Airflow generating device and method thereof

Abstract

An airflow generating device includes a first unit disposed in a first region and a second unit disposed in a second region. The first unit generates a first air pressure having a first polarity in the first region, and the second unit generates a second air pressure having a second polarity in the second region. The second polarity is opposite to the first polarity.

Description

Technical Field

[0001] This invention relates to an airflow generating device and method, and more particularly to an airflow generating device and method capable of providing significant airflow. Background Technology

[0002] Unless otherwise specified, the practices described below are not prior art within the scope of this application and should not be included in the prior art.

[0003] Air-pulse generating (APG) devices have been developed to generate air pulses. Besides audio applications, APG devices can also provide airflow applications. In recent years, APG devices manufactured using Micro-Electro-Mechanical Systems (MEMS) have attracted significant market attention due to their small size and ability to generate airflow. The market demand for strong airflow is growing to improve performance in areas such as heat dissipation. However, providing strong airflow remains a challenge for miniature devices manufactured using MEMS.

[0004] Therefore, designing MEMS devices that can provide significant airflow is a pressing issue in this field. Summary of the Invention

[0005] Therefore, the present invention mainly provides an airflow generating device and method to improve the shortcomings of the prior art.

[0006] This invention provides an airflow generating device, including a first unit disposed in a first region and a second unit disposed in a second region; wherein the first unit generates a first air pressure having a first polarity in the first region, and the second unit generates a second air pressure having a second polarity in the second region; wherein the second polarity is opposite to the first polarity.

[0007] This invention provides an airflow generation method for an airflow generation device, comprising a first unit generating a first air pressure having a first polarity in a first region; and a second unit generating a second air pressure having a second polarity in a second region; wherein the airflow generation device includes the first unit and the second unit; and wherein the second polarity is opposite to the first polarity.

[0008] This invention provides an airflow generating device, including a membrane structure for moving to push or pull a volume above the membrane structure to generate positive or negative pressure; a pair of lobes, including a first lobe and a second lobe facing each other, for moving in a differential mode to form a virtual valve; wherein the differential mode movement of the lobes is synchronized with the movement of the membrane structure; wherein an airflow is formed when the virtual valve is opened. Attached Figure Description

[0009] Figure 1 This is a top view schematic diagram of an airflow generating device according to an embodiment of the present invention.

[0010] Figure 2 This is a cross-sectional schematic diagram of an airflow generating device according to an embodiment of the present invention.

[0011] Figure 3 This is a schematic diagram of the diaphragm motion of an airflow generating device according to an embodiment of the present invention.

[0012] Figure 4 This is a schematic diagram of the driving signal according to an embodiment of the present invention.

[0013] Figure 5 This is a schematic diagram of an airflow generating device according to an embodiment of the present invention.

[0014] Figure 6 This is a schematic diagram of an airflow generating device according to an embodiment of the present invention.

[0015] Figure 7 This is a schematic diagram of an airflow generating device according to an embodiment of the present invention.

[0016] Figure 8 This is a schematic diagram of the appearance of an airflow generating device according to an embodiment of the present invention.

[0017] Figure 9 This is a schematic diagram of an airflow generating device according to an embodiment of the present invention.

[0018] Figure 10 This is a schematic diagram of an airflow generating device according to an embodiment of the present invention.

[0019] Figure 11 This is a schematic diagram of an airflow generating device according to an embodiment of the present invention.

[0020] List of reference numerals

[0021] 1, 1', 2, 2', 3, 34, 4, 5, 6: Airflow generating device

[0022] 10, 20, 30, 40: Units

[0023] 10f, 20f: Membrane structure

[0024] 10p, 20p, 41v, 42m, 43v, 51v, 52m, 53m, 54m, 55v, 61v, 62m, 63m, 64v: Pebble pairs

[0025] 101, 103, 201, 203: Lobes

[0026] 112, 212: Virtual valves

[0027] 12: Opening

[0028] 140, 340: Cover structure

[0029] Rg1, Rg2: Regions

[0030] rg11, rg12, rg21, rg22: Subregions

[0031] AF1, AF2, AF3, AF4: Airflow

[0032] P+, P-: Air pressure

[0033] t1, t2, t3, t4: Time points

[0034] SM1, SM2, +SV1, -SV1, +SV2, -SV2: Signals

[0035] S1, S2: State

[0036] X, Y, Z, X1, X2: Coordinate directions Detailed Implementation

[0037] The contents of U.S. Patent No. 12,356,141 are incorporated herein by reference in their entirety and form part of this specification.

