An apparatus and method for on-line detection of diamond thickness uniformity

Abstract

This invention discloses an online detection device and method for diamond thickness uniformity, belonging to the technical field of diamond detection equipment. In this invention: a servo motor on the detection platform drives a geared disc to rotate via a lead screw; a negative pressure tube connects to a negative pressure device, and the generated negative pressure adsorbs and fixes the diamond polycrystalline wafer. The detection platform is raised and lowered by a lifting assembly; its bottom surface is equipped with multi-radial distributed distance probes and edge distance probes; the outer ring side is fitted with a cleaning ring with dust-proof brush bristles via a quick-release structure; an air pump is installed on the top side; and a distance monitoring module is configured on the bottom side of the detection platform for wafer positioning. This invention first detects the flatness of the inner liner, then precisely positions the wafer, and after negative pressure adsorption to prevent displacement, the distance probes detect the wafer surface parameters in real time, and the system analyzes the thickness uniformity. This invention integrates cleaning, positioning, and detection functions, improving the accuracy and efficiency of diamond polycrystalline wafer thickness detection, and is suitable for industrial online detection of diamond polycrystalline wafers.

Description

Technical Field

[0001] This invention relates to the field of diamond testing equipment technology, and in particular to an online testing device and method for diamond thickness uniformity. Background Technology

[0002] In the industrial production of polycrystalline diamond wafers, thickness uniformity is one of the core indicators for measuring product quality and has a critical impact on subsequent application effects. Therefore, specialized equipment is needed to achieve online detection of the thickness uniformity of polycrystalline diamond wafers.

[0003] Existing diamond polycrystalline wafer thickness uniformity testing equipment suffers from insufficient testing accuracy. On the one hand, the diamond polycrystalline wafer is prone to positional shift due to equipment rotation during testing, leading to distortion of the original distance detection data and failing to accurately reflect the actual thickness of the wafer. On the other hand, existing equipment does not perform pre-testing of the flatness of the inner liner supporting the wafer. Minor unevenness of the inner liner will be directly transmitted to the detection data, further reducing the reliability of the test results and making it difficult to meet the requirements of high-precision testing.

[0004] Meanwhile, the existing testing equipment has a relatively fragmented functional design. Functions such as wafer positioning, testing environment cleaning, and thickness detection are independent of each other. The testing process requires manual intervention in multiple operation steps, resulting in low automation, cumbersome testing procedures, and low overall testing efficiency. It cannot meet the requirements of continuous and high-efficiency online testing in industrial production. Summary of the Invention

[0005] To solve the above-mentioned technical problems, the present invention is achieved through the following technical solution:

[0006] This invention provides an online testing device for the uniformity of diamond thickness, comprising a testing platform, a geared disc rotatably mounted above the testing platform, a testing dish fixedly mounted above the geared disc, an inner liner fitted into the inner testing groove of the testing dish, a testing plate located directly above the testing dish, and a lifting assembly for vertically raising and lowering the testing plate. The testing platform is equipped with a servo motor for rotating the geared disc. A negative pressure tube is installed through the center of the testing platform, geared disc, testing dish, and inner liner. The bottom end of the negative pressure tube is connected to an external connecting pipe via a sealed rotary joint. The external connecting pipe is also connected to a filter assembly and a negative pressure device. An air pump is fixedly mounted on the top side of the testing plate. The air pump includes an air nozzle inserted into the testing groove area. A cleaning ring is installed on the outer ring side of the testing plate. A testing strip and a distance probe are embedded in the bottom surface of the testing plate. The testing strip includes multiple distance probes distributed radially along the testing plate. A radial groove is formed on the top surface of the inner liner to cooperate with the distance probes. The distance probes are aligned with the edge ring plate of the testing dish. The bottom side of the testing platform is also equipped with multiple distance monitoring modules, which are used to monitor the position status of the diamond polycrystalline wafer placed on the upper side of the inner liner.

[0007] Preferably, a lead screw connected to the output end of a servo motor is arranged above the testing platform, and a differential toothed mouth that mates with the lead screw is provided on the ring side of the gear plate; a bearing ring is arranged on the bottom side of the gear plate, and a bearing ring mounting groove for installing the bearing ring is provided on the top surface of the testing platform.

