A laser heating rework system

Abstract

This invention relates to the field of automated laser chip heating processing control technology, and in particular to a laser heating rework system. The system includes a spectral mapping module that obtains wavelength drift data by analyzing transient photoluminescence spectra collected by a fluorescence thermometer, and uses this data to identify the coordinates of poorly heated locations to generate a transient thermal state matrix. A tensor calculation module combines the microscopic orientation data of the material's crystal lattice structure to calculate the thermal conductivity coefficient and generate a thermal conductivity tensor matrix. A polarization synthesis module retrieves photon absorption cross-section difference parameters to inversely deduce a physical compensation array and generate a spatial polarization phase map. A polarization modulation device generates a non-uniform vector polarized light field based on this map, driving a laser output device to inject the light field into the coordinates of the poorly heated location to perform targeted heat injection. This invention utilizes the difference in physical absorption rate of photons with different polarization states in the underlying crystal lattice arrangement to correct local thermal distribution anomalies while achieving zero thermal damage overflow in the surrounding area, thus improving the overall processing yield.

Claims

1. A laser heating rework system, characterized in that, This includes equipment and control devices, with the control devices establishing a communication connection with the equipment. The equipment includes a fluorescence thermometer, a material conveying device, a motion execution device, a polarization modulation device, and a laser output device. The material conveying device runs horizontally through the processing area at the bottom of the laser heating rework system. The fluorescence thermometer is suspended above the bearing surface of the material conveying device. The motion execution device is mounted on the side of the material conveying device, with its output end face pointing vertically downwards. The polarization modulation device is rigidly connected to the output end face of the motion execution device. The laser output device is embedded in the top input end of the polarization modulation device. The control device includes a spectral mapping module, a tensor calculation module, and a polarization synthesis module; The spectral mapping module receives the transient photoluminescence spectrum collected by the fluorescence thermometer, analyzes the transient photoluminescence spectrum to obtain wavelength drift data, identifies the coordinates of the poor heating location based on the wavelength drift data, generates a transient thermal state matrix based on the coordinates of the poor heating location, and sends the transient thermal state matrix to the tensor calculation module. The tensor calculation module retrieves preset material lattice structure micro-orientation data, calculates the thermal conductivity coefficient based on the material lattice structure micro-orientation data and transient thermal state matrix, generates a thermal conductivity tensor matrix based on the thermal conductivity coefficient, and sends the thermal conductivity tensor matrix to the polarization synthesis module. The polarization synthesis module retrieves preset photon absorption cross-section difference parameters, reverse-engineers the physical compensation array based on the photon absorption cross-section difference parameters and the thermal conductivity tensor matrix, generates a spatial polarization phase map based on the physical compensation array, and sends the spatial polarization phase map to the polarization modulation device. The polarization modulation device generates a non-uniform vector polarized light field based on the spatial polarization phase diagram; the laser output device injects the non-uniform vector polarized light field into the coordinates of the poorly heated position.

2. The laser heating rework system according to claim 1, characterized in that, The spectral mapping module is configured to analyze transient photoluminescence spectra to generate a transient thermal state matrix. The spectral mapping module includes a spectral denoising submodule, a wavelength resolution submodule, and a three-dimensional reconstruction submodule.

3. The laser heating rework system according to claim 2, characterized in that, The spectral denoising submodule, like the wavelength analysis submodule, is configured to analyze transient photoluminescence spectra to obtain wavelength shift data. The spectral denoising submodule receives transient photoluminescence spectra continuously acquired by a fluorescence thermometer, calls a wavelet transform algorithm to filter out background stray light noise and dark current noise from the transient photoluminescence spectrum, separates the denoised fluorescence characteristic spectrum data, and sends the purified fluorescence characteristic spectrum data to the wavelength analysis submodule. The wavelength analysis submodule receives the purified fluorescence characteristic spectrum data, retrieves preset standard reference wavelength parameters, uses a Gaussian distribution fitting algorithm to perform peak addressing calculations on the purified fluorescence characteristic spectrum data, extracts the spectral peak wavelength corresponding to the spatial pixel points of the purified fluorescence characteristic spectrum data, calculates the wavelength shift data of the spectral peak wavelength relative to the standard reference wavelength parameters, and sends the wavelength shift data to the 3D reconstruction submodule.

4. The laser heating rework system according to claim 3, characterized in that, The 3D reconstruction submodule is configured to generate a transient thermal state matrix by combining coordinate data. The 3D reconstruction submodule receives wavelength drift data, retrieves preset photoluminescence temperature calibration curve parameters and preset spatial calibration coordinate network, uses interpolation algorithm to map wavelength drift data to absolute temperature values, extracts surface 3D temperature gradient data based on wavelength drift data, extracts 3D coordinates from the spatial calibration coordinate network, combines the spatial calibration coordinate network, and outputs a transient thermal state matrix with the physical mapping relationship between 3D coordinates and absolute temperature values ​​based on the surface 3D temperature gradient data and the coordinates of poorly heated locations.

