Solid precursor source bottle

By using a carrier disk design in the solid precursor source bottle to replace the traditional embedded hollow tube, the cleaning and refurbishment operations are simplified, ensuring uniform mixing of carrier gas and steam. This solves the problem of high cleaning and refurbishment difficulty in the existing technology and improves the stability and cost-effectiveness of the process.

CN122279533APending Publication Date: 2026-06-26JIANGSU RONGDAO SEMICON TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
JIANGSU RONGDAO SEMICON TECH CO LTD
Filing Date
2026-04-17
Publication Date
2026-06-26

AI Technical Summary

Technical Problem

The embedded hollow tube structure of existing solid precursor source bottles makes cleaning and refurbishment difficult, and residues are hard to remove completely, affecting process cleanliness and service life.

Method used

The design employs a carrier plate with carrier gas sub-channels and mixing channels, replacing traditional embedded hollow tubes. This simplifies cleaning and refurbishment operations and ensures full contact and uniform mixing of the carrier gas and steam.

Benefits of technology

This reduces the difficulty of cleaning and refurbishing the source bottle, lowers the cost of use, and ensures the stability and uniformity of the precursor vapor, thereby improving the quality of the process and the yield of the device.

✦ Generated by Eureka AI based on patent content.

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    Figure CN122279533A_ABST
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Abstract

This application relates to a solid precursor source bottle, comprising: a bottle body having a bottom, a wall, and a cap, the bottom, wall, and cap forming a sealed vapor chamber; the cap being detachably connected to the wall, and having a carrier gas inlet and a vapor outlet; the carrier gas inlet for inputting carrier gas, and the vapor outlet for discharging a mixture of carrier gas and vapor; and multiple carrier trays stacked along a first direction, each tray including a tray wall and a tray bottom for placing solid precursor material, the tray wall being connected to the edge of the tray bottom and extending along the first direction, which is the direction of the central axis of the bottle body; wherein, the tray bottom protrudes towards the cap and has a carrier gas sub-channel and a mixing channel surrounding the carrier gas sub-channel; after the carrier gas flows from the carrier gas inlet through the multiple carrier gas sub-channels, the generated vapor is carried away from the vapor chamber through the vapor outlet from the multiple mixing channels. This simplifies the cleaning and refurbishment of the internal components of the source bottle, thereby reducing the difficulty and cost of reuse.
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Citation Information

Patent Citations

  • Solid-state precursor supply chamber

    CN118223002B