Carbon-carbon deposition furnace heater and central temperature field temperature difference compensation partition heating control system and method

Abstract

The application discloses a carbon-carbon deposition furnace heater and a center temperature field temperature difference compensation partition heating control system and method, belongs to the carbon-carbon composite material deposition furnace temperature control field, solves the problems of low efficiency, high energy consumption and poor product consistency of the existing deposition furnace heating system in the initial deposition stage, and the system comprises a furnace body, heating modules and temperature measuring modules are arranged on the furnace body, the heating modules comprise upper heating modules and lower heating modules, the upper heating modules and the lower heating modules are one-to-one corresponding to upper heating zones and lower heating zones of the furnace body, the upper heating modules and the lower heating modules are each provided with a temperature control unit, first, second and third temperature measuring mechanisms of the temperature measuring modules are electrically connected with a data processing module, and are used for outputting real-time temperature values, unit time target temperature increment values and unit time dynamic temperature control target values to a control module, so that the heating power of the heating modules is dynamically adjusted, and the heating stage and constant temperature control are respectively completed; the application is applied to the deposition furnace.

Description

Technical Field

[0001] This invention relates to the field of temperature control technology for carbon-carbon composite material deposition furnaces, specifically to a zoned heating control system and method for compensating for temperature difference between the heater and the central temperature field of a carbon-carbon deposition furnace. Background Technology

[0002] The uniformity and stability of the temperature field within the deposition furnace are key factors determining the effectiveness of chemical vapor deposition (CVD) processes. The carbon source gas must undergo efficient pyrolysis at the target decomposition temperature (e.g., 1100℃), and the temperatures in the upper, lower, and central regions of the furnace must be balanced to ensure uniform material densification and improve product consistency. However, existing deposition furnace heating systems suffer from insurmountable challenges in temperature field control, severely restricting the efficiency and product quality of the deposition process. Firstly, the structural characteristics of the furnace's bottom cover and insulation material cause the heating modules on the upper part of the furnace to heat up significantly faster than those on the lower part, creating a natural temperature difference between the upper and lower zones. Secondly, when the heater is adjusted to the target carbon source decomposition temperature and low-temperature carbon source gas is introduced, the introduction of this low-temperature gas further disrupts the temperature field balance within the furnace. This not only prevents the temperature field in the center of the furnace from quickly reaching the target carbon source decomposition temperature but also exacerbates the temperature difference between the upper and lower zones. To ensure that the temperature field inside the furnace meets the requirements of the deposition process, the existing process requires a significant extension of the isothermal time. This directly results in low production efficiency in the early stages of deposition, along with a large amount of energy consumption. Even with an extended isothermal time, it is still difficult to achieve a precise balance of the temperature field inside the furnace, ultimately leading to uneven densification and poor consistency in the prepared composite material products.

[0003] To address the issue of uneven temperature field in deposition furnaces, existing technologies have proposed several improvement schemes. These include using deposition equipment with independent heating in dual temperature zones, adjusting the power of the upper and lower heating modules to create a temperature difference to adapt to the deposition process, or employing a distributed heating system with heaters at the center and periphery of the deposition chamber and independently controlled temperatures. These attempts aim to achieve temperature field homogenization through optimized heater layout and single-zone temperature measurement and control. Other conventional improvement methods include optimizing the heating element structure and adjusting the insulation layer laying method. However, these schemes and improvement methods only rely on the heater's own temperature measurement data for single power adjustment, lacking a coordinated temperature field compensation mechanism that addresses the influence of multiple factors such as furnace structure characteristics and the introduction of low-temperature carbon source gas. They cannot fundamentally solve the core problems of temperature difference between the upper and lower zones caused by the bottom structure, and the substandard central temperature field and significant temperature difference between the upper and lower zones after the introduction of low-temperature carbon source gas. The precision and adaptability of temperature field control are insufficient, making it difficult to meet the process requirements for large-scale, high-quality preparation of advanced composite materials.

