A lifting and supporting platform for square substrates and a positioning and lifting method thereof

Abstract

A lifting and supporting platform for square substrates and a positioning and lifting method thereof, comprising a positioning and lifting assembly, a pneumatic propulsion assembly and a control system; the positioning and lifting assembly comprises a first bearing platform and a second bearing platform, the first bearing platform is a floating structure, cooperates with a positioning clamp to realize self-adaptive horizontal centering calibration of the square substrate, the second bearing platform is embedded in the center of the first bearing platform and can move up and down therein to realize self-adaptive accurate adjustment of the horizontal posture of the square substrate; the pneumatic propulsion assembly comprises a first pneumatic propulsion structure and a second pneumatic propulsion structure, is used for realizing linkage and independent two-stage propulsion of the first and second bearing platforms, and completes accurate positioning and sheet feeding of the square substrate in the positioning clamp; the control system controls the pneumatic propulsion assembly and the positioning and lifting assembly to operate cooperatively to complete bearing, positioning and sheet feeding operations of the square substrate. The application has the advantages of strong propulsion stability, high positioning accuracy, improved good product yield, satisfied feeding demand of high process mask substrates, convenient maintenance and long service life.

Description

Technical Field

[0001] This invention relates to the precision manufacturing process of semiconductors, and more specifically, to a lifting and supporting platform for square substrates and its positioning and lifting method, belonging to the field of semiconductor mask substrate manufacturing technology. Background Technology

[0002] In the manufacturing processes of semiconductors, flat panel displays, and optical components, the processing precision of square mask substrates, glass substrates, or square silicon wafers directly determines the performance and yield of the final product. These substrates undergo multiple processes during manufacturing, such as cleaning, polishing, thin film deposition, patterning, and defect detection. These square substrates are typically transferred between different workstations using positioning fixtures. The stage is used to precisely place the square substrate into the delivery position within the positioning fixture, performing positioning and lifting operations between different height planes to ensure the substrate is in the preset workstation reference position during each process. Currently, the lifting and support stages used for these square substrates in the entire manufacturing process generally face the following technical bottlenecks: 1. Micro-deformation problems caused by insufficient positioning accuracy and stability: Existing stage systems mostly employ four-point or multi-point rigid support positioning structures. However, from a mechanical perspective, over-constrained support points can easily introduce uneven stress into the substrate when it is heated or subjected to uneven stress, leading to unpredictable micro-warping or deformation (typically at the micrometer level). This micro-deformation is fatal for processes requiring sub-micrometer or even nanometer-level pattern alignment precision (such as photolithography) or surface flatness (such as chemical mechanical polishing), directly causing pattern misalignment, uneven film thickness, or uneven polishing, severely reducing product yield.

[0003] 2. The contradiction between lifting stroke and space adaptability: Traditional single-stage lifting mechanisms (such as those driven by a single cylinder or motor screw) have a fixed and limited stroke. In actual production line layouts, there is often a significant height difference between the substrate receiving height (for safe handling by the robotic arm) and the processing height (to adapt to the working plane of the process equipment). Limited by the overall height of the equipment or internal space, a single lifting mechanism cannot simultaneously meet the requirements of low-profile material receiving and stably lift the substrate to a sufficiently high processing position. Forcibly increasing the single-stage stroke would lead to a series of problems, such as decreased mechanism rigidity, reduced stability, and increased space occupation.

[0004] 3. Challenges of contact damage and vacuum seal reliability: During the lifting and fixing process, the contact method between the substrate and the stage support components is crucial. In existing technologies, rigid lifting rods directly contact the bottom surface of the substrate, which can easily cause microscopic scratches or particulate contamination upon impact. This damage is unacceptable, especially for mask substrates with extremely high surface finish requirements. Furthermore, vacuum adsorption is often used to fix the substrate during processing. However, traditional sealing structures are prone to seal failure due to friction or deformation during the dynamic lifting process, making it difficult to maintain a stable vacuum level. This can lead to substrate displacement or vibration during processing, affecting the process outcome.

[0005] Although patent document "Alignment Mechanism, Alignment Method, Film Forming Apparatus and Film Forming Method" (CN114175228A) uses movable temporary receiving claws to receive the substrate and adjusts its position through horizontal and vertical coarse-motion stages before transferring it to a fixed adsorption component for final fixation and precision alignment, it still does not effectively solve the complex technical challenge of "high precision, stress-free, non-destructive, and high reliability." Therefore, there is an urgent need for a lifting and supporting stage system that can achieve graded positioning, flexible contact, dynamic sealing, and efficient chip removal to meet the increasingly stringent process requirements of modern semiconductor and precision manufacturing industries for substrate handling. Summary of the Invention

[0006] The purpose of this invention is to address the technical problems of existing square substrate lifting and support platforms, such as insufficient positioning accuracy, high risk of stress damage, poor stroke adaptability, and low sealing reliability. This invention provides a lifting and support platform for square substrates, along with its positioning and lifting method. The platform employs a two-stage propulsion loading and positioning structure and a dual-cylinder graded propulsion positioning design to achieve a two-stage progressive positioning control of "preliminary calibration - precise alignment." This enables high-precision, damage-free, and highly reliable positioning and lifting operations for the substrate, improving positioning accuracy, enhancing propulsion stability, reducing the impact of impact loads, and increasing the yield of high-quality finished products. This effectively meets the high-precision loading and positioning requirements of high-process mask substrates.

