An industrial energy-saving air conditioner temperature and humidity high-precision regulation method and system

Abstract

This invention discloses a method and system for high-precision temperature and humidity regulation in industrial energy-saving air conditioning, relating to the field of high-precision temperature and humidity regulation in industrial energy-saving air conditioning. It is used for temperature and humidity regulation in industrial environments with localized heat loads, including: acquiring operating status information of heat source equipment and estimating a first heat load intensity based on the operating status information; identifying environmental parameter collection points related to the first heat load intensity based on the first heat load intensity; delineating the boundary of a first control area based on the environmental parameter data collected by the environmental parameter collection points and a preset threshold; and executing an independent regulation strategy for the first control area. The regulation strategy is used to adjust the environmental parameters of the first control area and to perform compensatory regulation on adjacent areas.

Description

Technical Field

[0001] This invention relates to the field of high-precision temperature and humidity regulation in industrial energy-saving air conditioning, and particularly to a method and system for high-precision temperature and humidity regulation in industrial energy-saving air conditioning. Background Technology

[0002] In modern industrial production, especially in precision manufacturing workshops with extremely high requirements for temperature and humidity, maintaining precise environmental conditions is crucial to ensuring stable equipment operation and product quality. Traditional industrial energy-saving air conditioning systems typically collect environmental data through evenly distributed sensors and adjust based on overall average values.

[0003] However, when intermittent, localized strong heat sources appear in the workshop, such as when a new online wafer defect inspection device is activated, traditional systems struggle to effectively identify and handle these localized anomalies. The controller averages the high readings of a few sensors with the normal readings of the majority, leading to a misjudgment of the average temperature of the entire area and subsequently issuing global adjustment commands. This non-targeted cooling measure has limited effectiveness in hot spots, while potentially causing overcooling and humidity spikes in other normal areas, ultimately resulting in a sharp increase in system energy consumption and an inability to achieve high-precision temperature and humidity control. Summary of the Invention

[0004] This application discloses a method and system for high-precision temperature and humidity regulation of industrial energy-saving air conditioning, which aims to solve the problem that existing industrial energy-saving air conditioning systems cannot achieve high-precision temperature and humidity regulation when facing local sudden strong heat sources, resulting in local overcooling, high humidity and soaring energy consumption.

[0005] In a first aspect, in order to solve the above-mentioned technical problems, the present invention provides a method for high-precision temperature and humidity regulation of industrial energy-saving air conditioning, comprising: acquiring the operating status information of heat source equipment, and estimating the first heat load intensity based on the operating status information; Based on the first heat load intensity, identify the environmental parameter collection points related to the first heat load intensity; Based on the environmental parameter data collected from the environmental parameter collection points and the preset thresholds, the boundary of the first control area is delineated; An independent adjustment strategy is implemented for the first control region; the adjustment strategy is used to adjust the environmental parameters of the first control region and to perform compensatory adjustments to adjacent regions.

[0006] Through this technical solution, this application can accurately identify and independently adjust local heat load areas, avoiding local overcooling, high humidity and energy waste caused by traditional global adjustment strategies, thereby achieving high-precision control and energy-saving operation of temperature and humidity in industrial environments.

[0007] Furthermore, the method also includes: Pre-store the location, dimensions, and thermophysical parameters of high-heat-capacity structures within the workshop; Identify environmental parameter collection points near high heat capacity structures; Temperature readings at environmental parameter collection points near the high heat capacity structure, which are related to the first heat load intensity, are corrected to obtain environmental parameter data, in order to offset the hysteresis effect of the high heat capacity structure on the response of the environmental parameter collection points.

[0008] This technical solution effectively eliminates the hysteresis effect of high heat capacity structures on temperature measurement, improves the accuracy of environmental parameter acquisition, and provides a more reliable data foundation for subsequent precise adjustment.

[0009] Based on the above, this application further proposes to delineate the boundary of the first control area according to the environmental parameter data collected by environmental parameter collection points and preset thresholds, including: Several candidate environmental parameter collection points are selected from the environmental parameter collection points related to the first heat load intensity; the difference between the environmental parameter data collected by the candidate environmental parameter collection points and the standard environmental parameter data is greater than a preset threshold. Connect the coverage areas of each candidate environmental parameter collection point, and delineate the corresponding connected areas as the boundary of the first control area.

[0010] Through this technical solution, this application can dynamically and accurately delineate the boundaries of local heat load areas based on deviations in actual environmental parameters, ensuring the pertinence and effectiveness of the adjustment strategy.

[0011] Furthermore, this application also proposes identifying environmental parameter collection points related to the first heat load intensity based on the first heat load intensity, including: Determine the relevant distances between the heat source equipment and the environmental parameter collection points; Based on the first heat load intensity and the first mapping relationship, determine the target-related distance; Environmental parameter collection points with a correlation distance smaller than the target correlation distance are identified as environmental parameter collection points related to the first heat load intensity.

[0012] Through this technical solution, this application can intelligently identify the environmental parameter collection points most significantly affected by the actual heat load intensity of the heat source equipment, thereby accurately locating the heat load area and improving the response speed and accuracy of regulation.

[0013] In some preferred embodiments, an independent regulation strategy is implemented for the first control region, including: If the first control area meets the first condition, then add the corresponding electrically adjustable air valve for the first control area; the first condition is T_local>T_setpoint+0.1, and the humidity of the first control area is within the preset range; T_local is the temperature of the first control area; T_setpoint is the set temperature; If the first control area meets the second condition, the cooling air supply will be increased and local dehumidification will be performed; the second condition is T_local>T_setpoint+0.1 and H_local>H_setpoint+2%; H_local is the humidity of the first control area; H_setpoint is the set humidity.

[0014] Through this technical solution, this application can take differentiated and fine adjustment measures according to the specific temperature and humidity conditions of the local area, avoiding over-adjustment or under-adjustment, and achieving precise control of temperature and humidity.

[0015] As a technological improvement, the method also includes: Inside the workshop, multi-wavelength laser tracking and differential interferometry units are deployed on the critical optical paths of the optical alignment fixture. Real-time acquisition of optical path difference data from the multi-wavelength laser tracking and differential interferometry unit; Calculate the air refractive index at each wavelength based on the optical path difference data and the known optical path length; The calculated air refractive index at each wavelength is compared with the preset reference refractive index to calculate the real-time deviation of the refractive index. By combining the changes in refractive index at different wavelengths, the dispersive properties of air are evaluated, and short-term predictions are made on the future trend of refractive index changes. Based on the real-time deviation and prediction results of the refractive index, compensation instructions are generated for the optical alignment fixture. The position or angle of the optical elements inside the optical alignment fixture is finely adjusted by the compensation command to counteract the deviation of the optical path caused by the fluctuation of the air refractive index.

