A quartz wafer cleaning apparatus

Abstract

The application relates to a quartz wafer cleaning device, belonging to the technical field of semiconductor manufacturing, which comprises a box body with an ultrasonic generator installed at the lower end and an opening at the upper end, a mounting shaft for mounting a basket and being perpendicular to the height direction of the box body is arranged in the box body, the mounting shaft drives the basket to rotate along the circumferential direction of the mounting shaft, an agitating assembly is arranged at the lower side of the inside of the box body, spray pipes which are parallel to the mounting shaft and are located at the upper side of the mounting rod are arranged at both sides of the upper end of the inside of the box body, a plurality of spray heads which are sequentially arranged along the length direction of the spray pipe are arranged at the side of the spray pipe close to the mounting rod, and when the basket is mounted on the mounting shaft, the spray heads can spray cleaning liquid on the quartz wafer. The application has the effect of reducing the adverse influence on the cleaning effect.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a quartz wafer cleaning device. Background Technology

[0002] Cleaning quartz wafers is a key step in ensuring high precision and high yield in chip manufacturing. The most common method for cleaning quartz wafers is ultrasonic cleaning, which uses alternating shock waves and cavitation generated by ultrasonic waves in the cleaning solution to physically clean contaminants, making the cleaning thorough and efficient.

[0003] During cleaning, multiple quartz crystals to be cleaned are placed in a basket, and the basket containing the quartz crystals is placed in the cleaning solution inside the cleaning tank. Ultrasonic waves are used to vibrate the cleaning solution, which facilitates the cleaning of the quartz crystals.

[0004] In related technologies, ultrasonic waves are used to drive the cleaning fluid to clean quartz wafers. However, this can easily lead to a single flow pattern of the cleaning fluid, which can easily create cleaning dead zones between the wafers and between the basket structure, thus affecting the cleaning effect. Summary of the Invention

[0005] To reduce the adverse effects on the cleaning effect, this application provides a quartz wafer cleaning device.

[0006] The quartz wafer cleaning equipment provided in this application adopts the following technical solution: A quartz wafer cleaning device includes a housing with an ultrasonic generator mounted at the lower end and an open upper end. The housing has a mounting shaft perpendicular to the height of the housing for mounting a basket. The mounting shaft drives the basket to rotate circumferentially along the mounting shaft. An agitator is located on the lower side of the housing interior. Spray pipes, parallel to the mounting shaft and located on the upper side of a mounting rod, are provided on both sides of the upper end of the housing interior. Multiple nozzles are arranged sequentially along the length of the spray pipes on the side closest to the mounting rod. When the basket is mounted on the mounting shaft, the nozzles can spray cleaning fluid onto the quartz wafer.

[0007] By adopting the above technical solution, a basket containing quartz wafers is installed on a mounting shaft, and the basket is driven to rotate circumferentially around the mounting shaft. At this time, an ultrasonic generator drives the cleaning fluid in the chamber to vibrate, while an agitator agitates the cleaning fluid in the chamber, and a spray pipe sprays the cleaning fluid through a nozzle. When the basket moves to the lower side of the mounting shaft, it enters the cleaning fluid. At this time, the agitator and ultrasonic generator drive the cleaning fluid to flow and clean the surface of the quartz wafer. When the basket rotates to the upper side of the mounting shaft, the cleaning fluid sprayed by the nozzle further rinses the surface of the quartz wafer, reducing the adverse effects on the cleaning effect.

[0008] Optionally, the agitation assembly includes agitation plates symmetrically arranged on the lower side inside the housing. Each agitation plate is fixedly connected to the same agitation rod arranged along the height direction of the housing and rotatably connected to the bottom wall of the housing on the side closest to each other. The housing is provided with a first motor that drives the agitation rod to rotate.

[0009] By adopting the above technical solution, the first motor drives the stirring rod to rotate the stirring plate, thereby stirring the cleaning liquid in the tank along the circumference of the stirring rod, which facilitates rinsing the dirt on the quartz wafer and reduces the adverse effects on the cleaning effect.

