Integrated high purity gas filter device and method

Abstract

This invention discloses an integrated high-purity gas filter device and method, relating to the field of gas filtration technology. The device includes an adjustable rotor pump, a guide valve, and two cylindrical sections (left and right). Each cylindrical section houses a composite filter element, a sintered filter element, and a vibrating electrostatic precipitator. The adjustable rotor pump delivers gas to one of the cylindrical sections via the guide valve. The gas sequentially passes through the composite filter element, the vibrating electrostatic precipitator, and the sintered filter element, completing multi-stage purification. The adjustable rotor pump uses an adjusting solenoid to change the volume of the eccentric cavity to stably regulate the gas supply flow. The guide valve controls the operation of one cylindrical section in use and the other in standby mode. An intermediate pipe allows the standby cylindrical section to be back-purged by the output gas from the working section while offline, and this, combined with a heater, performs thermal desorption and regeneration of the composite filter element. This invention integrates gas supply, multi-stage purification, and online cleaning functions into a single unit, achieving high-precision filtration and continuous stable operation within a compact structure, effectively extending the filter element's lifespan.

Description

Technical Field

[0001] This invention relates to the field of gas filtration technology, specifically to an integrated high-purity gas filter device and method. Background Technology

[0002] Gas filters are widely used in fields such as semiconductor manufacturing, precision instruments, and biomedicine, where high gas purity is required. Their core function is to remove particulate matter, oil, moisture, and molecular impurities from airflow. As manufacturing processes become increasingly micro-scale, the requirements for filtration precision and efficiency have risen from the micrometer level to the sub-micrometer and even nanometer level. Simultaneously, in the field of environmental protection equipment manufacturing, gas filtration technology is also a crucial link in air pollution control and industrial waste gas purification. Whether it's civilian indoor air purifiers or industrial dust removal equipment, the technological evolution is pointing towards higher precision and more compact structural integration.

[0003] Currently, most common gas filtration equipment uses a single structure of shell and filter element, with a filtration accuracy typically ranging from 1 to 10 micrometers, which is insufficient for high-purity applications. Cyclone dust collectors are commonly used for coarse particle separation, but their ability to capture fine particles is limited. Industrial electrostatic precipitators (ESPs) utilize 5-100 kV DC power to generate high-voltage ionization and a strong electric field, enabling the adsorption of particles as small as 0.01 μm. However, these devices are large, complex in structure, and require an external high-voltage power supply. In recent years, some manufacturers have introduced combined filters using nanoscale PTFE composite membranes and 316L or pure nickel sintered metal filter elements. These products can control pore uniformity within the range of 0.01-1 μm, are resistant to high pressure and high temperature, and can meet the stringent requirements of photolithography processes for intercepting submicron-sized particles. The PTFE composite membrane, biaxially stretched to form a spiderweb-like three-dimensional microporous structure, has a pore size of 0.2-0.5 μm and a porosity of 80%-93%, effectively capturing particles smaller than 0.1 μm through Brownian motion.

[0004] However, the existing technologies still have two shortcomings. First, existing filtration devices mostly use independent functional modules, with air source, filtration, and regeneration processes scattered, failing to form a comprehensive structure integrating air supply, multi-stage purification, and online cleaning. This results in large equipment footprint and low system integration. In on-site operations such as environmental engineering construction and ecological protection engineering, this decentralized layout further limits the portability and deployment efficiency of the equipment. Second, when using sintered metal filter elements (316L stainless steel or nickel alloy) to achieve high-precision filtration at the 0.01 µm level, the extremely small pore size of the filter element allows fine particles to gradually accumulate and clog the pores during operation. Furthermore, the lack of stable air supply flow adjustment means leads to a continuous decrease in the actual air permeability of the filter element during use, significantly limiting filtration throughput and service life. Whether for high-purity process air or for use in residential indoor air purifiers and industrial waste gas treatment, existing equipment has significant shortcomings in balancing high-precision filtration with long-term operational stability. Summary of the Invention

[0005] This invention proposes an integrated high-purity gas filter device and method. Its purpose is to solve the problems of dispersed structure and low integration of existing gas filter devices, and at the same time overcome the shortcomings of metal sintered filter elements in achieving high-precision filtration, such as continuous decrease in air permeability, limited filtration throughput and service life caused by blockage by fine particles and lack of stable means to adjust the gas supply flow rate.

[0006] The technical solution of this invention is as follows: An integrated high-purity gas filter device includes a filter element, an adjustable rotor pump, a guide valve, and left and right cylindrical bodies, with the filter element installed in the cylindrical bodies. The adjustable rotor pump has a gas flow regulation function. The pumping outlet of the adjustable rotor pump is connected to the filter inlet of the guide valve. The two cylinders are used in one and standby. The guide valve is used to transport the gas output by the adjustable rotor pump to one of the cylinders, filter it, and then return it to the guide valve, and output it from the filter outlet of the guide valve. The filter element includes a composite filter element for absorbing water and oil, and also includes a sintered filter element; a vibrating electrostatic precipitator is also provided in the cylinder; the gas to be filtered passes through the composite filter element, the vibrating electrostatic precipitator and the sintered filter element in sequence. The bottom of the cylinder is also equipped with a recycling device.

