Semiconductor device and power module

By designing a two-layer trench structure in the IGBT and optimizing the position of the upper electrode, the problem of reduced withstand voltage caused by overlap in high electric field regions is solved, thus improving the withstand voltage performance of the IGBT.

CN122294517APending Publication Date: 2026-06-26MITSUBISHI ELECTRIC CORP
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
MITSUBISHI ELECTRIC CORP
Filing Date
2025-11-18
Publication Date
2026-06-26

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Abstract

The purpose of this disclosure is to provide a semiconductor device capable of improving voltage withstand capability. The semiconductor device of this disclosure includes: a semiconductor substrate; a base layer disposed on the upper surface side of the semiconductor substrate; at least one carrier accumulation layer disposed below the base layer; and at least one two-layer trench, wherein an upper electrode is provided in the upper layer and a lower electrode is provided in the lower layer within the trench extending through the base layer and the carrier accumulation layer on the upper surface side of the semiconductor substrate. The lower end of the upper electrode is located above the lower end of the carrier accumulation layer and below the center position of the carrier accumulation layer in the vertical direction.
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Citation Information

Patent Citations

  • Semiconductor device

    JP2020077727A