A tool for assembling a semiconductor fluidic component
By designing the bearing part and pressure rod of the tooling for assembling semiconductor flow control components, the problems of concentricity deviation and poor sealing performance during valve seat assembly were solved, achieving uniform deformation and improved sealing performance between the valve seat and the valve seat mounting groove, thus ensuring the stable operation of the semiconductor manufacturing process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- 星奇(上海)半导体有限公司
- Filing Date
- 2026-03-13
- Publication Date
- 2026-06-09
Smart Images
Figure CN122165335A_ABST
Abstract
Description
Technical Field
[0001] This specification relates to the field of semiconductor technology, and specifically to a tooling for assembling semiconductor flow control components. Background Technology
[0002] In the field of semiconductor valves, the 1 / 2-inch large diaphragm valve is a core component of fluid control systems, and its performance plays a decisive role in the stable operation of the entire system. In the valve seat assembly process, the valve seat finishing process is particularly crucial, as its processing quality directly affects the operational stability, sealing performance, and lifespan of individual valves and valve assemblies, thus having a vital impact on the continuity and reliability of downstream semiconductor manufacturing processes.
[0003] The valve seat sealing process places extremely stringent technical requirements on the sealing tooling, covering multiple aspects such as design accuracy, manufacturing tolerances, and ease of operation. As a key factor affecting the performance of product components, the performance of the sealing tooling not only determines whether the product components can achieve the predetermined performance indicators, but is also closely related to the valve production efficiency.
[0004] Currently, the valve seat assembly process commonly employs a flat extrusion method for sealing. However, this traditional method has several significant problems. Firstly, the valve seat and valve body are prone to excessive concentricity deviation during extrusion, and the accuracy of the extrusion stroke is difficult to guarantee. These problems directly lead to valve body scrapping, wasting raw materials and increasing production costs. Secondly, the valve seat surface parallelism error is large after sealing, a defect that has a series of serious consequences after the valve is assembled. Specifically, it manifests as severe valve flow rate attenuation, affecting the accuracy of fluid control; and due to poor sealing performance, it frequently causes internal leakage failures, and the incidence of such failures remains high, significantly reducing valve reliability and service life, posing a potential risk to the stable operation of semiconductor manufacturing processes. Summary of the Invention
[0005] In view of this, embodiments of this specification provide a tooling for assembling semiconductor flow control components.
[0006] This specification provides the following technical solution through its embodiments: a tooling for assembling semiconductor flow control components, applied to the valve seat assembly of a two-valve three-way series flow control component, comprising: The support portion has a support surface formed thereon for placing the flow control component; A pressure rod, the first end of which extends into a preset position within the valve body of the flow control component, is used to connect with an external drive assembly. Under the action of the external drive assembly, the pressure rod applies force in the direction close to the valve seat, squeezing the side wall of the valve seat mounting groove inward to close the valve seat, causing the groove wall of the valve seat mounting groove to deform and tightly cover the valve seat.
[0007] Preferably, the first end of the pressure rod is recessed inward and has a pressure groove, the inner wall of which has an extrusion slope that matches the groove wall of the valve seat mounting groove.
[0008] Preferably, the sidewall of the pressure groove is configured as a trumpet shape with the inner diameter gradually decreasing from the outside to the inside. As the force of the external driving component increases, the pressure groove covers the valve seat mounting groove and gradually squeezes its outer sidewall to fit against the outer sidewall of the valve seat.
[0009] Preferably, the pressure rod has a heat dissipation through hole, which extends along the axial direction of the pressure rod from the pressure groove to the second end of the pressure rod.
[0010] Preferably, the bearing portion includes a bearing platform, on which an inclined bearing surface is formed, and a first limiting flange extends upward from the lower end of the bearing surface; Both sides of the bearing surface extend upward to form a second limiting protrusion, which extends along the inclined direction of the bearing surface.