[0016] Through this technical solution, this application can effectively offset the impact of environmental fluctuations on precision optical systems by real-time monitoring and prediction of changes in air refractive index and active compensation for optical alignment fixtures, thereby greatly improving the stability of high-precision processes such as photolithography.

[0017] Building upon the above, this application further proposes, within the workshop, the deployment of multi-wavelength laser tracking and differential interferometry units along the critical optical path of the optical alignment fixture, including: Displacement and temperature sensors are added to the mounting base and optical component support of the multi-wavelength laser tracking and differential interferometry measurement unit. Pre-store the coefficient of thermal expansion of the materials used for the mounting base and optical component bracket; The temperature sensor readings are collected in real time, and the theoretical deformation of the mounting base and optical component support due to temperature changes is calculated by combining the coefficient of thermal expansion. The real-time deformation data of the displacement sensor is fused with the theoretical deformation to obtain the corrected physical optical path length. When calculating the air refractive index at each wavelength based on the optical path difference data, the corrected physical optical path length is used.

[0018] Through this technical solution, this application can accurately correct the physical optical path length by taking into account the thermal deformation of the mounting base and optical element support, further improving the accuracy of air refractive index calculation, thereby making optical alignment compensation more precise and effective.

[0019] Preferably, the refractive index of air satisfies the following relationship: n_λ=1+(ΔL_λ / L); Where n_λ is the air refractive index, ΔL_λ is the optical path difference corresponding to wavelength λ, and L is the physical path length of the laser propagating in the air.

[0020] This technical solution provides a clear formula for calculating the air refractive index, ensuring the accuracy and consistency of the calculation and providing a reliable mathematical basis for subsequent refractive index deviation assessment and compensation instruction generation.

[0021] In one implementation, the operating status information includes a start signal and current power.

[0022] Through this technical solution, this application is able to obtain key operating parameters of heat source equipment, providing direct and effective data support for accurately estimating heat load intensity.

[0023] Secondly, this application also discloses an industrial energy-saving air conditioning system with high-precision temperature and humidity control, used for temperature and humidity control in industrial environments with localized heat loads. The system includes: The information acquisition module is used to acquire the operating status information of the heat source equipment and estimate the first heat load intensity based on the operating status information; The data collection point identification module is used to identify environmental parameter collection points related to the first heat load intensity based on the first heat load intensity. The area delineation module is used to delineate the boundary of the first control area based on the environmental parameter data collected by the environmental parameter collection points and the preset threshold. The processing module is used to execute an independent adjustment strategy for the first control area; the adjustment strategy is used to adjust the environmental parameters of the first control area and to perform compensatory adjustments to adjacent areas.

[0024] This application provides a system that can accurately identify, delineate, and independently adjust local heat loads, effectively solving the problems of insufficient temperature and humidity control accuracy and excessive energy consumption in traditional systems in complex industrial environments.

[0025] Beneficial Effects: The industrial energy-saving air conditioning method for high-precision temperature and humidity regulation disclosed in this application can accurately identify environmental parameter collection points related to the heat load intensity by acquiring the operating status information of the heat source equipment and estimating the first heat load intensity. Based on this, the boundary of the first control area is dynamically delineated according to the collected environmental parameter data and preset thresholds, thereby separating the local heat load area from the overall environment. For this first control area, this application implements an independent regulation strategy, which can not only accurately adjust the temperature and humidity environmental parameters of this area, but also compensate for adjacent areas to avoid negative impacts on the surrounding environment due to local adjustments.

[0026] Through the above technical solution, this application effectively solves the problem of localized temperature and humidity malfunction caused by the use of a global average control strategy in existing industrial air conditioning systems when facing sudden, intense heat sources. Specifically, traditional methods average the temperature of localized high-temperature areas with the temperature of most normal areas, resulting in poor cooling of hot spots while causing overcooling and humidity spikes in other normal areas. This application avoids this misjudgment of "averaging" through precise identification and independent local adjustment, ensuring that the temperature of hot spots can be effectively controlled within the set range, while preventing overcooling and high humidity in other areas. Accordingly, this application not only significantly improves the accuracy of temperature and humidity control in industrial environments, especially in complex scenarios with localized heat loads, but also greatly reduces system energy consumption by avoiding ineffective global adjustments, achieving the dual goals of energy saving and high-precision control. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of a method for high-precision temperature and humidity regulation in industrial energy-saving air conditioning provided in an embodiment of the present invention; Figure 2 This is a schematic diagram of another industrial energy-saving air conditioning temperature and humidity high-precision adjustment method provided by an embodiment of the present invention; Figure 3 This is a schematic diagram of a high-precision temperature and humidity control system for industrial energy-saving air conditioning provided in an embodiment of the present invention. Detailed Implementation

[0028] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are merely some embodiments of this application, and not all embodiments. The components of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0029] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the description of this application, terms such as "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0030] The following specific embodiments will provide a detailed introduction and explanation of the high-precision temperature and humidity adjustment method for industrial energy-saving air conditioning provided in this application.

[0031] Reference Figure 1 This invention provides a method for high-precision temperature and humidity regulation in industrial energy-saving air conditioning, comprising the following steps: S1: Obtain the operating status information of the heat source equipment, and estimate the first heat load intensity based on the operating status information.

[0032] The operating status information includes the equipment's start-up signal and current power. The first heat load intensity represents the degree of heat impact that the heat source equipment generates on the surrounding environment under its current operating condition.

[0033] As one possible implementation, the first heat load intensity can be obtained by querying a pre-established mapping table between equipment power and heat load intensity when a start signal is present.

[0034] S2. Based on the first heat load intensity, identify the environmental parameter collection points related to the first heat load intensity.

[0035] Environmental parameter acquisition points typically refer to various sensors deployed in industrial environments to monitor environmental parameters such as temperature and humidity in real time. Identifying these acquisition points aims to determine which sensor data accurately reflects the impact of localized heat load.

[0036] As one possible approach, the relevant distance between the heat source device and the environmental parameter collection point can be determined; based on the first heat load intensity and the first mapping relationship, the target relevant distance can be determined; and environmental parameter collection points whose relevant distance is less than the target relevant distance can be determined as environmental parameter collection points related to the first heat load intensity.

[0037] S3. Determine the boundary of the first control area based on the environmental parameter data collected by the environmental parameter collection points and the preset threshold.

[0038] The environmental parameter data includes real-time monitoring values ​​for temperature, humidity, and other parameters at the collection points. Preset thresholds are standards used to determine whether environmental parameters deviate from normal ranges. For example, if the temperature reading at a collection point exceeds the set temperature by 0.5 degrees Celsius, the environmental parameters of that area can be considered abnormal. Defining the boundary of the first control area means identifying a local area that requires independent temperature and humidity regulation.

[0039] As one possible implementation, several candidate environmental parameter collection points are selected from the environmental parameter collection points related to the first heat load intensity; and the coverage area of ​​each candidate environmental parameter collection point is connected, and the connected corresponding area is defined as the boundary of the first control area.