[0007] As a further improvement to the integrated high-purity gas filter device: the adjustable rotor pump includes a housing, an end cover fixedly installed on the left end of the housing, a drive shaft mounted on the end cover by a rotatable connection, an active rotor that slides with the right end of the drive shaft and rotates with the drive shaft, a rotating sleeve mounted inside the housing by a rotatable connection, an adjusting rotor disposed inside the rotating sleeve, and an adjusting screw for adjusting the relative position of the adjusting rotor with respect to the rotating sleeve in the left-right direction. The right end face of the end cap is provided with a raised cylindrical protrusion. The left end of the active rotor is embedded in the cylindrical protrusion. The outer circular surface of the active rotor is in contact with the inner circular surface of the cylindrical protrusion, and the axis of the outer circular surface of the active rotor coincides with the rotation axis of the drive shaft. The outer circular surface of the adjusting rotor is in contact with the inner circular surface of the rotating sleeve, and the axis of the outer circular surface of the adjusting rotor coincides with the rotation axis of the rotating sleeve. The inner circular surface of the rotating sleeve is also in contact with the outer circular surface of the cylindrical protrusion. The rotation axis of the rotating sleeve is eccentrically set relative to the rotation axis of the drive shaft, so that the rotating sleeve, the cylindrical protrusion, the active rotor and the adjusting rotor form an eccentric cavity. An adjusting screw is installed in the central through hole of the rotating sleeve by means of threaded engagement; a first spring is installed inside the cylindrical protrusion. The first spring is used to push the active rotor to the right so that the right end face of the active rotor is in contact with the left end face of the adjusting rotor, and so that the right end of the adjusting screw rests on the stepped surface at the right end of the central through hole of the rotating sleeve. The pumping inlet of the adjustable rotor pump is connected to the air storage chamber at the right end face of the active rotor through the center hole of the adjusting solenoid and the center through hole of the rotating sleeve. A pin plate is fixedly installed on the inner wall of the rotating sleeve. The active rotor has a first sliding groove and the adjusting rotor has a second sliding groove. The inner end of the pin plate slides in conjunction with the first sliding groove and the second sliding groove respectively. The pin plate and the narrowest position of the eccentric cavity divide the eccentric cavity into an intake cavity and an exhaust cavity. The active rotor has a central air inlet near the pin plate. The air storage chamber is connected to the air intake chamber through the central air inlet. The central air inlet is equipped with a gas valve and a second spring for pushing the gas valve outward. A central air outlet is provided on the rotating sleeve near the pin plate. The air outlet chamber is connected to the pumping air outlet of the adjustable rotor pump through the central air outlet. The intermediate air inlet and intermediate air outlet are located on both sides of the pin plate, respectively.

[0008] As a further improvement to the integrated high-purity gas filter device: the pilot valve includes a pilot valve body, a valve stem, and two pilot valve cores; Both the filter outlet and the filter inlet are located on the front end face of the guide valve body, with the filter outlet located above the filter inlet. The guide valve body is provided with two T-shaped channels, one above the other. The middle longitudinal channel of the upper T-shaped channel is connected to the filter outlet, and the two ends of the transverse channel are connected to the outlets of the two cylinders through the outlet pipes. The middle longitudinal channel of the lower T-shaped channel is connected to the filter inlet, and the two ends of the transverse channel are connected to the inlet of the two cylinders through the inlet pipes. Two guide valve cores are respectively set at the center of the two T-shaped channels. The guide valve cores are equipped with right-angle pipes to connect the middle longitudinal channel of the T-shaped channel with one end of the transverse channel. The valve stem passes vertically through the guide valve body and is used to drive the two guide valve cores to rotate synchronously.

[0009] As a further improvement to the integrated high-purity gas filter device, the outlet pipes on both sides of the guide valve are connected by an intermediate pipe, on which a valve is installed.

[0010] As a further improvement to the integrated high-purity gas filter device: the vibrating electrostatic dust removal device includes an axial vibration motor installed on the top of the cylinder, a vibration rod connected to the lower output shaft of the axial vibration motor, and a cylindrical electrostatic dust removal brush installed on the vibration rod. The sintered filter element is cylindrical, fixed inside the cylinder, and fitted onto the outside of the electrostatic dust removal brush; the annular space between the outer wall of the sintered filter element and the inner wall of the cylinder is connected to the air outlet of the cylinder.

[0011] As a further improvement to the integrated high-purity gas filter device: the output shaft of the axial vibration motor is connected to the upper end of the vibration rod via a coupling and an insulating convex-concave pad; The coupling is fixedly installed on the output shaft of the axial vibration motor. The lower end of the coupling is provided with a first circumferentially distributed protrusion, and the upper end of the vibration rod is provided with a second circumferentially distributed protrusion. The top and bottom grooves of the insulating convex and concave pad are not connected to each other. The first protrusion and the top groove of the insulating convex and concave pad are engaged, and the second protrusion and the bottom groove of the insulating convex and concave pad are engaged. A third spring is also installed at the lower part of the cylinder, which is used to push the vibrating rod upward.

[0012] As a further improvement to the integrated high-purity gas filter device: the support includes a disc and a cylinder. The disc divides the interior of the cylinder into upper and lower parts. The cylinder extends downward from the middle of the disc. The cylinder wall is provided with air holes. The cylinder is connected to the space where the electrostatic dust removal brush is located. The composite filter element is cylindrical and is wrapped around the outside of the cylinder.

[0013] As a further improvement to the integrated high-purity gas filter device: the air inlet of the cylinder is horizontally set and tangent to the cylinder, and the height of the air inlet corresponds to the composite filter element.

[0014] As a further improvement to the integrated high-purity gas filter device: the regeneration and recovery device includes a powder collection cone disposed at the bottom of the cylinder and located below the support, a heater disposed around the composite filter element, and a cover installed at the lower end of the cylinder, on which a one-way valve is installed; The bottom of the powder collecting cone is equipped with a discharge plug.

