element includes: When the object being heated reaches a steady state, the open-loop control quantity of the open-loop control program is determined based on the output control quantity of the second temperature control program in the steady state. The heating component is used to heat the object being heated. The steady state refers to the state in which the object being heated reaches a steady state, that is, the deviation between the actual temperature of the object being heated and the set temperature reaches and is maintained within an allowable and as small a range as possible. Specifically, the temperature of the object being heated does not change drastically, and the output control quantity of the target temperature controller is within a certain balance range.

[0047] The heating element is controlled by an open-loop control program to continuously heat according to the open-loop control quantity.

[0048] In one implementation, the first temperature control program can be implemented using an open-loop control program. To avoid excessive temperature fluctuations in the heated object during heating control, the open-loop control quantity can be determined by the output control quantity corresponding to the heated object reaching a steady state during the second temperature control program's operation on the target temperature controller. The open-loop control program can directly control the heating component based on the determined open-loop control quantity. Once the open-loop control quantity is configured, the program can run automatically, controlling the heating component to continuously heat according to the open-loop control quantity. This allows it to operate independently of the target temperature controller's continuous control, enabling firmware upgrades on the target temperature controller. Continuous heating according to the open-loop control quantity means the heating component operates continuously at the steady-state heating power corresponding to the fixed open-loop control quantity until the firmware upgrade is complete. After the target temperature controller takes over temperature control using the second temperature control program, it actively stops the first temperature control program.

[0049] It should be noted that the open-loop control quantity can be directly reused from the output control quantity of the second temperature control program in the steady state, or it can be obtained by fine-tuning the output control quantity of the second temperature control program in the steady state. For example, to ensure safety, the output control quantity of the second temperature control program in the steady state can be reduced by a preset control quantity to obtain the open-loop control quantity. When the heated object has not yet reached the steady state, the temperature fluctuation of the heated object is still relatively large, and the temperature control is not yet stable. At this time, the output control quantity will cause fluctuations in the heating power of the heating component, making it impossible to form a stable temperature. Therefore, only the output control quantity determined when the heated object reaches the steady state is the effective open-loop control quantity. This application does not make any special limitations on the specific method of determining the steady state. It can be determined by various methods such as the temperature of the heated object and the change of the output control quantity of the target temperature controller. For example, the output control quantity of the target temperature controller is basically stable, or the change of the output control quantity fluctuates within a fixed range. This application does not make any special limitations on the specific determination and implementation method of the output control quantity.

[0050] As one specific embodiment, see Figure 3 As shown, Figure 3 A schematic diagram illustrating the specific process of firmware upgrade for a target temperature controller provided in this application embodiment; Figure 3 The first temperature control program shown is implemented using an open-loop control program, based on... Figure 2 The heating control method shown illustrates the entire firmware upgrade process of the target temperature controller to maintain the temperature of the heated object during the firmware upgrade. The steps of the entire firmware upgrade are as follows: Figure 3 As shown. Specifically, before performing a firmware upgrade, the target firmware required for the upgrade needs to be obtained first. Therefore, steps S101 and S102 are executed first. When the target temperature controller needs a firmware upgrade, the host computer sends a firmware upgrade command to the target temperature controller. The firmware upgrade command is implemented using a data packet containing the target firmware. Therefore, after the host computer sends the firmware upgrade command, the target temperature controller can receive the target firmware by executing step S101 through packet transmission. Packet transmission refers to the data packet containing the target firmware sent by the host computer. Then, the target temperature controller first executes step S102 to store the received target firmware in the spare program area for use in subsequent firmware upgrades.

[0051] To ensure the authenticity, integrity, and timeliness of the target firmware, the target temperature controller can also choose to perform firmware verification in step S103, checking whether the target firmware is complete, verifying the legality of the firmware source, and checking whether the version number in the firmware header information is correct. After the target firmware is received and verified, the target temperature controller can begin to intervene in the heating control method provided in this application to perform the formal firmware upgrade process. The target temperature controller first performs the above-mentioned step S11 to determine and record the control parameters of the target temperature controller. To ensure the timeliness of the control parameters, the control parameters of the current temperature controller corresponding to the current moment when the formal firmware upgrade begins are used as the control parameters of the target temperature controller determined before the firmware upgrade. Then the target temperature controller performs the above-mentioned step S15 to configure the upgrade status, which can be achieved by setting a specific upgrade status flag as shown in step S151. After the upgrade status flag is set, the target temperature controller can perform the above-mentioned step S12 to control the first temperature control program to take over the heating control. In one embodiment, such as Figure 3As shown, the first temperature control program is specifically implemented using an open-loop control program. Step S12 specifically includes steps S1211, S1212, S1213, and S1214. The target temperature controller reads the real-time temperature of the object being heated in step S1212 and executes step S1213 to perform steady-state detection of the controlled steady state of the object based on the read real-time temperature. When the object reaches the controlled steady state, step S1214 is executed to determine and update the open-loop control quantity of the open-loop control program. This ensures that when the target temperature controller needs the open-loop control program to take over the heating control, it can directly execute step S1212 based on the updated open-loop control quantity in step S1214, directly set the open-loop control quantity of the open-loop control program based on the updated open-loop control quantity in step S1214, and start the open-loop control program, thereby controlling the heating component to continuously heat according to the set open-loop control quantity.

