An irregularly shaped cavity inner wall coating device and a coating method

Abstract

This invention relates to a coating device and method for the inner wall of an irregularly shaped cavity, belonging to the technical field of coating devices. It includes a coating host, two combined sealing covers, and a control unit. A reduction motor is fixedly installed on the lower side of the inner wall of each of the two combined sealing covers. An arc target frame is fixedly installed at the output end of each of the two reduction motors. A workpiece placement assembly is provided in the middle of each of the two arc target frames. The workpiece placement assembly includes a supporting vertical tube fixedly installed at the center of the arc target frame. A vertical drive rod is rotatably installed at the bottom of the supporting vertical tube. Several horizontal support shells are fixedly installed on both the left and right sides of the supporting vertical tube wall. A pushing protrusion is fixedly installed on one side of each of the two corresponding horizontal support shells on the vertical drive rod wall. This invention ensures that the irregularly shaped cavity product rotates and oscillates during the coating process, allowing the inner wall of the irregularly shaped cavity product to fully contact the coating material, thereby ensuring the coating quality of the inner wall of the irregularly shaped cavity.

Description

Technical Field

[0001] This invention relates to the field of coating equipment technology, specifically to a coating device and coating method for the inner wall of an irregularly shaped cavity. Background Technology

[0002] A coating apparatus is a device that deposits one or more thin films of a specific material on the surface of an object or substrate using physical or chemical methods. These films can be as thin as nanometers or as thick as micrometers, and are designed to give the substrate surface entirely new properties, such as hardness, wear resistance, corrosion resistance, optical properties, conductivity, and hydrophilicity. The coating apparatus uniformly sprays high-purity cobalt target electronic material onto the coating structure. Thus, the coating apparatus and the high-purity cobalt target electronic material are a closely intertwined and inseparable combination in the integrated circuit manufacturing industry chain.

[0003] Application publication number CN102453878A is a Chinese invention patent that discloses a coating device. This patent uses a concentric inner ring material rack and an outer ring material rack, and columnar target seats are set in the central area of ​​the inner ring material rack and the periphery of the outer ring material rack, respectively. This can effectively reduce the mutual interference between target materials set on different target seats, ensure coating quality, and facilitate the control of target materials and improve the utilization rate of target materials. However, when the above patent encounters the inner wall coating operation of irregular cavity products, because the inner wall of the irregular cavity is of varying depth, it may be hindered by the mutual obstruction between the inner walls. In addition, traditional coating operations generally spray the material in parallel, which will lead to uneven coating of the inner wall of the irregular cavity, thus affecting the coating quality of the inner wall of the irregular cavity.

[0004] To address the aforementioned issues, we propose a coating device for the inner wall of an irregularly shaped cavity. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this invention provides a coating device and method for the inner wall of irregularly shaped cavities. This invention ensures that the irregularly shaped cavity product rotates and oscillates during the coating process, allowing the inner wall of the irregularly shaped cavity product to fully contact the coating material, thereby ensuring the coating quality of the inner wall of the irregularly shaped cavity.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a coating device for the inner wall of an irregular cavity, comprising a coating host, two combined sealing covers, and a control unit. A geared motor is fixedly installed on the lower side of the inner wall of each of the two combined sealing covers, and an arc target frame is fixedly installed at the output end of each of the two geared motors. A workpiece placement assembly is provided in the middle of each of the two arc target frames.

[0007] The workpiece placement assembly includes a support vertical tube fixedly installed at the center of the inside of the arc target frame. A vertical drive rod is rotatably installed at the bottom of the support vertical tube. Several horizontal support shells are fixedly installed on both the left and right sides of the support vertical tube wall. A pushing protrusion is fixedly installed on one side of each of the two corresponding horizontal support shells on the left and right sides of the vertical drive rod. A pushing groove rod is slidably installed inside the horizontal support shell.

[0008] An output connecting rod is rotatably installed on the inner wall of the push groove rod. One end of the output connecting rod is rotatably connected to a connecting vertical shaft. A rotating triangular block is fixedly installed at the bottom of the connecting vertical shaft. An arc-head positioning block is fixedly installed at the bottom of the rotating triangular block. A connecting shaft column is fixedly installed on the side of the top surface of the rotating triangular block away from the connecting vertical shaft.

[0009] A vertical groove rod is rotatably connected to the inner wall of the cross brace shell on one side of the arc-head positioning block. An arc-shaped positioning block is fixedly installed on the wall of the vertical groove rod inside the cross brace shell, and a U-shaped combination block is fixedly installed on the top of the vertical groove rod. A connecting frame is provided at the bottom of the vertical groove rod.

