Photocuring modified fluorocarbon resin as well as preparation method and application thereof
By introducing allyl double bonds into the side chain of fluorocarbon resin through the Williamson etherification reaction, the photocurable modified fluorocarbon resin prepared solves the problems of etching resistance and film removal of UTG etching materials, and realizes rapid UV curing and clean film removal, which is suitable for efficient production of UTG.
Patent Information
- Application Number
- CN202610690911.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-05-19
- Publication Date
- 2026-06-30
AI Technical Summary
Existing UTG etching protection materials cannot simultaneously withstand HF acid etching and NaOH alkaline etching. It is difficult to balance photocuring and etching resistance. The process is complex and costly, and the contradiction between film removal and protection is prominent.
A photocurable modified fluorocarbon resin was prepared by introducing allyl double bonds into the side chain of fluorocarbon resin using the Williamson etherification reaction. The resulting film is resistant to both HF and NaOH, and can be rapidly formed by UV curing. The film can also be cleanly removed after etching.
It achieves dual tolerance to HF and NaOH, shortens curing time, reduces energy consumption and cost, improves production efficiency, and meets the high-precision processing requirements of UTG.