A dynamic wear compensation cmp polishing pad and method of making same

Abstract

The application relates to a polishing material, and particularly discloses a dynamic wear compensation CMP polishing pad and a preparation method thereof. The dynamic wear compensation CMP polishing pad is obtained by coating a base cloth with a hybrid slurry and then solidifying the hybrid slurry; raw materials of the hybrid slurry include modified porous fillers and polyurethane slurry; raw materials of the polyurethane slurry include the following components in parts by weight: 90-110 parts of polyurethane resin, 55-65 parts of N,N-dimethylformamide, 10-20 parts of color paste, 0.03-0.07 parts of a catalyst and 1-5 parts of a hydroxyl-terminated polyether diol; and raw materials of the modified porous fillers include anodic aluminum powder, a silane coupling agent and aliphatic polyisocyanate. The polishing pad in the application realizes in-situ loading and dynamic replenishment of abrasives by constructing a porous hybrid system through silanization modification of anodic aluminum, so that the service life and polishing precision of the polishing pad are improved.

Description

Technical Field

[0001] This application relates to a polishing material, and more particularly to a dynamic wear-compensating CMP polishing pad and its preparation method. Background Technology

[0002] Semiconductor polishing pads are mainly made of polyurethane and base fabric, with fillers often consisting of single inorganic particles such as cerium oxide and zirconium oxide. However, traditional polyurethane polishing pads have significant drawbacks: firstly, they have poor dynamic wear stability, with the material removal rate decreasing rapidly over time, resulting in insufficient polishing consistency and affecting the yield of high-precision products such as semiconductor devices; secondly, the abrasive is unevenly dispersed, and added abrasive tends to agglomerate, causing scratches and poor smoothness on the polished surface; and thirdly, they have a relatively short lifespan. Summary of the Invention

[0003] To improve the dynamic wear stability of polishing pads, this application provides a dynamic wear-compensating CMP polishing pad and its preparation method.

[0004] Firstly, this application provides a dynamic wear-compensating CMP polishing pad, which adopts the following technical solution: A dynamic wear-compensating CMP polishing pad is obtained by coating a base fabric with a hybrid slurry and curing it. The raw materials of the hybrid slurry include modified porous fillers and polyurethane slurry. The raw materials of the polyurethane slurry include the following components in parts by weight: 90-110 parts of polyurethane resin, 55-65 parts of N,N-dimethylformamide, 10-20 parts of color paste, 0.03-0.07 parts of catalyst, and 1-5 parts of hydroxyl-terminated polyether diol. The raw materials of the modified porous filler include anodic aluminum oxide powder, silane coupling agent, and aliphatic polyisocyanate.

[0005] By adopting the above technical solution, the anodic aluminum oxide powder is modified with silane coupling agent, which improves the dispersion effect of the modified porous filler and realizes in-situ loading and dynamic replenishment of abrasive. Moreover, the aliphatic polyisocyanate adsorbed on the surface of the anodic aluminum oxide powder pore reservoir reacts with the terminal hydroxyl polyether diol in the slurry to form a local cross-linking reinforcement layer. The reinforcement layer makes the pore wall less prone to collapse and the wear rate more uniform, thereby improving the dynamic wear stability.

[0006] In one specific implementation, the method for preparing the modified porous filler includes the following steps: Preparation of silane coupling agent solution: γ-aminopropyltriethoxysilane and γ-glycidoxypropyltrimethoxysilane are mixed at a mass ratio of 1:1, added to a mixed solvent of ethanol and water, stirred and mixed evenly, and the pH is adjusted to 4.5-5.5 with glacial acetic acid to obtain silane coupling agent solution. Preparation of silanized anodized aluminum oxide powder: Anodized aluminum oxide powder was immersed in a 5% hydrochloric acid solution and ultrasonically treated for 30 min. It was then washed with deionized water until neutral and dried to obtain treated anodized aluminum oxide powder. The treated anodized aluminum oxide powder was mixed with a silane coupling agent solution and stirred at a constant temperature of 60℃ for 2-4 h. After filtration and drying, silanized anodized aluminum oxide powder was obtained. Composite: Aliphatic polyisocyanate was dissolved in anhydrous ethyl acetate, silanized anodized alumina powder was added, the mixture was stirred under vacuum, filtered, and dried under vacuum to obtain the modified porous filler.

