FFU particle automatic detection device

Abstract

The application discloses a FFU particle automatic detection device, and particularly relates to the technical field of dust particle detection, which comprises a detection table, a mechanical arm and a dust particle sampling head, the inside of the detection table is provided with a detection mechanism for detecting whether the number of dust particles is qualified, and when the mechanical arm drives the dust particle sampling head to move through a connecting mechanism and the detection mechanism, a traction rope drives a track slider to move, and simultaneously the track slider drives a dust particle counter to move, so that the relative displacement and pulling between the Teflon clean hose and the dust particle counter are minimized, thereby guaranteeing that the minimum bending radius of the Teflon clean hose meets the GMP regulation requirement, avoiding the Teflon clean hose from appearing large-scale expansion and bending, causing the particles in the air to impact the pipe wall and adhere due to inertia when flowing through the sharp bend, finally reducing the number of particles reaching the dust particle counter, and significantly lowering the monitoring reading from the actual value, thereby affecting the detection data.

Description

Technical Field

[0001] This application relates to the field of dust particle detection technology, and more specifically, to an FFU (Fan Filter Unit) automatic particle detection device. Background Technology

[0002] A dust particle detector, also known as a dust particle counter, is an instrument used to measure the number and size distribution of dust particles per unit volume in a clean space, and to detect whether the number of dust particles in the clean area is up to standard. It can be widely used in industries such as screen bonding, protective film bonding, semiconductor packaging, and precision dispensing.

[0003] However, existing dust particle detection devices occupy part of the clean area's workspace after completing the detection, affecting other operations by the operators. In addition, the detection range of existing dust particle detection devices is small and cannot detect multiple locations in the same clean area.

[0004] Therefore, an automatic particle detection device for FFU is proposed to address the above problems. Summary of the Invention

[0005] The purpose of this application is to provide an automatic particle detection device for FFU (Fluid Fusion Unit).

[0006] The FFU particle automatic detection device provided in this application adopts the following technical solution:

[0007] An automatic particle detection device for air-filled vacuum filters (FFUs) includes a detection platform, a robotic arm, and a dust particle sampling head. The robotic arm is fixedly connected to the top of the detection platform. One end of the robotic arm is provided with a connecting frame. The dust particle sampling head is located inside the connecting frame. The surface of the connecting frame is provided with an installation mechanism for mounting the dust particle sampling head. The surface of the connecting frame is also provided with a fixing mechanism for fixing the dust particle sampling head. The bottom of the dust particle sampling head is provided with a connecting mechanism for connecting to the detection device. The detection platform contains a detection mechanism for detecting whether the number of dust particles is within acceptable limits.

[0008] Preferably, the installation mechanism includes a connecting groove, a limiting groove, a limiting block, a locking pin groove, a spring groove, a first spring, and a locking pin. The connecting frame has a connecting groove on its surface, and the inner wall of the connecting groove has two sets of limiting grooves. The surface of the dust particle sampling head is fixedly connected to two sets of limiting blocks, and the limiting groove cooperates with the limiting block. A locking pin groove is provided on one side of the surface of the dust particle sampling head.

[0009] Preferably, a spring groove is provided on one side of the inner wall of the connecting groove, and a first spring is provided on the inner wall of the spring groove. One end of the first spring is fixedly connected to the spring groove, and the other end is fixedly connected to a locking pin. The locking pin groove cooperates with the locking pin.

[0010] By adopting the above technical solution, when the dust particle sampling head is inserted into the connecting slot, the surface of the dust particle sampling head will squeeze the first spring and the locking pin. When the dust particle sampling head is in the correct position, the first spring will reset and push the locking pin into the locking pin slot, so that the dust particle sampling head can be locked on the connecting frame, thereby completing the installation of the dust particle sampling head.

[0011] Preferably, the spring groove is provided with a cylindrical receiving cavity that mates with the outer circumferential surface of the first spring, and a radial fitting gap is formed between the inner wall of the receiving cavity and the outer wall of the first spring, the size of which is 0.08-0.25mm.

[0012] By adopting the above technical solution, when the first spring extends or retracts, the spring groove will limit the first spring and prevent the first spring from shaking.