[0010] Optionally, a plurality of evenly distributed mounting rods are provided on one end of the mounting shaft in the circumferential direction, and a mounting rod corresponding to and arranged opposite to the mounting rods is provided on the other end of the mounting shaft. Each basket is installed between two oppositely arranged mounting rods, and each mounting rod is provided with a hinge assembly that is hinged to the upper end of the corresponding basket.

[0011] By adopting the above technical solution, the basket is installed between the oppositely arranged mounting rods, and the hinge assembly connects the mounting rods to the corresponding basket ends. At this time, the basket is mounted on the mounting shaft by hinge with the mounting rods, which reduces the possibility of the quartz crystal flipping and detaching from the basket when the basket moves around the mounting shaft, thus reducing the adverse effects on the cleaning effect.

[0012] Optionally, the basket is provided with a plurality of brushes that are adapted to and symmetrical with the quartz wafers and abut against the sides of the corresponding quartz wafers. The brushes are rotatably connected to the basket along the height direction of the quartz wafers, and the basket is provided with a rotating assembly that drives the brushes to rotate.

[0013] By adopting the above technical solution, the ultrasonic generator and the stirring plate agitate the flow of the cleaning fluid, and the nozzle sprays the cleaning fluid onto the quartz wafer. At this time, the rotating component drives the brush to rotate along the center of the quartz wafer, which facilitates the removal of dirt from the quartz wafer and further reduces the adverse effects on the cleaning effect.

[0014] Optionally, the rotating assembly includes a rotating rod perpendicular to the brush and driving the brush to rotate. The rotating rod is rotatably connected to the basket. Each side of the basket is rotatably connected to a worm gear corresponding to the rotating rod. A first belt is installed between the worm gear and the corresponding rotating rod. Each side of the worm gear is engaged with a worm that is rotatably connected to the basket. The basket is provided with a driving assembly that drives the worm to rotate.

[0015] By adopting the above technical solution, the drive component drives the worm gear to rotate the corresponding worm wheel. At this time, the worm wheel drives the corresponding rotating rod and brush to rotate through the first belt, which facilitates the rotation of the brush and cleans the surface of the quartz crystal, removes the dirt on the surface of the quartz crystal, and further reduces the adverse effects on the cleaning effect.

[0016] Optionally, the hinge assembly includes a hinge rod facing the corresponding end of the basket and inserted into and slidably connected to one end of the mounting rod away from the mounting axis, wherein the mounting rod is provided with a slider for driving the hinge rod to slide.

[0017] By adopting the above technical solution, when installing the basket, the drive shaft rotates and adjusts the installation rod of the basket to be installed to move towards the opening at the top of the box. At this time, the drive basket moves downward and is inserted between the corresponding installation rods. The sliding component drives the hinge rod to move towards the end of the corresponding basket until it is inserted into the upper side of the corresponding basket. When the drive shaft drives the basket to rotate circumferentially along the drive shaft, the hinge rod ensures that the quartz crystal is always inside the basket and inserted from the top, reducing the possibility of the quartz crystal flipping and falling out of the basket, and reducing the adverse effects on the cleaning effect.

[0018] Optionally, the sliding member includes a sliding plate inserted into the end of the mounting rod near the mounting shaft and slidably connected to the mounting rod. The hinge rod and the sliding plate are hinged together by a control rod that is hinged to the inner wall of the mounting rod. The end of the control rod away from the mounting shaft is equipped with a first spring whose end is fixedly connected to the side wall of the mounting rod. The end of the sliding plate near the basket is configured as an inclined surface that is inclined towards the side of the basket and towards the side of the mounting rod. When the hinge rod is fully located in the mounting rod, the sliding plate is located outside the mounting rod and the inclined surface can contact the lower side of the basket. The mounting rod is provided with an unlocking member, and the hinge rod is hinged to the end of the basket through the drive assembly.

[0019] By adopting the above technical solution, the basket moves downward and inserts between the corresponding mounting rods until the lower side of the basket contacts the inclined surface of the corresponding sliding plate. At this time, the basket continues to move downward and presses the inclined surface of the sliding plate until the sliding plate is completely inserted into the mounting rod. At this time, the control rod rotates under the drive of the sliding plate and causes the corresponding hinge rod to move towards the basket and insert into the basket. The first spring is stretched. At this time, the drive assembly makes the hinge rod hinged with the basket, reducing the possibility of quartz crystal flipping. When the basket needs to be disassembled, the unlocking component drives the hinge rod to reset, and the first spring restores its deformation, making it easy to remove the basket from the mounting rod and improving work efficiency.