[0008] Preferably, the top side of the gear disc is provided with multiple protrusions, and the protrusions are provided with threaded blind grooves. Multiple support plates are provided on the outer ring side of the test dish. The support plates are provided with insertion holes. Fixing bolts are installed at the aligned insertion holes and threaded blind groove positions. Shock-absorbing pads are also installed between the protrusions and the support plates. The fixing bolts also pass through the shock-absorbing pads.

[0009] Preferably, a first slot is provided at the center of the testing platform, a second slot is provided at the center of the gear disc, a third slot is provided at the center of the testing dish, and a fourth slot is provided at the center of the inner liner. The negative pressure tube passes through the fourth slot, the third slot, the second slot, and the first slot in sequence from top to bottom. The upper opening of the fourth slot is an inverted frustum shape, and the top of the negative pressure tube is provided with an inverted conical nozzle that matches the upper opening of the fourth slot.

[0010] Preferably, the bottom section of the negative pressure intubation tube protrudes downward from the bottom surface of the testing platform, and the negative pressure intubation tube is provided with a threaded section, at which a locking nut is installed that abuts against the bottom surface of the testing platform.

[0011] Preferably, the detection platform has a first detection hole, the gear disc has a second detection hole, the detection dish has a third detection hole, and the inner liner has a fourth detection hole. When the gear disc is in its initial position, the first, second, third, and fourth detection holes are aligned, and the detection path of the distance monitoring module passes upward through the first, second, third, and fourth detection holes.

[0012] Preferably, the multiple distance probes of the detection strip are aligned with the radius range of the inner liner.

[0013] Preferably, the cleaning ring is installed on the outer ring side of the detection tray via a quick-release structure, and the inner circumference of the cleaning ring is provided with dust-proof bristles that contact the outer ring surface of the detection tray. The outer ring surface of the detection tray has an inner opening that mates with the quick-release structure, and the cleaning ring has an outer opening that mates with the quick-release structure.

[0014] This invention also provides an online detection method for diamond thickness uniformity, applied to the aforementioned online detection equipment for diamond thickness uniformity, comprising the following steps:

[0015] Step 1: Start the servo motor to drive the inner liner to rotate one revolution. The distance probe continuously detects the distance parameters on the upper surface of the inner liner. The system determines the flatness of the upper surface of the inner liner based on the preset threshold.

[0016] Step 2: If the flatness of the inner liner does not meet the standard, the system will output a warning signal and perform inner liner replacement or maintenance on the equipment. After replacement or maintenance, the inner liner flatness test step in Step 1 will be repeated.

[0017] Step 3: If the flatness of the inner liner meets the standard, control the lifting component to move the detection plate to the highest position of the vertical stroke, and place the diamond polycrystalline wafer on the upper surface of the inner liner.

[0018] Step 4: The distance monitoring module detects the obstruction signal of the diamond polycrystalline wafer. If any distance monitoring module fails to detect the obstruction signal, the position of the diamond polycrystalline wafer is readjusted and the detection is repeated until all distance monitoring modules detect the obstruction signal.

[0019] Step 5: The lifting assembly moves the detection plate downwards until the edge probe detects that the distance between the plate and the edge ring plate of the detection dish is not greater than the preset distance, at which point the lifting assembly stops operating.

[0020] Step 6: Start the negative pressure equipment. The negative pressure tube generates a negative pressure suction force to adsorb and fix the diamond polycrystalline wafers on the inner liner, maintaining a stable negative pressure in the negative pressure equipment.

[0021] Step 7: Start the suction pump to expel the original gas in the test tank through the suction nozzle, and turn off the suction pump after the preset time has been reached.

[0022] Step 8: Start the servo motor to drive the diamond polycrystalline wafer on the upper surface of the inner liner to rotate. The distance probe detects the distance parameters on the surface of the diamond polycrystalline wafer in real time and transmits the parameter information to the system.

[0023] Step 9: After the test is completed, control the lifting assembly to move the test plate upward and remove the diamond polycrystalline wafer.

[0024] Step 10: After the distance monitoring module detects no obstruction signal from the diamond wafer, the control lifting assembly moves the detection disk down to the lowest position of its vertical stroke. At the same time, the servo motor is started to rotate the gear disk to its initial position. The distance probe of the detection disk is aligned with the radial groove of the inner liner. The servo motor is then turned off, and the system waits for the next detection process.

