Semiconductor fluid delivery pipeline disassembly and assembly tools

Abstract

This invention relates to the field of pipeline assembly and disassembly technology, specifically to a tool for assembling and disassembling semiconductor fluid transport pipelines. It includes two symmetrically arranged connecting units; each connecting unit includes a fixed base, within which a sliding seat is slidably engaged in the horizontal direction. The two sliding seats are connected by a second clamping member, and the two fixed bases are connected by a first clamping member. The first and second clamping members are concentric and are detachably fixedly connected to a first pipeline and a second pipeline, respectively. This invention achieves phased alignment and sealing of the insertion ring and slot through intermittent operation of the lever. This step-by-step approach avoids problems such as insertion ring misalignment and sealing layer misalignment caused by rapid, one-time movements, ensuring the accuracy of the insertion and sealing, while reducing impact damage to the pipeline sealing structure due to excessive force.

Description

Technical Field

[0001] This invention relates to the field of pipeline disassembly and assembly technology, specifically to a tool for disassembling and assembling semiconductor fluid transport pipelines. Background Technology

[0002] In industrial sectors such as semiconductor manufacturing, fine chemicals, and biopharmaceuticals, where the sealing and cleanliness requirements of fluid transport systems are extremely high, rapid disassembly and assembly of pipelines and precise sealing are crucial for ensuring production continuity and reducing the risk of leakage. Traditional pipeline disassembly and assembly tools generally suffer from problems such as cumbersome operation, positioning errors, and insufficient sealing performance, making it difficult to meet the demands of modern industry for efficient, reliable, and standardized operations.

[0003] In existing technologies, most pipe disassembly and assembly tools use a single clamping structure, which can only fix a single pipe and cannot simultaneously adapt to the needs of disassembling and assembling multiple pipes. Especially in complex piping systems involving flange connections and plug seals, operators need to repeatedly adjust the tool position and manually align the flange bolt holes, which is not only time-consuming and labor-intensive, but also prone to misalignment of the sealing surface due to human error, leading to leakage or contamination risks. In addition, the driving mechanism of traditional tools often relies on simple levers or hydraulic devices, lacking self-locking and reset functions, which can easily lead to slippage and jamming during operation, affecting disassembly and assembly efficiency and safety.

[0004] For the disassembly and assembly of plug-in sealed pipelines, existing tools often fail to achieve precise alignment between the plug and the slot. Under gravity or external forces, the plug components are prone to misalignment, resulting in incomplete sealing and affecting the system's airtightness and fluid transmission stability. Furthermore, traditional tools lack buffering and guiding mechanisms during disassembly, making them susceptible to damage to the pipeline surface or sealing structure due to excessive impact, increasing equipment maintenance costs.

[0005] To solve the above problems, there is an urgent need for a semiconductor fluid delivery pipeline disassembly and assembly tool that is compact in structure, easy to operate, and has precise positioning and self-resetting functions. Summary of the Invention

[0006] The main objective of this invention is to provide a tool for assembling and disassembling semiconductor fluid delivery pipelines that facilitates the plug-in connection of pipes.

[0007] To achieve the above objectives, the technical solution provided by this invention is as follows:

[0008] A semiconductor fluid delivery pipeline assembly / disassembly tool includes two symmetrically arranged connecting units. Each connecting unit includes a fixed base, within which a slide block is slidably engaged horizontally. The two slide blocks are connected by a second clamping member. The two fixed bases are connected by a first clamping member, which is concentric with the second clamping member. The first and second clamping members are detachably fixedly connected to a first and a second pipeline, respectively. A lead screw is fixed to the fixed base, passing through a corresponding slide block, allowing the slide block to slide horizontally along the outside of the lead screw. A worm gear is rotatably connected within the slide block, and the worm gear... The lead screw is concentric, and the worm has a central hole. The lead screw passes through the corresponding central hole of the worm. An inner sleeve is slidably connected in the central hole, and the lead screw passes through the corresponding inner sleeve. The lead screw, inner sleeve, and the balls inside the inner sleeve constitute a ball screw pair. The two ends of the inner sleeve are elastically connected to the slide. A connecting seat is fixed on the fixed seat. The worm is located in the connecting seat. An ear seat is rotatably connected to the connecting seat through a shaft. A handle is fixed on the ear seat. A worm wheel is concentrically fixed on the shaft. The worm wheel can rotate with the ear seat and the shaft. The worm wheel meshes with the worm. The pitch of the lead screw and the worm is equal, and the direction of the threads is the same.

