Clean room fresh air centralized processing and load distribution control method and system

Abstract

The application relates to the technical field of smart park management, and discloses a clean room fresh air centralized processing and load sub-control method and system. The method comprises the following steps: introducing a fresh air flow; inputting the fresh air flow into a preset electrochemical enhanced PCM cavity; adjusting a voltage waveform applied to a microelectrode array, so that a composite phase change layer adjusts the cleanliness of the fresh air flow; inputting the fresh air flow into a preset double-helix microchannel decoupling processor; controlling the inner helical channel to absorb or release water vapor in the fresh air flow; controlling the outer helical channel to absorb or release heat from the inner helical channel; inputting the fresh air flow output by the double-helix microchannel decoupling processor into a fresh air pipeline; and analyzing fresh air supply requirements of multiple areas, and respectively controlling multiple branches to supply fresh air to the multiple areas according to the fresh air supply requirements. The electrochemical enhanced PCM cavity and the double-helix microchannel decoupling processor are introduced, the traditional coupling heat and humidity and cleanliness processing process is decoupled in function, and efficient cooperation and independent regulation and control of the cleanliness, humidity and temperature are realized.

Description

Technical Field

[0001] This invention relates to the field of cleanroom environmental control technology, and more specifically, to a method and system for centralized fresh air treatment and load distribution control in cleanrooms. Background Technology

[0002] Cleanrooms, as special environments with strict requirements for air cleanliness, temperature, humidity, and airflow organization, are widely used in high-tech industries such as semiconductor manufacturing, biomedicine, precision instruments, and aerospace. During cleanroom operation, the fresh air system plays a crucial role in maintaining positive pressure, diluting pollutants, regulating temperature and humidity, and protecting personnel health. However, traditional fresh air handling systems generally suffer from high energy consumption, slow response, insufficient control precision, and difficulty in decoupling cleanliness from heat and humidity loads, making it difficult to meet the comprehensive demands of modern cleanrooms for efficient, precise, and low-energy operation.

[0003] In existing technologies, fresh air is typically pre-treated by a centralized air handling unit (AHU) before being distributed to various areas via ductwork. While this approach is structurally simple, it suffers from the following drawbacks: First, cleanliness, temperature, and humidity are interconnected, making it difficult for conventional combinations of cooling coils, humidifiers, and filters to achieve independent, rapid, and precise control. Second, while traditional phase change materials (PCMs) can be used for cold / heat storage to smooth out peak and valley air volumes, their poor thermal conductivity, slow response, and inability to actively participate in air cleanliness regulation are significant drawbacks. Third, for multi-zone cleanrooms, different process areas have varying requirements for fresh air parameters (such as cleanliness level, temperature, and humidity setpoints), and traditional systems lack the ability to dynamically allocate air as needed, easily leading to energy waste or localized environmental uncontrollability.

[0004] Therefore, there is an urgent need for a centralized fresh air treatment and load control method that can integrate active cleanliness control, efficient decoupling of heat and humidity load, and on-demand distribution functions, in order to break through the bottlenecks of traditional cleanroom fresh air systems in terms of energy efficiency, accuracy, and flexibility, and provide technical support for high cleanliness, low energy consumption, and intelligent clean environments. Summary of the Invention

[0005] In order to solve the above-mentioned technical problems, this application is proposed to provide a method and system for centralized treatment and load control of fresh air in clean rooms, so as to break through the bottlenecks of traditional clean room fresh air systems in terms of energy efficiency, accuracy and flexibility, and provide technical support for high cleanliness, low energy consumption and intelligent clean environment.

[0006] In a first aspect, the present invention provides a method for centralized treatment and load control of fresh air in a cleanroom, comprising: introducing fresh airflow; detecting the cleanliness parameters, humidity, and temperature of the fresh airflow through a preset sensor array; inputting the fresh airflow into a preset electrochemically enhanced PCM cavity, wherein the electrochemically enhanced PCM cavity includes an airflow channel, a composite phase change layer, and a microelectrode array, the composite phase change layer being placed in the airflow channel, and the microelectrode array being placed in the airflow channel and in contact with the composite phase change layer; adjusting the voltage waveform applied to the microelectrode array according to the cleanliness parameters of the fresh airflow, so that the composite phase change layer adjusts the cleanliness of the fresh airflow; and inputting the fresh airflow into a preset double-helix microchannel decoupling processor, wherein the double-helix microchannel decoupling processor includes concentric... The system comprises an inner spiral channel and an outer spiral channel. The inner spiral channel is used for airflow entry and exit, as well as for absorbing or releasing water vapor in the airflow. The outer spiral channel is used for heat absorption or release, and is attached to the outer wall of the inner spiral channel. Based on the humidity of the fresh airflow, the inner spiral channel is controlled to absorb or release water vapor from the fresh airflow. Based on the temperature of the fresh airflow, the outer spiral channel is controlled to absorb or release heat from the inner spiral channel to regulate the temperature of the fresh airflow. The fresh airflow output from the dual-spiral microchannel decoupling processor is input into a fresh air duct. The fresh air duct has multiple branches for supplying fresh air to multiple areas of the cleanroom. The fresh air supply demand of the multiple areas is analyzed, and the multiple branches are controlled to supply fresh air to the multiple areas according to the fresh air supply demand.

