A laser scribe area uniformity auxiliary control device, scribe system and method

Abstract

This invention relates to the field of laser processing technology, and more particularly to a laser scribing region uniformity auxiliary control device, scribing system, and method. This device, by setting an electrode array beneath a perovskite thin-film battery substrate, introduces electric field assistance into the field of laser scribing for the first time. By utilizing the electric field to modulate the band structure of the perovskite material, its absorption efficiency for laser light is enhanced or weakened, thereby achieving active feedforward compensation control of the scribing width. Real-time linkage of the electric field distribution at the laser scribing position enables instantaneous and precise scribing compensation. Compared with existing scribing compensation methods, the electric field changes faster and the response time is shorter, avoiding the problem of poor compensation accuracy caused by compensation lag. By setting auxiliary heating electrodes beneath the scribing start and end regions, the absorption is weakened at the end by the electric field, or preheating is performed at the start, accurately compensating for the additional thermal effect caused by the increased substrate temperature, ensuring the overall thermal stability of long-stroke scribing.

Description

Technical Field

[0001] This invention relates to the field of laser processing technology, specifically to an auxiliary control device, scribing system, and method for laser scribing area uniformity. Background Technology

[0002] Against the backdrop of global energy transition and sustainable development, solar energy, as a clean and renewable energy source, has attracted much attention for its development and utilization. Perovskite solar cells, as an emerging solar cell technology, have demonstrated enormous development potential in the photovoltaic field due to their unique photoelectric properties, relatively simple fabrication process, and low cost, becoming a hot research topic in scientific research and industry in recent years.

[0003] With continuous technological advancements, the research and fabrication of large-area perovskite modules has become a crucial step in promoting the commercial application of perovskite solar cells. Large-area modules can collect solar energy more efficiently, improve power generation efficiency, and reduce unit power generation costs, thereby better meeting the needs of large-scale energy supply. However, the fabrication of large-area perovskite modules faces numerous technical challenges, among which the scribing process is one of the key factors affecting module performance and quality.

[0004] The scribing process is primarily used to form specific circuit patterns on perovskite films, enabling the connection and isolation of electrodes within the solar module and ensuring effective current transmission and collection. The quality of the scribing directly affects key performance indicators such as dead zone width, series resistance, and photoelectric conversion efficiency. The uniformity of the dead zone width has a decisive impact on the overall performance consistency of the module. Inconsistent dead zone widths lead to uneven current distribution within the module, generating localized hot spots and reducing module reliability and lifespan. Simultaneously, fluctuations in series resistance also affect the module's output power, reducing energy conversion efficiency. Therefore, achieving high precision and uniformity in scribing for large-area perovskite modules is crucial for improving module performance and quality, and is a key technical challenge that must be overcome to promote the large-scale commercial application of perovskite solar cells.

[0005] Currently, common scribing techniques mainly include laser power closed-loop control, multi-point positioning correction, and isolation tape methods for edge cleaning and insulation. Laser power closed-loop control is a scribing control method based on the feedback adjustment principle. This technology detects depth or width parameters during the scribing process online, feeds the detection results back to the laser control system, and then adjusts the laser power in real time to maintain the consistency of the scribing shape. Multi-point positioning correction technology, from the perspective of image processing and positioning, improves the uniformity of the scribing by accurately determining the scribing position and making corrections. For example, Chinese invention patent application CN119364920A discloses a scribing design method and device for photovoltaic cells, proposing to determine correction parameters based on the original gaps P1 and P2, and then adjust the scribing image. This technology first accurately identifies and positions specific marker points on the substrate to obtain their actual position information, and then compares and analyzes them with preset theoretical positions to calculate the position deviation. Based on these deviation data, the scribing image is corrected accordingly, enabling the laser to perform scribing operations according to the corrected image. This reduces scribing errors caused by substrate position deviations or film layer inhomogeneities, improving scribing accuracy and uniformity. The edge-cleaning insulation isolation strip method primarily focuses on reducing the thermal impact during scribing. By pre-scribing an isolation strip at the boundary between the edge-cleaning area and the effective area, the heat generated during scribing is confined within a certain range, preventing heat diffusion into the effective area. This reduces the adverse effects of heat on scribing uniformity and ensures the stability of scribing quality.