[0015] This invention also provides an integrated high-purity gas filtration method, which, based on the aforementioned integrated high-purity gas filter device, employs the following method for filtration and regeneration cleaning: During filtration, the gas output from the adjustable rotor pump enters the guide valve through the filter inlet of the guide valve, which then delivers the gas to one of the currently selected cylinders. The gas enters the cylinder tangentially, and coarse particles are thrown out by centrifugal force and fall into the powder collection cone. The remaining gas passes through the composite filter element, filters out oil and water, and then enters the cylinder of the support. It then rises to the space where the electrostatic dust removal brush is located. The electrostatic dust removal brush moves up and down reciprocally under the action of the axial vibration motor to generate static electricity. The gas is electrostatically adsorbed and passes through the sintered filter element. Finally, it is output through the cylinder outlet, the outlet pipe, and the filter outlet. When regenerating and cleaning the other cylinder, turn on the axial vibration motor and heater of the other cylinder, and open the valve on the intermediate pipe; the gas output from the currently filtering cylinder enters the outlet of the other cylinder through the intermediate pipe, passes through the sintered filter element and the electrostatic dust removal brush in reverse order, and enters the cylinder of the support. On the one hand, it opens the one-way valve on the cover, allowing the impurities that are swept off in reverse to fall into the powder collection cone. On the other hand, the heater dries the oil and water in the composite filter element, and the volatilized oil and water enter the powder collection cone with the airflow. Open the discharge plug to discharge the volatilized oil and water vapor and the impurities in the powder collection cone.

[0016] Compared with the prior art, the present invention has the following beneficial effects: 1. This invention integrates an adjustable rotor pump, a guide valve, two cylindrical bodies, and a multi-stage filter element into one compact structure that combines air supply, multi-stage purification, and online cleaning functions. It solves the problems of large space occupation and low system integration caused by the dispersed arrangement of functional modules in existing filtration devices. It is especially suitable for on-site operation scenarios such as environmental engineering construction where equipment portability and deployment efficiency are required.

[0017] 2. This invention uses a rotor pump with an eccentric cavity structure and adjustable air volume as the air source. The air supply flow is stably adjusted by changing the volume of the eccentric cavity through the adjusting solenoid. This avoids the problem of continuous blockage of fine particles and decreased air permeability of metal sintered filter elements during high-precision filtration due to the lack of adjustment means for the system's air supply flow. This effectively extends the service life of the filter element and ensures the stability of the filtration flux.

[0018] 3. This invention integrates a five-stage purification process in the cylinder, including cyclone separation, oil and water absorption by composite filter element, vibration electrostatic dust removal, and fine filtration by sintered filter element. The gas is sequentially separated by centrifugation to remove coarse particles, oil and water absorption materials to remove oil and water molecules, electrostatic brushes to adsorb submicron particles through triboelectric charging, and sintered filter element to intercept particles smaller than 0.01 µm, forming a multi-mechanism synergistic gradient filtration chain, achieving stable output of high-purity gas in a compact structure.

[0019] 4. This invention features two cylinders, left and right, and uses a guide valve to switch between one in use and one in standby mode. When the standby cylinder is offline, it can be independently heated, regenerated, and back-purged for cleaning without interrupting the filtration operation of the main cylinder, thus achieving continuous operation of the filtration process. At the same time, an insulating structure is provided between the guide valve and the mounting base to prevent the electrostatic adsorption function from failing due to grounding discharge.

[0020] 5. The present invention is equipped with a vibrating rod driven by an axial vibration motor and a fiber electrostatic dust removal brush inside the cylinder. When the vibrating rod drives the dust removal brush to move up and down, it generates an electrostatic field by friction, which adsorbs and captures fine particles in the airflow. During reverse blowing cleaning, the vibration can also cause the attached particles to fall off, and together with the reverse airflow outside the sintered filter element, they fall into the powder collection cone, realizing the online self-cleaning of the electrostatic dust removal element.

[0021] 6. The present invention sets a spiral heater around the composite filter element. When regenerating the spare cylinder, the heater performs low-temperature thermal desorption of the water-absorbing material and the oil-absorbing material, so that the adsorbed water and oil evaporate and are discharged with the reverse blowing airflow, realizing online desorption and regeneration of the oil-absorbing and water-absorbing materials, reducing the filter element replacement frequency and maintenance cost.

[0022] 7. The present invention adopts a tangential air intake structure. After the gas enters the cylinder, it first forms a swirling flow along the outer wall of the composite filter element. The coarse particles in the airflow are separated in advance by centrifugal force and fall into the powder collection cone, which reduces the filtration burden of subsequent filter elements. At the same time, the bottom of the powder collection cone is equipped with a discharge plug, which facilitates the periodic discharge of collected impurities and makes maintenance and operation simple.

[0023] 8. The present invention uses an insulating concave-convex pad for isolation between the coupling and the vibrating rod, so that the static charge generated by the electrostatic dust removal brush during the triboelectric charging process is effectively retained in the filter cavity, avoiding the direct grounding discharge of static electricity through the metal components of the equipment, and ensuring the effectiveness and stability of the electrostatic adsorption function. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of an integrated high-purity gas filter device.

[0025] Figure 2 for Figure 1 A sectional view along line AA.

[0026] Figure 3 This is a schematic diagram of the adjustable rotor pump.

[0027] Figure 4 This is a cross-sectional view of an adjustable rotor pump after the pin plate passes through the narrowest position of the eccentric cavity.

[0028] Figure 5 This is a cross-sectional view of an adjustable rotor pump when the pin plate is near the narrowest position of the eccentric cavity.