[0007] By adopting the above technical solution, a silane coupling agent solution is first prepared by combining γ-aminopropyltriethoxysilane and γ-glycidoxypropyltrimethoxysilane. Then, the silane coupling agent solution is used to modify the anodic aluminum oxide powder to improve the dispersion performance of the anodic aluminum oxide powder. Finally, aliphatic polyisocyanate is loaded onto the powder to obtain a modified porous filler.

[0008] In one specific implementation, in the silane coupling agent solution preparation step, the total mass of γ-aminopropyltriethoxysilane and γ-glycidoxypropyltrimethoxysilane is 3%-8% of the mass of N,N-dimethylformamide.

[0009] In one specific implementation, in the silanized anodic aluminum oxide powder preparation step, the mass-to-volume ratio of the treated anodic aluminum oxide powder to the silane coupling agent solution is 1:(8-12).

[0010] In one specific implementation, in the composite step, the weight ratio of aliphatic polyisocyanate to silanized anodized aluminum oxide powder is 30:(75-85).

[0011] By adopting the above technical solution, the combination of silane coupling agent, anodic aluminum oxide powder, and aliphatic polyisocyanate is further limited, thereby improving the modification effect on anodic aluminum oxide powder and thus further improving the performance of the final polishing pad.

[0012] In one specific implementation, the raw materials of the polyurethane slurry further include the following components in parts by weight: 0.5 to 1.5 parts of bis(2-hydroxyethyl) disulfide, 0.5 to 0.7 parts of hydroxyl-terminated PDMS, and 0.10 to 0.14 parts of polyether-modified siloxane leveling agent.

[0013] By adopting the above technical solution, bis(2-hydroxyethyl) disulfide provides stress relaxation and adaptability, which gradually reinforces the wear process. The combination of hydroxyl-terminated PDMS and polyether-modified siloxane leveling agent will reduce the frictional heat peak. The reduction of the heat peak makes the reaction of aliphatic polyisocyanate in the modified porous filler smoother, further improving the dynamic wear stability.

[0014] In one specific implementation scheme, the weight ratio of the modified porous filler to the polyurethane slurry is (3-15):100.

[0015] Secondly, this application provides a method for preparing a dynamic wear-compensating CMP polishing pad, which employs the following technical solution: A method for preparing a dynamic wear-compensating CMP polishing pad includes the following steps: Preparation of hybrid slurry: N,N-dimethylformamide is heated, followed by the addition of polyurethane resin, stirring, cooling, the addition of color paste, catalyst, and hydroxyl-terminated polyether diol, and stirring to obtain polyurethane slurry; modified porous filler is added to polyurethane slurry and stirred to obtain hybrid slurry; Base fabric treatment and coating: The base fabric is soaked in a 20% N,N-dimethylformamide aqueous solution, and then extruded under a pressure of 2-6 kg. The hybrid slurry is then coated onto the soaked base fabric with a coating thickness of 5 mm-20 mm and allowed to stand for 0.5-2 min. Finally, it is solidified in a 20-23% N,N-dimethylformamide aqueous solution at a solidification temperature of 30-40℃. After solidification, it is washed with water and extruded. After extrusion, it is dried, polished, and finely ground to obtain the CMP polishing pad.

[0016] By adopting the above technical solution, the modified porous filler is first added to the polyurethane slurry and stirred to obtain a hybrid slurry. Then, it is coated onto the base fabric, solidified, washed with water, extruded, dried, polished, and finely ground to obtain a CMP polishing pad with good dynamic wear stability.

[0017] In one specific implementation, in the base fabric treatment and coating step, the drying temperature is 120-150℃ and the drying time is 15-30min.

[0018] In one specific implementation, in the base fabric treatment and coating steps, sanding is performed by sanding with 180-grit sandpaper for 0.5-2mm, and fine sanding is performed by fine sanding with 200-grit sandpaper.