[0007] To achieve the above objectives, the technical solution adopted by the present invention to solve its technical problem is as follows: A lifting and supporting platform for square substrates, installed on the workbench of an equipment, characterized in that: the lifting and supporting platform includes a positioning and lifting assembly, a pneumatic propulsion assembly, and a control system; The positioning and lifting assembly is fixed on the worktable and is used to support and position the square substrate. It includes a primary support platform and a secondary support platform. The primary support platform is a floating structure located on the upper part of the lifting and supporting platform. It works with the positioning fixture to achieve adaptive horizontal centering calibration of the square substrate. The secondary support platform is the direct support mechanism for the square substrate. It is embedded in the center of the primary support platform and can move up and down within it to achieve adaptive and precise adjustment of the horizontal posture of the square substrate. The pneumatic propulsion assembly is fixed on the worktable and located below the positioning and lifting assembly. It is used to drive the positioning and lifting assembly upward, realizing the linkage and independent two-stage propulsion of the primary and secondary support platforms, and completing the precise positioning and feeding of the square substrate in the positioning fixture. The pneumatic propulsion assembly includes a primary pneumatic propulsion structure and a secondary pneumatic propulsion structure. The primary pneumatic propulsion structure is fixed on the worktable and its upper end is fixedly connected to the primary support platform. It is used to drive the primary and secondary support platforms to lift and lower together. The secondary pneumatic propulsion structure is fixedly connected to the primary pneumatic propulsion structure and its upper end is connected to the secondary support platform. It is used to drive the secondary support platform to lift and propel independently. The control system is connected to the pneumatic propulsion assembly and controls the pneumatic propulsion assembly and the positioning and lifting assembly to work together to complete the carrying, positioning and feeding of the square substrate.

[0008] Furthermore, the primary load-bearing platform includes a base, a positioning platform, a connecting plate, a highly elastic long spring, a guide cone rod, a guide seat, and a load-bearing platform; The base is located at the bottom of the primary bearing platform and fixed to the worktable. The positioning platform is located at the top of the primary bearing platform and has several conical positioning holes on its upper surface. These conical positioning holes match the positioning rod of the positioning fixture to connect the positioning fixture. The connecting plate is fixedly connected and tightly fitted to the bottom of the positioning platform. The carrying platform is located below the connecting plate and connected to the pneumatic propulsion assembly. Multiple high-elasticity long springs are evenly distributed along the circumference on the lower plane of the connecting plate. The upper ends are rigidly connected to the connecting plate, and the lower ends abut against the carrying platform. Through the elastic support of the high-elasticity long springs, the positioning platform and the connecting plate form an integral floating platform. The guide seat is symmetrically fixed to the base and has a guide hole in the center that is vertical and opens upward. The guide cone rod is vertically fixed below the connecting plate and its position corresponds to the guide seat. Its lower end slides into the guide hole of the guide seat, so that the floating platform can move up and down under the guidance of the guide seat and the guide cone rod. When the platform is pushed upward, causing the positioning rod of the positioning fixture to insert into the conical positioning hole of the positioning platform, the guide cone rod has not yet completely detached from the constraint of the guide seat. Through the contact and guiding action of the conical surface at the lower end, the positioning rod drives the floating platform to adaptively adjust its position in the horizontal plane until the conical positioning hole of the positioning platform is completely aligned with the positioning rod of the positioning fixture, thereby completing the adaptive horizontal centering calibration of the square substrate.

[0009] Furthermore, the lower end of the guide cone is a conical structure to provide guidance and freedom of movement for the floating platform to achieve adaptive adjustment in the horizontal plane.

[0010] Furthermore, the secondary bearing platform includes a carrying tray and a triangular plate; the carrying tray is used to directly support the square substrate, and is embedded in the central mounting groove of the connecting plate and can move up and down therein while being limited in the horizontal direction. The bearing surface at the upper end of the carrying tray has four chamfered structures, which form tangential contact with the side of the square substrate to avoid direct contact between the carrying tray and the processed surface of the square substrate. Three ball bearings are evenly embedded on the lower end surface of the carrying tray to ensure stable horizontal contact with the triangular plate. The triangular plate is located below the carrying tray and is fixedly connected to the secondary pneumatic propulsion structure. The triangular plate is located in a horizontal position and forms a detachable contact connection with the carrying tray. When the secondary pneumatic propulsion structure pushes the secondary bearing platform, the horizontal triangular plate makes full contact with the three balls of the load plate at three points, thereby enabling the load plate and the square base plate it supports to achieve precise adjustment of their horizontal posture.

[0011] Furthermore, the lifting and supporting platform also includes a sealing assembly for isolating external dust and accumulated liquid from corroding the internal components; the sealing assembly includes a first accordion cover and a second accordion cover, the upper end of the first accordion cover is fixedly connected to the support platform and the lower end is fixedly connected to the base, the upper end of the second accordion cover is fixedly connected to the triangular plate and the lower end is fixedly connected to the support platform.

[0012] Furthermore, the first-stage pneumatic propulsion structure includes a base, a support, a first guide rail, a triangular push rod, a first cylinder, and a first displacement sensor; The base is fixed to the workbench. The upper end of the support is fixedly connected to the platform of the first-level bearing platform, and the lower end is slidably connected to the base through the first guide rail and can move up and down along the base. The triangular push rod is fixedly connected to the middle of the support. The first cylinder is connected to the control system and the external air source. The piston rod of the first cylinder is fixedly connected to the lower end of the triangular push rod. The cylinder body is fixedly installed on the base in sequence through the first double-ended stud and the cylinder connecting rod. The first displacement sensor is set on the support and connected to the control system to detect the displacement signal of the support in real time and feed it back to the control system to realize precise closed-loop control of the stroke. When the first cylinder is activated by the control system, the piston rod drives the triangular push rod to move the support linearly up and down along the first guide rail, thereby driving the first-stage bearing platform through the loading platform. At the same time, the second-stage pneumatic propulsion structure pushes the second-stage bearing platform to move synchronously as a whole, completing the first-stage linkage propulsion process.