[0006] While the aforementioned scribing techniques have made some progress in scribing large-area perovskite modules, several technical challenges remain in practical applications, limiting further improvements in scribing uniformity and optimization of module performance. Firstly, laser power closed-loop control relies on online detection and feedback adjustment. From detecting scribing depth or width information to transmitting this information to the control system, and then the control system adjusting the laser power accordingly, this entire process takes time. During high-speed scanning scribing of large-area perovskite modules, the film characteristics at different locations on the substrate change rapidly. The high speed of laser scribing and the lag in feedback control prevent the system from responding instantly to these instantaneous changes. When film characteristics change rapidly, the detected information may already be lagging behind the actual scribing state, causing the control system to adjust based on this lag, failing to correct deviations in the scribing process in a timely manner. This results in fluctuations in local scribing width, affecting scribing uniformity. This lag is particularly pronounced under high-speed, high-precision scribing requirements, becoming a key factor restricting further improvements in scribing quality from laser power closed-loop control technology. Secondly, large-area perovskite module substrates exhibit inherent differences in film thickness, material crystallinity, and thermal conductivity at different locations. For example, closed-loop laser power control and multi-point positioning correction primarily focus on adjusting parameters or correcting the scribing position during the scribing process to accommodate changes in film characteristics, but cannot fundamentally eliminate regional differences in film properties. Even minor variations in film thickness can alter laser absorption and scattering characteristics, thus affecting scribing depth and width. Differences in material crystallinity affect the mechanical and thermal properties of the film, resulting in varying responses during scribing. Inconsistent thermal conductivity leads to uneven heat distribution on the substrate, causing heat accumulation. Simply relying on laser parameter adjustment or position correction cannot fully compensate for these inherent differences in scribing uniformity, resulting in fluctuations in scribing quality across different regions. Finally, during large-area scribing, the laser continuously acts on the substrate, leading to significant temperature differences between the initial and final sections. The substrate temperature is lower at the beginning of scribing, gradually increasing as the laser heat accumulates. By the end of the scribing process, the substrate temperature is significantly higher than at the beginning. Since the physical and chemical properties of the film are sensitive to temperature, changes in temperature can alter properties such as the melting point and coefficient of thermal expansion, thus affecting the film removal rate and morphology during scribing. The heat accumulation effect causes subsequent scribing widths to gradually change, potentially resulting in significant differences between the beginning and end sections, disrupting the uniformity of the scribing. Furthermore, the heat accumulation effect can also cause thermal damage to the film, reducing the reliability and lifespan of the module. Summary of the Invention

[0007] To address the problems of lagging control in the scribing uniformity control of large-area perovskite modules, difficulty in compensating for regional differences in film characteristics, and poor scribing width uniformity caused by heat accumulation in existing technologies, this invention provides a laser scribing area uniformity auxiliary control device, scribing system, and method.

[0008] To achieve the above objectives, the present invention employs the following technical solution: This invention provides an auxiliary control device for laser scribing region uniformity, comprising a parallel array of electrodes disposed beneath a perovskite thin-film battery substrate. The parallel array of electrodes covers the entire scribing region on the perovskite thin-film battery substrate, thereby forming an electric field on the surface of the perovskite thin-film battery substrate. An auxiliary heating electrode is disposed below the scribing start and end regions of the perovskite thin-film battery substrate to compensate for scribing heat accumulation. Both the electrodes and the auxiliary heating electrode are connected to a high-voltage power supply, which is a programmable high-voltage power supply capable of independently controlling the voltage of each electrode.

[0009] Optionally, an insulating layer is provided between the electrode and the auxiliary heating electrode and the perovskite thin-film battery substrate.

[0010] Optionally, the insulating layer is made of SiO2 or Al2O3, and the thickness of the insulating layer is 100-500nm.

[0011] Optionally, the electrode and the auxiliary heating electrode are made of transparent conductive oxide or metal grid wire.

[0012] Optionally, the electrode and the auxiliary heating electrode are made of ITO.

[0013] Optionally, the spacing between two adjacent electrodes is 5-10 mm.

[0014] Optionally, the high-voltage power supply outputs a voltage of 0-1000V.

