Method and device for controlling gas flow in multi-modal gas injection, equipment, medium

By calculating preset flow controller parameters through deconvolution, the problem of nonlinear distortion of gas flow in multimodal gas injection was solved, achieving high-precision gas flow control, eliminating diffusion effects, and improving the calibration accuracy of gas analyzers.

CN122284690APending Publication Date: 2026-06-26INST OF ENGINEERING THERMOPHYSICS - CHINESE ACAD OF SCI
View PDF 0 Cites 0 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
INST OF ENGINEERING THERMOPHYSICS - CHINESE ACAD OF SCI
Filing Date
2026-03-26
Publication Date
2026-06-26

AI Technical Summary

Technical Problem

Nonlinear distortion exists in gas flow control during multimodal gas injection, resulting in large calibration errors during the calibration of gas analyzers. Existing hardware adjustment methods cannot effectively solve the problem of the coexistence of the benefits and drawbacks of diffusion.

Method used

By acquiring the flow rate and time stamp of the injected gas from the flow controller, the diffusion mechanism function is calculated using deconvolution, and the parameters of the flow controller are preset to eliminate the diffusion effect, thereby achieving high-precision flow control.

Benefits of technology

Without altering the hardware layout, it improves the accuracy of gas flow control, effectively eliminates the effects of diffusion and backflow diffusion, and ensures high-precision gas injection in the designated area.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN122284690A_ABST
    Figure CN122284690A_ABST
Patent Text Reader

Abstract

This invention relates to a method, apparatus, device, and medium for controlling gas flow rate in multimodal gas injection, relating to the field of gas injection. The method includes: acquiring the flow rate of the injected gas from a flow controller, a time stamp, and the flow rate at any location; determining the transmission time based on the time stamp; performing deconvolution calculation on the flow rate at any location and the flow controller flow rate to calculate a diffusion mechanism function; performing deconvolution calculation on the desired flow rate in a specified region and the diffusion mechanism function to obtain a preset flow rate for the flow controller; and discretizing the preset flow rate to obtain the execution injection flow rate for modal gas injection. The control method provided by this invention utilizes the physical principles of diffusion effects and incorporates the diffusion influence into the flow control program in advance using preset parameters, thereby objectively solving the flow distortion caused by diffusion during multimodal gas injection.
Need to check novelty before this filing date? Find Prior Art

Description

TECHNICAL FIELD

[0001] The present application relates to the field of gas injection, in particular to a method and device for controlling gas flow in multi-modal gas injection, equipment and medium. BACKGROUND

[0002] In terms of gas flow control, it is often necessary to inject gases of different components into a specified area at a specific flow rate. However, there are various transmission pipelines and gas mixers between the gas flow controller and the specified area, and the mixing and transmission of gases usually require a certain time and space.

[0003] Gas has a natural diffusion effect during transmission, including counterflow diffusion. Therefore, the gas flow controller sets a flow control program for the injection of gas. Although the natural diffusion effect has little impact on long-term constant flow injection, for multi-modal gas injection such as pulse, step, linear ramp or non-linear, the diffusion effect will cause a large error between the flow set by the flow controller and the specified area.

[0004] Further, when mixing gas injection is performed, the natural diffusion of gas is used to effectively mix multiple gases, rather than simply adding them together. Diffusion will cause counterflow diffusion and forward diffusion of injected gas, resulting in a dispersed layout of injected gas in space and changes in flow relationships.

[0005] Currently, to address the non-linear distortion of flow signals due to diffusion during multi-modal gas injection, the general solution is to use simple and intuitive hardware component adjustments. Typical methods include the following three categories:

[0006] ① Shorten the distance of the transmission pipeline to shorten the transmission pipeline as much as possible, thereby shortening the time of diffusion effect and making the set parameters of the flow controller more directly reflect the specified area.

[0007] ② Cancel the gas mixing unit and directly connect the pipeline at the outlet of the flow controller to the specified area to directly change the flow in the specified area.

[0008] ③ Arrange a one-way flow control unit, such as a buffer ring or a one-way valve, or optimize the design of the mixer structure to minimize pressure fluctuations during diffusion.

