A device for recycling high-concentration phosphorus-containing wastewater produced in high-purity semiconductor material production

Abstract

This invention relates to the field of wastewater treatment technology, specifically to a resource recovery device for high-concentration phosphorus-containing wastewater from the production of high-purity semiconductor materials. The device comprises: a mounting bracket with a pretreatment tank, a reaction tank, and a water storage tank; a protective cover with a feed inlet on the upper part of the reaction tank; a drive motor connected to a rotating shaft; a stirring and adjusting mechanism mounted on the rotating shaft to improve the reaction efficiency; and a stabilizing support mechanism located inside the protective cover to enhance the stirring stability of the device. The stirring and adjusting mechanism ensures thorough mixing of the reagents and wastewater and prevents scaling, while the stabilizing support mechanism reduces swaying and prevents leakage, thus jointly improving the stability and extending the lifespan of the device.

Description

Technical Field

[0001] This invention relates to the field of wastewater treatment technology, specifically to a device for the resource recovery of high-concentration phosphorus-containing wastewater from the production of high-purity semiconductor materials. Background Technology

[0002] The production of high-purity semiconductor materials generates a large amount of high-concentration phosphorus-containing wastewater. This wastewater has a complex composition and high phosphorus content. Direct discharge will cause severe eutrophication of water bodies, damaging the ecological environment. At the same time, phosphorus resources are not effectively recovered, resulting in resource waste. Currently, most existing high-concentration phosphorus-containing wastewater treatment devices adopt a single stirring structure with fixed stirring angle and amplitude. This makes it inconvenient to flexibly adjust the stirring state according to different process stages of wastewater treatment (such as Fenton oxidation, calcification precipitation, and flocculation reaction). This leads to uneven mixing of wastewater and reagents and incomplete reaction, which not only affects the total phosphorus removal effect but also prolongs the treatment cycle and reduces the treatment efficiency of the device. In addition, the stirring shaft of existing devices lacks a stable support mechanism, which is prone to shaking during high-speed stirring. This not only affects the stirring effect but may also lead to accelerated wear of the main shaft seals, resulting in leakage problems, which in turn leads to reagent waste and equipment corrosion. Furthermore, the stirring rod of the stirring mechanism is mostly a fixed structure, which makes it inconvenient to clean the scale on the inner wall and bottom of the reaction tank in a timely manner. Long-term use will lead to the accumulation of deposited scale, affecting the stirring efficiency.

[0003] Therefore, developing a device that can overcome the above-mentioned technical defects, achieve flexible adjustment and stable support for stirring, and improve reaction efficiency and resource recovery efficiency has become an urgent technical problem to be solved. Summary of the Invention

[0004] The purpose of this invention is to provide a device for the resource recovery of high-concentration phosphorus-containing wastewater from the production of high-purity semiconductor materials, so as to solve the problems mentioned in the background. The technical solution of this invention addresses the problem that the existing technical solutions are too simplistic and provides a solution that is significantly different from the existing technology.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a resource recovery device for high-concentration phosphorus-containing wastewater from the production of high-purity semiconductor materials, comprising a mounting bracket, a pretreatment tank mounted on the mounting bracket, a reaction tank mounted on the mounting bracket, a water storage tank mounted on the mounting bracket, a protective cover mounted on the upper end of the reaction tank, an inlet port on the protective cover, a drive motor mounted on the reaction tank, and a rotating spindle connected to the output end of the drive motor; A stirring and regulating mechanism is mounted on the rotating main shaft and is configured to improve the reaction effect of the device. A stabilizing support mechanism is provided inside the protective cover to improve the stirring stability of the device.

[0006] Preferably, the stirring adjustment mechanism includes an upper stirring rod, which is symmetrically arranged above the rotating main shaft. An arc-shaped plate is installed on the upper stirring rod at an equal angle. A first bevel gear is fixedly installed at the tail end of the upper stirring rod, and the first bevel gear is arranged in the internal cavity of the rotating main shaft.

[0007] Preferably, a second bevel gear is installed inside the rotating spindle, the second bevel gear meshes with the first bevel gear, and a mating groove is provided at the lower end of the second bevel gear.

[0008] Preferably, a connecting sleeve is installed below the rotating main shaft, and a lower stirring rod is elastically and slidably installed on the connecting sleeve. A cleaning scraper is fixedly installed at the top end of the lower stirring rod, and an abutment block is fixedly installed at the tail end of the lower stirring rod. The abutment block is trapezoidal when viewed from the front.