[0025] Compared with existing technologies, the beneficial effects of this invention are:

[0026] This invention eliminates interference factors on detection accuracy from both the detection basis and wafer fixation aspects by using a front-mounted inner liner flatness detection and a negative pressure insertion tube to adsorb and fix the diamond polycrystalline wafer. With the help of multiple radially distributed distance probes for real-time detection, the thickness parameters of the diamond polycrystalline wafer at different positions can be accurately obtained, which greatly improves the accuracy of thickness uniformity detection.

[0027] This invention integrates functions such as wafer positioning, inspection environment cleaning, thickness detection, and equipment reset into one unit. Through the coordinated control of servo motors, lifting components, and negative pressure equipment, it realizes the automated operation of the inspection process without much manual intervention, effectively simplifying the inspection operation, improving inspection efficiency, and efficiently adapting to the online inspection needs of diamond polycrystalline wafers in industrial production. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the overall structure of the detection device of the present invention.

[0029] Figure 2 This is a top view of the detection stage, gear plate, detection dish, inner liner, servo motor and related components in this invention.

[0030] Figure 3 for Figure 1 A magnified structural diagram of part A in the middle.

[0031] Figure 4 for Figure 1 A magnified structural diagram of section B in the middle.

[0032] Figure 5 This is a structural diagram showing the disassembly and separation of the various components of the detection device of the present invention.

[0033] Figure 6 This is a schematic diagram of the detection platform and distance monitoring module in this invention.

[0034] Figure 7 This is a schematic diagram of the gear disc component in this invention.

[0035] Figure 8 This is a schematic diagram of the detection dish in this invention.

[0036] Figure 9 This is a schematic diagram of the inner liner and negative pressure cannula in this invention.

[0037] Figure 10 This is a schematic diagram of the cleaning ring in this invention.

[0038] Figure 11 This is a schematic diagram of the detection disc, suction pump, and lifting assembly in this invention.

[0039] Wherein: 1-Detection platform, 101-First slot, 102-First probe hole, 103-Collar mounting groove; 2-Gear disc component, 201-Differential tooth, 202-Bearing ring, 203-Second slot, 204-Second probe hole, 205-Protrusion, 206-Thread blind groove; 3-Detection dish, 301-Support plate, 302-Insertion rod hole, 303-Detection groove, 304-Third slot, 305-Third probe hole; 4-Inner liner, 401-Fourth slot, 402-Fourth probe hole, 403-Radial groove; 5-Negative pressure insertion tube, 501-Inverted cone nozzle 502-Threaded section; 6-Servo motor; 7-Lead screw; 8-Detection disc; 801-Detection strip; 8011-Distance probe; 802-Edge distance probe; 803-Internal opening; 9-Cleaning ring; 901-Dustproof brush bristles; 902-External opening; 10-Suction pump; 1001-Suction nozzle; 11-Lifting assembly; 12-Distance monitoring module; 13-Sealed rotary joint; 14-External connecting pipe; 15-Filter assembly; 16-Negative pressure equipment; 17-Diamond polycrystalline wafer; 18-Locking nut; 19-Shock-absorbing pad; 20-Fixing bolt; 21-Quick release structure. Detailed Implementation

[0040] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0041] Example 1

[0042] like Figure 1 , Figure 2 , Figure 5As shown, the supporting structure of the online diamond thickness uniformity detection device in this invention is a detection platform 1. A geared disc component 2 is rotatably mounted on the detection platform 1. A servo motor 6 is configured on one side of the detection platform 1. A lead screw 7, which is connected to the output end of the servo motor 6, is also fixed on the top of the detection platform 1. The outer ring of the geared disc component 2 has a differential tooth 201 that meshes with the lead screw 7. When the servo motor 6 is running, it can drive the geared disc component 2 to rotate around the center of the detection platform 1 through the lead screw 7. A bearing ring 202 is integrally formed on the bottom side of the geared disc component 2. A bearing ring mounting groove 103 is opened on the top surface of the detection platform 1. The bearing ring 202 is fitted into the bearing ring mounting groove 103, which can reduce the frictional resistance when the geared disc component 2 rotates and ensure the smoothness of rotation. The top side of the gear disc component 2 is evenly provided with multiple protrusions 205, and the top surface of each protrusion 205 is provided with a threaded blind groove 206. A detection dish 3 is installed on the top of the gear disc component 2. Multiple support plates 301 are fixed on the outer ring side of the detection dish 3 corresponding to the positions of the protrusions 205. The support plates 301 are provided with insertion holes 302. The fixing bolts 20 pass through the insertion holes 302 from top to bottom and are screwed into the threaded blind grooves 206 to achieve a fixed connection between the detection dish 3 and the gear disc component 2. A shock-absorbing pad 19 is also installed between the protrusions 205 and the support plates 301. The fixing bolts 20 also pass through the shock-absorbing pad 19. The shock-absorbing pad 19 can absorb the vibration generated during the operation of the equipment and avoid the vibration from interfering with the detection accuracy.

