Heating lamp arrangement, heating jacket set and epitaxy apparatus

Abstract

The utility model provides a kind of heating lamp device, heating sleeve group and epitaxial equipment, heating lamp device includes heating lamp subassembly, fixed frame;Heating lamp subassembly is equipped with first locking component, first locking component includes at least one first locking part, fixed frame is equipped with second locking component, and second locking component includes at least one second locking part.The utility model can realize the adjustment of multiple radiation angles of heating lamp subassembly in certain angle range, and plug-in locking can provide better repeat positioning accuracy.The mode of plug-in locking can avoid the problems of loosening and uncontrolled change of radiation angle, and further ensure that heating lamp subassembly has sufficient stability.After heating lamp subassembly is rotated to corresponding radiation angle, the elastic force of elastic member makes first locking part and second locking part automatically realize plug-in cooperation, and operation is simple and convenient.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and more specifically, to a heating lamp device, a heating sleeve, and an epitaxial device. Background Technology

[0002] In the semiconductor field, the primary function of epitaxial equipment is to form very thin films on wafers. Epitaxial equipment typically includes a process chamber, a tray within the process chamber, and support rods extending partially into the process chamber. The tray holds the wafer to be deposited; the support rods are usually located at the center below the tray, supporting and rotating the tray, which in turn supports and rotates the wafer. Epitaxial equipment also typically includes an upper heating structure above the process chamber and a lower heating structure below the process chamber. The upper and lower heating structures radiate heat into the process chamber, which passes through the chamber walls and enters the interior of the process chamber to heat the wafer. Because wafer support and rotation require the support rods, the lower heating structure below the process chamber needs to accommodate the support rods. This results in insufficient heating of the central wafer region (corresponding to the connection between the support rods and the tray), leading to lower temperatures in the central wafer region. To compensate for this deficiency, the relevant technology arranges multiple heating lamp components around the support rod on the lower heating structure. The light from these heating lamp components radiates obliquely to the central area at a certain angle, thereby achieving the function of supplementary heating.

[0003] In some existing technologies, an angle adjustment bracket is used. This bracket has an arc-shaped slot, through which a bolt passes and connects to the heating lamp assembly. The bolt can move along the slot, causing the heating lamp assembly to rotate. However, in existing technologies, the heating lamp assembly is not stable enough after angle adjustment. It may loosen due to gravity (such as the weight of the heating lamp assembly itself and the weight of other accessories on the heating lamp assembly) and bolt loosening, causing the angle of the heating lamp to change uncontrollably, resulting in a decrease in the supplementary heating effect. In addition, in existing technologies, the heating lamp assembly needs to be locked by tightening bolts after angle adjustment. In increasingly compact equipment, this operation is becoming more difficult, time-consuming, and labor-intensive, resulting in inconvenience. Utility Model Content

[0004] The main objective of this utility model is to provide a heating lamp device, a heating assembly, and an extension device to solve or improve at least one of the technical problems in the related art, such as the heating lamp assembly not being stable enough after the angle adjustment is completed, or the operation of locking the heating lamp assembly not being convenient enough.

[0005] To achieve the above objectives, this utility model provides a heating lamp device, including a heating lamp assembly and a fixing frame;

[0006] The heating lamp assembly is provided with a first locking component, the first locking component including at least one first locking part; the fixing frame is provided with a second locking component, the second locking component including at least one second locking part.

[0007] In one first locking assembly, a plurality of first locking portions correspond to different radiation angle settings of the heating lamp assembly; and / or, in one second locking assembly, a plurality of second locking portions correspond to different radiation angle settings of the heating lamp assembly;

[0008] An elastic element is provided between the first locking part and the heating lamp assembly; or, an elastic element is provided between the second locking part and the fixing frame;

[0009] When the first locking part and the second locking part correspond to each other, the elastic element drives the first locking part and the second locking part to engage with each other.

[0010] Further, the first locking part is a plunger, the second locking part is a socket, the plunger is telescopically connected to the heating lamp assembly, and the elastic element is disposed between the plunger and the heating lamp assembly; or, the first locking part is a socket, the second locking part is a plunger, the plunger is telescopically connected to the fixing frame, and the elastic element is disposed between the plunger and the fixing frame.

[0011] Furthermore, the inner wall of the socket is spherical, and the plunger has a spherical end for insertion and mating with the socket.

[0012] Furthermore, the heating lamp assembly includes a lamp body and a reflector, wherein the lamp body passes through the reflector and is connected to the reflector.

[0013] Furthermore, the fixing frame includes a fixing cylinder with a cylindrical inner wall and the reflector with a spherical outer wall, the spherical outer wall and the cylindrical inner wall being rotatably connected.

[0014] Furthermore, the heating lamp assembly also includes a support frame and a lamp holder, with the lamp body mounted on the lamp holder. One end of the support frame is connected to the reflector, and the other end is connected to the lamp holder.

[0015] Furthermore, the first locking component is disposed on the support frame.

[0016] Furthermore, the fixing frame includes a fixing cylinder and an adjusting plate. The adjusting plate is connected to the fixing cylinder and has an arc-shaped guide groove. The heating lamp assembly has a guide member, which is slidably connected to the arc-shaped guide groove.

[0017] Furthermore, the guide is a stepped screw, which has a head, a rod, and a connecting part in sequence along its length. The connecting part is detachably connected to the second connecting hole provided on the heating lamp assembly. The rod is slidably connected to the arc-shaped guide groove. The head is located on the side of the adjusting plate away from the heating lamp assembly.