[0019] In summary, this application includes at least one of the following beneficial technical effects: In this application, silane coupling agents are used to modify anodic aluminum oxide powder, which improves the dispersion effect of the modified porous filler and realizes in-situ loading and dynamic replenishment of abrasive. Furthermore, the pore reservoir of anodic aluminum oxide powder and the aliphatic polyisocyanate adsorbed on the surface react with the terminal hydroxyl polyether diol in the slurry to form a locally cross-linked reinforcing layer. The reinforcing layer makes the pore walls less prone to collapse and the wear rate more uniform, thereby improving the dynamic wear stability. In this application, bis(2-hydroxyethyl) disulfide provides stress relaxation and adaptability, enabling progressive reinforcement of the wear process. The combination of hydroxyl-terminated PDMS and polyether-modified siloxane leveling agent reduces the peak frictional heat. The reduction in the peak heat makes the reaction of aliphatic polyisocyanate in the modified porous filler smoother, further improving dynamic wear stability. The method in this application involves first adding modified porous filler to polyurethane slurry, stirring to obtain a hybrid slurry, then coating it onto a base fabric, solidifying it, washing it with water, extruding it, drying it, polishing it, and fine grinding it to obtain a CMP polishing pad with good dynamic wear stability. Detailed Implementation

[0020] The present application will be further described in detail below with reference to the embodiments.

[0021] All raw materials used in the examples are commercially available. The polyurethane resin is polyether-type thermoplastic polyurethane granules with a Shore A of 85±2, a moisture content ≤0.05wt%, and an ash content ≤0.3wt%. The color paste is a carbon black dispersion paste with a carbon black content of 25wt%, and the dispersion medium is DMF. The viscosity at 25℃ is 4000mPa·s. The anodic aluminum oxide powder is porous anodic aluminum oxide powder with an average particle size D50 = 1-5μm, a pore size of 20-80nm, a specific surface area ≥50m² / g, and a pore volume ≥0.3cm³ / g. The aliphatic polyisocyanate is Desmodur® ultra N 3600. The catalyst is bismuth neodecanoate. The hydroxyl-terminated polyether diol is PEG400. The CAS number of the hydroxyl-terminated PDMS is 70131-67-8. The polyether-modified siloxane leveling agent is BYK-306. The base fabric is polyester nonwoven fabric with a porosity of 60-80%. Preparation Example

[0022] Preparation Example 1 Preparation Example 1 provides a method for preparing a modified porous packing material, comprising the following steps: Preparation of silane coupling agent solution: γ-aminopropyltriethoxysilane and γ-glycidoxypropyltrimethoxysilane were mixed at a mass ratio of 1:1 and added to a mixed solvent of ethanol and water. The mixture was stirred until homogeneous, and the pH was adjusted to 4.5 with glacial acetic acid to obtain the silane coupling agent solution. The total mass of γ-aminopropyltriethoxysilane and γ-glycidoxypropyltrimethoxysilane was 3% of the mass of N,N-dimethylformamide. The mass ratio of the total mass of γ-aminopropyltriethoxysilane and γ-glycidoxypropyltrimethoxysilane to ethanol and water was 30:95:5. Preparation of silanized anodized aluminum oxide powder: Anodized aluminum oxide powder was immersed in a 5% hydrochloric acid solution with a liquid-to-solid ratio of 10:1, and ultrasonically treated for 30 min. It was then washed with deionized water until neutral, followed by centrifugation using anhydrous ethanol at 8000 rpm for 10 min each time. The powder was then dried at 120℃ for 2 h to obtain the treated anodized aluminum oxide powder. The treated anodized aluminum oxide powder was mixed with a silane coupling agent solution and stirred at 60℃ for 2 h. After filtration, it was dried at 80℃ for 1 h to obtain silanized anodized aluminum oxide powder. The mass-to-volume ratio of the treated anodized aluminum oxide powder to the silane coupling agent solution was 1:8. Composite: Under dry nitrogen protection, aliphatic polyisocyanate was dissolved in anhydrous ethyl acetate and stirred at 25°C for 10 min to obtain an impregnation solution. Silanized anodized aluminum oxide powder was added, and the solution was stirred under a vacuum of -0.08 MPa for 15 min, followed by stirring at 300 rpm for 45 min under normal pressure. After filtration, the solution was dried at 40°C under a vacuum of -0.06 MPa for 2 h to obtain the modified porous filler. The mass ratio of aliphatic polyisocyanate to anhydrous ethyl acetate was 30:90, and the weight ratio of aliphatic polyisocyanate to silanized anodized aluminum oxide powder was 30:75.