[0013] Furthermore, the two-stage pneumatic propulsion structure includes a push rod, a second cylinder, a second guide rail, and a second displacement sensor; The second cylinder connects the control system and an external air source. The cylinder body of the second cylinder is fixedly installed on the support of the first-stage pneumatic propulsion structure by a second double-ended stud. The piston rod is fixedly connected to the lower end of the push rod, and the upper end of the push rod is fixedly connected to the triangular plate of the second-stage bearing platform. The side is slidably connected to the support through the second guide rail and can move up and down along the support. The second displacement sensor is set on the push rod and connected to the control system to detect the displacement of the push rod in real time and feed it back to the control system, so as to realize precise closed-loop control of the stroke. After the first-stage linkage propulsion process is completed, the second cylinder is activated by the control system. The piston rod drives the push rod to move linearly up and down along the second guide rail. The triangular plate drives the second-stage bearing platform to move upward. Through the three-point full contact between the horizontal triangular plate and the three balls, the horizontal posture of the loading plate and the square base plate it supports is precisely adjusted, thereby completing the second-stage independent propulsion process.

[0014] Furthermore, the control system has a built-in primary linkage propulsion program and a secondary independent propulsion program.

[0015] Another technical solution of the present invention is as follows: A method for positioning and lifting a square substrate using the aforementioned lifting and supporting platform includes the following steps: 1) Place the square substrate — The robotic arm precisely grasps the square substrate and places it stably on the carrier tray, so that the four chamfered structures of the carrier tray form tangential contact with the sides of the square substrate, avoiding contact between the processed surface of the square substrate and the carrier tray, thereby achieving the bearing and initial positioning of the square substrate. 2) Activate the first-stage aerodynamic propulsion structure to perform first-stage coordinated propulsion— The control system issues a first-stage propulsion command to start the first cylinder. The piston rod of the first cylinder drives the support to be smoothly pushed up along the first guide rail through the triangular push rod, thereby lifting the first-stage bearing platform through the support platform. At the same time, the second-stage pneumatic propulsion structure pushes the second-stage bearing platform to move synchronously, and the relative position of the second-stage bearing platform and the first-stage bearing platform remains unchanged. During the process, the first displacement sensor detects the displacement of the support in real time and feeds the signal back to the control system, realizing precise closed-loop control of the first-stage linkage propulsion stroke. 3) Achieve adaptive horizontal centering calibration for square substrates — When the primary support platform is pushed to the preset position, the first displacement sensor sends a detection signal, and the control system sends a command to control the first cylinder to stop. At this time, the positioning rod of the positioning fixture is inserted into the cone-shaped positioning hole of the positioning platform. Through the contact and guiding action of the lower conical surface, the positioning rod drives the floating platform of the primary support platform to move laterally in the horizontal plane. The high-elasticity long spring undergoes elastic deformation simultaneously. At the same time, the floating platform drives the loading plate of the secondary support platform and the square base plate it carries to adjust their horizontal positions synchronously until the cone-shaped positioning hole of the positioning platform is completely aligned with the positioning rod of the positioning fixture, completing the horizontal centering calibration of the square base plate. At the preset position, the cone at the lower end of the guide cone rod is positioned above the guide hole of the guide seat. There is a gap between the guide cone rod and the guide hole, but it has not completely broken free from the constraint of the guide seat, providing spatial freedom for the adaptive adjustment of the horizontal position of the floating platform. 4) Activate the secondary aerodynamic propulsion structure for independent secondary propulsion, achieving adaptive and precise adjustment of the horizontal attitude of the square base plate. The control system issues a secondary propulsion command to control the second cylinder to start independently. The piston rod of the second cylinder drives the push rod to move upward along the second guide rail, and at the same time drives the triangular plate to move upward until the triangular plate contacts the carrying plate. The carrying plate achieves full contact at three points with the upper surface of the horizontal triangular plate through three lower ball bearings, so that the carrying plate and the square base plate it supports adaptively achieve a precise horizontal posture. 5) Continue the two-stage independent process to achieve precise wafer feeding of the square substrate. The secondary pneumatic propulsion structure continues to push the load plate of the secondary bearing platform upward until the square substrate is smoothly delivered to the target position in the positioning fixture. Then the positioning fixture accurately grabs the square substrate and removes it together, thereby completing the precise feeding operation of the square substrate. During the process, the second displacement sensor detects the displacement of the push rod in real time and feeds the signal back to the control system to realize precise closed-loop control of the secondary independent propulsion stroke. 6) Mechanism reset — After the square base plate and positioning fixture are removed, the control system issues a reset command. The second cylinder retracts and drives the push rod and triangular plate to descend and reset. The secondary bearing platform returns to its initial state. Subsequently, the first cylinder drives the support, the primary bearing platform and the secondary pneumatic propulsion structure to descend and reset synchronously. The guide cone rod resets to its initial position in the guide hole of the guide seat, thereby completing the reset of all mechanisms. The lifting and support platform enters a standby state, waiting to start the next operation.

[0016] Furthermore, throughout the entire process of the positioning and lifting method, the first and second accordion covers, which are fixedly connected to the platform, extend and retract synchronously with the mechanism, always maintaining the sealed state of the inner cavity of the covers.

[0017] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. Positioning accuracy has been significantly improved, meeting the requirements of high-process manufacturing: This invention innovatively adopts a two-stage progressive adaptive positioning method: "first-stage floating preliminary calibration + second-stage precise attitude adjustment." The first-stage support platform constructs a floating platform using multiple evenly distributed high-elasticity long springs. In conjunction with the positioning fixture, the conical surface's touch and guiding action achieves adaptive horizontal centering calibration of the square substrate. The second-stage support platform utilizes the principle of "three points forming a surface," ensuring full contact between the horizontal triangular plate and the three balls of the carrier plate. This achieves adaptive and precise adjustment of the square substrate's horizontal attitude. Combined with closed-loop control using dual displacement sensors, this effectively eliminates the fitting deviations and installation errors caused by traditional single-stage positioning methods, significantly improving the positioning accuracy of the mask substrate. It can stably meet the micron-level loading and positioning requirements of high-process mask substrates, ensuring the yield of subsequent product processing.