[0018] Furthermore, the heating lamp assembly is provided with a plurality of first locking components corresponding to different rotation radii of the heating lamp assembly; and / or, the fixing frame is provided with a plurality of second locking components corresponding to different rotation radii of the heating lamp assembly.

[0019] The heating lamp device of this invention includes a first locking component on the heating lamp assembly and a second locking component on the fixing frame. Multiple first locking parts in the first locking component correspond to different radiation angles, and / or multiple second locking parts in the second locking component correspond to different radiation angles. When the radiation angle of the heating lamp assembly needs to be adjusted, the connection between the first and second locking parts is released. The heating lamp assembly is pushed, and after the radiation angle is adjusted, the first and second locking parts corresponding to the radiation angle are engaged. This invention enables the adjustment of multiple radiation angles of the heating lamp assembly within a certain angle range. The engagement locking provides good repeatability and positioning accuracy, which helps ensure the uniformity of radiation energy throughout the epitaxial process, thereby achieving more precise epitaxial temperature control. Furthermore, the engagement locking method avoids the problem of the heating lamp assembly becoming loose or the radiation angle changing uncontrollably after the angle is adjusted, thus ensuring sufficient stability of the heating lamp assembly and facilitating better supplementary heating. In addition, after the heating lamp assembly of this solution is rotated to the corresponding radiation angle, the elastic force of the elastic element causes the first locking part and the second locking part to automatically engage, making the operation simple and convenient.

[0020] This utility model also provides a heating assembly, including the aforementioned heating lamp device, with multiple heating lamp devices arranged to form a support rod through cavity.

[0021] The heating sleeve in this utility model has all the beneficial effects of the heating lamp device described above, which will not be repeated here.

[0022] This utility model also provides an extension device, including a process chamber, an upper heating structure located above the process chamber, a lower heating structure located below the process chamber, a tray located inside the process chamber, a support shaft extending from inside the process chamber to outside the process chamber, and a heating sleeve disclosed in this patent; the support shaft is used to support and drive the tray to rotate, and the support shaft extends through the support rod through the cavity.

[0023] The extension device in this utility model has all the beneficial effects of the heating sleeve mentioned above, which will not be repeated here. Attached Figure Description

[0024] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an undue limitation of the present invention. In the drawings:

[0025] Figure 1 This is a schematic diagram of the upper heating structure and the lower heating structure of an epitaxial device in the prior art;

[0026] Figure 2 This is a schematic diagram of the structure of the epitaxial device provided in an embodiment of the present utility model;

[0027] Figure 3 This is a schematic diagram of the lower heating structure and heating sleeve provided in an embodiment of the present utility model;

[0028] Figure 4 This is a schematic diagram of the structure of the heating lamp device provided in an embodiment of the present utility model;

[0029] Figure 5 One of the cross-sectional schematic diagrams of the heating lamp device provided in the embodiment of this utility model;

[0030] Figure 6 A second cross-sectional schematic diagram of the heating lamp device provided in this embodiment of the utility model;

[0031] Figure 7 This is a schematic diagram of the structure of the adjustment plate near the heating lamp assembly provided in an embodiment of the present invention.

[0032] The above figures include the following reference numerals:

[0033] 10. Epitaxial equipment; 100. Heating unit; 101. Upper heating structure; 102. Lower heating structure; 102A. Short linear lamp; 103. Tray; 104. Support rod; 105. Process chamber; 200. Support rod passage cavity;

[0034] 1000. Heating lamp device;

[0035] 1. Heating lamp assembly; 11. Lamp body; 12. Reflector; 13. Support frame; 131. First connecting hole; 132. Guide component; 1321. Head; 1322. Rod; 1323. Connecting part; 133. Second connecting hole; 14. Lamp holder; 2. Fixing frame; 21. Fixing cylinder; 22. Adjusting plate; 221. Arc-shaped guide groove; 23. Ear-shaped structure;

[0036] 01. First locking component; 011. First locking part; 02. Second locking component; 021. Second locking part; 03. Elastic element; 04. Seat. Detailed Implementation

[0037] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present utility model or its application or use. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0038] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0039] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0040] Combination Figure 1As shown in the figure, an embodiment of the upper heating structure 101 and the lower heating structure 102 of the epitaxial device 10 in the prior art is illustrated. Both the upper heating structure 101 and the lower heating structure 102 are composed of a plurality of linear lamps arranged side by side, and the linear lamps in the upper heating structure 101 and the linear lamps in the lower heating structure 102 are arranged perpendicular to each other.

[0041] Combination Figure 2 and Figure 3 The illustration shows an embodiment of the heating lamp device 1000 of this invention applied to a semiconductor device. More specifically, in the illustrated embodiment, the aforementioned semiconductor device is an epitaxial device 10. The upper end of the support rod 104 extends into the process chamber 105 to support the tray 103, which supports the wafer and rotates it via the support rod 104.

[0042] Figure 1 The existing lower heating structure 102 uses multiple linear lights, some of which leave space for the installation of the support rod 104 near the center of the tray 103 (this can be understood as the linear light including two short linear lights 102A spaced apart on the same straight line, the gap between the short linear lights 102A is used to allow the support rod 104 to pass through), which results in a low temperature area at the center of the tray 103.