[0015] The present invention also provides a line marking system, including a synchronization controller, a laser, an optical path transmission device and a scanning galvanometer connected in sequence to the laser, and the aforementioned laser line marking area uniformity auxiliary control device; The synchronization controller is connected to the optical path transmission device and the high-voltage power supply, and is used to synchronously control the laser scanning position and electric field distribution.

[0016] Optionally, the system includes a support platform located below the electrodes and auxiliary heating electrodes.

[0017] The present invention also provides a line-drawing method using the above-described line-drawing system, comprising: The characteristics of the perovskite thin-film battery substrate were tested to obtain the film thickness distribution and crystallinity distribution in different regions of the perovskite thin-film battery substrate. The film thickness distribution, crystallinity distribution, and scribing width of each region of the perovskite thin film battery substrate are input into a pre-established model of the correspondence between electric field strength and scribing width to obtain the electric field distribution and electric field strength that need to be compensated for in each region of the perovskite thin film battery substrate. Based on the electric field distribution and electric field intensity required to be compensated in each region of the perovskite thin-film battery substrate, the required voltage values ​​for each electrode are obtained. The laser is activated to scan and draw lines along a preset trajectory. The synchronous controller simultaneously controls the laser position and the high-voltage power supply to output the required voltage value to the electrodes in the area corresponding to the laser position, thereby forming a corresponding electric field compensation and restoring the drawn area to the target value. When the laser moves to the end of the scribing line, the voltage of the auxiliary heating electrode is reduced to compensate for the heat accumulation effect and complete the laser scribing.

[0018] Compared with the prior art, the present invention has the following beneficial effects: This invention provides an auxiliary control device for the uniformity of laser scribing areas. This device, by placing an electrode array beneath a perovskite thin-film battery substrate, introduces electric field assistance into the laser scribing field for the first time. By utilizing the electric field to modulate the band structure of the perovskite material, its absorption efficiency for laser light is enhanced or weakened, enabling active feedforward compensation control of the scribing width. Real-time linkage of the electric field distribution at the laser scribing position achieves instantaneous and precise scribing compensation. Compared to existing scribing compensation methods, the electric field changes faster and the response time is shorter, avoiding the problem of poor compensation accuracy caused by compensation lag. By placing auxiliary heating electrodes beneath the scribing start and end regions, the absorption is weakened at the end or preheated at the start, accurately compensating for the additional thermal effect caused by the increased substrate temperature. This ensures the thermal stability of the long-stroke scribing process, and the entire control process does not introduce mechanical damage or contamination, ensuring process cleanliness. The device has a simple structure, strong compatibility, and is easy to industrially adapt and upgrade on existing production lines.

[0019] The insulating layer prevents high-voltage current from being directly conducted to the perovskite thin-film battery substrate, effectively preventing leakage current and protecting the substrate and the safety of the entire scribing process.

[0020] Both SiO2 and Al2O3 are mature thin-film insulating materials with high dielectric strength and good thermal conductivity, ensuring insulation reliability.

[0021] Using transparent conductive oxides (such as ITO, AZO) or metal grid structures can minimize the obstruction of the optical path and ensure the normal operation of laser scribing and online inspection.

[0022] ITO is currently the most mature transparent conductive material for industrial applications, with a visible light transmittance of >80%. Compared to other transparent conductive oxides, it has superior chemical stability and etching patterning capabilities, making it easy to fabricate high-precision strip or grid-like electrode arrays, ensuring the reliability and manufacturability of the device.

[0023] This invention also provides a scribing system, which combines a synchronous controller, a laser, and an optical path transmission device and a scanning galvanometer connected in sequence with the aforementioned laser scribing area uniformity auxiliary control device to form a complete scribing system that can be directly applied to industrial production. The synchronous controller directly reads the laser scanning position and instantly adjusts the electrode voltage of the corresponding area, with an electric field adjustment response time on the order of microseconds, achieving instant compensation without delay and perfectly handling micro-region fluctuations under high-speed scanning. The optical path transmission device is responsible for beam expansion, collimation, and beam shaping; the scanning galvanometer is responsible for high-speed beam deflection; and the auxiliary control device is responsible for zoned electric field compensation. Their coordinated operation achieves a high-precision, high-uniformity scribing effect.

[0024] The electrode array and auxiliary heating electrodes need to be fixed on a stable foundation to maintain precise relative positions with the substrate. The support platform, as the mechanical reference for the entire system, should possess good flatness, high rigidity, and good thermal stability to ensure the accuracy and stability of the substrate position during the scribing process.