[0018] 2. High propulsion stability and low component wear: This invention employs a dual-cylinder staged propulsion system, achieving coordinated and independent control of the primary and secondary support platforms. This ensures relative positional stability during the initial positioning phase and avoids mutual interference between the two stages of positioning and propulsion. Combined with high-precision linear guide rails, it guarantees the straightness and stability of the propulsion process. Simultaneously, the load-bearing tray utilizes a load-bearing contact structure with a chamfered corner that prevents scratches on the square substrate, achieving substrate protection. Furthermore, the non-contact structure between the load-bearing tray and the triangular plate, along with the cushioning effect of the high-elasticity springs, effectively reduces component wear, minimizes the impact of impact loads on the structure, and extends the equipment's service life.

[0019] 3. Reliable sealing and protection, suitable for harsh working conditions: This invention employs a combined sealing structure of a double acid and alkali resistant PU bellows cover and a sealing ring for compression sealing. This structure can adapt to the full-stroke extension and retraction requirements of the cylinder, effectively preventing dust and liquid from entering the internal precision components, avoiding component corrosion, and enabling the equipment to operate stably under harsh working conditions containing acids, alkalis, and liquids.

[0020] 4. Compact structure, easy to disassemble and maintain: The structure of this invention adopts a modular component design and a detachable connection, which facilitates disassembly and maintenance. At the same time, the overall layout is compact, occupies little equipment space, and is conducive to the integrated installation and subsequent upgrades of the equipment.

[0021] In summary, this invention significantly improves the loading and positioning accuracy of square substrates, increases the yield of finished products, effectively meets the high-precision loading and positioning requirements of high-process mask substrates, can adapt to harsh working conditions, and has the advantages of compact structure, strong propulsion stability, reliable sealing, convenient maintenance, and long service life. Attached Figure Description Figure 1 This is a frontal overall schematic diagram of the present invention.

[0022] Figure 2 This is a cross-sectional view of the present invention.

[0023] Figure 3 This is a side view of the pneumatic component.

[0024] Figure 4 This is a cross-sectional schematic diagram of the positioning and lifting component.

[0025] In the picture, 1-Positioning stage, 2-Carrying tray, 3-Connecting plate, 4-High elasticity long spring, 5-Guide cone rod, 6-Guide seat, 7-Base, 8-Triangle plate, 9-Supporting platform, 10-First accordion cover, 11-Second accordion cover, 12-Push rod, 13-Base, 14-Support, 15-First guide rail, 16-Triangle push rod, 17-First cylinder, 18-First double-ended stud, 19-Second displacement sensor, 20-Cylinder connecting rod, 21-Second guide rail, 22-Second cylinder, 23-Second double-ended stud, 24-First displacement sensor. Detailed Implementation

[0026] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0027] This invention is used for high-precision positioning, stable lifting and non-destructive support of square substrates (especially large-size mask substrates or semiconductor wafers) in processes such as polishing, inspection, and photolithography.

[0028] Example Please see Figure 1 and Figure 2 The lifting and supporting platform for the square substrate consists of a control system, a sealing component, a positioning and lifting component, and a pneumatic propulsion component. Each component works together to complete the tasks of bearing, positioning, and feeding the square mask substrate.

[0029] The positioning and lifting assembly comprises: a positioning platform 1, a carrying tray 2, a connecting plate 3, a high-elasticity long spring 4, a guide cone rod 5, a guide seat 6, a base 7, a triangular plate 8, a support platform 9, a first accordion cover 10, and a second accordion cover 11 (see detailed structural diagram). Figure 1 and Figure 4 ).

[0030] The base 7 is the support structure for the positioning and lifting components, and is fixed to the worktable of the equipment.

[0031] The primary support platform is a floating structure. Its core function is to achieve the initial centering and calibration of the mask substrate. It is assembled from a positioning stage 1, a connecting plate 3, a high-elasticity long spring 4, a guide cone rod 5, and a guide seat 6, and is assembled on the support stage 9.

[0032] The positioning platform 1, made of PVC, is located at the top of the structure and is fixedly connected to the connecting plate 3 using PEEK screws. The connecting plate 3 fits tightly against the bottom of the positioning platform 1. Two guide cone rods 5 are symmetrically arranged below the connecting plate 3. One end of each guide cone rod 5 is machined with an M8 thread and fixedly connected to the connecting plate 3 via threaded engagement. The other end is a conical structure, with the conical end inserted into the guide hole of the guide seat 6. The guide seats 6 are symmetrically fixed to the base 7. Figure 4Twelve high-elasticity long springs 4 are evenly distributed on the lower end face of the connecting plate 3. The high-elasticity long springs 4 are evenly arranged around the circumference of the connecting plate 3. Their upper ends are rigidly connected to the connecting plate 3, and their lower ends abut against the support platform 9. Through the elastic support of the high-elasticity long springs 4, the positioning platform 1, the connecting plate 3 and the guide cone rod 5 are lifted to form a complete floating platform.

[0033] When the positioning platform 1 and the connecting plate 3 drive the guide cone rod 5 to move upward synchronously, the stroke of the guide cone rod 5 is controlled so that the conical end can be moved to the upper part of the guide hole of the guide seat 6. At this time, the guide cone rod 5 will not break away from the constraint of the guide hole of the guide seat 6, and can generate a certain degree of adaptive displacement in the horizontal plane, providing freedom for floating positioning.