[0043] In another prior art, the lower heating structure 102 all uses non-short linear lamps, and the linear lamps of the lower heating structure 102 are arranged at equal intervals (not shown in the figure, but can be referenced). Figure 1 (Simply replace the short linear lamp 102A in the diagram with the same type as the other linear lamps). The lower heating structure 102 includes a lower reflective structure (not shown in the diagram). A space for the support rod 104 is provided at the center of the lower reflective structure. This prior art linear lamp differs from others in its spacing design. Figure 1 As shown, the support rod 104 can be directly avoided without using the short linear lamp 102A. However, in this embodiment, the installation space left by the lower reflector structure also results in a low-temperature area at the center of the tray 103.

[0044] Therefore, in order to solve the aforementioned low-temperature region problem in the prior art, combined with Figure 2 and Figure 3 As shown, this utility model achieves supplemental heating of the low-temperature central region of the tray 103 of the extension device 10 through the heating lamp device 1000. It should be understood that in order to avoid the support rod 104 while illuminating the low-temperature central region, the heating lamp assembly 1 in the aforementioned heating lamp device 1000 needs to be tilted. In addition, it should be understood that the technical solutions disclosed in this application can be applied regardless of the cause of the low-temperature problem at the center of the tray.

[0045] The following is combined Figures 3 to 7 The present invention provides a heating lamp device 1000, which includes a heating lamp assembly 1 and a fixing frame 2.

[0046] See Figure 6 The heating lamp assembly 1 is provided with a first locking assembly 01, which includes at least one first locking part 011. The fixing frame 2 is provided with a second locking assembly 02, which includes at least one second locking part 021.

[0047] Specifically, the first locking part 011 and the second locking part 021 are in a male-female plug-in relationship, that is, the first locking part 011 is male and the second locking part 021 is female, or the first locking part 011 is female and the second locking part 021 is male. The specific shape (e.g., cylindrical, prismatic), size, and material of the first locking part 011 and the second locking part 021 can be designed as needed, and are not specifically limited here.

[0048] In order to achieve automatic insertion between the first locking part 011 and the second locking part 021, an elastic element 03 is provided between the first locking part 011 and the heating lamp assembly 1, or an elastic element 03 is provided between the second locking part 021 and the fixing frame 2.

[0049] For example, combined Figures 4 to 6 As shown, the heating lamp assembly 1 optionally includes a lamp body 11, which uses a halogen lamp. In practical applications, heating lamp assemblies 1 with other structures can be selected or designed as needed; the specific structure of the heating lamp assembly 1 is not limited here. The mounting bracket 2 is mainly used to fix the heating lamp assembly 1 and to connect it to the extension device 10. Its shape is generally cylindrical, but the specific shape of the mounting bracket 2 can also be designed as needed; it is not limited here.

[0050] It should be understood that the radiation angle of the heating lamp assembly 1 in this utility model refers to the angle between the central axis of the lamp body 11 in the heating lamp assembly 1 and the horizontal plane.

[0051] The following scheme is not shown in the figure. A first locking component 01 is composed of multiple first locking parts 011 respectively arranged corresponding to different radiation angles of the heating lamp component 1. When the first locking part 011 and the second locking part 021 correspond to each other, the elastic member 03 drives the first locking part 011 and the second locking part 021 to interlock. Adjusting the radiation angle allows the heating lamp component 1 to supplement heating for different target positions. Multiple first locking parts 011 are arranged on the heating lamp component 1. In order to correspond to different radiation angles of the heating lamp component 1, these first locking parts 011 are usually arranged along a first arc. The center of the first arc corresponds to the rotation center of the heating lamp component 1 when the angle is adjusted (that is, when the first locking part 011 moves along the first arc, the heating lamp component 1 will rotate around the rotation center of the heating lamp component 1; the rotation center of the heating lamp component 1 is usually at the center of the filament of the heating lamp component 1 to ensure that the position of the filament center of the heating lamp component 1 remains unchanged when the radiation angle is adjusted. The rotation center can also be set to other positions as needed). Thus, for any one of the second locking parts 021, when it corresponds to the first locking parts 011 at different radiation angles, it can be plugged in and engaged (in this patent, the correspondence between the first locking part 011 and the second locking part 021 means that they are perpendicular to each other). Figure 7 By aligning the heating lamp assembly 1 with the corresponding radiation angle (in the direction shown in the diagram), the heating lamp assembly 1 can be locked at the corresponding radiation angle. It should be understood that in such an embodiment, the number of second locking parts 021 is at least one.

[0052] Combination Figure 6 and Figure 7 As shown, this patent discloses an embodiment: in a second locking assembly 02, a plurality of second locking parts 021 are respectively arranged corresponding to different radiation angles of the heating lamp assembly 1. When the first locking part 011 and the second locking part 021 correspond to each other, the elastic member 03 drives the first locking part 011 and the second locking part 021 to engage with each other. In this embodiment, as... Figure 7 The diagram shows eight second locking portions 021 corresponding to different radiation angles of the heating lamp assembly 1, with at least one first locking portion 011 arranged on the heating lamp assembly 1. Thus, any first locking portion 011 can be inserted and engaged with a second locking portion 021 at a different radiation angle (in this patent, the correspondence between the first locking portion 011 and the second locking portion 021 means that they are perpendicular to each other). Figure 7 Align the two sides in the direction shown in the diagram. (This direction is also the direction of insertion and mating) to lock the heating lamp assembly 1 at the corresponding radiation angle.

[0053] It should be understood that some specific implementation methods in the embodiments described in the first two paragraphs overlap: multiple second locking parts 021 are respectively set to different radiation angles of the heating lamp assembly 1, and multiple first locking parts 011 are respectively set to different radiation angles of the heating lamp assembly 1. It can be understood that when the heating lamp assembly 1 is locked, multiple pairs of first locking parts 011 and second locking parts 021 are engaged, which can improve the stability of the heating lamp assembly 1 being locked to a certain extent.