[0052] After executing step S1212, where the open-loop control program takes over the heating control, the target temperature controller can begin executing step S13 to upgrade the firmware. Step S13 specifically includes... Figure 3 Steps S131 and S132, as shown, first move the target firmware from the spare program area to the running program area, then restart the target temperature controller and start the target firmware that was moved to the running program area, thereby completing the firmware upgrade. Finally, the target temperature controller executes step S14 to restore normal operation control of the heating element. Step S14 specifically includes... Figure 3 As shown in steps S141 and S142, the target temperature controller can restore the relevant parameters for controlling the heating element (specifically, each control parameter) based on the control parameters recorded in step S11. Then, it releases the open-loop control program, stopping the open-loop control program from controlling the heating element. The target temperature controller then restores normal operation control of the heating element based on the second temperature control program and relevant parameters in the current target firmware. Finally, the target temperature controller executes step S16 to restore the default state, which can be achieved by executing step S161, directly clearing the upgrade status flag set in step S151.

[0053] It should be noted that the control parameters can be determined immediately after the target firmware is stored in the backup program area, or they can be determined and saved when the open-loop control quantity of the output is determined in the steady state of control. This is not limited to the determination of the control parameters during operation. Figure 3The illustrated process sequence is as follows. The target firmware refers to the new firmware intended to replace the existing firmware in the target temperature controller. The target temperature controller internally includes a backup program area and a running program area. The running program area is the storage region where the main program currently being executed by the target temperature controller is located. The target temperature controller achieves normal heating control by running the code in the firmware located in the running program area. The backup program area is an area used to store backup firmware; the firmware here is not executed during normal operation of the target temperature controller. Storing the target firmware in the backup program area first will not affect the normal operation of the target temperature controller. The target temperature controller can effectively start the first temperature control program and can perform normal temperature control based on the second temperature control program of the original firmware before the firmware relocation operation.

[0054] It should be noted that the operation of the open-loop control program requires the determination and setting of the open-loop control variables. Therefore, a separate process for determining the open-loop control variables can be set up, such as... Figure 3 As shown in steps S1212, S1213, and S1214, the determination of control steady state is achieved through a separately embedded steady-state detection process. Figure 3 As shown, the target temperature controller executes step S1212 to read the temperature of the object being heated, and then checks whether a steady-state control has been reached based on the temperature of the object being heated. If a steady-state control has not been reached, the temperature reading and steady-state detection are repeated. If a steady-state control has been reached, the output control quantity of the target temperature controller at the current moment is used as the latest open-loop control quantity. The entire process of determining the open-loop control quantity can be repeated cyclically. A specific storage location is set in the target temperature controller to save the latest open-loop control quantity. Each time the object being heated is detected to have reached a steady-state control, the open-loop control quantity is updated based on the latest output control quantity corresponding to the moment the steady-state control is reached, ensuring that the open-loop control quantity set when the open-loop control program is started is the output control quantity corresponding to the latest steady-state control. During the continuous heating control process based on the second temperature control program, the target temperature controller can collect and save the output control quantity of the second temperature control program output to the heating component at fixed time intervals. This point-recording process accurately determines the latest output control quantity corresponding to the moment the steady-state control is reached. The steady-state detection process can be implemented using various custom steady-state detection algorithms to ensure that accurate and effective open-loop control quantities can be obtained.

[0055] In this embodiment, an open-loop control program is used to control the heating output of the heating component with a fixed steady-state heating power, thereby avoiding temperature drop caused by heating interruption and achieving heat preservation of the heated object. The target temperature controller can directly drive the open-loop control program to start, which is simple, effective, and easy to implement. The open-loop control program provides power control support for the heating component by fixing the continuous output of the open-loop control program. The open-loop control quantity is determined by controlling the output control quantity determined in steady state, ensuring that the temperature fluctuation of the heated object is small during the heating control process of the open-loop control program, and keeping the temperature of the heated object as stable as possible.

[0056] In one possible implementation, the open-loop control quantity is the operating voltage and / or operating current of the heating element.

[0057] It is easy to understand that the open-loop control quantity, which is the output control quantity when the heated object reaches a steady state, can be any control quantity that can directly affect the heating power of the heating element. Specifically, the open-loop control quantity can be the operating voltage and / or operating current of the heating element, or the heating power of the heating element, etc., which are not specifically limited in this application.

[0058] In this embodiment, the open-loop control program can adjust the heating power of the heating element by outputting the operating voltage and / or operating current, thereby achieving heating control of the heating element by setting the operating voltage and / or operating current of the heating element. The control logic is simple and easy to implement.

[0059] In one possible implementation, the heating control method further includes: Detect the temperature change of the heated object within a preset time period; When the temperature change is less than the preset value, the process jumps to the step of determining the open-loop control quantity of the open-loop control program based on the output control quantity of the second temperature control program in the steady state of control. If the temperature change is greater than or equal to the preset value, the process will jump back to the step of detecting the temperature change of the heated object within the preset time period.