[0007] Optionally, in the aforementioned method for centralized fresh air treatment and load control in cleanrooms, the airflow channel is a channel made of aluminum alloy thin plate; the composite phase change layer uses expanded graphite impregnated with eutectic salt phase change material as a framework, and graphene nanosheets are uniformly dispersed in the matrix of the composite phase change layer; the microelectrode array is made of platinum-iridium alloy, with nano-TiO2 / MnO2 composite catalyst loaded on its surface, and each electrode in the microelectrode array is independently controlled.

[0008] Optionally, in the aforementioned cleanroom fresh air centralized treatment and load control method, the cleanliness parameter of the fresh air flow includes the particulate matter concentration of the fresh air flow; adjusting the voltage waveform applied to the microelectrode array according to the cleanliness parameter of the fresh air flow includes: when the particulate matter concentration of the fresh air flow is higher than a preset particulate matter concentration threshold, calculating the difference between the particulate matter concentration of the fresh air flow and the preset particulate matter concentration threshold; calculating the first voltage amplitude of the DC voltage to be applied to the microelectrode array, and the pulse frequency, pulse width, and duty cycle of the pulse voltage to be applied to the microelectrode array according to the difference between the particulate matter concentration of the fresh air flow and the preset particulate matter concentration threshold; applying the DC voltage to the microelectrode array according to the first voltage amplitude, and applying the pulse voltage to the microelectrode array according to the pulse frequency, the pulse width, and the duty cycle, so that the particulate matter in the fresh air flow settles.

[0009] Optionally, in the aforementioned cleanroom centralized fresh air treatment and load control method, the cleanliness parameters of the fresh airflow include the type and concentration of pollutants in the fresh airflow; adjusting the voltage waveform applied to the microelectrode array according to the cleanliness parameters of the fresh airflow includes: when the pollutant type of the fresh airflow belongs to a preset type, comparing the pollutant concentration of the fresh airflow with a preset pollutant concentration threshold; when the pollutant concentration of the fresh airflow is higher than the preset pollutant concentration threshold, calculating the difference between the pollutant concentration of the fresh airflow and the pollutant concentration threshold; setting the waveform of the AC voltage to be applied to the microelectrode array according to the pollutant type of the fresh airflow; calculating the second voltage amplitude and frequency of the AC voltage to be applied to the microelectrode array according to the difference between the pollutant concentration of the fresh airflow and the pollutant concentration threshold; and applying the AC voltage to the microelectrode array according to the waveform, the second voltage amplitude, and the frequency to degrade the pollutants in the fresh airflow.

[0010] Optionally, the aforementioned method for centralized fresh air treatment and load control in cleanrooms further includes: activating a preset auxiliary cooling device when a preset time for nighttime is reached and the cleanroom is in a non-working state; cooling the electrochemically enhanced PCM cavity through the auxiliary cooling device, causing the composite phase change layer in the electrochemically enhanced PCM cavity to condense into a solid state to release latent heat.

[0011] Optionally, in the aforementioned method for centralized fresh air treatment and load control in cleanrooms, the inner spiral channel is made of ceramic tube, and the inner wall of the inner spiral channel is coated with a LiCl solution film to contact the fresh air flow and absorb or release water vapor; the outer spiral channel is embedded... The base thermoelectric arm array, the In the base thermoelectric arm array, the first end of each thermoelectric arm is in contact with the outer wall of the inner spiral channel for heat conduction.

[0012] Optionally, in the aforementioned cleanroom centralized fresh air treatment and load control method, controlling the absorption or release of water vapor in the inner spiral channel according to the humidity of the fresh air flow includes: calculating the concentration and flow rate of the LiCl solution film required to achieve a preset target humidity for the fresh air flow based on the humidity of the fresh air flow; adjusting the concentration and flow rate of the LiCl solution film in the inner spiral channel using a preset peristaltic pump to absorb or release water vapor in the fresh air flow, thereby achieving the target humidity for the fresh air flow; and controlling the absorption or release of heat by the outer spiral channel on the inner spiral channel according to the temperature of the fresh air flow to adjust the temperature of the fresh air flow includes: calculating the concentration and flow rate of the LiCl solution film required to achieve a preset target temperature for the fresh air flow based on the temperature of the fresh air flow. The temperature of the base thermoelectric arm array; through a preset temperature adjustment module, the temperature of the outer spiral channel... In the basic thermoelectric arm array, the second end of each thermoelectric arm is heated or absorbs heat, through the... In the base thermoelectric arm array, the first end of each thermoelectric arm conducts heat with the fresh airflow, so that the fresh airflow reaches the target temperature.

[0013] Optionally, the aforementioned method for centralized fresh air treatment and load control in cleanrooms includes analyzing the fresh air supply demand of the multiple areas and controlling the multiple branches to supply fresh air to the multiple areas according to the fresh air supply demand. This includes: monitoring the distribution of personnel heat sources and the operation of process equipment in the multiple areas; calculating the cleanroom load of the multiple areas based on the distribution of personnel heat sources and the operation of process equipment; and controlling the opening and closing of valves on the multiple branches to supply fresh air to the multiple areas according to the cleanroom load.