[0054] The first locking part 011 and the second locking part 021 are connected in a detachable manner. That is, by applying force to the first locking part 011 and / or the second locking part 021, the first locking part 011 and the second locking part 021 can be engaged, or disengaged. In this embodiment, the elastic force of the elastic member 03 is used to engage the first locking part 011 and the second locking part 021 to lock the heating lamp assembly 1. The engagement between the first locking part 011 and the second locking part 021 can be released by manual force application by the operator or by other force application methods; no specific limitation is made here.

[0055] The heating lamp device 1000 of this utility model includes a first locking component 01 on the heating lamp assembly 1 and a second locking component 02 on the fixing frame 2. Multiple first locking parts 011 in the first locking component 01 correspond to different radiation angles, and / or multiple second locking parts 021 in the second locking component 02 correspond to different radiation angles. When it is necessary to adjust the radiation angle of the heating lamp assembly 1, the connection between the first locking parts 011 and the second locking parts 021 is released (the operator can apply force to a structure such as the support frame 13 or the lamp holder 14 of the heating lamp assembly 1, thereby automatically releasing the connection between the first locking parts 011 and the second locking parts 021 under force). After the radiation angle of the heating lamp assembly 1 is adjusted, the first locking parts 011 and the second locking parts 021 at the corresponding radiation angle are reconnected. This invention enables the adjustment of multiple radiation angles of the heating lamp assembly 1 within a certain angle range. The plug-in locking provides good repeatability and positioning accuracy, which helps ensure the accuracy of the radiation position at a single point and the uniformity of radiation energy throughout the entire area during the epitaxial process, thereby achieving more precise epitaxial temperature control. Furthermore, the plug-in locking method avoids the problem of the heating lamp assembly 1 becoming loose or experiencing uncontrolled changes in the radiation angle after the angle is adjusted, thus ensuring sufficient stability of the heating lamp assembly 1 and facilitating better supplementary heating. In addition, after the heating lamp assembly 1 is rotated to the corresponding radiation angle, the elastic force of the elastic element 03 automatically engages the first locking part 011 and the second locking part 021, making operation simple and convenient.

[0056] Further (it should be understood that regardless of the number of the first locking part and the second locking part, subsequent solutions can be combined with them), the first locking part 011 is a plunger, and the second locking part 021 is a socket. The plunger is telescopically connected to the heating lamp assembly 1, so that when the plunger extends relative to the heating lamp assembly 1, the plunger engages with the socket. The elastic element 03 is disposed between the plunger and the heating lamp assembly 1; or, the first locking part 011 is a socket, and the second locking part 021 is a plunger. The plunger is telescopically connected to the fixing frame 2, so that when the plunger extends relative to the fixing frame 2, the plunger engages with the socket. The elastic element 03 is disposed between the plunger and the fixing frame 2.

[0057] Combination Figure 4 and Figure 6 As shown in the illustrated embodiment, the first locking part 011 is a plunger, and the second locking part 021 is a socket. The plunger is telescopically connected to the heating lamp assembly 1, allowing the plunger to extend or retract relative to the heating lamp assembly 1. This allows the plunger to extend and engage with the socket when the first locking part 011 corresponds to the second locking part 021. Preferably, in this embodiment, at least a portion of the plunger is installed in the inner cavity of the seat 04, and the elastic member 03 is disposed between the seat 04 and the plunger. The seat 04 is mounted on the heating lamp assembly 1. The elastic member 03 is located in the inner cavity and provides elastic force to the plunger along the engagement direction of the first locking part 011 and the second locking part 021. Optionally, the base 04 is provided with external threads, and a first connecting hole 131 is provided on a certain part of the heating lamp assembly 1 (e.g., the support frame 13 described later). The first connecting hole 131 is provided with internal threads to engage with the external threads of the base 04. Preferably, thread-locking adhesive is provided in the first connecting hole 131 so that the base 04 is more securely fixed in the first connecting hole 131.

[0058] The following scheme is not shown in the figure. The first locking part 011 is an insertion hole, and the second locking part 021 is a plunger. The plunger is telescopically connected to the fixing bracket 2, so that when the first locking part 011 and the second locking part 021 correspond, the plunger extends to engage with the insertion hole. Preferably, in this embodiment, the aforementioned elastic element 03, seat 04, and thread-locking adhesive can also be used for auxiliary fixing, which will not be described in detail here.

[0059] In this way, the plunger and the socket are connected and the elastic element 03 provides elastic force to the plunger, so that the plunger automatically connects when it is aligned with the socket, which improves the convenience of adjusting the radiation angle of the heating lamp device 1000.

[0060] Furthermore, the inner wall of the socket is spherical, and the plunger has a spherical end for insertion and mating with the socket.

[0061] Combination Figure 6 As shown in the illustrated embodiment, the first locking part 011 is a plunger, and the second locking part 021 is a socket. The plunger has a spherical end, and the inner wall of the socket is correspondingly spherical, allowing the plunger to engage with the socket. When the radiation angle needs to be adjusted, the operator can manually or with the aid of tools apply force to rotate the heating lamp assembly 1. When the spherical end is subjected to force, it will compress the elastic element 03, causing the plunger to retract and thus releasing the engagement between the plunger and the socket. It is understood that in this solution, in order to ensure the stability of the plunger and socket engagement and to ensure that the engagement between the plunger and the socket can be easily released when the radiation angle needs to be adjusted, the specific dimensions of the spherical end and the spherical shape, the elasticity of the elastic element 03, and other parameters can be designed as needed and are not specifically limited here.