[0023] Preparation Example 2 Preparation Example 2 provides a method for preparing a modified porous packing material, comprising the following steps: Preparation of silane coupling agent solution: γ-aminopropyltriethoxysilane and γ-glycidoxypropyltrimethoxysilane were mixed at a mass ratio of 1:1 and added to a mixed solvent of ethanol and water. The mixture was stirred until homogeneous, and the pH was adjusted to 5 with glacial acetic acid to obtain the silane coupling agent solution. The total mass of γ-aminopropyltriethoxysilane and γ-glycidoxypropyltrimethoxysilane was 5% of the mass of N,N-dimethylformamide. The mass ratio of the total mass of γ-aminopropyltriethoxysilane and γ-glycidoxypropyltrimethoxysilane to ethanol and water was 30:95:5. Preparation of silanized anodized aluminum oxide powder: Anodized aluminum oxide powder was immersed in a 5% hydrochloric acid solution with a liquid-to-solid ratio of 10:1, and ultrasonically treated for 30 min. It was then washed with deionized water until neutral, followed by centrifugation using anhydrous ethanol at 8000 rpm for 10 min each time. The powder was then dried at 120℃ for 2 h to obtain the treated anodized aluminum oxide powder. The treated anodized aluminum oxide powder was mixed with a silane coupling agent solution and stirred at 60℃ for 3 h. After filtration, it was dried at 80℃ for 1 h to obtain silanized anodized aluminum oxide powder. The mass-to-volume ratio of the treated anodized aluminum oxide powder to the silane coupling agent solution was 1:10. Composite: Under dry nitrogen protection, aliphatic polyisocyanate was dissolved in anhydrous ethyl acetate and stirred at 25°C for 10 min to obtain an impregnation solution. Silanized anodized aluminum oxide powder was added, and the solution was stirred under a vacuum of -0.08 MPa for 15 min, followed by stirring at 300 rpm for 45 min under normal pressure. After filtration, the solution was dried at 40°C under a vacuum of -0.06 MPa for 2 h to obtain the modified porous filler. The mass ratio of aliphatic polyisocyanate to anhydrous ethyl acetate was 30:90, and the weight ratio of aliphatic polyisocyanate to silanized anodized aluminum oxide powder was 30:80.

[0024] Preparation Example 3 Preparation Example 3 provides a method for preparing a modified porous packing material, comprising the following steps: Preparation of silane coupling agent solution: γ-aminopropyltriethoxysilane and γ-glycidoxypropyltrimethoxysilane were mixed at a mass ratio of 1:1 and added to a mixed solvent of ethanol and water. The mixture was stirred until homogeneous, and the pH was adjusted to 5.5 with glacial acetic acid to obtain the silane coupling agent solution. The total mass of γ-aminopropyltriethoxysilane and γ-glycidoxypropyltrimethoxysilane was 8% of the mass of N,N-dimethylformamide. The mass ratio of the total mass of γ-aminopropyltriethoxysilane and γ-glycidoxypropyltrimethoxysilane to ethanol and water was 30:95:5. Preparation of silanized anodized aluminum oxide powder: Anodized aluminum oxide powder was immersed in a 5% hydrochloric acid solution with a liquid-to-solid ratio of 10:1, and ultrasonically treated for 30 min. It was then washed with deionized water until neutral, followed by centrifugation using anhydrous ethanol at 8000 rpm for 10 min each time. The powder was then dried at 120℃ for 2 h to obtain the treated anodized aluminum oxide powder. The treated anodized aluminum oxide powder was mixed with a silane coupling agent solution and stirred at 60℃ for 4 h. After filtration, it was dried at 80℃ for 1 h to obtain silanized anodized aluminum oxide powder. The mass-to-volume ratio of the treated anodized aluminum oxide powder to the silane coupling agent solution was 1:10. Composite: Under dry nitrogen protection, aliphatic polyisocyanate was dissolved in anhydrous ethyl acetate and stirred at 25°C for 10 min to obtain an impregnation solution. Silanized anodized aluminum oxide powder was added, and the solution was stirred under a vacuum of -0.08 MPa for 15 min, followed by stirring at 300 rpm for 45 min under normal pressure. After filtration, the solution was dried at 40°C under a vacuum of -0.06 MPa for 2 h to obtain the modified porous filler. The mass ratio of aliphatic polyisocyanate to anhydrous ethyl acetate was 30:90, and the weight ratio of aliphatic polyisocyanate to silanized anodized aluminum oxide powder was 30:85. Example