[0040] Among them, the difference between the environmental parameter data collected at the candidate environmental parameter collection points and the standard environmental parameter data is greater than the preset threshold.

[0041] The standard environmental parameter data can be understood as the ideal temperature and humidity conditions expected to be achieved in an industrial environment. For example, for a lithography workshop, the temperature might be set at 22℃±0.1℃ and the humidity at 45%±2%. The preset threshold is an allowable range of deviation. For example, if the temperature deviation exceeds 0.5℃ or the humidity deviation exceeds 3%, the environmental parameters of that area are considered to be seriously deviated.

[0042] The coverage area of ​​environmental parameter collection points can be predefined, such as a certain radius range centered on the collection point, or it can be dynamically calculated based on an airflow model. When the coverage areas of multiple candidate environmental parameter collection points overlap or are adjacent in space, these areas are considered connected. Therefore, by integrating these connected coverage areas, the boundaries of one or more first control areas can be delineated. This method ensures that the delineated control areas accurately encompass the local extent of all environmental parameter anomalies.

[0043] In some embodiments, a rectangular or circular region that can encompass all abnormal collection points can be dynamically generated as the first control region based on the distribution of heat load intensity and environmental parameter data through clustering algorithms or spatial interpolation methods.

[0044] Thus, by first screening candidate environmental parameter collection points whose environmental parameters deviate from preset thresholds, it is ensured that only truly localized areas requiring adjustment are considered. Subsequently, by connecting the coverage areas of these candidate collection points, continuous areas formed by multiple local anomalies that require unified management and adjustment can be effectively identified. This area delineation method based on actual environmental parameter deviations and spatial connectivity allows the boundary of the first control area to dynamically and accurately reflect the actual temperature and humidity anomaly range under the influence of heat load, avoiding extensive adjustments to the entire workshop and thus improving the targeting and efficiency of the adjustment.

[0045] S4. For the first control region, implement an independent adjustment strategy.

[0046] The adjustment strategy is used to adjust the environmental parameters of the first control area and to make compensatory adjustments to adjacent areas. An independent adjustment strategy means that instead of using a global average approach, it targets local hotspots with precise intervention.

[0047] For example, if the temperature in the first control zone is too high, the adjustment strategy can instruct the corresponding local air outlet to increase the amount of cold air, or activate the dedicated local cooling unit for that zone. Simultaneously, to avoid negative impacts on adjacent zones (such as overcooling or humidity fluctuations) from local adjustments, compensatory adjustments are also needed for these adjacent zones. Compensatory adjustments can be made by fine-tuning the airflow and temperature setpoints of adjacent zones, or by using local humidification / dehumidification to offset the effects of adjustments in the first control zone. For instance, when a large amount of cold air is supplied to the first control zone, adjacent zones at its boundary may experience a temperature drop due to the overflow of cold air. In this case, compensatory adjustments can appropriately reduce the cold air supply to adjacent zones or provide local heating to maintain stable environmental parameters.

[0048] The proposed method for high-precision temperature and humidity control in industrial energy-saving air conditioning, by meticulously acquiring the operating status information of heat source equipment and estimating the first heat load intensity, accurately identifies local heat sources and their influence range. Based on this, it further identifies environmental parameter collection points related to the first heat load intensity, ensuring that subsequent data collection and area delineation are targeted. By delineating the boundary of the first control area based on the collected environmental parameter data and preset thresholds, this method can accurately define the scope requiring local intervention, avoiding the resource waste and negative impacts of global adjustment in traditional methods. Finally, an independent adjustment strategy is implemented for the first control area, and compensatory adjustments are made to adjacent areas, achieving high-precision temperature and humidity control in the local heat load area while maintaining overall environmental stability.

[0049] Compared with existing technologies, the core innovation of this application lies in its accurate identification and refined control of local heat loads. Traditional industrial air conditioning systems often use global averaging or weighted averaging methods to assess and adjust environmental parameters. When intermittent, localized strong heat sources occur, this method is prone to misjudgment and ineffective adjustment. For example, when introducing new online wafer defect detection equipment in a lithography workshop, the huge localized heat generated intermittently can cause traditional systems to average the high readings of a few sensors with the normal readings of most sensors, resulting in an erroneous judgment that the average temperature of the entire clean area has slightly increased. Based on this, the system will issue a global cooling command, resulting in poor cooling of hot spots, while other normal areas experience overcooling and humidity spikes.

[0050] This application introduces the step of "acquiring the operating status information of the heat source equipment and estimating the first heat load intensity based on the operating status information," enabling proactive perception and quantification of the impact of local heat sources, rather than passively waiting for sensor data feedback. This allows the system to identify potential local heat load areas earlier and more accurately. Furthermore, the steps of "identifying environmental parameter acquisition points related to the first heat load intensity" and "delineating the boundary of the first control area based on the environmental parameter data collected from the acquisition points and preset thresholds" ensure that the delineation of the control area is dynamic and precise, accurately encompassing the area affected by the local heat load. This contrasts sharply with existing technologies that use preset fixed areas or rely on overall average values ​​for judgment.

[0051] Most importantly, the step of "implementing an independent adjustment strategy for the first control area; the adjustment strategy is used to adjust the environmental parameters of the first control area and to make compensatory adjustments to adjacent areas" completely changes the traditional system's global, non-targeted adjustment mode. By independently and customizing the temperature and humidity adjustment of local hotspots, this method can efficiently solve the problem of local overheating or overhumidity. At the same time, by making compensatory adjustments to adjacent areas, it effectively avoids the disruption of overall environmental stability caused by local intervention. This refined and regionalized control strategy not only significantly improves the accuracy of temperature and humidity adjustment and avoids problems such as local overcooling and high humidity, but also greatly reduces system energy consumption by avoiding unnecessary cooling of the entire workshop, achieving true industrial energy conservation. Therefore, this application demonstrates significant technological progress and practical value in solving the temperature and humidity control problem caused by local heat loads.

[0052] In some embodiments of this application, by acquiring the operating status information of the heat source equipment and estimating the first heat load intensity, environmental parameter acquisition points related to the first heat load intensity are identified. Based on the environmental parameter data collected by the acquisition points and preset thresholds, the boundary of the first control area is delineated, and finally, an independent adjustment strategy is executed for the first control area. However, in actual industrial environments, workshops may contain a large number of high heat capacity structures, such as large production equipment, thick walls, or storage tanks. Due to their large thermal inertia, these high heat capacity structures exhibit a certain lag in their temperature response when the ambient temperature changes. This results in the temperature readings obtained from environmental parameter acquisition points near these structures not reflecting the true local ambient temperature in a timely and accurate manner. If the above problem is not addressed, adjustments based on these lag-effect temperature data may lead to untimely or excessive adjustments in the control system's response to the local heat load, thereby affecting the accuracy and efficiency of temperature and humidity regulation.