[0062] Thus, the spherical end of the plunger engages with the spherical inner wall of the socket, ensuring stability after insertion and facilitating the release of the engagement. Compared to the existing method of tightening and loosening bolts, this embodiment allows direct adjustment of the radiation angle of the heating lamp device 1000. Once the heating lamp device 1000 reaches the target radiation angle, the elastic element 03 drives the plunger to engage with the socket, achieving automatic locking. This improves the convenience of adjusting the radiation angle of the heating lamp device 1000 and avoids loosening due to bolt detachment, ensuring stable and controlled heating lamp angle and facilitating better supplementary heating.

[0063] Furthermore, the heating lamp assembly 1 includes a lamp body 11 and a reflector 12. The lamp body 11 passes through the reflector 12 and is connected to the reflector 12.

[0064] Combination Figure 4 and Figure 5As shown, in this embodiment, a halogen lamp is used as the lamp body 11. The specific parameters of the lamp body 11 can be selected as needed. Typically, the power of a single heating lamp is 1kW to 5kW, the wavelength is 0.75μm to 2.5μm, and the color temperature is typically 2000 to 4000K. The reflector 12 is typically made of copper and gold-plated on its surface. The lamp body 11 penetrates the reflector 12, and preferably, the filament of the lamp body 11 is parallel to or coincides with the central axis of the reflector 12. The side of the reflector 12 facing the radiation target is a concave curved surface (e.g., a spherical surface, an ellipsoidal surface, etc.). The center of the filament of the lamp body 11 is usually set higher than the lowest point of the concave curved surface of the reflector 12 to ensure that more light is reflected. It should be understood that when the heating lamp device 1000 is installed on the extension device 10, its entirety is tilted. At this point, "the center of the filament of the lamp body 11 is higher than the lowest point of the concave surface of the reflector 12" can be understood as: in the direction of the tilt of the heating lamp device 1000, the center of the filament of the lamp body 11 is closer to the process chamber 105 than the farthest end of the concave surface of the reflector 12.

[0065] Thus, through the reflection and focusing effect of the reflector 12 on the light from the lamp body 11, the energy is concentrated near the center of the bottom of the tray of the extension device 10.

[0066] Furthermore, the fixing frame 2 includes a fixing cylinder 21, the fixing cylinder 21 having a cylindrical inner wall, and the reflector 12 having a spherical outer wall, the spherical outer wall cooperating with the cylindrical inner wall to achieve a rotatable connection.

[0067] Combination Figure 4 and Figure 5 As shown, the fixing frame 2 includes a fixing cylinder 21, which is exemplarily designed with a cylindrical structure. Its inner wall is a cylindrical inner wall, and the peripheral wall of the reflector 12 of the heating lamp assembly 1 is spherical, i.e., a spherical outer wall. The spherical outer wall and the cylindrical inner wall serve as a rotational connection when they are fitted together. It should be noted that there is usually a certain gap between the spherical outer wall and the cylindrical inner wall. That is to say, under normal circumstances, the spherical outer wall and the cylindrical inner wall do not contact each other. However, when adjusting the radiation angle, the spherical outer wall may come into contact with the cylindrical inner wall due to the shaking during the adjustment process, thus achieving a rotational connection.

[0068] In this way, the spherical outer wall of the reflector 12 and the cylindrical inner wall of the fixed cylinder 21 are rotatably connected, which plays a role in rotational guidance and ensures that the heating lamp assembly 1 and the fixed frame 2 rotate more smoothly relative to each other when adjusting the radiation angle.

[0069] Furthermore, the heating lamp assembly 1 also includes a support frame 13 and a lamp holder 14. The lamp body 11 is mounted on the lamp holder 14. One end of the support frame 13 is connected to the reflector 12, and the other end is connected to the lamp holder 14.

[0070] Combination Figures 4 to 6 As shown, the lamp holder 14 is used to install and fix the lamp body 11 and to connect to the power supply. In this embodiment, the support frame 13 adopts a U-shaped plate with a U-shaped cross section. The upper end of the support frame 13 is connected and fixed to the reflector 12 in the figure, and the lower end of the support frame 13 is connected and fixed to the lamp holder 14 in the figure.

[0071] In this way, the overall structural strength of the heating lamp device 1000 can be improved by the support frame 13.

[0072] Furthermore, the first locking component 01 is disposed on the support frame 13.

[0073] Combination Figure 6 As shown, this embodiment employs a spring plunger structure, where the first locking part 011 is a plunger, at least a portion of which is installed in the inner cavity of the seat 04. The elastic element 03 is disposed between the seat 04 and the plunger, and the seat 04 is mounted on the heating lamp assembly 1. The support frame 13 of the heating lamp assembly 1 has a first connecting hole 131, allowing the seat 04 to be fixed in the first connecting hole 131 (preferably fixed in the first connecting hole 131 by a threaded connection and threaded adhesive).

[0074] In this way, the support frame 13 can also improve the structural strength of the first locking component 01, which is conducive to achieving a more reliable lock between the first locking part 011 and the second locking part 021, and avoids the heating lamp component 1 from swaying and becoming unstable.

[0075] Furthermore, the fixing frame 2 includes a fixing cylinder 21 and an adjusting plate 22. The adjusting plate 22 is connected to the fixing cylinder 21 and has an arc-shaped guide groove 221. The heating lamp assembly 1 has a guide member 132, which is slidably connected to the arc-shaped guide groove 221.