[0025] Example 1 Example 1 provides a method for preparing a dynamic wear-compensating CMP polishing pad, comprising the following steps: Preparation of hybrid slurry: 55 kg of N,N-dimethylformamide was heated to 50°C, then 90 kg of polyurethane resin was added, and the mixture was stirred at 400 rpm for 75 min. The mixture was then cooled to 25°C, and 10 kg of color paste, 0.03 kg of catalyst, and 1 kg of hydroxyl-terminated polyether diol were added. The mixture was stirred at 600 rpm for 10 min to obtain a polyurethane slurry. The modified porous filler from Preparation Example 1 was added to the polyurethane slurry in two batches, and the mixture was stirred at 1000 rpm for 20 min. The mixture was then degassed under a vacuum of -0.06 MPa for 10 min to obtain a hybrid slurry. The weight ratio of the modified porous filler to the polyurethane slurry was 3:100. Base fabric treatment and coating: The base fabric is soaked in a 20% N,N-dimethylformamide aqueous solution. Then, after pressing with a pressure of 2 kg, the hybrid slurry is coated onto the soaked base fabric to a thickness of 5 mm and left to stand for 0.5 min. Finally, it is solidified in a 20% N,N-dimethylformamide aqueous solution at a temperature that is slowly increased from 30℃ to 40℃ for 40 min. After solidification, it is washed with water and pressed with 4 kg for 40 times. After pressing, it is dried at 120℃ for 10 min and then at 150℃ for 20 min. Then, it is sanded with 180 grit sandpaper for 0.5 mm and then finely ground with 200 grit sandpaper to obtain the CMP polishing pad.

[0026] Example 2 The difference between Example 2 and Example 1 lies in the preparation of the hybrid slurry: 60 kg of N,N-dimethylformamide was heated to 50°C, then 100 kg of polyurethane resin was added, and the mixture was stirred at 400 rpm for 75 min. The mixture was then cooled to 25°C, and 15 kg of color paste, 0.05 kg of catalyst, and 3 kg of hydroxyl-terminated polyether diol were added. The mixture was stirred at 600 rpm for 10 min to obtain a polyurethane slurry. The modified porous filler from Example 1 was added to the polyurethane slurry in two batches, and the mixture was stirred at 1000 rpm for 20 min. The mixture was then degassed under a vacuum of -0.06 MPa for 10 min to obtain the hybrid slurry. The weight ratio of the modified porous filler to the polyurethane slurry was 3:100. The remaining steps were the same as in Example 1.

[0027] Example 3 The difference between Example 3 and Example 1 lies in the preparation of the hybrid slurry: 65 kg of N,N-dimethylformamide was heated to 50°C, then 110 kg of polyurethane resin was added, and the mixture was stirred at 400 rpm for 75 min. After cooling to 25°C, 20 kg of color paste, 0.07 kg of catalyst, and 5 kg of hydroxyl-terminated polyether diol were added, and the mixture was stirred at 600 rpm for 10 min to obtain a polyurethane slurry. The modified porous filler from Example 1 was added to the polyurethane slurry in two batches, and the mixture was stirred at 1000 rpm for 20 min. After degassing under a vacuum of -0.06 MPa for 10 min, the hybrid slurry was obtained. The weight ratio of the modified porous filler to the polyurethane slurry was 3:100. The remaining steps were the same as in Example 1.

[0028] Example 4 The difference between Example 4 and Example 2 lies in the preparation of the hybrid slurry: 60 kg of N,N-dimethylformamide was heated to 50°C, then 100 kg of polyurethane resin was added, and the mixture was stirred at 400 rpm for 75 min. After cooling to 25°C, 15 kg of color paste, 0.05 kg of catalyst, and 3 kg of hydroxyl-terminated polyether diol were added, and the mixture was stirred at 600 rpm for 10 min to obtain a polyurethane slurry. The modified porous filler from Example 2 was added to the polyurethane slurry in two batches, and the mixture was stirred at 1000 rpm for 20 min. After degassing under a vacuum of -0.06 MPa for 10 min, the hybrid slurry was obtained. The weight ratio of the modified porous filler to the polyurethane slurry was 3:100. The remaining steps were the same as in Example 2.

[0029] Example 5 The difference between Example 5 and Example 2 lies in the preparation of the hybrid slurry: 60 kg of N,N-dimethylformamide was heated to 50°C, then 100 kg of polyurethane resin was added, and the mixture was stirred at 400 rpm for 75 min. After cooling to 25°C, 15 kg of color paste, 0.05 kg of catalyst, and 3 kg of hydroxyl-terminated polyether diol were added, and the mixture was stirred at 600 rpm for 10 min to obtain a polyurethane slurry. The modified porous filler from Example 3 was added to the polyurethane slurry in two batches, and the mixture was stirred at 1000 rpm for 20 min. After degassing under a vacuum of -0.06 MPa for 10 min, the hybrid slurry was obtained. The weight ratio of the modified porous filler to the polyurethane slurry was 3:100. The remaining steps were the same as in Example 2.