[0010] Furthermore, the control unit is electrically connected to the coating host and is used to issue coating process execution instructions to the coating host.

[0011] Furthermore, the two combined sealing covers are rotatably connected to the left and right sides of the coating host surface, respectively. A handwheel screw is fixedly mounted at the center of the outer surface of each combined sealing cover. The handwheel screw can rotate along its own axis to achieve axial extension and retraction.

[0012] On the surface of the coating host, a connecting hole block is fixedly installed on one side of each handwheel screw component. The connecting hole block has an internal thread hole or positioning hole that is adapted to the handwheel screw component, and its installation position corresponds precisely to the movement trajectory of the handwheel screw component.

[0013] Furthermore, the supporting vertical tube is a square tube structure, and the supporting vertical tube rotates synchronously with the arc target frame. The upper end of the vertical drive rod extends through to the top surface of the arc target frame and is fixedly connected to the upper part of the inner wall of the combined sealing cover. The pushing groove rod is a square rod structure, with a groove integrally formed at one end of the square rod and an arc-shaped head integrally formed at the other end of the square rod. The arc-shaped end and the pushing protrusion are on the same horizontal line when running.

[0014] Furthermore, limit blocks are fixedly installed on the upper and lower sides of the surface of the push rod inside the support vertical tube. The limit blocks are in contact with the inner wall of the support vertical tube to prevent the push rod from being completely pushed out. The push rod is provided with a tension spring inside the cross support shell. The tension spring is fixed to the end of the push rod by a block, and the other end of the tension spring is fixed to the inner wall of the cross support shell.

[0015] Furthermore, the end of the vertical groove rod is integrally formed with a conical groove, and the arc-shaped positioning block and the arc-head positioning block are fitted together with an arc-shaped surface, and their axes are on the same horizontal line to ensure positioning accuracy. The U-shaped combination block is fitted with the connecting shaft column through its U-shaped groove. When the connecting shaft column and the U-shaped combination block are combined, the U-shaped combination block can be driven to rotate around the vertical groove rod.

[0016] Furthermore, the top of the connecting frame is integrally formed with a protruding structure. The external dimensions of the protruding structure are adapted to the inner wall contour of the vertical groove rod, and it can be embedded inside the vertical groove rod to achieve pre-positioning. At the same time, the top of the connecting frame is stably connected to the bottom of the vertical groove rod through three evenly distributed buckles.

[0017] Furthermore, the end of the vertical groove rod away from the connecting frame is integrally formed with a conical groove. The arc-shaped positioning block and the arc-head positioning block are fitted together through an arc-shaped mating surface, and their axes are on the same horizontal line, effectively ensuring positioning accuracy. The U-shaped combination block is fitted with the connecting shaft column through its integrally opened U-shaped groove. When the connecting shaft column drives the relevant components to rotate, the connecting shaft column makes a sliding movement along the U-shaped groove wall of the U-shaped combination block.

[0018] Furthermore, a fastening plate is embedded in the bottom of the connecting frame, and an adjusting screw is rotatably installed on the bottom of the fastening plate. The adjusting screw passes through the bottom of the connecting frame along a vertical thread. Rotating the adjusting screw can drive the fastening plate to rise and fall vertically. On the bottom of the fastening plate, on both sides opposite to the adjusting screw, limit rods are fixedly installed. The limit rods slide vertically through the bottom of the connecting frame and play a guiding and limiting role in the rising and falling movement of the fastening plate.

[0019] A method for coating the inner wall of an irregularly shaped cavity, the method comprising the following steps:

[0020] Step 1, workpiece clamping and positioning. The workpiece clamping and positioning is to fix the workpiece to be coated by a connecting frame. The top of the connecting frame is embedded in the inner wall of the vertical groove rod through an integrally formed protrusion structure to achieve pre-positioning. Then, it is locked to the bottom of the vertical groove rod by three evenly distributed buckles.

[0021] Step 2, sealing the coating cavity: After the workpiece is clamped, the two combined sealing covers are rotated and closed around the rotating connection parts on the left and right sides of the coating host, so that the sealing end face of the combined sealing cover is in contact with the corresponding port end face of the coating host.

[0022] Step 3, power transmission and workpiece combined motion: After sealing is completed, the reduction motor fixed on the lower side of the inner wall of the combined sealing cover is started. The output end of the reduction motor drives the arc target frame to rotate synchronously. Since the support vertical tube is fixedly installed in the center of the arc target frame, the support vertical tube rotates together with the arc target frame.