5. A laser heating rework system according to claim 4, characterized in that, The tensor calculus module is configured to calculate the thermal conductivity coefficient and generate the thermal conductivity tensor matrix. The tensor calculus module includes a lattice matching submodule, a partial differential calculation submodule, and a tensor generation submodule.

6. The laser heating rework system according to claim 5, characterized in that, The lattice matching submodule is configured to perform origin translation and spatial rotation registration operations. The lattice matching submodule receives the transient thermal state matrix, calls the preset micro-lattice arrangement orientation map as the micro-orientation data of the material lattice structure, takes the center point of the poor heating location coordinates as the origin of the coordinate system, extracts the macro-temperature coordinate system of the transient thermal state matrix and the micro-lattice arrangement coordinate system of the micro-lattice arrangement orientation map, and uses the affine transformation matrix to perform origin translation and spatial rotation registration operations on the macro-temperature coordinate system and the micro-lattice arrangement coordinate system to generate a cross-scale mapping topology map with physical orientation angle constraints, and sends the cross-scale mapping topology map to the partial differential calculation submodule.

7. A laser heating rework system according to claim 6, characterized in that, The partial differential calculation submodule is configured to perform numerical calculations to generate instantaneous heat flux vector data. The partial differential calculation submodule receives a cross-scale mapping topology map, retrieves a preset direction-differential Fourier heat conduction partial differential equation, and performs numerical calculations using the direction-differential Fourier heat conduction partial differential equation for the physical nodes deployed in the cross-scale mapping topology map. This generates directional numerical values ​​and modulus values ​​of instantaneous heat flux vectors in different crystal orientations in three-dimensional space. The instantaneous heat flux vector data containing directional numerical values ​​and modulus values ​​is then sent to the tensor generation submodule.

8. A laser heating rework system according to claim 7, characterized in that, The tensor generation submodule is configured to deduce the thermal diffusion hysteresis rate and output a thermal conductivity tensor matrix. The tensor generation submodule receives instantaneous heat flow vector data, retrieves preset material stack structure characteristic parameters and physical stress distribution state parameters, retrieves preset polarization state photon excitation boundary conditions, and, based on the material lattice structure micro-orientation data and transient thermal state matrix, deduces the thermal diffusion hysteresis rate of all spatial coordinate points of the transient thermal state matrix under polarization state photon excitation boundary conditions, using it as the thermal conductivity coefficient, and outputs a thermal conductivity tensor matrix including multidimensional heat flow orientation preference parameters based on the thermal conductivity coefficient and thermal diffusion hysteresis rate.

9. A laser heating rework system according to claim 8, characterized in that, The polarization synthesis module is configured to generate a physical compensation array through inverse deduction. The polarization synthesis module includes an absorption mapping submodule, a phase iteration submodule, and a driving encoding submodule. The absorption mapping submodule receives the thermal conductivity tensor matrix, retrieves the preset photon polarization absorption cross-section data mapping table as the photon absorption cross-section difference parameter, extracts the heating failure location and the surrounding qualified region corresponding to the coordinates of the heating failure location, extracts the crystal arrangement geometric parameters of the heating failure location and the surrounding qualified region, compares the crystal arrangement geometric parameters of the heating failure location and the surrounding qualified region, and selects the optimal polarization state spatial distribution function that satisfies the preset polarization physical conditions based on the photon absorption cross-section difference parameter and the thermal conductivity tensor matrix. It then reverse-derives the direction difference inverse compensation array as a physical compensation array according to the optimal polarization state spatial distribution function and sends the direction difference inverse compensation array to the phase iteration submodule.

10. A laser heating rework system according to claim 9, characterized in that, The phase iteration submodule and the drive coding submodule are configured to send the underlying drive voltage amplitude sequence according to the physical compensation array. The phase iteration submodule receives the directional difference inverse compensation array, calls the Gesberg Saxton phase recovery iterative algorithm, and performs multiple Fourier transform cyclic calculations between the spatial frequency domain and the physical spatial domain according to the physical compensation array to generate a spatial polarization phase map that can reconstruct the vector polarization light field. The spatial polarization phase map is sent to the drive coding submodule. The drive encoding submodule receives the spatial polarization phase map, converts the phase grayscale values ​​included in the spatial polarization phase map into a sequence of underlying drive voltage amplitudes, and sends the sequence of underlying drive voltage amplitudes to the polarization modulation device in the form of a high-frequency electrical signal through a preset digital-to-analog conversion interface.

Images