[0020] Optionally, the worm gears are all fixedly connected to each other. The drive assembly includes a rotating ring that corresponds to and is inserted into and rotatably connected to the end of the basket. The hinge rod has a square cross-section and can be inserted into the axis of the rotating ring. One of the worm gears at the end is fixedly connected to a first gear near the adjacent mounting rod. The first gear meshes with a second gear on the side near the rotating ring, and a second belt is installed between the second gear and the rotating ring.

[0021] By adopting the above technical solution, the hinge rod is inserted into the rotating ring at the end of the basket. When the mounting shaft drives the basket to move circumferentially along the mounting shaft, the rotating ring rotates relative to the end of the basket and drives the first gear, the second gear and the worm to rotate through the second belt. At this time, the worm wheel meshing with the worm drives the rotating rod and the brush to rotate through the first belt, which facilitates the cleaning of dirt on the surface of the quartz crystal and reduces the adverse effects on the cleaning effect.

[0022] Optionally, the unlocking component includes a hinge block hinged to the side of the sliding plate near the control rod, the hinge block being slidably connected to the side wall of the control rod, and a hydraulic cylinder slidably connected to the lower side of the sliding plate to drive the sliding plate to move along the length direction of the mounting rod.

[0023] By adopting the above technical solution, when the hinge rod is inserted into the end of the basket, the hydraulic cylinder drives the sliding plate to move closer to the hinge rod, thereby further driving the hinge rod to insert into the end of the basket. When the basket needs to be disassembled, the hydraulic cylinder drives the sliding plate to move away from the hinge rod until the height is lower than the bottom of the basket. At this time, the first spring restores its deformation and drives the control rod to reset the hinge rod and disengage from the end of the basket. At this time, the sliding plate moves to the outside of the mounting rod, improving work efficiency.

[0024] Optionally, each of the brushes has a drive rod inserted and slidably connected to one end near the center of the quartz crystal. The drive rod has a square cross-section, and the end of the drive rod away from the corresponding brush is inserted into the rotating rod. The end of the rotating rod near the brush has a first insertion groove with a circular cross-section. The rotating rod also has a second insertion groove that communicates with the first insertion groove and is located on the side of the first insertion groove away from the brush. The second insertion groove is adapted to the drive rod, and a second spring with its end abutting against the drive rod is provided in the second insertion groove.

[0025] By adopting the above technical solution, when the quartz crystal is not inserted into the basket, the end of the drive rod is inserted into the first insertion slot, and the rotating rod rotates relative to the drive rod. At this time, the corresponding brush does not rotate. When the quartz crystal is inserted into the basket, the drive rod moves towards the corresponding rotating rod until the end is inserted into the second insertion slot. At this time, the second spring is compressed. When the rotating rod rotates, the drive rod and the brush rotate, which facilitates cleaning the surface of the quartz crystal inserted into the basket and reduces the adverse effects on the cleaning effect.

[0026] In summary, this application includes at least one of the following beneficial technical effects: 1. When the basket moves to the lower side of the mounting shaft, it enters the cleaning fluid. At this time, the stirring component and ultrasonic generator drive the cleaning fluid to flow and clean the surface of the quartz crystal. When the basket rotates to the upper side of the mounting shaft, the cleaning fluid sprayed by the nozzle further rinses the surface of the quartz crystal, reducing the adverse effects on the cleaning effect. 2. The ultrasonic generator and stirring plate agitate the cleaning fluid, and the nozzle sprays the cleaning fluid onto the quartz wafer. At this time, the rotating component drives the brush to rotate along the center of the quartz wafer, which facilitates the removal of dirt from the quartz wafer. 3. The basket moves downward and inserts between the corresponding mounting rods until the lower side of the basket contacts the inclined surface of the corresponding sliding plate. At this time, the basket continues to move downward and presses the inclined surface of the sliding plate until the sliding plate is fully inserted into the mounting rod. At this time, the control rod rotates under the drive of the sliding plate, causing the corresponding hinge rod to move towards the basket and insert into the basket. The first spring is stretched. At this time, the drive assembly makes the hinge rod hinged with the basket, reducing the possibility of quartz crystal flipping. When the basket needs to be disassembled, the unlocking component drives the hinge rod to reset, and the first spring returns to its deformation, making it easy to remove the basket from the mounting rod and improving work efficiency. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the overall structure of the quartz wafer cleaning equipment in the embodiments of this application.