[0011] Preferably, the assembly tooling further includes a guide frame, which includes a guide panel and multiple support legs connected to the edge of the guide panel. The other ends of the multiple support legs are detachably connected to the bearing portion so that the guide panel is located directly above the valve body of the flow control component. The guide panel is provided with a guide hole that matches the pressure rod to guide the movement of the pressure rod during the valve seat closing process.
[0012] Preferably, the bearing portion includes two supporting protrusions on both sides of the bearing platform, and each supporting protrusion has a positioning groove formed at both ends. The guide frame includes four supporting legs, and the guide frame is fixed to the bearing portion by the four supporting legs cooperating with the positioning grooves one by one.
[0013] Preferably, the positioning groove is L-shaped with an outward opening, having a vertical guide surface on the inner side and a horizontal guide surface on the outer side to accommodate the corresponding support leg.
[0014] Preferably, the second end of the pressure rod extends outward to form an operating disc, and the heat dissipation through hole is provided through the operating disc. The operating disc is located above the guide panel and the diameter of the operating disc is larger than the diameter of the guide hole. During the valve seat closing process, the movement stroke of the pressure rod is limited by the contact state between the operating disc and the guide panel.
[0015] Preferably, the bottom of the support platform extends away from the support surface to form a mounting guide rail, which cooperates with the groove of the external mounting platform to fix the assembly tooling.
[0016] Compared with the prior art, the beneficial effects that at least one technical solution adopted in the embodiments of this specification can achieve include at least: The bearing section provides a stable support platform for the two-valve three-way flow control components through its bearing surface, ensuring that the components remain in a fixed position during assembly. By pressing the valve seat mounting groove with the pressure rod, the side wall of the valve seat mounting groove gradually shrinks inward. The precise force of the pressure rod, combined with the stable support of the bearing section, ensures that the deformation of the valve seat mounting groove is uniform, avoiding excessive local deformation or stress concentration. Attached Figure Description
[0017] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0018] Figure 1 This is a three-dimensional structural schematic diagram of the tooling for assembling semiconductor flow control components provided in this application; Figure 2 This is a side view of the tooling for assembling semiconductor flow control components provided in this application; Figure 3 This is a cross-sectional view of the tooling for assembling semiconductor flow control components provided in this application; Figure 4 This is a schematic diagram of the pressure bar of the tooling for assembling semiconductor flow control components provided in this application; Figure 5 This is a cross-sectional view of the pressure bar of the tooling for assembling semiconductor flow control components provided in this application; Figure 6 This is a first-view structural schematic diagram of the support portion of the tooling for assembling semiconductor flow control components provided in this application; Figure 7 This is a second-view structural schematic diagram of the support portion of the tooling for assembling semiconductor flow control components provided in this application; Figure 8This is a schematic diagram of the guide frame of the tooling for assembling semiconductor flow control components provided in this application; Figure 9 This is a schematic diagram of the semiconductor flow control component assembly tooling provided in this application when the valve body is not placed.
[0019] In the diagram, 1 is the flow control component; 11 is the valve seat; 2 is the bearing part; 21 is the bearing platform; 22 is the bearing surface; 23 is the first limiting flange; 24 is the second limiting flange; 25 is the supporting flange; 26 is the positioning groove; 261 is the vertical guide surface; 262 is the horizontal guide surface; 27 is the mounting rail; 3 is the pressure rod; 31 is the pressure groove; 32 is the heat dissipation through hole; 33 is the operating disc; 4 is the guide frame; 41 is the guide panel; 42 is the support leg; and 43 is the guide hole. Detailed Implementation
[0020] The embodiments of this application will now be described in detail with reference to the accompanying drawings.
[0021] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0022] It should be noted that various aspects of embodiments within the scope of the appended claims are described below. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.
[0023] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.
[0024] Furthermore, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that the described aspects can be practiced without these specific details.
[0025] The technical solutions provided by the various embodiments of this application are described below with reference to the accompanying drawings.