[0029] Figure 6 This is a cross-sectional view of an adjustable rotor pump when the pin plate reaches the narrowest position of the eccentric cavity.

[0030] Figure 7 This is an exploded view of the end cover, first spring, drive rotor, shifting rotor, and rotating sleeve.

[0031] Figure 8 This is a cross-sectional view of the intersection of the coupling, insulating pad, and upper end of the vibrating rod.

[0032] Figure 9 An exploded view of the coupling, insulating pads, and the upper part of the vibrating rod.

[0033] Figure 10 This is an exploded view of the lower end of the vibrating rod, the support, the composite filter element, the heater, and the third spring.

[0034] Figure 11 for Figure 1 A magnified view of part I in the middle.

[0035] Figure 12 for Figure 1 A magnified view of part II.

[0036] The reference numerals in the figures include: 1. Axial vibration motor; 2. Vibrating rod; 3. Electrostatic dust removal brush; 4. Cylinder; 5. Composite filter element; 6. Heater; 7. Powder collecting cone; 8. Discharge plug; 9. Valve; 10. Intermediate pipe; 11. Valve stem; 12. Guide valve body; 13. Air outlet pipe; 14. Air inlet pipe; 15. Filter air inlet; 16. Filter air outlet; 17. Guide valve core; 18. End cover; 19. Drive shaft; 20. Housing; 21. Rotary sleeve; 22. Adjusting rotor; 23. Adjusting solenoid; 24. Second slide. 25. Slot, 26. Pin plate, 27. Drive rotor, 28. First slide groove, 29. First spring, 30. Cylindrical protrusion, 31. Eccentric cavity, 32. Pump inlet, 33. Gas valve, 34. Second spring, 35. Middle outlet, 36. Middle inlet, 37. Pump outlet, 38. Coupling, 39. Insulating concave-convex pad, 40. Linear bearing, 41. Bracket, 42. Third spring, 43. Cover, 44. One-way valve, 45. Protective net, 46. Sintered filter element, 47. Support net. Detailed Implementation

[0037] The technical solution of the present invention will now be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0038] like Figure 1 and Figure 2 As shown, the integrated high-purity gas filter device provided in this embodiment includes an adjustable rotor pump, a guide valve, and two cylindrical bodies 4. The adjustable rotor pump has a gas flow regulation function, and its pumping outlet 36 is connected to the filter inlet 15 of the guide valve. One cylindrical body 4 is in use while the other is on standby. The guide valve is used to deliver the gas output from the adjustable rotor pump to one of the cylindrical bodies 4, where a filter element is installed. After filtration, the gas returns to the guide valve and is output through the filter outlet 16 of the guide valve. The filter element includes a composite filter element 5 for absorbing water and oil, and a sintered filter element 45. A vibrating electrostatic precipitator is also installed in the cylindrical body 4. The gas to be filtered passes sequentially through the composite filter element 5, the vibrating electrostatic precipitator, and the sintered filter element 45. A regeneration and recovery device is also provided at the bottom of the cylindrical body 4. This compact structure, which integrates air source, multi-stage purification and online cleaning functions, solves the problems of large space occupation and low system integration caused by the scattered arrangement of functional modules in existing filtration devices.

[0039] Specifically, the structure of an adjustable rotor pump is as follows: Figures 3 to 7As shown. The adjustable rotor pump includes a housing 20, an end cover 18 fixedly installed on the left end of the housing 20, a drive shaft 19 rotatably connected to the end cover 18, an active rotor 26 slidably engaged with the right end of the drive shaft 19 and rotating with the drive shaft 19, a rotating sleeve 21 rotatably connected inside the housing 20, an adjusting rotor 22 disposed inside the rotating sleeve 21, and an adjusting screw tube 23 for adjusting the relative position of the adjusting rotor 22 with respect to the rotating sleeve 21 in the left-right direction. In this embodiment, the front end of the drive shaft 19 has a square section, which is installed in the square center hole of the active rotor 26 to achieve torque transmission. The right end face of the end cover 18 has a raised cylindrical protrusion 29, the left end of the active rotor 26 is embedded in the cylindrical protrusion 29, the outer circular surface of the active rotor 26 contacts and engages with the inner circular surface of the cylindrical protrusion 29, and the axis of the outer circular surface of the active rotor 26 coincides with the rotation axis of the drive shaft 19. The outer circular surface of the adjusting rotor 22 contacts and engages with the inner circular surface of the rotating sleeve 21, and the axis of the outer circular surface of the adjusting rotor 22 coincides with the rotation axis of the rotating sleeve 21. The inner circular surface of the rotating sleeve 21 also contacts and engages with the outer circular surface of the cylindrical protrusion 29. The rotation axis of the rotating sleeve 21 is eccentrically set relative to the rotation axis of the drive shaft 19, thereby forming an eccentric cavity 30 with the rotating sleeve 21, the cylindrical protrusion 29, the driving rotor 26, and the adjusting rotor 22. An adjusting screw tube 23 is installed in the central through hole of the rotating sleeve 21 by means of threaded engagement. A first spring 28 is installed in the cylindrical protrusion 29. The first spring 28 is used to push the driving rotor 26 to the right so that the right end face of the driving rotor 26 keeps in contact with the left end face of the adjusting rotor 22, and so that the right end of the adjusting screw tube 23 rests against the stepped surface at the right end of the central through hole of the rotating sleeve 21. The pumping inlet 31 of the adjustable rotor pump is connected to the air storage chamber at the right end face of the drive rotor 26 through the central hole of the adjusting screw tube 23 and the central through hole of the rotating sleeve 21. A pin plate 25 is fixedly installed on the inner wall of the rotating sleeve 21. The drive rotor 26 has a first sliding groove 27 and the adjusting rotor 22 has a second sliding groove 24. The inner end of the pin plate 25 slides in cooperation with the first sliding groove 27 and the second sliding groove 24 respectively. The pin plate 25 and the narrowest position of the eccentric cavity 30 divide the eccentric cavity 30 into an intake chamber and an exhaust chamber. A middle air inlet 35 is provided on the drive rotor 26 near the pin plate 25. The air storage chamber is connected to the intake chamber through the middle air inlet 35. A gas valve 32 and a second spring 33 for pushing the gas valve 32 outward are provided in the middle air inlet 35. A central air outlet 34 is provided on the rotating sleeve 21 near the pin plate 25. The air outlet chamber is connected to the pumping air outlet 36 of the adjustable rotor pump through the central air outlet 34. The central air inlet 35 and the central air outlet 34 are located on both sides of the pin plate 25, respectively.