[0009] Preferably, the stirring adjustment mechanism further includes a rotary motor, which is installed at the lower end of the internal cavity of the rotating main shaft. The output end of the rotary motor is connected to an electric push rod, and the top end of the electric push rod is connected to a moving rod.

[0010] Preferably, an abutment plate is installed on the moving rod, and a universal ball is movably provided at the lower end of the abutment plate at an equal angle. The inclined surface of the abutment plate corresponds to that of the abutment block, and the universal ball abuts against the abutment block. The top end of the moving rod corresponds to the lower end of the first bevel gear.

[0011] Preferably, the stabilizing support mechanism includes a connecting plate, which is installed inside the protective cover. A support plate is movably mounted on the connecting plate, and the arc-shaped snap-fit ​​surface of the support plate abuts against the rotating main shaft.

[0012] Preferably, the connecting plate has an inclined sliding groove, in which an extrusion plate is slidably installed, and the extrusion plate and the support plate are connected by a connector for limiting movement.

[0013] Preferably, the extrusion plate is movably mounted on the push plate, and pressure springs are symmetrically arranged on the extrusion plate, with the other end of each pressure spring connected to a support plate.

[0014] Preferably, the stabilizing support mechanism further includes an oil cylinder one, which is fixedly installed in the rotating main shaft. The piston rod of the oil cylinder one is located on the movement trajectory of the abutment plate. The oil cylinder one is connected to an oil cylinder two through a fluid delivery hose. The oil cylinder two is installed in a protective cover. The piston rod of the front end of the oil cylinder two is connected to the extrusion plate.

[0015] Compared with the prior art, the beneficial effects of the present invention are: 1. In the initial stage of use, the acidity or alkalinity of the solution needs to be adjusted. Through the cooperation of the upper stirring rod and the rotating main shaft, combined with the meshing transmission of the first and second bevel gears, the arc plate on the upper stirring rod can achieve multi-angle stirring, increase the stirring contact area, and ensure that the high-concentration phosphorus-containing wastewater and the reagent are fully mixed, avoiding problems such as uneven mixing and incomplete reaction. At the same time, after the acidity or alkalinity is adjusted, when precipitation is carried out, the lower stirring rod can be pushed out elastically along the connecting sleeve by the coordinated action of the rotary motor, electric push rod, moving rod and abutment block. The cleaning scraper at the top of the lower stirring rod can clean the inner wall and bottom of the reaction tank in real time. The universal ball at the bottom of the abutment plate continuously and slightly impacts the lower stirring rod, reducing the adhesion of precipitate, effectively preventing scale buildup, ensuring the stability of stirring efficiency and reaction effect, and reducing equipment maintenance costs. 2. The arc-shaped contact surface of the support plate in the stabilizing support mechanism abuts against the rotating main shaft, providing stable support and reducing shaft sway during high-speed mixing. Through the cooperation of the sliding groove, extrusion plate, and pressure spring on the connecting plate, the support force of the support plate can be elastically adjusted, ensuring a tight fit between the support plate and the main shaft, further enhancing support stability. Simultaneously, oil cylinders one and two are linked via a fluid delivery hose. When the contact plate in the mixing adjustment mechanism moves to contact the piston rod of oil cylinder one, it drives the piston rod of oil cylinder two to push the extrusion plate to slide, thereby causing the support plate to adaptively adjust its support state. This achieves linked control of mixing adjustment and stable support, preventing instability during mixing state adjustments, reducing wear on the main shaft seals, preventing leakage, and extending equipment lifespan. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a three-dimensional structural diagram of the reaction vessel of the present invention; Figure 3 This is a schematic diagram of the internal cross-sectional structure of the reaction vessel of the present invention; Figure 4 This is a schematic diagram of the internal cross-sectional structure of the rotating spindle of the present invention; Figure 5 This is a schematic diagram of the connection between the rotary motor and the stirring rod of the present invention; Figure 6 This is a schematic cross-sectional view of the protective cover of the present invention; Figure 7 This is a schematic diagram of the three-dimensional structure of the connecting plate of the present invention.