[0026] like Figures 1-3 As shown, a tooling for assembling a semiconductor flow control component 1 is used for assembling the valve seat 11 of a two-valve three-way series flow control component 1, comprising: The support portion 2 has a support surface 22 formed thereon for placing the flow control component 1; The pressure rod 3 has its first end inserted into a preset position inside the valve body of the flow control component 1. The pressure rod 3 is used to connect with an external drive assembly. Under the action of the external drive assembly, the pressure rod 3 applies force in the direction close to the valve seat 11, pressing the side wall of the valve seat mounting groove inward to close the valve seat, causing the groove wall of the valve seat mounting groove to deform and tightly cover the valve seat 11.
[0027] The support unit 2 provides a stable support platform for the two-valve three-way flow control component 1 through its support surface 22, ensuring that the component remains in a fixed position during assembly. The design of the support surface 22 matches the shape of the flow control component 1 to prevent displacement or shaking during assembly, providing a basis for the precise operation of the subsequent pressure rod 3.
[0028] The first end of the pressure rod 3 extends into a preset position within the valve body of the flow control component 1, typically near the side wall of the valve seat mounting groove. When an external drive assembly (such as a cylinder, hydraulic device, or electric actuator) is activated, the pressure rod 3 moves axially towards the valve seat 11, its end directly acting on the side wall of the valve seat mounting groove. Through continuous application of force, the pressure rod 3 compresses the side wall metal material, causing it to undergo plastic deformation. Under the compression of the pressure rod 3, the side wall of the valve seat mounting groove gradually contracts inward (narrows), and the groove wall material tightly adheres to the outer surface of the valve seat 11 due to plastic deformation. This process, by controlling the stroke and pressure of the pressure rod 3, ensures that the groove wall deformation is uniform and controllable, ultimately achieving an interference fit between the valve seat 11 and the valve seat mounting groove, eliminating gaps and enhancing sealing.
[0029] The precise force applied by the pressure rod 3, combined with the stable support of the bearing part 2, ensures uniform deformation of the valve seat mounting groove, avoiding excessive local deformation or stress concentration. This controllable plastic deformation creates a tight mechanical connection between the valve seat 11 and the valve seat mounting groove, significantly improving sealing performance, effectively preventing fluid leakage, and meeting the high cleanliness and high reliability requirements of the semiconductor flow control component 1.
[0030] like Figures 4-5 As shown, in some embodiments, the first end of the pressure rod 3 is recessed inward and has a pressure groove 31, the inner wall of the pressure groove 31 having a pressing slope that matches the groove wall of the valve seat mounting groove.
[0031] The first end of the pressure rod 3 forms a recessed groove 31 that matches the shape of the valve seat mounting groove. When the pressure rod 3 extends into the valve body, the opening of the groove 31 first contacts the edge of the mounting groove, providing initial positioning and ensuring that the axis of the pressure rod 3 is aligned with the center line of the mounting groove. The depth and width of the groove 31 must be strictly matched with the dimensions of the mounting groove to prevent the pressure rod 3 from shifting or wobbling during assembly, thus ensuring that the extrusion ramp can accurately act on the target area. When the external drive component applies axial pressure, the recessed structure of the groove 31 gradually increases the contact area between the extrusion ramp and the side wall of the mounting groove. During the movement of the pressure rod 3, the contact area expands from the groove opening to the bottom of the groove, achieving progressive extrusion. This ensures uniform stress distribution while controlling the deformation rate, allowing the side wall of the mounting groove to contract slowly and steadily, ensuring that the valve seat 11 is uniformly covered.
[0032] The design of the groove 31 and the extrusion slope efficiently converts axial pressure into radial extrusion force, making the deformation of the side wall of the mounting groove controllable and uniform. The gap between the valve seat 11 and the mounting groove is precisely eliminated, and the sealing surface fit is improved, meeting the stringent requirements of semiconductor equipment for ultra-clean fluids.
[0033] like Figures 4-5 As shown, in some embodiments, the sidewall of the pressure groove 31 is configured as a trumpet shape with the inner diameter gradually decreasing from the outside to the inside. As the force of the external driving component increases, the pressure groove 31 covers the valve seat mounting groove and gradually squeezes its outer sidewall to fit against the outer sidewall of the valve seat 11.