[0023] When the arc target frame drives the support vertical tube to rotate, the vertical drive rod will be relatively different from the support vertical tube. Since the push rod is slidably installed inside the cross support shell, and the arc head and the jacking protrusion are on the same horizontal line when they run, when the support vertical tube rotates relative to each other, it will generate periodic jacking operation with the jacking protrusion. This will create a tendency for the push rod to slide along the inside of the cross support shell. The tension spring inside the cross support shell stretches and stores force when the push rod is pushed. After the jacking protrusion is removed from the jacking position, it pulls the push rod to reset, realizing the reciprocating sliding of the push rod.

[0024] When the pusher slides back and forth, the output connecting rod installed on its inner wall moves in tandem, causing the connecting vertical shaft connected to one end of the output connecting rod to rotate. This, in turn, drives the rotating triangular block fixed at the bottom of the connecting vertical shaft to rotate around its own fulcrum. The arc-shaped positioning block at the bottom of the rotating triangular block and the arc-shaped positioning block fixed on the wall of the vertical groove rod are fitted and fitted together in an arc shape, and their axes are on the same horizontal line, which can ensure the positioning accuracy when the rotating triangular block rotates. At the same time, the connecting shaft column on the top surface of the rotating triangular block is embedded in the U-shaped groove of the U-shaped combination block. When the rotating triangular block rotates, the connecting shaft column slides along the groove wall of the U-shaped groove, causing the U-shaped combination block and the vertical groove rod to swing around the rotating connection point on the inner wall of the cross support shell. Finally, the vertical groove rod drives the connecting frame and the workpiece to complete the reciprocating swing action while following the circumferential rotation of the arc target frame.

[0025] Step four, operation ends. The operation ends after the coating is completed. The control machine controls the coating host to stop the operation. After the chamber pressure returns to normal pressure and the temperature drops to a safe range, rotate the handwheel screw in the opposite direction to loosen and open the combined sealing cover. Then rotate the adjusting screw in the opposite direction to lower the fastening plate and loosen the workpiece. The coated workpiece can then be taken out.

[0026] Compared with the prior art, the present invention provides a coating device and coating method for the inner wall of an irregular cavity, which has the following beneficial effects:

[0027] 1. This device can ensure that the irregular cavity product rotates and oscillates during the coating process, so that the inner wall of the irregular cavity product is in full contact with the coating material, thereby ensuring the coating quality of the inner wall of the irregular cavity.

[0028] 2. This device utilizes a product rotation self-driven swing linkage structure, relying on the structure's own rotation output force to be directionally transmitted to the product's swing actuator, thereby driving the product to synchronously complete the rotation and swing motion, avoiding redundant configuration of power sources and significantly improving energy utilization.

[0029] 3. The device uses a handwheel screw and connecting hole block to ensure a seal during the coating process, preventing material spillage from affecting surrounding operators and gas equipment.

[0030] 4. This device uses a fastening plate and adjusting screw to ensure that it can be used to process irregularly shaped products of different sizes, avoiding the need to purchase additional equipment due to different products. In addition, the device uses buckles to ensure quick release of products. Attached Figure Description

[0031] Figure 1 This is a perspective view of the entire invention;

[0032] Figure 2 This is a top view of the present invention;

[0033] Figure 3 This is a perspective view of the combined sealing cap of the present invention;

[0034] Figure 4 This is a three-dimensional sectional view of the supporting vertical tube of the present invention;

[0035] Figure 5 for Figure 4 Enlarged structural diagram of section A in the middle;

[0036] Figure 6 for Figure 4 Enlarged structural diagram of section B;

[0037] Figure 7 This is a perspective view of the cross-section of the push rod of the present invention;

[0038] Figure 8 This is a three-dimensional view of the arc head positioning block of the present invention.

[0039] Figure 9 This is a perspective view of the connecting frame of the present invention;

[0040] Figure 10 for Figure 9 The enlarged structural diagram of C is shown.

[0041] In the diagram: 1. Coating main unit; 2. Combined sealing cover; 201. Handwheel screw component; 202. Connecting hole block; 3. Gear motor; 4. Arc target frame;

[0042] 5. Workpiece placement assembly; 501. Supporting vertical tube; 502. Vertical drive rod; 503. Horizontal support shell; 504. Pushing protrusion; 505. Pushing groove rod; 5051. Limiting block; 5052. Tension spring; 506. Output connecting rod; 507. Connecting vertical shaft; 508. Rotating triangular block; 509. Arc head positioning block; 510. Connecting shaft column; 511. Vertical groove rod; 512. Arc-shaped positioning block; 513. U-shaped combination block; 514. Connecting frame; 515. Buckle; 6. Fastening plate; 7. Adjusting screw; 8. Limiting vertical rod; 9. Control machine. Detailed Implementation

