An atomic force microscope system incorporating microwave technology

Abstract

The present application belongs to the field of microscopy, and in particular to an atomic force microscope system combined with microwave technology, comprising an atomic force microscope main body, a microwave measurement module, a probe module, a mechanical scanning device and a data processing module, the probe module is installed on the atomic force microscope main body, the atomic force microscope main body is installed on the mechanical scanning device, and a sample stage for placing a sample is arranged on the mechanical scanning device. Compared with the traditional atomic force microscope, the imaging efficiency and accuracy are significantly improved by the introduction of microwave technology. The deep integration of microwave technology not only overcomes the limitations of traditional technology in imaging speed, resolution and sample protection, but also provides a new technical means for efficient observation of micro surface structure. The atomic force microscope system combined with microwave technology has significant performance advantages and can exhibit higher observation capability and better imaging quality in various complex scenarios.

Description

Technical Field

[0001] This invention relates to the field of microscopy, specifically to an atomic force microscope system that incorporates microwave technology. Background Technology

[0002] Atomic force microscopy (AFM), as an important tool for observing the morphology and properties of material surfaces at the nanoscale, has been widely used in materials science and nanotechnology due to its nanoscale observation capabilities. However, traditional AFM still has technical limitations in practical applications. Its imaging resolution is constrained by the mechanical probe's response characteristics, its scanning speed is slow, and the contact between the probe and the sample surface easily causes probe wear, resulting in poor probe durability and making it difficult to meet the requirements of high-precision and high-efficiency microscopic detection. In recent years, the introduction of microwave technology has provided a new direction for the development of microscopy. Near-field microwave microscopy systems, as an emerging microscopic imaging technology, have successfully broken through the spatial resolution limit of far-field microscopy by characterizing the electrical parameter response of materials in a region much smaller than the wavelength of free-space radiation.

[0003] In the fields of semiconductor and materials research, near-field microwave microscopy systems have demonstrated unique advantages. For example, in integrated circuit defect detection, this technology can perform sub-micron-scale imaging scans of semiconductor integrated circuit chips using microwaves, clearly observing the extremely fine arrangement of etched circuit components and effectively eliminating potential defects before product packaging. Furthermore, near-field microwave microscopy systems not only possess high-resolution imaging capabilities but can also characterize the electromagnetic properties of samples through scanning, revealing the distribution structure of the material's electrical properties without damaging the sample.

[0004] However, while current technologies attempt to combine microwave technology with AFM, they suffer from drawbacks such as high microwave signal loss, inability to separate transmit and receive signals, signal interference due to unshielded probes, and the ability to detect only single data points. Therefore, developing a novel microscopy system that combines the advantages of microwave technology and atomic force microscopy to achieve high-resolution, non-destructive testing and dielectric property characterization is of significant research and application value. Summary of the Invention

[0005] (a) Technical problems to be solved

[0006] To address the shortcomings of existing technologies, this invention provides an atomic force microscope system that incorporates microwave technology, thus solving the problems mentioned in the background section.

[0007] (II) Technical Solution

[0008] To achieve the above objectives, the present invention specifically adopts the following technical solution:

[0009] An atomic force microscope (AFM) system incorporating microwave technology includes an AFM body, a microwave measurement module, a probe module, a mechanical scanning device, and a data processing module. The probe module is mounted on the AFM body, and the AFM body is mounted on the mechanical scanning device. The mechanical scanning device has a sample stage for placing samples. The probe module is positioned directly above the sample stage. The microwave measurement module is electrically connected to the probe module and the data processing module. The data processing module is electrically connected to the AFM body, and the AFM body is electrically connected to the mechanical scanning device.

[0010] Furthermore, the microwave measurement module includes a signal generator, an impedance matching device, and a duplexer. The signal generator is electrically connected to the impedance matching device, the impedance matching device is electrically connected to the duplexer, and the duplexer is electrically connected to the probe module.

[0011] Furthermore, the data processing module includes a signal acquisition unit and a computer, wherein the signal acquisition unit is electrically connected to the computer, the signal generator is electrically connected to the signal acquisition unit, and the duplexer is electrically connected to the signal acquisition unit.

[0012] Furthermore, the atomic force microscope body includes an AFM controller, the mechanical scanning device includes a piezoelectric sensor and a scanner, the piezoelectric sensor is mounted on the scanner, the piezoelectric sensor is electrically connected to the AFM controller, the AFM controller is electrically connected to the scanner, and the computer is electrically connected to the AFM controller.