[0028] Figure 2 This is a structural schematic diagram illustrating the positional relationship between the mounting shaft and the basket in the embodiments of this application.

[0029] Figure 3 This is a structural schematic diagram illustrating the positional relationship between the rotating component and the basket in the embodiments of this application.

[0030] Figure 4 This is a structural schematic diagram illustrating the positional relationship between the rotating component and the hinge component in an embodiment of this application.

[0031] Figure 5 yes Figure 3 Enlarged view of the structure at point A in the middle.

[0032] Figure 6 yes Figure 4 Enlarged view of the structure at point B.

[0033] Figure 7 yes Figure 5 Enlarged view of the structure at point C.

[0034] Explanation of reference numerals in the attached drawings: 1. Box body; 11. Mounting shaft; 111. Second motor; 12. Basket; 121. Hinge groove; 13. Spray pipe; 131. Spray head; 2. Agitator assembly; 21. Agitator rod; 22. Agitator plate; 23. First motor; 3. Mounting rod; 31. Cavity; 4. Hinge assembly; 41. Hinge rod; 42. Sliding component; 421. Sliding plate; 422. Control rod; 4221. Waist-shaped hole; 423. First spring; 43. Unlocking component; 431. Hydraulic cylinder; 432. Hinge block; 5. Brush; 6. Rotating assembly; 61. Rotating rod; 611. First insertion slot; 612. Second insertion slot; 62. Worm gear; 621. First bevel gear; 622. Second bevel gear; 63. First belt; 64. Worm; 7. Drive assembly; 71. Rotating ring; 72. First gear; 73. Second gear; 74. Second belt; 8. Drive rod; 9. Second spring. Detailed Implementation

[0035] The present application will be further described in detail below with reference to the accompanying drawings.

[0036] This application discloses a quartz wafer cleaning device. (Refer to...) Figure 1 and Figure 2 A quartz wafer cleaning device includes a vertical box 1 with an open top. An ultrasonic generator (not shown) is installed on the lower side inside the box 1, and the box 1 contains cleaning fluid. A horizontal mounting shaft 11 is inserted into and rotatably connected to the middle of the box 1, with the axis of rotation of the mounting shaft 11 parallel to the surface of the cleaning fluid. Multiple evenly distributed baskets 12 parallel to the length direction of the mounting shaft 11 are mounted around the mounting shaft 11, and each basket 12 has a through hole (not shown) on its lower side. The baskets 12 are hinged to the mounting shaft 11, and when the mounting shaft 11 drives the baskets 12 to move around the mounting shaft 11, the baskets 12 always face upwards. A second motor 111 that drives the mounting shaft 11 to rotate along its own axis of rotation is fixedly connected to the same side of the outside of the box 1.

[0037] Reference Figure 1 and Figure 2 Inside the housing 1, two horizontal spray pipes 13 are symmetrically arranged on both sides of the mounting shaft 11 and parallel to the length direction of the mounting shaft 11. On the side of the spray pipes 13 that are close to each other, multiple nozzles 131 are installed facing the mounting shaft 11 and evenly distributed along the length direction of the spray pipes 13. When the mounting shaft 11 drives the basket 12 to move to the upper side of the mounting shaft 11, the cleaning liquid sprayed by the nozzles 131 can move to the surface of the quartz wafer.

[0038] Reference Figure 2Inside the lower side of the housing 1, there is an agitation assembly 2 that drives the flow of cleaning fluid. The agitation assembly 2 includes a vertical agitation rod 21 inserted into the center of the lower side of the housing 1. Horizontal agitation plates 22 are fixedly connected to both sides of the upper end of the agitation rod 21. The lower end of the agitation rod 21 is inserted into the lower side wall of the housing 1, and a first motor 23 that drives the agitation rod 21 to rotate is installed in the lower side wall of the housing 1.