[0076] Combination Figure 5 and Figure 6As shown, the adjusting plate 22 of the fixing frame 2 is connected and fixed to the inner wall of the fixing cylinder 21 (it can be fixed by bolt connection or integral connection, etc.). The adjusting plate 22 is provided with an arc-shaped guide groove 221. The center of the arc of the arc-shaped guide groove 221 corresponds to the center of the filament of the lamp body 11. The guide member 132 on the heating lamp assembly 1 is slidably connected in the arc-shaped guide groove 221. When the operator applies force to the heating lamp assembly 1, the guide member 132 slides along the arc-shaped guide groove 221, and the lamp body 11 rotates around the center of the filament. The guide member 132 and the arc-shaped guide groove 221 cooperate to achieve guidance, thereby realizing the adjustment of the radiation angle.

[0077] Thus, the arc-shaped guide groove 221 on the adjusting plate 22 slides in conjunction with the guide member 132, thereby playing a guiding role in adjusting the radiation angle.

[0078] In addition, combined Figure 4 As shown, the adjustment plate 22 is also equipped with scale lines and numerical markings so that the operator can intuitively understand the radiation angle information of the heating lamp assembly 1, which makes it easier to adjust the radiation angle more accurately.

[0079] Furthermore, the guide 132 is a stepped screw, which has a head 1321, a rod 1322, and a connecting part 1323 along its length. The connecting part 1323 is detachably connected to the second connecting hole 133 provided on the heating lamp assembly 1. The rod 1322 is slidably connected to the arc-shaped guide groove 221. The head 1321 is located on the side of the adjusting plate 22 away from the heating lamp assembly 1.

[0080] Combination Figure 6 As shown, guide member 132 uses stepped screws, and the length direction of the stepped screws is... Figure 6 In the horizontal direction, from left to right, the stepped screw has a head 1321, a rod 1322, and a connecting part 1323, forming three steps. The head 1321 is located on the side of the adjusting plate 22 away from the heating lamp assembly 1 (in this embodiment, the side of the adjusting plate 22 away from the support frame 13). There is a certain gap between the head 1321 and the adjusting plate 22. The elastic force of the elastic element 03 causes the adjusting plate 22 to abut against the head 1321, at which time the head 1321 plays a limiting role. The rod 1322 is usually cylindrical to slide with the arc-shaped guide groove 221 (it can also be other shapes, as long as it can slide in the arc-shaped guide groove 221). The connecting part 1323 is installed in the second connecting hole 133 on the heating lamp assembly 1 by means of threaded connection. In this embodiment, the second connecting hole 133 is opened on the support frame 13 of the heating lamp assembly 1.

[0081] Thus, the position of the adjustment plate 22 can be restricted by the head 1321, the rod 1322 can play a sliding guiding function along the arc-shaped guide groove 221, and the connection and fixation with the heating lamp assembly 1 can be achieved by the connecting part 1323. That is, the stability when adjusting the radiation angle and the strength of the overall structure are improved by the stepped screw.

[0082] Furthermore, the heating lamp assembly 1 is provided with a plurality of first locking components 01 corresponding to different rotation radii of the heating lamp assembly 1; and / or, the fixing frame 2 is provided with a plurality of second locking components 02 corresponding to different rotation radii of the heating lamp assembly 1.

[0083] Combination Figure 7 As shown in the figure of this embodiment, eight second locking parts 021 are provided on the adjustment plate 22 of the fixing frame 2, corresponding to different radiation angles of the heating lamp assembly 1. These eight second locking parts 021 constitute a second locking assembly 02. When the heating lamp assembly 1 rotates to adjust the radiation angle, a rotation center is formed (in this embodiment, the filament center of the lamp body 11 is taken as the rotation center). The distance from a point on the rotation plane to the rotation center is the rotation radius. Two second locking assemblies 02 are provided to achieve a stable locking effect. Further, these two second locking assemblies 02 are respectively located on the inner and outer sides of the arc-shaped guide groove 221 (i.e., Figure 7 (both sides of the heating lamp assembly 1), thus corresponding to different rotation radii, can achieve a more stable locking effect.

[0084] Similar to the second locking component 02 in the previously described technical solution, multiple first locking components 01 can also be set.

[0085] Preferably, such as Figure 6 As shown, corresponding to different rotation radii of the heating lamp assembly 1, the heating lamp device is provided with two first locking components 01, each first locking component 01 including a first locking part 011. The two first locking components 01 are respectively located on the upper and lower sides of the arc-shaped guide groove 221. It should be understood that in this technical solution, the heating lamp device includes two second locking components 02, which correspond to the positions of the first locking components 01, and each second locking component 02 includes multiple second locking parts 021, which correspond to multiple different radiation angles of the heating lamp assembly 1. Furthermore, in this preferred embodiment, the first locking part 011 includes a plunger; the second locking part 021 is a socket. For more details, please refer to the above description when the first locking part 011 includes a plunger and the second locking part 021 is a socket.

[0086] Thus, by setting multiple first locking components 01 and / or multiple second locking components 02 corresponding to different rotation radii of the heating lamp assembly 1, the stability of locking the heating lamp assembly 1 after adjustment is further improved.

[0087] Furthermore, combined Figure 4 As shown, the fixing frame 2 also includes an ear-shaped structure 23 for connection with the epitaxial device 10. The ear-shaped structure 23 is provided with a through hole, which can be used to connect and fix it to, for example, the heating structure of the epitaxial device 10.