[0014] Secondly, the present invention provides a cleanroom fresh air centralized treatment and load control system, comprising: an introduction module for introducing fresh air flow; a detection module for detecting the cleanliness parameters, humidity, and temperature of the fresh air flow through a preset sensor array; a first input module for inputting the fresh air flow into a preset electrochemically enhanced PCM cavity, wherein the electrochemically enhanced PCM cavity includes an airflow channel, a composite phase change layer, and a microelectrode array, the composite phase change layer being placed in the airflow channel, and the microelectrode array being placed in the airflow channel and in contact with the composite phase change layer; an adjustment module for adjusting the voltage waveform applied to the microelectrode array according to the cleanliness parameters of the fresh air flow, so that the composite phase change layer adjusts the cleanliness of the fresh air flow; and a second input module for inputting the fresh air flow into a preset double-helix microchannel decoupling processor, wherein the double-helix microchannel decoupling processor includes a... The system comprises an inner spiral channel and an outer spiral channel. The inner spiral channel is used for airflow entry and exit, as well as for absorbing or releasing water vapor in the airflow. The outer spiral channel is used for heat absorption or release, and is attached to the outer wall of the inner spiral channel. A first control module controls the inner spiral channel to absorb or release water vapor in the fresh air flow based on its humidity. A second control module controls the outer spiral channel to absorb or release heat from the inner spiral channel based on the temperature of the fresh air flow, thereby adjusting the temperature of the fresh air flow. A third input module inputs the fresh air flow output from the dual-spiral microchannel decoupling processor into a fresh air duct. The fresh air duct has multiple branches for supplying fresh air to multiple areas of the cleanroom. An output module analyzes the fresh air supply needs of the multiple areas and controls the multiple branches to supply fresh air to the multiple areas according to the fresh air supply needs.

[0015] The above-described technical solutions of the present invention have at least one or more of the following beneficial effects:

[0016] According to the technical solution of this invention, by introducing an electrochemically enhanced PCM cavity and a double-helix microchannel decoupling processor, the traditionally highly coupled heat and humidity and cleanliness processing processes are functionally decoupled, achieving efficient synergy and independent control of cleanliness, humidity, and temperature. Simultaneously, by setting multiple branches at the end of the fresh air duct and combining them with a regional demand analysis module, the airflow and parameters of each branch can be intelligently adjusted according to dynamic parameters such as the process requirements and personnel density of each clean area, achieving "on-demand allocation and precise supply." This ensures environmental quality in critical areas while avoiding energy waste caused by excessive air supply to non-critical areas. Attached Figure Description

[0017] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 A flowchart of a cleanroom fresh air centralized treatment and load control method according to an embodiment of this application;

[0019] Figure 2 This is a schematic diagram of a cleanroom fresh air centralized treatment and load control method according to an embodiment of this application;

[0020] Figure 3 This is another flowchart of the cleanroom fresh air centralized treatment and load control method according to an embodiment of this application;

[0021] Figure 4 This is another flowchart of the cleanroom fresh air centralized treatment and load control method according to an embodiment of this application;

[0022] Figure 5 For implementation of embodiments according to this application Figure 1 A block diagram of a cleanroom fresh air centralized treatment and load control system. Detailed Implementation

[0023] Some embodiments of the present invention will now be described with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.

[0024] like Figure 1 As shown, one embodiment of the present invention provides a method for centralized treatment and load control of fresh air in a cleanroom, comprising:

[0025] Step S110: Introduce fresh airflow.

[0026] Step S120: The cleanliness parameters, humidity and temperature of the fresh air flow are detected by a preset sensor array.

[0027] Step S130: Fresh airflow is input into a preset electrochemically enhanced PCM cavity, wherein the electrochemically enhanced PCM cavity includes an airflow channel, a composite phase change layer, and a microelectrode array. The composite phase change layer is placed in the airflow channel, and the microelectrode array is placed in the airflow channel and in contact with the composite phase change layer.

[0028] Step S140: Adjust the voltage waveform applied to the microelectrode array according to the cleanliness parameters of the fresh air flow, so that the composite phase change layer can adjust the cleanliness of the fresh air flow.

[0029] In this embodiment, the electrochemically enhanced PCM cavity dynamically adjusts the voltage waveform of the microelectrode array based on real-time cleanliness feedback, activates the surface electrochemical reaction of the composite phase change material, actively adsorbs or decomposes particulate matter and gaseous pollutants in the air, and significantly improves the response speed and accuracy of fresh air cleanliness control.

[0030] Step S150: Fresh air flow is input into a preset double-helix microchannel decoupling processor. The double-helix microchannel decoupling processor includes a concentric inner helix channel and an outer helix channel. The inner helix channel is used for airflow in and out and for absorbing or releasing water vapor in the airflow. The outer helix channel is used for heat absorption or heat release. The outer helix channel is attached to the outer wall of the inner helix channel.

[0031] Step S160: Control the inner spiral channel to absorb or release water vapor in the fresh air flow according to the humidity of the fresh air flow.

[0032] Step S170: Based on the temperature of the fresh air flow, control the outer spiral channel to absorb or release heat from the inner spiral channel in order to adjust the temperature of the fresh air flow.

[0033] In this embodiment, the double-helix microchannel structure undertakes the functions of dehumidification / humidification and sensible heat exchange through the inner and outer helical channels, respectively, realizing the physical separation and independent control of humidity and temperature load, and avoiding the energy waste caused by the traditional cold coil's "condensation before heating".

[0034] Step S180: The fresh air flow output from the dual-helix microchannel decoupling processor is input into the fresh air duct. The fresh air duct has multiple branches to supply fresh air to multiple areas of the clean room.

[0035] Step S190: Analyze the fresh air supply demand of multiple areas, and control multiple branches to supply fresh air to multiple areas according to the fresh air supply demand.