[0043] like Figure 1 , Figure 4 , Figure 9As shown, the inner circumference of the testing dish 3 has a testing groove 303, and an inner liner 4 is fitted inside the testing groove 303. The diamond polycrystalline wafer 17 is placed directly on the upper surface of the inner liner 4, which serves to support and protect the diamond polycrystalline wafer 17. The testing platform 1, the toothed disc 2, the testing dish 3, and the inner liner 4 each have a first slot 101, a second slot 203, a third slot 304, and a fourth slot 401 at their center positions, respectively. The four slots are aligned vertically, and a negative pressure tube 5 is installed through them. The negative pressure tube 5 passes through the fourth slot 401, the third slot 304, the second slot 203, and the first slot 101 sequentially from top to bottom, with its bottom protruding downwards from the bottom surface of the testing platform 1. The upper opening of the fourth slot 401 is an inverted frustum shape, and the top of the negative pressure tube 5 has an integrally formed inverted cone nozzle 501 that matches the inverted frustum shape opening, which improves the sealing performance of the negative pressure adsorption. The lower section of the negative pressure intubation tube 5 is provided with a threaded section 502, on which a locking nut 18 is screwed. The top surface of the locking nut 18 abuts against the bottom surface of the testing platform 1, thereby fixing the negative pressure intubation tube 5 to the testing platform 1 and preventing the negative pressure intubation tube 5 from shifting position. The bottom end of the negative pressure intubation tube 5 is connected to the external connecting pipe 14 through a sealed rotary joint 13. The other end of the external connecting pipe 14 is connected to the air filter assembly 15 and the negative pressure device 16, respectively. When the negative pressure device 16 is started, it can generate negative pressure suction through the negative pressure intubation tube 5. The air filter assembly 15 can filter impurities in the airflow, preventing impurities from entering the interior of the negative pressure device 16 and causing damage, while also preventing impurities from contaminating the diamond polycrystalline wafer 17.

[0044] like Figure 1 , Figure 3 , Figure 11As shown, a detection plate 8 is positioned directly above the detection dish 3, and a lifting assembly 11 is installed above the detection platform 1. The output end of the lifting assembly 11 is fixedly connected to the top surface of the detection plate 8, enabling the detection plate 8 to move vertically up and down. A suction pump 10 is fixedly installed on the top side of the detection plate 8, and the suction end of the suction pump 10 is connected to a suction nozzle 1001. The suction nozzle 1001 extends downward and inserts into the detection groove 303 area of ​​the detection dish 3, enabling gas replacement within the detection groove 303. An inner opening 803 is provided on the outer ring surface of the detection plate 8, and a cleaning ring 9 is installed via a quick-release structure 21. An outer opening 902 is provided on the outer ring surface of the cleaning ring 9 corresponding to the inner opening 803. The quick-release structure 21 allows for quick installation and removal of the cleaning ring 9, facilitating future replacement and maintenance. Multiple dust-proof bristles 901 are evenly arranged on the inner circumference of the cleaning ring 9. When the detection disk 8 moves down to the designated position, the dust-proof bristles 901 make close contact with the outer ring surface of the detection dish 3, which can remove dust from the airflow entering the detection groove 303 from the outside. The bottom surface of the detection disk 8 is embedded with a detection strip 801 and a distance probe 802. Multiple distance probes 8011 are arranged on the detection strip 801 radially distributed along the detection disk 8. The top surface of the inner liner 4 has radial grooves 403 that cooperate with the distance probes 8011. The distance probes 8011 can detect the distance to the surface of the diamond polycrystalline wafer 17 along the radial grooves 403. The multiple distance probes 8011 are aligned with the radius of the inner liner 4, which can cover the radial detection area of ​​the diamond polycrystalline wafer 17. The distance probes 802 are aligned vertically with the edge ring plate of the detection dish 3, which can detect the relative distance between the detection disk 8 and the detection dish 3, and realize precise control of the downward position of the detection disk 8.

