Electromagnetic shielding sputtering film coating thickness detection mechanism

Abstract

The application relates to the technical field of laser detection tooling, and particularly discloses a thickness detection mechanism for an electromagnetic shielding sputtering film coating layer, which comprises a rack and a machine shell fixed to the outer side of the top end of the rack; further comprises a lifting plate which is installed in the middle part of the inner side of the machine shell in a lifting manner through a lifting adjusting mechanism, a first rotating disc is rotatably installed on the inner side of the lifting plate, and the top surface of the first rotating disc is fixed with two groups of upper laser measuring assemblies; a fixing frame is installed on the middle part of the top surface of the rack in a sliding manner through a sliding adjusting mechanism, a second rotating disc is rotatably installed on the inner side of the fixing frame, and the bottom surface of the second rotating disc is fixed with two groups of lower laser measuring assemblies corresponding to the upper laser measuring assemblies. The thickness detection mechanism for the electromagnetic shielding sputtering film coating layer can be adaptively adjusted and matched, can be used in sample and continuous detection double scenes through double-face synchronous laser measurement and rotating adjustment, and can complete coating thickness detection with high precision and high efficiency.

Description

Technical Field

[0001] This invention relates to the field of laser inspection tooling technology, and more particularly to the field of laser inspection technology for electromagnetic shielding sputtered film coating thickness, specifically an electromagnetic shielding sputtered film coating thickness inspection mechanism. Background Technology

[0002] Electromagnetic shielding sputtered film is a functional material that achieves electromagnetic interference (EMI) shielding by depositing a thin film of metal or conductive oxide on the surface of a substrate. It is widely used in consumer electronics, aerospace, medical equipment and other fields with extremely high requirements for electromagnetic compatibility. Its coating thickness directly determines the shielding effectiveness. If it is too thin, the shielding will be insufficient, and if it is too thick, it will be prone to cracking or increase costs. Therefore, high-precision and high-efficiency online thickness detection is a key quality control point in the production process. For example, patent CN 223741505 U discloses a battery cell surface coating thickness measuring device, belonging to the field of inspection tooling technology. It includes a thickness detection component and a transport component mounted on a platform. The thickness detection component is equipped with a height adjustment device, and the height adjustment device is equipped with a photoelectric sensor for detecting the thickness of the battery cell surface coating. The transport component is slidably connected to the platform and is used to transport the battery cell to be tested to the photoelectric sensor to detect the thickness of the battery cell surface coating. This invention, through the height adjustment device and transport component in conjunction with the photoelectric sensor, achieves non-contact thickness detection of the surface coating of cylindrical battery cells, improving the quality of battery cell production. For example, patent CN 120820076 A discloses a coating thickness detection device for three-proof fabric, including a detection platform. A detection component is fixedly installed on the top right side of the detection platform, and the detection component includes a detection base. The detection base has a hollow structure so that the three-proof fabric can pass through the interior of the detection base. Laser detectors are fixedly installed on both the front and rear sides of the interior of the detection base. The laser detectors detect the coating thickness of the three-proof fabric by emitting and receiving detection beams from the upper and lower sides of the three-proof fabric. This three-proof fabric coating thickness detection device uses an unwinding unit and a rewinding unit to transport the three-proof fabric, and a dust removal mechanism assists in cleaning and collecting the attached dust and dirt. Simultaneously, a wrinkle removal mechanism corrects the three-proof fabric and removes wrinkles, so that the flat three-proof fabric can be detected by the detection beam for coating thickness, avoiding the influence of dust, wrinkles, and other factors on the laser detection data. However, based on the actual use of current coating thickness detection devices, they still have certain shortcomings, such as: 1. Poor adjustment flexibility and low adaptability. Most current testing institutions are fixed structures, which are not convenient for fixing, adjusting and installing measuring components and substrates. Tooling needs to be replaced, resulting in low efficiency. 2. Insufficient measurement accuracy: Measuring the coating surface solely with a single-sided laser or contact probe cannot simultaneously obtain the original thickness of the substrate and the total thickness of the coating plus the substrate. The difference needs to be calculated separately, and the results are prone to deviation due to substrate deformation, fixing errors, or probe errors. 3. It cannot achieve continuous online inspection. Traditional equipment is mostly "offline sampling inspection", which requires interrupting the production process to pick up and put down samples. It cannot match the continuous roll-to-roll production rhythm of sputtering process, resulting in lagging quality control. 4. Lack of automatic comparison and tension control: The testing equipment only measures the substrate to be tested and does not integrate the control group clamping and conveying tension monitoring functions. It is necessary to manually place standard samples for comparison. Moreover, tension fluctuations during substrate conveying will cause coating stretching deformation, further reducing the testing accuracy.