[0004] Therefore, developing a heating and control scheme that can provide synergistic temperature field compensation for the structure and process conditions of the deposition furnace, fundamentally solving the problems of slow central temperature field attainment and significant temperature difference between the upper and lower zones, shortening the isothermal time, improving deposition efficiency, reducing energy consumption, and improving product consistency, has become an urgent technical challenge in the field of chemical vapor deposition equipment development. Summary of the Invention

[0005] In order to solve the technical problems of low efficiency, high energy consumption and poor product consistency in the initial stage of deposition in existing deposition furnace heating systems, this invention proposes a zoned heating control system and method for compensating the temperature difference between the heater and the central temperature field in a carbon-carbon deposition furnace.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is: a carbon deposition furnace heater and a central temperature field temperature difference compensation zone heating control system, comprising: The furnace body, wherein the heating zone within the furnace body includes an upper heating zone and a lower heating zone that are interconnected; The heating module includes an upper heating module and a lower heating module, wherein the upper heating module and the lower heating module correspond one-to-one with the upper heating zone and the lower heating zone of the furnace body, respectively. Both the upper heating module and the lower heating module are equipped with a temperature control unit, and the temperature control units of the upper heating module and the lower heating module are independently controlled. The temperature measuring module includes a first temperature measuring mechanism corresponding to the temperature control unit of the upper heating module, a second temperature measuring mechanism corresponding to the temperature control unit of the lower heating module, and multiple third temperature measuring mechanisms arranged at different positions on the graphite base at the bottom of the furnace body. The data processing module is configured as follows: Based on a preset weight model, the system outputs real-time temperature values ​​according to the temperature data collected from the first, second, and third temperature measuring mechanisms. The data processing module compares and analyzes whether the difference between the real-time temperature value and the preset constant temperature target value exceeds the preset difference threshold. When the difference between the real-time temperature value and the preset constant temperature target value exceeds the preset difference threshold, the data processing module obtains the target temperature increment value per unit time based on the real-time temperature value. When the difference between the real-time temperature value and the preset constant temperature target value reaches the preset difference threshold, the data processing module obtains the dynamic temperature control target value per unit time based on the real-time temperature value. The control module is configured as follows: Adjust the heating power of the heating module according to the target temperature increment per unit time; The heating power of the temperature control unit is dynamically adjusted based on the preset constant temperature target value and the real-time temperature value output by the data module.

[0007] Furthermore, both the first and second temperature measuring mechanisms include multiple independent temperature detection channels. The multiple independent temperature detection channels of the same temperature measuring mechanism are used to collect the temperature value of the same temperature control point in the heating zone corresponding to the temperature measuring mechanism.

[0008] Furthermore, both the first and second temperature measuring mechanisms use N-type dual-core thermocouples; the third temperature measuring mechanism uses an N-type single-core thermocouple.

[0009] Furthermore, the graphite base has a disc-shaped structure, and multiple graphite cover plates arranged in a concentric ring array are provided on the graphite base. Multiple third temperature measuring mechanisms are respectively distributed at the geometric center point of the graphite base, on the graphite cover plate of each ring, and at the holes between adjacent graphite cover plates.

[0010] Furthermore, based on multiple temperature values ​​collected by the first temperature measuring mechanism at the same temperature control point in the upper heating zone, multiple temperature values ​​collected by the second temperature measuring mechanism at the same temperature control point in the lower heating zone, and multiple temperature values ​​collected by multiple third temperature measuring mechanisms distributed at different locations on the graphite base, the real-time temperature value is calculated using a weighted average based on a preset weighting model.

[0011] Furthermore, the target temperature increment per unit time = (constant temperature target value - real-time temperature value) / set total heating time.

[0012] Furthermore, the dynamic temperature control target value per unit time is the sum of the real-time temperature target value and the target temperature increment per unit time.

[0013] Furthermore, the frequency of collecting the temperatures measured by the first, second, and third temperature measuring mechanisms, as well as the output frequency of the real-time temperature value, the target temperature increment value per unit time, and the dynamic temperature control target value per unit time, are all once per second.

[0014] Furthermore, the temperature acquisition accuracy of the first, second, and third temperature measuring mechanisms is no less than ±0.1℃.