[0060] Specifically, in one example, a process for determining the steady-state temperature value can be added to the heating control method. This involves detecting the temperature of the heated object to achieve steady-state control. Figure 3As shown in steps S1212, S1213, and S1214. When the heated object reaches a steady-state, its temperature will not change drastically. Therefore, the detection and judgment of the steady-state can be quantified by detecting the temperature change of the heated object within a preset time period. If the temperature change is less than the preset value, it indicates that the heated object has reached a steady-state. At this time, the output control quantity corresponding to the steady-state can be determined, thereby determining the open-loop control quantity. If the temperature change is greater than or equal to the preset value, it indicates that the heated object has not reached a steady-state. Temperature detection and judgment of the steady-state need to be repeated until the heated object reaches a steady-state. The specific implementation method of the preset time period and preset value is not particularly limited here, and can be set according to the actual control accuracy of the target temperature controller.

[0061] In this implementation, temperature detection is used to determine the steady state of control, thereby accurately determining whether the open-loop control is effective. The objective quantitative determination of whether the control is in a steady state is achieved based on dynamic temperature changes, which can effectively avoid misjudgment. The entire judgment method has high accuracy and reliability and can be adapted to different application scenarios, making it highly versatile.

[0062] In one possible implementation, the first temperature control program is a program for heating control in the firmware of a backup temperature controller; activating the first temperature control program to control the heating component includes: Receive the target firmware corresponding to the firmware upgrade command; Based on the target firmware, upgrade the firmware to be upgraded in the backup temperature controller; The backup thermostat is restarted so that the backup thermostat, which has completed the firmware upgrade, controls the heating element to work based on the control parameters and the first temperature control program.

[0063] This implementation uses a primary / backup operation scheme to implement the first temperature control program. Specifically, a backup temperature controller can be pre-set for the target temperature controller, with the target and backup temperature controllers acting as each other's primary and backups. In this embodiment, the backup temperature controller is used as a backup for the target temperature controller. The first temperature control program is implemented through the heating control program in the backup temperature controller's firmware. When the target temperature controller needs a firmware upgrade, the backup temperature controller takes over the operation control of the heating element. To further ensure the stability and heating performance when the backup temperature controller takes over temperature control, before the backup temperature controller takes over, the target temperature controller can instruct the backup temperature controller to perform a firmware upgrade based on the received target firmware. The backup temperature controller is then restarted to run the latest target firmware. After the firmware upgrade, the backup temperature controller uses the program in the new firmware as the first temperature control program to take over the temperature control of the target temperature controller. Simultaneously, to improve the continuity of heating control and avoid excessive temperature fluctuations, the backup temperature controller uses the control parameters determined before the target temperature controller's firmware upgrade to control the heating element. In particular, when the backup temperature controller is implemented using the same type of temperature controller as the target temperature controller, the backup temperature controller can directly use the control parameter as the initial state when controlling the heating component, avoiding large temperature fluctuations or long-term deviations from the process temperature window caused by resetting the control parameter.

[0064] It should be noted that this application does not impose any special limitations on the specific type and implementation method of the backup temperature controller. For example, a temperature controller of the same type as the target temperature controller can be used. This application also does not impose any special limitations on the specific transmission method of the target firmware. It can be implemented by transmitting the target firmware as a data packet, or by other methods. This application also does not impose any special limitations on the specific method by which the backup temperature controller obtains control parameters. The firmware to be upgraded in the backup temperature controller refers to the original firmware in the backup temperature controller before the firmware upgrade. Specifically, the target temperature controller sends an indication signal to the backup temperature controller informing it that a firmware upgrade is needed, and simultaneously sends the target firmware to the backup temperature controller. The backup temperature controller will then automatically complete its own firmware upgrade operation. Similarly, the restart of the backup temperature controller can be achieved by the target temperature controller sending a restart signal to instruct the backup temperature controller to restart, or it can be implemented automatically by the backup temperature controller itself.