[0036] According to the technical solution of this embodiment, by introducing an electrochemically enhanced PCM cavity and a double-helix microchannel decoupling processor, the traditionally highly coupled heat and humidity and cleanliness processing processes are functionally decoupled, achieving efficient coordination and independent control of the three parameters of cleanliness, humidity, and temperature. Simultaneously, by setting multiple branches at the end of the fresh air duct and combining them with a regional demand analysis module, the airflow and parameters of each branch can be intelligently adjusted according to dynamic parameters such as the process requirements and personnel density of each clean area, achieving "on-demand allocation and precise supply." This ensures the environmental quality of critical areas while avoiding energy waste caused by excessive air supply to non-critical areas.

[0037] like Figure 2As shown, in one embodiment of the present invention, a method for centralized treatment and load control of fresh air in a clean room is also provided. Compared with the aforementioned embodiments, in this embodiment, the airflow channel of the method for centralized treatment and load control of fresh air in a clean room is a channel made of aluminum alloy sheet.

[0038] In this embodiment, the airflow channel is made of aluminum alloy sheet, which combines lightweight, high thermal conductivity and good mechanical strength. It not only accelerates the heat exchange rate between the airflow and the composite phase change layer, but also ensures the structural stability of the cavity during long-term operation. It is especially suitable for cleanrooms with stringent requirements for equipment cleanliness and corrosion resistance.

[0039] The composite phase change layer uses expanded graphite impregnated with eutectic salt phase change material as a framework, and graphene nanosheets are uniformly dispersed in the matrix of the composite phase change layer.

[0040] In this embodiment, the composite phase change layer uses expanded graphite impregnated with a eutectic salt phase change material as its framework, and graphene nanosheets are uniformly dispersed in the matrix. Expanded graphite provides a three-dimensional porous network structure, effectively preventing leakage of the phase change material and increasing the specific surface area; the graphene nanosheets form a highly thermally conductive pathway, significantly improving the overall thermal conductivity (by 3–5 times), making the phase change process faster and more uniform, thereby achieving rapid buffering and precise regulation of fresh air temperature fluctuations.

[0041] The microelectrode array is made of platinum-iridium alloy, with nano-TiO2 / MnO2 composite catalyst loaded on its surface, and each electrode in the microelectrode array is independently controlled.

[0042] In this embodiment, the microelectrode array is made of platinum-iridium alloy, which has excellent electrochemical stability and corrosion resistance; the nano-TiO2 / MnO2 composite catalyst supported on its surface can synergistically generate strong oxidizing free radicals (such as OH, etc.) when a specific voltage waveform is applied. It efficiently degrades VOCs (volatile organic compounds), microorganisms, and ultrafine particulate matter. Simultaneously, each electrode is independently controllable, dynamically starting, stopping, or adjusting its operating status based on feedback from local cleanliness sensors, avoiding energy waste caused by global power supply and achieving "on-demand purification."

[0043] According to the technical solution of this embodiment, through the synergistic optimization of materials, structure and control, while ensuring high cleanliness, lower energy consumption, faster response and higher level of intelligence are achieved, providing a solution for high-end cleanroom fresh air treatment that combines engineering practicality and technological advancement.

[0044] like Figure 3As shown, one embodiment of the present invention also provides a method for centralized treatment and load control of fresh air in a cleanroom. Compared with the aforementioned embodiments, the cleanliness parameters of the fresh air flow in this embodiment include the particulate matter concentration, pollutant type, and concentration of the fresh air flow. Step S140 includes:

[0045] Step S310: When the particulate matter concentration of the fresh airflow is higher than the preset particulate matter concentration threshold, calculate the difference between the particulate matter concentration of the fresh airflow and the preset particulate matter concentration threshold.

[0046] Step S320: Based on the difference between the particulate matter concentration of the fresh airflow and the preset particulate matter concentration threshold, calculate the first voltage amplitude of the DC voltage to be applied to the microelectrode array, as well as the pulse frequency, pulse width, and duty cycle of the pulse voltage to be applied to the microelectrode array.

[0047] Step S330: Apply DC voltage to the microelectrode array according to the first voltage amplitude, and apply pulse voltage to the microelectrode array according to the pulse frequency, pulse width and duty cycle to cause the particulate matter in the fresh air flow to settle.

[0048] In this embodiment, based on the fresh air cleanliness parameters (including particulate matter concentration, pollutant type and concentration) detected in real time by the sensor, different electrical excitation modes are used for targeted treatment. For example, for particulate matter (such as PM0.3–PM10), by applying a DC superimposed pulse voltage, a strong electrostatic field and ion wind effect are formed around the microelectrode array, which promotes the migration and sedimentation of charged particles to the surface of the composite phase change layer.

[0049] Step S340: When the pollutant type of the fresh airflow belongs to the preset type, the pollutant concentration of the fresh airflow is compared with the preset pollutant concentration threshold.

[0050] Step S350: When the pollutant concentration in the fresh air stream is higher than the preset pollutant concentration threshold, calculate the difference between the pollutant concentration in the fresh air stream and the pollutant concentration threshold.

[0051] Step S360: Based on the type of pollutants in the fresh airflow, set the waveform of the AC voltage to be applied to the microelectrode array.

[0052] In this embodiment, for specific gaseous pollutants (such as formaldehyde, TVOC (total volatile organic compounds), ammonia, etc.), the corresponding AC voltage waveform (such as sine wave, square wave, or modulated wave) is activated according to the type of pollutant to excite... Highly active free radicals (OH, ) are generated on the catalyst surface. (etc.) to achieve efficient photo / electrocatalytic oxidation degradation.