[0015] A method for controlling zoned heating of a carbon-carbon deposition furnace heater and a central temperature field temperature difference compensation zoned heating system, wherein the control method uses the aforementioned carbon-carbon deposition furnace heater and central temperature field temperature difference compensation zoned heating control system, and the control method includes the following steps: Step S1: After the furnace body and the aforementioned carbon-carbon deposition furnace heater and the central temperature field temperature difference compensation zone heating control system are started, the data processing module receives in real time the temperature data of the upper heating zone, lower heating zone and graphite base inside the furnace body monitored by the temperature measurement module. Step S2: Based on the preset weight model, output the real-time temperature value according to the temperature data monitored by the first temperature measuring mechanism, the second temperature measuring mechanism, and the third temperature measuring mechanism. Step S3: Compare and analyze whether the difference between the real-time temperature value and the preset constant temperature target value exceeds the preset difference threshold. When the difference between the real-time temperature value and the preset constant temperature target value exceeds the preset difference threshold, the data processing module obtains the target temperature increment value per unit time based on the real-time temperature value, and adjusts the heating power value of the heating module according to the target temperature increment value per unit time to complete the heating stage. Step S4: When the difference between the real-time temperature value and the preset constant temperature target value reaches the preset difference threshold, the data processing module obtains the dynamic temperature control target value per unit time based on the real-time temperature value, and dynamically adjusts the heating power value of the temperature control unit according to the preset constant temperature target value and the real-time temperature value output by the data module to achieve constant temperature control.

[0016] The advantages of this invention over the prior art are as follows: 1. The system of this invention collects temperature data of different areas inside the furnace in real time through a first temperature measuring mechanism set in the upper heating module, a second temperature measuring mechanism set in the lower heating module, and a third temperature measuring mechanism set at different positions on the graphite base at the bottom of the furnace. The temperature data monitored by each temperature measuring mechanism is input into a preset weight model to output real-time temperature values, providing a basis for the execution of subsequent heating and constant temperature stages. The system realizes the linkage of temperature control between the heating module and the graphite base from the initial stage of heating, fundamentally solving the problem of temperature imbalance between the upper and lower heating zones and the asynchronous temperature field between the heating module and the graphite base, effectively eliminating the temperature field gradient during the heating stage.

[0017] 2. The system control module of this invention dynamically adjusts the heating power of the temperature control unit based on the preset constant temperature target value and the real-time temperature monitoring data output by the data module, thereby achieving precise constant temperature control. This temperature control mode eliminates the need to extend the constant temperature waiting time after the heating zone temperature reaches the preset constant temperature target value and low-temperature carbon source gas is introduced. Once the heating zone temperature rises to the preset constant temperature target value (carbon source decomposition temperature), the deposition process can be started immediately. This significantly improves the production efficiency of carbon-carbon composite materials and reduces energy consumption during the heating and constant temperature stage, further reducing overall production costs. Simultaneously, this temperature control mode ensures the uniformity and stability of the temperature field within the furnace during the constant temperature stage, avoiding quality problems such as insufficient carbon source decomposition and uneven deposition layer thickness caused by temperature field imbalance, effectively improving the density of the deposition layer and ensuring the consistency of the finished product's performance.

[0018] 3. The upper heating module and lower heating module of the present invention correspond one-to-one with the upper heating zone and lower heating zone of the furnace body, respectively. Through the cooperation of the temperature measurement module, data processing module and control module, the temperature of the upper heating module and the temperature of the lower heating module can be independently controlled, which can specifically solve the temperature field deviation problem caused by the insulation cotton at the bottom of the deposition furnace and the low temperature gas input in the lower heating zone.

[0019] 4. The system of this invention, by deploying a temperature measurement module on the basis of the existing furnace body hardware structure, and with the temperature measurement module, data processing module and control module working together, can achieve precise temperature control. It fundamentally solves the problems caused by the structural design of the bottom cover and insulation cotton of the furnace body, which cause the upper heating zone to heat up faster than the lower heating zone, and the problem of the heating module and the graphite base temperature field being out of sync after the low temperature carbon source gas is introduced after the heating zone reaches the preset constant temperature target value. It does not require major changes to the equipment hardware, has low modification costs, strong versatility, and is easy to promote and apply in industrial applications. Attached Figure Description