[0017] In the diagram: 1. Mounting bracket; 2. Pretreatment tank; 3. Reaction tank; 4. Water storage tank; 5. Protective cover; 6. Feed inlet; 7. Drive motor; 8. Rotating spindle; 9. Upper stirring rod; 10. Arc plate; 11. First bevel gear; 12. Second bevel gear; 13. Connecting sleeve; 14. Lower stirring rod; 15. Cleaning scraper; 16. Abutment block; 17. Rotary motor; 18. Electric push rod; 19. Moving rod; 20. Abutment plate; 2001. Universal ball; 21. Connecting plate; 22. Support plate; 23. Sliding groove; 24. Extrusion plate; 25. Push plate; 26. Pressure spring; 27. Oil cylinder one; 28. Piston rod one; 29. ​​Oil cylinder two; 30. Piston rod two. Detailed Implementation

[0018] Please see Figures 1-7 The present invention provides a technical solution: a resource recovery device for high-concentration phosphorus-containing wastewater from the production of high-purity semiconductor materials, comprising a mounting bracket 1, a pretreatment tank 2 mounted on the mounting bracket 1, a reaction tank 3 mounted on the mounting bracket 1, a water storage tank 4 mounted on the mounting bracket 1, a protective cover 5 mounted on the upper end of the reaction tank 3, a feed inlet 6 opened on the protective cover 5, a drive motor 7 mounted on the reaction tank 3, and a rotating main shaft 8 connected to the output end of the drive motor 7; A stirring and regulating mechanism is mounted on the rotating main shaft 8. The stirring and regulating mechanism is designed to improve the reaction effect of the device. The stabilizing support mechanism is located inside the protective cover 5. The stabilizing support mechanism improves the stirring stability of the device.

[0019] In one embodiment of the present invention, the stirring adjustment mechanism includes an upper stirring rod 9, which is symmetrically arranged above the rotating main shaft 8. An arc plate 10 is installed on the upper stirring rod 9 at equal angles. A first bevel gear 11 is fixedly installed at the tail end of the upper stirring rod 9. The first bevel gear 11 is arranged in the internal cavity of the rotating main shaft 8.

[0020] In one embodiment of the present invention, a second bevel gear 12 is installed inside the rotating main shaft 8. The second bevel gear 12 meshes with the first bevel gear 11, and a mating groove is provided at the lower end of the second bevel gear 12.

[0021] In one embodiment of the present invention, a connecting sleeve 13 is installed below the rotating main shaft 8, and a lower stirring rod 14 is elastically limited and slidably installed on the connecting sleeve 13. A cleaning scraper 15 is fixedly installed at the top end of the lower stirring rod 14, and an abutment block 16 is fixedly installed at the tail end of the lower stirring rod 14. The abutment block 16 is trapezoidal when viewed from the front.

[0022] As one embodiment of the present invention, the stirring adjustment mechanism further includes a rotary motor 17, which is installed at the lower end of the internal cavity of the rotating main shaft 8. The output end of the rotary motor 17 is connected to an electric push rod 18, and the top end of the electric push rod 18 is connected to a moving rod 19.

[0023] In one embodiment of the present invention, a contact plate 20 is installed on the moving rod 19, and a universal ball 2001 is movably provided at the lower end of the contact plate 20 at an equal angle. The inclined surface of the contact plate 20 corresponds to that of the contact block 16, and the universal ball 2001 abuts against the contact block 16. The top end of the moving rod 19 corresponds to the lower end of the first bevel gear 11.

[0024] The stirring and regulating mechanism operates in two stages: In the mixing stage, the electric push rod 18 pushes the moving rod 19 upwards, engaging with the second bevel gear 12. The rotary motor 17 then drives the second bevel gear 12 to rotate, meshing with the first bevel gear 11, causing the upper stirring rod 9 to rotate. The arc-shaped plate 10 achieves multi-angle stirring, ensuring thorough mixing of wastewater and reagents. In the sedimentation stage, the electric push rod 18 moves downwards, and the abutment plate 20, through the universal ball 2001, presses against the abutment block 16, pushing the lower stirring rod 14 out of the connecting sleeve 13. The cleaning scraper 15 adheres to the inner wall of the reaction tank 3, and the universal ball 2001 impacts the abutment block 16 to reduce sediment adhesion and prevent scaling. The entire process is adaptable to process requirements and is easy to operate.

[0025] In one embodiment of the present invention, the stabilizing support mechanism includes a connecting plate 21, which is installed inside the protective cover 5. A support plate 22 is movably mounted on the connecting plate 21, and the arc-shaped snap-fit ​​surface of the support plate 22 abuts against the rotating main shaft 8.

[0026] In one embodiment of the present invention, the connecting plate 21 is provided with an inclined sliding groove 23, and an extrusion plate 24 is slidably installed in the sliding groove 23. The extrusion plate 24 and the support plate 22 are connected by a connector for limiting movement.