[0013] Preferably, the fixing mechanism includes a fixing rod, a connecting block, a second spring, and a slot. The fixing rod is slidably connected to one end of the connecting frame, and the connecting block is fixedly connected to one end of the fixing rod. The second spring is sleeved on the surface of the fixing rod. The connecting frame is fixedly connected to one end of the second spring, and the connecting block is fixedly connected to the other end. A slot is opened on one side of the surface of the dust particle sampling head, and the fixing rod cooperates with the slot.

[0014] By adopting the above technical solution, the connecting block pulls the fixing rod, causing the second spring to stretch. The connecting block is then moved out of the connecting groove, and the dust particle sampling head is inserted into the connecting groove. When the dust particle sampling head is in the correct position, the connecting block is released, the second spring returns to its original position, and the fixing rod can be pushed into the slot, so that the dust particle sampling head can be fixed on the connecting frame.

[0015] Preferably, the connecting mechanism includes a fixing block, a connecting sleeve, a sealing ring, a Teflon clean tubing, a groove, and a clamp. The bottom of the dust particle sampling head is fixedly connected to the fixing block, the bottom of the fixing block is fixedly connected to the connecting sleeve, one end of the connecting sleeve is provided with a sealing ring, and the surface of the connecting sleeve is covered with a Teflon clean tubing.

[0016] Preferably, the surface of the Teflon cleaning hose has a groove, the connecting sleeve cooperates with the groove, and one end of the Teflon cleaning hose is provided with a clamp.

[0017] Preferably, the detection mechanism includes a traction wheel, a track, a track slider, a traction rope, a dust particle counter, a connecting pipe, and a vacuum source. The traction wheel is rotatably connected inside the detection platform, and the track is provided inside the detection platform. The track slider is slidably connected inside the track. One end of the traction rope is fixedly connected to a fixing block, and the other end is fixedly connected to the track slider. The traction wheel cooperates with the traction rope. A dust particle counter is fixedly connected to one side of the track slider, and a Teflon cleaning hose is fixedly connected to one end of the dust particle counter.

[0018] By adopting the above technical solution, when the robotic arm moves the dust particle sampling head through the connecting frame, the dust particle sampling head moves the traction rope through the fixed block. The traction rope moves the track slider, and the track slider moves the dust particle counter, thereby moving the Teflon clean hose together. This minimizes the relative displacement and tension between them, ensuring that the minimum bending radius of the Teflon clean hose meets GMP regulations. It also avoids large-scale expansion and contraction of the Teflon clean hose, which would cause airborne particles to impact the pipe wall due to inertia and adhere when flowing through sharp bends. Ultimately, this reduces the number of particles reaching the dust particle counter, resulting in a significantly lower monitoring reading than the actual value, thus affecting the detection data.

[0019] Preferably, the bottom of the dust particle counter is provided with a connecting tube, and one end of the connecting tube is provided with a vacuum source.

[0020] Preferably, the inside of the testing station is provided with a sealing sleeve, which is fitted onto a Teflon clean tubing.

[0021] The technical effects and advantages of this application are as follows:

[0022] Compared with existing technologies, this FFU (Fluorescent Fusion Unit) automatic particle detection device, through a connecting mechanism and a detection mechanism, allows the robotic arm to move the dust particle sampling head via a connecting frame. The sampling head, through a fixed block, drives a traction rope, which in turn moves a track slider. Simultaneously, the track slider moves the dust particle counter, thus moving the Teflon clean tubing together. This minimizes the relative displacement and tension between them, ensuring that the minimum bending radius of the Teflon clean tubing meets GMP regulations. It prevents significant expansion and contraction of the Teflon clean tubing, which would cause airborne particles to impact the tube wall due to inertia and adhere when flowing through sharp bends, ultimately reducing the number of particles reaching the dust particle counter and resulting in a significantly lower monitoring reading than the actual value, thus affecting the detection data. This allows for convenient detection of multiple locations in the clean area. Furthermore, after the device completes its operation, the extended robotic arm can be retracted, the traction rope lowers, and the track slider moves the dust particle counter downwards under gravity, allowing part of the Teflon clean tubing to be retracted into the detection platform, thereby reducing the space occupied by the dust particle detection device in the clean area. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the overall structure of this application;

[0024] Figure 2 This is a schematic diagram of the structure of the robotic arm and the connecting frame in this application.

