molecular pump
By employing a detection unit consisting of a sensor head and a sensor base in a molecular pump, and combining pressure detection with rotor temperature calculation, the problem of accurately detecting rotor temperature in existing technologies is solved, achieving low-cost and high-precision temperature calculation.
CN122161998APending Publication Date: 2026-06-05OSAKA VACUUM
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- OSAKA VACUUM
- Filing Date
- 2024-11-01
- Publication Date
- 2026-06-05
Smart Images
Figure CN122161998A_ABST
Abstract
A molecular pump (1) has a rotary drive mechanism (60), a rotor (50), a stator, a detection unit (70), a pressure detection portion, and a calculation portion. The detection unit (70) includes a sensor head (71) including a first main surface (71a) opposed to a surface of the rotor (50) and a second main surface (71b) on an opposite side thereof and provided with a first temperature sensor (74), a sensor base (72) including a third main surface (72a) opposed to the second main surface (71b) and provided with a second temperature sensor (75), and a linking portion (73). The detection unit (70) is configured so that a radiation angle coefficient of the surface of the rotor (50) as viewed from the first main surface (71a) is substantially 1 and a radiation angle coefficient of the third main surface (72a) as viewed from the second main surface (71b) is substantially 1. The calculation portion calculates an estimated value of a temperature of the rotor (50) based on detection information of the first temperature sensor (74) and the second temperature sensor (75) and the pressure detection portion.
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