[0043] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0044] Please see Figures 1 to 10 This embodiment of an irregular cavity inner wall coating device includes a coating host 1, two combined sealing covers 2, and a control unit 9. A geared motor 3 is fixedly installed on the lower side of the inner wall of each of the two combined sealing covers 2. An arc target frame 4 is fixedly installed at the output end of each of the two geared motors 3. A workpiece placement assembly 5 is provided in the middle of each of the two arc target frames 4. The control unit 9 is electrically connected to the coating host 1 and is used to issue coating process execution instructions to the coating host 1. It also monitors and controls the core process parameters of the coating host 1 in real time, including but not limited to the vacuum degree of the coating chamber, the power of the target material, the substrate temperature, and the coating rate, so as to ensure that the coating host 1 completes the basic coating operation according to the preset process, and ensures the stable operation of the coating process and the basic performance of the coated product meets the standards.

[0045] Two combined sealing covers 2 are rotatably connected to the left and right sides of the coating host 1 respectively. A handwheel screw 201 is fixedly mounted at the center of the outer surface of each combined sealing cover 2. The handwheel screw 201 can rotate along its own axis to achieve axial extension and retraction.

[0046] Among them, on the surface of the coating host 1, a connecting hole block 202 is fixedly installed on one side of each handwheel screw 201. The connecting hole block 202 is provided with an internal thread hole or positioning hole that is compatible with the handwheel screw 201, and its installation position is precisely corresponding to the movement trajectory of the handwheel screw 201.

[0047] In use, when the combined sealing cover 2 is rotated and closed, its end face is fitted and positioned against the corresponding port end face of the coating host 1. By rotating the handwheel screw 201, its end is screwed into the matching hole of the connecting hole block 202 and locked. The axial locking force of the handwheel screw 201 makes the sealing end face of the combined sealing cover 2 fit tightly against the port end face of the coating host 1, thereby achieving a reliable sealing combination between the two and ensuring the sealing performance of the internal cavity of the coating host 1.

[0048] The workpiece placement assembly 5 includes a support vertical tube 501 fixedly installed at the center of the inside of the arc target frame 4. A vertical drive rod 502 is rotatably installed at the bottom of the support vertical tube 501. Several horizontal support shells 503 are fixedly installed on both the left and right sides of the tube wall of the support vertical tube 501. A pusher protrusion 504 is fixedly installed on one side of each of the two corresponding horizontal support shells 503. A pusher groove rod 505 is slidably installed inside the horizontal support shell 503.

[0049] Among them, the supporting vertical tube 501 is a square tube structure, and the supporting vertical tube 501 rotates synchronously with the arc target frame 4. The upper end of the vertical drive rod 502 extends through to the top surface of the arc target frame 4 and is fixedly connected to the upper part of the inner wall of the combined sealing cover 2. The pushing groove rod 505 is a square rod structure, and a groove is integrally formed at one end of the square rod, while an arc-shaped head is integrally formed at the other end of the square rod. The arc-shaped end and the pushing protrusion 504 are on the same horizontal line when running.

[0050] Limiting blocks 5051 are fixedly installed on the upper and lower sides of the surface of the push rod 505 inside the support vertical tube 501. The limiting blocks 5051 are in contact with the inner wall of the support vertical tube 501 to prevent the push rod 505 from being completely pushed out. The push rod 505 is provided with a tension spring 5052 inside the cross support shell 503. The tension spring 5052 is fixed to the end of the push rod 505 by a block, and the other end of the tension spring 5052 is fixed to the inner wall of the cross support shell 503.

[0051] Among them, an output connecting rod 506 is rotatably installed on the inner wall of the push rod 505. One end of the output connecting rod 506 is rotatably connected to a connecting vertical shaft 507. A rotating triangular block 508 is fixedly installed at the bottom of the connecting vertical shaft 507. An arc head positioning block 509 is fixedly installed at the bottom of the rotating triangular block 508. A connecting shaft column 510 is fixedly installed on the side of the top surface of the rotating triangular block 508 away from the connecting vertical shaft 507.

[0052] The end of the vertical groove rod 511 is integrally formed with a conical groove. The arc-shaped positioning block 512 and the arc-shaped head positioning block 509 are fitted together with an arc surface, and their axes are on the same horizontal line to ensure positioning accuracy. The U-shaped combination block 513 is fitted with the connecting shaft post 510 through its U-shaped groove. When the connecting shaft post 510 and the U-shaped combination block 513 are combined, the U-shaped combination block 513 can be driven to rotate around the vertical groove rod 511.