[0053] Step S370: Calculate the second voltage amplitude and frequency of the AC voltage to be applied to the microelectrode array based on the difference between the pollutant concentration of the fresh airflow and the pollutant concentration threshold.

[0054] In step S380, an AC voltage is applied to the microelectrode array according to the waveform, the second voltage amplitude, and the frequency to degrade pollutants in the fresh airflow.

[0055] In this embodiment, for example, when pollutants are severely exceeded (e.g., ΔC = 100 μg / m³), the amplitude is automatically increased to a high value (150V), a high-frequency pulse (100Hz, duty cycle 60%), or the AC excitation is enhanced.

[0056] The specific calculation method is provided below:

[0057]

[0058]

[0059] in, The second voltage amplitude represents the AC voltage. , The preset minimum and maximum safe operating voltages, The function is a natural exponential function. To reflect the sensitivity of voltage to deviations in pollutant concentration, The concentration of pollutants in the fresh airflow. For pollutant concentration thresholds, The frequency of the alternating current voltage. As the reference frequency, This is the gain coefficient of frequency relative to pollutant concentration. Indicates pollutants, The pollutant-specific nonlinear index (volatile organic compounds (VOCs) is set to 1.2, and inorganic gases (...) (Take 0.8) As for the type of pollutant, To preset weights, This represents the real-time energy loss rate during the degradation process.

[0060] According to the technical solution of this embodiment, through a closed-loop control architecture of refined perception, intelligent decision-making, and multimodal execution, not only is efficient, low-consumption, and differentiated treatment of particulate matter and gaseous pollutants achieved, but the system reliability and environmental adaptability are also significantly improved. This provides a new air purification solution that combines technological advancement and engineering practicality for cleanroom scenarios with stringent air quality requirements, such as high-end manufacturing and biomedicine.

[0061] In one embodiment of the present invention, a method for centralized treatment and load control of fresh air in a cleanroom is also provided. Compared with the foregoing embodiments, the method for centralized treatment and load control of fresh air in a cleanroom in this embodiment further includes:

[0062] (1) When the preset time of night arrives and the cleanroom is in a non-working state, start the preset auxiliary cooling device.

[0063] (2) The electrochemically enhanced PCM cavity is cooled by an auxiliary cooling device, so that the composite phase change layer in the electrochemically enhanced PCM cavity condenses into a solid to release latent heat.

[0064] According to the technical solution of this embodiment, a smart energy storage strategy based on operating time and condition is further introduced. During non-working periods in the cleanroom (such as at night), an auxiliary cooling device is activated to actively cool the electrochemically enhanced PCM cavity, causing the composite phase change layer to condense from a liquid state to a solid state and release latent heat. This achieves an energy dispatch mechanism of "valley electricity storage and peak electricity release." For example, during the off-peak period of the power grid at night (usually 23:00–7:00 the next day), the electricity price is significantly lower than during the daytime peak period. In this embodiment, a low-power auxiliary cooling device (such as a small air-cooled or water-cooled unit) is activated during this period to pre-cool the PCM cavity, allowing the eutectic salt phase change material with high latent heat capacity to complete solidification and cold storage. During high-load operation during the day, the PCM cavity absorbs heat through melting to bear part of the sensible / latent heat load of the fresh air, reducing the start-up and shutdown frequency and energy consumption of the main cooling system.

[0065] In one embodiment of the present invention, a method for centralized treatment and load control of fresh air in a cleanroom is also provided. Compared with the aforementioned embodiments, the method for centralized treatment and load control of fresh air in a cleanroom in this embodiment...

[0066] The inner spiral channel is made of ceramic tube, and the inner wall of the inner spiral channel is coated with a LiCl solution film, which comes into contact with the fresh air flow and absorbs or releases water vapor.

[0067] In this embodiment, the inner spiral channel uses a porous ceramic tube as the substrate, which possesses excellent chemical stability, corrosion resistance, and capillary permeability. The LiCl solution membrane coated on its inner wall is a highly hygroscopic salt solution that can efficiently absorb water vapor from fresh air under low relative humidity and release moisture under high humidity or heating conditions, achieving bidirectional humidity control. Compared to traditional rotary dehumidification or condensation dehumidification, this method does not require high-temperature regeneration or significant cooling energy consumption. Experiments show that under inlet air conditions of 35°C and 60%RH (relative humidity), a single-stage LiCl-coated ceramic spiral channel can reduce the humidity of fresh air to ≤45%RH, achieving a dehumidification efficiency ratio (EER). The COP_d is 8.2, which is much higher than that of refrigeration dehumidification (COP_d≈3.0–4.5) and silica gel rotor (COP_d≈0.8–1.2, requiring 120°C regeneration heat).

[0068] External spiral channel embedding Thermoelectric arm array, In the base thermoelectric arm array, the first end of each thermoelectric arm is in contact with the outer wall of the inner spiral channel for heat conduction.

[0069] According to the technical solution of this embodiment, the external spiral channel is integrated. The thermoelectric arm array utilizes the Peltier effect to actively absorb or release heat through the inner spiral channel. By switching the direction of the thermoelectric arm current, the heat flow can be flexibly controlled, thus enabling precise cooling or heating of fresh air without the need for a compressor, refrigerant, or fan. Experiments show that under input current of 2A and voltage of 3V, a single unit... The thermoelectric module can achieve a local temperature difference of ±8°C in the inner spiral channel within 5 seconds; when the air volume is 1000m³ / h, the temperature regulation accuracy can reach ±0.3°C, and the response speed is more than 3 times faster than that of traditional water coils.

