A high-precision silane gas dissolution mixing system and control method

Abstract

This invention discloses a high-precision proportioning system and control method for dissolving and mixing silane mixtures, relating to the field of mixing equipment technology. The system includes a raw material storage module consisting of three stainless steel tanks for storing silane, diluent gas, and solvent respectively, with passivated inner walls and insulated outer walls; a precision metering module equipped with a plunger pump and a mass flow meter for real-time flow feedback; a dissolution and mixing module, a double-jacketed tank with atomizing nozzles and a double-layered oblique-blade counter-current stirring impeller; a temperature and pressure control module including a jacket temperature controller and a tank top pressure relief valve; a concentration monitoring module equipped with an online laser Raman spectrometer; a tail gas treatment module consisting of an adsorption tower and a catalytic burner; and a central control module using a PLC and touchscreen to achieve fully automated control of the entire process. All modules work together to prepare the mixed gas. This invention improves the proportioning accuracy and dissolution efficiency of the silane mixture, stabilizes concentration drift, and provides environmentally friendly tail gas treatment; it is adaptable to high-precision requirements in various scenarios, providing stable raw materials for downstream processes.

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