[0045] like Figure 1 , Figure 6 , Figure 7 , Figure 8 As shown, multiple distance monitoring modules 12 are evenly arranged on the bottom side of the detection platform 1. The detection platform 1, the toothed disc component 2, the detection dish 3, and the inner liner 4 are respectively provided with a first detection hole 102, a second detection hole 204, a third detection hole 305, and a fourth detection hole 402. When the toothed disc component 2 is in the initial position, the four detection holes are aligned vertically. The monitoring end of the distance monitoring module 12 is vertically upward and passes through the four detection holes in sequence to align with the upper surface of the inner liner 4. This can detect whether the diamond polycrystalline wafer 17 is placed in place. The position status of the diamond polycrystalline wafer 17 is determined by the blocking signal, thereby achieving precise positioning of the wafer.

[0046] Example 2

[0047] This invention presents an online detection method for the uniformity of diamond thickness. The specific detection process is as follows:

[0048] First, the equipment is in its initial state: the gear plate 2 is reset to its initial position, each detection hole is aligned vertically, and the detection plate 8 is located at the lowest position of its vertical stroke. At this time, the detection plate 8 and the cleaning ring 9 completely cover the opening of the detection groove 303 of the detection dish 3, and the distance probe 8011 on the detection strip 801 is aligned with the radial groove 403 of the inner liner 4.

[0049] The second step is to start the flatness detection program of the inner lining piece: the servo motor 6 drives the gear plate 2, the detection dish 3, and the inner lining piece 4 to rotate around the center for one revolution. During the rotation, the distance probe 8011 continuously detects the distance parameters of the upper surface of the inner lining piece 4 and transmits the parameters to the control system in real time. The system makes a comprehensive judgment on the flatness of the upper surface of the inner lining piece 4 according to the preset flatness judgment threshold.

[0050] Third, if the control system determines that the flatness of the upper surface of the inner liner 4 does not meet the requirements, the system will immediately output an audible and visual warning signal to remind the staff to replace the inner liner 4 or perform related maintenance operations. After the maintenance is completed, the inner liner flatness detection program will be restarted and the above flatness detection steps will be executed again.

[0051] Fourth step: If the control system determines that the flatness of the upper surface of the inner liner 4 meets the requirements, the lifting component 11 drives the detection disk 8 to rise to the highest position of its vertical stroke, providing operating space for the placement of the diamond polycrystalline wafer 17. The staff then smoothly places the diamond polycrystalline wafer 17 to be tested at the center of the upper surface of the inner liner 4.

[0052] Fifth step: The distance monitoring module 12 is activated and detects the obstruction signal of the diamond polycrystalline wafer 17. If any distance monitoring module 12 fails to detect the obstruction signal, it indicates that the diamond polycrystalline wafer 17 is misplaced. The staff will readjust the position of the diamond polycrystalline wafer 17 until all distance monitoring modules 12 detect the obstruction signal, confirming that the diamond polycrystalline wafer 17 is accurately positioned.

[0053] In the sixth step, the lifting assembly 11 slowly moves the detection plate 8 downwards, and the edge probe 802 continuously detects the distance between the edge plate of the detection dish 3 and the edge ring plate. When the detected distance is not greater than the system preset distance, the lifting assembly 11 immediately stops running. At this time, the dust-proof brush bristles 901 on the cleaning ring 9 are in close contact with the outer ring surface of the detection dish 3, completing the environmental preparation before detection.

[0054] Step 7: Start the negative pressure device 16. The negative pressure device 16 generates a stable negative pressure suction in the detection tank 303 through the external connecting pipe 14 and the negative pressure insertion pipe 5, which adsorbs and fixes the diamond polycrystalline wafer 17 on the upper surface of the inner liner 4, ensuring that the diamond polycrystalline wafer 17 will not shift in position due to the rotation of the toothed disc 2 during subsequent detection.

[0055] Step 8: Start the suction pump 10. The suction pump 10 quickly discharges the original gas in the detection tank 303 of the detection dish 3 through the suction nozzle 1001. The outside air enters the detection tank 303 under the action of air pressure difference. When the incoming airflow passes through the dust-proof brush bristles 901 of the cleaning ring 9, the dust, impurities and other substances are effectively filtered to prevent dust and impurities from adhering to the surface of the diamond polycrystalline wafer 17 and affecting the detection accuracy. The suction pump 10 will continue to run for a preset time and then stop automatically.