[0025] This invention also provides a scribing method utilizing the aforementioned scribing system. This method first obtains the film thickness and crystallinity distribution of each region of the substrate through characteristic detection. Then, based on a pre-established model, it calculates the required compensation electric field for each region, converting the detected film thickness and crystallinity deviations into the required electric field strength values. This achieves a quantitative mapping from material characteristic differences to electric field compensation, significantly improving compensation accuracy. Finally, this is executed synchronously during the scribing process, forming dynamic real-time compensation. This method, starting from substrate characteristic detection, to electric field distribution design, electrode voltage configuration, synchronous scribing execution, and finally to end-stage thermal accumulation compensation, forms a complete process closed loop. The method is simple and has good operability and repeatability, facilitating its application in industrial production. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of a laser scribing area uniformity auxiliary control device according to the present invention.

[0027] Figure 2 This is a simplified structural diagram of a line marking system according to the present invention.

[0028] Figure 3 This is a schematic diagram of the line marking method of the present invention.

[0029] Among them, 1-perovskite thin film battery substrate, 2-electrode, 3-high voltage power supply, 4-optical transmission device, 5-scanning galvanometer, 6-laser, and 7-supporting platform. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0031] Therefore, the following detailed description of the embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without inventive effort are within the scope of protection of the invention.

[0032] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0033] In the description of the embodiments of the present invention, it should be noted that if terms such as "upper," "lower," "horizontal," or "inner" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of the invention is in use, they are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention. Furthermore, terms such as "first" and "second" are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0034] Furthermore, the use of the term "horizontal" does not imply that the component must be absolutely horizontal, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0035] In the description of the embodiments of the present invention, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the present invention according to the specific circumstances.

[0036] The present invention will be further described in detail below with reference to specific embodiments. These descriptions are for explanation purposes only and are not intended to limit the scope of the invention.

[0037] Example 1 See Figure 1 This invention provides an auxiliary control device for the uniformity of laser scribing areas, comprising a parallel array of electrodes 2 disposed below a perovskite thin-film battery substrate 1. The parallel array of electrodes 2 covers the entire scribing area on the perovskite thin-film battery substrate 1, forming an electric field on the surface of the perovskite thin-film battery substrate 1. An auxiliary heating electrode is disposed below the scribing start and end areas of the perovskite thin-film battery substrate 1 to compensate for the heat accumulation during scribing. Preferably, the electrode 2 and the auxiliary heating electrode are made of transparent conductive oxide or metal grid wire, more preferably ITO, which has high transparency, high conductivity and good chemical stability, making it an ideal material for fabricating transparent electrodes. The spacing between two adjacent electrodes is 5-10 mm. The electrode 2 can be a strip electrode or a mesh electrode, with the mesh electrode enabling precise control of the two-dimensional electric field. In addition to the transverse electric field perpendicular to the scribing, a longitudinal electric field parallel to the scribing can be used to change the thermal conductivity of the material. Both electrode 2 and auxiliary heating electrode are connected to a high-voltage power supply 3. The high-voltage power supply 3 is a programmable high-voltage power supply that can independently control the voltage of each electrode. Preferably, the output voltage of the high-voltage power supply 3 is 0-1000V. An insulating layer is provided between electrode 2 and auxiliary heating electrode and perovskite thin-film battery substrate 1. The insulating layer is made of SiO2 or Al2O3 and has a thickness of 100-500nm.

[0038] The core principle of this device is to use an external electric field to change the band structure of the material through the Stark effect, thereby enhancing the absorption of laser energy and thus achieving active control of the scribing width.