[0009] Specifically, the first clamping member includes two opposing first buckle plates. The first buckle plates are arc-shaped, and the middle part of the first buckle plate is fixedly connected to the slide. Both ends of the first buckle plate are fixed with first ear plates, and the two opposing first ear plates are connected by bolts.

[0010] Specifically, the second clamping member includes two opposing second buckle plates, the second buckle plates are arc-shaped, the middle part of the second buckle plate is fixedly connected to the slide, and the two ends of the second buckle plate are fixed with second ear plates, and the two opposing second ear plates are connected by bolts.

[0011] Specifically, flanges are fixed at the opposite ends of the first and second pipes. A slot is provided in the end of the first pipe facing the second pipe, and a plug ring is integrally formed in the end of the second pipe facing the first pipe. The plug ring can be inserted into the slot.

[0012] Specifically, multiple sliding grooves are provided on the wall of the central hole. The length direction of the sliding groove is parallel to the axial direction of the worm. A slider is slidably arranged in the sliding groove, and the slider is fixedly connected to the outer edge of the inner sleeve.

[0013] Specifically, both ends of the inner sleeve are rotatably connected to rotating rings, which are concentric with the inner sleeve. The two rotating rings are respectively connected to the slide block through two springs. The lead screw passes through the springs, one end of the spring is fixedly connected to the rotating ring, and the other end of the spring is fixedly connected to the slide block.

[0014] Specifically, the shaft is fixedly connected to the lug, rotatably connected to the connecting seat, and concentrically fixedly connected to the worm gear.

[0015] Specifically, a limiting groove is provided at the upper end of the connecting seat. The limiting groove is V-shaped, and the vertical part of the ear seat is located in the limiting groove.

[0016] Specifically, the shaft and the connecting seat are connected by a torsion spring.

[0017] Specifically, the outer edge of the insert ring is provided with a sealing layer, and after the insert ring is inserted into the slot, the first pipe and the second pipe are sealed together.

[0018] During operation, the second pipe is positioned between the two second clamping plates. The bolts connecting the second ear plates of the second clamping plates are rotated to clamp and secure the second pipe. Similarly, the first pipe is positioned between the two first clamping plates. The bolts connecting the first ear plates of the first clamping member are rotated to clamp and secure the first pipe. After the first and second pipes are fixed between the first and second clamping members, the flanges on the first and second pipes are positioned between them. As the second clamping member moves the second pipe and the insert ring towards the first pipe, the insert ring of the second pipe can be sealed and inserted into the slot of the first pipe. Finally, the flanges of the first and second pipes are connected by bolts.

[0019] When the second pipe moves towards the first pipe, the upper lever rotates counterclockwise around the upper shaft, and the lower lever rotates clockwise around the lower shaft. The rotation of the levers causes the connecting lugs to rotate. Since the shaft and lugs are fixedly connected, and the worm gear is fixedly connected to the shaft, when the upper lever rotates counterclockwise, the upper worm gear rotates counterclockwise, and when the lower lever rotates clockwise, the lower worm gear rotates clockwise. Through the meshing of the worm gear and worm, the worm, via the slide and the second clamping member, drives the second pipe towards the first pipe.

[0020] like Figure 1 As shown, the first pipe is located on the right and the second pipe is located on the left. As the upper lever rotates counter-clockwise and the lower lever rotates clockwise, the second pipe moves to the right. Because the first pipe is connected to the fixed base via the first clamp, the first pipe remains stationary while the second pipe moves to the right.

[0021] When the worm gear rotates and causes the worm, slide, second clamping member, and second pipe to move to the right, the slide and worm move to the right outside the lead screw.

[0022] Under the influence of gravity in the second pipe, the contact surface between the worm wheel and the worm will generate a large frictional force. Due to the large frictional force generated at the contact surface between the worm wheel and the worm, and because the worm and the slide can be displaced to the right within the fixed seat, the worm will not rotate around its axis during the movement of the worm to the right.