[0040] like Figures 4 to 6As shown, the working principle of the adjustable rotor pump is as follows: the motor drives the drive shaft 19 to rotate, the drive shaft 19 drives the active rotor 26 to rotate, and the active rotor 26 drives the adjusting rotor 22 and the rotating sleeve 21 to rotate synchronously through the pin plate 25. Since the adjusting rotor 22 and the rotating sleeve 21 are eccentrically set relative to the active rotor 26, as they rotate, the suction chamber and the exhaust chamber forming the eccentric cavity 30 will continuously increase and decrease, completing the quantitative suction and exhaust cycle. Specifically, when the pin plate 25 passes the narrowest position of the eccentric cavity 30, the suction chamber between the pin plate 25 and the narrowest position continuously increases, and the remaining exhaust chamber continuously decreases. The gas valve 32 pops out under the action of the second spring 33, connecting the pump inlet 31 with the suction chamber. Since the suction chamber continuously increases, external gas will continuously enter the suction chamber. At the same time, since the exhaust chamber continuously decreases, the gas in the exhaust chamber will be output from the pump outlet 36 through the intermediate outlet 34. When pin 25 coincides with the narrowest point of eccentric cavity 30, the entire eccentric cavity 30 is an intake chamber, while the exhaust chamber volume is zero. At this time, gas valve 32 closes under the pressure of rotating sleeve 21. When pin 25 passes the narrowest point of eccentric cavity 30, the original intake chamber directly becomes a new exhaust chamber. The continuously increasing area between pin 25 and the narrowest point becomes a new intake chamber, thus continuing a cycle of continuously increasing intake chamber and continuously decreasing exhaust chamber. Each rotation of the drive rotor 26 completes one pumping cycle, and the pumping volume is equal to the volume of eccentric cavity 30. By rotating the adjusting screw tube 23, the adjusting rotor 22 moves left and right, synchronously driving the drive rotor 26 to move, which can change the volume of eccentric cavity 30, thereby adjusting the pumping flow rate and stabilizing the pumping flow rate at the required value. This type of adjustable air volume rotor pump serves as the air source. By adjusting the volume of the eccentric cavity 30 through the adjusting solenoid 23, the air supply flow can be stably adjusted. This avoids the problem of continuous blockage of fine particles and decreased air permeability of the metal sintered filter element 45 during high-precision filtration due to the lack of means to adjust the air supply flow of the system.

[0041] Please refer to the detailed structure of the pilot valve. Figure 1 and Figure 2The pilot valve includes a pilot valve body 12, a valve stem 11, and two pilot valve cores 17. Both the filter outlet 16 and the filter inlet 15 are located on the front end face of the pilot valve body 12, with the filter outlet 16 positioned above the filter inlet 15. The pilot valve body 12 has two T-shaped channels inside. The upper T-shaped channel's middle longitudinal channel is connected to the filter outlet 16, and its two ends of the transverse channel are connected to the outlets of the two cylinders 4 via outlet pipes 13. The lower T-shaped channel's middle longitudinal channel is connected to the filter inlet 15, and its two ends of the transverse channel are connected to the inlets of the two cylinders 4 via inlet pipes 14. The two pilot valve cores 17 are located at the center of the two T-shaped channels, and each pilot valve core 17 has a right-angle pipe connecting one end of the middle longitudinal channel of the T-shaped channel to one end of the transverse channel. The valve stem 11 passes vertically through the pilot valve body 12 and drives the two pilot valve cores 17 to rotate synchronously. By rotating valve stem 11, the pumping outlet 36 of the adjustable rotor pump can be connected to the inlet of one of the cylinders 4, making that cylinder 4 the working filter device. At this time, maintenance can be performed on the other cylinder 4, which serves as a backup filter device. Furthermore, the outlet pipes 13 on both sides of the guide valve are connected via an intermediate pipe 10, on which a valve 9 is installed. When valve 9 of the intermediate pipe 10 is opened, the filtered gas output from the working cylinder 4 directly enters the outlet of the backup cylinder 4, and then flows in reverse along the filter channel inside that cylinder 4, achieving reverse purging. In addition, an insulating pad is provided between the guide valve body 12 and the mounting base below to prevent the electrostatic adsorption function from failing due to grounding discharge.