[0020] The present invention will be further described below with reference to the accompanying drawings: Figure 1 This is a schematic diagram of the system structure of the present invention; Figure 2 This is a block diagram of the system control logic of the present invention; Figure 3 This is a schematic diagram showing the distribution of the third temperature measuring mechanism in the system of the present invention; Figure 4 This is a schematic diagram of the heating module of the system of the present invention; Figure 5 A flowchart of an embodiment of the control method of the present invention; Figure 6 This is a temperature comparison diagram of the upper heating zone controlled by the system of the present invention and the upper heating zone controlled by the conventional system. In the diagram: 1 is the furnace body, 2 is the upper heating module, 3 is the lower heating module, 4 is the graphite substrate, 5 is the graphite cover plate, 6 is the third temperature measuring mechanism, 7 is the temperature measuring module, and 8 is the temperature control unit. Detailed Implementation

[0021] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate relative orientations or positional relationships and are used only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0022] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0023] like Figures 1 to 6 As shown, the present invention provides a carbon deposition furnace heater and a central temperature field temperature difference compensation zone heating control system, including a furnace body 1, wherein the heating zone within the furnace body 1 includes an upper heating zone and a lower heating zone that are interconnected. A heating module and a temperature measuring module 7 are fixedly mounted on the furnace body 1. The heating module includes an upper heating module 2 and a lower heating module 3, which correspond one-to-one with the upper heating zone and lower heating zone of the furnace body 1, respectively. Both the upper heating module 2 and the lower heating module 3 include a temperature control unit 8, referred to as the first temperature control unit and the second temperature control unit, respectively. The first temperature control unit and the second temperature control unit are independently controlled to achieve independent temperature regulation of the upper heating module 2 and the lower heating module 3. This can effectively address the temperature field deviation problem caused by the insulation cotton at the bottom of the deposition furnace and the low-temperature gas input in the lower heating zone.

[0024] The temperature measuring module 7 includes a first temperature measuring mechanism corresponding to the first temperature control unit of the upper heating module 2, a second temperature measuring mechanism corresponding to the second temperature control unit of the lower heating module 3, and multiple third temperature measuring mechanisms 6 arranged at different positions on the graphite base at the bottom of the furnace body 1. Specifically, both the first and second temperature measuring mechanisms include multiple independent temperature detection channels. These channels are used to collect temperature values ​​at the same temperature control point in the heating zone corresponding to that mechanism. In this embodiment, both the first and second temperature measuring mechanisms include two independent temperature detection channels. The temperature data collected by the two independent channels of the first mechanism are referred to as the main measured temperature value and auxiliary measured temperature value of the upper heating zone, respectively. Similarly, the temperature data collected by the two independent channels of the second mechanism are referred to as the main measured temperature value and auxiliary measured temperature value of the lower heating zone, respectively. Preferably, both the first and second temperature measuring mechanisms use N-type dual-core thermocouples, and the third temperature measuring mechanism 6 uses an N-type single-core thermocouple. The first temperature measuring mechanism is located at the geometric midpoint of the height direction of the upper heating module 2, and the second temperature measuring mechanism is located at the geometric midpoint of the height direction of the lower heating module 3. All three temperature measuring mechanisms (first, second, and third) are Huajie Intelligent Control HJ5209-K16 series.

[0025] The temperature acquisition accuracy of the first, second, and third temperature measuring mechanisms 6 shall not be less than ±0.1℃.

[0026] Specifically, the graphite base has a disc-shaped structure, and multiple graphite cover plates 5 arranged in a concentric ring array are mounted on the graphite base. Multiple third temperature measuring mechanisms 6 are respectively distributed at the geometric center point of the graphite base, on each ring of graphite cover plates 5, and at preset holes between adjacent rings of graphite cover plates 5. In this embodiment, four third temperature measuring mechanisms 6 are provided: two rings of graphite cover plates 5 arranged in a concentric ring array on the graphite base; four third temperature measuring mechanisms 6 are respectively located at the geometric center point of the graphite base, on one of the graphite cover plates 5 in the ring closest to the geometric center of the graphite base, on one of the graphite cover plates 5 in the ring furthest from the geometric center of the graphite base, and at preset holes between the two rings of graphite cover plates 5. The temperature data monitored by the third temperature measuring mechanism 6 at the geometric center of the graphite base is called the center temperature value. The temperature data monitored by the third temperature measuring mechanism 6 on one of the graphite cover plates 5 in the ring close to the geometric center of the graphite base is called the inner ring temperature value. The temperature data monitored by the third temperature measuring mechanism 6 on one of the graphite cover plates 5 in the ring far from the geometric center of the graphite base is called the outer ring temperature value. The temperature data monitored by the third temperature measuring mechanism 6 at the preset hole position between the two rings of graphite cover plates 5 is called the preset hole position temperature value.