[0025] Figure 3 This is a schematic diagram of the connection frame and the dust particle sampling head used in this application.

[0026] Figure 4 This is a schematic diagram of the installation mechanism of this application;

[0027] Figure 5 This is a schematic diagram of the fixing mechanism of this application;

[0028] Figure 6 This is a schematic diagram of the connection mechanism of this application;

[0029] Figure 7 This is a schematic diagram of the structure of the testing organization in this application;

[0030] Figure 8 This is a schematic diagram of the structure of the dust particle counter and the connecting tube in this application.

[0031] Figure 9 For the purposes of this application Figure 4 An enlarged diagram of A in the diagram.

[0032] The attached diagram is labeled as follows: 1. Testing platform; 2. Robotic arm; 3. Connecting frame; 4. Dust particle sampling head; 5. Installation mechanism; 501. Connecting groove; 502. Limiting groove; 503. Limiting block; 504. Locking pin groove; 505. Spring groove; 506. First spring; 507. Locking pin; 6. Fixing mechanism; 601. Fixing rod; 602. Connecting block; 603. Second spring; 604. Locking groove; 7. Connecting mechanism; 701. Fixing block; 702. Connecting sleeve; 703. Sealing ring; 704. Teflon clean hose; 705. Groove; 706. Clamp; 8. Testing mechanism; 801. Traction wheel; 802. Track; 803. Track slider; 804. Traction rope; 805. Dust particle counter; 806. Connecting pipe; 807. Vacuum source; 9. Sealing sleeve. Detailed Implementation

[0033] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0034] Example 1

[0035] like Figures 1 to 9 The illustrated FFU (Fan Filter Unit) automatic particle detection device includes a detection platform 1, a robotic arm 2, and a dust particle sampling head 4. The robotic arm 2 is fixedly connected to the top of the detection platform 1. Equipped with a scanning radius of less than 1 meter, the robotic arm 2 has a compact structure and can achieve full coverage and automated scanning and monitoring of the air supply surface of a single FFU without modifying the existing FFU structure or occupying additional cleanroom space. One end of the robotic arm 2 is equipped with a connecting frame 3, and the dust particle sampling head 4 is located inside the connecting frame 3. The robotic arm 2 can drive the dust particle sampling head 4 to a designated location through the connecting frame 3. To facilitate dust particle detection, the surface of the connecting frame 3 is provided with a mounting mechanism 5 for mounting the dust particle sampling head 4, allowing the dust particle sampling head 4 to be mounted on the connecting frame 3. The surface of the connecting frame 3 is provided with a fixing mechanism 6 for fixing the dust particle sampling head 4, allowing the dust particle sampling head 4 to be fixed on the connecting frame 3. The bottom of the dust particle sampling head 4 is provided with a connecting mechanism 7 for connecting to the detection device. The inside of the detection table 1 is provided with a detection mechanism 8 for detecting whether the number of dust particles is qualified, enabling it to detect whether the number of dust particles is qualified.

[0036] In a preferred embodiment, the installation mechanism 5 includes a connecting groove 501, a limiting groove 502, a limiting block 503, a locking pin groove 504, a spring groove 505, a first spring 506, and a locking pin 507. The connecting frame 3 has a connecting groove 501 on its surface, and two sets of limiting grooves 502 are provided on the inner wall of the connecting groove 501. Two sets of limiting blocks 503 are fixedly connected to the surface of the dust particle sampling head 4. The limiting groove 502 cooperates with the limiting block 503. A locking pin groove 504 is provided on one side of the surface of the dust particle sampling head 4, so that the dust particle sampling head 4 can be inserted into the connecting groove 501 and the limiting block 503 is inserted into the limiting groove 502.