[0065] As one specific implementation method, see Figure 4 As shown, Figure 4 A schematic diagram of another firmware upgrade process for a target temperature controller provided in this application embodiment; Figure 4The diagram shows the entire firmware upgrade process when the firmware in the backup temperature controller is used to implement the first temperature control program; step S12 specifically includes steps S1221, S1222, and S1223. Considering that the firmware upgrade of the backup temperature controller requires a certain amount of time, in order to ensure the timeliness of the control parameters, such as... Figure 4 As shown, step S1221 can be executed first to control the backup temperature controller to perform a firmware upgrade, and then step S11 can be executed to determine and record the control parameters of the target temperature controller. Next, step S1222 can be executed to control the backup temperature controller to restart, so that the backup temperature controller starts using the target firmware after the firmware upgrade, thereby completing the entire firmware upgrade process of the backup temperature controller. The backup temperature controller can then execute step S1223 to take over the operation control of the heating element based on the temperature control program in the backup temperature controller after the firmware upgrade (i.e., the first temperature control program corresponding to this embodiment) and the control parameters of the target temperature controller recorded in step S11. At this time, the backup temperature controller has taken over the operation control of the heating element, so the target temperature controller can execute step S13 to perform a firmware upgrade, and can subsequently execute step S14 to restore the operation control of the heating element. Since the backup temperature controller will also use the latest temperature control program in the target firmware as the first temperature control program to control the heating element, the backup temperature controller can also continuously control the operation of the heating element. The backup and target temperature controllers take turns controlling the heating element when the other requires a firmware upgrade, ensuring continuous heating. Step S11 only needs to be executed before steps S12 and S13, and is not limited to... Figure 4 The process sequence is shown. Before step S1223, both the target temperature controller and the standby temperature controller can execute. Figure 3 Steps S101, S102, and S103 are used to receive and verify the target firmware. Similarly, the configuration of the upgrade state or the restoration of the default state corresponding to steps S151 and S161 can be performed. In this embodiment, the first temperature control program can be implemented through a hardware design that sets up a backup temperature controller for the target temperature controller. When the target temperature controller needs a firmware upgrade, the backup temperature controller is first instructed to perform the firmware upgrade. Then, the backup temperature controller, after completing the firmware upgrade, takes over the temperature control. The backup temperature controller uses the latest target firmware and the control parameters determined before the target temperature controller's firmware upgrade to take over the temperature control, minimizing the impact of the target temperature controller's firmware upgrade on the operation of the heating element and ensuring the continuity of heating control.

[0066] In one possible implementation, after the firmware upgrade of the target temperature controller is completed, the following is also included: Send a synchronization command to the backup temperature controller; Receive the firmware of the backup temperature controller sent by the backup temperature controller; Check whether the firmware of the backup temperature controller is consistent with the firmware of the target temperature controller; If the firmware of the backup thermostat is inconsistent with that of the target thermostat, then the firmware of the backup thermostat will be updated based on the firmware of the target thermostat.

[0067] Specifically, to avoid incompatibility issues when the target and backup thermostats switch control of the heating element, firmware synchronization is required between them. This synchronization can be performed after the target thermostat's firmware upgrade is complete. This embodiment describes one method for firmware synchronization between the target and backup thermostats, taking the target thermostat as the initiator. In practical applications, there are multiple options for implementing firmware synchronization between the target and backup thermostats, and this application does not impose any particular limitations. It can be initiated by the backup thermostat, or the firmware of the target thermostat can be updated based on the backup thermostat's firmware when there is a firmware inconsistency. If the firmware of the backup thermostat is consistent with that of the target thermostat, then the firmware synchronization between the backup and target thermostats is successful. This application does not impose any particular limitations on the specific methods for checking firmware consistency; it can be achieved by directly comparing code consistency. This application also does not impose any particular limitations on the specific type and implementation method of the synchronization command. In practical applications, the normal temperature control of the target temperature controller can be restored only after the firmware of the backup temperature controller and the target temperature controller are successfully synchronized.

[0068] As a specific embodiment, such as Figure 4 As shown, after the target temperature controller completes the firmware upgrade, the target temperature controller and the backup temperature controller can perform step S17 to synchronize the firmware. The firmware synchronization process is as described in this embodiment. If the firmware of the backup temperature controller is consistent with the firmware of the target temperature controller, it means that the firmware synchronization is successful. After the firmware synchronization is successful, the firmware upgrade can be ended.

[0069] In this implementation, after the firmware upgrade of the target temperature controller is completed, a synchronization command is sent to synchronize the firmware with the backup temperature controller, ensuring the firmware consistency between the target and backup temperature controllers. This ensures that the firmware versions of the target and backup temperature controllers are consistent and their functions are completely equivalent, providing reliable software support for seamless switching between the target and backup temperature controllers. It also avoids problems such as temperature control switching failures due to version differences, ensuring the consistency of control logic before and after the switch.

[0070] In one possible implementation, the target temperature controller includes a backup storage module, and the first temperature control program is a temperature control program stored in the backup storage module; activating the first temperature control program to control the heating element to operate includes: Move the second temperature control program of the target temperature controller to the backup storage module; Run the temperature control program stored in the backup storage module to control the operation of the heating element based on the control parameters and the first temperature control program in the backup storage module.

[0071] Specifically, in one example, by configuring an additional independent backup storage module in the target thermostat, the program stored in the backup storage module is used as the first temperature control program to temporarily take over the temperature control. To ensure continuous heating control and avoid excessive temperature fluctuations, the program stored in the backup storage module is implemented by transferring the target thermostat's second temperature control program to the backup storage module. At this point, the target thermostat has not yet undergone a firmware upgrade; therefore, the original firmware of the target thermostat is transferred and stored in the backup storage module. The backup storage module can take over the operation control of the heating element based on the original firmware and recorded control parameters, closely approximating the temperature control state of the target thermostat when it was normally controlling the heating element based on the original firmware before the firmware upgrade.