[0039] Example 2 See Figure 2 The present invention provides a line marking system, including a synchronization controller, a laser 6, a support platform 7, an optical path transmission device 4 and a scanning galvanometer 5 connected in sequence to the laser 6, and the aforementioned laser line marking area uniformity auxiliary control device. Laser 6 is used to generate pulsed laser light for scribing. The type of laser 6 can be selected based on the optical absorption characteristics of the perovskite material. The optical path transmission device 4 is connected to the output end of the laser 6. Its function is to expand, collimate, and shape the original laser beam output from the laser 6. Specifically, the optical path transmission device 4 expands the laser beam emitted by the laser 6, which has a small diameter and a certain divergence angle, into a beam with a larger diameter and an extremely small divergence angle (nearly parallel), thereby compressing the far-field divergence angle of the laser and making the focused spot smaller and the energy more concentrated. At the same time, the optical path transmission device 4 can integrate beam shaping elements to change the transverse mode distribution of the laser beam to adapt to the energy distribution requirements of different scribing processes. In addition, the optical path transmission device 4 also serves as an optical path guide and isolation protection. The scanning galvanometer 5 is connected to the output of the optical path transmission device 4. Its function is to control the deflection direction of the laser beam at high speed and with high precision, achieving rapid scanning of a preset trajectory. The scanning galvanometer 5 typically contains two independent high-speed oscillating motors (controlling the X and Y axes respectively), which drive the reflector to rotate, thereby changing the exit angle of the incident laser and causing the focused spot to move rapidly along the X and Y directions on the substrate surface. The scanning galvanometer 5 drives the two motors in real time and synchronously according to the preset scribing pattern, enabling the laser beam's focal point to reproduce a precise geometric trajectory on the substrate. Between two scribing intervals, the scanning galvanometer 5 allows the beam to jump to the next starting point at extremely high speed, greatly improving scribing efficiency. The scanning galvanometer 5 also incorporates a high-precision position sensor (such as a grating encoder) to feed back the actual angle of the reflector to the controller in real time, forming a closed-loop control to ensure high repeatability of the laser landing point position. The synchronization controller connects the optical transmission device 4 and the high-voltage power supply 3, and is used to synchronously control the laser scanning position and electric field distribution. The core function of the synchronization controller is to acquire the current position coordinates of the laser beam on the perovskite thin-film battery substrate 1 in real time, and, based on a preset electric field distribution map, send commands to the high-voltage power supply 3 to generate the required electric field intensity in a local area below the laser beam. The response time of the synchronization controller should be at the microsecond level to achieve delay-free synchronization with the high-speed scanning laser.

[0040] The support platform 7 is located below the electrode 2 and the auxiliary heating electrode. The electrode 2 can be integrated inside the support platform 7, and a capacitor structure is formed between the conductive contacts on the surface of the platform and the conductive layer on the back of the substrate, avoiding the need for additional electrode layers.

[0041] See Figure 3 The present invention also provides a line-drawing method using the line-drawing system of claim 8 or 9, comprising: S1: Perform characteristic testing on the perovskite thin-film battery substrate 1 to obtain the film thickness distribution and crystallinity distribution in each region of the perovskite thin-film battery substrate 1, specifically: The same laser 6 in the scribing system is used, but its output power is reduced to a level that will not cause etching damage to the substrate. The scanning galvanometer 5 is controlled to make the low-energy laser beam scan the entire surface of the substrate 1 at a certain speed, while simultaneously detecting the light intensity signal reflected or scattered from the surface of the perovskite thin-film battery substrate 1. Since the film thickness and crystallinity vary in different regions, their reflectivity and scattering rates also differ. By establishing a quantitative relationship between reflected / scattered light intensity and film thickness and crystallinity through calibration experiments, the film characteristic distribution map of the entire surface of the perovskite thin-film battery substrate 1 can be retrieved. For example, regions with thicker films generally have stronger absorption and weaker reflected light; regions with poorer crystallinity may have stronger scattered light. Through this step, the film thickness distribution and crystallinity distribution of each region of the perovskite thin-film battery substrate 1 are obtained.

[0042] S2: The film thickness distribution, crystallinity distribution, and scribing width of each region of the perovskite thin-film battery substrate 1 are input into a pre-established model of the correspondence between electric field strength and scribing width. This yields the electric field distribution and intensity required for compensation in each region of the perovskite thin-film battery substrate 1. Specifically, under the same laser parameters (fixed power, frequency, and scanning speed) and perovskite thin-film battery substrate 1, the scribing width is tested when different transverse electric field intensities are applied. Experimental data show that for perovskite materials, when a transverse electric field perpendicular to the scribing direction is applied, the energy bands of the material tilt due to the Stark effect, resulting in enhanced absorption at the band edges and an increased absorption rate of laser energy, thus increasing the scribing width. This increase is essentially linear within a certain range; generally, for every 100 V / mm increase in electric field strength, the scribing width increases by approximately 5-8%. This is used to establish a model of the correspondence between electric field strength and scribing width. The film thickness distribution, crystallinity distribution, and target line width of each region of the perovskite thin-film battery substrate 1 obtained in step S1 are input into the pre-established correspondence model to obtain the electric field distribution and electric field intensity that need to be compensated for in each region of the perovskite thin-film battery substrate 1. The specific rules are as follows: For areas with thicker films or lower crystallinity (where laser etching is more difficult), a positive enhanced electric field needs to be applied to increase the scribing width. For regions with thinner films or higher crystallinity, apply a weak electric field or no electric field. For regions where heat accumulates at the end of the line, a reverse weakening electric field needs to be applied to compensate for the thermal effect.