[0088] This utility model also provides a heating sleeve 100, including the aforementioned heating lamp device 1000, and a plurality of the heating lamp devices 1000 are arranged to form a support rod through cavity 200.

[0089] Combination Figure 2 and Figure 3 As shown, Figure 2 The diagram shows a partial structure of the epitaxial device 10, which includes an upper heating structure 101, a lower heating structure 102, a tray 103, a support rod 104, and a process chamber 105. More specifically, this embodiment employs... Figure 1 The upper heating structure 101 and lower heating structure 102 shown are both linear lamp groups. In some embodiments, the arrangement direction of the linear lamps in the upper heating structure 101 is perpendicular to the arrangement direction of the linear lamps in the lower heating structure 102. Since the lower heating structure 102 needs to avoid the support rod 104, the temperature in the center area of ​​the wafer will be lower. Therefore, a heating sleeve 100 is installed on the lower heating structure 102, thereby heating the area near the bottom center of the tray 103 through multiple heating lamp devices 1000. In this way, the heating sleeve 100 provides supplementary heating to the wafer on the tray 103, ensuring the uniformity of radiated energy during the heating process of the epitaxial device 10. The multiple heating lamp devices 1000 form a support rod passage cavity 200 for the support rod 104 to pass through.

[0090] It should be understood that the support rod 104 extends downward from inside the process chamber 105, passes through the aforementioned support rod passage cavity 200, and then extends to the outside of the process chamber 105. Furthermore, to ensure the sealing of the process chamber 105, the extension device 10 may also include a connecting pipe. The connecting pipe surrounds the outer periphery of the support rod 104, and the upper end of the connecting pipe is sealed and fixedly connected to the lower wall of the process chamber 105, while the lower end of the connecting pipe is sealed and connected to other components, thereby achieving a seal for the process chamber 105. That is, other components may also pass through the aforementioned support rod passage cavity 200.

[0091] The heating assembly 100 of this invention employs multiple heating lamp devices 1000 to form a support rod passage cavity 200, allowing the support rod 104 of the epitaxial device 10 to pass through, thus achieving supplementary heating for the epitaxial device 10. In the heating lamp device 1000, a first locking component 01 is provided on its heating lamp assembly 1, and a second locking component 02 is provided on its fixing frame 2. Multiple first locking parts 011 in the first locking component 01 correspond to different radiation angles, and / or multiple second locking parts 021 in the second locking component 02 correspond to different radiation angles. When it is necessary to adjust the radiation angle of the heating lamp assembly 1, the connection between the first locking part 011 and the second locking part 021 is released (the operator can directly pull out and separate the first locking part 011 and the second locking part 021). Preferably, force can also be applied to structures such as the support frame 13, guide member 132, and lamp holder 14 of the heating lamp assembly 1, thereby causing the first locking part 011 and the second locking part 021 to automatically release the connection after being subjected to force. After the radiation angle of the heating lamp assembly 1 is adjusted, the first locking part 011 and the second locking part 021 at the corresponding radiation angle are inserted. This invention can adjust multiple radiation angles of the heating lamp assembly 1 within a certain angle range. The insertion and locking provides good repeatability and positioning accuracy, which helps to ensure the uniformity of radiation energy throughout the epitaxial process, thereby achieving more precise epitaxial temperature control. Furthermore, the insertion and locking method can prevent the heating lamp assembly 1 from becoming loose or the radiation angle from changing uncontrollably after the angle is adjusted, thus ensuring that the heating lamp assembly 1 has sufficient stability and is conducive to achieving better supplementary heating effect. In addition, after the heating lamp assembly 1 is rotated to the corresponding radiation angle, the elastic force of the elastic element 03 causes the first locking part 011 and the second locking part 021 to automatically engage, making the operation simple and convenient.

[0092] This utility model also provides an epitaxial device 10, including the heating sleeve 100.

[0093] Specifically, in combination Figure 2 and Figure 3 As shown, the epitaxial device 10 of this utility model includes an upper heating structure 101, a lower heating structure 102, a tray 103, a support rod 104, and a process chamber 105. Exemplarily, the upper heating structure 101 and the lower heating structure 102 in this embodiment employ... Figure 1The illustrated scheme shows that the upper heating structure 101 is a row of linear lamps, and the lower heating structure 102 is also a row of linear lamps. In some embodiments, the arrangement direction of the linear lamps in the upper heating structure 101 is perpendicular to the arrangement direction of the linear lamps in the lower heating structure 102. Since the lower heating structure 102 needs to avoid the support rod 104, the temperature in the center area of ​​the wafer may be lower. Therefore, a heating sleeve 100 is installed on the lower heating structure 102, thereby heating the area near the bottom center of the tray 103 through multiple heating lamp devices 1000 therein. In this way, the heating sleeve 100 provides supplementary heating for the wafer on the tray 103, ensuring the uniformity of radiated energy during the heating process of the epitaxial device 10. The multiple heating lamp devices 1000 form a support rod passage cavity 200 for the support rod 104 to pass through.

[0094] It should be understood that, in order to ensure the sealing of the process chamber 105 in this embodiment, the connecting pipe or other components mentioned above may also be used, which will not be described in detail here.