[0070] like Figure 4 As shown, one embodiment of the present invention also provides a method for centralized treatment and load control of fresh air in a cleanroom. Compared with the aforementioned embodiments, the method for centralized treatment and load control of fresh air in a cleanroom in this embodiment includes step S160 as follows:

[0071] Step S410: Based on the humidity of the fresh air flow, calculate the concentration and flow rate of the LiCl solution membrane required to bring the fresh air flow to the preset target humidity.

[0072] In step S420, the concentration and flow rate of the LiCl solution film in the inner spiral channel are adjusted by a preset peristaltic pump to absorb or release water vapor in the fresh air flow, so that the fresh air flow reaches the target humidity.

[0073] Traditional fixed-concentration desiccant materials are prone to over- or under-dehumidification when faced with varying inlet air humidity conditions. In this embodiment, the optimal concentration of the required LiCl solution (typically within the range of 30%–50% wt) and the circulation flow rate are dynamically calculated based on real-time fresh air humidity, and then precisely supplied to the ceramic inner wall by a peristaltic pump to form an adjustable liquid film. This strategy ensures that the moisture absorption / dehumidification capacity matches the load demand in real time. In tests with inlet air humidity fluctuations ranging from 40%–80% RH, the dynamic LiCl control resulted in a supply air humidity deviation controlled within ±1.5% RH, compared to ±6% RH for the fixed-concentration solution. Simultaneously, the LiCl solution utilization rate increased by approximately 35%, reducing salt consumption and waste liquid generation.

[0074] Step S170 includes:

[0075] Step S430: Calculate the temperature required for the fresh air to reach the preset target temperature based on the temperature of the fresh air. Temperature of the base thermoelectric arm array.

[0076] Step S440: Through the preset temperature adjustment module, the external spiral channel... In the basic thermoelectric arm array, the second end of each thermoelectric arm is heated or absorbs heat, via In the base thermoelectric arm array, the first end of each thermoelectric arm conducts heat with the fresh air flow, enabling the fresh air flow to reach the target temperature.

[0077] In this embodiment, a dedicated temperature control module (such as a miniature liquid-cooled plate or a phase-change radiator) is introduced to actively manage the heat sink at the second end of each thermoelectric arm—efficiently extracting heat in cooling mode and providing a low-temperature heat sink in heating mode, thereby maximizing the Peltier effect efficiency. Experiments show that, under the same input power, the thermoelectric system equipped with active heat sink management improves the temperature difference capability by 42% and the COP (coefficient of performance) by approximately 28% compared to the natural convection cooling scheme; each thermoelectric arm can be independently temperature-controlled, achieving a gradient temperature distribution along the airflow direction to meet the requirements of complex airflow curves.

[0078] According to the technical solution of this embodiment, by comparing the physical properties of the LiCl solution membrane with... The operation status of the thermoelectric module is incorporated into a unified intelligent control framework, which not only achieves high precision, high response and high energy efficiency in temperature and humidity decoupling, but also greatly improves the system's adaptability and long-term reliability, providing key technical support for the evolution of cleanroom fresh air systems towards "precise environmental control + zero-carbon operation".

[0079] In one embodiment of the present invention, a method for centralized treatment and load control of fresh air in a cleanroom is also provided. Compared with the aforementioned embodiments, the method for centralized treatment and load control of fresh air in a cleanroom in this embodiment includes step S190 as follows:

[0080] (1) Monitor the distribution of personnel heat sources and the operation of process equipment in multiple areas.

[0081] (2) Calculate the clean load of multiple areas based on the distribution of personnel heat sources and the operation of process equipment in multiple areas.

[0082] (3) Based on the clean air load of multiple areas, control the opening and closing of valves on multiple branches to supply fresh air to multiple areas.

[0083] Traditional cleanroom fresh air systems typically supply air at a constant maximum design load, resulting in significant waste of fresh air during off-peak hours (such as nighttime, low production line operation, and periods with few personnel). In this embodiment, by real-time monitoring of personnel heat sources (such as infrared thermal imaging or Wi-Fi location data) and process equipment status (such as PLC operation signals and power monitoring), the system dynamically assesses the pollutant generation rate and thermal and humidity disturbance intensity in each area, thereby accurately calculating the minimum required fresh air volume.

[0084] like Figure 5 As shown, one embodiment of the present invention provides a cleanroom fresh air centralized treatment and load control system, comprising:

[0085] Module 510 is introduced to introduce fresh airflow.

[0086] The detection module 520 detects the cleanliness parameters, humidity, and temperature of the fresh air flow through a preset sensor array.

[0087] The first input module 530 inputs fresh air into a preset electrochemically enhanced PCM cavity, wherein the electrochemically enhanced PCM cavity includes an airflow channel, a composite phase change layer, and a microelectrode array. The composite phase change layer is placed in the airflow channel, and the microelectrode array is placed in the airflow channel and in contact with the composite phase change layer.

[0088] The adjustment module 540 adjusts the voltage waveform applied to the microelectrode array according to the cleanliness parameters of the fresh air flow, so that the composite phase change layer can adjust the cleanliness of the fresh air flow.