[0072] It should be noted that the target temperature controller needs to configure its memory according to the capacity of the backup storage module. The memory of the target temperature controller needs to be greater than the capacity of the backup storage module. This application does not make any special restrictions on the specific type and implementation method of the backup storage module, which can be implemented using RAM (Random Access Memory) or other methods. During the entire heating control process, the target temperature controller only needs to switch temperature control by running code in different areas. When no firmware upgrade is required, the second temperature control program in the running program area is run to achieve temperature control; when the firmware is upgraded, it jumps to the program stored in the backup storage module and runs the second temperature control program in the backup storage module to achieve temperature control; temperature control switching is achieved directly by jumping to the program. In practical applications, the second temperature control program of the target temperature controller can be moved to the backup storage module in advance, or it can be moved when the target temperature controller needs a firmware upgrade, etc. This application does not make any special restrictions.

[0073] As one specific embodiment, see Figure 5 As shown, Figure 5 This is a schematic diagram of another firmware upgrade process for a target temperature controller provided in an embodiment of this application. Figure 5The diagram illustrates the firmware upgrade process when the temperature control program stored in the backup storage module is used as the first temperature control program. Taking RAM as an example, the target temperature controller first executes steps S101, S102, and S103 to receive and verify the target firmware. Then, step S11 is executed to determine and record the control parameters of the target temperature controller. Next, step S12 is executed to start the first temperature control program and take over the operation control of the heating element. Step S12 specifically includes steps S1231, S1232, and S1233. First, step S1231 is executed to move the second temperature control program from the target temperature controller firmware to the RAM area. Then, step S1232 is executed to run the code moved to the RAM area. Since the code being run is the original second temperature control program in the target temperature controller, this code can control the heating element based on the control parameters recorded in step S11. Therefore, step S1233 is executed to take over the operation control of the heating element based on the control parameters recorded in step S11 and the code currently running in the RAM area.

[0074] After the RAM region takes over the operation control of the heating element, the target temperature controller can continue to execute step S13 to upgrade the firmware. Step S13 specifically includes steps S131, S133, S134, and S135. Since the RAM region is also located in the target temperature controller, in this embodiment, the process of the first temperature control program taking over is only different in the region of the currently running code. The firmware upgrade of the target temperature controller only requires executing step S134 to jump to the program. Through this jump, step S135 jumps the currently running code from the RAM region to the running program region, starting the execution of the second temperature control program in the running program region (at this time, the second temperature control program has been changed to the program used for heating control in the upgraded firmware), thereby starting the target firmware. To ensure the continuity of heating control when the target temperature controller resumes operation control of the heating element, the target temperature controller will also execute step S133 to determine and record the control parameters during the execution of the code in the RAM region. Step S133 only needs to be executed before step S143 and is not limited to this step. Figure 5 The process sequence is shown below. Finally, the target temperature controller executes step S14 to restore normal control of the heating element. Considering that the second temperature control program in the RAM area is actually the program used for heating control in the original firmware of the target temperature controller, and the control parameters of the second temperature control program in the RAM area are the latest control parameters, and are consistent with the control logic before the target temperature controller firmware upgrade, the normal control of the heating element can also be restored quickly based on the control parameters recorded during the operation of the second temperature control program in the RAM area. At this time, step S14 specifically involves... Figure 5Step S143, as shown, requires restoring normal control of the heating component based on the control parameters recorded during code runtime in the RAM area. This ensures heating continuity to the greatest extent possible and avoids resetting the control parameters.

[0075] In this embodiment, a backup storage module is pre-set in the target temperature controller, and the first temperature control program is implemented using the program stored in the backup storage module. By moving the second temperature control program of the target temperature controller to the backup storage module, when the temperature control program stored in the backup storage module is used as the first temperature control program, the same program can be used to continue to control the operation of the heating element, thereby minimizing the impact of firmware upgrades on the operation of the heating element and ensuring the continuity of heating control.

[0076] In one possible implementation, the heating control method further includes: Receive the target firmware corresponding to the firmware upgrade command; The target firmware is stored in the spare program area; the spare program area is used to store the spare firmware of the target temperature controller. The firmware upgrade is performed on the target temperature controller based on the firmware upgrade command, including: The target firmware is moved from the spare program area to the running program area; the running program area is configured to store the program that the target temperature controller is currently executing. The target firmware in the program area is launched to complete the firmware upgrade of the target thermostat.

[0077] Specifically, in one example, firmware upgrades can be achieved directly through firmware migration. The target firmware, pre-stored in the backup program area, is moved to the running program area, overwriting the existing firmware in the running program area. This updates the firmware in the running program area of ​​the target temperature controller, thus achieving a firmware upgrade. To facilitate direct migration of the target firmware during upgrades, the target temperature controller receives the corresponding target firmware upon receiving the firmware upgrade command and stores it in the backup program area for subsequent upgrades. After the target firmware is moved to the running program area, it can be activated to begin control, completing the entire firmware upgrade process.