[0037] In a preferred embodiment, a spring groove 505 is provided on one side of the inner wall of the connecting groove 501. A first spring 506 is provided on the inner wall of the spring groove 505. One end of the first spring 506 is fixedly connected to the spring groove 505, and the other end is fixedly connected to a locking pin 507. The locking pin groove 504 cooperates with the locking pin 507. When the dust particle sampling head 4 is inserted into the connecting groove 501, the surface of the dust particle sampling head 4 will press the first spring 506 and the locking pin 507. When the dust particle sampling head 4 is in the correct position, the first spring 506 resets and can push the locking pin 507 into the locking pin groove 504, so that the dust particle sampling head 4 can be locked on the connecting frame 3, thereby completing the installation of the dust particle sampling head 4.

[0038] In a preferred embodiment, the spring groove 505 is provided with a cylindrical receiving cavity that mates with the outer circumferential surface of the first spring 506. A radial fitting gap is formed between the inner wall of the receiving cavity and the outer wall of the first spring 506. The size of the radial fitting gap is in the range of 0.08-0.25mm. When the first spring 506 extends or retracts, the spring groove 505 will limit the first spring 506 to prevent the first spring 506 from shaking.

[0039] In a preferred embodiment, the fixing mechanism 6 includes a fixing rod 601, a connecting block 602, a second spring 603, and a slot 604. The fixing rod 601 is slidably connected to one end of the connecting frame 3, and the connecting block 602 is fixedly connected to one end of the fixing rod 601. The second spring 603 is sleeved on the surface of the fixing rod 601. The connecting frame 3 is fixedly connected to one end of the second spring 603, and the connecting block 602 is fixedly connected to the other end. A slot 604 is opened on one side of the surface of the dust particle sampling head 4. The fixing rod 601 cooperates with the slot 604. By pulling the fixing rod 601 through the connecting block 602, the second spring 603 is stretched, and the connecting block 602 is moved out of the connecting slot 501. Then, the dust particle sampling head 4 is inserted into the connecting slot 501. When the position of the dust particle sampling head 4 is appropriate, the connecting block 602 is released, the second spring 603 is reset, and the fixing rod 601 can be pushed into the slot 604, so that the dust particle sampling head 4 can be fixed on the connecting frame 3.

[0040] In a preferred embodiment, the connecting mechanism 7 includes a fixing block 701, a connecting sleeve 702, a sealing ring 703, a Teflon clean hose 704, a groove 705, and a clamp 706. The bottom of the dust particle sampling head 4 is fixedly connected to the fixing block 701, and the bottom of the fixing block 701 is fixedly connected to the connecting sleeve 702. One end of the connecting sleeve 702 is provided with a sealing ring 703, which can increase the sealing between the connecting sleeve 702 and the Teflon clean hose 704. The surface of the connecting sleeve 702 is covered with the Teflon clean hose 704.

[0041] In a preferred embodiment, the surface of the Teflon clean tubing 704 is provided with a groove 705, the connecting sleeve 702 cooperates with the groove 705, and one end of the Teflon clean tubing 704 is provided with a clamp 706, so that the connecting sleeve 702 can be inserted into the groove 705, so that the Teflon clean tubing 704 can be fitted onto the connecting sleeve 702, and then the clamp 706 can fix the Teflon clean tubing 704 onto the connecting sleeve 702.

[0042] In a preferred embodiment, the detection mechanism 8 includes a traction wheel 801, a track 802, a track slider 803, a traction rope 804, a dust particle counter 805, a connecting pipe 806, and a vacuum source 807. The traction wheel 801 is rotatably connected inside the detection platform 1. The track 802 is located inside the detection platform 1, and the track slider 803 is slidably connected inside the track 802, allowing the track slider 803 to slide on the track 802. One end of the traction rope 804 is fixedly connected to a fixing block 701, and the other end is fixedly connected to the track slider 803. The traction wheel 801 cooperates with the traction rope 804. The dust particle counter 805 is fixedly connected to one side of the track slider 803. The length from the sampling head 4 to the dust particle counter 805 is within 1.5 meters, minimizing the diffusion and sedimentation loss of suspended particles and the length delay during the sampling process, ensuring high sampling efficiency of the monitoring data. High response speed and reliable performance: One end of the dust particle counter 805 is fixedly connected to a Teflon clean hose 704. When the robotic arm 2 moves the dust particle sampling head 4 via the connecting frame 3, the dust particle sampling head 4 drives the traction rope 804 via the fixing block 701. The traction rope 804 drives the track slider 803 to move, and at the same time, the track slider 803 drives the dust particle counter 805 to move, thereby driving the Teflon clean hose 704 to move together. This minimizes the relative displacement and tension between them, ensuring that the minimum bending radius of the Teflon clean hose 704 meets the requirements of GMP regulations. It also avoids large-scale expansion and contraction and bending of the Teflon clean hose 704, which would cause airborne particles to impact the pipe wall due to inertia and adhere when flowing through sharp bends, ultimately reducing the number of particles reaching the dust particle counter 805, resulting in a monitoring reading that is significantly lower than the actual value, thus affecting the detection data.