[0095] The epitaxial device 10 of this invention has a heating sleeve 100 installed on the lower heating structure 102. The heating sleeve 100 uses multiple heating lamp devices 1000 to form a support rod passage cavity 200, allowing the support rod 104 of the epitaxial device 10 outside the epitaxial cavity to pass through, thus realizing the supplementary heating function of the epitaxial device 10 outside the epitaxial cavity. In the heating lamp device 1000, a first locking component 01 is provided on its heating lamp assembly 1, and a second locking component 02 is provided on its fixing frame 2. The multiple first locking parts 011 in the first locking component 01 correspond to different radiation angles, and / or, the multiple second locking parts 021 in the second locking component 02 correspond to different radiation angles. When the radiation angle of the heating lamp assembly 1 needs to be adjusted, the connection between the first locking part 011 and the second locking part 021 is released (the operator can directly pull out and separate the first locking part 011 and the second locking part 021. Preferably, force can also be applied to structures such as the support frame 13, guide member 132, and lamp holder 14 of the heating lamp assembly 1, so that the first locking part 011 and the second locking part 021 automatically release the connection after being subjected to force). After the radiation angle of the heating lamp assembly 1 is adjusted, the first locking part 011 and the second locking part 021 are connected at the corresponding radiation angle. This utility model can realize the adjustment of multiple radiation angles of the heating lamp assembly 1 within a certain angle range. The connection locking can provide good repeatability and positioning accuracy, which is conducive to ensuring the uniformity of radiation energy in the entire area during the epitaxial process, thereby achieving more precise epitaxial temperature control. Furthermore, the connection locking method can avoid the problem of the heating lamp assembly 1 becoming loose and the radiation angle changing uncontrollably after the angle is adjusted, thereby ensuring that the heating lamp assembly 1 has sufficient stability, which is conducive to achieving better supplementary heating effect. In addition, after the heating lamp assembly 1 of this solution is rotated to the corresponding radiation angle, the elastic force of the elastic element 03 causes the first locking part 011 and the second locking part 021 to automatically engage, making the operation simple and convenient.

[0096] In the description of this utility model, it should be understood that the directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or component referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this utility model. The directional terms "inner" and "outer" refer to the inner and outer contours of each component itself.

[0097] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0098] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be construed as limiting the scope of protection of this utility model.

[0099] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A heating lamp device, characterized in that, Includes heating lamp assembly and mounting bracket; The heating lamp assembly is provided with a first locking component, the first locking component including at least one first locking part; the fixing frame is provided with a second locking component, the second locking component including at least one second locking part. In one first locking assembly, a plurality of first locking portions correspond to different radiation angle settings of the heating lamp assembly; and / or, in one second locking assembly, a plurality of second locking portions correspond to different radiation angle settings of the heating lamp assembly; An elastic element is provided between the first locking part and the heating lamp assembly; or, an elastic element is provided between the second locking part and the fixing frame; When the first locking part and the second locking part correspond to each other, the elastic element drives the first locking part and the second locking part to engage with each other.

2. The heating lamp device according to claim 1, characterized in that, The first locking part is a plunger, the second locking part is a socket, the plunger is telescopically connected to the heating lamp assembly, and the elastic element is disposed between the plunger and the heating lamp assembly; or, the first locking part is a socket, the second locking part is a plunger, the plunger is telescopically connected to the fixing frame, and the elastic element is disposed between the plunger and the fixing frame.

3. The heating lamp device according to claim 2, characterized in that, The inner wall of the socket is spherical, and the plunger has a spherical end for insertion into the socket.

4. The heating lamp device according to claim 1, characterized in that, The heating lamp assembly includes a lamp body and a reflector, wherein the lamp body passes through the reflector and is connected to the reflector.

5. The heating lamp device according to claim 4, characterized in that, The fixing frame includes a fixing cylinder with a cylindrical inner wall and a reflector with a spherical outer wall. The spherical outer wall and the cylindrical inner wall cooperate to achieve a rotatable connection.

6. The heating lamp device according to claim 4, characterized in that, The heating lamp assembly also includes a support frame and a lamp holder. The lamp body is mounted on the lamp holder. One end of the support frame is connected to the reflector, and the other end of the support frame is connected to the lamp holder.

7. The heating lamp device according to claim 6, characterized in that, The first locking component is disposed on the support frame.

8. The heating lamp device according to claim 1, characterized in that, The fixing frame includes a fixing cylinder and an adjusting plate. The adjusting plate is connected to the fixing cylinder and has an arc-shaped guide groove. The heating lamp assembly has a guide member that is slidably connected to the arc-shaped guide groove.

9. The heating lamp device according to claim 8, characterized in that, The guide is a stepped screw, which has a head, a rod, and a connecting part along its length. The connecting part is detachably connected to the second connecting hole on the heating lamp assembly. The rod is slidably connected to the arc-shaped guide groove. The head is located on the side of the adjusting plate away from the heating lamp assembly.

10. The heating lamp device according to claim 1, characterized in that, The heating lamp assembly is provided with a plurality of first locking components corresponding to different rotation radii of the heating lamp assembly; and / or, the fixing frame is provided with a plurality of second locking components corresponding to different rotation radii of the heating lamp assembly.

11. A heating sleeve assembly, characterized in that, The heating lamp device includes any one of claims 1 to 10, wherein a plurality of the heating lamp devices are arranged to form a support rod through cavity.

12. An epitaxial device, characterized in that, It includes a process chamber, an upper heating structure located above the process chamber, a lower heating structure located below the process chamber, a tray located inside the process chamber, a support shaft extending from inside the process chamber to outside the process chamber, and a heating sleeve as described in claim 11. The support shaft is used to support and drive the tray to rotate, and the support shaft extends through the support rod through the cavity.

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