[0042] like Figure 1 As shown, the cylinder 4 contains a support 40, a composite filter element 5, a vibrating electrostatic precipitator, and a sintered filter element 45. The support 40 comprises a disc and a cylinder. The disc divides the interior of the cylinder 4 into upper and lower parts, and the cylinder extends downwards from the middle of the disc. The cylinder wall has pores for connecting the inner and outer spaces. The composite filter element 5 is cylindrical and wraps around the outside of the cylinder. In a preferred embodiment, the composite filter element 5 comprises inner and outer layers. The inner layer is a MOF fiber-type water-absorbing material for filtering water molecules in the gas, and the outer layer is an E-FOM fiber-type oil-absorbing material for filtering oil molecules in the gas. Both materials can be reused through low-temperature thermal desorption regeneration. The air inlet of the cylinder 4 is horizontally positioned and tangential to the cylinder 4, with the height of the inlet corresponding to the composite filter element 5. This tangential air inlet structure causes the gas entering the cylinder 4 to first form a swirling flow along the outer wall of the composite filter element 5, using centrifugal force to pre-separate coarse particles from the airflow.

[0043] The vibratory electrostatic precipitator includes an axial vibration motor 1 mounted on the top of the cylinder 4, a vibrating rod 2 connected to the lower output shaft of the axial vibration motor 1, and a cylindrical electrostatic precipitator brush 3 mounted on the vibrating rod 2. The electrostatic precipitator brush 3 is made of PET fiber, and its static electricity originates entirely from airflow friction. The fibers undergo intense friction with gas molecules and dust particles, causing electrons to transfer on the material surface, thus forming a stable negative charge region on the fiber surface. Dust particles are polarized under the action of the electrostatic field and are then firmly adsorbed by the charged fibers. The connection method between the axial vibration motor 1 and the vibrating rod 2 is as follows: Figure 8 and Figure 9 As shown. The output shaft of the axial vibration motor 1 is connected to the upper end of the vibrating rod 2 via a coupling 37 and an insulating convex-concave pad 38. The coupling 37 is fixedly mounted on the output shaft of the axial vibration motor 1. The lower end of the coupling 37 has a first circumferentially distributed protrusion, and the upper end of the vibrating rod 2 has a second circumferentially distributed protrusion. The top and bottom grooves of the insulating convex-concave pad 38 are not interconnected. The first protrusion engages with the groove at the top of the insulating convex-concave pad 38, and the second protrusion engages with the groove at the bottom of the insulating convex-concave pad 38. This insulating convex-concave pad 38 provides isolation, effectively retaining the static charge generated by the electrostatic dust removal brush 3 during frictional charging within the filter chamber, preventing direct grounding discharge of static electricity through the metal components of the equipment. Figure 1 As shown, a linear bearing 39 is also installed at the flange cover at the upper end of the cylinder 4, and the upper end of the vibrating rod 2 cooperates with the linear bearing 39. A third spring 41 is also installed at the lower part of the cylinder 4, which is used to push the vibrating rod 2 upward. The third spring 41 is set in the cylinder of the support 40 to provide a continuous upward thrust for the vibrating rod 2, so that it can stably reciprocate up and down under the drive of the axial vibration motor 1.

[0044] The sintered filter element 45 is cylindrical, fixed inside the cylinder 4, and fitted onto the outside of the electrostatic dust removal brush 3. For example... Figure 11 As shown, the upper end of the sintered filter element 45 is connected to the bottom of the flange cover, and the lower end is connected to the top of the disc of the support 40, thus forming a cylindrical space between the flange cover and the support 40 that is directly connected to the cylinder. This ensures that the gas entering this cylindrical space is electrostatically adsorbed before passing through the sintered filter element 45 to reach the outer space. The annular space between the outer wall of the sintered filter element 45 and the inner wall of the cylinder 4 is connected to the gas outlet of the cylinder 4.

[0045] As a preferred embodiment, a protective mesh 44 is provided between the electrostatic dust removal brush 3 and the sintered filter element 45 to prevent the electrostatic dust removal brush 3 from directly contacting the sintered filter element 45 and causing damage during its up-and-down movement. A support mesh 46 is provided on the outside of the sintered filter element 45 to enhance its structural strength.

[0046] The regeneration and recycling device includes a powder collecting cone 7 located at the bottom of the cylinder 4 and below the support 40, a heater 6 surrounding the composite filter element 5, and a cover 42 installed at the lower end of the cylinder, on which a one-way valve 43 is installed. A discharge plug 8 is installed at the bottom of the powder collecting cone 7. The heater 6 can be a spiral heater. During the regeneration of the spare cylinder 4, the heater 6 performs low-temperature thermal desorption of the water-absorbing and oil-absorbing materials, causing the adsorbed water and oil to evaporate and be discharged with the reverse purge airflow, thus achieving online desorption and regeneration of the oil-absorbing and water-absorbing materials.

[0047] Based on the aforementioned integrated high-purity gas filter device, this embodiment also provides an integrated high-purity gas filtration method. This method includes a filtration process and a regeneration and cleaning process: During filtration, the gas output from the adjustable rotor pump enters the guide valve through the filter inlet 15. The guide valve then delivers the gas to one of the currently selected cylinders 4. The gas enters the cylinder 4 tangentially, and coarse particles are thrown out by centrifugal force, falling into the dust collection cone 7, completing the first stage of cyclone dust removal. The remaining gas passes through the composite filter element 5, sequentially filtering oil molecules through the outer E-FOM fiber-type oil-absorbing material and water molecules through the inner MOF fiber-type water-absorbing material, completing the second stage of oil absorption and the third stage of water absorption. The gas then enters the cylinder through the pores on the cylinder wall of the support 40, and then rises to the space where the electrostatic dust removal brush 3 is located. The electrostatic dust removal brush 3 moves up and down reciprocally under the action of the axial vibration motor 1, generating static electricity through intense friction with gas molecules and dust particles. Submicron-sized particles in the gas are captured by electrostatic adsorption, completing the fourth stage of electrostatic dust removal. Finally, the gas passes through the sintered filter element 45, which intercepts particles smaller than 0.01 µm, completing the fifth stage of fine filtration. The filtered gas is then output through the gas outlet of the cylinder 4, the gas outlet pipe 13, and the filtered gas outlet 16.