[0078] It should be noted that if the temperature control of the target temperature controller is taken over by the open-loop control program or the backup temperature controller during the firmware upgrade process, the target temperature controller needs to perform a restart operation to start the target firmware in the running program area. If the temperature control of the target temperature controller is taken over by the backup storage module during the firmware upgrade process, the target temperature controller can directly jump to the running program area to run the temperature control program there, thus starting the target firmware in the running program area. This application does not impose any special limitations on the specific method of firmware relocation; it can be implemented by copying, cutting, etc. This application does not impose any special limitations on the specific implementation methods of the backup program area and the running program area; they can be implemented using two independent memories, for example, a dedicated external flash memory can be used as the backup program area; alternatively, different storage areas within the same memory can be used. The running program area is generally implemented using ROM.

[0079] In this embodiment, after receiving the firmware upgrade command, the target firmware is received and stored in the spare program area. When the target thermostat is upgraded, the firmware to be upgraded in the target thermostat's running program area is directly overwritten by firmware transfer, thereby realizing firmware upgrade and improving the security, flexibility and anti-interference ability of firmware upgrade.

[0080] This embodiment also provides a heating control device, which can be used to perform actions such as... Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 Any of the processes shown in the diagram. See also Figure 6 As shown, Figure 6 This is a schematic diagram of a heating control device provided in an embodiment of this application; the heating control device includes: The parameter determination unit 1 is used to determine the control parameters of the target temperature controller when the target temperature controller receives a firmware upgrade command; the control parameters include internal numerical instructions for implementing the heating strategy. Backup program start-up unit 2 is used to start the first temperature control program to control the operation of the heating component; Firmware upgrade unit 3 is used to upgrade the firmware to be upgraded in the target temperature controller based on the firmware upgrade command after the first temperature control program is started. The recovery control unit 4 is used to control the heating component to work based on control parameters and the second temperature control program after the firmware upgrade is completed; the second temperature control program is the program used for heating control in the firmware of the target temperature controller.

[0081] It is easy to understand that the heating control method provided in this application can be implemented as a software functional unit and used as an independent heating control device, which can also achieve the technical effect of preventing the heated object from cooling down. For a description of the heating control device provided in this embodiment, please refer to the description of the heating control method in the foregoing embodiments; this application will not repeat it here.

[0082] Each of the above modules or units can be implemented through software, hardware, or a combination of both. For example, in the MCU of the target temperature controller, the parameter determination unit, backup program startup unit, firmware upgrade unit, and recovery control unit can all be implemented based on software.

[0083] In this application, "implemented through software" means that the processor reads and executes program instructions stored in memory to implement the functions corresponding to the aforementioned modules or units. Here, the processor refers to a processing circuit capable of executing program instructions, including but not limited to at least one of the following: a central processing unit (CPU), a microprocessor, a digital signal processor (DSP), a microcontroller unit (MCU), or an artificial intelligence processor, etc., and other processing circuits capable of running program instructions. In other embodiments, the processor may also include circuits with other processing functions (such as hardware circuits for hardware acceleration, bus and interface circuits, etc.). The processor can be presented as an integrated chip, for example, as an integrated chip whose processing function only includes executing software instructions, or it can also be presented as a SoC (system on a chip), that is, on a single chip, in addition to the processing circuit capable of running program instructions (usually referred to as the "core"), it also includes other hardware circuits for implementing specific functions (of course, these hardware circuits can also be implemented separately based on ASIC or FPGA). Correspondingly, the processing functions, in addition to executing software instructions, may also include various hardware acceleration functions (such as AI calculation, encoding / decoding, compression / decompression, etc.).

[0084] In this application, "implemented in hardware" means that the functions of the above-mentioned modules or units are implemented through hardware processing circuits that do not have program instruction processing capabilities. These hardware processing circuits can be composed of discrete hardware components or integrated circuits. To reduce power consumption and size, integrated circuits are typically used. Hardware processing circuits can include ASICs (application-specific integrated circuits) or PLDs (programmable logic devices); PLDs can include FPGAs (field-programmable gate arrays), CPLDs (complex programmable logic devices), and so on. These hardware processing circuits can be a single packaged semiconductor chip (e.g., packaged as an ASIC); or they can be integrated with other circuits (e.g., CPUs, DSPs) and packaged into a single semiconductor chip. For example, multiple hardware circuits and a CPU can be formed on a silicon substrate and packaged into a single chip; this type of chip is also called a SoC. Alternatively, circuits for implementing FPGA functions and a CPU can be formed on a silicon substrate and encapsulated into a single chip; this type of chip is also called a SoPC (system on a programmable chip).

[0085] It should be noted that when this application is implemented through software, hardware, or a combination of both, different software or hardware can be used, and it is not limited to using only one type of software or hardware. For example, one module or unit can be implemented using a CPU, while another module or unit can be implemented using a DSP. Similarly, when implemented using hardware, one module or unit can be implemented using an ASIC, while another module or unit can be implemented using an FPGA. Of course, it is not limited to using the same software (e.g., all through a CPU) or the same hardware (e.g., all through an ASIC) to implement some or all modules or units. Furthermore, those skilled in the art will understand that software is generally more flexible but less performant than hardware, while hardware is the opposite. Therefore, those skilled in the art can choose software, hardware, or a combination of both based on actual needs.