[0023] As the worm moves to the right outside the lead screw, the inner sleeve, the balls inside the inner sleeve, and the lead screw form a ball screw pair. Therefore, the inner sleeve cannot move to the right outside the lead screw; it remains stationary. The worm moves to the right relative to the inner sleeve and the lead screw, reducing the distance between the left end of the slide and the inner sleeve. The spring on the left side of the inner sleeve is compressed, and the spring on the right side of the inner sleeve is stretched. At this time, the distance between the second pipe and the first pipe decreases.

[0024] When the lever is released, the inner sleeve can move to the right inside the worm's central hole due to the pushing force of the left spring and the pulling force of the right spring. Since the inner sleeve, its balls, and the lead screw form a ball screw pair, and the lead screw is fixedly connected to the fixed seat and cannot rotate, the inner sleeve can rotate during its movement to the right inside the worm's central hole. During this rotation, the inner sleeve, through the cooperation of the slider and the groove, drives the worm to rotate. The worm does not shift horizontally during this rotation. Therefore, the rotation of the worm by the inner sleeve causes the upper worm wheel to rotate clockwise and the lower worm wheel to rotate counterclockwise. When the spring returns to its original position, the worm wheel and the lever return to their original positions. At this point, the tool is in the following state: Figure 10 As shown, after the worm gear and lever are reset, the inner sleeve moves a distance to the right on the lead screw.

[0025] When the upper handlebar rotates counterclockwise around the upper shaft, the upper lug rotates counterclockwise around the upper shaft. When the lower handlebar rotates clockwise around the lower shaft, the lower lug rotates clockwise around the lower shaft. When the vertical part of the lug contacts the groove wall on the left side of the limiting groove, the lug is limited. During the rotation of the upper and lower handlebars, it can be ensured that the handlebar, lug, and worm gear rotate at the same angle.

[0026] Subsequently, as the upper lever rotates counterclockwise around the upper shaft and the lower lever rotates clockwise around the lower shaft, the second pipe moves to the right again until the insert ring is inserted into the slot. Then, the flanges of the first and second pipes are connected with bolts, completing the connection between the first and second pipes.

[0027] After the first and second pipes are connected, remove the bolts connecting the first ear plate and the second ear plate to separate the tool from the first and second pipes.

[0028] After the tool is separated from the first and second pipes, the worm gear is manually rotated. Since the shaft and the connecting seat are connected by a torsion spring, the rotation of the worm wheel has a certain resistance. However, the worm and the slide can move in the horizontal direction. Therefore, when the worm is manually rotated and moved to the left, the worm wheel can remain stationary.

[0029] When the worm rotates and moves to the left, the inner sleeve, the balls inside the inner sleeve, and the lead screw form a ball screw pair. The slider on the outside of the inner sleeve is slidably engaged in the groove, and the lead screw and worm have the same pitch and the same direction of rotation. Therefore, during the rotation of the worm to the left, the inner sleeve can move synchronously to the left with the worm. When the inner sleeve moves to the middle position of the lead screw, the rotation of the worm stops, which facilitates the subsequent use of this tool.

[0030] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0031] 1. Two symmetrically arranged connecting units are used to simultaneously clamp and fix the first and second pipes through the first and second clamping parts, respectively. The first and second clamping parts are concentrically designed to ensure that the axes of the first and second pipes are aligned. Combined with the flange and plug sealing structure, the alignment and sealing of the plug ring and the slot can be accurately achieved, avoiding the axis offset problem caused by single pipe clamping in traditional tools, and greatly improving the sealing performance and reliability of the pipeline connection.

[0032] 2. A worm gear and worm wheel meshing transmission mechanism is adopted. The rotation of the lever drives the worm wheel to rotate, which in turn drives the worm to move horizontally along the lead screw, achieving precise advancement of the second pipe towards the first pipe. The elastic reset mechanism design of the inner sleeve and spring allows the worm to automatically drive the worm wheel to reset after the lever is released, eliminating the need for manual adjustment, significantly reducing operational complexity and improving efficiency.