[0030] Example 6 The difference between Example 6 and Example 4 is that the weight ratio of the modified porous filler to the polyurethane slurry is 5:100; the remaining steps are the same as in Example 4.

[0031] Example 7 The difference between Example 7 and Example 4 is that the weight ratio of modified porous filler to polyurethane slurry is 8.5:100; the remaining steps are the same as in Example 4.

[0032] Example 8 The difference between Example 8 and Example 4 is that the weight ratio of the modified porous filler and the polyurethane slurry is 12:100; the remaining steps are the same as in Example 4.

[0033] Example 9 The difference between Example 9 and Example 4 is that the weight ratio of the modified porous filler to the polyurethane slurry is 15:100; the remaining steps are the same as in Example 4.

[0034] Example 10 The difference between Example 10 and Example 7 lies in the base fabric treatment and coating: the base fabric is soaked in a 20% N,N-dimethylformamide aqueous solution, then pressed under 4 kg pressure, and the hybrid slurry is coated onto the soaked base fabric to a thickness of 12 mm, and left to stand for 1.5 min; finally, it is solidified in a 21% N,N-dimethylformamide aqueous solution, with the solidification temperature slowly increased from 30°C to 40°C for 40 min; after solidification, it is washed with water, pressed under 4 kg, and repeated 40 times; after pressing, it is first dried at 120°C for 10 min, then dried at 150°C for 20 min, then sanded with 180-grit sandpaper for 1.5 mm, and then finely ground with 200-grit sandpaper to obtain a CMP polishing pad; the remaining steps are the same as in Example 7.

[0035] Example 11 The difference between Example 11 and Example 7 lies in the base fabric treatment and coating: the base fabric is soaked in a 20% N,N-dimethylformamide aqueous solution, then pressed under 6 kg pressure, and the hybrid slurry is coated onto the soaked base fabric with a coating thickness of 20 mm, and left to stand for 2 min; finally, it is solidified in a 23% N,N-dimethylformamide aqueous solution, with the solidification temperature slowly increased from 30°C to 40°C for 40 min; after solidification, it is washed with water, pressed under 4 kg, and repeated 40 times; after pressing, it is first dried at 120°C for 10 min, then dried at 150°C for 20 min, then sanded 2 mm with 180 grit sandpaper, and then finely polished with 200 grit sandpaper to obtain a CMP polishing pad; the remaining steps are the same as in Example 7.

[0036] Example 12 The difference between Example 12 and Example 10 lies in the preparation of the hybrid slurry: 60 kg of N,N-dimethylformamide was heated to 50°C, then 100 kg of polyurethane resin was added, and the mixture was stirred at 400 rpm for 75 min. The mixture was then cooled to 25°C, and 1 kg of bis(2-hydroxyethyl) disulfide was added, followed by stirring for 5 min. Add 15 kg of color paste, 0.05 kg of catalyst, and 3 kg of hydroxyl-terminated polyether diol, and stir at 600 rpm for 10 min to obtain a polyurethane slurry. Add the modified porous filler from Preparation Example 2 to the polyurethane slurry in two batches, and stir at 1000 rpm for 18 min. Then add 0.6 kg of stirring for 75 min and 0.12 kg of polyether-modified siloxane leveling agent, and stir at 800 rpm for 2 min. Finally, degas under a vacuum of -0.06 MPa for 10 min to obtain a hybrid slurry. The weight ratio of the modified porous filler to the polyurethane slurry is 8.5:100. The remaining steps are the same as in Example 10. Comparative Example

[0037] Comparative Example 1 The difference between Comparative Example 1 and Example 1 lies in the preparation of the hybrid slurry: 55 kg of N,N-dimethylformamide was heated to 50°C, then 90 kg of polyurethane resin was added, and the mixture was stirred at 400 rpm for 75 min. The mixture was then cooled to 25°C, and 10 kg of color paste was added. The mixture was stirred at 600 rpm for 10 min to obtain a polyurethane slurry. Anodized aluminum powder was added to the polyurethane slurry in two batches, and the mixture was stirred at 1000 rpm for 20 min. The mixture was then degassed under a vacuum of -0.06 MPa for 10 min to obtain the hybrid slurry. The weight ratio of anodized aluminum powder to polyurethane slurry was 3:100. The remaining steps were the same as in Example 1.

