A novel method for preparing AG glass based on nano-island mask

By combining nano-island masks with PVD coating and low-concentration hydrofluoric acid etching technology, the problems of uneven surface roughness, insufficient flash point control and obvious particle texture in the traditional AG glass preparation were solved, and the preparation of ultra-fine nano-pit structures with high efficiency and low cost was achieved.

CN122279500APending Publication Date: 2026-06-26ZHE JIANG CHANGXING HELI OPTOELECTRONIC TECH CO LTD
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Patent Information

Application Number
CN202610357756.4
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2026-03-23
Publication Date
2026-06-26
Patent Text Reader

Abstract

This invention relates to the field of glass surface treatment technology and discloses a novel AG glass preparation method based on nano-island masks. The method includes glass substrate pretreatment, PVD coating to form nano-islands, hydrofluoric acid etching, mask removal, and post-treatment. Specifically, it includes the following steps: Step 1: Glass substrate pretreatment: Clean the glass substrate to remove surface grease and contaminants; Step 2: PVD coating to form nano-islands: Place the glass substrate in a vacuum environment and use physical vapor deposition (PVD) to form uniformly distributed nano-islands on the surface of the pretreated glass substrate. The nano-islands have a size of 50-100 nanometers and a spacing of 200-500 nanometers. This novel AG glass preparation method based on nano-island masks uses nano-islands as the mask material, replacing the organic masks or random particle masks used in traditional processes. The nano-islands form a CrF₃ passivation layer in hydrofluoric acid, exhibiting higher corrosion resistance and stability, and ensuring precise control of the etching process.
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