[0053] Among them, the inner wall of the cross support shell 503 is rotatably connected to the side of the arc head positioning block 509, the vertical groove rod 511 is fixedly installed inside the cross support shell 503, the top of the vertical groove rod 511 is fixedly installed with a U-shaped combination block 513, and the bottom of the vertical groove rod 511 is provided with a connecting frame 514.

[0054] The top of the connecting frame 514 is integrally formed with a protruding structure. The outer dimensions of the protruding structure are adapted to the inner wall contour of the vertical groove rod 511, and it can be embedded into the vertical groove rod 511 to achieve pre-positioning. At the same time, the top of the connecting frame 514 is securely connected to the bottom of the vertical groove rod 511 through three evenly distributed buckles 515, which takes into account both assembly convenience and connection reliability. The end of the vertical groove rod 511 away from the connecting frame 514 is integrally formed with a conical groove. The arc-shaped positioning block 512 and the arc-shaped head positioning block 509 are adapted and fitted by the arc-shaped mating surface, and the axes of the two are on the same horizontal line, which effectively ensures positioning accuracy. The U-shaped combination block 513 is fitted with the connecting shaft column 510 through its integrally opened U-shaped groove. When the connecting shaft column 510 drives the related components to rotate, the connecting shaft column 510 makes a sliding movement along the U-shaped groove wall of the U-shaped combination block 513, ensuring the stability and smoothness of the fit during the movement.

[0055] The bottom of the connecting frame 514 is fitted with a fastening plate 6. An adjusting screw 7 is rotatably mounted on the bottom of the fastening plate 6. The adjusting screw 7 passes through the bottom of the connecting frame 514 along a vertical thread. Rotating the adjusting screw 7 can drive the fastening plate 6 to rise and fall vertically. On the bottom of the fastening plate 6, on both sides opposite to the adjusting screw 7, limit rods 8 are fixedly installed. The limit rods 8 slide vertically through the bottom of the connecting frame 514, guiding and limiting the rising and falling movement of the fastening plate 6 to prevent it from deviating. In addition, the product contact part of the connecting frame 514 is provided with a protective rubber pad. This protective rubber pad can form a buffer protection when fixing the product, which can not only enhance the stability of the product after fixing, but also prevent the product surface from being scratched, ensuring the safety of the product fixing process.

[0056] A method for coating the inner wall of an irregularly shaped cavity, comprising the following steps:

[0057] Step 1: Workpiece clamping and positioning. The workpiece to be coated is fixed by the connecting frame 514. The top of the connecting frame 514 is pre-positioned by an integrally formed protrusion structure embedded in the inner wall of the vertical groove rod 511. Then, it is locked to the bottom of the vertical groove rod 511 by three evenly distributed buckles 515 to ensure the connection is stable. Rotate the adjusting screw 7 at the bottom of the connecting frame 514. Since the adjusting screw 7 is connected to the internal thread of the connecting frame 514 and the fastening plate 6 is rotatably connected to the adjusting screw 7, the fastening plate 6 can be driven to rise and fall vertically. At the same time, the limiting vertical rods 8 on both sides of the bottom of the fastening plate 6 slide through the bottom of the connecting frame 514, which guides and limits the rise and fall of the fastening plate 6 to prevent it from deviating. Place the workpiece on the top of the fastening plate 6 and adjust the height of the fastening plate 6 by adjusting the adjusting screw 7 until the protective rubber pad is in close contact with the workpiece. This not only achieves reliable fixation of the workpiece, but also prevents the surface of the workpiece from being scratched by the buffering effect of the protective rubber pad, while enhancing the fixation stability.

[0058] Step 2: Sealing the coating chamber. After the workpiece is clamped, the two combined sealing covers 2 are rotated and closed around the rotating connection parts on the left and right sides of the coating host 1, so that the sealing end face of the combined sealing cover 2 is fitted and positioned with the corresponding port end face of the coating host 1. The handwheel screw 201 at the center of the outer surface of each combined sealing cover 2 is rotated so that it rotates along its own axis and extends and retracts axially. The end is screwed into the corresponding position of the connecting hole block 202 on the surface of the coating host 1 and locked. The axial locking force of the handwheel screw 201 is used to make the combined sealing cover 2 fit tightly with the port end face of the coating host 1, so as to achieve a reliable seal of the chamber and provide a sealing environment that meets the requirements for subsequent coating operations, ensuring the stability of the vacuum degree of the coating chamber.