[0009] The technical defects of the above three methods are that the diffusion effect is intuitively recognized as having a negative impact. In fact, gas diffusion is also the basic principle of fully mixing different components during multi-modal gas injection. Furthermore, diffusion as a natural phenomenon objectively exists in the interaction of different components, and diffusion is beneficial to the pressure stability of the gas injection process, preventing large fluctuations in pressure.

[0010] However, while shortening the transmission pipeline distance or eliminating the gas mixing unit minimizes the diffusion effect, it can also cause uneven mixing. For example, directly connecting the flow controller outlet pipeline to a designated area often results in significant inhomogeneity. If pulsed multimodal gas injection is used, it can even cause pressure fluctuations in the designated area, hindering the transmission of the mainstream gas and affecting the flow controller's operation. Similarly, while arranging unidirectional flow control units can eliminate some of the countercurrent diffusion effect, it strengthens forward diffusion.

[0011] In fact, gas diffusion, as a natural and objective law, ensures thorough gas mixing but also causes nonlinear distortion of flow rate. Mixing and distortion are the coexisting problems of advantages and disadvantages faced by the multimodal gas injection process, which cannot be effectively solved by the aforementioned hardware layout adjustments.

[0012] In summary, diffusion has a significant impact on multimodal gas injection because the multimodal gas injection process has two typical characteristics: different types of injected gas and diverse injection methods. This causes diffusion to lead to nonlinear distortion of the actual flow rate of multimodal gas injection, resulting in a large calibration error when calibrating gas analyzers. Summary of the Invention

[0013] In view of the problems existing in the prior art, the purpose of the present invention is to provide a method, device, equipment and medium for controlling gas flow rate in multimodal gas injection, so as to solve the defect that the nonlinear distortion of the actual gas flow rate in multimodal gas injection leads to large calibration errors when calibrating gas analysis instruments.

[0014] To achieve this objective, the present invention adopts the following technical solution:

[0015] In a first aspect, the present invention provides a method for controlling gas flow rate in multimodal gas injection, the control method comprising:

[0016] The flow rate M of the injected gas is obtained from the flow controller. c,cal (t), time stamp, and flow rate M at any location r,cal (t,Δt);

[0017] The transmission time Δt is determined based on the time stamp;

[0018] Flow M based on arbitrary location r,cal (t,Δt) and flow controller flow M c,cal (t) is deconvolutioned to calculate the diffusion mechanism function D(Δt);

[0019] Based on the expected flow rate M in the specified area r,expThe preset flow rate M of the flow controller is obtained by deconvolution of the flow rate (t) and the diffusion mechanism function D(Δt). c,set (t, -Δt);

[0020] For the preset flow rate M c,set (t, -Δt) is discretized to obtain the execution injection flow rate of modal gas injection.

[0021] The control method provided by this invention utilizes the physical principle of diffusion effect and incorporates the diffusion effect into the flow control program in advance by setting parameters, thereby objectively solving the flow distortion caused by diffusion during multimodal gas injection.

[0022] As a preferred technical solution of the present invention, the injected gas includes: a single gas or a mixture of gases.

[0023] As a preferred technical solution of the present invention, the injection method of the injected gas includes: pulse injection, square wave injection, triangular wave injection, step injection, or periodic injection.

[0024] As a preferred technical solution of the present invention, the time marker includes: forming an air injection marker with handshake protocol function by using a designed combination of high and low square wave flow rates.

[0025] Preferably, the transmission time Δt includes: the transmission time of the gas time stamp from the flow controller to the designated area.

[0026] As a preferred embodiment of the present invention, the deconvolution formula for the diffusion mechanism function D(Δt) is as follows:

[0027] .

[0028] As a preferred technical solution of the present invention, the preset flow rate M of the flow controller c,set The formula for calculating (t, -Δt) is as follows:

[0029] .

[0030] As a preferred embodiment of the present invention, the time interval in the discretization process is the same as the response time of the flow control.