[0003] Therefore, we propose an electromagnetic shielding sputtering film coating thickness detection mechanism to solve the problems mentioned above. Summary of the Invention

[0004] The purpose of this invention is to provide an electromagnetic shielding sputtering film coating thickness detection mechanism to solve the problems mentioned in the background art, such as poor adjustment flexibility, low adaptability, insufficient measurement accuracy, inability to achieve continuous online detection, and lack of automatic comparison and tension control in the current electromagnetic shielding sputtering film coating thickness detection mechanism.

[0005] To achieve the above objectives, the present invention provides the following technical solution: an electromagnetic shielding sputtering film coating thickness detection mechanism, comprising: a frame and a housing fixed to the outer side of the top of the frame; Also includes: The lifting plate is installed in the middle of the inner side of the machine housing by means of a lifting adjustment mechanism. A first turntable is rotatably installed on the inner side of the lifting plate, and two sets of upper laser measurement components are fixed on the top surface of the first turntable. A fixed frame is slidably installed on the top surface of the machine frame via a sliding adjustment mechanism. A second turntable is rotatably installed on the inner side of the fixed frame. Two sets of lower laser measurement components corresponding to the upper laser measurement components are fixed on the bottom surface of the second turntable. The top surface of the second turntable is fixed with a comparison limiting mechanism, which includes two sets of limiting components corresponding to the upper laser measurement component and the lower laser measurement component.

[0006] As a preferred technical solution of the present invention: the lifting adjustment mechanism includes a lifting frame fixedly installed on the inner side wall of the housing, a first adjusting screw and a slide rod vertically installed inside the lifting frame, the first adjusting screw being rotatably installed on the inner front side of the lifting frame, the slide rod being symmetrically arranged on the inner rear side of the lifting frame, the lifting plate being threadedly connected to the outer side of the first adjusting screw, and the rear end of the lifting plate being slidably connected to the slide rod.

[0007] As a preferred technical solution of the present invention: a limit block is installed at an equal angle on the outer side of the first turntable, and a limit buckle that can lock corresponding to the limit block is installed on the top of the lifting plate. Limit blocks and limit buckles are also installed on the bottom of the second turntable and the fixing frame, respectively.

[0008] As a preferred technical solution of the present invention: a protective cover is installed above the lifting plate and below the fixing frame, and a heat dissipation module is obliquely arranged at the end of the protective cover.

[0009] As a preferred technical solution of the present invention: the limiting component includes a telescopic rod symmetrically fixed to the top surface of the second turntable, a mounting platform fixedly installed at the top of the telescopic rod, and a first support frame engaged with the top surface of the mounting platform. A conveying roller is rotatably installed on the inner side of the top of the first support frame, and the bottom side of the first support frame is fixed to the mounting platform by bolts.

[0010] As a preferred technical solution of the present invention: the limiting component includes a telescopic rod symmetrically fixed to the top surface of the second turntable, a mounting platform fixedly installed at the top of the telescopic rod, and a second support frame engaged with the top surface of the mounting platform. A fixed clamping platform is fixedly installed on the inner bottom surface of the second support frame. A lifting clamping platform is slidably connected to the inner side of the second support frame above the fixed clamping platform. The end of the lifting clamping platform is integrally fixed with a connecting plate slidably connected to the side wall of the second support frame. An adjusting shaft with threaded drive corresponding to the connecting plate is rotatably installed on the outer side of the second support frame.