[0039] The basket 12 containing the quartz crystal is mounted on the mounting shaft 11, and the second motor 111 drives the mounting shaft 11 to rotate the basket 12 around the mounting shaft 11. At this time, the ultrasonic generator drives the cleaning fluid in the box 1 to vibrate, and the first motor 23 drives the stirring plate 22 to stir the cleaning fluid in the box 1 through the stirring rod 21. The spray pipe 13 sprays the cleaning fluid through the nozzle 131.

[0040] When the basket 12 moves to the lower side of the mounting shaft 11, it enters the cleaning solution. At this time, the stirring plate 22 rotates around the stirring rod 21 and stirs the cleaning solution in the box 1. The ultrasonic generator drives the cleaning solution to flow and clean the surface of the quartz crystal. When the basket 12 rotates to the upper side of the mounting shaft 11, the cleaning solution sprayed by the nozzle 131 further rinses the surface of the quartz crystal until the cleaning is completed.

[0041] Reference Figure 2 , Figure 3 and Figure 4 Multiple evenly distributed mounting rods 3, each corresponding to a basket 12, are fixedly connected to one end of the mounting shaft 11 in the circumferential direction. In this embodiment, four rods are provided. Mounting rods 3, each corresponding to a mounting rod 3 and arranged opposite to it, are fixedly connected to the other end of the mounting shaft 11 in the circumferential direction. The opposite mounting rods 3 are provided with hinge components 4 that are hinged to the end of the corresponding basket 12 on the side away from the end of the mounting shaft 11 and close to each other.

[0042] Reference Figure 3 and Figure 4 The hinge assembly 4 includes a horizontal hinge rod 41 inserted into the end of the mounting rod 3 away from the mounting shaft 11 and facing the end of the corresponding basket 12. Each mounting rod 3 has a cavity 31. The end of the hinge rod 41 away from the basket 12 is inserted into the cavity 31 and slidably connected to the mounting rod 3. The cavity 31 is provided with a sliding member 42 that drives the hinge rod 41 to slide and insert into the end of the corresponding basket 12.

[0043] The sliding member 42 includes a horizontal sliding plate 421, which is adapted to the mounting rod 3 and is located away from the basket 12. One end of the sliding plate 421 is inserted into the cavity 31 and is slidably connected to the mounting rod 3. The same control rod 422 is hinged between the end of the sliding plate 421 inserted into the cavity 31 and the end of the hinge rod 41 inserted into the cavity 31. The control rod 422 has an oblong hole 4221 and is hinged to the inner wall of the mounting rod 3 through the oblong hole 4221.

[0044] The end of the sliding plate 421 near the basket 12 is configured as an inclined surface that slopes towards the basket 12 and towards the corresponding mounting rod 3, allowing the basket 12 to contact the inclined surface on the sliding plate 421 when mounted on the mounting rod 3. A first spring 423 is installed between the control rod 422 near the hinge rod 41 and away from the hinge rod 41 and the inner wall of the mounting rod 3, connecting the two. When the first spring 423 is at its original length, the hinge rod 41 is completely located in the mounting rod 3, the control rod 422 is inclined, and the end of the corresponding sliding plate 421 near the basket 12 is located outside the mounting rod 3. Each mounting rod 3 is provided with an unlocking element 43 that drives the hinge rod 41 to fully enter the mounting rod 3.

[0045] The unlocking component 43 includes a hydraulic cylinder 431 that corresponds one-to-one with the sliding plate 421, is located in the cavity 31, and is fixedly connected to the inner wall of the mounting rod 3. The extension rod of the hydraulic cylinder 431 is upward, and the sliding plate 421 is located above the hydraulic cylinder 431 and is slidably connected to the hydraulic cylinder 431 in the horizontal direction. A hinge block 432 is hinged to one end of the sliding plate 421 near the corresponding control rod 422. The hinge block 432 is inserted into the corresponding control rod 422 and is slidably connected to the control rod 422 along the length of the control rod 422.