[0053] In response, one possible design is as follows: Figure 2 As shown, this application may also include the following steps: S101. Pre-store the location, dimensions, and thermophysical parameters of high heat capacity structures within the workshop.

[0054] Specifically, pre-storing the location, dimensions, and thermophysical parameters of high-heat-capacity structures within the workshop refers to the detailed physical information collection and modeling of all structures with significant heat capacity characteristics within the workshop before the system is put into operation. High-heat-capacity structures can be understood as objects capable of absorbing or releasing large amounts of heat energy within a certain temperature range, such as large production equipment, concrete columns, thick walls, and liquid storage tanks. Their location information can be precisely recorded using a coordinate system, and their dimensions include geometric parameters such as length, width, height, or volume. Thermophysical parameters encompass the material's specific heat capacity, density, and thermal conductivity, which are fundamental for calculating the structure's thermal inertia and thermal response characteristics. The purpose is to provide necessary basic data for subsequent environmental parameter correction.

[0055] S102. Identify environmental parameter collection points near high heat capacity structures.

[0056] For example, a distance threshold can be set, and any environmental parameter collection point whose distance from the edge of the high heat capacity structure is less than this threshold is identified as an environmental parameter collection point close to the high heat capacity structure. The purpose is to accurately locate the sensors that need data correction and avoid unnecessary processing of unaffected sensors.

[0057] S103. Correct the temperature readings of environmental parameter collection points near the high heat capacity structure among the environmental parameter collection points related to the first heat load intensity to obtain environmental parameter data, so as to offset the hysteresis effect of the high heat capacity structure on the response of the environmental parameter collection points.

[0058] Specifically, pre-stored thermophysical parameters, location, and dimensions of the high-heat-capacity structure, along with real-time readings from environmental parameter acquisition points, can be used in conjunction with heat conduction models or empirical formulas to correct affected temperature readings. For example, a dynamic thermal model can be established to simulate the heat absorption and release process of the high-heat-capacity structure under current environmental conditions and predict its impact on the surrounding air temperature. This allows for the calculation of the deviation at environmental parameter acquisition points caused by the hysteresis effect of the high-heat-capacity structure, which can then be subtracted from or compensated for in the original temperature readings, resulting in corrected data that more closely approximates the actual environmental temperature. The aim is to eliminate or significantly reduce the hysteresis effect of the high-heat-capacity structure on the response of environmental parameter acquisition points, ensuring that subsequent adjustment strategies are based on more accurate environmental data.

[0059] This application's solution provides the system with a deeper understanding of the workshop's thermal environment by pre-storing the location, dimensions, and thermophysical parameters of high-heat-capacity structures within the workshop. Based on this information, the system can accurately identify which environmental parameter collection points may be affected by the thermal hysteresis effect of the high-heat-capacity structures. Subsequently, by correcting the temperature readings of these affected environmental parameter collection points, the system can effectively counteract the hysteresis effect of the high-heat-capacity structures on the sensor response. Specifically, when a high-heat-capacity structure absorbs or releases heat, the change in the surrounding air temperature lags behind the actual change in heat load. Through correction, the system can adjust the sensor readings to be closer to the actual instantaneous air temperature, thereby avoiding misjudgments caused by data lag. Therefore, the adjustment strategy can make decisions based on more accurate and real-time environmental parameter data, ensuring more precise and timely adjustments to the environmental parameters of the first control area and compensatory adjustments to adjacent areas.

[0060] Through the above technical solution, this application effectively solves the problem of inaccurate environmental parameter data collection points caused by the thermal hysteresis effect of high heat capacity structures in traditional methods. By correcting the temperature readings, the environmental parameter data acquired by the system can more realistically reflect the actual local environmental conditions, significantly improving the accuracy and real-time performance of the environmental parameter data. This allows subsequent adjustment strategies to be based on more reliable data, thereby avoiding untimely or over-adjustment due to data lag, ultimately achieving higher precision and better efficiency in temperature and humidity regulation of industrial energy-saving air conditioning.

[0061] In some preferred embodiments, it is assumed that a large etching device exists in a manufacturing workshop, its casing constructed of a thick metal material with significantly high heat capacity. The location, size, and thermophysical parameters of the etching device, such as the specific heat capacity and density of its metal material, are pre-stored in the control system. When the system estimates a first heat load intensity near the etching device, it identifies environmental parameter collection points related to this heat load intensity. Further, based on a preset distance threshold, the system identifies three environmental parameter collection points close to the etching device. At this point, the control system uses the stored thermophysical parameters of the etching device, combined with the real-time temperature readings of these three environmental parameter collection points, to calculate the temperature deviation caused by the thermal hysteresis effect of the etching device using a built-in thermal model. For example, when the etching device just starts operating and releases a large amount of heat, the temperature readings of the environmental parameter collection points may not have fully risen to the true value; the system will calculate a positive compensation value and add it to the original reading. Conversely, when the device stops operating and begins to cool, the sensor readings may still be too high; the system will calculate a negative compensation value. In this way, the temperature readings at the environmental parameter acquisition points are corrected, resulting in more accurate environmental parameter data. This corrected data is then used to delineate the boundaries of the first control area and implement independent adjustment strategies, thereby ensuring that the temperature and humidity regulation of the area surrounding the etching equipment can respond promptly and accurately to actual heat load changes, avoiding adjustment deviations caused by sensor lag.

[0062] In some embodiments described above, an independent adjustment strategy is implemented for the first control area. However, in actual implementation, if the adjustment strategy lacks sufficient precision and specificity, it may not be able to efficiently and accurately cope with the complex changes in temperature and humidity parameters within a local area. For example, when both temperature and humidity deviate from the set values, a single adjustment method may not be able to simultaneously meet the rapid recovery of both parameters; and when only the temperature is slightly high, adopting an over-cooling and dehumidifying strategy may cause unnecessary energy waste. If the above problems are not addressed, it may lead to insufficient temperature and humidity regulation accuracy, affecting the stability of the industrial production environment and increasing operating energy consumption.

[0063] In response, this application further proposes implementing an independent regulation strategy for the aforementioned first control region, including: S201. If the first control area meets the first condition, then add an electrically adjustable air valve corresponding to the first control area.

[0064] The first condition is that T_local > T_setpoint + 0.1, and the humidity of the first control area is within the preset range; T_local is the temperature of the first control area; and T_setpoint is the set temperature.

[0065] S202. If the first control area meets the second condition, the cooling air supply is increased and local dehumidification is performed.

[0066] The second condition is that T_local > T_setpoint + 0.1 and H_local > H_setpoint + 2%; H_local is the humidity of the first control area; H_setpoint is the set humidity.