[0048] When regenerating and cleaning the other cylinder 4, the axial vibration motor 1 and heater 6 of the other cylinder 4 are turned on, and the valve 9 on the intermediate pipe 10 is opened. The gas output from the cylinder 4 currently being filtered enters the outlet of the other cylinder 4 through the intermediate pipe 10, and then passes in reverse through the sintered filter element 45 and the electrostatic dust removal brush 3 before entering the cylinder of the support 40. The reverse airflow opens the one-way valve 43 on the cover 42, allowing the impurities that are swept off in the reverse cleaning to fall into the dust collection cone 7. At the same time, the electrostatic dust removal brush 3 dislodges the attached particles under the action of vibration, which also fall into the dust collection cone 7. On the other hand, the heater 6 dries the oil and water in the composite filter element 5, and the volatilized oil and water enter the dust collection cone 7 with the airflow. The discharge plug 8 is opened to discharge the volatilized oil and water vapor and the impurities in the dust collection cone 7. This one-in-one-out switching structure and independent online regeneration function realize the continuous operation of the filtration process, reducing the frequency of filter element replacement and maintenance costs.

[0049] It should be noted that, as will be apparent to those skilled in the art, the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics thereof. The scope of the present invention is defined by the claims rather than the foregoing description.

Claims

1. An integrated high-purity gas filter device, comprising a filter element, characterized in that: It also includes an adjustable rotor pump, a guide valve and two cylindrical bodies (4) on the left and right sides, in which the filter element is installed; The adjustable rotor pump has a gas flow regulation function. The pumping outlet (36) of the adjustable rotor pump is connected to the filter inlet (15) of the guide valve. The two cylinders (4) are used and standby. The guide valve is used to transport the gas output by the adjustable rotor pump to one of the cylinders (4), and after filtration, it returns to the guide valve and is output from the filter outlet (16) of the guide valve. The filter element includes a composite filter element (5) for absorbing water and oil, and a sintered filter element (45); a vibrating electrostatic precipitator is also provided in the cylinder (4); the gas to be filtered passes through the composite filter element (5), the vibrating electrostatic precipitator and the sintered filter element (45) in sequence. The bottom of the cylinder (4) is also equipped with a recycling device.

2. The integrated high-purity gas filter device as described in claim 1, characterized in that: The adjustable rotor pump includes a housing (20), an end cover (18) fixedly installed on the left end of the housing (20), a drive shaft (19) mounted on the end cover (18) by a rotatable connection, an active rotor (26) that slides with the right end of the drive shaft (19) and rotates with the drive shaft (19), a rotating sleeve (21) mounted inside the housing (20) by a rotatable connection, an adjusting rotor (22) disposed inside the rotating sleeve (21), and an adjusting screw (23) for adjusting the relative position of the adjusting rotor (22) with respect to the rotating sleeve (21) in the left-right direction. The right end face of the end cap (18) is provided with a raised cylindrical protrusion (29). The left end of the active rotor (26) is embedded in the cylindrical protrusion (29). The outer circular surface of the active rotor (26) is in contact with the inner circular surface of the cylindrical protrusion (29), and the axis of the outer circular surface of the active rotor (26) coincides with the rotation axis of the drive shaft (19). The outer circular surface of the adjusting rotor (22) is in contact with the inner circular surface of the rotating sleeve (21), and the axis of the outer circular surface of the adjusting rotor (22) coincides with the rotation axis of the rotating sleeve (21). The inner circular surface of the rotating sleeve (21) is also in contact with the outer circular surface of the cylindrical protrusion (29). The rotation axis of the rotating sleeve (21) is eccentrically set relative to the rotation axis of the drive shaft (19), so that the rotating sleeve (21), the cylindrical protrusion (29), the active rotor (26) and the adjusting rotor (22) form an eccentric cavity (30). An adjusting screw tube (23) is installed in the central through hole of the rotating sleeve (21) by means of threaded engagement; a first spring (28) is installed in the cylindrical protrusion (29), the first spring (28) is used to push the active rotor (26) to the right so that the right end face of the active rotor (26) is in contact with the left end face of the adjusting rotor (22), and the right end of the adjusting screw tube (23) rests on the stepped surface at the right end of the central through hole of the rotating sleeve (21); The pumping inlet (31) of the adjustable rotor pump is connected to the air storage chamber at the right end face of the active rotor (26) through the center hole of the adjusting screw (23) and the center through hole of the rotating sleeve (21); A pin plate (25) is fixedly installed on the inner wall of the rotating sleeve (21). The active rotor (26) has a first sliding groove (27) and the adjusting rotor (22) has a second sliding groove (24). The inner end of the pin plate (25) slides in cooperation with the first sliding groove (27) and the second sliding groove (24) respectively. The pin plate (25) and the narrowest position of the eccentric cavity (30) divide the eccentric cavity (30) into an intake cavity and an exhaust cavity. An intermediate air inlet (35) is provided on the active rotor (26) near the pin plate (25). The air storage chamber is connected to the air intake chamber through the intermediate air inlet (35). A gas valve (32) and a second spring (33) for pushing the gas valve (32) outward are provided in the intermediate air inlet (35). An intermediate air outlet (34) is provided on the rotating sleeve (21) near the pin plate (25). The air outlet chamber is connected to the pumping air outlet (36) of the adjustable rotor pump through the intermediate air outlet (34). The intermediate air inlet (35) and intermediate air outlet (34) are located on both sides of the pin plate (25).