[0027] The first temperature measuring mechanism, the second temperature measuring mechanism, and the third temperature measuring mechanism 6 of the temperature measuring module 7 are all electrically connected to the data processing module. The data processing module is configured as follows: Based on a preset weight model, the system outputs real-time temperature values ​​according to the temperature data monitored by the first, second, and third temperature measuring mechanisms (6). The frequency of temperature measurement by the first, second, and third temperature measuring mechanisms (6) and the output frequency of real-time temperature values, target temperature increment values ​​per unit time, and dynamic temperature control target values ​​per unit time are all once per second. The data processing module compares and analyzes whether the difference between the real-time temperature value and the preset constant temperature target value exceeds a preset difference threshold. When the difference exceeds the threshold, the data processing module obtains the target temperature increment per unit time based on the real-time temperature value. When the difference reaches the preset threshold, the module obtains the dynamic temperature control target value per unit time based on the real-time temperature value. This allows for dynamic adjustment of the heating power of the temperature control unit 8, thereby achieving precise constant temperature control.

[0028] Specifically, based on multiple temperature values ​​collected by the first temperature measuring mechanism at the same temperature control point in the upper heating zone, multiple temperature values ​​collected by the second temperature measuring mechanism at the same temperature control point in the lower heating zone, and multiple temperature values ​​collected by multiple third temperature measuring mechanisms 6 distributed at different locations on the graphite base, a real-time temperature value is calculated using a preset weighting model, providing a basis for the execution of subsequent heating and constant temperature stages. This system achieves temperature control linkage between the heating module and the graphite base from the initial heating stage, fundamentally solving the problems of temperature imbalance between the upper and lower heating zones and asynchronous temperature fields between the heating module and the graphite base, effectively eliminating the temperature field gradient during the heating stage.

[0029] More specifically, the preset weighting model for obtaining the real-time temperature value is: Real-time temperature value = (Main measured temperature value of upper heating zone + Auxiliary measured temperature value of upper heating zone + Main measured temperature value of lower heating zone + Auxiliary measured temperature value of lower heating zone) / 4 × W1 + Center temperature value × W2 + Inner ring temperature value × W3 + Preset hole position temperature value × W4 + Outer ring temperature value × W5.

[0030] In this embodiment, the preset weighting model for obtaining the real-time temperature value is: Real-time temperature value = (Main measured temperature value of upper heating zone + Auxiliary measured temperature value of upper heating zone + Main measured temperature value of lower heating zone + Auxiliary measured temperature value of lower heating zone) / 4 × 60% + Center temperature value × 20% + Inner ring temperature value × 10% + Preset hole position temperature value × 5% + Outer ring temperature value × 5%.

[0031] Target temperature increment per unit time = (target constant temperature value - real-time temperature value) / total set heating time.

[0032] The target value for dynamic temperature control per unit time is the sum of the real-time target temperature value and the target temperature increment per unit time.

[0033] The data processing module is electrically connected to the control module, which has a pre-set PID closed-loop control algorithm. The control module is configured as follows: The heating power of the heating module is adjusted according to the target temperature increment per unit time to complete the heating phase. The heating power of the temperature control unit 8 is dynamically adjusted according to the preset constant temperature target value and the real-time temperature value output by the data module to achieve constant temperature control.

[0034] Carbon-carbon composite materials were prepared using the carbon-carbon deposition furnace heater and the central temperature field temperature difference compensation zone heating control system of this invention. The density comparison data of the obtained products compared to traditional deposition furnace heating systems are detailed in the table below: .