[0038] Figure 1 This is a top view schematic diagram of an airflow generating device 1 (particularly the diaphragm portion) according to an embodiment of the present invention. Figure 2 This is a cross-sectional schematic diagram of an airflow generating device 1 (particularly the diaphragm portion) according to an embodiment of the present invention. Figure 3This is a schematic diagram of the membrane movement of an airflow generating device 1 (including a cover structure 140) according to an embodiment of the present invention. The airflow generating device 1 includes a first unit 10 and a second unit 20. Units 10 and 20 are both air-pulse generating (APG) devices manufactured using MicroElectroMechanical Systems (MEMS) technology, and their structures are similar to those described in US Patent No. 12,356,141. The first unit 10 is disposed in a first region Rg1 (or region 1), and the second unit 20 is disposed in a second region Rg2 (or region 2). As described below, the present invention utilizes one or more cells in region 1 and one or more cells in region 2 to generate an air pressure difference, thereby generating airflow.

[0039] Specifically, unit 10 or 20 includes a membrane structure (or diaphragm) 10f or 20f. Figure 1 In the embodiments shown, the film structure 10f or 20f includes a flap pair 10p or 20p, and the flap pair 10p or 20p includes a first flap 101 or 201 and a second flap 103 or 203 disposed opposite to each other.

[0040] The 10p or 20p slice pair can receive common-mode signals SM1 or SM2 (also known as modulation driving signals) for (first or second) common-mode motion. The 10p or 20p slice pair can also receive a pair of differential-mode signals ±SV1 or ±SV2 for (first or second) differential-mode motion. Figure 1 and Figure 2 In the illustrated embodiment, the flaps simultaneously perform common-mode and differential-mode motions at 10p or 20p. In practice, the diaphragm motion of the flaps at 10p or 20p can be considered as a superposition or combination of common-mode and differential-mode motions.

[0041] In one embodiment, such as Figure 2 As shown, the 10p or 20p flaps receive differential mode signals ±SV1 or ±SV2 through multiple top electrodes of the corresponding multiple actuators, and receive common mode signals SM1 or SM2 through multiple bottom electrodes of the corresponding multiple actuators.

[0042] For a first virtual valve 112 or a second virtual valve 212, the flaps 10p or 20p, having oppositely arranged flaps 101 or 201 and flaps 103 or 203, perform a first or second differential mode movement. When the displacement difference between flaps 101 or 201 and flaps 103 or 203 is greater than the flap thickness or diaphragm thickness, the first virtual valve 112 or the second virtual valve 212 is considered "open". When the displacement difference between flaps 101 or 201 and flaps 103 or 203 is less than the flap thickness or diaphragm thickness, the first virtual valve 112 or the second virtual valve 212 is considered "closed".

[0043] In one embodiment, as described in U.S. Patent No. 12,356,141, the virtual valve is closed during the transition of differential mode motion. This means that the virtual valve is closed during the transition time period when the first and second flaps are in differential mode motion, but is not limited thereto. In one embodiment, the virtual valve may be closed corresponding to the reversal of the flap or diaphragm motion under differential mode motion, which is also within the scope of this invention.

[0044] The operating principles of each unit can be found in US Patent No. 12,356,141, but are not limited thereto.

[0045] Figure 3 A cover structure 140 for covering a pair of 10p or 20p lobes is illustrated. In the cover structure 140, an opening 12 is formed between a first region Rg1 and a second region Rg2. The opening 12 may be elongated (e.g., ...). Figure 8 (As shown). Figure 1 The projection of opening 12 is also shown, which is located between the first region Rg1 and the second region Rg2.

