A structure of a static pressure gas bearing

Abstract

The present application relates to a kind of static pressure gas bearing structures, including shell, gas conveying mechanism and vibration suppression mechanism, and gas conveying mechanism and vibration suppression mechanism are located in shell, shell has the installation structure for rotating component installation, gas conveying mechanism includes the throttle valve that can output gas between installation structure and rotating component, installation structure is provided with the gas outlet hole that the gas outlet end of throttle valve can extend into, gas outlet hole extends along the axial direction of shell, gas outlet hole has the limiting hole wall that throttle valve is active in the radial direction of shell, vibration suppression mechanism includes first gear and the transmission assembly that can convert the movement of throttle valve into the rotation of first gear, transmission assembly includes the first return element for limiting the excessive rotation of first gear.The static pressure gas bearing structure provided by the present application solves the problem that the existing static pressure gas bearing is prone to micro-vibration, which affects the precision and service life.

Description

Technical Field

[0001] This invention relates to the field of gas bearing technology, and more particularly to a hydrostatic gas bearing structure. Background Technology

[0002] Hydrostatic gas bearings, with their advantages of non-contact operation, low friction, and high rotational accuracy, are widely used in high-end equipment fields such as precision machine tools, aerospace equipment, and semiconductor manufacturing. These bearings utilize compressed gas introduced through a gas supply port, which, after being throttled by a throttle, forms a stable gas film between the bearing and the bearing surface. Load support and lubrication are achieved through the gas film pressure, theoretically avoiding wear and accuracy loss caused by solid friction. However, in actual operation, factors such as gas pressure fluctuations, external load disturbances, and high-speed rotational inertial forces can easily cause micro-vibrations in the bearing gas film. Although these micro-vibrations have small amplitudes (typically in the micrometer range), they are directly transmitted to the machined or measured components, leading to decreased equipment machining accuracy, increased measurement errors, and in severe cases, even gas film instability, affecting bearing life and equipment operational safety. Summary of the Invention

[0003] The main objective of this invention is to propose a hydrostatic gas bearing structure that aims to solve the problem that existing hydrostatic gas bearings are prone to micro-vibrations in the gas film, which affect accuracy and service life.

[0004] To achieve the above objectives, the present invention proposes a hydrostatic gas bearing structure, comprising a housing, a gas delivery mechanism, and a vibration damping mechanism. Both the gas delivery mechanism and the vibration damping mechanism are disposed within the housing. The housing has a mounting structure for mounting a rotating component. The gas delivery mechanism includes a throttle that outputs gas into the gap between the mounting structure and the rotating component. The mounting structure has an outlet hole through which the outlet end of the throttle can extend. The outlet hole extends axially along the housing and has a limiting hole wall that restricts the radial movement of the throttle within the housing. The vibration damping mechanism includes a first gear and a transmission assembly that converts the movement of the throttle into rotation of the first gear. The transmission assembly includes a first reset member for limiting excessive rotation of the first gear.

[0005] According to some embodiments of the present invention, the axis of rotation of the first gear is parallel to the axial direction of the housing, the transmission assembly further includes a transmission rod and a second gear, the second gear meshing with the first gear, one end of the transmission rod being rotatably connected to the throttle, and the other end being rotatably connected to the second gear.

[0006] According to some embodiments of the present invention, the transmission assembly further includes a support member, one end of which is fixed inside the housing and the other end is rotatably connected to the second gear. One end of the first reset member is connected to the support member and the other end is connected to the second gear.

[0007] According to some embodiments of the present invention, the support member includes a first support section and a second support section connected to each other. The first support section is fixed inside the housing, and the second support section is rotatably connected to the second gear. The first support section extends axially in the first gear, and the second support section is inclined. The end of the first reset member away from the second gear is connected to the first support section.

[0008] According to some embodiments of the present invention, both the first gear and the second gear are bevel gears, the teeth of the first gear are inclined from the middle to the edge in a direction away from the throttle, and the inclination direction of the teeth of the second gear is adapted to the inclination direction of the teeth of the first gear.

[0009] According to some embodiments of the present invention, the transmission assembly is provided in multiple forms, and the multiple transmission assemblies are evenly distributed in the circumferential direction of the first gear.

[0010] According to some embodiments of the present invention, the throttle is connected to the inner wall of the housing via a second reset member.

[0011] According to some embodiments of the present invention, the vent is located in the middle of the mounting structure.

[0012] According to some embodiments of the present invention, an air inlet is provided on the side wall of the housing, and the air inlet is connected to the air inlet end of the throttle via a flexible pipe.