[0043] S3: Based on the electric field distribution and electric field intensity required to compensate for each region of the perovskite thin-film battery substrate 1, the required voltage values ​​for each electrode are obtained, specifically: Given that the distance between adjacent electrodes is d, if a transverse electric field E needs to be generated at a certain location, then the voltage difference ΔV between adjacent electrodes is ΔV = E × d. A reference potential is set, and then the absolute voltage value of each electrode is derived sequentially from one end to the other based on the electric field distribution.

[0044] S4: Start the laser 6 to scan and draw lines along a preset trajectory. Simultaneously control the laser position and the high-voltage power supply 3 to output the required voltage value to the electrodes in the area corresponding to the laser position, forming a corresponding electric field compensation, so that the drawn area returns to the target value. Specifically: The laser output from laser 6 passes sequentially through optical path transmission device 4 (beam expander, collimator, and shaper) and scanning galvanometer 5 (high-speed deflection), and is finally focused onto the surface of perovskite thin film battery substrate 1 to scribing lines.

[0045] Simultaneously, the synchronous controller reads the current position coordinates of the laser beam in real time; based on these coordinates and a preset electric field distribution, it determines the target electric field strength required at that position; it calculates the voltage difference between adjacent electrodes required to achieve the target electric field strength; it sends a command to the high-voltage power supply 3 to adjust the voltage of the corresponding electrode; and it generates the required electric field in a local area of ​​the substrate below the laser beam. With the assistance of this electric field, the laser absorption characteristics of the substrate material are modulated in real time, and the scribing width is compensated instantly, restoring the scribing area to the target value.

[0046] S5: When the laser moves to the end of the scribing process, the voltage of the auxiliary heating electrode is reduced to compensate for the heat accumulation effect and complete the laser scribing. Specifically: When the laser moves to the end of the scribing, the voltage of the auxiliary heating electrode is reduced by the synchronous controller, forming a reverse (weakening) electric field in the end region. This electric field reduces the absorption efficiency of the substrate to the laser, thereby accurately offsetting the additional thermal effect caused by the increase in substrate temperature, compensating for the heat accumulation effect, and completing the laser scribing.

[0047] As an optional supplementary measure, the starting area of ​​the scribing can be preheated by an auxiliary heating electrode to raise the base temperature of the starting section to a level close to that of the end of the scribing, thereby reducing the heat accumulation effect from the source.

[0048] Using the apparatus of Example 1, the system of Example 2, and the method of Example 3, taking a perovskite thin-film battery substrate 1 as an example, the substrate size is 600×1200mm. Film thickness distribution: The film thickness in the edge area is 8% thicker than that in the center area (due to edge buildup during the coating process). Laser parameters: fixed power and scanning speed Target line width: 50μm; The thickness of the insulating layer is 100-500 nm. In this experiment, a 300 nm thick SiO2 layer was deposited on the electrode surface as an insulating layer using physical vapor deposition (PVD) or chemical vapor deposition (CVD). Electrode 2 and the auxiliary heating electrode are made of ITO, and the distance between adjacent electrodes is 7.5 mm; The applied electric field strength conditions and test results for the marked areas are shown in the table below: area Film thickness deviation Line width without electric field Width of the line after applying an electric field electric field strength center benchmark 50.2μm 50.1μm 0 V / mm edge +8% 46.3μm (-7.8%) 49.8μm (-0.6%) 280 V / mm corner +10% 45.1μm (-10.2%) 50.3μm (+0.5%) 350 V / mm Starting point of the line benchmark 48.5μm (-3.4%) 49.7μm (-0.8%) 120 V / mm End of line benchmark 52.3μm (+4.6%) 50.2μm (+0.4%) -80 V / mm As can be seen, by using electric field zoning compensation, the fluctuation of scribing width (-10.2% to +4.6%) caused by film thickness differences and heat accumulation is reduced to within ±0.6%. The dead zone width is highly consistent throughout the entire board. This fully demonstrates that the laser scribing area uniformity auxiliary control device, scribing system and method proposed in this invention can actively, instantly and effectively compensate for inherent material differences and process thermal effects, greatly improving the uniformity and consistency of laser scribing.