[0046] Figure 3 The diagram illustrates the diaphragm motion of an airflow generating device 1 according to an embodiment of the present invention at times t1, t2, t3, and t4.

[0047] At time t1, the first unit 10 or the first flap pair 10p undergoes an upward common-mode motion and a first differential-mode motion, causing the first virtual valve 112 to close. The second unit 20 or the second flap pair 20p undergoes a downward common-mode motion and a second differential-mode motion, causing the second virtual valve 212 to open. The upward first common-mode motion compresses the first volume of the first region Rg1 or the first volume above the first region Rg1, creating a positive air pressure P+ within or above the first region Rg1. The downward second common-mode motion expands the second volume of the second region Rg2 or the second volume above the second region Rg2, creating a negative air pressure P- within or above the second region Rg2. The second differential-mode motion causes the second virtual valve 212 to open, thereby allowing airflow AF1 to flow in the +Z direction through openings 212, 12.

[0048] At time t2, the first unit 10 or the first flap pair 10p undergoes a downward first common-mode motion and a first differential-mode motion, causing the first virtual valve 112 to open. The second unit 20 or the second flap pair 20p undergoes an upward second common-mode motion and a second differential-mode motion, causing the second virtual valve 212 to close. The upward second common-mode motion compresses the second volume of the second region Rg2 or the second volume above the second region Rg2, creating a positive air pressure P+ within or above the second region Rg2. The downward first common-mode motion expands the first volume of the first region Rg1 or the first volume above the first region Rg1, creating a negative air pressure P- within or above the first region Rg1. The first differential-mode motion causes the first virtual valve 112 to open, thereby allowing airflow AF2 to flow in the +Z direction through openings 112, 12.

[0049] At time t3, the first unit 10 or the first flap pair 10p undergoes an upward common-mode motion and a first differential-mode motion, causing the first virtual valve 112 to close. The second unit 20 or the second flap pair 20p undergoes a downward common-mode motion and a second differential-mode motion, causing the second virtual valve 212 to open. The upward first common-mode motion compresses the first volume of the first region Rg1 or the first volume above the first region Rg1, creating a positive air pressure P+ within or above the first region Rg1. The downward second common-mode motion expands the second volume of the second region Rg2 or the second volume above the second region Rg2, creating a negative air pressure P- within or above the second region Rg2. The second differential-mode motion causes the second virtual valve 212 to open, thereby allowing airflow AF3 to flow in the +Z direction through openings 212, 12.

[0050] At time t4, the first unit 10 or the first flap pair 10p undergoes a downward common-mode motion and a first differential-mode motion, causing the first virtual valve 112 to open. The second unit 20 or the second flap pair 20p undergoes an upward common-mode motion and a second differential-mode motion, causing the second virtual valve 212 to close. The upward second common-mode motion compresses the second volume of the second region Rg2 or the second volume above the second region Rg2, creating a positive air pressure P+ within or above the second region Rg2. The downward first common-mode motion expands the first volume of the first region Rg1 or the first volume above the first region Rg1, creating a negative air pressure P- within or above the first region Rg1. The first differential-mode motion causes the first virtual valve 112 to open, thereby allowing airflow AF4 to flow in the +Z direction through openings 112, 12.

[0051] Figure 3 The diaphragm motion shown can be achieved by applying Figure 4 This is achieved using the (driving) signals SM1, SM2, ±SV1, and ±SV2 shown. The signal set (SM...) 1 / 2 ±SV 1 / 2 (See US Patent No. 12,356,141.) The differential frequency of the differential signal ±SV can be half (or even a quarter) of the common frequency of the common signal SM.

[0052] exist Figure 4 In the illustrated embodiment, the differential mode signal ±SV1 and the differential mode signal ±SV2 may have a phase difference of π / 4 (but are not limited thereto); the common mode signal SM1 and the common mode signal SM2 may have a phase difference of π / 2 (but are not limited thereto).