[0013] According to some embodiments of the present invention, a plurality of air inlets are provided, and the plurality of air inlets are evenly distributed in the circumferential direction of the housing. A plurality of flexible pipes are provided accordingly, and each air inlet is connected to each air inlet end of the throttle via the corresponding flexible pipe.

[0014] The present invention has at least the following beneficial effects:

[0015] In this invention, gas is output to the gap between the mounting structure and the rotating component through a throttle, thereby forming an air film between the mounting structure and the rotating component. The limiting hole wall of the air outlet of the mounting structure can restrict the movement of the throttle in the radial direction of the housing, so that the throttle can only move in the axial direction of the housing. When the throttle vibrates slightly in its axial direction relative to the housing, it drives the first gear to rotate under the transmission of the transmission component, transforming the disordered vibration into ordered rotation. At the same time, the first reset component restricts the excessive rotation of the first gear and resets the first gear. The vibration energy is dissipated during the rotation and reset process of the first gear, which plays a role in suppressing the vibration of the throttle, thereby suppressing the micro-vibration of the air film and ensuring the processing accuracy of the equipment and the service life of the bearings. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of a hydrostatic gas bearing structure provided in an embodiment of the present invention;

[0018] Figure 2 for Figure 1 Sectional view of AA;

[0019] Figure 3 for Figure 2 Schematic diagram of the middle transmission assembly;

[0020] Figure 4 for Figure 2 A schematic diagram of the transmission assembly from another angle.

[0021] Explanation of reference numerals in the attached figures:

[0022] 100-Hydrostatic gas bearing structure; 1-Housing; 11-Mounting structure; 12-Outlet; 13-Inlet; 2-Gas delivery mechanism; 21-Throttle; 22-Flexible pipe; 3-Vibration damping mechanism; 31-First gear; 32-Transmission assembly; 321-First reset component; 322-Transmission rod; 323-Second gear; 324-Support component; 3241-First support section; 3242-Second support section; 4-Second reset component. Detailed Implementation

[0023] The technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] It should be noted that if the embodiments of the present invention involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0025] Furthermore, if the embodiments of this invention involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the meaning of "and / or" throughout the text includes three parallel solutions; for example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this invention.

[0026] This invention provides a hydrostatic gas bearing structure. Figures 1 to 4 This is a specific embodiment of a hydrostatic gas bearing structure provided by the present invention.

[0027] like Figures 1 to 4 As shown, this embodiment of the invention provides a hydrostatic gas bearing structure 100, including a housing 1, a gas supply mechanism 2, and a vibration damping mechanism 3. The gas supply mechanism 2 and the vibration damping mechanism 3 are both disposed within the housing 1. The housing 1 has a mounting structure 11 for mounting a rotating component. The gas supply mechanism 2 includes a throttle 21 that can output gas to the gap between the mounting structure 11 and the rotating component. The mounting structure 11 has an outlet hole 12 through which the outlet end of the throttle 21 can extend. The outlet hole 12 extends axially along the housing 1 and has a limiting hole wall that restricts the radial movement of the throttle 21 within the housing 1. The vibration damping mechanism 3 includes a first gear 31 and a transmission assembly 32 that can convert the movement of the throttle 21 into the rotation of the first gear 31. The transmission assembly 32 includes a first reset member 321 for limiting excessive rotation of the first gear 31.

[0028] In this invention, gas is output to the gap between the mounting structure 11 and the rotating component through the throttle 21, thereby forming an air film between the mounting structure 11 and the rotating component. The limiting hole wall of the air outlet 12 of the mounting structure 11 can restrict the movement of the throttle 21 in the radial direction of the housing 1, so that the throttle 21 can only move in the axial direction of the housing 1. When the throttle 21 vibrates slightly in its axial direction relative to the housing 1, the first gear 31 is driven to rotate under the transmission of the transmission component 32, which transforms the disordered vibration into an ordered rotation. At the same time, the first reset component 321 restricts the excessive rotation of the first gear 31 and resets the first gear 31. The vibration energy is dissipated during the rotation and reset process of the first gear 31, which plays a role in suppressing the vibration of the throttle 21, thereby suppressing the micro-vibration of the air film and ensuring the processing accuracy of the equipment and the service life of the bearing.

[0029] It should be noted that the first reset member 321 can be an elastic member or other components with a reset function known to those skilled in the art.