[0011] As a preferred technical solution of the present invention: a non-contact tension meter is provided on the surface of the second turntable on the rear side of the middle part of the limiting component.

[0012] As a preferred technical solution of the present invention: the sliding adjustment mechanism includes a support plate, which is vertically fixedly installed on the inner side of the top of the frame. A sliding groove is provided on the top surface of the support plate. The top end of the support plate is fitted with the bottom end of the fixed frame, and a sliding strip corresponding to and engaging with the sliding groove is fixed at the bottom end of the fixed frame.

[0013] As a preferred technical solution of the present invention: the sliding adjustment mechanism includes a second adjusting screw rotatably mounted on the outside of the support plate, the outside of the second adjusting screw being connected to a connecting block fixed at the bottom edge of the fixed frame via a corresponding threaded transmission, and a transmission belt being connected to the end of the second adjusting screw.

[0014] As a preferred technical solution of the present invention: the side of the housing is provided with baffles corresponding to the left and right of the comparison and limiting mechanism.

[0015] Compared with the prior art, the present invention has at least the following beneficial effects: the electromagnetic shielding sputtering film coating thickness detection mechanism can be adaptively adjusted and matched, and can be used for both sample and continuous detection scenarios through dual-sided synchronous laser measurement and rotation adjustment, and can complete the coating thickness detection with high precision and high efficiency. 1. This solution includes a first adjusting screw, a lifting plate, and an upper laser measuring component. The rotation of the first adjusting screw facilitates the lifting and lowering of the lifting plate, thereby adjusting the position and height of the upper laser measuring component, which is convenient for layer thickness detection from above. 2. This solution includes a second turntable and a lower laser measurement component. The lower laser measurement component is located at the bottom, which allows for substrate distance measurement at the bottom. This facilitates coating calculation based on the measurement data from the upper laser measurement component, thereby increasing measurement accuracy. 3. This solution includes a telescopic rod, a mounting platform, a conveying roller, and a lifting clamping platform. The conveying roller enables continuous conveying and testing of the substrate, while the lifting clamping platform and the fixed clamping platform enable clamping and fixing of the control group, facilitating online automatic identification and comparison of coating thickness. 4. This solution includes a lifting plate, a first turntable, a fixed frame, and a second turntable. The first and second turntables can rotate 90°. After the first and second turntables rotate laterally, the baffle can be opened to transport the substrate, which is convenient for sample testing or continuous testing. 5. This solution includes a support plate, a second adjusting screw, and a connecting block. The second adjusting screw facilitates the sliding of the fixed frame and the second turntable as a whole, and the support plate can always stably support the fixed frame, making it easy to slide the fixed frame outward for sample loading and testing. Attached Figure Description

[0016] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings: Figure 1 This is a schematic diagram of the overall front structure of the present invention; Figure 2 This is a schematic diagram of the overall frontal cross-section of the present invention; Figure 3 This is a schematic diagram of the overall side cross-sectional structure of the present invention; Figure 4 This is an exploded structural diagram of the lifting frame, lifting plate, and protective cover of the present invention; Figure 5 This is an exploded structural diagram of the lifting plate, the first turntable, and the protective cover of the present invention; Figure 6 This is an exploded structural diagram of the fixing frame and support plate of the present invention; Figure 7 This is an exploded structural diagram of the fixing frame, the second turntable, and the telescopic rod of the present invention; Figure 8 This is a schematic diagram of the overall structure of the first and second support frames of the present invention.

[0017] In the diagram: 1. Frame; 2. Housing; 3. Lifting frame; 4. First adjusting screw; 5. Slide bar; 6. Lifting plate; 7. First turntable; 8. Upper laser measuring component; 9. Through hole; 10. Protective cover; 11. Heat dissipation module; 12. Limiting block; 13. Limiting buckle; 14. Fixed frame; 15. Second turntable; 16. Lower laser measuring component; 17. Non-contact tension gauge; 18. Telescopic rod; 19. Mounting platform; 20. First support frame; 21. Conveyor roller; 22. Second support frame; 23. Fixed clamp; 24. Lifting clamp; 25. Connecting plate; 26. Adjusting shaft; 27. Support plate; 28. Slide groove; 29. ​​Slide bar; 30. Second adjusting screw; 31. Connecting block; 32. Transmission belt; 33. Baffle. Detailed Implementation