[0034] The sidewall of the pressure groove 31 is flared (cone angle 60-80°), with a large outer diameter and a small inner diameter, forming a guide channel that gradually narrows from the outside to the inside. When the pressure rod 3 is pressed down, the outer edge of the flared opening first contacts the outer wall of the valve seat mounting groove. The large contact area disperses the initial pressure and avoids local stress concentration. As the pressure rod 3 goes deeper, the contact area between the sidewall of the flared opening and the mounting groove gradually decreases, and the pressure per unit area increases, achieving a gradual extrusion from the outside to the inside. This design makes the deformation process of the sidewall of the mounting groove slow and uniform, preventing the material from cracking or excessively deforming due to sudden stress. When the pressure rod 3 moves to the designed stroke, the inner edge of the flared opening squeezes the sidewall of the mounting groove to completely fit against the outer wall of the valve seat 11, forming an interference fit to ensure sealing.
[0035] It should be noted that the flare angle (60-80°) needs to be optimized based on the valve seat compression amount, the size of valve seat 11, and the depth of the pressure groove 31. If the angle is too small, it will result in excessive pressure in the initial stage of extrusion, which may easily damage the material; if the angle is too large, it may lead to uneven deformation due to insufficient contact area.
[0036] The outer wall thickness of the pressure groove 31 is 3-4mm, which needs to be adjusted according to the hardness of the valve body material and the thickness of the mounting groove wall. A thicker outer wall (e.g., 4mm) is suitable for high-hardness valve bodies (e.g., stainless steel), which can withstand greater extrusion pressure without plastic deformation, ensuring the structural stability of the pressure rod 3. A thinner outer wall (e.g., 3mm) is suitable for low-hardness valve bodies (e.g., aluminum alloy), which absorbs excess pressure through local elastic deformation, preventing the mounting groove sidewall from cracking due to excessive extrusion. The outer wall thickness must be coordinated with the mounting groove wall thickness to avoid incomplete closing due to insufficient rigidity of the pressure rod 3, or damage to the valve body due to excessive rigidity. The depth of the pressure groove 31 is greater than the valve seat closing stroke, ensuring that the pressure groove 31 can still completely cover the mounting groove when the pressure rod 3 moves to its maximum stroke.
[0037] like Figures 4-5 As shown, in some embodiments, the pressure rod 3 is provided with a heat dissipation through hole 32, which extends along the axial direction of the pressure rod 3 from the pressure groove 31 to the second end of the pressure rod 3. During the stamping process, the side wall of the pressure groove 31 of the pressure rod 3 and the side wall of the valve seat mounting groove undergo high-speed relative motion, generating a large amount of frictional heat. At the same time, some heat is also released during the plastic deformation of the material. The heat dissipation through hole 32 extends along the axial direction of the pressure rod 3 through the pressure groove 31 to the second end, forming a straight airflow channel. During stamping, the high-speed movement of the pressure rod 3 causes forced convection of air in the through hole, and heat flows with the airflow from the end of the pressure groove 31 (high temperature zone) to the second end (low temperature zone), accelerating heat dissipation.
[0038] like Figures 1-3 and Figures 6-7As shown, in some embodiments, the bearing portion 2 includes a bearing platform 21, on which an inclined bearing surface 22 is formed. A first limiting flange 23 extends upward from the lower end of the bearing surface 22. Second limiting flanges 24 extend upward from both sides of the bearing surface 22 and extend along the inclined direction of the bearing surface 22.
[0039] The bearing section 2, through the coordinated design of the inclined bearing surface 22, the first limiting flange 23, and the second limiting flange 24, achieves precise positioning, stable support, and anti-deviation protection for the flow control component 1. After the workpiece is placed on the bearing surface 22, it automatically slides to the lower end under the action of gravity until it contacts the first limiting flange 23, achieving automatic axial (length direction) positioning. The inclined surface causes the center of gravity of the workpiece to shift, generating a component force along the inclined surface, prompting the workpiece to automatically adjust its posture to ensure that its center line coincides with the center line of the bearing surface 22. At the same time, it can ensure the concentricity of the valve seat 11 and the valve body, reducing the need for manual adjustment. When the workpiece slides down under the action of gravity, the second limiting flanges 24 on both sides limit its lateral deviation through clearance fit, ensuring that the center line of the workpiece coincides with the center line of the bearing surface 22. During the stamping process, the second limiting flanges 24 form a mechanical barrier to prevent the workpiece from tipping over or sliding off the bearing surface 22 due to lateral forces (such as the eccentric extrusion of the pressure rod 3).