[0046] When installing the basket 12, drive the mounting shaft 11 to rotate and adjust the mounting rod 3 of the basket 12 to move towards the opening at the upper end of the housing 1. At this time, drive the basket 12 to move downward and insert it between the corresponding mounting rods 3 until the lower side of the basket 12 contacts the inclined surface on the corresponding sliding plate 421. At this time, the basket 12 continues to move downward and presses the inclined surface on the sliding plate 421 until the sliding plate 421 is completely inserted into the mounting rod 3. At this time, the control rod 422 rotates under the drive of the sliding plate 421 and causes the corresponding hinge rod 41 to move towards the basket 12 and be inserted into the basket 12. The hydraulic cylinder 431 drives the sliding plate 421 to drive the hinge block 432 to move towards the hinge rod 41, further driving the hinge rod 41 to be inserted into the end of the basket 12. The first spring 423 is stretched. At this time, the end of the basket 12 can rotate relative to the mounting rod 3 along the hinge rod 41, reducing the possibility of the quartz crystal flipping and detaching from the basket 12 when the basket 12 moves around the mounting shaft 11.

[0047] When it is necessary to disassemble the basket 12, the hydraulic cylinder 431 drives the sliding plate 421 to move the hinge block 432 along the length of the control rod 422 away from the hinge rod 41 until the height is lower than the bottom of the basket 12. At this time, the first spring 423 restores its deformation and drives the control rod 422 to reset the hinge rod 41 and disengage from the end of the basket 12. At this time, the sliding plate 421 moves to the outside of the mounting rod 3, which facilitates the disassembly of the basket 12.

[0048] Reference Figure 3 , Figure 4 and Figure 5 Two symmetrical vertical brushes 5 are provided on both sides of the quartz wafer and are in contact with the corresponding sidewalls of the quartz wafer. The basket 12 is provided with a rotating assembly 6 that drives the brushes 5 to rotate along a vertical plane perpendicular to the length of the basket 12 and cleans the surface of the quartz wafer. The rotating assembly 6 includes a horizontal rotating rod 61 installed on the side of the brushes 5 away from the corresponding quartz wafer and coinciding with the rotation axis of the brushes 5. The rotating rod 61 is rotatably connected to the basket 12.

[0049] Each side of the basket 12 is rotatably connected to a vertical worm gear 62 corresponding to a rotating rod 61. A first bevel gear 621 is fixedly connected to the lower side of the worm gear 62, and a second bevel gear 622 rotatably connected to the basket 12 is meshed on one side of the first bevel gear 621. A first belt 63 is installed between the second bevel gear 622 and the corresponding rotating rod 61 to connect the two. A horizontal worm 64, parallel to the length direction of the basket 12 and rotatably connected to the basket 12, is meshed on the side of the worm gear 62 away from the rotating rod 61. A drive assembly 7 is provided on the basket 12 to drive the worm 64 to rotate. The hinge rod 41 is vertical and has a square cross-section along the width direction of the basket 12. When the hinge rod 41 is inserted into the corresponding end of the basket 12, the hinge rod 41 is hinged to the end of the basket 12 through the drive assembly 7.

[0050] Reference Figure 4 and Figure 6 The drive assembly 7 includes a rotating ring 71 rotatably connected to the upper side of the end of the basket 12. The end of the basket 12 has a hinge groove 121 with a cross-sectional area larger than that of the hinge rod 41. The end of the hinge rod 41 passes through the hinge groove 121 and is inserted into the axis of the rotating ring 71. (Refer to...) Figure 3 , Figure 4 and Figure 6 On the same basket 12, one of the worm gears 64 located at the end is fixedly connected to a vertical first gear 72. The side of the first gear 72 near the rotating ring 71 is engaged with a second gear 73 that is rotatably connected to the outer wall of the basket 12 and has a diameter larger than the first gear 72. A second belt 74 connecting the second gear 73 and the rotating ring 71 is installed between the two.

[0051] The ultrasonic generator and the stirring plate 22 agitate the cleaning fluid, and the nozzle 131 sprays the cleaning fluid onto the quartz wafer. The hinge rod 41 is inserted into the rotating ring 71 at the end of the basket 12. When the mounting shaft 11 drives the basket 12 to move circumferentially along the mounting shaft 11, the rotating ring 71 rotates relative to the end of the basket 12 and drives the first gear 72, the second gear 73 and the worm 64 to rotate through the second belt 74. At this time, the worm wheel 62 meshing with the worm 64 drives the rotating rod 61 and the brush 5 to rotate through the first belt 63, the second bevel gear 622 and the first bevel gear 621 to remove dirt from the surface of the quartz wafer.