[0056] In the ninth step, the servo motor 6 starts again, driving the gear plate 2, the detection dish 3, the inner liner 4 and the diamond polycrystalline wafer 17 to rotate slowly. The negative pressure device 16 maintains a stable negative pressure. Multiple distance probes 8011 on the detection strip 801 detect the distance to the surface of the diamond polycrystalline wafer 17 in real time and transmit the detected distance parameters to the control system for data processing in real time.

[0057] Step 10: The control system analyzes and calculates the received distance parameters, converts the distance parameters into thickness data at the corresponding position of the diamond polycrystalline wafer 17, compares the thickness data at different radial and circumferential positions, calculates the thickness deviation value, and comprehensively analyzes the thickness uniformity of the diamond polycrystalline wafer 17 according to the preset uniformity judgment standard, and generates the test results.

[0058] In the eleventh step, after the test is completed, the lifting assembly 11 drives the test plate 8 to rise to the highest position of the vertical stroke. The staff takes out the tested diamond polycrystalline wafer 17. At this time, none of the distance monitoring modules 12 detect the obstruction signal of the diamond polycrystalline wafer 17. After receiving the signal, the control system controls the lifting assembly 11 to drive the test plate 8 to fall to the lowest position of the vertical stroke again. At the same time, the servo motor 6 drives the gear plate 2, the test dish 3, and the inner liner 4 to rotate until the gear plate 2 returns to the initial position. The servo motor 6 stops running, and the equipment completes the reset of one test process, waiting for the next test.

[0059] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An online detection device for diamond thickness uniformity, characterized in that: The device includes a testing platform (1), a geared disc (2) rotatably mounted on the testing platform (1), a testing dish (3) fixedly mounted on the geared disc (2), an inner liner (4) fitted into the inner testing groove (303) of the testing dish (3), a testing plate (8) located directly above the testing dish (3), and a lifting assembly (11) that drives the testing plate (8) to rise and fall vertically. The testing platform (1) is equipped with a servo motor (6) for driving the geared disc (2) to rotate. A negative pressure tube (5) is installed through the center of the testing platform (1), the geared disc (2), the testing dish (3), and the inner liner (4). The bottom end of the negative pressure tube (5) is connected to an external connecting pipe (14) through a sealed rotary joint (13). The external connecting pipe (14) is also connected to a filter assembly (15) and a negative pressure device (16). An air pump (10) is fixedly installed on the top side of the detection plate (8). The air pump (10) includes an air nozzle (1001) inserted into the area of ​​the detection groove (303). A cleaning ring (9) is installed on the outer ring side of the detection plate (8). A detection strip (801) and a distance probe (802) are embedded on the bottom surface of the detection plate (8). The detection strip (801) includes a plurality of distance probes (8011) distributed radially along the detection plate (8). A radial groove (403) is opened on the top surface of the inner liner (4) to cooperate with the distance probe (8011). The distance probe (802) is aligned with the edge ring plate of the detection dish (3). The bottom side of the detection station (1) is also equipped with multiple distance monitoring modules (12) for monitoring the obstruction signal of the diamond polycrystalline wafer (17).

2. The online detection device for diamond thickness uniformity according to claim 1, characterized in that: The detection platform (1) is equipped with a lead screw (7) connected to the output end of the servo motor (6), and the gear plate (2) is provided with a differential toothed mouth (201) that cooperates with the lead screw (7) on the ring side. The bottom side of the gear disc component (2) is provided with a bearing ring (202), and the top surface of the testing table (1) is provided with a bearing ring mounting groove (103) for mounting the bearing ring (202).

3. The online detection device for diamond thickness uniformity according to claim 1, characterized in that: The toothed disc component (2) has multiple protrusions (205) on its top side, and the protrusions (205) have threaded blind grooves (206). The outer ring side of the detection dish (3) has multiple support plates (301), and the support plates (301) have insertion holes (302). Fixing bolts (20) are installed at the aligned insertion holes (302) and threaded blind grooves (206).

4. The online detection device for diamond thickness uniformity according to claim 1, characterized in that: The detection platform (1) has a first slot (101) at its center, the toothed disc (2) has a second slot (203) at its center, the detection dish (3) has a third slot (304) at its center, the inner liner (4) has a fourth slot (401) at its center, and the negative pressure tube (5) passes through the fourth slot (401), the third slot (304), the second slot (203), and the first slot (101) from top to bottom. The upper opening of the fourth slot (401) is an inverted frustum shape, and the top of the negative pressure tube (5) is provided with an inverted cone nozzle (501) that matches the upper opening of the fourth slot (401).