[0059] Step 3, power transmission and workpiece compound motion. After sealing is completed, the reduction motor 3 fixed on the lower side of the inner wall of the combined sealing cover 2 is started. The output end of the reduction motor 3 drives the arc target frame 4 to rotate synchronously. Since the support vertical tube 501 is fixedly installed in the center of the arc target frame 4, the support vertical tube 501 rotates together with the arc target frame 4.

[0060] Meanwhile, the upper end of the vertical drive rod 502 extends through to the top surface of the arc target frame 4 and is fixedly connected to the upper part of the inner wall of the combined sealing cover 2. When the arc target frame 4 drives the supporting vertical tube 501 to rotate, the vertical drive rod 502 will be relatively different from the supporting vertical tube 501. Since the push groove rod 505 is slidably installed inside the cross support shell 503, and the arc-shaped head and the jacking protrusion 504 are on the same horizontal line when they run, when the supporting vertical tube 501 rotates relative to each other, it will periodically jack with the jacking protrusion 504. The pushing motion creates a tendency for the push rod 505 to slide along the inside of the cross support shell 503. The limiting blocks 5051 on the upper and lower sides of the push rod 505 contact the inner wall of the support vertical tube 501, which prevents the push rod 505 from being completely pushed out. The tension spring 5052 inside the cross support shell 503 stretches and stores force when the push rod 505 is pushed. After the pushing protrusion 504 is disengaged from the pushing position, it pulls the push rod 505 back to its original position, thus realizing the reciprocating sliding of the push rod 505.

[0061] When the push rod 505 slides back and forth, the output connecting rod 506, which is rotatably mounted on its inner wall, moves in tandem, causing the connecting vertical shaft 507, which is rotatably connected to one end of the output connecting rod 506, to rotate. This, in turn, drives the rotating triangular block 508, which is fixed at the bottom of the connecting vertical shaft 507, to rotate around its own fulcrum. The arc-shaped positioning block 509 at the bottom of the rotating triangular block 508 and the arc-shaped positioning block 512 fixed to the wall of the vertical rod 511 fit together in an arc shape, and their axes are on the same horizontal line. This ensures the positioning accuracy of the rotating triangular block 508 during rotation. At the same time, the rotating triangular block 508... The connecting shaft 510 on the top surface is embedded in the U-shaped groove of the U-shaped combination block 513. When the rotating triangular block 508 rotates, the connecting shaft 510 slides along the groove wall of the U-shaped groove, causing the U-shaped combination block 513 and the vertical groove rod 511 to swing around the rotation connection point of the inner wall of the cross support shell 503. Finally, the vertical groove rod 511 drives the connecting frame 514 and the workpiece to complete the reciprocating swing action while following the circular rotation of the arc target frame 4, forming a compound motion of "circular rotation + reciprocating swing", ensuring that all parts of the inner wall of the workpiece can fully contact the target material on the arc target frame 4 to achieve uniform coating.

[0062] Step 4: Operation complete. After the coating is completed, the control machine 9 controls the coating host 1 to stop the operation. After the chamber pressure returns to normal and the temperature drops to a safe range, rotate the handwheel screw 201 in the opposite direction to loosen and open the combined sealing cover 2. Then rotate the adjusting screw 7 in the opposite direction to lower the fastening plate 6 and loosen the workpiece. The coated workpiece can then be taken out.

[0063] The installation, connection, or setting methods disclosed in this embodiment are all common mechanical connection methods. Any method that can achieve its beneficial effect can be implemented. In addition, the electrical components in this embodiment are all electrically connected to the main controller and the power supply. The main controller can be a conventional known device such as a computer that plays a control role. Those skilled in the art can control the electrical components through simple programming. Moreover, the existing disclosed power connection technology is also common knowledge in the field. Therefore, the specific structural composition and working principle will not be described in detail in this embodiment.