[0033] 3. By intermittently operating the lever (each time the lever is turned, the second pipe moves a certain distance and is then released to reset), the alignment and sealing of the insert ring and slot can be achieved in stages. This step-by-step approach avoids problems such as insert ring misalignment and sealing layer misalignment caused by rapid one-time movement, ensuring the accuracy of the insertion seal and reducing impact damage to the sealing structure caused by excessive force.

[0034] 4. After each release of the lever, the spring drives the inner sleeve to reset and rotates the worm gear, causing the worm wheel to automatically return to its initial position, and the tool enters a stable state. This intermittent reset design prevents accidental slippage of the second pipe due to external interference during operation, avoiding pipe connection failure or seal failure, while providing a clear starting reference for the next operation and improving operational safety.

[0035] 5. The intermittent advancement mode breaks down the entire connection process into multiple small-amplitude movement steps. Each operation only requires overcoming local resistance, significantly reducing the effort required by the operator. Compared to the traditional method of pushing the pipe into place in one go, this solution reduces manpower consumption through step-by-step operation, making it particularly suitable for industrial scenarios that require frequent disassembly and assembly, thus improving work efficiency and operational comfort.

[0036] 6. The intermittent motion mode of step-by-step advancement reduces the impact and friction loss during pipeline connection, avoiding problems such as pipe surface scratches and sealing layer wear caused by rapid one-time movement.

[0037] 7. Both the first and second clamping components adopt a detachable structure with arc-shaped buckles and bolt fastening, adaptable to pipes of different diameters, and quick and convenient installation and disassembly. The matching design of the limiting groove and the ear seat ensures the consistency of the bidirectional rotation angle of the handle. The overall structure of the tool is compact and does not rely on an external power source. It is suitable for industrial scenarios with extremely high requirements for cleanliness and sealing, such as semiconductors and precision chemicals, and has wide applicability and promotional value. Attached Figure Description

[0038] Figure 1 This is a schematic diagram showing the tool connected to the first and second pipes.

[0039] Figure 2 This is a schematic diagram of the separate structure of the first and second pipes.

[0040] Figure 3 This is a schematic diagram of the tool.

[0041] Figure 4 This is a schematic diagram of the worm gear and worm shaft meshing.

[0042] Figure 5 This is a schematic diagram of the second and first snap-on panels.

[0043] Figure 6 This is a schematic diagram of the slide inside the fixed seat.

[0044] Figure 7 This is a schematic diagram of the engagement between the lead screw and the slide.

[0045] Figure 8 This is a schematic diagram of the fit between the lead screw and the inner sleeve.

[0046] Figure 9 This is a schematic diagram showing the slide, worm gear, and second clamping member moving to the right.

[0047] Figure 10 This is a schematic diagram showing the slide, worm gear, and second clamping member after being reset to the left.

[0048] Figure 11 This is a schematic diagram of the cross-sectional structure of the worm gear.

[0049] The components in the attached diagram are named as follows: 1. First pipe; 101. Slot; 2. Second pipe; 201. Insert ring; 3. Flange; 4. Fixing seat; 5. First clamping component; 501. First buckle plate; 502. First ear plate; 6. Lead screw; 7. Slide seat; 8. Second clamping component; 801. Second buckle plate; 802. Second ear plate; 9. Worm gear; 10. Slide groove; 11. Inner sleeve; 12. Rotary ring; 13. Spring; 14. Worm wheel; 15. Shaft; 16. Handle; 17. Limiting groove; 18. Center hole; 19. Connecting seat; 20. Ear seat; 21. Slider. Detailed Implementation

[0050] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0051] like Figures 1-11 As shown, the semiconductor fluid delivery pipeline assembly and disassembly tool includes two symmetrically arranged connection units, which are arranged vertically.

[0052] The connecting unit includes a fixed base 4, in which a slide block 7 is slidably engaged in the horizontal direction. The two slide blocks 7 are connected by a second clamping member 8, and the two fixed bases 4 are connected by a first clamping member 5. The first clamping member 5 and the second clamping member 8 are concentric, and the first clamping member 5 and the second clamping member 8 are detachably and fixedly connected to the first pipe 1 and the second pipe 2, respectively.

[0053] In this embodiment, the second clamping member 8 is located to the left of the first clamping member 5.