[0034] The upper surface of positioning platform 1 has 12 cone-shaped positioning holes pre-drilled, see Figure 1 The cone angle parameter of the cone angle positioning hole matches the positioning rod on the positioning fixture (the structure is consistent with the conical end of the guide cone rod 5). When the positioning rod on the positioning fixture is inserted into the cone angle positioning hole, the floating platform is driven to adaptively adjust its position in the horizontal plane through the guiding and fitting effect of the cone surface until the positioning hole and the positioning rod are completely tangentially aligned, completing the initial centering calibration.

[0035] Please see Figure 1 and Figure 4 The secondary support platform is the direct support mechanism for the mask substrate, consisting of a loading disk 2 and a triangular plate 8.

[0036] The carrier tray 2 is made of PVC and is specifically designed for directly supporting the mask substrate. See Figure 1 The carrier surface has four chamfered structures, which are tangentially contacted with the side of the mask substrate, effectively preventing direct contact between the carrier plate 2 and the processing surface of the mask substrate. The outer ring of the carrier plate 2 is cylindrical and is embedded in the cylindrical mounting groove of the connecting plate 3. The connecting plate 3 forms a horizontal limiting constraint on the carrier plate 2, restricting its horizontal displacement, while not applying any constraint in the vertical direction. The triangular plate 8 is designed as an equilateral triangular prism structure. The contact surface at the bottom of the carrier plate 2 is adapted to the upper end surface structure of the triangular plate 8, and three balls are evenly embedded in the lower end surface of the carrier plate 2. This design uses the principle of three points forming a surface, allowing the carrier plate 2 to achieve adaptive horizontal attitude adjustment on the upper end surface of the triangular plate 8. In the normal static state, the carrier plate 2 and the triangular plate 8 do not contact each other, and only form contact during the cylinder propulsion stage to complete the adaptive horizontal attitude calibration, effectively reducing wear in non-working states and improving the service life of the components.

[0037] Please see Figure 2 and Figure 3The pneumatic assembly consists of a push rod 12, a base 13, a support 14, a first guide rail 15, a triangular push rod 16, a first cylinder 17, a first double-ended stud 18, a second displacement sensor 19, a cylinder connecting rod 20, a second guide rail 21, a second cylinder 22, a second double-ended stud 23, and a first displacement sensor 24. Figure 3 As shown. This component adopts a hierarchical drive design, which can realize the coordinated propulsion and independent propulsion of the primary and secondary carrier platforms, ensuring accurate and controllable positioning and wafer delivery processes.

[0038] The base 13 is a pneumatic component support structure, fixed to the worktable.

[0039] The first-stage pneumatic propulsion structure is used to drive the overall lifting and propulsion of the first-stage load-bearing platform. It consists of a support 14, a triangular push rod 16, a first cylinder 17, a first double-ended stud 18, a cylinder connecting rod 20, and a first displacement sensor 24.

[0040] The upper end of the support 14 is rigidly connected to the platform 9 by three fastening screws, and the lower end is slidably engaged with the base 13 by the first guide rail 15. The first guide rail 15 is a high-precision linear guide rail, which can ensure the straightness of the lifting and lowering movement of the support 14. The middle part of the support 14 is rigidly connected to the triangular push rod 16. The lower end of the triangular push rod 16 is fixedly connected to the piston rod of the first cylinder 17. The first cylinder 17 is fixedly installed with the base 13 by the first double-ended stud 18 and the cylinder connecting rod 20, forming a stable power transmission link.

[0041] When the first cylinder 17 is activated, the piston rod extends and retracts, driving the triangular push rod 16 to move linearly, which in turn drives the support 14 to move up and down along the first guide rail 15, ultimately driving the entire first-stage bearing platform to advance synchronously. The first displacement sensor 24 can detect the displacement of the support 14 in real time and feed the signal back to the control system, realizing precise closed-loop control of the first-stage propulsion stroke.

[0042] The two-stage pneumatic propulsion structure is used to complete the final wafer feeding task and consists of push rod 12, second cylinder 22, second double-headed stud 23, second guide rail 21 and second displacement sensor 19.

[0043] The upper end of push rod 12 is rigidly fixed to triangular plate 8, providing propulsion power for the secondary support platform. The side of push rod 12 is slidably connected to the second guide rail 21 via five evenly distributed fastening screws. The second guide rail 21 employs a high-precision guiding structure to ensure the straightness and stability of the push rod's propulsion process. The other end of the second guide rail 21 is fixed to support 14, linking the secondary propulsion structure with the primary propulsion structure. The lower end of push rod 12 is fixedly connected to the piston rod of the second cylinder 22. The second cylinder 22 is fixedly mounted on support 14 via a second double-ended stud 23, forming an independent power drive unit. The second displacement sensor 19 can collect the displacement signal of push rod 12 in real time, achieving precise control of the secondary propulsion stroke.

[0044] When the first-stage pneumatic propulsion structure is activated, the lifting and lowering of support 14 will drive the second-stage pneumatic propulsion structure to move synchronously as a whole, ensuring that the relative positions of the first-stage and second-stage bearing platforms remain unchanged during the initial positioning stage. After the first-stage bearing platform is aligned, the second-stage pneumatic propulsion structure can be activated independently to drive the second-stage bearing platform to advance precisely and complete the final mask substrate delivery task.

[0045] This invention employs a double bellows-style sealing design, while also integrating drainage functionality. This effectively isolates external dust and liquid from corroding internal precision components, ensuring stable operation of the structure under harsh conditions (see details of the sealing structure). Figure 4 The first accordion cover 10 is connected to the support platform 9 at the upper end by fastening screws, and to the base 7 at the lower end. Sealing rings are fitted at all connection points, and the seal is achieved by tightening the screws. The second accordion cover 11 is connected to the triangular plate 8 at the upper end by screws, and to the support platform 9 at the lower end. It also uses the same method of tightening the sealing rings with screws. Both accordion covers are made of acid and alkali resistant black PU composite material. This material has excellent corrosion resistance, flexibility, and anti-aging properties, allowing it to extend and retract flexibly throughout the entire stroke of the cylinder without affecting the normal movement of the propulsion mechanism.