[0053] Figures 5 to 7 This is a top view schematic diagram of airflow generating devices 1', 2, 2' and 3 (particularly the diaphragm portion) according to an embodiment of the present invention. Airflow generating devices 1, 1', 2 or 2' may be divided into only two regions. For airflow generating devices 1, 1', 2 or 2', one or more units disposed in region 1 and receiving a first signal set (SM1, ±SV1) can be considered as one or more first units, and one or more units disposed in region 2 and receiving a second signal set (SM2, ±SV2) can be considered as one or more second units.

[0054] exist Figure 5 A slit is formed between the first and second lobes arranged opposite each other in the first or second unit of the airflow generating device 1'. This slit is perpendicular to the opening 12 and is also within the scope of this invention.

[0055] exist Figure 6Region 1 may have multiple first units, and region 2 may have multiple second units. These first or second units may be arranged in an array, which is also within the scope of this invention.

[0056] exist Figure 7 Multiple units receiving a first signal set (SM1, ±SV1) may be adjacent to multiple units receiving a second signal set (SM2, ±SV2) in a first direction (e.g., X1) and a second direction (e.g., X2) (and vice versa), wherein the first direction is perpendicular to the second direction. For example, multiple first units 10 of a sub-region rg11 of region 1 are adjacent to multiple second units 20 of a sub-region rg21 of region 2 in the first direction X1, and multiple first units 10 of sub-region rg11 of region 1 are adjacent to multiple fourth units 40 of a sub-region rg22 of region 2 in the second direction X2 (perpendicular to the first direction X1). Similarly, multiple third units 30 of a sub-region rg12 of region 1 are adjacent to multiple fourth units 40 of sub-region rg22 of region 2 in the first direction X1, and multiple third units 30 of sub-region rg12 of region 1 are adjacent to multiple second units 20 of sub-region rg21 of region 2 in the second direction X2.

[0057] In one embodiment, a plurality of first units in subregion rg11 of region 1 and a plurality of third units in subregion rg12 of region 1 all receive a first signal set (SM1, ±SV1), and a plurality of second units in subregion rg21 of region 2 and a plurality of fourth units in subregion rg22 of region 2 all receive a second signal set (SM2, ±SV2).

[0058] Multiple openings 12 can be provided between region 1 and region 2. Specifically, the openings 12 can be provided between sub-region rg11 of region 1 and sub-region rg21 of region 2, between sub-region rg11 of region 1 and sub-region rg22 of region 2, between sub-region rg12 of region 1 and sub-region rg22 of region 2, and / or between sub-region rg12 of region 1 and sub-region rg21 of region 2.

[0059] Please note, Figure 7 For illustrative purposes only. Each sub-region (e.g., rg11, rg12, rg21, rg22) may contain only one unit, which is also within the scope of this invention.

[0060] Figure 8 This is a schematic diagram of the external appearance of an airflow generating device 34 according to an embodiment of the present invention. The airflow generating device 34 includes a cover structure 340 (e.g., a lid). A plurality of openings 12 may be formed in the cover structure 340, and the openings 12 may be elongated shapes. These elongated openings 12 can divide the airflow generating device 34 into sections. Figure 7The sub-regions rg11, rg12, rg21, and rg22 shown are covered by a cover structure 340. Figure 7 The airflow generating device 3 shown is disposed above it to form an airflow generating device 34.

[0061] One advantage of this invention is that the airflow (volume) of the invention can be increased simply by increasing the number of units and arranging these units and openings (especially opening 12) to extend in directions X1 and / or X2. This expansion method is more flexible in design to meet various requirements, and compared with the previous architecture, it is more reliable to assembly errors and easier to implement in an array.

[0062] Another advantage of the present invention compared to previous designs is that the dual differential mode (e.g., airflow generating device 34) has less ultrasonic energy leakage, which can result in better airflow performance.