[0035] The carbon deposition furnace heater and the central temperature field temperature difference compensation zone heating control method provided by the present invention, using the aforementioned carbon deposition furnace heater and the central temperature field temperature difference compensation zone heating control system, includes the following steps: Step S1: After the furnace body 1 and the carbon-carbon deposition furnace heater and the central temperature field temperature difference compensation zone heating control system described above are started, the data processing module receives in real time the temperature data of the upper heating zone, lower heating zone and graphite base in the furnace body 1 monitored by the temperature measurement module 7. Step S2: Based on the preset weight model, output the real-time temperature value according to the temperature data monitored by the first temperature measuring mechanism, the second temperature measuring mechanism, and the third temperature measuring mechanism 6. Step S3: Compare and analyze whether the difference between the real-time temperature value and the preset constant temperature target value exceeds the preset difference threshold. When the difference between the real-time temperature value and the preset constant temperature target value exceeds the preset difference threshold, the data processing module obtains the target temperature increment value per unit time based on the real-time temperature value, and adjusts the heating power value of the heating module according to the target temperature increment value per unit time, so that the difference between the real-time temperature value and the preset constant temperature target value is continuously reduced, so as to complete the heating stage. Step S4: When the difference between the real-time temperature value and the preset constant temperature target value reaches the preset difference threshold, the data processing module obtains the dynamic temperature control target value per unit time based on the real-time temperature value. It dynamically adjusts the heating power of the temperature control unit 8 according to the preset constant temperature target value and the real-time temperature value output by the data module, ensuring that the difference between the real-time temperature value and the preset constant temperature target value remains within the preset difference threshold, thus achieving constant temperature control. This temperature control mode eliminates the need for additional constant temperature waiting time. Once the heating zone temperature reaches the preset constant temperature target value (i.e., the carbon source decomposition temperature, such as 1100℃), the deposition process can be started immediately. This effectively improves the production efficiency of carbon-carbon composite materials and reduces energy consumption in the heating and constant temperature stage, thereby reducing overall production costs. Simultaneously, this temperature control mode ensures the uniformity and stability of the furnace temperature field during the constant temperature stage, avoiding quality problems such as insufficient carbon source decomposition and uneven deposition layer thickness caused by temperature field imbalance, effectively improving the density of the deposition layer and ensuring the consistency of the finished product performance.

[0036] Regarding the specific structure of this invention, it should be noted that the connection relationships between the various component modules used in this invention are definite and achievable. Except as specifically described in the embodiments, their specific connection relationships can bring about corresponding technical effects and solve the technical problems proposed by this invention without relying on the execution of corresponding software programs. The models of the components, modules, and specific components appearing in this invention, the connection methods between them, and the conventional usage methods and expected technical effects brought about by the above technical features, unless specifically described, are all publicly disclosed content in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by those skilled in the art before the application date, or belong to conventional technology, common knowledge, and other existing technologies in this field. There is no need to elaborate, which makes the technical solution provided in this case clear, complete, and achievable, and can reproduce or obtain corresponding physical products based on this technical means.

[0037] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A zoned heating control system for a carbon deposition furnace heater and a central temperature field temperature difference compensation zone, characterized in that, include: The furnace body (1) includes an upper heating zone and a lower heating zone that are interconnected. The heating module includes an upper heating module (2) and a lower heating module (3), wherein the upper heating module (2) and the lower heating module (3) correspond one-to-one with the upper heating zone and the lower heating zone of the furnace body (1), respectively; Both the upper heating module (2) and the lower heating module (3) are equipped with a temperature control unit (8). The temperature control unit (8) of the upper heating module (2) and the temperature control unit (8) of the lower heating module (3) are independently controlled. The temperature measuring module (7) includes a first temperature measuring mechanism corresponding to the temperature control unit (8) of the upper heating module (2), a second temperature measuring mechanism corresponding to the temperature control unit (8) of the lower heating module (3), and multiple third temperature measuring mechanisms (6) arranged at different positions on the graphite base at the bottom of the furnace body (1). The data processing module is configured as follows: Based on the preset weight model, the real-time temperature value is output according to the temperature data collected by the first temperature measuring mechanism, the second temperature measuring mechanism, and the third temperature measuring mechanism (6). The data processing module compares and analyzes whether the difference between the real-time temperature value and the preset constant temperature target value exceeds the preset difference threshold. When the difference between the real-time temperature value and the preset constant temperature target value exceeds the preset difference threshold, the data processing module obtains the target temperature increment value per unit time based on the real-time temperature value. When the difference between the real-time temperature value and the preset constant temperature target value reaches the preset difference threshold, the data processing module obtains the dynamic temperature control target value per unit time based on the real-time temperature value. The control module is configured as follows: Adjust the heating power of the heating module according to the target temperature increment per unit time; The heating power of the temperature control unit (8) is dynamically adjusted according to the preset constant temperature target value and the real-time temperature value output by the data module.