[0043] In a preferred embodiment, the dust particle counter 805 is provided with a connecting pipe 806 at its bottom, so that the dust particle counter 805 can be connected to the vacuum source 807 through the connecting pipe 806. One end of the connecting pipe 806 is provided with a vacuum source 807, which is used to extract air. The air in the clean area is drawn in through the dust particle sampling head 4 at a constant flow rate, and the drawn air flows through the dust particle sampling head 4, the Teflon clean hose 704 in sequence, and finally enters the dust particle counter 805 for detection.

[0044] In a preferred embodiment, the inside of the testing station 1 is provided with a sealing sleeve 9, which is fitted onto the Teflon clean hose 704 to prevent air from flowing into the clean area from inside the testing station 1.

[0045] The working process of this application is as follows: The connecting block 602 pulls the fixing rod 601, causing the second spring 603 to stretch. The connecting block 602 moves out of the connecting groove 501. Then, the dust particle sampling head 4 is inserted into the connecting groove 501. The surface of the dust particle sampling head 4 will press against the first spring 506 and the locking pin 507. When the dust particle sampling head 4 is in the correct position, the first spring 506 resets, pushing the locking pin 507 into the locking pin groove 504, allowing the dust particle sampling head 4 to be locked onto the connecting frame 3. Then, the connecting block 602 is released, and the second spring... Spring 603 resets, pushing the fixing rod 601 into the slot 604, allowing the dust particle sampling head 4 to be fixed on the connecting frame 3, thus completing the installation of the dust particle sampling head 4. The Teflon clean tubing 704 is then fitted onto the connecting sleeve 702 through the groove 705, and the clamp 706 secures the Teflon clean tubing 704 to the connecting sleeve 702. When it is necessary to detect dust particles inside the clean area, the robotic arm 2 is activated, driving the dust particle sampling head 4 to the designated position via the connecting frame 3, and the dust particle sampling head 4 is then sampled through the vacuum source 807. Air is drawn into the clean area at a constant flow rate through the dust particle sampling head 4. The drawn-in air flows sequentially through the dust particle sampling head 4, the Teflon clean hose 704, and finally enters the dust particle counter 805 for detection. When the robotic arm 2 moves the dust particle sampling head 4 via the connecting frame 3, the dust particle sampling head 4 moves the traction rope 804 via the fixing block 701. The traction rope 804 moves the track slider 803, which in turn moves the dust particle counter 805, thereby moving the Teflon... The Teflon cleaning hose 704 moves together, minimizing the relative displacement and tension between them. This ensures that the minimum bending radius of the Teflon cleaning hose 704 meets GMP regulations and prevents the Teflon cleaning hose 704 from undergoing significant expansion and contraction. This would prevent airborne particles from impacting the hose wall due to inertia and adhering when flowing through sharp bends, ultimately reducing the number of particles reaching the dust particle counter 805 and causing the monitoring reading to be significantly lower than the actual value, thus affecting the detection data. The above is the working principle of this FFU automatic particle detection device.

Claims

1. An automatic particle detection device for FFU (Fluid Fusion Unit), comprising a detection platform (1), a robotic arm (2), and a dust particle sampling head (4), wherein the top of the detection platform (1) is fixedly connected to the robotic arm (2), one end of the robotic arm (2) is provided with a connecting frame (3), and the dust particle sampling head (4) is provided inside the connecting frame (3), characterized in that: The surface of the connecting frame (3) is provided with an installation mechanism (5) for installing the dust particle sampling head (4), the surface of the connecting frame (3) is provided with a fixing mechanism (6) for fixing the dust particle sampling head (4), the bottom of the dust particle sampling head (4) is provided with a connecting mechanism (7) for connecting the detection device, and the inside of the detection table (1) is provided with a detection mechanism (8) for detecting whether the number of dust particles is qualified.