[0063] For example, three configurations were compared in the simulation. The simulation considered a unit arrangement similar to airflow generating device 3. The first configuration is "common-mode," where all units receive a common signal set (SM, ±SV) (subscripts omitted here). The second configuration is "differential-mode movement," where units in subregions rg11 and rg22 (e.g., units 10 and 40) receive a first signal set (SM1, ±SV1), while units in subregions rg21 and rg12 (e.g., units 20 and 30) receive a second signal set (SM2, ±SV2). The third configuration is "double-differential-mode," where units in subregions rg11 and rg12 (e.g., units 10 and 30) receive a first signal set (SM1, ±SV1), while units in subregions rg21 and rg22 (e.g., units 20 and 40) receive a second signal set (SM2, ±SV2).

[0064] In the simulations, the "common mode," "differential mode," and "dual differential mode" generated airflow (volume rate) of 45 cc / s, 54 cc / s, and 58 cc / s, respectively. Therefore, in terms of airflow or volume rate performance, the "differential mode" configuration (corresponding to this invention) is superior to the "common mode" (which corresponds to a prior design and can be considered an extension of US Patent No. 12,356,141). Furthermore, the "dual differential mode" configuration is even superior to the "differential mode" configuration. In other words, this confirms that both the "differential mode" and "dual differential mode" improve airflow or volume rate performance compared to existing technologies.

[0065] Please note that in the above embodiment, a pair of petals (simultaneously) undergoes common-mode motion and differential-mode motion, but the present invention is not limited thereto.

[0066] Figures 9 to 11 This is a schematic diagram of the airflow generating devices 4 to 6 according to an embodiment of the present invention.

[0067] exist Figure 9 The airflow generating device 4 includes a pair of flaps 41v, 42m, and 43v. The flap pair 42m (only or primarily) undergoes common-mode motion to push or pull the volume above or below it, thereby creating (especially within the illustrated chamber) a positive air pressure P+ and / or a negative air pressure P-. The flap pairs 41v and 43v (only or primarily) undergo differential-mode motion. The common-mode motion of the flap pair 42m is synchronized in time with the differential-mode motion of the flap pairs 41v and 43v. Therefore, airflow can be generated to flow into or out of the airflow generating device 4.

[0068] In one embodiment, the differential mode frequency can be half or a quarter of the common mode frequency, so that the opening can always be at high or low pressure in the housing chamber, thereby realizing one-direction airflow pumping.

[0069] In one embodiment, the surface of the chamber can be attached to a heat source or a fin structure, so that the air inside the chamber can be heated by an external heat source and blown away, and the heat from the heat source can also be dissipated.

[0070] exist Figure 10 The airflow generating device 5 includes flap pairs 51v, 52m, 53m, 54m, and 55v. The flap pairs 52m, 53m, and 54m (either alone or primarily) undergo common-mode motion to push or pull the volume above them, thereby creating positive air pressure P+ and / or negative air pressure P-. The flap pairs 51v and 55v (either alone or primarily) undergo differential-mode motion, which is synchronized with the common-mode motion.

[0071] The pressure and airflow within the chamber are similar to a forced swirling system, which helps to increase the equivalent heat convection coefficient of the air within the chamber. When the top surface is attached to a heat source, it helps to expel higher temperatures.

[0072] exist Figure 11The airflow generating device 6 includes flap pairs 61v, 62m, 63m, and 64v. The flap pairs 62m and 63m (either alone or primarily) undergo common-mode motion to push or pull the air above them, thereby creating a positive air pressure P+ or a negative air pressure P-. The flap pairs 61v and 64v (either alone or primarily) undergo differential-mode motion, which is synchronized with the common-mode motion.

[0073] Utilizing the acoustic modes within the chamber, two push-pull flap pairs, 62m and 63m, can drive the chamber pressure to acoustic resonance. Airflow is generated by synchronizing the valve opening time with the ultrasonic acoustic pressure difference. Having an even number of flap pairs performing common-mode motion (e.g., 62m and 63m) or an even number of flap pairs performing differential-mode motion (e.g., 61V and 64V) facilitates energy recycling in the electrical / mechanical / acoustic domains, thereby improving system efficiency.