[0018] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention, so that the implementation process of how the present application uses technical means to solve technical problems and achieve technical effects can be fully understood and implemented accordingly. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0019] Please see Figures 1-8 The present invention provides the following technical solution: An electromagnetic shielding sputtering film coating thickness detection mechanism includes: a frame 1, a housing 2, a lifting frame 3, a first adjusting screw 4, a slide bar 5, a lifting plate 6, a first turntable 7, an upper laser measuring component 8, a through hole 9, a protective cover 10, a heat dissipation module 11, a limit block 12, a limit buckle 13, a fixed frame 14, a second turntable 15, a lower laser measuring component 16, a non-contact tension meter 17, a telescopic rod 18, a mounting platform 19, a first support frame 20, a conveying roller 21, a second support frame 22, a fixed clamping platform 23, a lifting clamping platform 24, a connecting plate 25, an adjusting shaft 26, a support plate 27, a slide groove 28, a slide bar 29, a second adjusting screw 30, a connecting block 31, a transmission belt 32, and a baffle 33. Firstly: The upward lifting and adjusting mechanism and the upper laser measurement In specific application scenarios, such as Figure 1 , Figure 3 and Figure 4In the middle, there is a frame 1 and a housing 2 fixed to the outer side of the top of the frame 1. The lifting and adjusting mechanism includes a lifting frame 3 fixedly installed on the inner wall of the housing 2, a first adjusting screw 4 vertically installed inside the lifting frame 3 and a slide rod 5 symmetrically arranged on the rear side; there are two sets of upper laser measuring components 8, which are fixed on the top surface of the first turntable 7, and the first turntable 7 is rotatably installed on the inner side of the lifting plate 6; the lifting plate 6 is connected to the first adjusting screw 4 and slidably connected to the slide rod 5 through threaded transmission to realize vertical lifting and lowering; limit blocks 12 are installed at equal angles on the outer side of the first turntable 7, and limit buckles 13 are correspondingly provided at the top of the lifting plate 6 for locking and fixing after the turntable rotates; During operation, the drive motor at the top of the first adjusting screw 4 is started, which drives the lifting plate 6 to slide up and down along the slide bar 5 through threaded transmission, thereby precisely adjusting the height of the upper laser measuring component 8 to adapt to the thickness requirements of different substrates. When it is necessary to switch the detection angle, the first turntable 7 is rotated to the target position, and the limiting block 12 on its outer side will automatically lock with the limiting buckle 13 at the top of the lifting plate 6 to fix the direction of the upper laser measuring component 8. A protective cover 10 with a heat dissipation module 11 is also installed on the top of the lifting plate 6 to protect the component and actively dissipate heat.

[0020] The above technical solution achieves high-precision vertical adjustment of the lifting plate 6 through the threaded transmission of the first adjusting screw 4, allowing for quick adaptation to substrates of different thicknesses. The rotation design of the first turntable 7, along with the locking mechanism of the limit block 12 and limit buckle 13, supports angle switching of the upper laser measuring component 8. The integration of the protective cover 10 and the heat dissipation module 11 extends the component's service life. Ultimately, this achieves the goal of "facilitating the adjustment of the position and height of the upper laser measuring component 8 for accurate detection of coating thickness from above."