[0086] This embodiment also provides a temperature controller, including a processor and a memory; wherein the memory is used to store a computer program, which is loaded and executed by the processor to achieve the following: Figures 1 to 5 The steps of the heating control method described in any embodiment.

[0087] It should be noted that this application does not impose specific limitations on the specific types and implementation methods of the processor and memory. The processor may include one or more processing cores, such as a 4-core processor, an 8-core processor, etc. The processor may be implemented using at least one hardware form of DSP (Digital Signal Processor), FPGA (Field-Programmable Gate Array), or PLA (Programmable Logic Array). The processor may also include a main processor and a coprocessor. The main processor is the processor used to process data in the wake-up state, also known as the central processing unit; the coprocessor is a low-power processor used to process data in the standby state. In some embodiments, the processor may integrate a GPU (graphics processing unit), which is responsible for rendering and drawing the content required to be displayed on the screen. In some embodiments, the processor may also include an AI (Artificial Intelligence) processor, which is used to handle computational operations related to machine learning. The memory may include one or more computer-readable storage media, which may be non-transitory. The memory may also include high-speed random access memory and non-volatile memory, such as one or more disk storage devices or flash memory devices. In this embodiment, the memory is used to store at least the following computer program, which, after being loaded and executed by the processor, is capable of implementing the relevant steps of the heating control method disclosed in any of the foregoing embodiments. Additionally, the resources stored in the memory may also include an operating system and data, and the storage method may be temporary or permanent storage. The operating system may include Windows, Unix, Linux, etc. The data may include, but is not limited to, the data in the heating control method. The temperature controller may also include a display screen, input / output interfaces, a communication interface, a power supply, and a communication bus.

[0088] For a description of the temperature controller provided in this embodiment, please refer to the description of the heating control method in the foregoing embodiments; this application will not repeat it here.

[0089] This embodiment also provides a semiconductor device, including the temperature controller as described above.

[0090] It should be noted that this application does not make any special restrictions on the specific type and implementation method of semiconductor equipment. For example, it can be any semiconductor equipment with temperature control requirements, such as CVD equipment, PVD (Physical Vapor Deposition) equipment, Etch (Etching) equipment, etc.

[0091] As one specific embodiment, see Figure 7 As shown, Figure 7 This is a schematic diagram of a CVD apparatus provided in an embodiment of this application. The CVD apparatus 22 includes a reaction chamber 221 and a temperature controller 222. A heating wire 223 is installed in the reaction chamber 221, and the temperature controller 222 controls the temperature in the reaction chamber 221 by controlling the operation of the heating wire 223. A substrate 224 to be processed is present in the reaction chamber 221. The temperature in the reaction chamber 221 needs to be controlled by the temperature controller 222 to initiate a gas-phase chemical reaction of the reaction gases in the reaction chamber 221, thereby depositing a thin film on the substrate 224. In this case, the temperature controller 222 in the CVD apparatus 22 can serve as the target temperature controller, and the heating control method provided in this application can be used to continuously heat the temperature in the reaction chamber 221. The temperature controller 222 can communicate with a host computer 21 outside the CVD apparatus 22 and receive firmware upgrade commands, etc., from the host computer 21.

[0092] For a description of the semiconductor device provided in this embodiment, please refer to the description of the heating control method and temperature controller in the foregoing embodiments, which will not be repeated here.

[0093] This embodiment also provides a computer-readable storage medium storing a computer program, which, when executed by a processor, implements the steps of the heating control method described above.

[0094] Those skilled in the art will understand that all or part of the processes in the above embodiments can be implemented by a computer program instructing related hardware. The program can be stored in a computer-readable storage medium, and when executed, it can include the processes of the embodiments of the above methods. The storage medium can be a magnetic disk, optical disk, read-only memory (ROM), or random access memory (RAM), etc.

[0095] For a description of the computer-readable storage medium provided in this embodiment, please refer to the description of the heating control method in the foregoing embodiments; this application will not repeat it here.

[0096] Based on the above embodiments, this embodiment also provides a computer program product, including a computer program / instructions, which, when executed by a processor, implement the steps of the aforementioned heating control method.

[0097] For a description of the computer program product provided in this embodiment, please refer to the description of the heating control method in the foregoing embodiments; this application will not repeat it here.

[0098] The terminology used in the embodiments of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. The singular forms “a,” “the,” and “the” used in the embodiments of this application and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise.

[0099] It should be understood that the term "and / or" used in this document is merely a description of the same field in the related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, and B alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0100] Depending on the context, the word "if" as used here can be interpreted as "when" or "when" or "in response to determination" or "in response to detection." Similarly, depending on the context, the phrase "if determination" or "if detection (of the stated condition or event)" can be interpreted as "when determination" or "in response to determination" or "when detection (of the stated condition or event)" or "in response to detection (of the stated condition or event)."

[0101] It should be understood that the terms "first," "second," etc., used in this application are for distinguishing purposes only and should not be construed as indicating or implying relative importance or order.

[0102] It should be understood that "multiple" as used in this application means at least two, that is, two or more.

[0103] It should be understood that the described embodiments are merely some, not all, of the embodiments in this application. All other embodiments obtained by those skilled in the art based on the embodiments in this application without inventive effort are within the scope of protection of this application.