[0052] Reference Figure 4 and Figure 7 A drive rod 8, parallel to the rotating rod 61, is inserted and slidably connected at the rotation axis of the brush 5. The vertical cross-section of the drive rod 8 is square. A first circular insertion groove 611, with a vertical cross-sectional area larger than that of the drive rod 8, is formed at the end of the rotating rod 61 closest to the corresponding brush 5. The end of the drive rod 8 furthest from the corresponding brush 5 is inserted into the first insertion groove 611. A second insertion groove 612, located on the side of the first insertion groove 611 furthest from the corresponding brush 5 and communicating with the first insertion groove 611, is also formed in the rotating rod 61. The vertical cross-section of the second insertion groove 612 is square, adapted to the drive rod 8. Each second insertion groove 612 contains a second spring 9 facing the drive rod 8 and abutting against the end of the drive rod 8. The second spring 9 is fixedly connected to the inner wall of the rotating rod 61. The end of the drive rod 8 away from the rotating rod 61 is set as an inclined plane that is inclined towards the side closer to the brush 5 and towards the rotating rod 61. When the second spring 9 is at its original length, the end of the drive rod 8 is located in the first insertion groove 611.

[0053] When the quartz crystal is not inserted into the basket 12, the end of the drive rod 8 is located in the first insertion slot 611, and the rotating rod 61 rotates relative to the drive rod 8. At this time, the corresponding brush 5 does not rotate. When the quartz crystal is inserted into the basket 12, the inclined surface on the drive rod 8 is pressed, causing the drive rod 8 to move towards the corresponding rotating rod 61 until the end is inserted into the second insertion slot 612. At this time, the second spring 9 is compressed. When the rotating rod 61 rotates, the drive rod 8 and the brush 5 rotate, which facilitates cleaning the surface of the quartz crystal inserted into the basket 12.

[0054] The implementation principle of a quartz wafer cleaning device according to an embodiment of this application is as follows: When the basket 12 moves to the lower side of the mounting shaft 11, it enters the cleaning solution. At this time, the stirring plate 22 rotates around the stirring rod 21 and stirs the cleaning solution in the box 1. The ultrasonic generator drives the cleaning solution to flow and clean the surface of the quartz wafer. When the basket 12 rotates to the upper side of the mounting shaft 11, the cleaning solution sprayed by the nozzle 131 further rinses the surface of the quartz wafer until the cleaning is completed.

[0055] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A quartz wafer cleaning device, characterized in that: The enclosure includes a box (1) with an ultrasonic generator installed at the lower end and an opening at the upper end. The box (1) has an installation shaft (11) for mounting a basket (12) and perpendicular to the height direction of the box (1). The installation shaft (11) drives the basket (12) to rotate circumferentially along the installation shaft (11). The lower side of the inside of the box (1) is provided with an agitator (2). Both sides of the upper end of the inside of the box (1) are provided with spray pipes (13) that are parallel to the installation shaft (11) and located on the upper side of the installation rod (3). The side of the spray pipe (13) near the installation rod (3) is provided with multiple nozzles (131) arranged sequentially along the length direction of the spray pipe (13). When the basket (12) is mounted on the installation shaft (11), the nozzles (131) can spray cleaning fluid onto the quartz wafer.

2. The quartz wafer cleaning equipment according to claim 1, characterized in that: The stirring assembly (2) includes stirring plates (22) symmetrically arranged on the lower side inside the box (1). The stirring plates (22) are fixedly connected to the same stirring rod (21) arranged along the height direction of the box (1) and rotatably connected to the bottom wall of the box (1) on the side that is close to each other. The box (1) is provided with a first motor (23) that drives the stirring rod (21) to rotate.

3. The quartz wafer cleaning equipment according to claim 2, characterized in that: The mounting shaft (11) has a plurality of evenly distributed mounting rods (3) on one end of its circumference. The other end of the mounting shaft (11) has mounting rods (3) that correspond one-to-one with the mounting rods (3) and are arranged opposite to each other. The baskets (12) are all installed between two oppositely arranged mounting rods (3). Each mounting rod (3) is provided with a hinge assembly (4) that is hinged to the upper end of the corresponding basket (12).