[0067] Specifically, the first condition refers to the situation where the local temperature T_local of the first control area is more than 0.1 degrees Celsius higher than the set temperature T_setpoint, and the humidity H_local of that area is within a preset humidity range. T_local can be obtained through real-time monitoring and calculation of temperature data collected from environmental parameter acquisition points within the first control area, while T_setpoint is a target temperature value preset according to industrial production needs. The preset range can be set according to specific industrial environmental requirements; for example, for some humidity-sensitive production environments, this range may be very narrow. When the first condition is met, the system will increase the opening degree of the electrically adjustable damper corresponding to the first control area. An electrically adjustable damper is a device that adjusts the airflow through electric drive; increasing its opening degree means delivering more air conditioning air to the first control area, thereby enhancing the local area's heat dissipation and temperature regulation capabilities.

[0068] Furthermore, the second condition refers to the situation where the local temperature T_local of the first control area is more than 0.1 degrees Celsius higher than the set temperature T_setpoint, and the local humidity H_local of that area is more than 2% higher than the set humidity H_setpoint. H_local can be obtained through real-time monitoring and calculation of humidity data collected from environmental parameter acquisition points within the first control area, while H_setpoint is a target humidity value preset according to industrial production needs. When the second condition is met, the system will increase the cooling air delivery volume and perform local dehumidification. Increasing the cooling air delivery volume aims to quickly reduce the temperature of the first control area, while local dehumidification reduces the air humidity in that area through dedicated dehumidification equipment or by adjusting the operating mode of the air conditioning system. For example, this can be achieved by turning on a local dehumidifier, adjusting the temperature of the cooling coils in the air conditioning system, or adjusting the fan speed.

[0069] This application's solution addresses the potential for coarse-grained regulation strategies in basic solutions by precisely assessing the temperature and humidity status of the first control area and implementing differentiated adjustment measures based on different exceedance scenarios. When only the temperature is slightly elevated while humidity remains within acceptable limits, increasing the opening degree of the electrically adjustable damper enhances local convection and heat dissipation by simply increasing the airflow, avoiding unnecessary cooling and dehumidification, thus achieving energy savings. Conversely, when both temperature and humidity are significantly elevated, the cooling flow is increased simultaneously, along with local dehumidification, ensuring a rapid and effective restoration of temperature and humidity to set values, preventing persistent exceedances of environmental parameters due to insufficient single-method regulation. This tiered and refined adjustment mechanism allows the system to respond more precisely to changes in local heat load, avoiding energy waste or insufficient regulation that might result from a "one-size-fits-all" approach.

[0070] Through the above technical solution, this application enables more precise regulation of temperature and humidity in localized heat load areas within industrial environments. Compared to the relatively general regulation strategies in basic solutions, this solution introduces specific condition judgments and corresponding adjustment actions, making temperature and humidity control more refined and intelligent. Specifically, when the temperature is slightly high but the humidity is normal, simply increasing the airflow can solve the problem, avoiding excessive cooling and dehumidification and significantly reducing energy consumption. When both temperature and humidity exceed the set range, comprehensive measures can be quickly implemented to ensure rapid recovery of environmental parameters, effectively guaranteeing the stringent environmental requirements of the production process. This differentiated regulation strategy not only improves the accuracy and response speed of temperature and humidity control but also achieves significant energy savings while ensuring environmental quality.

[0071] In some preferred embodiments, suppose that in a local area of ​​a manufacturing workshop, a running etching machine (heat source device) generates heat, creating a first control zone around it. Monitoring through environmental parameter acquisition points reveals that the temperature T_local of this first control zone is 23.5℃, while the set temperature T_setpoint is 23.0℃. At this point, T_local > T_setpoint + 0.1 (i.e., 23.5 > 23.0 + 0.1). If the humidity H_local of this first control zone is 45%, and the preset humidity range is 40%~50%, then the humidity is within the preset range. This satisfies the first condition. The system will instruct the electrically adjustable damper corresponding to the first control zone to increase its opening degree, for example, from 50% to 70%, thereby increasing the airflow in the area, accelerating heat removal, and causing the temperature to drop rapidly. If the monitored temperature T_local of the first control zone is 24.0℃, the set temperature T_setpoint is 23.0℃, and the humidity H_local is 58%, while the set humidity H_setpoint is 55%, then... At this point, T_local > T_setpoint + 0.1 (i.e., 24.0 > 23.0 + 0.1), and H_local > H_setpoint + 2% (i.e., 58% > 55% + 2%). The second condition is met. The system will instruct to increase the cooling air supply to the first control area, for example, by adjusting the chilled water valve or compressor frequency, and simultaneously activate the local dehumidification function, for example, by turning on a local dehumidifier near the area or adjusting the air conditioning system's operating mode, to quickly reduce the temperature and humidity of the area and restore it to the set value.

[0072] In some embodiments described above, this application proposes an independent temperature and humidity control strategy by identifying localized thermal loads and defining control zones to achieve high-precision temperature and humidity control in industrial environments. However, in certain industrial scenarios with extremely high environmental precision requirements, such as lithography workshops, even if the macroscopic temperature and humidity of the environment are effectively controlled, minute fluctuations in the air refractive index can still cause cumulative deviations in the critical optical paths of optical alignment fixtures. Failure to address this issue will directly impact the alignment accuracy and product yield of the lithography process.

[0073] In response, this application further proposes a method for high-precision temperature and humidity regulation of industrial energy-saving air conditioners, the method further including: S301. In the workshop, for optical alignment fixtures, deploy multi-wavelength laser tracking and differential interferometry units on their critical optical paths.

[0074] Specifically, the workshop refers to a cleanroom environment, which has extremely high requirements for temperature, humidity, cleanliness, and optical path stability. Optical alignment fixtures are equipment used in the photolithography process to precisely align masks and wafers; they contain complex and precise optical components such as lenses and mirrors. The critical optical path refers to the path through which the laser or beam propagates within the alignment fixture, and is most sensitive to alignment accuracy. Deploying multi-wavelength laser tracking and differential interferometry units aims to monitor and quantify changes in air refractive index in real time by measuring optical path difference with high precision.

[0075] S302: Real-time acquisition of optical path difference data from the multi-wavelength laser tracking and differential interferometry unit.

[0076] The real-time acquisition of optical path difference data from the multi-wavelength laser tracking and differential interferometry unit refers to the simultaneous measurement of the phase difference or optical path difference generated when a light beam propagates through air at different wavelengths using a multi-wavelength laser interferometer. This data reflects the minute differences in the propagation speed of light at different wavelengths in air, thus providing a basis for subsequent refractive index calculations.

[0077] S303. Calculate the air refractive index at each wavelength based on the optical path difference data and the known optical path length.

[0078] The refractive index of air satisfies the following relationship: n_λ=1+(ΔL_λ / L); Where n_λ is the air refractive index, ΔL_λ is the optical path difference corresponding to wavelength λ, and L is the physical path length of the laser propagating in the air.