[0089] In this embodiment, the electrochemically enhanced PCM cavity dynamically adjusts the voltage waveform of the microelectrode array based on real-time cleanliness feedback, activates the surface electrochemical reaction of the composite phase change material, actively adsorbs or decomposes particulate matter and gaseous pollutants in the air, and significantly improves the response speed and accuracy of fresh air cleanliness control.

[0090] The second input module 550 inputs fresh air flow into a preset double-helix microchannel decoupling processor. The double-helix microchannel decoupling processor includes a concentric inner helix channel and an outer helix channel. The inner helix channel is used for airflow in and out and for absorbing or releasing water vapor in the airflow. The outer helix channel is used for heat absorption or release. The outer helix channel is attached to the outer wall of the inner helix channel.

[0091] The first control module 560 controls the inner spiral channel to absorb or release water vapor in the fresh air flow based on the humidity of the fresh air flow.

[0092] The second control module 570 controls the outer spiral channel to absorb or release heat from the inner spiral channel based on the temperature of the fresh air flow, thereby adjusting the temperature of the fresh air flow.

[0093] In this embodiment, the double-helix microchannel structure undertakes the functions of dehumidification / humidification and sensible heat exchange through the inner and outer helical channels, respectively, realizing the physical separation and independent control of humidity and temperature load, and avoiding the energy waste caused by the traditional cold coil's "condensation before heating".

[0094] The third input module 580 inputs the fresh air flow output from the dual-helix microchannel decoupling processor into the fresh air duct. The fresh air duct has multiple branches to supply fresh air to multiple areas of the clean room.

[0095] The output module 590 analyzes the fresh air supply demand of multiple areas and controls multiple branches to supply fresh air to multiple areas according to the fresh air supply demand.

[0096] According to the technical solution of this embodiment, by introducing an electrochemically enhanced PCM cavity and a double-helix microchannel decoupling processor, the traditionally highly coupled heat and humidity and cleanliness processing processes are functionally decoupled, achieving efficient coordination and independent control of the three parameters of cleanliness, humidity, and temperature. Simultaneously, by setting multiple branches at the end of the fresh air duct and combining them with a regional demand analysis module, the airflow and parameters of each branch can be intelligently adjusted according to dynamic parameters such as the process requirements and personnel density of each clean area, achieving "on-demand allocation and precise supply." This ensures the environmental quality of critical areas while avoiding energy waste caused by excessive air supply to non-critical areas.

[0097] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0098] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0099] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0100] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0101] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. Cleanroom centralized fresh air treatment and load control methods, including: Introducing fresh airflow; The cleanliness, humidity, and temperature of the fresh airflow are detected by a preset sensor array. The fresh airflow is input into a preset electrochemically enhanced PCM cavity, wherein the electrochemically enhanced PCM cavity includes an airflow channel, a composite phase change layer, and a microelectrode array, the composite phase change layer is placed in the airflow channel, and the microelectrode array is placed in the airflow channel and in contact with the composite phase change layer; Based on the cleanliness parameters of the fresh airflow, the voltage waveform applied to the microelectrode array is adjusted so that the composite phase change layer adjusts the cleanliness of the fresh airflow. The fresh airflow is input into a preset double-helix microchannel decoupling processor, wherein the double-helix microchannel decoupling processor includes a concentric inner helix channel and an outer helix channel. The inner helix channel is used for airflow in and out and for absorbing or releasing water vapor in the airflow. The outer helix channel is used for heat absorption or heat release. The outer helix channel is attached to the outer wall of the inner helix channel. The inner spiral channel is controlled to absorb or release water vapor in the fresh air flow based on the humidity of the fresh air flow. Based on the temperature of the fresh airflow, the outer spiral channel absorbs or releases heat from the inner spiral channel to regulate the temperature of the fresh airflow. The fresh air flow output from the dual-helix microchannel decoupling processor is input into the fresh air duct, which has multiple branches for supplying fresh air to multiple areas of the clean room. Analyze the fresh air supply demand of the multiple areas, and control the multiple branches to supply fresh air to the multiple areas according to the fresh air supply demand.

2. The method for centralized fresh air treatment and load control in cleanrooms according to claim 1, wherein, The airflow channel is a channel made of aluminum alloy sheet; The composite phase change layer uses expanded graphite impregnated with eutectic salt phase change material as a framework, and graphene nanosheets are uniformly dispersed in the matrix of the composite phase change layer. The microelectrode array is made of platinum-iridium alloy and has a nano-TiO2 / MnO2 composite catalyst loaded on its surface. Each electrode in the microelectrode array is independently controlled.

3. The method for centralized fresh air treatment and load control in cleanrooms according to claim 1, wherein, The cleanliness parameters of the fresh air flow include the particulate matter concentration of the fresh air flow; Adjusting the voltage waveform applied to the microelectrode array based on the cleanliness parameters of the fresh airflow includes: When the particulate matter concentration of the fresh airflow is higher than a preset particulate matter concentration threshold, the difference between the particulate matter concentration of the fresh airflow and the preset particulate matter concentration threshold is calculated. Based on the difference between the particulate matter concentration of the fresh airflow and the preset particulate matter concentration threshold, the first voltage amplitude of the DC voltage to be applied to the microelectrode array, as well as the pulse frequency, pulse width, and duty cycle of the pulse voltage to be applied to the microelectrode array are calculated. A DC voltage is applied to the microelectrode array according to the first voltage amplitude, and a pulse voltage is applied to the microelectrode array according to the pulse frequency, the pulse width and the duty cycle, so that the particulate matter in the fresh air flow settles.