[0074] The above description is only a preferred embodiment of the present invention. All equivalent changes and modifications made in accordance with the claims of the present invention should be included within the scope of the present invention.

Claims

1. An airflow generating device, comprising: The first unit is located in the first area; as well as A second unit is set in a second region, and the first unit is set in a corresponding manner to the second unit; The first unit generates a first air pressure with a first polarity in the first region, and the second unit generates a second air pressure with a second polarity in the second region. The second polarity is opposite to the first polarity.

2. The airflow generating device as described in claim 1, wherein The first unit includes a first membrane structure, and the second unit includes a second membrane structure; The first membrane structure moves in a first direction, and the second membrane structure moves in a second direction, which is opposite to the first direction.

3. The airflow generating device as described in claim 1, wherein, The first unit includes a first pair of lobes, and the second unit includes a second pair of lobes; Wherein, at least one of the first lobe pair and the second lobe pair includes a first lobe and a second lobe that are opposite to each other.

4. The airflow generating device as described in claim 3, in, The first lobe pair undergoes a first common-mode motion, and the second lobe pair undergoes a second common-mode motion; The first lobe pair performs the first common-mode motion to move in a first direction, and the second lobe pair performs the second common-mode motion to move in a second direction, which is opposite to the first direction.

5. The airflow generating device as described in claim 3, in, The first lobe performs a first differential mode motion to form a first virtual valve; The second lobe performs a second differential mode motion to form a second virtual valve; When the first virtual valve is in the open state, the second virtual valve is in the closed state.

6. The airflow generating device as described in claim 3, in, The first lobe performs a first common-mode motion and a first differential-mode motion to form a first virtual valve; The second lobe pair performs a second common-mode motion and a second differential-mode motion to form a second virtual valve; Specifically, when the first lobe pair performs the first common-mode motion to move in a first direction and compress the volume above the first lobe pair, the second virtual valve is in the open state.

7. The airflow generating device as described in claim 1, in, At least one of the first unit and the second unit includes a pair of lobes; The lobes undergo a common-mode motion to compress or expand the volume above them. The flaps undergo a differential motion to form a virtual valve. The lobe simultaneously performs the common-mode motion and the differential-mode motion.

8. The airflow generating device as described in claim 7, in, The virtual valve is closed when the common-mode motion of the flap pair moves in a first direction; Specifically, when the common-mode motion of the flap pair moves in a second direction, the virtual valve is opened, and the second direction is opposite to the first direction.

9. The airflow generating device as described in claim 7, in, The virtual valve is closed during the transition of the differential motion between the first and second lobes.

10. The airflow generating device as claimed in claim 1, in, The first unit includes a first pair of lobes, and the second unit includes a second pair of lobes; The first lobe compresses the first volume above the first region, and the first virtual valve formed by the first lobe is closed. The second lobes expand the second volume above the second region, and the second virtual valve formed by the second lobes is open.

11. The airflow generating device as claimed in claim 1, in, At least one of the first unit and the second unit includes a pair of lobes; The lobe receives a common-mode signal and a pair of differential-mode signals.

12. The airflow generating device as claimed in claim 1, in, A single-lobe chip receives a common-mode signal corresponding to a common-mode frequency and a pair of differential-mode signals corresponding to a differential-mode frequency. The differential mode frequency is half or a quarter of the common mode frequency.

13. The airflow generating device as described in claim 1, in, The first unit includes a first pair of lobes, and the second unit includes a second pair of lobes; The first lobe pair receives a first differential signal, and the second lobe pair receives a second differential signal. The first differential signal and the second differential signal have a phase difference of π / 4.

14. The airflow generating device as claimed in claim 1, in, The first unit includes a first pair of lobes, and the second unit includes a second pair of lobes; The first lobe pair receives a first common-mode signal, and the second lobe pair receives a second common-mode signal. The first common-mode signal and the second common-mode signal have a phase difference of π / 2.