[0040] like Figures 1-3 and Figures 8-9 As shown, in some embodiments, the assembly tooling further includes a guide frame 4, which includes a guide panel 41 and a plurality of support legs 42 connected to the edge of the guide panel 41. The other ends of the plurality of support legs 42 are detachably connected to the bearing part 2 so that the guide panel 41 is located directly above the valve body of the flow control component 1. The guide panel 41 is provided with a guide hole 43 that matches the pressure rod 3 so as to guide the pressure rod 3 during the valve seat closing process.
[0041] The guide frame 4, consisting of a guide panel 41 and a support leg 42, provides high-precision guidance for the movement of the pressure rod 3 during the valve seat closing process. The guide panel 41 is horizontally positioned above the valve body, with a guide hole 43 in its central area matching the outer diameter of the pressure rod 3. The support leg 42 is vertically connected to the edge of the guide panel 41, and its other end is fixed to the bearing part 2 via a quick-release structure (such as a buckle, bolt, or locating pin), ensuring that the guide panel 41 and the valve body are in a fixed relative position. The support leg 42 suspends the guide panel 41 above the valve body, aligning the axis of the guide hole 43 with the center line of the valve seat mounting groove, providing a vertical guide reference for the pressure rod 3. After the pressure rod 3 passes through the guide hole 43, its radial freedom is completely restricted, allowing it to move only axially (vertically), preventing closing deviation caused by bending or vibration of the pressure rod 3.
[0042] like Figures 1-3 and Figures 6-9 As shown, in some embodiments, the bearing part 2 includes two support protrusions 25 on both sides of the bearing platform 21, and each of the support protrusions 25 has a positioning groove 26 formed at both ends. The guide frame 4 includes four support legs 42, and the guide frame 4 is fixed to the bearing part 2 by the four support legs 42 cooperating with the positioning grooves 26 one by one.
[0043] Each side of the support platform 21 has a supporting flange 25, and each supporting flange 25 has a positioning groove 26 at both ends. The guide frame 4 is provided with four supporting legs 42, which cooperate with the positioning grooves 26 on the supporting flanges 25 of the support part 2 to achieve a detachable and fixed connection between the guide frame 4 and the support part 2. This design allows the guide frame 4 to be stably installed on the support part 2, and the positioning effect of the positioning grooves 26 ensures that the installation position of the guide frame 4 on the support part 2 is accurate and reliable. During installation, the four supporting legs 42 of the guide frame 4 are respectively placed into the positioning grooves 26 at both ends of the supporting flanges 25 of the support part 2. Since the shape and size of the positioning grooves 26 match the supporting legs 42, they can restrict the horizontal movement of the guide frame 4, ensuring that the guide frame 4 is fixed in position on the support part 2, thereby positioning the guide panel 41 directly above the valve body of the flow control component 1, providing an accurate positional basis for subsequent guiding work.
[0044] The guide frame 4 and the support part 2 are stably connected by the one-to-one engagement of the four support legs 42 with the positioning grooves 26 on the support protrusion 25 of the bearing part 2. This connection method is not only simple in structure, but also able to withstand a certain amount of external force, ensuring that the guide frame 4 will not loosen or shift during the valve seat closing process. This ensures that the guide panel 41 is always kept directly above the valve body of the flow control component 1, providing a reliable foundation for the accurate guidance of the pressure rod 3. The design of the positioning grooves 26 makes the installation position of the guide frame 4 unique and accurate, reducing the debugging time during the installation process and improving assembly efficiency.