Claims

1. A coating device for the inner wall of an irregularly shaped cavity, comprising a coating host (1), two combined sealing covers (2), and a control unit (9), characterized in that: A geared motor (3) is fixedly installed on the lower side of the inner wall of the two combined sealing covers (2). An arc target frame (4) is fixedly installed at the output end of the two geared motors (3), and a workpiece placement assembly (5) is provided in the middle of the two arc target frames (4). The workpiece placement assembly (5) includes a support vertical tube (501) fixedly installed at the center of the arc target frame (4). A vertical drive rod (502) is rotatably installed at the bottom of the support vertical tube (501). Several horizontal support shells (503) are fixedly installed on both the left and right sides of the tube wall of the support vertical tube (501). A pusher protrusion (504) is fixedly installed on one side of each of the two corresponding horizontal support shells (503). A pusher groove rod (505) is slidably installed inside the horizontal support shell (503). An output connecting rod (506) is rotatably mounted on the inner wall of the push rod (505). One end of the output connecting rod (506) is rotatably connected to a connecting vertical shaft (507). A rotating triangular block (508) is fixedly mounted on the bottom of the connecting vertical shaft (507), and an arc head positioning block (509) is fixedly mounted on the bottom of the rotating triangular block (508). A connecting shaft column (510) is fixedly mounted on the side of the top surface of the rotating triangular block (508) away from the connecting vertical shaft (507). The inner wall of the cross support shell (503) is rotatably connected to a vertical groove rod (511) on one side of the arc head positioning block (509). The wall of the vertical groove rod (511) is fixedly installed with an arc-shaped positioning block (512) inside the cross support shell (503), and a U-shaped combination block (513) is fixedly installed on the top of the vertical groove rod (511). A connecting frame (514) is provided at the bottom of the vertical groove rod (511).

2. The coating device for the inner wall of an irregularly shaped cavity according to claim 1, characterized in that: The control unit (9) is electrically connected to the coating host (1) and is used to issue coating process execution instructions to the coating host (1).

3. The coating device for the inner wall of an irregularly shaped cavity according to claim 1, characterized in that: The two combined sealing caps (2) are rotatably connected to the left and right sides of the coating host (1) respectively. A handwheel screw (201) is fixedly mounted at the center of the outer surface of each combined sealing cap (2). The handwheel screw (201) can rotate along its own axis to achieve axial extension and retraction. On the surface of the coating host (1), a connecting hole block (202) is fixedly installed on one side of each handwheel screw (201). The connecting hole block (202) is provided with an internal thread hole or positioning hole that is compatible with the handwheel screw (201), and its installation position is precisely corresponding to the movement trajectory of the handwheel screw (201).

4. The coating device for the inner wall of an irregularly shaped cavity according to claim 1, characterized in that: The supporting vertical tube (501) is a square tube structure, and the supporting vertical tube (501) rotates synchronously with the arc target frame (4). The upper end of the vertical drive rod (502) extends through to the top surface of the arc target frame (4) and is fixedly connected to the upper part of the inner wall of the combined sealing cover (2). The pushing groove rod (505) is a square rod structure, and a groove is integrally formed at one end of the square rod, while an arc-shaped head is integrally formed at the other end of the square rod. The arc-shaped end and the pushing protrusion (504) are on the same horizontal line when running.

5. The coating device for the inner wall of an irregularly shaped cavity according to claim 1, characterized in that: Limiting blocks (5051) are fixedly installed on the upper and lower sides of the surface of the push rod (505) inside the support vertical tube (501). The limiting blocks (5051) are in contact with the inner wall of the support vertical tube (501) to prevent the push rod (505) from being completely pushed out. The push rod (505) is provided with a tension spring (5052) inside the cross support shell (503). The tension spring (5052) is fixed to the end of the push rod (505) by a block, and the other end of the tension spring (5052) is fixed to the inner wall of the cross support shell (503).

6. The coating device for the inner wall of an irregularly shaped cavity according to claim 1, characterized in that: The end of the vertical groove rod (511) is integrally formed with a conical groove. The arc-shaped positioning block (512) and the arc-shaped head positioning block (509) are fitted together with an arc surface, and their axes are on the same horizontal line to ensure positioning accuracy. The U-shaped combination block (513) is fitted with the connecting shaft column (510) through its U-shaped groove. When the connecting shaft column (510) and the U-shaped combination block (513) are combined, the U-shaped combination block (513) can be driven to rotate around the vertical groove rod (511).

7. The coating device for the inner wall of an irregularly shaped cavity according to claim 1, characterized in that: The top of the connecting frame (514) is integrally formed with a protruding structure. The external dimensions of the protruding structure are adapted to the inner wall contour of the vertical groove rod (511) and can be embedded inside the vertical groove rod (511) to achieve pre-positioning. At the same time, the top of the connecting frame (514) is stably connected to the bottom of the vertical groove rod (511) through three evenly distributed buckles (515).

8. The coating device for the inner wall of an irregularly shaped cavity according to claim 1, characterized in that: The vertical groove rod (511) has a tapered groove integrally formed at the end away from the connecting frame (514). The arc-shaped positioning block (512) and the arc-shaped head positioning block (509) are fitted together by the arc-shaped mating surface, and their axes are on the same horizontal line, which effectively ensures the positioning accuracy. The U-shaped combination block (513) is fitted with the connecting shaft column (510) through its integrally opened U-shaped groove. When the connecting shaft column (510) drives the relevant components to rotate, the connecting shaft column (510) makes a sliding motion along the U-shaped groove wall of the U-shaped combination block (513).