[0027] In one embodiment of the present invention, the extrusion plate 24 is movably mounted on the push plate 25, and pressure springs 26 are symmetrically arranged on the extrusion plate 24. The other end of the pressure springs 26 is connected to the support plate 22.

[0028] As one embodiment of the present invention, the stabilizing support mechanism further includes an oil cylinder 27, which is fixedly installed in the rotating main shaft 8. The piston rod 28 of the oil cylinder 27 is located on the movement trajectory of the abutment plate 20. The oil cylinder 27 is connected to an oil cylinder 29 through a fluid delivery hose. The oil cylinder 29 is disposed in the protective cover 5. The piston rod 30 at the front end of the oil cylinder 29 is connected to the extrusion plate 24.

[0029] During the mixing stage, the moving rod 19 moves upward, causing the contact plate 20 to squeeze the piston rod 28 of the first oil cylinder 27. The oil is then transferred to the second oil cylinder 29 via the infusion hose. The piston rod 30 pushes the squeezing plate 24 to slide along the sliding groove 23, causing the support plate 22 to adjust the support force. Throughout the process, the arc-shaped contact surface of the support plate 22 is in close contact with the rotating main shaft 8. The pressure spring 26 elastically adjusts the support force, effectively reducing the shaking of the rotating main shaft 8, avoiding wear and leakage of the seals, realizing the linkage between support and stirring, improving the operational stability of the device, and extending its service life.

[0030] Working Principle: The entire system is fixedly installed using mounting bracket 1, providing a stable foundation for the pretreatment tank 2, reaction tank 3, and water storage tank 4. This ensures that the tanks and auxiliary components do not shift or shake during coordinated operation, guaranteeing the overall operational stability of the device. During operation, the high-concentration phosphorus-containing wastewater generated from the production of high-purity semiconductor materials is first introduced into the pretreatment tank 2 to homogenize, initially filter, and pre-adjust the acidity and alkalinity of the wastewater, preparing it for subsequent reactions. The pretreated wastewater is then introduced into the core reaction tank 3. The protective cover 5 installed at the top of the reaction tank 3 protects the core transmission components inside, preventing corrosion from reagents, the entry of impurities, and accidental damage to components. Simultaneously, various reagents such as ferrous sulfate, hydrogen peroxide, sodium hypochlorite, calcium hydroxide, PAC, and PAM can be stably added to the reaction tank 3 through the feed inlet 6 on the protective cover 5, meeting the reaction requirements of different process stages. In the initial mixing stage, the electric push rod 18 is activated to move upwards, pushing the moving rod 19 upwards to engage with the lower groove of the second bevel gear 12. Then, the rotary motor 17 is activated, causing it to drive the second bevel gear 12 to rotate via the moving rod 19. The second bevel gear 12, through meshing motion, drives the first bevel gears 11 on both sides to rotate. The first bevel gears 11 drive the upper stirring rod 9 to rotate, and under the action of the arc plate 10, the solution and reagent are tumbled and mixed, improving the overall mixing effect and achieving multi-angle stirring. This ensures that the wastewater and reagent are fully mixed and reacted, solving the problem of... To address the issues of uneven mixing and insufficient reaction in existing devices, the upward-moving rod 19 presses the piston rod 28 on the oil cylinder 27 via the abutment plate 20. This causes the oil inside the oil cylinder 27 to be transferred to the oil cylinder 29 through the infusion hose. The piston rod 30 on the oil cylinder 29 pushes the extrusion push plate 25 towards the position of the rotating main shaft 8, pushing the extrusion plate 24 to slide along the sliding groove 23. This, in turn, drives the support plate 22 to adjust the support angle and force, achieving synchronous adaptation between the stirring state adjustment and stable support, thus avoiding the problem of unstable support during stirring state adjustment. After the mixing is completed, the electric push rod 18 is started to move downward, causing the abutment plate 20 to press the abutment block 16 at the tail end of the lower stirring rod 14, pushing the lower stirring rod 14 out of the connecting sleeve 13, so that the cleaning scraper 15 is attached to the inner wall of the reaction tank 3. The rotary motor 17 is started, and the universal ball 2001, which is equidistantly set at the lower end of the abutment plate 20, abuts against the inclined surface of the abutment block 16. Through the rolling, squeezing and impacting of the universal ball 2001 against the abutment block 16, the adhesion of sediment on the tank wall and stirring components can be reduced, preventing scale buildup and reducing equipment maintenance costs.

[0031] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the scope of the present invention.