5. The online detection device for diamond thickness uniformity according to claim 1, characterized in that: The bottom section of the negative pressure intubation tube (5) protrudes downward from the bottom surface of the testing platform (1). The negative pressure intubation tube (5) is provided with a threaded section (502). A locking nut (18) that abuts against the bottom surface of the testing platform (1) is installed at the position of the threaded section (502).

6. The online detection device for diamond thickness uniformity according to claim 1, characterized in that: The detection platform (1) has a first detection hole (102), the gear disc (2) has a second detection hole (204), the detection dish (3) has a third detection hole (305), and the inner liner (4) has a fourth detection hole (402). When the gear disc (2) is in its initial position, the first detection hole (102), the second detection hole (204), the third detection hole (305), and the fourth detection hole (402) are aligned, and the detection path of the distance monitoring module (12) passes upward through the first detection hole (102), the second detection hole (204), the third detection hole (305), and the fourth detection hole (402).

7. The online detection device for diamond thickness uniformity according to claim 1, characterized in that: The multiple distance probes (8011) of the detection strip (801) are aligned with the radius range of the inner liner (4).

8. The online detection device for diamond thickness uniformity according to claim 1, characterized in that: The cleaning ring (9) is installed on the outer ring side of the detection plate (8) via a quick-release structure (21), and the inner circumference of the cleaning ring (9) is provided with dust-proof bristles (901) that contact the outer ring surface of the detection dish (3). The outer ring of the detection disc (8) has an inner opening (803) that cooperates with the quick-release structure (21), and the cleaning ring (9) has an outer opening (902) that cooperates with the quick-release structure (21).

9. An online detection method for diamond thickness uniformity, characterized in that, An online detection device for diamond thickness uniformity according to any one of claims 1 to 8, comprising the following steps: Step 1: Start the servo motor (6) to drive the inner liner (4) to rotate one revolution. The distance probe (8011) continuously detects the distance parameters of the upper surface of the inner liner (4). The system determines the flatness of the upper surface of the inner liner (4) according to the preset threshold. Step 2: If the flatness of the inner lining (4) does not meet the standard, the system outputs a warning signal and performs replacement or maintenance operations on the inner lining (4) of the equipment. After replacement or maintenance, the flatness test steps of the inner lining (4) in Step 1 are repeated. Step 3: If the flatness of the inner liner (4) meets the standard, control the lifting component (11) to move the detection plate (8) up to the highest position of the vertical stroke, and place the diamond polycrystalline wafer (17) on the upper surface of the inner liner (4); Step 4: The distance monitoring module (12) detects the obstruction signal of the diamond polycrystalline wafer (17). If any distance monitoring module (12) fails to detect the obstruction signal, the position of the diamond polycrystalline wafer (17) is readjusted and the detection is repeated until all distance monitoring modules (12) detect the obstruction signal. Step 5: The lifting assembly (11) moves the detection plate (8) down until the edge distance probe (802) detects that the distance between the edge of the detection dish (3) and the edge ring plate is not greater than the preset distance, and then controls the lifting assembly (11) to stop running. Step 6: Start the negative pressure device (16), and use the negative pressure tube (5) to generate negative pressure suction to adsorb and fix the diamond polycrystalline wafer (17) on the inner liner (4), and maintain the negative pressure of the negative pressure device (16) stable; Step 7: Start the suction pump (10) to discharge the original gas in the detection tank (303) through the suction nozzle (1001), and turn off the suction pump (10) after the preset time is reached. Step 8: Start the servo motor (6) to drive the diamond polycrystalline wafer (17) on the upper surface of the inner liner (4) to rotate. The distance probe (8011) detects the distance parameters on the surface of the diamond polycrystalline wafer (17) in real time and transmits the parameter information to the system. Step 9: After the test is completed, control the lifting assembly (11) to move the test plate (8) upward and take out the diamond polycrystalline wafer (17). In step 10, after the distance monitoring module (12) does not detect any obstruction signal from the diamond polycrystalline wafer (17), the control lifting component (11) moves the detection disk (8) down to the lowest position of the vertical stroke. At the same time, the servo motor (6) is started to drive the gear disk component (2) to rotate to the initial position. The distance probe (8011) of the detection disk (8) is aligned with the radial groove (403) of the inner liner (4). The servo motor (6) is turned off, and the system waits for the next detection process.

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