[0021] Secondly: the sliding adjustment mechanism and the laser measurement below. In specific application scenarios, such as Figure 1 , Figure 2 , Figure 5 , Figure 6 and Figure 7 The sliding adjustment mechanism includes a support plate 27 vertically fixed to the inner side of the top of the frame 1, with a sliding groove 28 on its top surface and a sliding strip 29 fixed to the bottom of the fixed frame 14. A second adjusting screw 30, which engages with the sliding groove 28 and is rotatably mounted on the outer side of the support plate 27, is connected to the screw via a transmission belt 32 and a connecting block 31 that is threadedly driven to both sides and the bottom edge of the fixed frame 14. Two sets of lower laser measuring components 16 are fixed to the bottom surface of the second turntable 15, corresponding one-to-one with the upper laser measuring components 8 inside the first turntable 7. The structure of the second turntable 15 is identical to that of the first turntable 7, with a limiting block 12 on its outer side and a limiting buckle 13 on the bottom surface of the fixed frame 14. During operation, the motor at the rear end of the second adjusting screw 30 is started, and the screws on both sides rotate synchronously through the transmission belt 32, driving the fixed frame 14 to slide back and forth along the slide groove 28 of the support plate 27; sliding forward exposes the second turntable 15 for sample loading, and sliding backward returns it to the detection station; when the second turntable 15 rotates, the lower laser measuring component 16 on its bottom surface will adjust its direction synchronously; when it rotates to the target position, the limit block 12 locks with the limit buckle 13 on the bottom surface of the fixed frame 14, fixing the angle of the lower laser measuring component 16. The fixed frame 14 is also equipped with a cover 10 with a heat dissipation module 11.

[0022] The above technical solution is adopted: the sliding adjustment mechanism enables the fixed frame 14 to move smoothly back and forth, which facilitates the single-piece loading of samples and allows it to return to the working position during continuous testing; the synchronous design of the second adjusting screw 30 and the transmission belt 32 ensures the stability of the sliding of the fixed frame 14; the integration of the lower laser measurement component 16 and the second turntable 15 can synchronously collect thickness data from the bottom surface of the substrate, forming a double-sided measurement with the upper laser measurement component 8.

[0023] Thirdly: Double-sided laser synchronous measurement and comparison limiting mechanism In specific application scenarios, such as Figure 1 , Figure 2 , Figure 3 , Figure 6 and Figure 8 In the middle, the upper laser measurement component 8 and the lower laser measurement component 16 form a double-sided synchronous measurement. The comparison and limiting mechanism includes two sets of limiting components. The limiting components are of two types and can be used in combination. A non-contact tension meter 17 located on the surface of the second turntable 15 is provided on the rear side of the middle of the limiting component. Limiting component A: Conveying type, including telescopic rod 18, mounting platform 19, first support frame 20, and conveying roller 21; the telescopic rod 18 is symmetrically fixed to the top surface of the second turntable 15, the top of the telescopic rod 18 is fixedly mounted on the mounting platform 19, the top surface of the mounting platform 19 is engaged with the first support frame 20, the conveying roller 21 is rotatably mounted on the inner side of the top of the first support frame 20, and the bottom side of the first support frame 20 is limited and fixed to the mounting platform 19 by bolts; Limiting component B: clamping type, including telescopic rod 18, mounting platform 19, second support frame 22, fixed clamping platform 23, lifting clamping platform 24, and adjusting shaft 26; the telescopic rod 18 is symmetrically fixed to the top surface of the second turntable 15, the top of the telescopic rod 18 is fixedly mounted on the mounting platform 19, the top surface of the mounting platform 19 is engaged with the second support frame 22, the inner bottom surface of the second support frame 22 is fixedly mounted on the fixed clamping platform 23, the upper part of the fixed clamping platform 23 is provided with a lifting clamping platform 24 slidably connected to the inner side of the second support frame 22, the end of the lifting clamping platform 24 is integrally fixed with the connecting plate 25 slidably connected to the side wall of the second support frame 22, and the outer side of the second support frame 22 is rotatably mounted with an adjusting shaft 26 corresponding to the threaded drive of the connecting plate 25; During operation, the upper and lower laser measurement components 8 / 16 synchronously emit and receive beams, respectively collecting distance data between the "upper surface of the substrate" or the "upper surface of the coating" and the "lower surface of the substrate". The coating thickness is directly calculated by the difference. The clamping limit component rotates through the adjusting shaft 26, driving the connecting plate 25 and the lifting clamping platform 24 to descend, clamping the sample between the fixed clamping platform 23 and the lifting clamping platform 24. The conveying limit component uses the conveying roller 21 to continuously convey the substrate roll. The non-contact tension meter 17 monitors the substrate tension in real time. By adjusting the lifting clamping platform 24, the tension of the standard sample is made consistent with that of the roll, avoiding coating stretching and deformation.