Claims

1. A resource recovery device for high-concentration phosphorus-containing wastewater from the production of high-purity semiconductor materials, comprising a mounting bracket (1), a pretreatment tank (2) mounted on the mounting bracket (1), a reaction tank (3) mounted on the mounting bracket (1), and a water storage tank (4) mounted on the mounting bracket (1), characterized in that: A protective cover (5) is installed on the upper end of the reaction vessel (3), and a feed inlet (6) is opened on the protective cover (5). A drive motor (7) is installed on the reaction vessel (3), and the output end of the drive motor (7) is connected to a rotating spindle (8). A stirring and regulating mechanism is provided on the rotating main shaft (8) and is configured to improve the reaction effect of the device. A stabilizing support mechanism is provided inside the protective cover (5) to improve the stirring stability of the device.

2. The device for resource recovery of high-concentration phosphorus-containing wastewater from the production of high-purity semiconductor materials according to claim 1, characterized in that: The stirring adjustment mechanism includes an upper stirring rod (9), which is symmetrically arranged above the rotating main shaft (8). An arc plate (10) is installed on the upper stirring rod (9) at an equal angle. A first bevel gear (11) is fixedly installed at the tail end of the upper stirring rod (9). The first bevel gear (11) is arranged in the internal cavity of the rotating main shaft (8).

3. The device for resource recovery of high-concentration phosphorus-containing wastewater from the production of high-purity semiconductor materials according to claim 2, characterized in that: The rotating spindle (8) is equipped with a second bevel gear (12), which meshes with the first bevel gear (11). The lower end of the second bevel gear (12) has a mating groove.

4. The device for resource recovery of high-concentration phosphorus-containing wastewater from the production of high-purity semiconductor materials according to claim 3, characterized in that: A connecting sleeve (13) is installed below the rotating main shaft (8). A lower stirring rod (14) is elastically limited and slidably installed on the connecting sleeve (13). A cleaning scraper (15) is fixedly installed at the top of the lower stirring rod (14). An abutment block (16) is fixedly installed at the tail end of the lower stirring rod (14). The abutment block (16) is trapezoidal when viewed from the front.

5. The device for resource recovery of high-concentration phosphorus-containing wastewater from the production of high-purity semiconductor materials according to claim 4, characterized in that: The stirring adjustment mechanism also includes a rotary motor (17), which is installed at the lower end of the internal cavity of the rotating main shaft (8). The output end of the rotary motor (17) is connected to an electric push rod (18), and the top end of the electric push rod (18) is connected to a moving rod (19).

6. The device for resource recovery of high-concentration phosphorus-containing wastewater from the production of high-purity semiconductor materials according to claim 5, characterized in that: A contact plate (20) is installed on the moving rod (19). A universal ball (2001) is movably provided at the lower end of the contact plate (20) at an equal angle. The inclined surface of the contact plate (20) corresponds to that of the contact block (16). The universal ball (2001) abuts against the contact block (16). The top end of the moving rod (19) corresponds to the lower end of the first bevel gear (11).

7. The device for resource recovery of high-concentration phosphorus-containing wastewater from the production of high-purity semiconductor materials according to claim 1, characterized in that: The stabilizing support mechanism includes a connecting plate (21), which is installed inside the protective cover (5). A support plate (22) is movably installed on the connecting plate (21), and the arc-shaped snap-fit ​​surface of the support plate (22) abuts against the rotating main shaft (8).

8. The device for resource recovery of high-concentration phosphorus-containing wastewater from the production of high-purity semiconductor materials according to claim 7, characterized in that: An inclined sliding groove (23) is provided on the connecting plate (21), and an extrusion plate (24) is slidably installed in the sliding groove (23). The extrusion plate (24) and the support plate (22) are connected by a connector for limiting movement.

9. A resource recovery device for high-concentration phosphorus-containing wastewater from the production of high-purity semiconductor materials according to claim 8, characterized in that: The extrusion plate (24) is movably mounted on the push plate (25), and pressure springs (26) are symmetrically arranged on the extrusion plate (24). The other end of the pressure springs (26) is connected to the support plate (22).

10. A resource recovery device for high-concentration phosphorus-containing wastewater from the production of high-purity semiconductor materials according to claim 9, characterized in that: The stabilizing support mechanism also includes an oil cylinder (27), which is fixedly installed in the rotating main shaft (8). The piston rod (28) of the oil cylinder (27) is located on the movement trajectory of the abutment plate (20). The oil cylinder (27) is connected to an oil cylinder (29) through a liquid infusion hose. The oil cylinder (29) is installed in the protective cover (5). The piston rod (30) at the front end of the oil cylinder (29) is connected to the extrusion plate (24).

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