3. The integrated high-purity gas filter device as described in claim 1, characterized in that: The pilot valve includes a pilot valve body (12), a valve stem (11), and two pilot valve cores (17). The filter outlet (16) and the filter inlet (15) are both located on the front end face of the guide valve body (12), with the filter outlet (16) located above the filter inlet (15). The guide valve body (12) is provided with two T-shaped channels, one above the other. The middle longitudinal channel of the upper T-shaped channel is connected to the filter outlet (16), and the two ends of the transverse channel are connected to the outlets of the two cylinders (4) through the outlet pipe (13). The middle longitudinal channel of the lower T-shaped channel is connected to the filter inlet (15), and the two ends of the transverse channel are connected to the inlet of the two cylinders (4) through the inlet pipe (14). Two guide valve cores (17) are respectively set at the center of the two T-shaped channels. The guide valve core (17) is provided with a right-angle pipe to connect one end of the middle longitudinal channel of the T-shaped channel with one end of the transverse channel. The valve stem (11) passes vertically through the guide valve body (12) and is used to drive the two guide valve cores (17) to rotate synchronously.

4. The integrated high-purity gas filter device as described in claim 3, characterized in that: The air outlet pipes (13) on both sides of the pilot valve are also connected through the intermediate pipe (10), on which a valve (9) is installed.

5. The integrated high-purity gas filter device as described in claim 1, characterized in that: The vibratory electrostatic dust removal device includes an axial vibration motor (1) installed on the top of the cylinder (4), a vibration rod (2) connected to the lower output shaft of the axial vibration motor (1), and a cylindrical electrostatic dust removal brush (3) installed on the vibration rod (2). The sintered filter element (45) is cylindrical, fixed in the cylinder (4) and fitted on the outside of the electrostatic dust removal brush (3); the annular space between the outer wall of the sintered filter element (45) and the inner wall of the cylinder (4) is connected to the air outlet of the cylinder (4).

6. The integrated high-purity gas filter device as described in claim 5, characterized in that: The output shaft of the axial vibration motor (1) is connected to the upper end of the vibration rod (2) through a coupling (37) and an insulating convex-concave pad (38); The coupling (37) is fixedly installed on the output shaft of the axial vibration motor (1). The lower end of the coupling (37) is provided with a first protrusion distributed in a circle, and the upper end of the vibration rod (2) is provided with a second protrusion distributed in a circle. The top and bottom grooves of the insulating convex and concave pad (38) are not connected to each other. The first protrusion and the top groove of the insulating convex and concave pad (38) are matched, and the second protrusion and the bottom groove of the insulating convex and concave pad (38) are matched. A third spring (41) is also installed at the lower part of the cylinder (4), which is used to push the vibrating rod (2) upward.

7. The integrated high-purity gas filter device as described in claim 5, characterized in that: The support (40) includes a disc and a cylinder. The disc divides the interior of the cylinder (4) into upper and lower parts. The cylinder extends downward from the middle of the disc. The cylinder wall is provided with air holes. The cylinder is connected to the space where the electrostatic dust removal brush (3) is located. The composite filter element (5) is cylindrical and wrapped around the outside of the cylinder.

8. The integrated high-purity gas filter device as described in claim 7, characterized in that: The air inlet of the cylinder (4) is horizontally set and tangent to the cylinder (4), and the height of the air inlet corresponds to the composite filter element (5).

9. The integrated high-purity gas filter device as described in claim 8, characterized in that: The regeneration and recycling device includes a powder collection cone (7) located at the bottom of the cylinder (4) and below the support (40), a heater (6) surrounding the composite filter element (5), and a cover (42) installed at the lower end of the cylinder, on which a one-way valve (43) is installed. The bottom of the powder collecting cone (7) is equipped with a discharge plug (8).

10. An integrated high-purity gas filtration method, characterized in that: Based on the integrated high-purity gas filter device as described in claim 9, the following method is used for filtration and regeneration cleaning: During filtration, the gas output from the adjustable rotor pump enters the guide valve through the filter inlet (15) of the guide valve. The guide valve delivers the gas to one of the currently selected cylinders (4). The gas enters the cylinder (4) tangentially, and coarse particles are thrown out by centrifugal force and fall into the powder collection cone (7). The remaining gas passes through the composite filter element (5), filters out oil and water, and enters the cylinder of the support (40). It then rises to the space where the electrostatic dust removal brush (3) is located. The electrostatic dust removal brush (3) moves up and down reciprocally under the action of the axial vibration motor (1) to generate static electricity. The gas passes through the sintered filter element (45) after being electrostatically adsorbed, and is finally output through the outlet of the cylinder (4), the outlet pipe (13), and the filter outlet (16). When regenerating and cleaning another cylinder (4), turn on the axial vibration motor (1) and heater (6) of the other cylinder (4), and open the valve (9) on the intermediate pipe (10); the gas output from the currently filtering cylinder (4) enters the outlet of the other cylinder (4) through the intermediate pipe (10), passes through the sintered filter element (45) and the electrostatic dust removal brush (3) in reverse order, and enters the cylinder of the support (40). On the one hand, it opens the one-way valve (43) on the cover (42) so that the impurities that are swept off in reverse fall into the powder collection cone (7). On the other hand, the heater (6) dries the oil and water in the composite filter element (5), and the volatilized oil and water enter the powder collection cone (7) with the airflow; open the discharge plug (8) so that the volatilized oil and water and the impurities in the powder collection cone (7) are discharged.

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