[0024] The above technical solution avoids the difference calculation error of single-sided measurement by using double-sided synchronous laser measurement; the comparison limit mechanism realizes the dual mode of "automatic clamping of standard sample + continuous conveying" and supports online automatic identification and comparison; the non-contact tension meter 17 can monitor the conveying tension, ensure the tension consistency between the comparison sample and the roll material, and further ensure the detection accuracy.

[0025] Fourth: Turntable rotation switching In specific application scenarios, such as Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 7 In this system, the first turntable 7 and the second turntable 15 can switch detection modes by rotating their installation, and are locked and fixed by limit blocks 12 and limit buckles 13. The first turntable 7 is rotatably installed inside the lifting plate 6, and the second turntable 15 is rotatably installed inside the fixed frame 14. Limit blocks 12 are installed at equal angles on the outer sides of the two turntables, and limit buckles 13 are provided at the top of the lifting plate 6 and the bottom of the fixed frame 14 at corresponding positions. The limit blocks 12 and limit buckles 13 can be mechanically locked or electromagnetically locked. During operation, when switching from "sample testing" to "continuous testing", the first turntable 7 and the second turntable 15 are rotated 90° manually or by installing a motor to change from "longitudinal" to "lateral". At this time, the limiting block 12 on the outside of the turntable will automatically engage and lock with the corresponding limiting buckle 13 to fix the angle of the turntable. For example, during continuous testing, the first turntable 7 is arranged laterally so that the upper laser measuring component 8 is aligned with the roll material on the conveyor roller 21, and the second turntable 15 is arranged laterally so that the lower laser measuring component 16 is aligned with the bottom surface of the roll material. During sample testing, the turntable rotates back to longitudinal, and the upper / lower components are aligned with the clamped sample.

[0026] The above technical solution achieves rapid switching between "sample testing" and "continuous testing" through the 90° rotation design of the turntable; the locking mechanism of the limit block 12 and limit buckle 13 ensures the stability of the turntable angle and avoids deviation during testing; it can cover two testing scenarios without changing tooling, greatly improving production efficiency.