[0038] Comparative Example 2 The difference between Comparative Example 2 and Example 1 lies in the preparation of the hybrid slurry: 55 kg of N,N-dimethylformamide was heated to 50°C, followed by the addition of 90 kg of polyurethane resin. The mixture was stirred at 400 rpm for 75 min, cooled to 25°C, and then 10 kg of color paste was added. The mixture was stirred at 600 rpm for 10 min to obtain a polyurethane slurry. The modified porous filler from Example 1 was added to the polyurethane slurry in two batches, stirred at 1000 rpm for 20 min, and degassed under a vacuum of -0.06 MPa for 10 min to obtain the hybrid slurry. The weight ratio of the modified porous filler to the polyurethane slurry was 3:100. The remaining steps were the same as in Example 1. Performance testing experiment

[0039] Dynamic wear stability: The initial removal rate (MRR) of the polishing pad was measured as follows: (scratching speed before polishing - remaining depth of scratch at the same location after 10 min of polishing) / 10. Then, the stable removal rate (MRR) after 180 min of polishing pad use was measured as follows: Stable removal rate (MRR) = (scratching speed before polishing - remaining depth of scratch at the same location after 10 min of polishing) / 10. The retention rate was then calculated as follows: Stable removal rate (MRR) / Initial removal rate (MRR) * 100%. The polishing object was a SiO2 / Si test piece with pre-existing scratches.

[0040] Table 1 Performance test results of polishing pads

[0041] Combining Example 1 and Comparative Examples 1-2, the polishing pad in Example 1 exhibits the best dynamic wear stability. This indicates that during the preparation of the polishing pad, the filler in the raw material is modified using silane coupling agents and aliphatic polyisocyanates, which improves the dispersion effect of the modified porous filler and enables in-situ loading and dynamic replenishment of the abrasive. Furthermore, the pore reservoir of anodic alumina powder and the aliphatic polyisocyanates adsorbed on the surface react with the terminal hydroxyl polyether diol in the slurry to form a locally cross-linked reinforcing layer. This reinforcing layer makes the pore walls less prone to collapse and the wear rate more uniform, thereby improving the dynamic wear stability.

[0042] Based on Examples 1-3, it can be seen that when preparing hybrid slurries, the performance of the hybrid slurries is better when the proportions of the raw materials in Examples 1-3 are used.

[0043] Combining Examples 2, 4, and 5, it can be seen that when preparing hybrid slurries, using the modified porous filler from Examples 1-3 results in polishing pads with better dynamic wear stability.

[0044] Combining Examples 4 and 6-9, the polishing pads in Examples 6-8 exhibited better dynamic wear stability. This indicates that when preparing the hybrid slurry, the preferred weight ratio of the modified porous filler to the polyurethane slurry is (5-12):100, ultimately resulting in polishing pads with better dynamic wear stability.

[0045] Based on Examples 7, 10, and 11, it can be seen that when the base fabric is coated with a hybrid slurry, the dynamic wear stability of the polishing pad is better when the coating conditions in Examples 7, 10, and 11 are followed.

[0046] Combining Examples 10 and 12, the polishing pad in Example 12 exhibits better dynamic wear stability. This indicates that when preparing the hybrid slurry, the addition of bis(2-hydroxyethyl) disulfide, hydroxyl-terminated PDMS, and polyether-modified siloxane leveling agent to the raw materials provides stress relaxation and self-adaptability, gradually reinforcing the wear process. The combination of hydroxyl-terminated PDMS and polyether-modified siloxane leveling agent reduces the peak frictional heat. The reduced peak heat makes the reaction of aliphatic polyisocyanate in the modified porous filler smoother, thereby further improving the dynamic wear stability of the final polishing pad.

[0047] This specific embodiment is merely an explanation of this application and is not intended to limit it. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but such modifications are protected by patent law as long as they fall within the scope of the claims of this application.