[0049] The above description is merely a preferred embodiment of the present invention and is not intended to limit the technical solution of the present invention in any way. Those skilled in the art should understand that, without departing from the spirit and principles of the present invention, the technical solution can be modified and replaced in several simple ways, and these modifications and replacements are all within the scope of protection covered by the claims.

Claims

1. A laser scribe area uniformity assist control device, characterized by, The device includes a parallel array of electrodes (2) disposed below a perovskite thin-film battery substrate (1), the parallel array of electrodes (2) covering the entire scribing area on the perovskite thin-film battery substrate (1) to form an electric field on the surface of the perovskite thin-film battery substrate (1); auxiliary heating electrodes are disposed below the scribing start and end areas of the perovskite thin-film battery substrate (1) to compensate for the heat accumulation of the scribing; both the electrodes (2) and the auxiliary heating electrodes are connected to a high-voltage power supply (3), the high-voltage power supply (3) is a programmable high-voltage power supply, which can independently control the voltage of each electrode.

2. The laser marking area uniformity auxiliary control device according to claim 1, characterized in that, An insulating layer is provided between the electrode (2) and the auxiliary heating electrode and the perovskite thin film battery substrate (1).

3. The laser scribe area uniformity assist control apparatus of claim 2, wherein, The insulating layer is made of SiO2 or Al2O3, and its thickness is 100-500nm.

4. The laser scribe area uniformity assist control apparatus of claim 1, wherein, The electrode (2) and the auxiliary heating electrode are made of transparent conductive oxide or metal grid wire.

5. The laser marking area uniformity auxiliary control device according to claim 4, characterized in that, The electrode (2) and the auxiliary heating electrode are made of ITO.

6. The laser marking area uniformity auxiliary control device according to claim 1, characterized in that, The spacing between two adjacent electrodes is 5-10 mm.

7. The laser marking area uniformity auxiliary control device according to claim 1, characterized in that, The high-voltage power supply (3) outputs a voltage of 0-1000V.

8. A line marking system, characterized in that, It includes a synchronization controller, a laser (6), an optical path transmission device (4) connected in sequence to the laser (6), a scanning galvanometer (5), and a laser scribing area uniformity auxiliary control device as described in any one of claims 1-7; The synchronization controller is connected to the optical path transmission device (4) and the high voltage power supply (3) for synchronous control of the laser scanning position and electric field distribution.

9. The marking system according to claim 8, characterized in that, The system includes a support platform (7) located below the electrode (2) and the auxiliary heating electrode.

10. A method for marking lines using the marking system of claim 8 or 9, characterized in that, include: The characteristics of the perovskite thin film battery substrate (1) were tested to obtain the film thickness distribution and crystallinity distribution in each region of the perovskite thin film battery substrate (1); The film thickness distribution, crystallinity distribution and scribing width of each region of the perovskite thin film battery substrate (1) are input into the pre-established correspondence model between electric field strength and scribing width to obtain the electric field distribution and electric field strength that need to be compensated for each region of the perovskite thin film battery substrate (1). Based on the electric field distribution and electric field intensity required to compensate for each region of the perovskite thin film battery substrate (1), the required voltage values ​​for each electrode are obtained; Start the laser (6) to scan and draw lines along the preset trajectory. Use the synchronous controller to simultaneously control the laser position and the high voltage power supply (3) to output the required voltage value to the electrode in the area corresponding to the laser position, forming a corresponding electric field compensation, so that the drawn area is restored to the target value. When the laser moves to the end of the scribing line, the voltage of the auxiliary heating electrode is reduced to compensate for the heat accumulation effect and complete the laser scribing.

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