[0031] In a second aspect, the present invention provides a gas flow control device for multimodal gas injection, the control device comprising:

[0032] The acquisition module acquires the flow rate M of the injected gas from the flow controller. c,cal (t), time stamp, and flow rate M at any location r,cal (t,Δt);

[0033] The calculation module is used to determine the transmission time Δt based on the timestamp; and to determine the flow M based on any location. r,cal (t,Δt) and flow controller flow M c,cal (t) Perform deconvolution to calculate the diffusion mechanism function D(Δt); based on the expected flow rate M in the specified area r,exp The preset flow rate M of the flow controller is obtained by deconvolution of the flow rate (t) and the diffusion mechanism function D(Δt). c,set (t, -Δt);

[0034] The control module controls the preset flow rate M. c,set (t, -Δt) is discretized to obtain the execution injection flow rate of modal gas injection, and the flow rate of the injected gas is adjusted to the execution injection flow rate.

[0035] Thirdly, the present invention provides an electronic device comprising: at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores a computer program executable by the at least one processor, the computer program being executed by the at least one processor to enable the at least one processor to perform the gas flow control method in multimodal gas injection as described in the first aspect.

[0036] Fourthly, the present invention provides a computer storage medium storing computer-executable instructions, which, when executed by a processor, implement the gas flow control method in multimodal gas injection as described in the first aspect.

[0037] Compared with existing technical solutions, the present invention has the following beneficial effects:

[0038] (1) The control method provided by the present invention does not require much change to the hardware layout, including hardware facilities such as mixers and transmission pipelines, during the technical implementation process.

[0039] (2) The control method provided by the present invention can integrate intelligent functions such as deconvolution and parameter preset adjustment into the control software of multimodal gas injection in the form of software program, which is beneficial to improve the control accuracy of the equipment.

[0040] (3) The control method provided by the present invention enables high-precision gas injection flow control in a designated area and effectively eliminates the effects of diffusion and backflow diffusion. Attached Figure Description

[0041] Figure 1 This is a flowchart of a method for controlling gas flow rate in multimodal gas injection provided by an embodiment of the present invention;

[0042] Figure 2 This is a schematic diagram illustrating the process of determining the transmission time Δt based on a time stamp in an embodiment of the present invention;

[0043] Figure 3 In this embodiment of the invention, the preset flow rate M is... c,set A schematic diagram illustrating the discretization process of (t, -Δt);

[0044] Figure 4 This is a schematic diagram of a gas flow control device for multimodal gas injection provided in an embodiment of the present invention;

[0045] Figure 5 This is a schematic diagram of an electronic device provided in an embodiment of the present invention;

[0046] Figure 6 This is a flowchart of the gas flow rate control method in multimodal gas injection according to Embodiment 1 of the present invention;

[0047] Figure 7 This is a comparison chart of the expected and actual values ​​of O2 flow rate in Embodiment 1 of the present invention;

[0048] Figure 8 This is a three-dimensional mass spectrometry image of the gas component flow detection process in Embodiment 1 of the present invention.

[0049] In the picture:

[0050] 100 - Acquisition module, 200 - Calculation module, 300 - Control module;

[0051] 10-Electronic device, 11-Processor, 12-ROM, 13-RAM, 14-Bus, 15-I / O interface, 16-Input unit, 17-Output unit, 18-Storage unit, 19-Communication unit.

[0052] The present invention will now be described in further detail. However, the examples described below are merely simplified examples of the present invention and do not represent or limit the scope of protection of the present invention. The scope of protection of the present invention is determined by the claims. Detailed Implementation

[0053] To better illustrate the present invention and facilitate understanding of its technical solutions, typical but non-limiting embodiments of the present invention are as follows:

[0054] I. This embodiment provides a method for controlling gas flow rate in multimodal gas injection, the process of which is as follows: Figure 1 As shown, the control method includes:

[0055] The flow rate M of the injected gas is obtained from the flow controller. c,cal (t), time stamp, and flow rate M at any location r,cal (t,Δt);

[0056] The transmission time Δt is determined based on the time stamp;

[0057] Flow M based on arbitrary location r,cal (t,Δt) and flow controller flow M c,cal (t) is deconvolutioned to calculate the diffusion mechanism function D(Δt);

[0058] Based on the expected flow rate M in the specified area r,exp The preset flow rate M of the flow controller is obtained by deconvolution of the flow rate (t) and the diffusion mechanism function D(Δt). c,set (t, -Δt);

[0059] For the preset flow rate M c,set (t, -Δt) is discretized to obtain the execution injection flow rate of modal gas injection.