[0013] Furthermore, the impedance matching device is a 75Ω to 50Ω impedance converter used to match the impedance in the circuit, matching the impedance of the high-impedance probe module with that of the low-impedance signal generator. The duplexer is an RF circulator used to separate the microwave transmitted signal from the reflected signal.

[0014] Furthermore, the probe module includes an integrated rigid stepped probe holder and a fully shielded microwave probe. The tip of the fully shielded microwave probe is made of platinum, and the cantilever surface of the fully shielded microwave probe is sequentially covered with a gold shielding layer and a silicon nitride protective layer.

[0015] (III) Beneficial Effects

[0016] Compared with the prior art, the present invention provides an atomic force microscope system that combines microwave technology, which has the following advantages:

[0017] This invention achieves efficient and high-resolution imaging of microscopic surface structures by deeply integrating microwave technology with atomic force microscopy. Specifically, during operation, the invention first generates a high-frequency signal using microwave technology, which interacts with the probe module on the atomic force microscope body to form multimodal detection, thereby significantly improving the response speed and sensitivity of the probe module. The introduction of this high-frequency signal enables the probe module to perceive minute changes on the sample surface more quickly and accurately during scanning, providing higher data acquisition efficiency for subsequent imaging.

[0018] When the probe module contacts the sample surface, the introduction of microwave technology makes the interaction between the probe module and the sample surface more stable. During the scanning process, the assistance of microwaves effectively reduces the friction between the probe module and the sample surface, thereby reducing vibration noise and improving the signal-to-noise ratio of the image. This stable interaction not only improves the clarity of the image but also avoids the imaging blurring problem caused by mechanical vibration in traditional atomic force microscopy. At the same time, the application of microwave technology makes the scanning process smoother, especially when observing soft materials, biological samples, and other materials susceptible to mechanical damage, enabling higher resolution and less destructiveness.

[0019] Compared to traditional atomic force microscopy, this invention significantly improves imaging efficiency and accuracy through the introduction of microwave technology. The deep integration of microwave technology not only overcomes the limitations of traditional techniques in imaging speed, resolution, and sample protection, but also provides a novel technical means for the efficient observation of microscopic surface structures. The atomic force microscopy system of this invention, combined with microwave technology, has significant performance advantages, demonstrating higher observation capabilities and superior imaging quality in a variety of complex scenarios. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the framework structure of the present invention;

[0021] Figure 2 This is a schematic diagram illustrating the working principle of the duplexer of the present invention.

[0022] In the diagram: 1. Main body of atomic force microscope; 101. AFM controller; 2. Microwave measurement module; 201. Signal generator; 202. Impedance matching device; 203. Duplexer; 3. Probe module; 4. Mechanical scanning device; 401. Piezoelectric sensor; 402. Scanner; 5. Data processing module; 501. Signal acquisition device; 502. Computer. Detailed Implementation

[0023] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] Example

[0025] like Figure 1-2 As shown, an embodiment of the present invention proposes an atomic force microscope system combining microwave technology, including an atomic force microscope body 1, a microwave measurement module 2, a probe module 3, a mechanical scanning device 4, and a data processing module 5. The probe module 3 is mounted on the atomic force microscope body 1, and the atomic force microscope body 1 is mounted on the mechanical scanning device 4. The mechanical scanning device 4 is provided with a sample stage for placing samples. The probe module 3 is located directly above the sample stage. The probe module 3 includes an integrated rigid stepped probe holder and a fully shielded microwave probe. The metal shielded probe is mounted on the integrated rigid stepped probe holder, and the probe module 3 is mounted on the atomic force microscope body 1 through the integrated rigid stepped probe holder. The tip material of the fully shielded microwave probe is platinum, and the cantilever surface of the fully shielded microwave probe is sequentially covered with a gold shielding layer and a silicon nitride protective layer.

[0026] The microwave measurement module 2 is electrically connected to the probe module 3. The microwave measurement module 2 includes a signal generator 201, an impedance matching device 202, and a duplexer 203. The impedance matching device 202 is a 75Ω to 50Ω impedance converter used to match the impedance in the circuit, matching the high impedance of the probe module 3 with the low impedance of the signal generator 201. The duplexer 203 is an RF circulator used to separate the microwave transmitted signal from the reflected signal. The signal generator 201 is electrically connected to the impedance matching device 202, the impedance matching device 202 is electrically connected to the duplexer 203, and the duplexer 203 is electrically connected to the fully shielded microwave probe in the probe module 3.