[0046] The control system is located outside the mechanical structure and is connected to the first cylinder 17, the second cylinder 22, the first displacement sensor 24, and the second displacement sensor 19 of the pneumatic propulsion assembly. It has a built-in first-level linkage propulsion program and a second-level independent propulsion program. The control system controls the pneumatic propulsion assembly and the positioning and lifting assembly to work together to complete the carrying, positioning, and feeding of the square substrate.

[0047] The following example illustrates the positioning and lifting method for square substrates achieved by the above-described lifting and supporting platform. This example focuses on a high-process square mask substrate with dimensions of 152mm × 152mm and a thickness of 6.35mm. The specific method is as follows: 1. Initial placement of substrate: After the equipment control system issues a start command, the robotic arm accurately grasps the high-process mask substrate with dimensions of 152mm×152mm and a thickness of 6.35mm, and places it stably on the carrier tray 2. At this time, the four chamfered structures of the carrier tray 2 are tangent to the sides of the square substrate. Since the size of the square substrate is compatible with the bearing surface of the carrier tray, the initial bearing limit of the square substrate can be directly achieved, avoiding contact between the substrate processing surface and the carrier tray 2 and causing damage.

[0048] 2. Staged and Interlocking Propulsion: The control system drives the first cylinder 17 in the pneumatic propulsion assembly to start, initiating the operation of the first-stage pneumatic propulsion structure. The piston rod of the first cylinder 17 extends and retracts, causing the triangular push rod 16 to move linearly, which in turn drives the support 14 to move smoothly up and down along the first guide rail 15. The support 14 simultaneously drives the rigidly connected upper platform 9 and the first-stage support platform to move as a whole. Since the second cylinder 22 of the second-stage pneumatic propulsion structure is fixed to the support 14, the second-stage pneumatic propulsion structure will move synchronously during the first-stage propulsion process. At this time, the relative position of the first-stage support platform and the second-stage support platform remains unchanged. The first displacement sensor 24 detects the displacement of the support 14 in real time and feeds the signal back to the control system, realizing precise closed-loop control of the first-stage propulsion stroke.

[0049] 3. Precise Positioning and Calibration: When the primary support platform advances to the preset positioning position, the first displacement sensor 24 sends a positioning signal, and the first cylinder 17 stops operating. At this time, the positioning rod of the positioning fixture is inserted into the conical positioning hole at the upper end of the positioning platform 1. Through the guiding and fitting action of the conical surface, the primary support platform (floating structure) is driven to adaptively adjust its position in the horizontal plane. The 12 high-elasticity long springs 4 undergo elastic deformation simultaneously, and the guide cone rod 5 produces a small horizontal displacement in the hole of the guide seat 6 until the conical positioning hole of the positioning platform 1 is completely tangentially aligned with the positioning rod of the positioning fixture, completing the initial centering calibration. At the same time, the primary support platform drives the loading tray 2 and the square base plate to adjust synchronously, so that the secondary support platform completes the initial positioning together.

[0050] 4. Independent Wafer Feeding and Square Substrate Pickup and Drop: After the square substrate is positioned, the control system issues a secondary propulsion command. The second cylinder 22 is independently activated, driving the push rod 12 to move precisely along the second guide rail 21. Simultaneously, the push rod 12 drives the upper fixed triangular plate 8 upward until the triangular plate 8 contacts the lower end of the carrier tray 2. At this time, the carrier tray 2 adaptively adjusts its horizontal posture on the upper surface of the triangular plate 8 through three ball bearings at the lower end. The second displacement sensor 19 detects the displacement of the push rod 12 in real time to ensure accurate secondary propulsion stroke, smoothly delivering the square substrate to the target wafer feeding station in the positioning fixture. Subsequently, the positioning fixture accurately picks up the substrate and removes it, completing the wafer feeding task.

[0051] 5. Mechanism Reset and Standby: After the square substrate is removed, the control system issues a reset command. First, the second cylinder 22 drives the push rod 12 and the triangular plate 8 to reset, and the secondary bearing platform returns to its initial state. Subsequently, the first cylinder 17 drives the support 14, the primary bearing platform, and the secondary pneumatic propulsion structure to reset as a whole, and the guide cone rod 5 resets to its initial position in the guide seat 6 hole. During the entire reset process, the first bellows cover 10 and the second bellows cover 11 synchronously extend and retract to reset, and the sealed cavity remains sealed at all times. Any liquid that may accumulate in the cavity is promptly discharged through the drainage pipe. After all mechanisms have reset, the equipment enters standby mode, waiting for the next square substrate loading task.

[0052] In summary, this invention employs a two-stage positioning structure of "first-stage floating preliminary calibration + second-stage precise attitude adjustment," achieving coordinated propulsion and independent control of the two-stage support platforms. This ensures the straightness and stability of the propulsion process, significantly improves the positioning accuracy of square substrate loading, guarantees the stable operation of precision components under harsh conditions, reduces the impact of impact loads, and improves the yield of finished products. It effectively meets the high-precision loading and positioning requirements of high-process mask substrates, and has advantages such as compact structure, strong stability, high positioning accuracy, reliable sealing, convenient maintenance, and long service life. It can effectively meet the precision loading and positioning requirements of high-process mask substrates.

[0053] The above embodiments are not intended to limit the scope of the present invention. The scope of protection claimed by the present invention is not limited to the above embodiments, but should also include other variations and alternatives that are obvious to the present invention. All equivalent changes and modifications made in accordance with the content of the present invention shall fall within the scope of the present invention.