[0060] In this invention, it is ensured that there is no gas leakage or pressure fluctuation during the gas injection process.

[0061] In this invention, the flow rate M at any location r,cal (t,Δt) can be obtained by arranging detection units in a specified area, selecting mass spectrometry as the detector, and analyzing the flow values ​​of different components in this area using the mass spectrometry equivalent characteristic map method.

[0062] In this invention, the desired flow rate M in a specified area r,exp (t) represents the ideal flow rate change over time during the test process, which is determined according to the actual test process requirements and may include various flow rate forms, such as triangular waveforms, square waves, steps, periodic waves, etc.

[0063] The injected gas includes a single gas or a mixture of gases.

[0064] The injection methods of the injected gas include: pulse injection, square wave injection, triangular wave injection, step injection, or periodic injection.

[0065] The time stamp includes: an air injection stamp with handshake protocol functionality formed by a designed combination of high and low square wave flow rates. Examples include: a high-low-high pulse square wave, etc.

[0066] Wherein, the transmission time Δt includes: the transmission time of the gas time stamp from the flow controller to the designated area, such as... Figure 2 As shown.

[0067] The deconvolution formula for the diffusion mechanism function D(Δt) is as follows:

[0068] In the formula This is a convolution operation.

[0069] In this invention, the diffusion mechanism function D(Δt) is a nonlinear gas diffusion mechanism function constructed based on the dynamic characteristic distribution of the diffusion process.

[0070] In this invention, the diffusion mechanism function D(Δt) is a commonly used diffusion function in this field. For example, referring to "Mathematical Methods in Physics" (edited by Gu Qiao, Science Press), it is the kernel function for solving the transport-diffusion differential equation. For the problem of gas diffusion, the kernel function is the diffusion mechanism function.

[0071] Wherein, the preset flow rate M of the flow controller c,set The formula for calculating (t, -Δt) is as follows:

[0072] .

[0073] The time interval in the discretization process is the same as the response time of the flow control.

[0074] In this invention, deconvolution calculation refers to performing inverse calculations based on convolution operations to obtain the relevant unknowns. Specifically, the deconvolution operation will give the diffusion mechanism function D(Δt), and then calculate to obtain the unknown characteristic parameters in the diffusion mechanism function D(Δt).

[0075] In this invention, discretization refers to the process of setting the preset flow rate M. c,set (t, -Δt) is discretized into continuous pulses with different time intervals. The minimum pulse time interval is determined by the response time of the flow control, thus forming a preset parameter adjustment program for multimodal gas injection. For example, the preset flow rate M obtained from deconvolution calculation... c,set The time continuity of (t, -Δt) is determined by using the minimum stable control time interval δt of the flow controller as the basic time unit, and dividing the preset flow rate M into segments. c,set (t, -Δt), a fixed value is set for the flow rate in each time metering unit. The value is the average value in this time unit, thus obtaining the execution injection flow rate of multimodal gas injection, such as Figure 3 As shown.

[0076] II. This embodiment provides a gas flow control device for multimodal gas injection, such as... Figure 4 As shown, the control device includes:

[0077] Module 100 acquires the flow rate M of the injected gas from the flow controller. c,cal (t), time stamp, and flow rate M at any location r,cal (t,Δt);

[0078] Calculation module 200 is used to determine the transmission time Δt based on a timestamp; and to determine the flow rate M based on any location. r,cal (t,Δt) and flow controller flow Mc,cal (t) Perform deconvolution to calculate the diffusion mechanism function D(Δt); based on the expected flow rate M in the specified area r,exp The preset flow rate M of the flow controller is obtained by deconvolution of the flow rate (t) and the diffusion mechanism function D(Δt). c,set (t, -Δt);

[0079] Control module 300, for preset flow rate M c,set (t, -Δt) is discretized to obtain the execution injection flow rate of modal gas injection, and the flow rate of the injected gas is adjusted to the execution injection flow rate.

[0080] Regarding the apparatus in the above embodiments, the specific manner in which each module performs its operation has been described in detail in the embodiments related to the method, and will not be elaborated upon here.