2. The FFU particle automatic detection device according to claim 1, characterized in that: The installation mechanism (5) includes a connecting groove (501), a limiting groove (502), a limiting block (503), a locking groove (504), a spring groove (505), a first spring (506), and a locking pin (507). The connecting frame (3) has a connecting groove (501) on its surface. The inner wall of the connecting groove (501) has two sets of limiting grooves (502). The surface of the dust particle sampling head (4) is fixedly connected with two sets of limiting blocks (503). The limiting groove (502) cooperates with the limiting block (503). The surface of the dust particle sampling head (4) has a locking groove (504) on one side.

3. The FFU particle automatic detection device according to claim 2, characterized in that: A spring groove (505) is provided on one side of the inner wall of the connecting groove (501). A first spring (506) is provided on the inner wall of the spring groove (505). One end of the first spring (506) is fixedly connected to the spring groove (505), and the other end is fixedly connected to a locking pin (507). The locking pin groove (504) cooperates with the locking pin (507).

4. The FFU particle automatic detection device according to claim 3, characterized in that: The spring groove (505) is provided with a cylindrical receiving cavity that mates with the outer circumferential surface of the first spring (506). A radial fitting gap is formed between the inner wall of the receiving cavity and the outer wall of the first spring (506). The size range of the radial fitting gap is 0.08-0.25mm.

5. The FFU particle automatic detection device according to claim 1, characterized in that: The fixing mechanism (6) includes a fixing rod (601), a connecting block (602), a second spring (603), and a slot (604). The fixing rod (601) is slidably connected to one end of the connecting frame (3), and the connecting block (602) is fixedly connected to one end of the fixing rod (601). The second spring (603) is sleeved on the surface of the fixing rod (601). The connecting frame (3) is fixedly connected to one end of the second spring (603), and the connecting block (602) is fixedly connected to the other end. A slot (604) is opened on one side of the surface of the dust particle sampling head (4), and the fixing rod (601) cooperates with the slot (604).

6. The FFU particle automatic detection device according to claim 5, characterized in that: The connecting mechanism (7) includes a fixing block (701), a connecting sleeve (702), a sealing ring (703), a Teflon clean hose (704), a groove (705), and a clamp (706). The bottom of the dust particle sampling head (4) is fixedly connected to the fixing block (701), the bottom of the fixing block (701) is fixedly connected to the connecting sleeve (702), one end of the connecting sleeve (702) is provided with a sealing ring (703), and the surface of the connecting sleeve (702) is covered with a Teflon clean hose (704).

7. The FFU particle automatic detection device according to claim 6, characterized in that: The Teflon clean hose (704) has a groove (705) on its surface, the connecting sleeve (702) cooperates with the groove (705), and one end of the Teflon clean hose (704) is provided with a clamp (706).

8. The FFU particle automatic detection device according to claim 5, characterized in that: The detection mechanism (8) includes a traction wheel (801), a track (802), a track slider (803), a traction rope (804), a dust particle counter (805), a connecting pipe (806), and a vacuum source (807). The traction wheel (801) is rotatably connected inside the detection platform (1). The track (802) is provided inside the detection platform (1). The track slider (803) is slidably connected inside the track (802). One end of the traction rope (804) is fixedly connected to a fixing block (701), and the other end is fixedly connected to the track slider (803). The traction wheel (801) cooperates with the traction rope (804). One side of the track slider (803) is fixedly connected to a dust particle counter (805), and one end of the dust particle counter (805) is fixedly connected to a Teflon clean hose (704).

9. The FFU particle automatic detection device according to claim 8, characterized in that: The dust particle counter (805) is provided with a connecting tube (806) at the bottom, and a vacuum source (807) is provided at one end of the connecting tube (806).

10. The FFU particle automatic detection device according to claim 1, characterized in that: The testing station (1) is equipped with a sealing sleeve (9) inside, which is fitted onto a Teflon clean hose (704).

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