[0079] S304. Compare the calculated air refractive index at each wavelength with the preset reference refractive index to calculate the real-time deviation of the refractive index.

[0080] The preset reference refractive index is the air refractive index value determined through experiments or theoretical calculations under ideal or standard environmental conditions. By comparison, the degree of deviation between the current ambient air refractive index and the ideal state can be quantified.

[0081] S305. By combining the changes in refractive index at different wavelengths, evaluate the dispersion characteristics of air and make short-term predictions on the future trend of refractive index changes.

[0082] The dispersive properties of air refer to the variation of its refractive index with the wavelength of light. By analyzing the real-time deviation of the refractive index at different wavelengths, a more comprehensive understanding of changes in air conditions can be achieved. Short-term forecasting can utilize time series analysis, machine learning, and other methods to predict refractive index changes in the near future based on historical data and real-time trends, providing a basis for advance compensation.

[0083] S306. Based on the real-time deviation and prediction results of the refractive index, generate compensation instructions for the optical alignment fixture.

[0084] The compensation command calculates the amount and direction of adjustment required for the optical alignment fixture based on real-time deviation and predicted trends.

[0085] S307. By using compensation commands, the position or angle of the optical elements inside the optical alignment fixture is finely adjusted to counteract the deviation of the optical path caused by fluctuations in the air refractive index.

[0086] Fine-tuning can be achieved through high-precision actuators such as piezoelectric ceramic actuators and micromotors, which can adjust the displacement or angle of optical elements at the submicron or even nanometer level, thereby accurately compensating for changes in optical path caused by changes in air refractive index and ensuring the accuracy of optical alignment.

[0087] This application's solution deploys multi-wavelength laser tracking and differential interferometry units on the critical optical path of the optical alignment fixture within the workshop, enabling real-time, high-precision acquisition of optical path difference data. The use of multi-wavelength measurement allows the system to not only calculate the air refractive index at each wavelength but also assess the air's dispersion characteristics by combining changes in refractive index across different wavelengths, thus providing a more comprehensive and accurate understanding of the air environment's impact on the optical path. By comparing the real-time refractive index with a reference value, deviations can be precisely quantified, and short-term predictions can be made, allowing the system to anticipate and proactively address future changes in refractive index. Ultimately, based on these precise real-time deviations and predictions, fine-grained compensation commands are generated, and the position or angle of optical components is adjusted to directly offset the deviations caused by air refractive index fluctuations on the optical path. This mechanism, which directly compensates for optical path deviations, effectively overcomes the limitations of relying solely on macroscopic temperature and humidity control in ultra-high-precision optical applications, ensuring the stability and accuracy of optical alignment.

[0088] Through the above technical solution, this application overcomes the problem of insufficient compensation for air refractive index fluctuations in traditional temperature and humidity control methods for ultra-high precision optical applications. This solution achieves precise sensing and short-term prediction of air refractive index and its dispersion characteristics through real-time, multi-wavelength, and high-precision optical path difference measurement, thereby generating highly customized compensation commands. Consequently, optical components within the optical alignment fixture can be precisely fine-tuned, effectively offsetting deviations in the optical path caused by air refractive index fluctuations, and significantly improving the alignment accuracy and stability of high-precision processes such as photolithography. This not only helps improve product yield but also reduces photolithography defects caused by environmental fluctuations, bringing significant economic benefits and technological advantages to industrial production.

[0089] In some preferred embodiments, a specific example is given below. Suppose that in a lithography workshop, the optical alignment fixture in a high-precision stepper lithography machine needs to maintain extremely high alignment accuracy. To achieve this, a multi-wavelength laser tracking and differential interferometry unit is deployed along the critical optical path of the optical alignment fixture, such as the path from the light source to the mask and then to the wafer. This unit can simultaneously emit and receive laser beams of three wavelengths, such as 633nm, 532nm, and 405nm, and measure the optical path difference data generated by these laser beams as they propagate through the air in real time. After receiving this real-time optical path difference data, the system controller, combined with a pre-calibrated physical optical path length, such as 1000mm, immediately calculates the air refractive index corresponding to these three wavelengths in the current environment. For example, if the optical path difference for the 633nm wavelength is 100nm, then its refractive index n_633 = 1 + (100e-9 / 1) = 1.0000001. Subsequently, these calculated real-time refractive indices are compared with preset reference refractive indices under standard temperature, humidity, and pressure conditions to calculate the real-time refractive index deviation for each wavelength. For example, if the reference refractive index n_633_base = 1.00000005, the deviation is 0.00000005. Simultaneously, the system analyzes the relationship between these three wavelength refractive index deviations, assesses the dispersion characteristics of air, and uses historical data and machine learning models to predict the refractive index trend over the next 5 minutes. Based on these real-time deviations and predictions, the system generates a fine-grained compensation instruction. For example, if it predicts that the refractive index will further increase, leading to a longer optical path, the system calculates an instruction to move a critical lens backward by 5 nanometers. This instruction is sent to the corresponding optical element inside the optical alignment fixture via a high-precision piezoelectric ceramic actuator, causing its position or angle to be fine-tuned. In this way, even with small fluctuations in the air refractive index, the effective length of the optical path can be compensated in real time, ensuring sub-nanometer precision in lithography alignment and significantly improving device manufacturing yield.

[0090] In some embodiments described above, this application proposes a scheme to compensate for optical alignment by deploying multi-wavelength laser tracking and differential interferometry units within a photolithography workshop, calculating the air refractive index based on optical path difference data and a known optical path length. However, in practical applications, the physical structures of the multi-wavelength laser tracking and differential interferometry units, such as their mounting bases and optical component supports, may undergo slight deformations due to changes in ambient temperature. This causes the "known optical path length" to be non-constant, affecting the accuracy of the air refractive index calculation and consequently reducing the precision of optical alignment compensation. Therefore, this application further proposes a scheme for real-time correction of the physical optical path length to improve the accuracy of the air refractive index calculation.

[0091] In the aforementioned photolithography workshop, for the optical alignment fixture, multi-wavelength laser tracking and differential interferometry units are deployed along its critical optical path, including: S401. Add displacement sensors and temperature sensors to the mounting base and optical component support of the multi-wavelength laser tracking and differential interferometry measurement unit.

[0092] Specifically, the mounting base and optical component support are key structures supporting the multi-wavelength laser tracking and differential interferometry measurement unit, as well as the optical alignment fixture. Their dimensional stability directly affects the accuracy of the optical path length. Displacement and temperature sensors are added to monitor the physical state of these key structures in real time during operation. The displacement sensor directly measures the actual deformation of the mounting base and optical component support; for example, a high-precision laser displacement sensor or a capacitive displacement sensor can be used, measuring with micron or nanometer-level accuracy. The temperature sensor obtains the local temperature of the mounting base and optical component support in real time; for example, a thermocouple or a thermistor can be used, measuring with an accuracy of 0.1 degrees Celsius or even higher.