[0027] The microwave measurement module 2 is electrically connected to the data processing module 5. The data processing module 5 includes a signal acquisition unit 501 and a computer 502. The signal acquisition unit 501 is electrically connected to the computer 502. The signal generator 201 is electrically connected to the signal acquisition unit 501. The duplexer 203 is electrically connected to the signal acquisition unit 501.

[0028] The atomic force microscope body 1 includes an AFM controller 101, and a computer 502 is electrically connected to the AFM controller 101. The mechanical scanning device 4 includes a piezoelectric sensor 401 and a scanner 402. The piezoelectric sensor 401 is mounted on the scanner 402 and is electrically connected to the AFM controller 101. The AFM controller 101 is electrically connected to the scanner 402, and the computer 502 is electrically connected to the AFM controller 101.

[0029] The working principle of this invention is as follows: The sample to be tested is placed on the sample stage of the mechanical scanning device 4. It should be noted that the mechanical scanning device 4 includes a scanning stage and a control unit. The sample to be tested is placed on the sample stage of the scanning stage. The control unit in the mechanical scanning device 4 controls the scanning stage to perform three-dimensional micro-scale movement along the X, Y, and Z axes, so that the probe module 3 moves relative to the sample to achieve three-dimensional scanning of the sample. The microwave signal output from the output port of the signal generator 201 is separated into two parts. One part is output to the probe module 3 through the impedance matching device 202 and the duplexer 203. When the probe module 3 approaches the surface of the sample, the microwave signal output by the probe module 3 interacts with the sample. After interacting with the sample, the microwave signal is reflected back to the probe module 3. The microwave reflected signal fed back by the probe module 3 is sent to the signal acquisition device 501 through the duplexer 203. The other part of the microwave signal output by the signal generator 201 is directly sent to the signal acquisition device 501 as a reference signal. Then the signal acquisition device 501 transmits the signal to the computer 502 for imaging analysis.

[0030] Finally, it should be noted that the above descriptions are merely preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. An atomic force microscope system incorporating microwave technology, characterized in that: The instrument includes an atomic force microscope body (1), a microwave measurement module (2), a probe module (3), a mechanical scanning device (4), and a data processing module (5). The probe module (3) is mounted on the atomic force microscope body (1), and the atomic force microscope body (1) is mounted on the mechanical scanning device (4). The mechanical scanning device (4) is provided with a sample stage area for placing samples. The probe module (3) is located directly above the sample stage. The microwave measurement module (2) is electrically connected to the probe module (3), and the microwave measurement module (2) is electrically connected to the data processing module (5). The data processing module (5) is electrically connected to the atomic force microscope body (1), and the atomic force microscope body (1) is electrically connected to the mechanical scanning device (4).

2. The atomic force microscope system combining microwave technology according to claim 1, characterized in that: The microwave measurement module (2) includes a signal generator (201), an impedance matching device (202), and a duplexer (203). The signal generator (201) is electrically connected to the impedance matching device (202), the impedance matching device (202) is electrically connected to the duplexer (203), and the duplexer (203) is electrically connected to the probe module (3).

3. An atomic force microscope system combining microwave technology according to claim 2, characterized in that: The data processing module (5) includes a signal collector (501) and a computer (502). The signal collector (501) is electrically connected to the computer (502), the signal generator (201) is electrically connected to the signal collector (501), and the duplexer (203) is electrically connected to the signal collector (501).

4. An atomic force microscope system combining microwave technology according to claim 3, characterized in that: The atomic force microscope body (1) includes an AFM controller (101), the mechanical scanning device (4) includes a piezoelectric sensor (401) and a scanner (402), the piezoelectric sensor (401) is mounted on the scanner (402), the piezoelectric sensor (401) is electrically connected to the AFM controller (101), the AFM controller (101) is electrically connected to the scanner (402), and the computer (502) is electrically connected to the AFM controller (101).

5. An atomic force microscope system combining microwave technology according to claim 2, characterized in that: The impedance matching device (202) is a 75Ω to 50Ω impedance converter used to match the impedance in the circuit and match the impedance of the high-impedance probe module (3) with the low-impedance signal generator (201). The duplexer (203) is an RF circulator used to separate the microwave transmission signal from the reflected signal.

6. An atomic force microscope system combining microwave technology according to claim 1, characterized in that: The probe module (3) includes an integrated rigid stepped probe holder and a fully shielded microwave probe. The tip of the fully shielded microwave probe is made of platinum, and the cantilever surface of the fully shielded microwave probe is sequentially covered with a gold shielding layer and a silicon nitride protective layer.

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