[0054] The first clamping member 5 includes two opposing first buckle plates 501. The first buckle plates 501 are arc-shaped, and their middle parts are fixedly connected to the slide block 7. First ear plates 502 are fixed to both ends of each first buckle plate 501, and the two opposing first ear plates 502 are connected by bolts. During installation, the first pipe 1 is positioned between the two first buckle plates 501, and the bolts connecting the first ear plates 502 are rotated to fix the two first buckle plates 501 to the outside of the first pipe 1.

[0055] After the first clamping member 5 is fixedly connected to the first pipe 1, the first pipe 1 is fixedly connected to the fixed base 4 through the first clamping member 5.

[0056] The second clamping member 8 includes two opposing second clamping plates 801. The second clamping plates 801 are arc-shaped, and their middle parts are fixedly connected to the slide block 7. Second ear plates 802 are fixed to both ends of each second clamping plate 801, and the opposing second ear plates 802 are connected by bolts. During installation, the second pipe 2 is positioned between the two second clamping plates 801, and the bolts connecting the second ear plates 802 are rotated to fix the two second clamping plates 801 to the outside of the second pipe 2.

[0057] After the second clamping member 8 is fixedly connected to the second pipe 2, the second pipe 2 is fixedly connected to the slide block 7 through the second clamping member 8. The slide block 7 can drive the second pipe 2 to move through the second clamping member 8.

[0058] Flanges 3 are fixed to the opposite ends of the first pipe 1 and the second pipe 2. A slot 101 is provided in the end of the first pipe 1 facing the second pipe 2, and a plug ring 201 is integrally formed in the end of the second pipe 2 facing the first pipe 1. The plug ring 201 can be inserted into the slot 101.

[0059] The outer edge of the insertion ring 201 is provided with a sealing layer. After the insertion ring 201 is inserted into the slot 101, the first pipe 1 and the second pipe 2 are sealed together.

[0060] A lead screw 6 is fixed on the fixed base 4. The lead screw 6 passes through the corresponding slide 7, and the slide 7 can slide horizontally on the outside of the lead screw 6.

[0061] A worm 9 is rotatably connected inside the slide 7. The worm 9 is concentric with the lead screw 6. The lead screw 6 and the worm 9 have the same pitch and the same direction of the threads. A center hole 18 is opened inside the worm 9, and the lead screw 6 passes through the corresponding center hole 18 of the worm 9.

[0062] An inner sleeve 11 is slidably connected inside the center hole 18, and a lead screw 6 passes through the corresponding inner sleeve 11. The lead screw 6, the inner sleeve 11, and the balls inside the inner sleeve 11 constitute a ball screw pair.

[0063] Multiple grooves 10 are formed on the wall of the central hole 18. The length direction of the grooves 10 is parallel to the axial direction of the worm 9. A slider 21 is slidably disposed in the groove 10, and the slider 21 is fixedly connected to the outer edge of the inner sleeve 11. The inner sleeve 11 can slide in the central hole 18 of the worm 9 along the axial direction of the worm 9. When the worm 9 rotates around its axis, the worm 9 can drive the inner sleeve 11 to rotate under the cooperation of the grooves 10 and the slider 21.

[0064] The inner sleeve 11 is elastically connected to the slide block 7 at both ends. Rotary rings 12 are rotatably connected to both ends of the inner sleeve 11. The rotating rings 12 are concentric with the inner sleeve 11. The two rotating rings 12 are connected to the slide block 7 via two springs 13, and the lead screw 6 passes through the springs 13. One end of the spring 13 is fixedly connected to the rotating ring 12, and the other end of the spring 13 is fixedly connected to the slide block 7.

[0065] Specifically, the left end of the left spring 13 is fixedly connected to the left end of the slide block 7, and the right end of the left spring 13 is fixedly connected to the left rotating ring 12 of the inner sleeve 11. The right end of the right spring 13 is fixedly connected to the right end of the slide block 7, and the left end of the right spring 13 is fixedly connected to the right rotating ring 12 of the inner sleeve 11. When the worm gear 9 drives the inner sleeve 11 to rotate, the inner sleeve 11 rotates relative to the rotating ring 12, and the rotation of the inner sleeve 11 can prevent the spring 13 from generating torque.