Claims

1. A lifting and supporting platform for square substrates, mounted on the worktable of an equipment, characterized in that: The lifting and supporting platform includes a positioning and lifting assembly, a pneumatic propulsion assembly, and a control system; The positioning and lifting assembly is fixed on the worktable and is used to support and position the square substrate. It includes a primary support platform and a secondary support platform. The primary support platform is a floating structure located on the upper part of the lifting and supporting platform. It works with the positioning fixture to achieve adaptive horizontal centering calibration of the square substrate. The secondary support platform is the direct support mechanism for the square substrate. It is embedded in the center of the primary support platform and can move up and down within it to achieve adaptive and precise adjustment of the horizontal posture of the square substrate. The pneumatic propulsion assembly is fixed on the worktable and located below the positioning and lifting assembly. It is used to drive the positioning and lifting assembly upward, realizing the linkage and independent two-stage propulsion of the primary and secondary support platforms, and completing the precise positioning and feeding of the square substrate in the positioning fixture. The pneumatic propulsion assembly includes a primary pneumatic propulsion structure and a secondary pneumatic propulsion structure. The primary pneumatic propulsion structure is fixed on the worktable and its upper end is fixedly connected to the primary support platform. It is used to drive the primary and secondary support platforms to lift and lower together. The secondary pneumatic propulsion structure is fixedly connected to the primary pneumatic propulsion structure and its upper end is connected to the secondary support platform. It is used to drive the secondary support platform to lift and propel independently. The control system is connected to the pneumatic propulsion assembly and controls the pneumatic propulsion assembly and the positioning and lifting assembly to work together to complete the carrying, positioning and feeding of the square substrate.

2. The lifting and supporting platform for a square substrate according to claim 1, characterized in that: The primary load-bearing platform includes a base, a positioning platform, a connecting plate, a high-elasticity long spring, a guide cone rod, a guide seat, and a load-bearing platform; The base is located at the bottom of the primary bearing platform and fixed to the worktable. The positioning platform is located at the top of the primary bearing platform and has several conical positioning holes on its upper surface. These conical positioning holes match the positioning rod of the positioning fixture to connect the positioning fixture. The connecting plate is fixedly connected and tightly fitted to the bottom of the positioning platform. The carrying platform is located below the connecting plate and connected to the pneumatic propulsion assembly. Multiple high-elasticity long springs are evenly distributed along the circumference on the lower plane of the connecting plate. The upper ends are rigidly connected to the connecting plate, and the lower ends abut against the carrying platform. Through the elastic support of the high-elasticity long springs, the positioning platform and the connecting plate form an integral floating platform. The guide seat is symmetrically fixed to the base and has a guide hole in the center that is vertical and opens upward. The guide cone rod is vertically fixed below the connecting plate and its position corresponds to the guide seat. Its lower end slides into the guide hole of the guide seat, so that the floating platform can move up and down under the guidance of the guide seat and the guide cone rod. When the platform is pushed upward, causing the positioning rod of the positioning fixture to insert into the conical positioning hole of the positioning platform, the guide cone rod has not yet completely detached from the constraint of the guide seat. Through the contact and guiding action of the conical surface at the lower end, the positioning rod drives the floating platform to adaptively adjust its position in the horizontal plane until the conical positioning hole of the positioning platform is completely aligned with the positioning rod of the positioning fixture, thereby completing the adaptive horizontal centering calibration of the square substrate.

3. The lifting and supporting platform for a square substrate according to claim 2, characterized in that: The lower end of the guide cone is a conical structure to provide guidance and freedom of movement for the floating platform to achieve adaptive adjustment in the horizontal plane.

4. The lifting and supporting platform for a square substrate according to claim 2, characterized in that: The secondary support platform includes a loading tray and a triangular plate. The loading tray is used to directly support the square substrate. It is embedded in the central mounting groove of the connecting plate and can move up and down within it while being limited in the horizontal direction. The upper bearing surface of the loading tray has four chamfered structures, which form tangential contact with the side of the square substrate to avoid direct contact between the loading tray and the processed surface of the square substrate. Three ball bearings are evenly embedded on the lower end surface of the loading tray to ensure stable horizontal contact with the triangular plate. The triangular plate is located below the loading tray and is fixedly connected to the secondary pneumatic propulsion structure. The triangular plate is located in a horizontal position and forms a detachable contact connection with the loading tray. When the secondary pneumatic propulsion structure pushes the secondary bearing platform, the horizontal triangular plate makes full contact with the three balls of the load plate at three points, thereby enabling the load plate and the square base plate it supports to achieve precise adjustment of their horizontal posture.

5. The lifting and supporting platform for a square substrate according to claim 4, characterized in that: The lifting and supporting platform also includes a sealing assembly to isolate external dust and liquid from corroding internal components; the sealing assembly includes a first accordion cover and a second accordion cover, the upper end of the first accordion cover is fixedly connected to the support platform and the lower end is fixedly connected to the base, the upper end of the second accordion cover is fixedly connected to the triangular plate and the lower end is fixedly connected to the support platform.

6. The lifting and supporting platform for a square substrate according to claim 4, characterized in that: The first-stage pneumatic propulsion structure includes a base, a support, a first guide rail, a triangular push rod, a first cylinder, and a first displacement sensor; The base is fixed to the workbench. The upper end of the support is fixedly connected to the platform of the first-level bearing platform, and the lower end is slidably connected to the base through the first guide rail and can move up and down along the base. The triangular push rod is fixedly connected to the middle of the support. The first cylinder is connected to the control system and the external air source. The piston rod of the first cylinder is fixedly connected to the lower end of the triangular push rod. The cylinder body is fixedly installed on the base in sequence through the first double-ended stud and the cylinder connecting rod. The first displacement sensor is set on the support and connected to the control system to detect the displacement signal of the support in real time and feed it back to the control system to realize precise closed-loop control of the stroke. When the first cylinder is activated by the control system, the piston rod drives the triangular push rod to move the support linearly up and down along the first guide rail, thereby driving the first-stage bearing platform through the loading platform. At the same time, the second-stage pneumatic propulsion structure pushes the second-stage bearing platform to move synchronously as a whole, completing the first-stage linkage propulsion process.