[0027] Example: When using this coating thickness detection mechanism to detect the thickness of electromagnetic shielding sputtered film coating, the equipment is first adjusted for different detection conditions. When testing substrate samples, adjust the equipment as shown in the attached diagram. Figure 1 The mounting platform 19 is arranged in a front-to-back configuration above the second turntable 15. The motor connected to the rear end of the second adjusting screw 30 is started to drive the second adjusting screw 30 to rotate. The second adjusting screw 30 is connected to the connecting block 31 fixed to the bottom surface of the fixed frame 14 by a threaded transmission. When the second adjusting screw 30 rotates, it will drive the fixed frame 14 to move back and forth. There are two sets of second adjusting screws 30 on both sides of the bottom surface of the fixed frame 14, which are connected by a transmission belt 32 to ensure that the fixed frame 14 slides smoothly. The bottom surface of the fixing frame 14 is attached to the top surface of the support plate 27. The bottom surface of the fixing frame 14 is fixed with a sliding strip 29 that can engage with the sliding groove 28 opened on the top surface of the support plate 27, which can ensure the stability and smoothness of the fixing frame 14, and at the same time, it can always support the fixing frame 14 to ensure the stability of the structure. After the fixed frame 14 is slid forward, the second turntable 15, telescopic rod 18, and mounting platform 19 are exposed on the outside of the frame 1. The second support frame 22 is installed above the mounting platform 19, so that the bottom surface of the second support frame 22 and the top surface of the mounting platform 19 are correspondingly engaged and fixed by bolts. A fixed clamping platform 23 is fixed on the top surface of the second support frame 22. The end of the substrate is placed on the top surface of the fixed clamping platform 23. The adjustment shaft 26, which is rotatably installed on the side of the second support frame 22, rotates. Through the threaded transmission connection between the adjustment shaft 26 and the connecting plate 25, the adjustment shaft 26 drives the connecting plate 25 and the lifting clamping platform 24 to descend, thereby clamping the substrate through the fixed clamping platform 23 and the lifting clamping platform 24. The mounting platforms 19 on the left and right sides can clamp the substrate plate a with a deposited coating and the substrate plate b to be tested after coating deposition through the second support frame 22, respectively, so as to facilitate testing and comparison, or replace the substrate plate a with the substrate plate c with a completed coating deposition that has been tested and confirmed as a good product. During testing, the motor at the top of the first adjusting screw 4 drives the lifting plate 6 to slide on the outside of the slide bar 5 through the threaded transmission structure between the first adjusting screw 4 and the lifting plate 6, thereby adjusting the height of the lifting plate 6 and the upper laser measuring component 8. The upper laser measuring component 8 is used to detect the coating thickness of the substrate surface from above the substrate. At the same time, the lower laser measuring component 16 is installed at the bottom of the second turntable 15, which can measure the distance from the bottom surface of the substrate. This not only allows for rapid measurement of the substrate thickness, but also facilitates the comparison of various test data to determine whether the surface coating thickness of the substrate b meets the requirements. Meanwhile, protective covers 10 are installed above the lifting plate 6 and below the fixed frame 14, respectively, to protect the upper laser measuring component 8 and the lower laser measuring component 16, and the heat dissipation module 11, which is inclined at the end of the protective cover 10, can actively perform heat dissipation. In addition, when continuous testing of the processed substrate rolls is required, the fixing frame 14 is first moved outward in the manner described above. The second support frame 22 is installed on the top surface of the mounting platform 19 on one side of the top surface of the second turntable 15. The substrate board a or substrate board c is installed on this side. The first support frame 20 is installed on the top of the mounting platform 19 on the other side. The installation method of the first support frame 20 is the same as that of the second support frame 22. The conveying roller 21 is fixed on the other side of the top surface of the second turntable 15. The second turntable 15 is rotated on the top inner side of the fixing frame 14. When the second turntable 15 rotates 90°, the limiting block 12 fixed on the bottom outer side of the second turntable 15 automatically engages with the limiting buckle 13 fixed on the bottom surface of the fixing frame 14, thereby maintaining the limiting fixation of the fixing frame 14 and the second turntable 15. The limiting block 12 and the limiting buckle 13 can be mechanically locked or electromagnetically locked. Then the fixing frame 14 is reset. In the same way, the first turntable 7 is rotated on the inside of the lifting plate 6 so that the upper laser measuring component 8 corresponds with the horizontally arranged mounting platform 19. Open the baffle 33 on the side of the housing 2, and continuously convey the substrate roll through the conveyor roller 21. It is continuously detected by the upper laser measuring component 8 and the lower laser measuring component 16. At the same time, the tension of the substrate is detected by the non-contact tension meter 17 on the top surface of the second turntable 15. Adjust the substrate plate a / c fixed inside the second support frame 22 to the same tension as the roll to ensure the accuracy of the detection comparison for continuous detection.

[0028] Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention; the contents not described in detail in this specification belong to the prior art known to those skilled in the art; in addition, the directional terms such as up, down, left, right, front, and back in the text only represent their relative positions and not absolute positions.

[0029] All standard parts used in this invention can be purchased from the market, and irregular parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art, and the circuit connection adopts conventional connection methods in the prior art, which will not be described in detail here.