Claims

1. A heating control method, characterized in that, Applied to target temperature controllers; including: When the target thermostat receives a firmware upgrade command, the control parameters of the target thermostat are determined; the control parameters include internal numerical instructions for implementing the heating strategy; The first temperature control program is activated to control the operation of the heating element; After the first temperature control program is started, the firmware to be upgraded in the target temperature controller is upgraded based on the firmware upgrade command; After the firmware upgrade is completed, the heating component is controlled to work based on the control parameters and the second temperature control program; the second temperature control program is the program used for heating control in the firmware of the target temperature controller.

2. The heating control method according to claim 1, characterized in that, Before performing a firmware upgrade on the firmware to be upgraded in the target thermostat based on the firmware upgrade command, the following steps are also included: Configure the preset status parameters of the target thermostat to an upgrade status; the upgrade status indicates that the target thermostat is undergoing a firmware upgrade. After the firmware upgrade is complete, it also includes: The preset state parameters are restored from the upgraded state to the default state; the default state is used to indicate that the target thermostat has not undergone firmware upgrade.

3. The heating control method according to claim 1 or 2, characterized in that, The control parameters include the output control quantity from the target temperature controller to the heating element based on the second temperature control program; the first temperature control program is an open-loop control program. The first temperature control program is initiated to control the operation of the heating element, including: When the heated object reaches a steady state, the open-loop control quantity of the open-loop control program is determined based on the output control quantity of the second temperature control program at the steady state. The heating element is used to heat the object being heated; The heating component is controlled to continuously heat according to the open-loop control quantity based on the open-loop control program.

4. The heating control method according to claim 3, characterized in that, The open-loop control quantity is the operating voltage and / or operating current of the heating element.

5. The heating control method according to claim 3, characterized in that, Also includes: Detect the temperature change of the heated object within a preset time period; When the temperature change is less than the preset value, the process jumps to the step of determining the open-loop control quantity of the open-loop control program based on the output control quantity of the second temperature control program in the control steady state. When the temperature change is greater than or equal to a preset value, the process jumps back to the step of detecting the temperature change of the heated object within a preset time period.

6. The heating control method according to claim 1 or 2, characterized in that, The first temperature control program is the program used for heating control in the firmware of the backup temperature controller; The first temperature control program is initiated to control the operation of the heating element, including: Receive the target firmware corresponding to the firmware upgrade command; Based on the target firmware, upgrade the firmware to be upgraded in the backup thermostat; The backup thermostat is restarted so that the backup thermostat, after completing the firmware upgrade, controls the heating element to operate based on the control parameters and the first temperature control program.

7. The heating control method according to claim 6, characterized in that, After the firmware upgrade of the target temperature controller is completed, the following is also included: Send a synchronization command to the backup temperature controller; Receive the firmware of the backup temperature controller sent by the backup temperature controller; Check whether the firmware of the backup temperature controller is consistent with the firmware of the target temperature controller; If the firmware of the backup thermostat is inconsistent with the firmware of the target thermostat, then the firmware of the backup thermostat is updated based on the firmware of the target thermostat.

8. The heating control method according to claim 1 or 2, characterized in that, The target temperature controller includes a backup storage module, and the first temperature control program is the temperature control program stored in the backup storage module; The first temperature control program is initiated to control the operation of the heating element, including: The second temperature control program of the target temperature controller is moved to the backup storage module; The temperature control program stored in the backup storage module is run to control the operation of the heating component based on the control parameters and the first temperature control program in the backup storage module.

9. The heating control method according to any one of claims 3 to 8, characterized in that, Also includes: Receive the target firmware corresponding to the firmware upgrade command; The target firmware is stored in the spare program area; The spare program area is used to store the spare firmware of the target temperature controller; Based on the firmware upgrade command, the firmware to be upgraded in the target thermostat is upgraded, including: The target firmware is moved from the spare program area to the running program area; the running program area is configured to store the program being executed by the target thermostat. The target firmware in the running program area is started to complete the firmware upgrade of the target thermostat.

10. A heating control device, characterized in that, Applied to target temperature controllers; including: The parameter determination unit is used to determine the control parameters of the target temperature controller when the target temperature controller receives a firmware upgrade command; the control parameters include internal numerical instructions for implementing the heating strategy; A backup program start-up unit is used to start the first temperature control program to control the operation of the heating component. The firmware upgrade unit is used to upgrade the firmware to be upgraded in the target temperature controller based on the firmware upgrade command after the first temperature control program is started. The recovery control unit is used to control the heating component to operate based on the control parameters and the second temperature control program after the firmware upgrade is completed; the second temperature control program is the program for heating control in the firmware of the target temperature controller.

11. A temperature controller, characterized in that, It includes a processor and a memory; wherein the memory is used to store a computer program, which is loaded and executed by the processor to implement the steps of the heating control method as described in any one of claims 1 to 9.

12. A semiconductor device, characterized in that, Including the temperature controller as described in claim 11.

13. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when executed by a processor, implements the steps of the heating control method as described in any one of claims 1 to 9.

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