9. The coating device for the inner wall of an irregularly shaped cavity according to claim 1, characterized in that: The bottom of the connecting frame (514) is fitted with a fastening plate (6), and an adjusting screw (7) is rotatably installed on the bottom of the fastening plate (6). The adjusting screw (7) passes through the bottom of the connecting frame (514) along a vertical thread. Rotating the adjusting screw (7) can drive the fastening plate (6) to rise and fall vertically. On the bottom of the fastening plate (6), on both sides of the adjusting screw (7), a limiting vertical rod (8) is fixedly installed. The limiting vertical rod (8) slides vertically through the bottom of the connecting frame (514) and plays a guiding and limiting role in the rising and falling movement of the fastening plate (6).

10. A method for coating the inner wall of an irregularly shaped cavity, characterized in that: The coating apparatus for the inner wall of an irregularly shaped cavity as described in any one of claims 1-9, wherein the coating method for the inner wall of the irregularly shaped cavity comprises the following steps: Step 1, workpiece clamping and positioning, the workpiece clamping and positioning is to fix the workpiece to be coated by connecting frame (514). The top of the connecting frame (514) is embedded into the inner wall of the vertical groove rod (511) through an integrally formed protrusion structure to achieve pre-positioning, and then the three evenly distributed buckles (515) are engaged and locked with the bottom of the vertical groove rod (511). Step 2, sealing the coating cavity. After the workpiece is clamped, the two combined sealing covers (2) are rotated and closed around the rotating connection parts on the left and right sides of the coating host (1), so that the sealing end face of the combined sealing cover (2) is in contact with the corresponding port end face of the coating host (1) for positioning. Step 3, power transmission and workpiece compound motion. The power transmission and workpiece compound motion is that after sealing is completed, the deceleration motor (3) fixed on the lower side of the inner wall of the combined sealing cover (2) is started. The output end of the deceleration motor (3) drives the arc target frame (4) to rotate synchronously. Since the support vertical tube (501) is fixedly installed in the center of the arc target frame (4), the support vertical tube (501) rotates together with the arc target frame (4). When the arc target frame (4) drives the support vertical tube (501) to rotate, the vertical drive rod (502) will be relatively different from the support vertical tube (501). Since the push groove rod (505) is slidably installed inside the cross support shell (503), and the arc head and the jacking protrusion (504) are on the same horizontal line when running, when the support vertical tube (501) rotates relative to each other, it will generate periodic jacking operation with the jacking protrusion (504). This will generate a tendency for the push groove rod (505) to slide along the inside of the cross support shell (503). The tension spring (5052) inside the cross support shell (503) stretches and stores force when the push groove rod (505) is jacked. After the jacking protrusion (504) leaves the jacking position, it pulls the push groove rod (505) to reset, realizing the reciprocating sliding of the push groove rod (505). When the push rod (505) slides back and forth, the output connecting rod (506) rotatably mounted on its inner wall moves in tandem, causing the connecting vertical shaft (507) rotatably connected to one end of the output connecting rod (506) to rotate. This, in turn, drives the rotating triangular block (508) fixed at the bottom of the connecting vertical shaft (507) to rotate around its own fulcrum. The arc-shaped positioning block (509) at the bottom of the rotating triangular block (508) and the arc-shaped positioning block (512) fixed on the wall of the vertical groove rod (511) fit together in an arc shape, and their axes are on the same horizontal line, which can ensure that the rotating triangular block... The positioning accuracy of the block (508) when rotating, at the same time, the connecting shaft column (510) on the top surface of the rotating triangular block (508) is embedded in the U-shaped groove of the U-shaped combination block (513). When the rotating triangular block (508) rotates, the connecting shaft column (510) slides along the groove wall of the U-shaped groove, causing the U-shaped combination block (513) and the vertical groove rod (511) to swing around the rotation connection point of the inner wall of the cross support shell (503). Finally, the vertical groove rod (511) drives the connecting frame (514) and the workpiece to complete the reciprocating swing action while following the circumferential rotation of the arc target frame (4). Step 4, End of operation. The end of operation means that after the coating is completed, the control machine (9) controls the coating host (1) to stop the operation. After the chamber pressure returns to normal pressure and the temperature drops to a safe range, the handwheel screw (201) is rotated in the opposite direction to loosen and open the combined sealing cover (2). Then the adjusting screw (7) is rotated in the opposite direction to lower the fastening plate (6) to loosen the workpiece, and the coated workpiece can be taken out.

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