[0093] S402, Pre-store the coefficient of thermal expansion of the materials used for mounting bases and optical component supports.

[0094] The thermal expansion coefficients of the materials used for mounting bases and optical component supports are pre-stored to accurately estimate their theoretical deformation based on temperature changes. These thermal expansion coefficients are inherent physical properties of the materials and can be obtained through experimental measurements or by consulting material handbooks.

[0095] S403: Real-time acquisition of temperature sensor readings, combined with the coefficient of thermal expansion, to calculate the theoretical deformation of the mounting base and optical component support due to temperature changes.

[0096] For example, the theoretical deformation can be calculated using the formula ΔL = α * L0 * ΔT, where ΔL is the theoretical deformation, α is the coefficient of thermal expansion, L0 is the initial length, and ΔT is the temperature change.

[0097] S404. The real-time deformation data of the displacement sensor is fused with the theoretical deformation to obtain the corrected physical optical path length.

[0098] Specifically, this fusion can employ data fusion algorithms such as weighted averaging and Kalman filtering to comprehensively consider the advantages and disadvantages of the two measurement methods, thereby improving the accuracy and reliability of deformation data. For example, when displacement sensor data contains transient noise, theoretical deformation data can provide a stable reference; conversely, when there is a deviation between the theoretical model and the actual situation, displacement sensor data can be corrected. The final corrected physical optical path length is a more accurate physical path length used for subsequent air refractive index calculations.

[0099] S405. When calculating the air refractive index at each wavelength based on the optical path difference data, the corrected physical optical path length shall be used.

[0100] This application's solution achieves real-time deformation monitoring and correction of the mounting base and optical component support for multi-wavelength laser tracking and differential interferometry units, as well as optical alignment fixtures, by deploying displacement and temperature sensors on key physical structures and combining them with the thermal expansion coefficients of the materials. Specifically, the temperature sensor provides thermal state information of the structure, and combined with the pre-stored thermal expansion coefficients, it can predict the theoretical deformation caused by temperature changes. Simultaneously, the displacement sensor directly measures the actual deformation of the structure. By fusing these two deformation data, the shortcomings of a single measurement method can be effectively compensated. For example, temperature measurements may not fully reflect deformation caused by local stress or mechanical vibration, while displacement sensors may be affected by transient noise interference. This fusion mechanism ensures the real-time performance and high accuracy of the physical optical path length. Therefore, when calculating the air refractive index, the physical optical path length used can accurately reflect the actual light propagation path, thereby avoiding refractive index calculation errors caused by physical structural deformation and providing a more reliable input for subsequent optical alignment compensation commands.

[0101] Through the above technical solution, this application effectively solves the problem of inaccurate "known optical path length" caused by thermal deformation of the physical structure in the prior art. By monitoring and correcting the physical optical path length in real time, the accuracy of air refractive index calculation at each wavelength is greatly improved. This high-precision refractive index data makes the compensation instructions for optical alignment fixtures more accurate, thereby more effectively offsetting the deviation caused by air refractive index fluctuations on the optical path. Ultimately, this significantly improves the overall accuracy and stability of optical alignment in the lithography workshop, ensuring the yield of the lithography process and product quality.

[0102] In some preferred embodiments, a specific example is given below. Assume that in a photolithography workshop, the critical optical path length of the optical alignment fixture is approximately 1 meter. The mounting base and optical component support for the multi-wavelength laser tracking and differential interferometry unit are primarily made of Invar, which has a coefficient of thermal expansion of approximately 1.2 × 10⁻⁶. -6 A high-precision laser displacement sensor and a platinum resistance temperature sensor are deployed on the mounting base and optical component support.

[0103] During a photolithography operation, the ambient temperature in the workshop increased from 22.0°C to 22.5°C. At this time, the temperature sensor collected real-time temperature readings of 22.5°C for the mounting base and the optical component support. Based on the pre-stored coefficient of thermal expansion, the theoretical deformation caused by a 0.5°C temperature rise can be calculated as: ΔL_theoretical = (1.2 × 10⁻⁶) / (1.2 × 10⁻⁶) -6) * 1 meter * 0.5 = 0.6 micrometers.

[0104] Meanwhile, the laser displacement sensor monitors the actual deformation of the mounting base and optical component support in real time, which is 0.7 micrometers. This 0.1-micrometer difference may originate from mechanical stress, micro-vibration, or other factors not fully captured by the temperature model. The system merges the theoretical deformation of 0.6 micrometers with the real-time deformation of 0.7 micrometers, for example by using a weighted average, to obtain a corrected change in physical optical path length of 0.65 micrometers.

[0105] Therefore, the 1 meter, originally considered the "known optical path length," is now corrected to 1 meter + 0.65 micrometers. This corrected physical optical path length will be used when calculating the air refractive index at each wavelength based on the optical path difference data. For example, if the optical path difference ΔL_λ at a certain wavelength is 100 micrometers, then the refractive index before correction is n_λ = 1 + (100 micrometers / 1 meter) = 1 + 100 × 10 -6 = 1.000100. The corrected refractive index n_λ = 1 + (100 μm / (1 m + 0.65 μm)) ≈ 1 + (100 × 10⁻⁶) -6 / (1 + 0.65 × 10 -6 )) ≈ 1 + 99.999935 × 10 -6 =1.0000999935. Although the difference seems small, this level of precision improvement is crucial for ensuring nanometer-level lithographic resolution in high-precision optical alignment. By employing a corrected physical optical path length, the system can more accurately calculate the air refractive index, thereby generating more precise compensation commands and ensuring the stability and accuracy of the optical alignment fixture.

[0106] like Figure 3 As shown in the figure, this invention also provides an industrial energy-saving air conditioning system with high-precision temperature and humidity control. The system includes: The information acquisition module is used to acquire the operating status information of the heat source equipment and estimate the first heat load intensity based on the operating status information; The data collection point identification module is used to identify environmental parameter collection points related to the first heat load intensity based on the first heat load intensity. The area delineation module is used to delineate the boundary of the first control area based on the environmental parameter data collected by the environmental parameter collection points and the preset threshold. The processing module is used to execute an independent adjustment strategy for the first control area; the adjustment strategy is used to adjust the environmental parameters of the first control area and to perform compensatory adjustments to adjacent areas.

[0107] This application also provides a computer-readable storage medium. All or part of the processes in the above method embodiments can be executed by a computer program instructing related hardware. This program can be stored in the computer-readable storage medium, and when executed, it can include the processes of the above method embodiments. The computer-readable storage medium can be an internal storage unit of the task execution device (including a data sending end and / or a data receiving end) of any of the foregoing embodiments, such as the hard disk or memory of the task execution device. The computer-readable storage medium can also be an external storage device of the terminal device, such as a plug-in hard disk, smart media card (SMC), secure digital (SD) card, flash card, etc., equipped on the terminal device. Further, the computer-readable storage medium can include both the internal storage unit of the task execution device and an external storage device. The computer-readable storage medium is used to store the computer program and other programs and data required by the task execution device. The computer-readable storage medium can also be used to temporarily store data that has been output or will be output.