4. The quartz wafer cleaning equipment according to claim 3, characterized in that: The basket (12) is provided with a plurality of brushes (5) that are adapted to and symmetrical to the quartz wafers and abut against the sides of the corresponding quartz wafers. The brushes (5) are rotatably connected to the basket (12) along the height direction of the quartz wafers. The basket (12) is provided with a rotating assembly (6) that drives the brushes (5) to rotate.

5. The quartz wafer cleaning equipment according to claim 4, characterized in that: The rotating assembly (6) includes a rotating rod (61) perpendicular to the brush (5) and driving the brush (5) to rotate. The rotating rod (61) is rotatably connected to the basket (12). Each side of the basket (12) is rotatably connected to a worm gear (62) corresponding to the rotating rod (61). A first belt (63) is installed between the worm gear (62) and the corresponding rotating rod (61). Each side of the worm gear (62) is meshed with a worm (64) rotatably connected to the basket (12). The basket (12) is provided with a driving assembly (7) for driving the worm (64) to rotate.

6. The quartz wafer cleaning equipment according to claim 5, characterized in that: The hinge assembly (4) includes a hinge rod (41) facing the corresponding end of the basket (12) and inserted into and slidably connected to one end of the mounting rod (3) away from the mounting shaft (11), and the mounting rod (3) is provided with a slider (42) for driving the hinge rod (41) to slide.

7. The quartz wafer cleaning equipment according to claim 6, characterized in that: The sliding member (42) includes a sliding plate (421) inserted into one end of the mounting rod (3) near the mounting shaft (11) and slidably connected to the mounting rod (3). A control rod (422) hinged to the sliding plate (421) and hinged to the inner wall of the mounting rod (3) is also present. A first spring (423) with its end fixedly connected to the side wall of the mounting rod (3) is mounted on one end of the control rod (422) away from the mounting shaft (11). The sliding plate (421)... 21) One end near the basket (12) is provided with an inclined surface that is inclined towards the side near the basket (12) and towards the side near the mounting rod (3). When the hinge rod (41) is completely located in the mounting rod (3), the sliding plate (421) is located outside the mounting rod (3) and the inclined surface can contact the lower side of the basket (12). The mounting rod (3) is provided with an unlocking member (43), and the hinge rod (41) is hinged to the end of the basket (12) through the drive assembly (7).

8. A quartz wafer cleaning device according to claim 7, characterized in that: The worm gears (64) are all fixedly connected to each other. The drive assembly (7) includes a rotating ring (71) that corresponds to and is inserted into and rotatably connected to the end of the basket (12). The hinge rod (41) has a square cross section and can be inserted into the axis of the rotating ring (71). One of the worm gears (64) at the end is fixedly connected to a first gear (72) near the adjacent mounting rod (3). The first gear (72) is meshed with a second gear (73) on the side of the rotating ring (71) near the first gear (72). A second belt (74) is installed between the second gear (73) and the rotating ring (71).

9. A quartz wafer cleaning device according to claim 8, characterized in that: The unlocking component (43) includes a hinge block (432) hinged to the side of the sliding plate (421) near the control rod (422). The hinge block (432) is slidably connected to the side wall of the control rod (422), and the lower side of the sliding plate (421) is slidably connected to a hydraulic cylinder (431) that drives the sliding plate (421) to move along the length direction of the mounting rod (3).

10. A quartz wafer cleaning device according to claim 9, characterized in that: Each brush (5) has a drive rod (8) inserted and slidably connected to one end near the center of the quartz crystal. The drive rod (8) has a square cross-section and the end of the drive rod (8) away from the corresponding brush (5) is inserted into the rotating rod (61). The end of the rotating rod (61) near the brush (5) has a first insertion groove (611) with a circular cross-section. The rotating rod (61) also has a second insertion groove (612) that communicates with the first insertion groove (611) and is located on the side of the first insertion groove (611) away from the brush (5). The second insertion groove (612) is adapted to the drive rod (8) and has a second spring (9) whose end abuts against the drive rod (8).

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