[0045] like Figures 1-3 and Figures 6-9 As shown, in some embodiments, the positioning groove 26 is L-shaped with an outward opening, having a vertical guide surface 261 on the inner side and a horizontal guide surface 262 on the outer side to accommodate the corresponding support leg 42.
[0046] When assembling the guide frame 4 with the support part 2, as the support leg 42 of the guide frame 4 approaches the positioning groove 26 vertically from top to bottom, the support leg 42 first contacts the vertical guide surface 261 inside the positioning groove 26. The vertical guide surface 261 provides a precise vertical guide channel for the support leg 42. Due to the constraint of the vertical guide surface 261, the support leg 42 can maintain a relatively stable linear movement in the vertical direction without significant tilting or swaying, ensuring the accuracy and stability of the support leg 42 in the initial descent phase. As the support leg 42 continues to move downward along the vertical guide surface 261 for a certain distance, the support leg 42 contacts the transverse guide surface 262 outside the positioning groove 26. The transverse guide surface 262 and the vertical guide surface 261 together constrain the support leg 42. The transverse guide surface 262 restricts the horizontal movement of the support leg 42, preventing horizontal deviation during the continued descent; while the vertical guide surface 261 continues to ensure the stable descent of the support leg 42 in the vertical direction. Under the combined action of the horizontal guide surface 262 and the vertical guide surface 261, the support leg 42 is precisely positioned in the positioning groove 26 and finally reaches the appropriate position, realizing a stable connection between the guide frame 4 and the load-bearing part 2.
[0047] like Figures 1-5 As shown, in some embodiments, the second end of the pressure rod 3 extends outward to form an operating disc 33, and the heat dissipation through hole 32 is provided through the operating disc 33. The operating disc 33 is located above the guide panel 41 and the diameter of the operating disc 33 is larger than the diameter of the guide hole 43. During the valve seat closing process, the movement stroke of the pressure rod 3 is limited by the contact state between the operating disc 33 and the guide panel 41.
[0048] The operating disc 33 is located above the guide panel 41, and its diameter is larger than that of the guide hole 43. During the valve seat closing process, the pressure rod 3 moves downward along the guide hole 43. When the pressure rod 3 reaches a certain position, the operating disc 33 contacts and abuts against the guide panel 41, preventing the pressure rod 3 from moving further downward. The contact state between the operating disc 33 and the guide panel 41 effectively limits the movement of the pressure rod 3, preventing excessive downward pressure that could damage the valve seat 11 or affect the closing quality. By limiting the movement of the pressure rod 3 through the contact between the operating disc 33 and the guide panel 41, the movement of the pressure rod 3 can be precisely controlled, ensuring that the pressure and stamping depth applied by the pressure rod 3 to the valve seat 11 are within a suitable range during the valve seat closing process. This guarantees the dimensional accuracy and quality stability of the valve seat closing, avoiding unqualified valve seat closing problems caused by excessive or insufficient movement of the pressure rod 3. At the same time, the operating disc 33 also facilitates the application of force. The external drive component can apply force to the operating disc 33 to realize the movement of the pressure rod 3.
[0049] It should be noted that the length of the pressure rod 3 is designed so that the distance above the guide panel 41 is the same as the valve seat retraction stroke. The movement of the pressure rod 3 is restricted by the contact between the operating disc 33 and the guide panel 41, preventing the bottom wall of the pressure groove 31 from contacting the valve body surface and causing damage to the valve body.
[0050] like Figures 1-3 and Figure 6 As shown, in some embodiments, the bottom of the support platform 21 extends in a direction away from the support surface 22 to form a mounting rail 27, which engages with the groove of the external mounting platform to fix the assembly tooling.