15. The airflow generating device as claimed in claim 1, further comprising: Multiple first units are located in this first region; as well as Multiple second units are located in this second area.

16. The airflow generating device as claimed in claim 1, further comprising: A cover structure is disposed above the first unit and the second unit.

17. The airflow generating device as claimed in claim 16, in, An opening is formed between the first region and the second region.

18. The airflow generating device as claimed in claim 17, in, The opening is elongated.

19. The airflow generating device as claimed in claim 1, further comprising: Unit 3 and Unit 4; The first unit is located in a first sub-region of the first region; The second unit is located in a first sub-region of the second region; The third unit is located in a second sub-region of the first region; The fourth unit is located in a second sub-region of the second region; Wherein, the first sub-region of the first region is adjacent to the first sub-region of the second region in a first direction; Wherein, the first sub-region of the first region is adjacent to the second sub-region of the second region in a second direction; The first unit and the third unit generate the first air pressure with the first polarity in the first region; The second unit and the fourth unit generate the second air pressure with the second polarity in the second region.

20. The airflow generating device as claimed in claim 19, in, The first unit and the third unit receive a first differential mode signal and a first common mode signal; The second unit and the fourth unit receive a second differential mode signal and a second common mode signal.

21. The airflow generating device as claimed in claim 20, in, The first differential signal and the second differential signal have a phase difference of π / 4; The first common-mode signal and the second common-mode signal have a phase difference of π / 2.

22. The airflow generating device as claimed in claim 19, further comprising: A cover structure is disposed above the first unit, the second unit, the third unit and the fourth unit.

23. The airflow generating device as described in claim 22, in, A first opening is formed between the first sub-region of the first region and the first sub-region of the second region; A second opening is formed between the first sub-region of the first region and the second sub-region of the second region.

24. The airflow generating device as claimed in claim 19, further comprising: Multiple first units are set in the first sub-region of the first region; Multiple second units are set in the first sub-region of the second region; Multiple third units are located in the second sub-region of the first region; as well as Multiple fourth units are located in the second sub-region of the second region; The plurality of first units and the plurality of third units generate the first air pressure having the first polarity in the first region; The plurality of second units and the plurality of fourth units generate the second air pressure having the second polarity in the second region.

25. A method for generating airflow, used in an airflow generating device, comprising: A first unit generates a first air pressure having a first polarity in a first region; A second unit generates a second air pressure having a second polarity in a second region; The airflow generating device includes the first unit and the second unit; The second polarity is opposite to the first polarity.

26. The airflow generation method as described in claim 25, further comprising: The first unit compresses the first volume above the first region; The second unit expands the second volume above the second region.

27. The airflow generation method of claim 25, further comprising: Actuates the first membrane structure to move in a first direction; The second membrane structure is actuated to move in a second direction; The second direction is opposite to the first direction; The first unit includes the first membrane structure, and the second unit includes the second membrane structure.

28. The airflow generation method as described in claim 25, further comprising: The first lobe undergoes a first common-mode motion in a first direction; as well as The second lobe undergoes a second common-mode motion in a second direction; as well as The second direction is opposite to the first direction; The first unit includes the first lobe pair, and the second unit includes the second lobe pair.

29. The airflow generation method as described in claim 25, further comprising: A first lobe pair is actuated using a first differential mode signal and a first common mode signal; A second lobe pair is actuated using a second differential mode signal and a second common mode signal; The first differential signal and the second differential signal have a phase difference of π / 4. The first common-mode signal and the second common-mode signal have a phase difference of π / 2.

30. An airflow generating device, comprising: A membrane structure is used to perform a movement to push or pull the volume above the membrane structure to generate positive or negative pressure. A pair of lobes, including a first lobe and a second lobe opposite to each other, is used to perform a differential motion to form a virtual valve; The differential mode motion of the lobe pair is synchronized with the motion of the membrane structure. One of the airflows is formed when the virtual valve is opened.

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