[0081] III. This embodiment provides an electronic device intended to represent various forms of digital computers, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device may also represent various forms of mobile devices, such as personal digital processors, cellular phones, smartphones, wearable devices (e.g., helmets, glasses, watches, etc.), and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely illustrative and are not intended to limit the implementation of the invention described and / or claimed herein.

[0082] like Figure 5 As shown, the electronic device 10 includes at least one processor 11 and a memory, such as a read-only memory (ROM) 12 or a random access memory (RAM) 13, communicatively connected to the at least one processor 11. The memory stores computer programs executable by the at least one processor. The processor 11 can perform various appropriate actions and processes based on the computer program stored in the ROM 12 or loaded into the RAM 13 from storage unit 18. The RAM 13 can also store various programs and data required for the operation of the electronic device 10. The processor 11, ROM 12, and RAM 13 are interconnected via a bus 14. An I / O interface 15 is also connected to the bus 14.

[0083] Multiple components in electronic device 10 are connected to I / O interface 15, including: input unit 16, such as keyboard, mouse, etc.; output unit 17, such as various types of displays, speakers, etc.; storage unit 18, such as disk, optical disk, etc.; and communication unit 19, such as network card, modem, wireless transceiver, etc. Communication unit 19 allows electronic device 10 to exchange information / data with other devices through computer networks such as the Internet and / or various telecommunications networks.

[0084] Processor 11 can be a variety of general-purpose and / or special-purpose processing components with processing and computing capabilities. Some examples of processor 11 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various special-purpose artificial intelligence (AI) computing chips, various processors running machine learning model algorithms, a digital signal processor (DSP), and any suitable processor, controller, microcontroller, etc. Processor 11 performs the various methods and processes described above, such as methods for controlling gas flow in multimodal gas injection.

[0085] In some embodiments, the method for controlling the gas flow rate in multimodal gas injection can be implemented as a computer program tangibly contained in a computer-readable storage medium, such as storage unit 18. In some embodiments, part or all of the computer program can be loaded and / or installed on electronic device 10 via ROM 12 and / or communication unit 19. When the computer program is loaded into RAM 13 and executed by processor 11, one or more steps of the method for controlling the gas flow rate in multimodal gas injection described above can be performed. Alternatively, in other embodiments, processor 11 can be configured to perform the method for controlling the gas flow rate in multimodal gas injection by any other suitable means (e.g., by means of firmware).

[0086] Various embodiments of the systems and techniques described above herein can be implemented in digital electronic circuit systems, integrated circuit systems, field-programmable gate arrays (FPGAs), application-specific integrated circuits (ASICs), application-specific standard products (ASSPs), systems-on-a-chip (SoCs), payload-programmable logic devices (CPLDs), computer hardware, firmware, software, and / or combinations thereof. These various embodiments may include implementations in one or more computer programs that can be executed and / or interpreted on a programmable system including at least one programmable processor, which may be a dedicated or general-purpose programmable processor, capable of receiving data and instructions from a storage system, at least one input device, and at least one output device, and transmitting data and instructions to the storage system, the at least one input device, and the at least one output device.

[0087] Computer programs used to implement the methods of the present invention may be written in any combination of one or more programming languages. These computer programs may be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing device, such that when executed by the processor, the computer programs cause the functions / operations specified in the flowcharts and / or block diagrams to be performed. The computer programs may be executed entirely on a machine, partially on a machine, or as a standalone software package, partially on a machine and partially on a remote machine, or entirely on a remote machine or server.

[0088] In the context of this invention, a computer-readable storage medium can be a tangible medium that may contain or store a computer program for use by or in conjunction with an instruction execution system, apparatus, or device. A computer-readable storage medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatus, or devices, or any suitable combination thereof. Alternatively, a computer-readable storage medium may be a machine-readable signal medium. More specific examples of machine-readable storage media include electrical connections based on one or more wires, portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fibers, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination thereof.

[0089] To provide interaction with a user, the systems and techniques described herein can be implemented on an electronic device having: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and pointing device (e.g., a mouse or trackball) through which the user provides input to the electronic device. Other types of devices can also be used to provide interaction with the user; for example, feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user can be received in any form (including sound input, voice input, or tactile input).