[0066] A connecting seat 19 is fixed on the fixed base 4. The worm 9 is located inside the connecting seat 19. An ear seat 20 is rotatably connected to the connecting seat 19 via a shaft 15. A worm wheel 14 is concentrically fixed on the shaft 15. The worm wheel 14 can rotate with the ear seat 20 and the shaft 15, and the worm wheel 14 meshes with the worm 9. A handle 16 is fixed on the ear seat 20.

[0067] Specifically, shaft 15 is fixedly connected to ear seat 20, shaft 15 is rotatably connected to connecting seat 19, shaft 15 is concentrically fixedly connected to worm gear 14, and shaft 15 is connected to connecting seat 19 by torsion spring.

[0068] A limiting groove 17 is provided at the upper end of the connecting seat 19. The limiting groove 17 is V-shaped, and the vertical part of the ear seat 20 is located in the limiting groove 17.

[0069] During operation, the second pipe 2 is positioned between the two second fastening plates 801. The bolts connecting the second ear plates 802 of the second fastening plates 801 are rotated to clamp and fix the second pipe 2. Similarly, the first pipe 1 is positioned between the two first fastening plates 501. The bolts connecting the first ear plates 502 of the first clamping member 5 are rotated to clamp and fix the first pipe 1. After the first pipe 1 and the second pipe 2 are respectively fixed between the first clamping member 5 and the second clamping member 8, the flange 3 on the first pipe 1 and the flange 3 on the second pipe 2 are positioned between the first clamping member 5 and the second clamping member 8. As the second clamping member 8 moves the second pipe 2 and the insert ring 201 towards the direction of the first pipe 1, the insert ring 201 of the second pipe 2 can be sealed and inserted into the slot 101 of the first pipe 1. Then, the flanges 3 of the first pipe 1 and the second pipe 2 are connected by bolts.

[0070] When the second pipe 2 moves in the direction of the first pipe 1, the upper lever 16 rotates counterclockwise around the upper shaft 15, and the lower lever 16 rotates clockwise around the lower shaft 15. The rotation of the lever 16 drives the connected lug 20 to rotate. Since the shaft 15 is fixedly connected to the lug 20, and the worm gear 14 is fixedly connected to the shaft 15, when the upper lever 16 rotates counterclockwise, the upper worm gear 14 rotates counterclockwise, and when the lower lever 16 rotates clockwise, the lower worm gear 14 rotates clockwise. Simultaneously, the torsion spring stores energy. Under the meshing action of the worm gear 14 and the worm 9, the worm 9 drives the second pipe 2 to move in the direction of the first pipe 1 via the slide 7 and the second clamping member 8.

[0071] like Figure 1 As shown, the first pipe 1 is located on the right and the second pipe 2 is located on the left. As the upper lever 16 rotates counterclockwise and the lower lever 16 rotates clockwise, the second pipe 2 moves to the right. Since the first pipe 1 is connected to the fixed base 4 via the first clamp 5, the first pipe 1 remains stationary while the second pipe 2 moves to the right.

[0072] When the worm gear 14 rotates and causes the worm 9, slide 7, second clamping member 8 and second pipe 2 to move to the right, the slide 7 and worm 9 move to the right outside the lead screw 6.

[0073] Under the influence of gravity in the second pipe 2, the contact surface between the worm wheel 14 and the worm 9 will generate a large frictional force. Due to the large frictional force generated at the contact surface between the worm wheel 14 and the worm 9, and because the worm 9 and the slide 7 can be displaced to the right within the fixed seat 4, the worm wheel 14 causes the worm 9 to move to the right, but the worm 9 will not rotate around its axis.

[0074] As the worm 9 moves to the right outside the lead screw 6, the inner sleeve 11, the balls inside the inner sleeve 11, and the lead screw 6 form a ball screw pair. Therefore, the inner sleeve 11 cannot move to the right outside the lead screw 6 and remains stationary. The worm 9 moves to the right relative to the inner sleeve 11 and the lead screw 6. The distance between the left end of the slide 7 and the inner sleeve 11 decreases, the spring 13 on the left side of the inner sleeve 11 is compressed, and the spring 13 on the right side of the inner sleeve 11 is stretched. At this time, the distance between the second pipe 2 and the first pipe 1 decreases.