[0051] The way the mounting guide rail 27 engages with the groove makes the installation process simpler and more intuitive. Operators do not need to perform complex positioning and adjustment operations; they only need to align the mounting guide rail 27 with the groove and push it in to complete the initial installation, greatly shortening installation time and improving efficiency. The precise fit between the mounting guide rail 27 and the groove helps ensure the flatness of the assembly tooling. When the mounting guide rail 27 is fully embedded in the groove, because the external mounting platform where the groove is located has certain flatness requirements, the tight fit between the mounting guide rail 27 and the groove allows the bearing platform 21 to be positioned with the plane of the groove as a reference. The bearing surface 22 of the bearing platform 21 can remain on a relatively flat plane, preventing tilting or unevenness of the bearing surface 22 due to shaking or deviation during installation, thus ensuring the flatness of the assembly tooling.
[0052] The same or similar parts between the various embodiments in this specification can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. In particular, the method embodiments described later are relatively simple in description since they correspond to the system, and relevant parts can be referred to the descriptions in the system embodiments.
[0053] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.
Claims
1. A tooling for assembling semiconductor flow control components, characterized in that, Valve seat assembly for two-valve three-way flow control components, including: The support portion has a support surface formed thereon for placing the flow control component; A pressure rod, the first end of which extends into a preset position within the valve body of the flow control component, is used to connect with an external drive assembly. Under the action of the external drive assembly, the pressure rod applies force in the direction close to the valve seat, squeezing the side wall of the valve seat mounting groove inward to close the valve seat, causing the groove wall of the valve seat mounting groove to deform and tightly cover the valve seat.
2. The tooling for assembling semiconductor flow control components according to claim 1, characterized in that, The first end of the pressure rod is recessed inward and has a pressure groove. The inner wall of the pressure groove has a pressing slope that matches the groove wall of the valve seat mounting groove.
3. The tooling for assembling semiconductor flow control components according to claim 2, characterized in that, The sidewall of the pressure groove is configured as a funnel shape with the inner diameter gradually decreasing from the outside to the inside. As the force of the external driving component increases, the pressure groove covers the valve seat mounting groove and gradually squeezes its outer sidewall to fit against the outer sidewall of the valve seat.
4. The tooling for assembling semiconductor flow control components according to claim 2, characterized in that, The pressure rod has a heat dissipation through hole, which extends along the axial direction of the pressure rod from the pressure groove to the second end of the pressure rod.
5. The tooling for assembling semiconductor flow control components according to any one of claims 1-4, characterized in that, The bearing part includes a bearing platform, on which an inclined bearing surface is formed, and a first limiting flange extends upward from the lower end of the bearing surface. Both sides of the bearing surface extend upward to form a second limiting protrusion, which extends along the inclined direction of the bearing surface.
6. The tooling for assembling semiconductor flow control components according to claim 5, characterized in that, The assembly tooling also includes a guide frame, which includes a guide panel and multiple support legs connected to the edge of the guide panel. The other ends of the multiple support legs are detachably connected to the bearing portion so that the guide panel is located directly above the valve body of the flow control component. The guide panel is provided with a guide hole that matches the pressure rod to guide the movement of the pressure rod during the valve seat closing process.
7. The tooling for assembling semiconductor flow control components according to claim 6, characterized in that, The bearing portion includes two supporting protrusions on both sides of the bearing platform, and each supporting protrusion has a positioning groove formed at both ends. The guide frame includes four supporting legs, and the guide frame is fixed to the bearing portion by the four supporting legs cooperating with the positioning grooves one by one.
8. The tooling for assembling semiconductor flow control components according to claim 7, characterized in that, The positioning groove is L-shaped with an outward opening, and has a vertical guide surface on the inner side and a horizontal guide surface on the outer side to accommodate the corresponding support leg.
9. The tooling for assembling semiconductor flow control components according to claim 6, characterized in that, The second end of the pressure rod extends outward to form an operating disc, and the heat dissipation through hole is provided through the operating disc. The operating disc is located above the guide panel and the diameter of the operating disc is larger than the diameter of the guide hole. During the valve seat closing process, the movement stroke of the pressure rod is limited by the contact state between the operating disc and the guide panel.
10. The tooling for assembling semiconductor flow control components according to claim 5, characterized in that, The bottom of the support platform extends away from the support surface to form a mounting guide rail, which mates with the groove of the external mounting platform to fix the assembly tooling.