[0030] Preferably, such as Figure 2 As shown, multiple transmission components 32 are provided, and these multiple transmission components 32 are evenly distributed around the first gear 31. This arrangement disperses the originally concentrated vibration energy into the multiple circumferentially arranged transmission components 32, achieving optimization from "concentrated energy to distributed load" and avoiding vibration damping failure of a single component due to excessive load.

[0031] The specific structure of the transmission component 32 is not limited, as long as it ensures that the transmission component 32 can convert the movement of the throttle 21 into the rotation of the first gear 31. For example, in some embodiments, such as... Figure 2 and Figure 3 As shown, the axis of rotation of the first gear 31 is parallel to the axial direction of the housing 1. The transmission assembly 32 also includes a transmission rod 322 and a second gear 323. The second gear 323 meshes with the first gear 31. One end of the transmission rod 322 is rotatably connected to the throttle 21, and the other end is rotatably connected to the second gear 323. With this configuration, when the throttle 21 vibrates slightly in the axial direction of the housing 1, it causes the transmission rod 322 to swing, thereby causing the second gear 323 to rotate. Since the second gear 323 and the first gear 31 mesh, the first gear 31 rotates accordingly, thus converting the movement of the throttle 21 into the rotation of the first gear 31.

[0032] Furthermore, in some embodiments, such as Figure 2 and Figure 3As shown, the throttle 21 is arranged in a disc shape. The axis of rotation of the first gear 31 is aligned with the axis of the throttle 21 and the axis of the housing 1. This improves the uniformity of vibration energy transmission, optimizes the force transmission path along the axis, avoids the generation of radial force components along the housing 1 during force transmission, and reduces the generation of additional vibration.

[0033] The first reset member 321 is an elastic member; in some embodiments, such as... Figures 2 to 4 As shown, the transmission assembly 32 also includes a support member 324. One end of the support member 324 is fixed inside the housing 1, and the other end is rotatably connected to the second gear 323. One end of the first reset member 321 is connected to the support member 324, and the other end is connected to the second gear 323. This configuration, by setting the support member 324, ensures that the transmission assembly 32 is rigidly connected to the housing 1, forming a stable support structure and providing a reliable force base for the elastic deformation of the first reset member 321. Simultaneously, drawing inspiration from the biomechanical structure of the juvenile planthopper's leg, the transmission rod 322, the second gear 323, and the first reset member 321 respectively simulate the bones, joints, and muscles of the juvenile planthopper's leg, organically combining rigid transmission with elastic buffering. This retains the load-bearing stability of the mechanical structure while possessing the adaptive vibration adjustment capability of the biological structure.

[0034] Furthermore, in some embodiments, such as Figure 3 and Figure 4 As shown, the support member 324 includes a first support segment 3241 and a second support segment 3242 connected to each other. The first support segment 3241 is fixed inside the housing 1, and the second support segment 3242 is rotatably connected to the second gear 323. The first support segment 3241 extends axially along the first gear 31, and the second support segment 3242 is inclined. The end of the first reset member 321 away from the second gear 323 is connected to the first support segment 3241. This configuration conforms to the biomechanical structure of the juvenile planthopper's leg, enhancing the biomimetic synergy effect. Furthermore, the segmented design, through the mechanical transition at the bends, disperses the stress originally concentrated in a single location to the first support segment 3241 and the second support segment 3242, achieving graded force transmission and enhancing the stability of the rigid support.

[0035] Preferably, in some embodiments, such as Figure 2As shown, both the first gear 31 and the second gear 323 are bevel gears. The teeth of the first gear 31 are inclined from the middle to the edge in a direction away from the throttle 21, and the inclination direction of the teeth of the second gear 323 matches the inclination direction of the teeth of the first gear 31. This arrangement ensures that the direction of force during gear meshing is highly matched with the geometric layout and vibration energy transmission path of the transmission assembly 32, reducing force transmission loss and allowing the vibration energy of the throttle 21 to be converted into the rotational energy of the first gear 31 as much as possible.

[0036] In some embodiments, such as Figure 2 As shown, the vent 12 is located in the middle of the mounting structure 11. This arrangement, with the vent 12 in the center of the mounting structure 11, ensures that the gas diffuses uniformly from the center outwards. The diffusion path, flow velocity, and pressure attenuation are completely consistent in the circumferential direction, avoiding the problems of localized airflow concentration and pressure unevenness caused by off-center venting. It also ensures the central symmetry of the gas film pressure field from the venting source, significantly reducing micro-vibrations caused by gas film pressure fluctuations.