2. The carbon deposition furnace heater and the central temperature field temperature difference compensation zone heating control system according to claim 1, characterized in that, The first and second temperature measuring mechanisms each include multiple independent temperature detection channels. The multiple independent temperature detection channels of the same temperature measuring mechanism are used to collect the temperature value of the same temperature control point in the heating zone corresponding to the temperature measuring mechanism.

3. The carbon deposition furnace heater and the central temperature field temperature difference compensation zone heating control system according to claim 2, characterized in that, The first and second temperature measuring mechanisms both use N-type dual-core thermocouples; the third temperature measuring mechanism (6) uses an N-type single-core thermocouple.

4. The carbon deposition furnace heater and the central temperature field temperature difference compensation zone heating control system according to claim 1, characterized in that, The graphite base has a disc-shaped structure, and multiple graphite cover plates (5) arranged in a concentric ring array are provided on the graphite base. Multiple third temperature measuring mechanisms (6) are respectively distributed at the geometric center point of the graphite base, on the graphite cover plate (5) of each ring, and at the holes between adjacent graphite cover plates (5).

5. The carbon deposition furnace heater and the central temperature field temperature difference compensation zone heating control system according to claim 1, characterized in that, The real-time temperature value is obtained by weighting the multiple temperature values ​​at the same temperature control point in the upper heating zone collected by the first temperature measuring mechanism, the multiple temperature values ​​at the same temperature control point in the lower heating zone collected by the second temperature measuring mechanism, and the multiple temperature values ​​collected by the multiple third temperature measuring mechanisms (6) distributed at different positions on the graphite base.

6. The carbon deposition furnace heater and the central temperature field temperature difference compensation zone heating control system according to claim 1, characterized in that, Target temperature increment per unit time = (target constant temperature value - real-time temperature value) / total set heating time.

7. The carbon deposition furnace heater and the central temperature field temperature difference compensation zone heating control system according to claim 1, characterized in that, The target value for dynamic temperature control per unit time is the sum of the real-time target temperature value and the target temperature increment per unit time.

8. The carbon deposition furnace heater and the central temperature field temperature difference compensation zone heating control system according to claim 1, characterized in that, The frequency of collecting the temperature measured by the first temperature measuring mechanism, the second temperature measuring mechanism, the third temperature measuring mechanism (6), the real-time temperature value, the target temperature increment value per unit time, and the dynamic temperature control target value per unit time are all output once per second.

9. The carbon deposition furnace heater and the central temperature field temperature difference compensation zone heating control system according to claim 1, characterized in that, The temperature acquisition accuracy of the first temperature measuring mechanism, the second temperature measuring mechanism, and the third temperature measuring mechanism (6) shall not be less than ±0.1℃.

10. A method for zoned heating control of a carbon deposition furnace heater and its central temperature field, characterized in that... The control method uses the carbon deposition furnace heater and the central temperature field temperature difference compensation zone heating control system according to any one of claims 1-9, and the control method includes the following steps: Step S1: After the furnace body (1) and the carbon-carbon deposition furnace heater and the central temperature field temperature difference compensation zone heating control system as described in any one of claims 1-9 are started, the data processing module receives in real time the temperature data of the upper heating zone, lower heating zone and graphite base in the furnace body (1) monitored by the temperature measurement module (7). Step S2: Based on the preset weight model, output the real-time temperature value according to the temperature data monitored by the first temperature measuring mechanism, the second temperature measuring mechanism, and the third temperature measuring mechanism (6). Step S3: Compare and analyze whether the difference between the real-time temperature value and the preset constant temperature target value exceeds the preset difference threshold. When the difference between the real-time temperature value and the preset constant temperature target value exceeds the preset difference threshold, the data processing module obtains the target temperature increment value per unit time based on the real-time temperature value, and adjusts the heating power value of the heating module according to the target temperature increment value per unit time to complete the heating stage. Step S4: When the difference between the real-time temperature value and the preset constant temperature target value reaches the preset difference threshold, the data processing module obtains the dynamic temperature control target value per unit time based on the real-time temperature value, and dynamically adjusts the heating power value of the temperature control unit (8) according to the preset constant temperature target value and the real-time temperature value output by the data module to achieve constant temperature control.

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