4. The method for centralized fresh air treatment and load control in cleanrooms according to claim 3, wherein, The cleanliness parameters of the fresh airflow include the type and concentration of pollutants in the fresh airflow; Adjusting the voltage waveform applied to the microelectrode array based on the cleanliness parameters of the fresh airflow includes: When the pollutant type of the fresh airflow belongs to a preset type, the pollutant concentration of the fresh airflow is compared with a preset pollutant concentration threshold. When the pollutant concentration in the fresh airflow is higher than the preset pollutant concentration threshold, the difference between the pollutant concentration in the fresh airflow and the pollutant concentration threshold is calculated. Based on the type of pollutants in the fresh airflow, set the waveform of the AC voltage to be applied to the microelectrode array; Based on the difference between the pollutant concentration in the fresh airflow and the pollutant concentration threshold, the second voltage amplitude and frequency of the AC voltage to be applied to the microelectrode array are calculated. An AC voltage is applied to the microelectrode array according to the waveform, the second voltage amplitude, and the frequency to degrade pollutants in the fresh airflow.

5. The method for centralized fresh air treatment and load control in cleanrooms according to claim 4, wherein, Also includes: When the preset time for nighttime is reached and the cleanroom is in a non-working state, the preset auxiliary cooling device is activated; The auxiliary cooling device is used to cool the electrochemically enhanced PCM cavity, causing the composite phase change layer in the electrochemically enhanced PCM cavity to condense into a solid state and release latent heat.

6. The method for centralized fresh air treatment and load control in cleanrooms according to claim 1, wherein, The inner spiral channel is made of ceramic tube, and the inner wall of the inner spiral channel is coated with a LiCl solution film, which contacts the fresh air flow and absorbs or releases water vapor. The outer spiral channel is embedded The base thermoelectric arm array, the In the base thermoelectric arm array, the first end of each thermoelectric arm is in contact with the outer wall of the inner spiral channel for heat conduction.

7. The method for centralized fresh air treatment and load control in cleanrooms according to claim 1, wherein, Based on the humidity of the fresh airflow, the inner spiral channel is controlled to absorb or release water vapor from the fresh airflow, including: Based on the humidity of the fresh airflow, calculate the concentration and flow rate of the LiCl solution membrane required to bring the fresh airflow to the preset target humidity. By using a pre-set peristaltic pump, the concentration and flow rate of the LiCl solution film in the inner spiral channel are adjusted to absorb or release water vapor in the fresh air flow, so that the fresh air flow reaches the target humidity. Based on the temperature of the fresh airflow, controlling the outer spiral channel to absorb or release heat from the inner spiral channel to regulate the temperature of the fresh airflow includes: Based on the temperature of the fresh airflow, calculate the amount of temperature required to bring the fresh airflow to the preset target temperature. Temperature of the base thermoelectric arm array; The temperature is adjusted via a pre-set temperature control module on the outer spiral channel. In the basic thermoelectric arm array, the second end of each thermoelectric arm is heated or absorbs heat, through the... In the base thermoelectric arm array, the first end of each thermoelectric arm conducts heat with the fresh airflow, so that the fresh airflow reaches the target temperature.

8. The method for centralized fresh air treatment and load control in cleanrooms according to claim 1, wherein, Analyze the fresh air supply demand of the multiple areas, and control the multiple branch lines to supply fresh air to the multiple areas according to the fresh air supply demand, including: Monitor the distribution of personnel and heat sources and the operation of process equipment in the aforementioned multiple areas; Calculate the cleanroom load of the multiple areas based on the distribution of personnel heat sources and the operation of process equipment in the multiple areas; Based on the clean air load of the multiple areas, the valves of the multiple branches are controlled to supply fresh air to the multiple areas.

9. Cleanroom centralized fresh air treatment and load control system, including: Introducing modules to introduce fresh airflow; The detection module detects the cleanliness parameters, humidity, and temperature of the fresh airflow using a preset sensor array; The first input module inputs the fresh airflow into a preset electrochemically enhanced PCM cavity, wherein the electrochemically enhanced PCM cavity includes an airflow channel, a composite phase change layer, and a microelectrode array, the composite phase change layer is placed in the airflow channel, and the microelectrode array is placed in the airflow channel and in contact with the composite phase change layer; The adjustment module adjusts the voltage waveform applied to the microelectrode array according to the cleanliness parameters of the fresh air flow, so that the composite phase change layer adjusts the cleanliness of the fresh air flow. The second input module inputs the fresh air flow into a preset double-helix microchannel decoupling processor, wherein the double-helix microchannel decoupling processor includes a concentric inner helix channel and an outer helix channel. The inner helix channel is used for airflow in and out and for absorbing or releasing water vapor in the airflow. The outer helix channel is used for heat absorption or heat release. The outer helix channel is attached to the outer wall of the inner helix channel. The first control module controls the inner spiral channel to absorb or release water vapor in the fresh air flow based on the humidity of the fresh air flow. The second control module controls the outer spiral channel to absorb or release heat from the inner spiral channel based on the temperature of the fresh air flow, so as to adjust the temperature of the fresh air flow. The third input module inputs the fresh air flow output by the double-helix microchannel decoupling processor into the fresh air duct. The fresh air duct has multiple branches for supplying fresh air to multiple areas of the clean room. The output module analyzes the fresh air supply demand of the multiple areas and controls the multiple branches to supply fresh air to the multiple areas according to the fresh air supply demand.

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