[0090] The systems and technologies described herein can be implemented in computing systems that include backend components (e.g., as data servers), or middleware components (e.g., application servers), or frontend components (e.g., user computers with graphical user interfaces or web browsers through which users can interact with implementations of the systems and technologies described herein), or any combination of such backend, middleware, or frontend components. The components of the system can be interconnected via digital data communication of any form or medium (e.g., communication networks). Examples of communication networks include local area networks (LANs), wide area networks (WANs), blockchain networks, and the Internet.

[0091] A computing system can include clients and servers. Clients and servers are generally located far apart and typically interact through communication networks. The client-server relationship is created by computer programs running on the respective computers and having a client-server relationship with each other. The server can be a cloud server, also known as a cloud computing server or cloud host, which is a hosting product within the cloud computing service system to address the shortcomings of traditional physical hosts and VPS services, such as high management difficulty and weak business scalability.

[0092] The server provided in this embodiment includes: a memory, a processor, and a computer program stored in the memory and capable of running on the processor. When the processor executes the program, it implements a method for controlling the gas flow rate in multimodal gas injection.

[0093] Unless otherwise specifically stated, terms such as processing, calculation, operation, determination, display, etc., may refer to the actions and / or processes of one or more processing or computing systems or similar devices that represent the manipulation and conversion of data representing physical (e.g., electronic) quantities within the registers or memory of the processing system into other data similarly representing physical quantities within the memory, registers, or other such information storage, transmission, or display devices of the processing system. Information and signals can be represented using any of a variety of different techniques and methods. For example, data, instructions, commands, information, signals, bits, symbols, and chips mentioned throughout the above description can be represented by voltage, current, electromagnetic waves, magnetic fields or particles, light fields or particles, or any combination thereof.

[0094] Those skilled in the art will also understand that the various illustrative logic blocks, modules, circuits, and algorithm steps described in conjunction with embodiments of the present invention can all be implemented as electronic hardware, computer software, or a combination thereof. To clearly illustrate the interchangeability between hardware and software, the various illustrative components, blocks, modules, circuits, and steps described above are generally described in terms of their functionality. Whether this functionality is implemented as hardware or software depends on the specific application and the design constraints imposed on the overall system. Those skilled in the art can implement the described functionality in alternative ways for each specific application; however, such implementation decisions should not be construed as departing from the scope of protection of the present invention.

[0095] The steps of the methods or algorithms described in conjunction with the embodiments herein can be directly embodied in hardware, software modules executed by a processor, or a combination thereof. The software modules can reside in RAM memory, flash memory, ROM memory, EPROM memory, EEPROM memory, registers, hard disks, removable disks, CD-ROMs, or any other form of storage medium well known in the art. An exemplary storage medium is connected to the processor, enabling the processor to read information from and write information to the storage medium. Of course, the storage medium can also be a component of the processor. The processor and storage medium can reside in an ASIC. The ASIC can reside in a user terminal. Alternatively, the processor and storage medium can exist as discrete components in the user terminal.

[0096] For software implementation, the techniques described in this invention can be implemented using modules (e.g., procedures, functions, etc.) that perform the functions described in this application. This software code can be stored in memory units and executed by a processor. The memory units can be implemented within the processor or externally; in the latter case, they are communicatively coupled to the processor via various means, as is well known in the art.

[0097] IV. To illustrate the effectiveness of the gas flow control method in multimodal gas injection provided by this invention, the following example is used:

[0098] Example 1

[0099] This embodiment provides a method for controlling gas flow rate in multimodal gas injection, the process of which is as follows: Figure 6 As shown, the details are as follows:

[0100] In this embodiment, Ar is selected as the carrier gas and injected at a fixed flow rate through a flow controller. O2 is selected as the injected gas, and its flow rate is determined according to... Figure 7 The expected value required for injection. In the actual gas injection process, if the flow controller follows... Figure 7If the expected value is set too high, a significant diffusion effect will occur, resulting in a tiling phenomenon during the step-up process. By using the control method of this invention to preset the parameters of the flow controller, and taking into account the diffusion relationship, the flow program is then reset. Figure 7 The actual O2 flow rate was close to the expected value, especially when the flow rate fluctuated drastically, the diffusion effect was essentially eliminated. Figure 7 At the highest flow step, it can be seen that after over-adjustment, the actual flow value will show a spike.