Claims

1. A dynamic wear-compensating CMP polishing pad, characterized in that: The CMP polishing pad is obtained by coating a base fabric with a hybrid slurry and curing it. The raw materials of the hybrid slurry include modified porous filler and polyurethane slurry. The raw materials of the polyurethane slurry include the following components in parts by weight: 90-110 parts of polyurethane resin, 55-65 parts of N,N-dimethylformamide, 10-20 parts of color paste, 0.03-0.07 parts of catalyst, and 1-5 parts of hydroxyl-terminated polyether diol. The raw materials of the modified porous filler include anodic aluminum oxide powder, silane coupling agent, and aliphatic polyisocyanate.

2. The dynamic wear-compensating CMP polishing pad according to claim 1, characterized in that: The method for preparing the modified porous packing includes the following steps: Preparation of silane coupling agent solution: γ-aminopropyltriethoxysilane and γ-glycidoxypropyltrimethoxysilane are mixed at a mass ratio of 1:1, added to a mixed solvent of ethanol and water, stirred and mixed evenly, and the pH is adjusted to 4.5-5.5 with glacial acetic acid to obtain silane coupling agent solution. Preparation of silanized anodized aluminum oxide powder: Anodized aluminum oxide powder was immersed in a 5% hydrochloric acid solution and ultrasonically treated for 30 min. It was then washed with deionized water until neutral and dried to obtain treated anodized aluminum oxide powder. The treated anodized aluminum oxide powder was mixed with a silane coupling agent solution and stirred at a constant temperature of 60℃ for 2-4 h. After filtration and drying, silanized anodized aluminum oxide powder was obtained. Composite: Aliphatic polyisocyanate was dissolved in anhydrous ethyl acetate, silanized anodized alumina powder was added, the mixture was stirred under vacuum, filtered, and dried under vacuum to obtain the modified porous filler.

3. The dynamic wear-compensating CMP polishing pad according to claim 2, characterized in that: In the silane coupling agent solution preparation step, the total mass of γ-aminopropyltriethoxysilane and γ-glycidoxypropyltrimethoxysilane is 3%-8% of the mass of N,N-dimethylformamide.

4. The dynamic wear-compensating CMP polishing pad according to claim 3, characterized in that: In the preparation step of the silanized anodic aluminum oxide powder, the mass-to-volume ratio of the treated anodic aluminum oxide powder to the silane coupling agent solution is 1:(8-12).

5. The dynamic wear-compensating CMP polishing pad according to claim 4, characterized in that: In the composite step, the weight ratio of aliphatic polyisocyanate to silanized anodized aluminum oxide powder is 30:(75-85).

6. A dynamic wear-compensating CMP polishing pad according to claim 1, characterized in that: The raw materials of the polyurethane slurry also include the following components in parts by weight: 0.5-1.5 parts of bis(2-hydroxyethyl) disulfide, 0.5-0.7 parts of hydroxyl-terminated PDMS, and 0.10-0.14 parts of polyether-modified siloxane leveling agent.

7. The dynamic wear-compensating CMP polishing pad according to claim 1, characterized in that: The weight ratio of the modified porous filler to the polyurethane slurry is (3-15):

100.

8. A method for preparing a dynamic wear-compensating CMP polishing pad as described in any one of claims 1-7, characterized in that: Includes the following steps: Preparation of hybrid slurry: N,N-dimethylformamide is heated, followed by the addition of polyurethane resin, stirring, cooling, the addition of color paste, catalyst, and hydroxyl-terminated polyether diol, and stirring to obtain polyurethane slurry; modified porous filler is added to polyurethane slurry and stirred to obtain hybrid slurry; Base fabric treatment and coating: The base fabric is soaked in a 20% N,N-dimethylformamide aqueous solution, and then extruded under a pressure of 2-6 kg. The hybrid slurry is then coated onto the soaked base fabric with a coating thickness of 5 mm-20 mm and allowed to stand for 0.5-2 min. Finally, it is solidified in a 20-23% N,N-dimethylformamide aqueous solution at a solidification temperature of 30-40℃. After solidification, it is washed with water and extruded. After extrusion, it is dried, polished, and finely ground to obtain the CMP polishing pad.

9. The method for preparing a dynamic wear-compensating CMP polishing pad according to claim 8, characterized in that: In the base fabric treatment and coating steps, the drying temperature is 120-150℃ and the drying time is 15-30 minutes.

10. The method for preparing a dynamic wear-compensating CMP polishing pad according to claim 8, characterized in that: In the base fabric treatment and coating steps, sanding is performed by sanding with 180-grit sandpaper for 0.5-2mm, and fine sanding is performed by fine sanding with 200-grit sandpaper.

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