[0075] When the lever 16 is released, under the elastic force of the torsion spring, the shaft 15, worm gear 14, lug 20, and lever 16 tend to rotate back to their original positions. Under the pushing force of the spring 13 on the left side and the pulling force of the spring 13 on the right side, the inner sleeve 11 can move to the right inside the center hole 18 of the worm 9. Since the inner sleeve 11, the balls within the inner sleeve 11, and the lead screw 6 constitute a ball screw pair, and the lead screw 6 is fixedly connected to the fixed seat 4, the lead screw 6 cannot rotate. Therefore, during the movement of the inner sleeve 11 to the right within the center hole 18 of the worm 9, the inner sleeve 11 can rotate. During this rotation, under the cooperation of the slider 21 and the groove 10, the inner sleeve 11 can drive the worm 9 to rotate. The worm 9 does not shift horizontally during this rotation. Therefore, during the rotation of the worm 9 driven by the inner sleeve 11, the upper worm wheel 14 rotates clockwise and the lower worm wheel 14 rotates counterclockwise. When the spring 13 returns to its original position, the worm wheel 14 rotates back to its original position, and the lever 16 returns to its original position. At this time, the tool is in the following state: Figure 10 As shown, after the worm gear 14 and the lever 16 are reset, the inner sleeve 11 moves a distance to the right on the lead screw 6.

[0076] When the upper lever 16 rotates counterclockwise around the upper shaft 15, the upper lug 20 rotates counterclockwise around the upper shaft 15. When the lower lever 16 rotates clockwise around the lower shaft 15, the lower lug 20 rotates clockwise around the lower shaft 15. When the vertical part of the lug 20 contacts the groove wall on the left side of the limiting groove 17, the lug 20 is limited. During the rotation of the upper lever 16 and the lower lever 16, it can be ensured that the lever 16, the lug 20 and the worm gear 14 rotate at the same angle.

[0077] Subsequently, when the upper lever 16 rotates counterclockwise around the upper shaft 15 and the lower lever 16 rotates clockwise around the lower shaft 15, the second pipe 2 moves to the right again until the insertion ring 201 is inserted into the slot 101. Then, the flanges 3 of the first pipe 1 and the second pipe 2 are connected by bolts, thus completing the connection between the first pipe 1 and the second pipe 2.

[0078] After the first pipe 1 and the second pipe 2 are connected, the bolts connecting the first ear plate 502 and the bolts connecting the second ear plate 802 are removed, so that the tool is separated from the first pipe 1 and the second pipe 2.

[0079] After the tool is separated from the first pipe 1 and the second pipe 2, the worm 9 is manually rotated. Since the shaft 15 and the connecting seat 19 are connected by a torsion spring, the rotation of the worm wheel 14 has a certain resistance. However, the worm 9 and the slide 7 can move in the horizontal direction. Therefore, when the worm 9 is manually rotated and moved to the left, the worm wheel 14 can remain stationary.

[0080] When the worm 9 rotates and moves to the left, the inner sleeve 11, the balls in the inner sleeve 11, and the lead screw 6 form a ball screw pair. The slider 21 on the outside of the inner sleeve 11 is slidably engaged in the groove 10. The lead screw 6 and the worm 9 have the same pitch and the same direction of rotation. Therefore, during the rotation of the worm 9 to the left, the inner sleeve 11 can move synchronously to the left with the worm 9. When the inner sleeve 11 moves to the middle position of the lead screw 6, the rotation of the worm 9 stops, which is convenient for subsequent use of this tool.