[0108] Furthermore, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit.

[0109] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a readable storage medium. Based on this understanding, the technical solutions of the embodiments of this application, essentially, or the parts that contribute to the prior art, or all or part of the technical solutions, can be embodied in the form of a software product. This software product is stored in a storage medium and includes several instructions to cause a device (which may be a microcontroller, chip, etc.) or processor to execute all or part of the steps of the methods of the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, ROM, RAM, magnetic disks, or optical disks.

[0110] The above are merely specific embodiments of this application, but the scope of protection of this application is not limited thereto. Any changes or substitutions within the technical scope disclosed in this application should be covered within the scope of protection of this application.

Claims

1. A method for high-precision temperature and humidity control in industrial energy-saving air conditioning, characterized in that, Includes the following steps: Obtain the operating status information of the heat source equipment, and estimate the first heat load intensity based on the operating status information; Based on the first heat load intensity, identify environmental parameter collection points related to the first heat load intensity; Based on the environmental parameter data collected from the environmental parameter collection points and the preset threshold, the boundary of the first control area is defined; An independent adjustment strategy is executed for the first control region; the adjustment strategy is used to adjust the environmental parameters of the first control region and to perform compensatory adjustments to adjacent regions.

2. The method for high-precision temperature and humidity regulation in industrial energy-saving air conditioning according to claim 1, characterized in that, The method further includes: Pre-store the location, dimensions, and thermophysical parameters of high-heat-capacity structures within the workshop; Identify environmental parameter collection points near the high heat capacity structure; Temperature readings from environmental parameter collection points near the high heat capacity structure, which are related to the first heat load intensity, are corrected to obtain environmental parameter data, thereby offsetting the hysteresis effect of the high heat capacity structure on the response of the environmental parameter collection points.

3. The method for high-precision temperature and humidity regulation in industrial energy-saving air conditioning according to claim 1, characterized in that, The step of defining the boundary of the first control area based on the environmental parameter data collected from the environmental parameter collection points and a preset threshold includes: Several candidate environmental parameter collection points are selected from the environmental parameter collection points related to the first heat load intensity; the difference between the environmental parameter data collected by the candidate environmental parameter collection points and the standard environmental parameter data is greater than the preset threshold. Connect the coverage areas of each candidate environmental parameter collection point, and delineate the corresponding connected areas as the boundary of the first control area.

4. The method for high-precision temperature and humidity regulation in industrial energy-saving air conditioning according to claim 1, characterized in that, The step of identifying environmental parameter collection points related to the first heat load intensity based on the first heat load intensity includes: Determine the relevant distances between the heat source equipment and the environmental parameter collection points; Based on the first heat load intensity and the first mapping relationship, the target-related distance is determined; Environmental parameter collection points whose correlation distance is less than the target correlation distance are identified as environmental parameter collection points related to the first heat load intensity.

5. The method for high-precision temperature and humidity regulation in industrial energy-saving air conditioning according to claim 1, characterized in that, For the first control region, an independent adjustment strategy is executed, including: If the first control area meets the first condition, then an electrically adjustable air valve corresponding to the first control area is added; the first condition is T_local>T_setpoint+0.1, and the humidity of the first control area is within a preset range; T_local is the temperature of the first control area; T_setpoint is the set temperature; If the first control area meets the second condition, the cooling air supply is increased and local dehumidification is performed; the second condition is T_local>T_setpoint+0.1 and H_local>H_setpoint+2%; H_local is the humidity of the first control area; H_setpoint is the set humidity.

6. The method for high-precision temperature and humidity regulation of industrial energy-saving air conditioning according to claim 1, characterized in that, The method further includes: Inside the workshop, multi-wavelength laser tracking and differential interferometry units are deployed on the critical optical paths of the optical alignment fixture. Real-time acquisition of optical path difference data from the multi-wavelength laser tracking and differential interferometry unit; Based on the optical path difference data and the known optical path length, calculate the air refractive index at each wavelength; The calculated air refractive index at each wavelength is compared with the preset reference refractive index to calculate the real-time deviation of the refractive index. By combining the changes in refractive index at different wavelengths, the dispersive properties of air are evaluated, and short-term predictions are made on the future trend of refractive index changes. Based on the real-time deviation and prediction results of the refractive index, a compensation command is generated for the optical alignment fixture. The compensation command is used to fine-tune the position or angle of the optical elements inside the optical alignment fixture to counteract the deviation of the optical path caused by fluctuations in the air refractive index.

7. The method for high-precision temperature and humidity regulation of industrial energy-saving air conditioning according to claim 6, characterized in that, Within the workshop, for the optical alignment fixture, multi-wavelength laser tracking and differential interferometry units are deployed along its critical optical path, including: A displacement sensor and a temperature sensor are added to the mounting base and optical component support of the multi-wavelength laser tracking and differential interferometry measurement unit. The coefficients of thermal expansion of the materials used for the mounting base and optical element support are stored in advance. The temperature sensor readings are collected in real time, and the theoretical deformation of the mounting base and optical element support due to temperature changes is calculated by combining the coefficient of thermal expansion. The real-time deformation data of the displacement sensor is fused with the theoretical deformation to obtain the corrected physical optical path length; When calculating the air refractive index at each wavelength based on the optical path difference data, the corrected physical optical path length is used.

8. The method for high-precision temperature and humidity regulation of industrial energy-saving air conditioning according to claim 6, characterized in that, The refractive index of air satisfies the following relationship: n_λ=1+(ΔL_λ / L); Where n_λ is the air refractive index, ΔL_λ is the optical path difference corresponding to wavelength λ, and L is the physical path length of the laser propagating in the air.

9. The method for high-precision temperature and humidity regulation of industrial energy-saving air conditioning according to claim 1, characterized in that, The operating status information includes the start signal and current power.

10. A high-precision temperature and humidity control system for industrial energy-saving air conditioning, used for temperature and humidity control in industrial environments with localized heat loads, characterized in that... The system includes: The information acquisition module is used to acquire the operating status information of the heat source equipment and estimate the first heat load intensity based on the operating status information; The sampling point identification module is used to identify environmental parameter sampling points related to the first heat load intensity based on the first heat load intensity. The region delineation module is used to delineate the boundary of the first control region based on the environmental parameter data collected by the environmental parameter collection points and a preset threshold. The processing module is used to execute an independent adjustment strategy for the first control region; the adjustment strategy is used to adjust the environmental parameters of the first control region and to perform compensatory adjustments to adjacent regions.

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