[0030] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An electromagnetic shielding sputtering film coating thickness detection mechanism, comprising: The frame (1) and the housing (2) fixed to the outside of the top of the frame (1); Its characteristic is that it further includes: Lifting plate (6), the lifting plate (6) can be lifted and installed in the middle of the inner side of the housing (2) through the lifting adjustment mechanism. The inner side of the lifting plate (6) is rotatably installed with a first turntable (7). The top surface of the first turntable (7) is fixed with two sets of upper laser measurement components (8). A fixed frame (14) is installed in the middle of the top surface of the frame (1) by sliding adjustment mechanism. A second turntable (15) is rotatably installed on the inner side of the fixed frame (14). Two sets of lower laser measurement components (16) corresponding to the upper laser measurement component (8) are fixed on the bottom surface of the second turntable (15). The top surface of the second turntable (15) is fixed with a comparison limiting mechanism, which includes two sets of limiting components corresponding to the upper laser measuring component (8) and the lower laser measuring component (16). A non-contact tension meter (17) located on the surface of the second turntable (15) is provided on the rear side of the middle part of the limiting component. One of the limiting components includes a telescopic rod (18) symmetrically fixed to the top surface of the second turntable (15), a mounting platform (19) fixedly installed at the top of the telescopic rod (18), and a first support frame (20) snapped onto the top surface of the mounting platform (19). A conveying roller (21) is rotatably installed on the inner side of the top of the first support frame (20). Another set of limiting components includes a telescopic rod (18) symmetrically fixed to the top surface of the second turntable (15), a mounting platform (19) fixedly installed at the top of the telescopic rod (18), and a second support frame (22) that is engaged with the top surface of the mounting platform (19). A fixed clamping platform (23) is fixedly installed on the inner bottom surface of the second support frame (22), and a lifting clamping platform (24) that is slidably connected to the inner side of the second support frame (22) is provided above the fixed clamping platform (23).

2. The electromagnetic shielding sputtering film coating thickness detection mechanism according to claim 1, characterized in that: The lifting adjustment mechanism includes a lifting frame (3) fixedly installed on the inner wall of the housing (2), a first adjusting screw (4) and a slide rod (5) vertically installed inside the lifting frame (3). The first adjusting screw (4) is rotatably installed on the front side inside the lifting frame (3). The slide rod (5) is symmetrically arranged on the rear side inside the lifting frame (3). The lifting plate (6) is threadedly connected to the outside of the first adjusting screw (4), and the rear end of the lifting plate (6) is slidably connected to the slide rod (5).

3. The electromagnetic shielding sputtering film coating thickness detection mechanism according to claim 1, characterized in that: Limiting blocks (12) are installed at equal angles on the outer side of the first turntable (7), and a limiting buckle (13) that can lock corresponding to the limiting block (12) is installed on the top of the lifting plate (6). Limiting blocks (12) and limiting buckles (13) are also installed on the bottom of the second turntable (15) and the fixing frame (14), respectively.

4. The electromagnetic shielding sputtering film coating thickness detection mechanism according to claim 1, characterized in that: A cover (10) is installed above the lifting plate (6) and below the fixing frame (14), and a heat dissipation module (11) is obliquely arranged at the end of the cover (10).

5. The electromagnetic shielding sputtering film coating thickness detection mechanism according to claim 1, characterized in that: The bottom side of the first support frame (20) is fixed to the mounting platform (19) by bolts.

6. The electromagnetic shielding sputtering film coating thickness detection mechanism according to claim 1, characterized in that: The end of the lifting platform (24) is integrally fixed with the connecting plate (25) which is slidably connected to the side wall of the second support frame (22). The outer side of the second support frame (22) is rotatably installed with an adjusting shaft (26) that is threadedly driven to the connecting plate (25).

7. The electromagnetic shielding sputtering film coating thickness detection mechanism according to claim 1, characterized in that: The sliding adjustment mechanism includes a support plate (27), which is vertically fixed on the inner side of the top of the frame (1). The top surface of the support plate (27) is provided with a sliding groove (28). The top of the support plate (27) is fitted with the bottom of the fixed frame (14), and the bottom of the fixed frame (14) is fixed with a sliding strip (29) that engages with the sliding groove (28).

8. The electromagnetic shielding sputtering film coating thickness detection mechanism according to claim 7, characterized in that: The sliding adjustment mechanism includes a second adjusting screw (30) rotatably mounted on the outside of the support plate (27). The outside of the second adjusting screw (30) is connected to the connecting block (31) fixed at the bottom edge of the fixed frame (14) via a corresponding threaded transmission. The end of the second adjusting screw (30) is connected to a transmission belt (32).

9. The electromagnetic shielding sputtering film coating thickness detection mechanism according to claim 1, characterized in that: The side of the housing (2) is provided with baffles (33) that correspond to the left and right sides of the comparison and limiting mechanism.

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