7. The lifting and supporting platform for a square substrate according to claim 6, characterized in that: The two-stage pneumatic propulsion structure includes a push rod, a second cylinder, a second guide rail, and a second displacement sensor; The second cylinder connects the control system and an external air source. The cylinder body of the second cylinder is fixedly installed on the support of the first-stage pneumatic propulsion structure by a second double-ended stud. The piston rod is fixedly connected to the lower end of the push rod, and the upper end of the push rod is fixedly connected to the triangular plate of the second-stage bearing platform. The side is slidably connected to the support through the second guide rail and can move up and down along the support. The second displacement sensor is set on the push rod and connected to the control system to detect the displacement of the push rod in real time and feed it back to the control system, so as to realize precise closed-loop control of the stroke. After the first-stage linkage propulsion process is completed, the second cylinder is activated by the control system. The piston rod drives the push rod to move linearly up and down along the second guide rail. The triangular plate drives the second-stage bearing platform to move upward. Through the three-point full contact between the horizontal triangular plate and the three balls, the horizontal posture of the loading plate and the square base plate it supports is precisely adjusted, thereby completing the second-stage independent propulsion process.

8. The lifting and supporting platform for a square substrate according to claim 1, characterized in that: The control system has a built-in first-level linkage propulsion program and a second-level independent propulsion program.

9. A method for positioning and lifting a square substrate using the lifting and supporting platform as described in claim 7, characterized in that: The positioning and lifting method includes the following steps: 1) Place the square substrate — The robotic arm precisely grasps the square substrate and places it stably on the carrier tray, so that the four chamfered structures of the carrier tray form tangential contact with the sides of the square substrate, avoiding contact between the processed surface of the square substrate and the carrier tray, thereby achieving the bearing and initial positioning of the square substrate. 2) Activate the first-stage aerodynamic propulsion structure to perform first-stage coordinated propulsion— The control system issues a first-stage propulsion command to start the first cylinder. The piston rod of the first cylinder drives the support to be smoothly pushed up along the first guide rail through the triangular push rod, thereby lifting the first-stage bearing platform through the support platform. At the same time, the second-stage pneumatic propulsion structure pushes the second-stage bearing platform to move synchronously, and the relative position of the second-stage bearing platform and the first-stage bearing platform remains unchanged. During the process, the first displacement sensor detects the displacement of the support in real time and feeds the signal back to the control system, realizing precise closed-loop control of the first-stage linkage propulsion stroke. 3) Achieve adaptive horizontal centering calibration for square substrates — When the primary support platform is pushed to the preset position, the first displacement sensor sends a detection signal, and the control system sends a command to control the first cylinder to stop. At this time, the positioning rod of the positioning fixture is inserted into the cone-shaped positioning hole of the positioning platform. Through the contact and guiding action of the lower conical surface, the positioning rod drives the floating platform of the primary support platform to move laterally in the horizontal plane. The high-elasticity long spring undergoes elastic deformation simultaneously. At the same time, the floating platform drives the loading plate of the secondary support platform and the square base plate it carries to adjust their horizontal positions synchronously until the cone-shaped positioning hole of the positioning platform is completely aligned with the positioning rod of the positioning fixture, completing the horizontal centering calibration of the square base plate. At the preset position, the cone at the lower end of the guide cone rod is positioned above the guide hole of the guide seat. There is a gap between the guide cone rod and the guide hole, but it has not completely broken free from the constraint of the guide seat, providing spatial freedom for the adaptive adjustment of the horizontal position of the floating platform. 4) Activate the secondary aerodynamic propulsion structure for independent secondary propulsion, achieving adaptive and precise adjustment of the horizontal attitude of the square base plate. The control system issues a secondary propulsion command to control the second cylinder to start independently. The piston rod of the second cylinder drives the push rod to move upward along the second guide rail, and at the same time drives the triangular plate to move upward until the triangular plate contacts the carrying plate. The carrying plate achieves full contact at three points with the upper surface of the horizontal triangular plate through three lower ball bearings, so that the carrying plate and the square base plate it supports adaptively achieve a precise horizontal posture. 5) Continue the two-stage independent process to achieve precise wafer feeding of the square substrate. The secondary pneumatic propulsion structure continues to push the load plate of the secondary bearing platform upward until the square substrate is smoothly delivered to the target position in the positioning fixture. Then the positioning fixture accurately grabs the square substrate and removes it together, thereby completing the precise feeding operation of the square substrate. During the process, the second displacement sensor detects the displacement of the push rod in real time and feeds the signal back to the control system to realize precise closed-loop control of the secondary independent propulsion stroke. 6) Mechanism reset — After the square base plate and positioning fixture are removed, the control system issues a reset command. The second cylinder retracts and drives the push rod and triangular plate to descend and reset. The secondary bearing platform returns to its initial state. Subsequently, the first cylinder drives the support, the primary bearing platform and the secondary pneumatic propulsion structure to descend and reset synchronously. The guide cone rod resets to its initial position in the guide hole of the guide seat, thereby completing the reset of all mechanisms. The lifting and support platform enters a standby state, waiting to start the next operation.

10. The positioning and lifting method for a square substrate according to claim 9, characterized in that: Throughout the entire process of the positioning and lifting method, the first and second accordion covers, which are fixedly connected to the platform, extend and retract synchronously with the mechanism, always maintaining the sealed state of the inner cavity of the covers.

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