[0101] In this embodiment, the real-time detection and analysis of the flow rates of different gas components is performed by mass spectrometry. The three-dimensional mass spectrometry data of the detection process are as follows: Figure 8 As shown, the mass spectrometry data in the figure were analyzed using the equivalent characteristic spectrum method, a quantitative mass spectrometry analysis method. Figure 8 The data is directly calculated and determined. Figure 7 The flow of data within the system.

[0102] The present invention is described in detail through the above embodiments, but the present invention is not limited to the above detailed structural features, that is, it does not mean that the present invention must rely on the above detailed structural features to be implemented. Those skilled in the art should understand that any improvements to the present invention, equivalent substitutions for the components used in the present invention, additions of auxiliary components, and selection of specific methods, etc., all fall within the protection scope and disclosure scope of the present invention.

[0103] The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present invention, various simple modifications can be made to the technical solution of the present invention, and these simple modifications all fall within the protection scope of the present invention.

[0104] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not describe the various possible combinations separately.

[0105] Furthermore, various different embodiments of the present invention can be combined in any way, as long as they do not violate the spirit of the present invention, they should also be regarded as the content disclosed by the present invention.

Claims

1. A method for controlling gas flow rate in multimodal gas injection, characterized in that, The control method includes: The flow rate M of the injected gas is obtained from the flow controller. c,cal (t), time stamp, and flow rate M at any location r,cal (t,Δt); The transmission time Δt is determined based on the time stamp; Flow M based on arbitrary location r,cal (t,Δt) and flow controller flow M c,cal (t) is deconvolutioned to calculate the diffusion mechanism function D(Δt); Based on the expected flow rate M in the specified area r,exp The preset flow rate M of the flow controller is obtained by deconvolution of the flow rate (t) and the diffusion mechanism function D(Δt). c,set (t, -Δt); For the preset flow rate M c,set (t, -Δt) is discretized to obtain the execution injection flow rate of modal gas injection.

2. The control method as described in claim 1, characterized in that, The injected gas includes a single gas or a mixture of gases.

3. The control method as described in claim 1, characterized in that, The injection methods for the injected gas include: pulse injection, square wave injection, triangular wave injection, step injection, or periodic injection.

4. The control method as described in claim 1, characterized in that, The time stamp includes: forming an air injection mark with a handshake protocol function by using a designed combination of high and low square wave flow rates; Preferably, the transmission time Δt includes: the transmission time of the gas time stamp from the flow controller to the designated area.

5. The control method as described in claim 1, characterized in that, The deconvolution formula for the diffusion mechanism function D(Δt) is as follows: 。 6. The control method as described in claim 1, characterized in that, The preset flow rate M of the flow controller c,set The formula for calculating (t, -Δt) is as follows: 。 7. The control method as described in claim 1, characterized in that, The time interval in the discretization process is the same as the response time of the flow control.

8. A gas flow control device for multimodal gas injection, characterized in that, The control device includes: The acquisition module acquires the flow rate M of the injected gas from the flow controller. c,cal (t), time stamp, and flow rate M at any location r,cal (t,Δt); The calculation module is used to determine the transmission time Δt based on the timestamp; and to determine the flow M based on any location. r,cal (t,Δt) and flow controller flow M c,cal (t) Perform deconvolution to calculate the diffusion mechanism function D(Δt); based on the expected flow rate M in the specified area r,exp The preset flow rate M of the flow controller is obtained by deconvolution of the flow rate (t) and the diffusion mechanism function D(Δt). c,set (t, -Δt); The control module controls the preset flow rate M. c,set (t, -Δt) is discretized to obtain the execution injection flow rate of modal gas injection, and the flow rate of the injected gas is adjusted to the execution injection flow rate.

9. An electronic device, characterized in that, The electronic device includes: At least one processor; and a memory communicatively connected to said at least one processor; The memory stores a computer program that can be executed by the at least one processor, which enables the at least one processor to perform the gas flow control method in multimodal gas injection as described in any one of claims 1-7.

10. A computer storage medium, characterized in that, The computer storage medium stores computer-executable instructions, which, when executed by a processor, implement the gas flow control method in multimodal gas injection as described in any one of claims 1-7.