[0081] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A semiconductor fluid transport pipeline disassembly and assembly tool, comprising two symmetrically arranged connecting units; the connecting unit includes a fixed base (4), a slide block (7) is slidably engaged in the horizontal direction within the fixed base (4), the two slide blocks (7) are connected by a second clamping member (8), the two fixed bases (4) are connected by a first clamping member (5), the first clamping member (5) and the second clamping member (8) are concentric, and the first clamping member (5) and the second clamping member (8) are detachably and fixedly connected to a first pipeline (1) and a second pipeline (2), characterized in that, A lead screw (6) is fixed on a fixed base (4). The lead screw (6) passes through a corresponding slide (7). The slide (7) can slide horizontally on the outside of the lead screw (6). A worm (9) is rotatably connected inside the slide (7). The worm (9) is concentric with the lead screw (6). A center hole (18) is opened inside the worm (9). The lead screw (6) passes through the center hole (18) of the corresponding worm (9). An inner sleeve (11) is slidably connected inside the center hole (18). The lead screw (6) passes through the corresponding inner sleeve (11). The lead screw (6), the inner sleeve (11), and the balls inside the inner sleeve (11) constitute a complete system. The ball screw pair has an inner sleeve (11) with both ends elastically connected to the slide (7). A connecting seat (19) is fixed on the fixed seat (4). The worm (9) is located inside the connecting seat (19). The connecting seat (19) is rotatably connected to the ear seat (20) via the shaft (15). A handle (16) is fixed on the ear seat (20). A worm wheel (14) is concentrically fixed on the shaft (15). The worm wheel (14) can rotate with the ear seat (20) and the shaft (15). The worm wheel (14) meshes with the worm (9). The screw (6) and the worm (9) have the same pitch and the same direction of the thread.

2. The semiconductor fluid delivery pipeline disassembly and assembly tool according to claim 1, characterized in that, The first clamping member (5) includes two opposing first buckle plates (501). The first buckle plate (501) is arc-shaped. The middle part of the first buckle plate (501) is fixedly connected to the slide (7). Both ends of the first buckle plate (501) are fixed with first ear plates (502). The two opposing first ear plates (502) are connected by bolts.

3. The semiconductor fluid delivery pipeline disassembly and assembly tool according to claim 1, characterized in that, The second clamping member (8) includes two opposing second buckle plates (801). The second buckle plates (801) are arc-shaped. The middle part of the second buckle plates (801) is fixedly connected to the slide (7). The two ends of the second buckle plates (801) are fixed with second ear plates (802). The two opposing second ear plates (802) are connected by bolts.

4. The semiconductor fluid delivery pipeline disassembly and assembly tool according to claim 1, characterized in that, Flanges (3) are fixed at the opposite ends of the first pipe (1) and the second pipe (2). A slot (101) is opened in the end of the first pipe (1) facing the second pipe (2). A plug ring (201) is integrally formed at the end of the second pipe (2) facing the first pipe (1). The plug ring (201) can be inserted into the slot (101).

5. The semiconductor fluid delivery pipeline disassembly and assembly tool according to claim 1, characterized in that, The central hole (18) has multiple grooves (10) on its wall. The length direction of the grooves (10) is parallel to the axial direction of the worm (9). A slider (21) is slidably arranged in the grooves (10). The slider (21) is fixedly connected to the outer edge of the inner sleeve (11).

6. The semiconductor fluid delivery pipeline disassembly and assembly tool according to claim 1, characterized in that, Both ends of the inner sleeve (11) are rotatably connected to a rotating ring (12). The rotating ring (12) is concentric with the inner sleeve (11). The two rotating rings (12) are connected to the slide block (7) through two springs (13). The lead screw (6) passes through the spring (13). One end of the spring (13) is fixedly connected to the rotating ring (12), and the other end of the spring (13) is fixedly connected to the slide block (7).

7. The semiconductor fluid delivery pipeline disassembly and assembly tool according to claim 1, characterized in that, The shaft (15) is fixedly connected to the lug (20), the shaft (15) is rotatably connected to the connecting seat (19), and the shaft (15) is concentrically fixedly connected to the worm gear (14).

8. The semiconductor fluid delivery pipeline disassembly and assembly tool according to claim 1, characterized in that, The upper end of the connecting seat (19) is provided with a limiting groove (17), which is V-shaped, and the vertical part of the ear seat (20) is located in the limiting groove (17).

9. The semiconductor fluid delivery pipeline disassembly and assembly tool according to claim 1, characterized in that, The shaft (15) and the connecting seat (19) are connected by a torsion spring.

10. The semiconductor fluid delivery pipeline disassembly and assembly tool according to claim 4, characterized in that, The outer edge of the insert ring (201) is provided with a sealing layer. After the insert ring (201) is inserted into the slot (101), the first pipe (1) and the second pipe (2) are sealed together.

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