[0037] In some embodiments, such as Figure 2 As shown, the throttle 21 is connected to the inner wall of the housing 1 via a second reset member 4. With this configuration, the second reset member 4 is also an elastic element. Part of the vibration energy of the throttle 21 is absorbed and dissipated through the elastic deformation of the second reset member 4, and another part is absorbed and dissipated through the elastic deformation of the first reset member 321 of the transmission assembly 32. These two elastic mechanisms complement each other, effectively suppressing the vibration of the throttle 21.

[0038] In some embodiments, such as Figure 2 As shown, an air inlet 13 is provided on the side wall of the housing 1, and the air inlet 13 is connected to the air inlet end of the throttle 21 via a flexible pipe 22. With this configuration, external gas enters through the air inlet 13 and then enters the throttle 21 via the flexible pipe 22. The flexible pipe 22 is made of a flexible material to prevent slight vibrations of the throttle 21 from affecting the gas input.

[0039] Furthermore, in some embodiments, multiple air inlets 13 are provided, and these multiple air inlets 13 are evenly distributed circumferentially on the housing 1. Multiple flexible pipes 22 are correspondingly provided, and each air inlet 13 is connected to each air inlet end of the throttle 21 via a corresponding flexible pipe 22. This arrangement ensures that the gas output by the throttle 21 to the gap between the mounting structure 11 and the rotating component is evenly distributed circumferentially, ultimately forming a gas film with a uniform pressure field. This avoids localized pressure differences in the gas film caused by a single air inlet 13 or non-uniform air inlets 13, reducing micro-vibrations caused by uneven gas film pressure at the source.

[0040] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A hydrostatic gas bearing structure, characterized in that, The device includes a housing, a gas delivery mechanism, and a vibration damping mechanism. Both the gas delivery mechanism and the vibration damping mechanism are disposed within the housing. The housing has a mounting structure for mounting a rotating component. The gas delivery mechanism includes a throttle that can output gas into the gap between the mounting structure and the rotating component. The mounting structure has an outlet hole through which the outlet end of the throttle can extend. The outlet hole extends axially along the housing and has a limiting hole wall that restricts the radial movement of the throttle within the housing. The vibration damping mechanism includes a first gear and a transmission assembly that converts the movement of the throttle into rotation of the first gear. The transmission assembly includes a first reset member for limiting excessive rotation of the first gear.

2. The hydrostatic gas bearing structure as described in claim 1, characterized in that, The axis of rotation of the first gear is parallel to the axis of the housing. The transmission assembly also includes a transmission rod and a second gear. The second gear meshes with the first gear. One end of the transmission rod is rotatably connected to the throttle, and the other end is rotatably connected to the second gear.

3. The hydrostatic gas bearing structure as described in claim 2, characterized in that, The transmission assembly further includes a support member, one end of which is fixed inside the housing and the other end is rotatably connected to the second gear. One end of the first reset member is connected to the support member and the other end is connected to the second gear.

4. The hydrostatic gas bearing structure as described in claim 3, characterized in that, The support member includes a first support section and a second support section connected to each other. The first support section is fixed inside the housing, and the second support section is rotatably connected to the second gear. The first support section extends axially in the first gear, and the second support section is inclined. The end of the first reset member away from the second gear is connected to the first support section.

5. The hydrostatic gas bearing structure as described in claim 2, characterized in that, Both the first gear and the second gear are bevel gears. The teeth of the first gear are inclined from the middle to the edge in a direction away from the throttle. The inclination direction of the teeth of the second gear is adapted to the inclination direction of the teeth of the first gear.

6. The hydrostatic gas bearing structure as described in claim 1, characterized in that, The transmission assembly is provided in multiple parts, and the multiple transmission assemblies are evenly distributed in the circumferential direction of the first gear.

7. The hydrostatic gas bearing structure as described in claim 1, characterized in that, The throttle is connected to the inner wall of the housing via a second reset member.

8. The hydrostatic gas bearing structure as described in claim 1, characterized in that, The vent is located in the middle of the mounting structure.

9. The hydrostatic gas bearing structure as described in claim 1, characterized in that, An air inlet is provided on the side wall of the housing, and the air inlet is connected to the air inlet end of the throttle via a flexible pipe.

10. The hydrostatic gas bearing structure as described in claim 9, characterized in that, The housing has multiple air inlets, which are evenly distributed around the periphery of the housing. The housing also has multiple flexible pipes, and each air inlet is connected to each air inlet end of the throttle via the corresponding flexible pipe.

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